JP3860940B2 - Optical microscope - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical microscope, and more particularly to an optical microscope capable of correcting or trimming a defective portion or the like while observing and inspecting an inspection object.
[0002]
[Background]
As one of the optical microscopes, in addition to a direct observation optical system for irradiating light to an inspection object and visually observing the reflected light or transmitted light through an eyepiece lens, a laser capable of irradiating the inspection object with laser light A laser-mounted microscope equipped with a processing optical system is known. According to such a laser-mounted microscope, it is possible to directly switch from the observation optical system to the laser processing optical system when a defect portion is found, and to correct the defect portion with the laser light from the laser processing optical system.
[0003]
In the laser-mounted microscope, the observation optical path of the direct observation optical system and the laser optical path of the laser processing optical system are intersected, and a prism is disposed at a predetermined position where these optical paths intersect. The optical path of the direct observation optical system is bent by this prism, while the optical path of the laser processing optical system is a straight line that simply passes through the prism. By employing these optical paths, the direct observation optical system and the laser processing optical system can share the objective lens, so that switching from one to the other can be easily performed.
[0004]
By the way, since the prism is disposed at a predetermined position where the observation optical path of the direct observation optical system and the laser optical path of the laser processing optical system intersect, the laser light may pass through the prism during processing, and the prism may be damaged by the laser light. There is. In addition, since the laser light to be irradiated onto the inspection object is absorbed and dispersed by the prism, there is a problem that the energy of the laser light is lost and the energy utilization efficiency of the laser light is not good. The magnitude of the power of the laser beam was limited, and it was not possible to use a laser beam with a low power.
In order to solve these problems, (1) a laser beam path that does not pass through the prism is provided separately, or (2) the prism is rotated around an axis provided in the vicinity of the prism, and is moved away from the laser beam path. There has been proposed an optical microscope capable of using a laser beam with low power by being moved.
[0005]
[Problems to be solved by the invention]
However, the optical microscope according to (1) is expensive because of the increase in the number of optical components for forming another optical path. On the other hand, in the optical microscope according to (2), since the prism is rotated and moved, the posture of the prism itself changes, and the prism reproducibility when the prism is returned to the original position (the prism is the original). To return to the correct posture), and as a result, the optical axis may be shifted and the image may be blurred.
[0006]
An object of the present invention is to provide an optical microscope that can prevent image blurring and can be economically constructed by moving the prism without changing the posture of the prism.
[0007]
[Means for Solving the Problems]
The optical microscope of the present invention employs the following configuration in order to achieve the above object.
The optical microscope according to claim 1 is an observation optical system capable of irradiating an inspection object with light and observing the reflected light or transmitted light, and a laser processing optical system capable of irradiating the inspection object with laser light. An optical microscope comprising a prism disposed at a predetermined position where an observation optical path of the observation optical system and a laser optical path of the laser processing optical system intersect with each other, wherein the prism is arranged at the predetermined position and the predetermined position. Is provided with a prism moving mechanism that moves between a retraction position deviated in the orthogonal direction of the laser light path, and the prism moving mechanism includes a plurality of guide shafts provided in parallel along the moving direction of the prism; A slide block slidably provided along the guide shaft, and a prism holder fixed to the slide block and on which the prism is placed. Is configured, in the prism moving mechanism, biasing means for biasing said slide block to the guide shaft side, characterized in that provided in at least two directions perpendicular to the guide shaft.
[0008]
According to the present invention, the prism moving mechanism that translates the prism parallel to the guide shaft via the prism holder and the slide block between the predetermined position and the retracted position that deviates from the predetermined position in the orthogonal direction of the laser optical path. Therefore, the prism can be stably moved between the predetermined position and the retracted position without changing the posture of the prism itself. Therefore, it is possible to prevent image blurring due to the deviation of the optical axis. In addition, since the prism moving mechanism has a simple structure, it can be constructed economically.
Further, since the prism moving mechanism is provided with urging means for urging the slide block toward the guide shaft in at least two directions orthogonal to the guide shaft, a clearance is provided between the guide shaft and the slide block. Even if there is, the position of the clearance can be kept constant, so that the posture of the prism can be prevented from changing due to the clearance of the movable part. For this reason, the movement of the prism (between the predetermined position and the retracted position) can be reliably repeated.
[0009]
The optical microscope according to claim 2 is the optical microscope according to claim 1, wherein the slide block is provided with an optical path switching knob having an axis along a moving direction of the prism. It is what.
According to the present invention, the prism can be moved through the slide block simply by pulling or pushing the optical path switching knob, and the optical paths of the observation optical system and the laser processing optical system can be easily switched.
[0010]
According to a third aspect of the present invention, in the optical microscope according to the first or second aspect, the prism holder includes a shutter that blocks the laser light path when the prism is located at the predetermined position. Is provided.
According to the present invention, even when laser light is accidentally irradiated when the prism is installed at a predetermined position, the laser light path is blocked by the shutter. It is possible to prevent the eye of the operator from being damaged without reaching the eyepiece.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In FIG. 1, an optical microscope 1 includes a mounting table 2 that can move in two axial directions in a horizontal plane, and a column 3 that extends in the vertical direction of the mounting table 2. Among these, the microscope unit 4 is supported on the support column 3, and this microscope unit 4 is moved in the vertical direction by rotating the lifting knob 6 of the lifting device 5 provided on the support column 3 so as to be slidable in the vertical direction. It is movable.
[0013]
The microscope unit 4 includes a first housing 41 fixed to the lifting device 5 and a second housing 42 disposed above the first housing 41.
Among these, a plurality of types of objective lenses 43 having different magnifications are attached to the lower portion of the first housing 41 via a revolver 44. The revolver 44 is rotatably provided on the first housing 41, and the objective lens 43 can be selectively disposed on the common optical path P1 by rotating the revolver 44. Inside the first housing 41, the tube lens 11 and the beam splitter 12 are arranged on the common optical path P1.
An illumination light source port 45 is provided on the upper surface of the first housing 41, and the lens 13 and the mirror 14 are disposed on the illumination light path P2 along which light from the illumination light source port 45 travels. Light from the illumination light source port 45 is reflected by the mirror 14 and enters the beam splitter 12.
[0014]
A binocular tube 47 having a pair of eyepieces 46 is attached to the front surface of the second housing 42 on an observation optical path P3 that is inclined with respect to the common optical path P1. A laser oscillator 49 is attached to the upper surface of the second housing 42 via a laser adapter 48. Here, the laser beam from the laser oscillator 49 passes through the laser adapter 48 and travels along the laser beam path P4. The laser light path P4 is connected to the common light path P1 in a straight line. Inside the second housing 42, a first prism 21 disposed at the upper end of the common optical path P1, a second prism 22 adjacent to the left side of the first prism 21 in the figure, and the second prism 22 A third prism 23 adjacent to the upper portion is provided. The first prism 21 is a prism in the present invention.
By these prisms 21, 22, and 23, the observation optical path P <b> 3 is zigzag and connected to the common optical path P <b> 1. Among these, the first prism 21 is disposed at a predetermined position where the observation optical path P3 and the laser optical path P4 intersect, and the predetermined position and a retracted position deviated from the predetermined position in the orthogonal direction of the laser optical path P4. In the meantime, it can be moved by the prism moving mechanism 5.
[0015]
2 and 3, the prism moving mechanism 5 includes a substantially U-shaped holding block 55 fixed inside the second housing 42, and a first prism that is installed on the holding block 55 with a space therebetween in the vertical direction. A first guide shaft 51 and a second guide shaft 52 provided in parallel with the moving direction of 21, a slide block 53 provided so as to be slidable along the first and second guide shafts 51, 52, And a prism holder 54 on which the first prism 21 is placed.
[0016]
The slide block 53 is formed with a slide groove 53A corresponding to the first guide shaft 51 and opening to the first prism 21 side, and a slide hole 53B corresponding to the second guide shaft 52. Among these, the guide bush 56 is provided in the sliding hole 53B, and the sliding with the 2nd guide shaft 52 is made smooth. The slide block 53 is provided with an optical path switching knob 57 having an axis 57A along the moving direction of the first prism 21.
The shaft 57 </ b> A of the optical path switching knob 57 penetrates the holding block 55 and protrudes from the second housing 42. By pulling or pushing the optical path switching knob 57, the slide block 53 (that is, the first prism 21) is slid along the first and second guide shafts 51 and 52 between the holding blocks 55. The predetermined position (see FIG. 4) is when one end of the slide block 53 is in contact with one end of the holding block 55, and the retracted position is when the other end of the slide block 53 is in contact with the other end of the holding block 55. (See FIG. 5).
[0017]
The prism moving mechanism 5 is provided with urging means 58A and 58B for urging the slide block 53 in the horizontal direction and the vertical direction and toward the first and second guide shafts 51 and 52.
The biasing means 58A includes a screw hole 55A formed at a position corresponding to the first and second guide shafts 51 and 52 of the holding block 55 and in the horizontal direction, a piece 581 inserted through the screw hole 55A in order, a compression A coil spring 582 and a set screw 583 are provided. The piece 581 is in contact with the slide block 53, and the piece 581 is urged by the compression coil spring 582, so that the slide block 53 is urged toward the first and second guide shafts 51 and 52 in the horizontal direction. Is done.
The biasing means 58B includes a screw hole 53C formed in a vertical direction at a position corresponding to the upper portion of the first guide shaft 51 of the slide block 53, a piece 581 inserted through the screw hole 53C in this order, and a compression coil spring 582. And a set screw 583. The piece 581 is in contact with the first guide shaft 51, and the piece 581 is biased by the compression coil spring 582, so that the slide block 53 is biased upward.
[0018]
The prism holder 54 has a prism mounting surface 541 on which the first prism 21 is mounted, a slide block fixing surface 542 fixed to the slide block 53, and a shutter 543 that blocks the laser light path P4. Among these, on the prism mounting surface 541, an optical path hole 541A is formed so as not to obstruct the observation optical path P3.
[0019]
Next, the operation of this embodiment will be described.
First, the inspection object is visually observed by a direct observation optical system. When observing with the direct observation optical system, as shown in FIG. 4, the optical system is switched from the laser processing optical system to the direct observation optical system in advance, and the first prism 21 is moved to a predetermined position. This switching is performed by pushing the optical path switching knob 57 and moving the first prism 21 to a predetermined position along the first and second guide shafts 51 and 52 via the prism holder 54 and the slide block 53. As a result, the observation optical path P3 of the direct observation optical system is reliably formed, and visual inspection of the inspection object becomes possible. Even if the laser beam is irradiated during observation, the laser light path P4 is completely blocked by the shutter 543, so that the eyes of the operator under observation are not damaged.
[0020]
Next, the inspection object is processed by the laser processing optical system. When processing with the laser processing optical system, as shown in FIG. 5, the optical system is switched from the direct observation optical system to the laser processing optical system in advance, and the first prism 21 is moved to the retracted position. This switching is performed by pulling the optical path switching knob 57 and moving the first prism 21 along the first and second guide shafts 51 and 52 through the prism holder 54 and the slide block 53 to the retracted position. Thereby, the laser beam path P4 of the laser processing optical system is formed, and laser processing of the inspection object becomes possible. At this time, since the first prism 21 is in the retracted position deviated from the laser beam path P4, the first prism 21 is not damaged, and the laser beam to be irradiated on the inspection object is absorbed and dispersed by the first prism 21. There is nothing.
[0021]
According to this embodiment as described above, the following effects are obtained.
In other words, in the present embodiment, the first prism 21 is moved along the first and second guide shafts 51 and 52 via the prism holder 54 and the slide block 53, and the laser light path P4 is orthogonal to the predetermined position. Since the prism moving mechanism 5 that moves between the retracted position deviated in the direction is provided, the first prism 21 is stably moved between the predetermined position and the retracted position without changing the posture of the first prism 21 itself. It can be moved with. Further, since the prism moving mechanism 5 has a simple structure, it can be constructed economically.
[0022]
Since the slider block 53 of the prism moving mechanism 5 is provided with an optical path switching knob 57 having an axis 57A along the moving direction of the first prism 21, only by pulling or pushing the optical path switching knob 57, The first prism 21 can be moved via the slide block 53, and the optical paths P3 and P4 of the direct observation optical system and the laser processing optical system can be easily switched.
[0023]
Since the prism holder 54 of the prism moving mechanism 5 is provided with a shutter 543 that blocks the laser light path P4, even if the first prism 21 is positioned at a predetermined position, the laser light may be accidentally irradiated. The shutter 543 prevents the laser light from directly reaching the eyepiece 46 of the observation optical system and prevents the operator's eyes from being damaged.
[0024]
The prism moving mechanism 5 is provided with urging means 58A, 58B for urging the slide block 53 in the horizontal direction and the vertical direction and toward the first and second guide shafts 51, 52. The position of the clearance between the second guide shafts 51 and 52 and the slide block 53 can be kept constant, and the movement of the first prism 21 (between the predetermined position and the retracted position) can be performed without changing the attitude of the first prism 21. Can be repeated.
Further, in the biasing means 58A, 58B, the spring pressure of the compression coil spring 582 can be adjusted by adjusting the insertion position of the set screw 583 with respect to the screw holes 55A, 53C. It can come into contact with the slide block 53 and the first guide shaft 51.
[0025]
It should be noted that the present invention is not limited to the above-described embodiment, and modifications and improvements within a scope that can achieve the object of the present invention are included in the present invention.
For example, in the embodiment, the holding block 55 and the slide block 53 are provided with the urging means 58 that urges the slide block 53 in the horizontal direction and the vertical direction toward the first and second guide shafts 51 and 52. However, for example, all the urging means may be provided on the holding block side. Further, the urging direction is not limited to the horizontal and vertical directions, and may be urged from an oblique direction or the like. In short, the urging means for urging the slide block toward the guide shaft is orthogonal to the guide shaft. It should just be provided in at least two directions.
[0026]
In the above embodiment, the shutter 543 is provided on the prism holder 54. However, the prism holder according to the present invention is not limited to this, and the shutter may not be provided. It is desirable that it is also provided.
[0027]
In the embodiment, the slide block 57 is provided with the optical path switching knob 57, and the first prism 21 is moved by pulling or pushing the optical path switching knob 57. For example, the first prism is moved by a motor or the like. It may be moved.
[0028]
In the prism moving mechanism 5 of the above-described embodiment, the two guide shafts 51 and 52 are provided at an interval in the vertical direction. However, the guide shaft according to the present invention is not limited to this, and the guide shafts 51 and 52 are spaced in the horizontal direction. May be provided apart from each other. Further, although the two first and second guide shafts 51 and 52 are used, three or more guide shafts may be used.
[0029]
In the above embodiment, a direct observation optical system using an eyepiece is cited as the observation optical system. However, for example, by removing the laser adapter 48 and using another adapter, the observation optical system using a television image can be used. Good.
[0030]
In the above-described embodiment, light is taken in from the illumination light source port 45. For example, the light is taken into the microscope unit 4 by installing another light source on the optical path between the beam splitter 12 and the mirror 14. Also good.
[0031]
【The invention's effect】
According to the optical microscope of the present invention, the prism can be prevented from being damaged, and the energy utilization efficiency of the laser beam can be improved.
[Brief description of the drawings]
FIG. 1 is a partially broken side view showing an embodiment of an optical microscope according to the present invention.
FIG. 2 is an enlarged cross-sectional view showing a main part of the embodiment.
FIG. 3 is a plan view showing the main part.
FIG. 4 is a sectional view showing an operation (predetermined position) of the embodiment.
FIG. 5 is a cross-sectional view showing another operation (retraction position) of the embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Optical microscope 5 Prism moving mechanism 21 The 1st prism 51 and 52 which are prisms The 1st and 2nd guide shafts 53 which are guide shafts 53 Slide block 54 Prism holder 57 Optical path switching knobs 58A and 58B Energizing means 543 Shutter P3 Observation optical path P4 laser beam path

Claims (3)

An observation optical system capable of irradiating the inspection object with light and observing the reflected or transmitted light, a laser processing optical system capable of irradiating the inspection object with laser light, an observation optical path of the observation optical system and the laser An optical microscope including a prism disposed at a predetermined position where a laser beam path of a processing optical system intersects,
A prism moving mechanism is provided for moving the prism between the predetermined position and a retracted position deviating from the predetermined position in the orthogonal direction of the laser optical path, and the prism moving mechanism is parallel to the moving direction of the prism. A plurality of guide shafts provided on the slide block, a slide block slidably provided along the guide shafts, and a prism holder fixed to the slide block and on which the prism is placed ,
The optical microscope, wherein the prism moving mechanism is provided with urging means for urging the slide block toward the guide shaft in at least two directions orthogonal to the guide shaft . 2. The optical microscope according to claim 1, wherein the slide block is provided with an optical path switching knob having an axis along a moving direction of the prism. 3. The optical microscope according to claim 1, wherein the prism holder is provided with a shutter that blocks the laser light path when the prism is positioned at the predetermined position. Optical microscope to do.

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