JP3717239B2 - X-ray generator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an X-ray generator used for an X-ray source or the like in an X-ray diffractometer, and in particular, an X-ray flux generated from the surface of an anti-cathode due to electron collision is controlled in advance in the apparatus body, and then an extraction window The present invention relates to an X-ray generator that emits light from a light source.
[0002]
[Prior art]
In the conventional X-ray generator, an electron emitted from an electron gun (cathode) is collided with a counter cathode (target) to generate an X-ray flux from the surface of the counter cathode, and the generated X-ray flux is The light is emitted from an extraction window provided on the wall surface.
In general, an X-ray bundle emitted from this type of X-ray generator is used in a state in which the X-ray optical control element is used to control the beam characteristics in accordance with the application form, such as a parallel beam, a focused beam, a spectral beam, or a split beam. It is offered to.
[0003]
FIG. 6 shows an example of a system configuration when this type of X-ray generator is applied to the X-ray source of the X-ray diffractometer.
As shown in the figure, the X-ray diffractometer has a sample table 3, a diverging slit 4, a light receiving slit 5, and an X-ray detector 6 mounted on a goniometer 2 called a goniometer. The X-ray diffraction measurement is performed by irradiating the sample S mounted on the X-ray with the X-ray bundle emitted from the X-ray generator 1.
[0004]
Here, an X-ray optical control element 7 is provided in front of the diverging slit 4 on the trajectory of the X-ray bundle emitted from the X-ray generator 1, and the X-ray bundle emitted from the X-ray generator 1 is converted into the X-ray bundle. The light is focused by the line optical control element 7 and irradiated onto the surface of the sample S.
When the sample S is irradiated with the X-ray flux, the peak intensity of the diffracted X-ray is detected from the surface at a diffraction angle corresponding to the crystal structure or the like. By detecting the peak intensity with the X-ray detector 6 and measuring the diffraction angle (2θ) at which the peak intensity appears with the angle meter 2, the crystal structure and the like of the sample can be analyzed.
[0005]
[Problems to be solved by the invention]
As described above, the conventional X-ray generation apparatus generates an X-ray flux from the surface of the counter-cathode by colliding electrons emitted from the electron gun with the counter-cathode, and only emits the generated X-ray flux from the extraction window. It does not have the function of controlling the X-ray flux generated on the surface of the counter cathode.
[0006]
Therefore, in order to control the X-ray flux generated by the X-ray generator, it is necessary to dispose an X-ray optical control element separate from the X-ray generator in the atmosphere.
As described above, the X-ray optical control element disposed in the atmosphere is easily contaminated with moisture, dust, and the like contained in the atmosphere, and performance degradation regarding the control of the X-ray flux is rapid.
[0007]
In addition, since the X-ray flux is subjected to resistance by air molecules in the atmosphere, the X-ray optical path length from the extraction window of the X-ray generator to the irradiation target point (the sample surface in the above X-ray diffractometer) becomes longer. The X-ray intensity is attenuated. However, in the conventional use form, since it is necessary to arrange the X-ray optical control element in the atmosphere between the X-ray generator and the irradiation destination point, at least as much as the arrangement space of the X-ray optical control element. The optical path length of X-rays becomes long, and it is inevitable that the X-ray intensity is attenuated unnecessarily.
[0008]
Therefore, in consideration of the attenuation amount in the atmosphere, a high-intensity X-ray flux must be generated from the counter cathode, and the problem is that the power consumption is high and the operation cost is high, which is uneconomical. Had.
[0009]
The present invention has been made in view of the problems related to the X-ray optical control element used together with such an X-ray generation apparatus. By incorporating the X-ray optical control element into the X-ray generation apparatus, the X-ray optical control is achieved. To improve the durability of the device and reduce the X-ray optical path length to the X-ray irradiation target point, thereby suppressing the attenuation of the emitted X-ray bundle due to the air resistance, thereby realizing the reduction of power consumption. With the goal.
[0010]
[Means for Solving the Problems]
In order to achieve the above-described object, the present invention comprises an electron gun and a counter cathode inside a sealed apparatus body, and the electrons emitted from the electron gun collide with the counter cathode. In an X-ray generator for extracting X-ray flux generated from the surface to the outside through an extraction window, an X-ray optical control element for controlling the X-ray flux on the output trajectory of the X-ray flux generated from the counter cathode inside the apparatus main body And the X-ray bundle controlled by the X-ray optical control element is guided to the extraction window.
[0011]
Since the inside of the apparatus main body is a sealed space, it is possible to suppress the deterioration of the X-ray optical control element due to moisture or dust. Further, the X-ray flux generated on the surface of the counter cathode is controlled by an X-ray optical control element provided in the apparatus main body, and then emitted from the extraction window. For this reason, the X-ray flux emitted from the extraction window has already been controlled to the target state such as a parallel beam, a focused beam, a spectral beam, or a split beam, so an X-ray optical control element is provided in the external atmosphere. There is no need to do. Therefore, the X-ray optical path length from the extraction window of the X-ray generator to the irradiation destination point can be shortened to the necessary minimum, and the attenuation of the X-ray intensity in the atmosphere can be reduced. As a result, power consumption for generating X-rays can be suppressed.
[0012]
Here, the extraction window is preferably provided in the vicinity of the X-ray optical control element. By configuring in this way, the extraction window only needs to secure a small area that allows the X-ray bundle whose divergence is suppressed by the X-ray optical control element to be transmitted, so even when the inside of the apparatus main body is in a vacuum state, It is relatively thin and can maintain pressure resistance. In addition, since the attachment window can be made thin, it is possible to reduce the absorption loss of the X-ray flux when passing through the attachment window.
[0013]
In addition, a storage chamber that is partitioned from the space for disposing the counter cathode by a partition wall that shields at least recoil electrons and X-rays is formed inside the apparatus body, and the X-ray flux generated on the surface of the counter cathode in the partition wall It is also possible to provide an X-ray transmission hole that transmits the X-ray, the X-ray optical control element is disposed in the storage chamber, and the extraction window is provided on the wall surface of the storage chamber.
[0014]
In the main body of the apparatus, particularly around the electron collision surface of the counter cathode, recoil electrons that have been bounced off the collision surface after being emitted from the electron gun and colliding with the counter cathode are scattered. When the recoil electrons hit the X-ray optical control element and the extraction window, there are adverse effects such as the deterioration of the element and the extraction window being promoted.
Therefore, as described above, the X-ray optical control element is arranged in the storage room partitioned by the partition wall, and the extraction wall is provided on the wall surface of the storage room, so that the partition wall shields recoil electrons and controls the X-ray optical control. The element and the extraction window can be protected.
[0015]
Further, if the X-ray generator having the above-described configuration is provided with shutter means for opening and closing the X-ray transmission hole by an external operation, the X-ray transmission hole can be opened by the shutter means during standby operation without emitting the X-ray flux to the outside. , The recoil electrons slightly leaking from the X-ray bundle or X-ray transmission hole can be prevented from entering the X-ray optical control element, and deterioration of the element can be suppressed.
[0016]
In the X-ray generator of the present invention, the apparatus main body includes an X-ray generation block for mounting at least an electron gun and a counter cathode, and an X-ray optical control block for mounting at least an X-ray optical control element. In addition, the X-ray optical control block can be configured to be detachable from the X-ray generation block.
[0017]
By making the X-ray optical control block into such a unit structure, an X-ray optical control element can be built in the apparatus body as necessary, and an X-ray generator having specifications corresponding to a wide range of usage forms by users. And versatility can be expanded.
[0018]
Furthermore, in the X-ray generator of the present invention, an attachment exchange window for the X-ray optical control element may be formed in the apparatus main body, and a lid for opening and closing the attachment exchange window may be detachably attached. As a result, the X-ray optical control element can be easily attached and replaced, and maintenance and management of the X-ray optical control element are facilitated.
[0019]
As described above, the recoil electrons scattered from the collision surface after being emitted from the electron gun and colliding with the counter cathode are scattered in the apparatus main body. In the present invention in which the X-ray optical control element is arranged in such an environment, it is important to prevent the X-ray optical control element from being deteriorated by recoil electrons.
Therefore, it is preferable that the X-ray generator of the present invention is provided with anti-recoil electron protection means in the apparatus main body for avoiding collision of recoil electrons with the X-ray optical control element. This anti-recoil electron protection means can be composed of, for example, a metal member having the same potential as that of the electron gun disposed around the output trajectory of the X-ray bundle generated from the counter cathode.
[0020]
By arranging a metal member having the same potential as that of the electron gun around the output trajectory of the X-ray flux, the recoil electrons and the metal member which are going to enter the X-ray optical control element while drawing the trajectory similar to the X-ray flux are drawn. In the meantime, a repulsive force is created, and recoil electrons can be displaced from the orbit.
[0021]
The anti-recoil electron protection means may be composed of a metal member provided around the X-ray optical control element and having the same potential as the electron gun. In this way, recoil electrons that are about to enter the X-ray optical control element can be changed in trajectory by the repulsive force generated between the metal member and the collision with the X-ray optical control element is effective. Can be avoided.
[0022]
Further, the X-ray optical control element generates heat when irradiated with the X-ray flux. In the present invention, since the X-ray optical control element is disposed in a narrow apparatus body, it is also important to protect the X-ray optical control element against this heat generation. Therefore, the present invention preferably has a configuration in which the X-ray optical control element is fixed to the mounting base and cooling means is provided on the mounting base.
[0023]
Furthermore, in order to make the X-ray optical control element function effectively, it is preferable to provide an adjusting means that can adjust the position and angle of the element with respect to the incident X-ray flux by an external operation.
[0024]
The X-ray optical control element incorporated in the X-ray generator of the present invention includes various elements that convert an incident X-ray bundle into an X-ray bundle in a target state, such as a parallel beam, a focused beam, a spectral beam, or a split beam. Applicable. However, the application condition is that the X-ray optical control element has a size that can be accommodated in the apparatus main body.
[0025]
As this type of X-ray optical control element, for example, there is a multilayer mirror for condensing high efficiency. This multi-layer mirror for high light collection efficiency is a multi-layer film in which heavy elements W (tungsten) and the like and light elements Si (silicon) and the like are alternately laminated on a silicon substrate having an inner surface of an elliptic cylinder. This multilayered film can focus the X-ray beam linearly.
An X-ray optical control element having a structure in which X-rays are converted into parallel beams, focused beams, spectral beams, or split beams through a bundle tube as disclosed in JP-A-7-504491 is also applicable to the present invention. Can do.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view showing the appearance of an X-ray generator according to an embodiment of the present invention, and FIG. 2 is a plan sectional view of the same. FIG. 3 is a side sectional view of the X-ray optical control block of the apparatus as viewed from the left in FIG.
[0027]
As shown in these drawings, the X-ray generator of this embodiment includes an electron gun (cathode) 200, a rotary counter-cathode (rotary target) 201, and an X-ray optical control element 300 in the apparatus main body 100. ing.
[0028]
The apparatus main body 100 includes an X-ray generation block 101 for mounting components necessary for generating X-rays, and an X-ray optical control block 102 for mounting components necessary for controlling the generated X-rays. I know. The X-ray optical control block 102 has a unit structure that is detachable with respect to the X-ray generation block 101. For example, the X-ray optical control block 102 is integrated with the X-ray generation block 101 by using a fastener 103 such as a bolt. The apparatus main body 100 is configured. The connecting portion between the X-ray generation block 101 and the X-ray optical control block 102 preferably has a sealed structure with a seal member (not shown) such as packing interposed therebetween.
[0029]
An X-ray generation block 101 is equipped with an electron gun 200 and an anti-cathode 201. The electron gun 200 is mounted on a support base 202 formed of an insulator and is disposed so as to enter the central portion of the X-ray optical control block 102. A high voltage introduction tube 203 for connecting a high voltage cable 203 a is provided on the back surface of the X-ray generation block 101, and the filament 204 of the electron gun 200 and the counter cathode 201 are connected via the high voltage introduction tube 203. A high voltage is applied to.
The electron gun 200 has a structure in which electrons emitted from the filament 204 are focused and emitted toward the counter cathode 201.
[0030]
The counter cathode 201 is provided facing the electron gun 200 as shown in FIG. 3 and is rotated at a high speed by a drive motor 205 mounted on the outer wall of the X-ray generation block 101. This counter-cathode 201 has a target surface 201a whose peripheral surface is made of copper foil or the like. When electrons (thermoelectrons) emitted from the electron gun 200 collide with the target surface 201a, X-rays are emitted from the surface 201a. appear.
[0031]
In general, when electrons collide with the counter-cathode 201 from the normal direction, as shown in FIG. 2, X-rays can be extracted in an angle direction (two directions) of α = 6 to 10 ° with respect to the tangent line of the counter-cathode 201. It is known to be good. Therefore, in this embodiment, the X-ray optical control element 300 is arranged on the output trajectory a of the X-ray bundle extracted in the angle direction of α = 6 to 10 ° with respect to the tangent line of the counter cathode 201.
[0032]
Since the counter cathode 201 generates heat due to the collision of electrons, a cooling water circulation path (not shown) is formed inside, and the cooling water is sent to the circulation path by a cooling pump (not shown) to cool the counter cathode 201. Structure is added.
Further, the X-ray generation block 101 is provided with a vacuum pump 206 in order to make the inside of the apparatus main body 100 into a vacuum atmosphere.
[0033]
Inside the X-ray optical control block 102, storage chambers 104 and 104 for the X-ray optical control element 300 are formed in two directions for extracting X-rays from the counter cathode 201, respectively. The storage chamber 104 is partitioned from the arrangement space of the counter cathode 201 by a partition wall 105. The partition wall 105 is formed of a metal member or the like having a characteristic of shielding X-rays and recoil electrons.
Since the storage chambers 104 and 104 are also in a vacuum atmosphere like the X-ray generation block 101, a communication hole (not shown) with the X-ray generation block 101 is provided at an appropriate place where the recoil electrons of the partition wall 105 are most difficult to pass. ) Is formed.
[0034]
In the partition wall 105, an X-ray transmission hole 105a is formed so as to open the output trajectory a of the X-ray bundle generated at the counter cathode 201. Further, a rotary opening / closing shutter 106 is incorporated in the partition wall 105, and the X-ray transmission hole 105 a is opened / closed by the opening / closing shutter 106. The opening / closing shutter 106 is rotated by a driving means such as a solenoid 107. The open / close shutter 106 is also formed of a material having a characteristic of blocking X-rays and recoil electrons, similarly to the partition wall 105, and the X-ray flux generated at the counter cathode 201 when the X-ray generator is in a standby state. Is closed when it should not be output to the outside.
[0035]
A mounting base 301 for the X-ray optical control element 300 is disposed in each storage chamber 104.
FIG. 4 is a sectional view showing the structure of the mounting base 301. As shown in the figure, the mounting base 301 includes a substrate 302, a turning table 303, a Y moving table 304, an X moving table 305, a turning table 306, and an element holder 307, and is attached to the element holder. An adjustment means for adjusting the position and angle of the X-ray optical control element 300 is incorporated.
[0036]
That is, the turning table 303 is rotatable with respect to the substrate 302 via the roller bearing 308, and the rotational driving force of the motor 309 is transmitted via the warm mechanism 310 to rotate about the axis. The Y moving table 304 is mounted on the turning table 303 via a Y slider 311 extending in the lateral direction (Y direction), and the rotational driving force of the motor 312 is transmitted via the ball screw mechanism 313. It moves along the slider 311.
[0037]
The X movement table 305 is mounted on the Y movement table 304 via an X slider 314 extending in the vertical direction (X direction), and the rotational driving force of the motor 315 is transmitted via the ball screw mechanism 316. It moves along the X slider 314. The turning table 306 is mounted on the X movement table 305, transmits the rotational driving force of the motor 317 to the element holder 307 via the warm mechanism 318, and swings (swings) the holder 307 in the vertical direction.
[0038]
The X-ray optical control element 300 is mounted on the front surface of the element holder 307, and rotates, XY moves, and swings in the vertical direction by the operation of each table, and enters from the counter cathode 201. The position and angle with respect to the X-ray flux are adjusted. Each of the motors 309, 312, 315, and 317 is controlled by an external controller (not shown), so that the adjustment operation of the X-ray optical control element 300 can be performed outside the apparatus.
[0039]
The element holder 307 is formed with a cooling water circulation passage (cooling means) 301a. The cooling water is fed into the circulation passage 301a by a circulation pump (not shown), and the X-ray optical control mounted on the element holder 307 is performed. A structure for cooling the element 300 is provided. Thereby, the X-ray optical control element 300 that generates heat by the incidence of the X-ray flux can be effectively cooled, and deterioration of the element 300 can be suppressed.
[0040]
By the way, on the front surface of the X-ray optical control block 102, as shown in FIG. 1, an attachment replacement window 108 for the X-ray optical control element 300 is formed at a position facing the mounting base 301. The X-ray optical control element 300 can be attached to the element holder 307 and the element 300 can be replaced. A lid 109 can be attached to the attachment replacement window 108 using a fastener such as a screw, and is normally closed by the lid 109.
[0041]
Further, an attachment / exchange window 110 for the filament 204 is formed at a position facing the electron gun 200 on the front surface of the X-ray optical control block 102, and the filament 204 is connected to the electron gun 200 through the attachment / exchange window 110. It can be installed and replaced. The attachment replacement window 110 is also normally closed by a lid 111.
[0042]
An X-ray bundle extraction window 112 is provided on the wall surface of the X-ray optical control block 102 that forms the storage chamber 104. The extraction window 112 is located in the vicinity of the X-ray optical control element 300 and emits the X-ray bundle controlled by the X-ray optical control element 300 to the outside. The X-ray flux passing through the extraction window 112 is already suppressed by the X-ray optical control element 300. Therefore, the X-ray flux can be sufficiently passed even if it is formed in a relatively small area. In addition, sufficient strength can be ensured even if the wall is thin corresponding to a small area. Note that the extraction window 112 is made of a material such as beryllium with little X-ray absorption.
[0043]
On the other hand, as shown in FIG. 2, a part of the output trajectory a of the X-ray bundle generated at the counter cathode 201 is provided with a recoil electron protection plate 113 around it. The anti-recoil electron protection plate 113 is formed of a metal plate, and is electrically connected to the electron gun 200 so as to have the same potential as the electron gun 200. The anti-recoil electron protection plate 113 may be formed integrally with the electron gun 200.
[0044]
Recoil electrons scattered around after colliding with the counter cathode 201 are prevented from entering the storage chamber 104 by the partition wall 105 described above, but the X-ray transmission hole 105a of the partition wall 105 along the output trajectory a of the X-ray bundle. The recoil electrons jumping into the barrier layer 105 cannot be shielded by the partition wall 105. Therefore, the recoil-electron protection plate 113 having the same potential as that of the electron gun 200 is provided around the output trajectory a of the X-ray bundle so that the recoil electrons deviate from the trajectory a.
[0045]
The X-ray generator configured as described above generates an X-ray flux from the target surface of the counter-cathode 201 when electrons emitted from the electron gun 200 collide with the counter-cathode 201. The X-ray bundle passes through the X-ray transmission hole 105a of the partition wall 105, enters the storage chamber 104, enters the X-ray optical control element 300 disposed in the storage chamber 104, and is collimated, focused, spectral, or split beam. The X-ray flux in a state according to the purpose is controlled to exit from the extraction window 112 to the outside. As described above, the X-ray flux is controlled in a state corresponding to the purpose in the apparatus, and therefore it is not necessary to arrange the X-ray optical control element 300 in the atmosphere. Therefore, the X-ray optical path length from the extraction window 112 of the X-ray generator to the irradiation destination point can be shortened to the minimum necessary, and attenuation of the X-ray intensity in the atmosphere can be reduced. As a result, power consumption for generating X-rays can be suppressed.
[0046]
FIG. 5 shows an example of a system in which the X-ray generator of the present invention is applied to an X-ray diffractometer. As shown in the figure, since it is not necessary to arrange an X-ray optical control element between the X-ray generator 1 of the present invention and the sample S which is the irradiation target point of the X-ray bundle, It can be disposed close to the sample S, and the intensity loss of the X-ray flux due to air resistance in the atmosphere can be reduced.
[0047]
In addition, it is not limited to this embodiment mentioned above, Of course, the specific shape, specification material, structure, etc. of each component can be appropriately changed in design.
In addition, anti-recoil electron protection means made of a metal member having the same potential as that of the electron gun 200 is disposed around the X-ray optical control element 300 as necessary, and is generated between the metal member and the recoil electrons. The recoiling force may suppress the recoil electrons from entering the X-ray optical control element 300. For example, by forming the element holder 307 of the above-described embodiment with a metal member and electrically connecting it to the electron gun 200, it is possible to provide a function as anti-recoil electron protection means.
[0048]
【The invention's effect】
As described above, since the X-ray generator of the present invention incorporates the X-ray optical control element inside, it can emit the X-ray bundle controlled to the target state, and therefore the X-ray optical control element is arranged outside. Therefore, the X-ray optical path length to the X-ray irradiation target point can be shortened, and the attenuation of the emitted X-ray bundle due to the air resistance can be suppressed. Further, as a result of housing the X-ray optical control element in the apparatus main body, it is possible to suppress the deterioration of the element and improve the durability.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an external appearance of an X-ray generator according to an embodiment of the present invention.
FIG. 2 is a plan sectional view of the apparatus.
FIG. 3 is a side sectional view of the X-ray optical control block of the same apparatus as viewed from the left in FIG.
FIG. 4 is a cross-sectional view showing a structure of a mounting base incorporated in the apparatus.
FIG. 5 is a schematic diagram showing a system example in which the X-ray generator of the present invention is applied to an X-ray diffractometer.
FIG. 6 is a schematic diagram showing a system example of an X-ray diffraction apparatus using a conventional X-ray generation apparatus.
[Explanation of symbols]
100: apparatus main body 101: X-ray generation block 102: X-ray optical control block 104: storage chamber 105: partition wall 105a: X-ray transmission hole 106: opening / closing shutter 107: solenoid 108: mounting replacement window 109: lid 110: mounting replacement Window 111: Lid 112: Extraction window 113: Anti-recoil electron protection plate 200: Electron gun 201: Anti-cathode 204: Filament 205: Drive motor 206: Vacuum pump 300: X-ray optical control element 301: Mounting base

Claims (10)

An electron gun and a counter cathode are provided inside the sealed apparatus main body, and electrons emitted from the electron gun collide with the counter cathode, and at that time, an X-ray bundle generated from the surface of the counter cathode is extracted from the extraction window to the outside. In the emitted X-ray generator,
An X-ray optical control element for controlling the X-ray flux is provided inside the apparatus main body and on an output trajectory of the X-ray flux generated from the counter cathode, and the X-ray flux controlled by the X-ray optical control element is extracted. Lead to the window ,
In addition, the apparatus main body is provided with anti-recoil electron protection means made of a metal member having the same potential as that of the electron gun and for avoiding collision of recoil electrons with the X-ray optical control element. X-ray generator. The X-ray generator according to claim 1,
An X-ray generator, wherein the extraction window is provided in the vicinity of the X-ray optical control element. The X-ray generator according to claim 1 or 2,
A storage chamber partitioned from the space for disposing the counter-cathode by a partition that shields at least recoil electrons and X-rays is formed inside the apparatus main body, and an X-ray bundle generated on the surface of the counter-cathode is formed in the partition Providing an X-ray transmission hole that transmits
The X-ray optical control device is disposed in the storage chamber, and the extraction window is provided on a wall surface of the storage chamber. The X-ray generator according to claim 3,
An X-ray generator comprising shutter means for opening and closing the X-ray transmission hole by an external operation. In the X-ray generator as described in any one of Claims 1 thru | or 4,
The apparatus main body includes at least an X-ray generation block for mounting the electron gun and the counter cathode, and an X-ray optical control block for mounting at least the X-ray optical control element,
The X-ray optical control block has a unit structure that is detachable from the X-ray generation block. In the X-ray generator according to any one of claims 1 to 5,
An X-ray generation apparatus characterized in that an attachment exchange window for the X-ray optical control element is formed in the apparatus body, and a lid for opening and closing the attachment exchange window is detachably attached. In the X-ray generator as described in any one of Claims 1 thru | or 6 ,
It said pair recoil protection means, X-rays generating apparatus characterized by being arranged around the output trajectory of the X-ray flux generated from the anticathode. In the X-ray generator as described in any one of Claims 1 thru | or 6 ,
It said pair recoil protection means, X-rays generating apparatus characterized by digits set around the X-ray optical control element. In the X-ray generator according to any one of claims 1 to 8 ,
An X-ray generation apparatus characterized in that the X-ray optical control element is fixed to a mounting base and a cooling means is provided on the mounting base. In the X-ray generator according to any one of claims 1 to 9 ,
An X-ray generation apparatus comprising an adjusting means capable of adjusting a position and an angle of the X-ray optical control element with respect to an incident X-ray bundle by an external operation.

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