JP3752501B2 - Substrate holding device - Google Patents

Description

[0001]
【Technical field】
The present invention relates to a substrate holding device that holds a large glass substrate of a flat panel display (FPD) such as a liquid crystal display or an organic EL display.
[0002]
[Background]
Japanese Patent Application Laid-Open No. 2000-7146 describes a glass substrate holder that holds a glass substrate (a semiconductor device substrate including a plastic substrate) of a flat panel display (FPD) such as a liquid crystal display or an organic EL display. The glass substrate holder includes a holding frame that holds the glass substrate by suction, a transparent member that closes the transmission illumination opening of the holding frame, and a plurality of support pins that are erected on the upper surface of the transparent member to support the glass substrate. A glass substrate holder made of is described.
[0003]
In this glass substrate holder, a thin glass substrate is placed on a plurality of support pins, and only the periphery of the glass substrate is adsorbed and held on a holding frame. The center part bends or vibrates.
[0004]
Further, with the increase in size of the glass substrate, a substrate holding device shown in FIG. 10 has been proposed. The substrate holder 1 is formed in a frame shape. A plurality of prismatic holding bases 2 are installed in the opening of the substrate holder 1. A plurality of support pins 3 are arranged and fixed in a row at predetermined intervals on the upper surface of the holding table 2.
[0005]
A plurality of suction members (suction pads) 5 for sucking and holding the glass substrate 4 are provided on the periphery of the frame portion of the substrate holder 1. These suction members 5 are connected to a suction tube (not shown) and perform a suction action upon receiving a suction operation of a suction pump. A plurality of reference pins 6 and a plurality of pressing pins 7 are provided on the periphery of the frame portion of the substrate holder 1.
[0006]
When the surface inspection of the glass substrate 4 is performed, the glass substrate 4 is placed on the substrate holder 1, pressed against the plurality of reference pins 6 by the plurality of pressing pins 7, and set to the reference position. Thereafter, the glass substrate 4 is sucked and fixed onto the substrate holder 1 by a plurality of suction members 5.
[0007]
However, when the thin glass substrate 4 is pressed against the reference pin 6 by the pressing pin 7, the central portion of the glass substrate 4 may float. Further, when the substrate holder 1 is swung for macro inspection, the central portion of the glass substrate 4 is turned up and down to vibrate greatly, or vibration occurs in the central portion of the glass substrate 4 due to a down flow in a clean room or the like. Sometimes.
[0008]
Thus, if the central part of the glass substrate 4 is rolled up and down and vibrates greatly, the defect will shake and it will be difficult to observe. Further, when the glass substrate 4 is observed using a microscope, if the glass substrate 4 is lifted, the distance between the objective lens and the surface of the glass substrate 4 changes when the observation position of the microscope is vibrated, resulting in defocusing. Arise. Further, when observing with a microscope, if the glass substrate 4 vibrates, there is a problem that autofocus cannot be performed until the vibration is subsided.
[0009]
In addition, when subjected to vertical vibration, the back surface of the glass substrate 4 may hit the support pins 3 and be damaged. Furthermore, when the center of the glass substrate 4 is greatly shaken in the vertical direction due to a change in the wind pressure of the down flow, or when the glass substrate 4 becomes thin, there is a slight amount between the glass substrate 4 itself and the support pins 3 due to the wind pressure of the automatic down flow. Deflection may occur and the glass substrate 4 may wave. For this reason, the level of the glass substrate 4 cannot be maintained, and the focal position is shifted during micro observation with a microscope or the like .
It is an object of the present invention to provide a substrate holding device that can prevent floating and vibration of the central portion of the substrate.
[0010]
The present invention provides a substrate holding device that can suppress the influence of a decrease in the amount of transmitted illumination light by a holding stand erected on a substrate holder frame, can realize a good transmission microscope, and can easily adjust the height of a support pin. The purpose is to do.
[0011]
DISCLOSURE OF THE INVENTION
According to a main aspect of the present invention, in a substrate holding apparatus that holds a horizontal edge of a rectangular glass substrate horizontally in an opening of a substrate holder formed in a rectangular frame shape, the opening is formed in the opening of the substrate holder. A plurality of bridge-like holding bodies that are constructed at a predetermined interval below the substrate placement surface at a predetermined interval and have a sufficiently long width dimension with respect to the plate thickness and made of a highly rigid metal , and a plurality of each on each holding body. A bearing portion having a screw hole and a screw that is screwed into the screw hole of each bearing portion is formed in the base portion, a holding shaft that holds the glass substrate at the tip portion, and a holding shaft in the screw hole of the bearing portion. There is provided a substrate holding device including a height adjusting mechanism for adjusting a height of a holding shaft by screwing up and down to adjust a height of a holding shaft and horizontally supporting a glass substrate.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 10 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0013]
FIG. 1 is a configuration diagram of a substrate holding device. This substrate holding device is applied to a surface inspection device that inspects the surface of a glass substrate 4 of a flat panel display. A plurality of holding bases 10 are installed in the opening of the substrate holder 1. These holding bases 10 are formed in a bar shape, and are arranged in parallel at predetermined intervals between two opposite sides in the opening of the substrate holder 1. These holding bases 10 are composed of two belt-like holding plates 10a and 10b arranged so that their plate surfaces face each other. A space portion 11 through which transmitted illumination light passes is formed between the holding plates 10a and 10b. The holding plates 10a and 10b have a sufficiently long width dimension with respect to the plate thickness and are made of a highly rigid metal. The holding plates 10a and 10b are coated with a vibration damping material (high damping material) on the plate surface for the purpose of suppressing vibrations, or the holding plates 10a and 10b are made of a damping metal such as intergranular corrosion stainless steel. As the anti-vibration material, high-molecular rubber, resin, vibration-absorbing paint, or gel-like substance may be used. Examples of the vibration absorbing paint include urethane, acrylic, and silicon resin paint. Examples of the gel substance include organogel, polymer gel, silicon gel, and fluorine ion exchange resin. Further, a transparent vibration isolator may be sandwiched between the two holding plates 10a and 10b. In addition, the resonance frequency of each holding table 10 is made different by changing the thickness of the holding plates 10a and 10b so that each holding table 10 does not vibrate, or changing the thickness and amount of the vibration isolating material. It is preferable to eliminate resonance.
[0014]
A plurality of substrate suction members 20 are provided in each holding base 10 corresponding to a predetermined position in the opening of the substrate holder 1, for example, the central portion. Each holding base 10 is provided with a plurality of support pins 30.
[0015]
2A and 2B are configuration diagrams showing attachment of the substrate suction member 20 and the support pins 30 to the holding base 10, wherein FIG. 2A is a configuration diagram viewed from above, and FIG. 2B is a side view. The substrate suction member 20 and the support pins 30 are sandwiched between the two holding plates 10a and 10b at a predetermined interval. A suction tube 21 is connected to each substrate suction member 20. The suction tube 21 is disposed between the two holding plates 10a and 10b. The suction tube 21 is made of, for example, a light transmissive material. The bottom surfaces of the two holding plates 10a and 10b are preferably formed of a light transmissive member.
[0016]
3A and 3B are configuration diagrams in which only the support pins 30 are attached to the holding base 10, wherein FIG. 3A is a configuration diagram viewed from above, and FIG. 3B is a side view. A plurality of support pins 30 are sandwiched between the two holding plates 10a and 10b at predetermined intervals.
[0017]
FIG. 4 is a cross-sectional configuration diagram of the substrate suction member 20. The substrate suction member 20 is provided with a substrate holding shaft 22. A suction passage 23 is formed in the substrate holding shaft 22 in the axial direction. A suction member 24 formed of an elastic material is attached to the tip of the substrate holding shaft 22 so as not to come off. The suction member 24 is formed with a suction hole 25 for communicating with the suction passage 23. The suction member 24 is held at the tip end portion of the substrate holding shaft 22 by a removal prevention ring 26. A suction tube 21 is attached to the lower portion of the substrate suction member 20 by an attachment end 27. The suction tube 21 communicates with the suction passage 23 by being attached to the substrate suction member 20. The suction tube 21 is connected to a suction pump P provided outside the substrate holder 1.
[0018]
FIG. 5 is a cross-sectional configuration diagram of the support pin 30. The support pin 30 is provided with a columnar holding shaft 31. A concave portion 32 is formed at the distal end portion of the holding shaft 31, and a ball 33 is rotatably provided in the concave portion 32. On the original side of the holding shaft 31, an abutment groove 35 for receiving a screw tightening of the fixing screw 34 and an escape groove 37 for preventing the fixing screw 36 from coming into contact are formed. Furthermore, the holding shaft 31 of the lower relief groove 37 is formed a screw 31a is, the holding shaft 31 is screwed into the screw hole 38a formed in the lower portion of the holding bearings 38, movable in the vertical direction (arrow b direction) Is provided.
[0019]
Accordingly, the height of the support pin 30 is adjusted by moving the holding shaft 31 from the bottom opening of the holding bearing 38 in the direction of the arrow A while rotating the holding shaft 31 with a screwdriver, adjusting the height position, and then tightening the fixing screw 34. This is done by fixing the holding shaft 31 to the holding bearing 38.
[0020]
Flat portions 39 and 40 for receiving the two holding plates 10a and 10b are formed on both sides under the holding bearing 38, respectively. The holding bearing 38 has screw holes 41 and 42 through which the fixing screws 34 and 36 are inserted.
[0021]
In the case of the support pin 30 having such a structure, the fixing screw 36 is loosened so that it can be attached to and detached from the two holding plates 10a and 10b, and is supported only by rotating the holding shaft 31. The height of the pin 30 can be adjusted.
[0022]
Next, height adjustment of the plurality of substrate suction members 20 and the plurality of support pins 30 provided in the substrate holder 1 will be described with reference to FIG.
[0023]
A reference block 43 in which a reference plane 44 is formed is prepared. The reference plane 44 is a plane having no distortion or unevenness. Each reference table 45 is provided at each end of the reference plane 44. These reference bases 45 are formed at a reference height H for adjusting the heights of the plurality of substrate suction members 20 and the plurality of support pins 30. These reference bases 45 are arranged at intervals suitable for the size of the substrate holder 1, and the holding base 10 is placed upside down between the reference bases 45 and 45.
[0024]
Further, the height adjustment of the substrate suction member 20 and the support pin 30 may be performed by placing the substrate holder 1 on the reference plane 44.
[0025]
The height of the substrate suction member 20 is adjusted because the suction member 24 at the tip of the substrate holding shaft 22 shown in FIG. 4 is formed of an elastic material, so that the suction member 34 comes into contact with the reference plane 44. It expands and contracts according to the height of the reference plane 44. In this state, the substrate suction member 20 is fixed to the two holding plates 10a and 10b with fixing screws or the like.
[0026]
On the other hand, for adjusting the height of the support pin 30, the holding bearing 38 shown in FIG. 5 is rotated through the bottom opening until the ball 33 at the tip end of the holding shaft 31 contacts the reference plane 44. After adjusting the height of the holding shaft 31, the fixing screw 34 is tightened to fix the holding shaft 31 to the holding bearing 38.
[0027]
As a result, the height positions of all the substrate suction members 20 and the support pins 30 are aligned with the reference plane 44, and the height adjustment of the substrate suction members 20 and the support pins 30 is completed.
[0028]
Note that the height adjustment of only the plurality of support pins 30 is performed by moving each holding shaft 31 of each support pin 30 up and down in the same manner as described above.
[0029]
Next, the operation of the apparatus configured as described above will be described.
[0030]
When the surface inspection of the glass substrate 4 is performed, the glass substrate 4 is pressed against the reference pins 6 by the pressing pins 7 and set at the reference position, and then the central portion of the glass substrate 4 is first moved by the substrate suction member 20. Adsorbed and fixed. Subsequently, the peripheral edge of the glass substrate 4 is sucked and fixed onto the substrate holder 1 by each suction pad 5.
[0031]
When the suction pump P performs a suction operation, each of the plurality of substrate suction members 20 performs a suction operation, and holds the glass substrate 4 by suction at the center thereof. At the same time, the glass substrate 4 is supported by a plurality of support pins 30.
[0032]
As a result, the glass substrate 4 is adsorbed and held at the peripheral portion and the central portion, so that the levelness is always maintained. Therefore, even if the substrate holder 1 is swung during the macro inspection or is affected by a downflow or the like, the central portion of the glass substrate 4 does not float.
[0033]
The surface inspection is performed by a spectroscopic method using transmission illumination or epi-illumination on the glass substrate 4. In the transmission illumination speculum method, the transmitted illumination light is irradiated from below the glass substrate 4. At the installation position of the holding table 10, the transmitted illumination light is irradiated onto the glass substrate 4 through the space 13 between the two holding plates 10 a and 10 b. At the same time, the transmitted illumination light circulates from around each holding plate 10a, 10b, and the circulated transmitted illumination light irradiates the glass substrate 4. Even at the position where the suction tube 21 is provided, the transmitted illumination light is diffused by the light-transmitting suction tube 21 and applied to the glass substrate 4.
[0034]
Therefore, even if it is a transmission illumination spectroscopic method, even if the light quantity of the transmitted illumination light irradiated to the glass substrate 4 is the installation position of the holding stand 10, the reduction in the light quantity can be suppressed to be small, and the surface inspection of the glass substrate 4 is excellent. It can be done.
[0035]
As described above, in the above-described embodiment, since the plurality of substrate suction members 20 are attached to the central portion of the glass substrate 4 when the glass substrate 4 is placed on the substrate holder 1, the glass substrate 4. The peripheral part is fixedly adsorbed by the suction members 5 around the substrate holder 1 and the central part is fixedly adsorbed. As a result, the glass substrate 4 can be reliably held with high levelness. Thereby, the surface inspection of the glass substrate 4 can be accurately performed without causing an erroneous inspection in the macro inspection of the glass substrate 4. Even during micro observation at a high magnification using a microscope or the like, the distance between the objective lens and the surface of the glass substrate 4 is kept constant, so that defocusing does not occur, and an in-focus image can be inspected on the entire surface of the glass substrate 4.
[0036]
The plurality of substrate suction members 20 are sandwiched between the two holding plates 10a and 10b, and the plurality of support pins 30 are also sandwiched between the two holding plates 10a and 10b. The glass substrate 4 is irradiated through the space 13 between the holding plates 10a and 10b, and the transmitted illumination light that wraps around the holding plates 10a and 10b is irradiated onto the glass substrate 4. Further, the transmitted illumination light is diffused by the light-transmitting suction tube 21 and applied to the glass substrate 4. Thereby, the reduction | decrease of the light quantity of the transmitted illumination light irradiated to the glass substrate 4 can be suppressed to the minimum, and a favorable transmission microscope can be implement | achieved.
[0037]
Each holding plate 10a, 10b is easy to process, can reduce the manufacturing time, and can reduce the cost.
[0038]
Since the plurality of substrate suction members 20 can be attached to and detached from the two holding plates 10a and 10b, they can be attached and detached at desired positions on the straight line of the two holding plates 10a and 10b. These substrate suction members 20 can arbitrarily adjust the arrangement interval according to the size and weight of the glass substrate 4.
[0039]
The plurality of substrate suction members 20 and the plurality of support pins 30 can be adjusted to have the same height by using the reference block 43 and each reference table 45. In this case, the height of the substrate suction member 20 can be adjusted by the suction member 24 following the reference plane 44, and the height of the support pin 30 can be adjusted by moving the holding shaft 31 up and down. Therefore, the glass substrate 4 can be reliably held with high levelness.
[0040]
The holding plate 10a, 10b is coated with a vibration isolating material or made of a vibration damping metal, and the vibration of the holding table 10 can be reduced by sandwiching the vibration isolating material in the gap between the holding plates 10a, 10b. Therefore, the vibration of the glass substrate 4 placed on the support pins 30 can be suppressed.
[0041]
Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted. The second embodiment is different from the first embodiment in that an optical component as an optical component for light scattering or diffusion is provided between two holding plates 10a and 10b as shown in FIG. The lens 50 is provided.
[0042]
The optical lens 50 is formed in a kamaboko lens shape, and each locking portion 50a is formed. As a result, the optical lens 50 is locked to the two holding plates 10a and 10b, can be attached to and detached from the holding plates 10a and 10b, and does not fall between the holding plates 10a and 10b. The optical lens 50 is not limited to the kamaboko lens shape, and may be provided with a diffusion plate, a prism, a Furnell lens, or the like.
[0043]
Notches 51a and 51b are formed in the lower part of the two holding plates 10a and 10b so as to face each other. Each notch 51a, 51b has a function of reflecting a part of transmitted illumination light from below between each holding plate 10a, 10b, and increasing the amount of transmitted illumination light diffused by the optical lens 50. .
[0044]
Next, an example of a method for manufacturing the optical lens 50 will be described. First, a cylindrical member (lot) 52 formed of a light-transmitting resin (for example, plastic) as shown in FIG. 8A is divided into two in the longitudinal direction as shown in FIG. 8B, and two lens members 52a and 52b are formed. create.
[0045]
Next, both sides of each lens member 52a, 52b are cut, respectively, and two optical lenses 50 having a kamaboko lens shape are manufactured.
[0046]
If the lens members 52a and 52b can be inserted between the two holding plates 10a and 10b without cutting the both sides of the lens members 52a and 52b, the lens members 52a and 52b are used as the optical lens 50. May be.
[0047]
Next, the operation of the apparatus configured as described above will be described.
[0048]
When the surface inspection of the glass substrate 4 is performed by the transmission illumination spectroscopic method, the transmitted illumination light irradiated from below the glass substrate 4 is diffused by the optical lens 40 provided between the two holding plates 10a and 10b. Then, the glass substrate 4 is irradiated. At the same time, the transmitted illumination light that hits the notches 51a and 51b of the two holding plates 10a and 10b is reflected by the notches 51a and 51b toward the two holding plates 10a and 10b. The light is diffused through the lens 40 and irradiated onto the glass substrate 4.
[0049]
Therefore, even if it is a transmission illumination spectroscopic method, even if the amount of transmitted illumination light irradiated on the glass substrate 4 is at the position where the holding base 10 is installed, a decrease in the amount of light can be suppressed to a small extent. It is possible to inspect the surface of the glass substrate 4 by the method. In addition, a part of the transmitted illumination light is reflected by the notches 51a and 51b and is incident between the two holding plates 10a and 10b. It can be increased as compared with the embodiment.
[0050]
As described above, in the second embodiment, since the optical lens 50 as the optical component for light scattering or diffusion is provided between the two holding plates 10a and 10b, the optical lens 50 transmits light. It is possible to diffuse the light and irradiate the glass substrate 4, suppress the decrease in the amount of transmitted illumination light irradiated to the glass substrate 4, and reduce the range of surface inspection of the glass substrate 4 in the transmission illumination spectroscopic method. Can be expanded.
[0051]
Furthermore, by forming the notches 51a and 51b, the amount of transmitted illumination light irradiated on the glass substrate 4 can be increased as compared with the first embodiment.
[0052]
The present invention is not limited to the first and second embodiments, and can be variously modified.
[0053]
For example, in the first and second embodiments described above, the description has been given of what is applied to a surface inspection apparatus that inspects the surface of the glass substrate 4 of a flat panel display such as a liquid crystal display. The present invention can also be applied to substrate holders of various manufactures such as steppers provided in the production line of the glass substrate 4 of the display.
[0054]
Further, the substrate suction member 20 can be provided at an arbitrary position within the opening of the substrate holder 1 and may be provided on all of the holding bases. Further, the substrate suction member 20 may replace all the support pins 30 of the substrate boulder 1 with the substrate suction member 20.
[0055]
Further, since transmitted illumination is possible, the lower surface opening of the substrate holder 1 may be closed with a transparent holding body (for example, a glass plate), and the substrate suction member 20 may be disposed on the transparent holding body.
[0056]
Further, as shown in FIG. 9, the substrate suction member 20 is provided by screwing a substrate holding shaft 61 to the substrate suction member main body 60 and moving the substrate holding shaft 61b up and down while rotating. It may be possible. A screw groove 62 is formed on the inner surface of the substrate suction member main body 60a, and a screw thread 63 is formed at the tip of the substrate holding shaft 61. An O-ring 64 for preventing suction leakage is provided between the substrate suction member main body 60 and the substrate holding shaft 61. The suction passage 23 communicates with the suction tube 21 through the space 65 of the substrate suction member main body 60.
[0057]
In adjusting the height of the substrate suction member 20, the substrate holding shaft 61 is moved up and down while rotating, and the suction member 24 at the tip of the substrate holding shaft 61 is brought into contact with the reference plane 44. Thereafter, the tightening et been fixing screw 66, the substrate holding shaft 61 is fixed.
[0058]
[Industrial applicability]
The present invention is used for surface defect inspection of a semiconductor glass substrate such as a glass substrate used in a flat panel display (FPD) such as a liquid crystal display or an organic EL display.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a substrate holding device according to a first embodiment of the present invention.
FIG. 2A is a top view of attachment of a substrate suction member and support pins to a holding table.
FIG. 2B is a side view of attaching the substrate suction member and the support pins to the holding table.
FIG. 3A is a top view of attachment of the support pins to the holding base.
FIG. 3B is a side view of attaching the support pin to the holding base.
FIG. 4 is a cross-sectional configuration diagram of a substrate suction member.
FIG. 5 is a cross-sectional configuration diagram of a support pin.
FIG. 6 is a view for explaining a method for adjusting the heights of a plurality of substrate suction members and support pins;
FIG. 7 is a configuration diagram of an optical lens showing a second embodiment of the present invention.
FIG. 8A is a diagram showing an example of a method for manufacturing an optical lens.
FIG. 8B is a diagram showing an example of a method for manufacturing an optical lens.
FIG. 8C is a diagram showing an example of a method for manufacturing an optical lens.
FIG. 9 is a configuration diagram showing a modified example of the substrate suction member.
FIG. 10 is a schematic configuration diagram of a conventional substrate holding apparatus.

Claims (8)

In the substrate holding device that holds the horizontal edge of the rectangular glass substrate in the opening of the substrate holder formed in a rectangular frame shape and holds it horizontally,
A plurality of bridge-like holders made of a highly rigid metal having a width dimension sufficiently long with respect to the plate thickness, and installed in a plurality of positions at lower intervals than the substrate placement surface in the opening of the substrate holder. ,
A plurality of bearings arranged on each holding body, and having a screw hole,
A screw that is screwed into the screw hole of each bearing part is formed at the base part, and a holding shaft that holds the glass substrate at the tip part;
A height adjusting mechanism for adjusting the height of the holding shaft by screwing the holding shaft into the screw hole of the bearing portion to adjust the height of the holding shaft, and horizontally supporting the glass substrate;
A substrate holding apparatus comprising: The substrate holding apparatus according to claim 1, wherein
The holding shaft is formed in a cylindrical shape, has a rotatable ball that supports the glass substrate at the tip, and has a screw formed at a lower portion, and a support pin that supports the glass substrate together with the bearing. A suction passage that is configured or formed into a cylindrical shape having a screw at the base portion on the bearing portion side, has a suction member that sucks and holds the back surface of the glass substrate at the tip portion, and communicates with the suction member Is formed in the axial direction, and constitutes a substrate suction member together with the bearing portion,
At least one of the support pin and the substrate suction member is attached to the holding body,
A substrate holding device. The substrate holding apparatus according to claim 1, wherein
The holding body is arranged such that two holding plates made of a highly rigid metal formed in a belt shape face each other,
A flat part is formed at the lower part of the bearing part,
The flat portion formed in the bearing portion is attached between the two holding plates, and is provided so as to be removable.
A substrate holding device. The substrate holding apparatus according to claim 3, wherein
The transmitted illumination light is scattered or scattered in the space so that the transmitted illumination light is irradiated from the back side of the glass substrate held in the opening of the substrate holder through the space between the two holding plates. Provided with optical members to diffuse,
A substrate holding device. The substrate holding apparatus according to claim 4, wherein
The substrate holding apparatus according to claim 1, wherein the optical member is a lens obtained by dividing a lens in which a light-transmitting resin is formed into a cylinder into two in the longitudinal direction. The substrate holding apparatus according to claim 1, wherein
A substrate holding apparatus that suppresses vibrations of the holding body by coating a vibration-absorbing paint on the surface of the holding member in the form of a bar, or sandwiching a vibration isolating material in a space portion of the holding body. The substrate holding apparatus according to claim 1, wherein
The plurality of cross-shaped holding bodies installed at predetermined intervals in the opening of the substrate holder have different resonance frequencies of the holding bodies so that the holding bodies do not resonate by changing the plate thickness or mass. A substrate holding device. The substrate holding apparatus according to claim 1, wherein
The plurality of cross-shaped holding bodies installed at predetermined intervals in the opening of the substrate holder is configured so that the holding bodies are different from each other by changing the thickness and amount of the vibration isolator disposed in the space of the holding body. A substrate holding apparatus, wherein the holding bodies have different resonance frequencies so as not to resonate.

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