JP3650859B2 - Circuit breaker and fluid control apparatus having the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a shut-off opener including a valve body and a plurality of valve actuators, and a fluid control apparatus including the same.
[0002]
In this specification, front and rear, up and down, and left and right are based on FIG. 2, with the right in the figure as the front, the left as the rear, the top and the bottom as the top and the bottom, and the left and right as facing forward. This front / rear / up / down / left / right is convenient, and the front / rear may be reversed or the top / bottom may be left / right.
[0003]
[Prior art]
A shut-off opener composed of a rectangular parallelepiped valve body and a plurality of valve actuators has been conventionally known. Such a circuit breaker is provided on the inlet side and the outlet side of a regulator such as a mass flow controller, for example, and is used to configure a fluid control device used in a semiconductor manufacturing apparatus or the like.
[0004]
FIG. 17 shows a conventional break opener. A conventional break opener (61) includes a rectangular parallelepiped valve body (63) and three valve actuators (64) attached to the upper surface side by side in the front-rear direction. (65) and (66) .The main passage (67) extending from the rear end surface of the valve body (63) to the vicinity of the valve actuator (64) on the front end side, the main passage (67) and the main passage (67) Three auxiliary passages (68), (69) and (70) connected through the valve actuators (64), (65) and (66) are formed. The upper surface of the valve body (63) is parallel and flat with the lower surface, and the valve actuators (64), (65), (66) are attached to the flat surface at equal intervals.
[0005]
Regarding the dead volume (fluid reservoir portion) of the circuit breaker (61), when fluid flows from the main passage (67) to the first sub-passage (68), the main passage (67) and the second and third Only short passages (71) and (72) connecting the valve actuators (65) and (66) are provided. When the fluid flows from the main passage (67) to the second sub passage (69), the short passage (72) connecting the main passage (67) and the third valve actuator (66) and the first valve actuator ( 64) and the front end portions (67a) and (67b) of the main passage (67) between the second valve actuator (65) become a dead volume. When the fluid flows from the main passage (67) to the third sub passage (70), the short passage (71) connecting the main passage (67) and the second valve actuator (65), the first valve actuator ( 64) and the second valve actuator (65) between the front end portions (67a) and (67b) of the main passage (67) and between the second valve actuator (65) and the third valve actuator (66). The middle part (67c) of the main passage (67) becomes a dead volume.
[0006]
[Problems to be solved by the invention]
For circuit breakers and fluid controllers used in semiconductor manufacturing equipment, it is important to reduce the dead volume that causes the purity of the process gas to decrease, and also to reduce the internal volume, reduce the volume and reduce the weight. Although required, the conventional ones were insufficient in these respects.
[0007]
An object of the present invention is to provide a circuit breaker having a reduced dead volume and a reduced volume and weight as compared with the conventional one, and a fluid controller including the same.
[0008]
[Means for Solving the Problems and Effects of the Invention]
  A shut-off device according to the present invention comprises a substantially rectangular parallelepiped valve body and a plurality of passage opening / closing valve actuators attached to the upper surface side by side in the front-rear direction. A main passage extending from the front end side to the valve actuator on the front end side, and a plurality of sub passages connected to the main passage through the valve actuators.When a fluid flows from the main passage to each sub-passage, a passage portion that becomes a dead volume occurs.Circuit breakersmellThe surface on which the valve actuator on the front end side of the valve body is attachedAnd the valve actuator on the front end sideThroughThe portion of the main passage through which the fluid passes only when the fluid flows from the main passage to the corresponding sub-passage has an obtuse angle, and thus corresponds from the main passage through a valve actuator other than the valve actuator on the front end side. When fluid flows through the sub-passage, the volume of the passage part that becomes the dead volume is reduced compared to the case where the upper surface of the valve body is flat.It is characterized by being.
[0009]
  The forward downward inclination angle of the inclined surface is preferably 15 ° to 60 °, more preferably 20 ° to 45 ° with respect to the horizontal plane. If the tilt angle is small, the effect is reduced, and if the tilt angle is large, the valve actuator on the front end side protrudes more forward than the front end surface of the valve body, increasing the possibility of interference with other members. The angle is set within the preferable range in consideration of the size of the valve actuator and the size of the fluid control device provided with the shut-off device.The valve body is preferably provided with an actuator insertion recess for mounting the valve actuator. In this case, the valve sensor insertion recess is replaced with a pressure sensor mounting screw hole, so that the pressure sensor It is preferable that attachment is possible.
[0010]
According to the circuit breaker of the present invention, the upper surface of the valve body to which the valve actuator on the front end side is attached is an inclined surface that is lowered forward. The volume of the upper front part of the main body and the front-rear length of the front part are reduced, and the internal volume, volume and weight of the circuit breaker are reduced. Most of the dead volume of this circuit breaker is occupied by the front end portion of the main passage between the valve actuator on the front end side and the valve actuator next to it, and the front end portion of this main passage is It decreases with decreasing front and back length of the front portion of the body, thus reducing the dead volume of the breaker.
[0011]
The above-described circuit breaker may be provided on an inlet side and an outlet side of a regulator such as a mass flow controller to constitute a fluid controller for semiconductor manufacturing.
[0012]
In this case, it is preferable that the sub-passage farthest from the regulator among the plurality of sub-passages of each shut-off device is used for the process gas, and the sub-passage adjacent to these sub-passages is used for the purge gas. In this way, the dead volume when the process gas is flowing is only a short passage portion connecting the main passage and the valve actuator at the rear, so that the residual gas can be removed in a short time when the process gas is switched. Can be purged.
[0013]
A plurality of fluid controllers are appropriately provided to constitute a fluid control apparatus. At this time, it is preferable that the front and rear lengths of the valve bodies of the respective shut-off devices are equal regardless of the number of valve actuators. If it does in this way, all the 1st valve actuators of each circuit breaker will be located in a line, and it will become easy to operate circuit breaker.
[0014]
Further, among the plurality of sub passages, the sub passage connected via the valve actuator on the front end side communicates with the front end surface or the lower surface of the valve body, the remaining sub passages communicate with the lower surface of the valve body, and the piping of the remaining sub passages Is preferably performed below the valve body. If it does in this way, a piping part will be stored in the lower part of a valve body in the plane, the whole control device will become compact, and it will become easy to maintain a piping part.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0016]
1 and 2 show a first embodiment of a break opener (1) according to the present invention. As shown in FIGS. 3 and 4, the break opener (1) is provided on the inlet side and the outlet side of the mass flow controller (2) to constitute the fluid controller (10).
[0017]
As shown in FIGS. 1 and 2, the circuit breaker (1) includes a substantially rectangular parallelepiped valve body (3) and first (front end side) and second (intermediate) attached to the upper surface side by side in the front-rear direction. And a third (rear end side) passage opening / closing valve actuator (4) (5) (6). In the valve body (3), there are a main passage (21) extending straight back and forth from the rear end face of the valve body (3) to the front end valve actuator (4), and the main passage (21) and each valve actuator (4 ) (5) (6) are connected to the first (front end side), second (intermediate) and third (rear end side) secondary passages (22), (23), (24). ing. The sub passages (23) and (24) connected to the main passage (21) via the second and third valve actuators (5) and (6) are connected to the second and third valve actuators (5) ( It is directly behind the short passages 25, 26 connecting 6), but in FIG. 2, it is shifted to the left from the actual and is represented by a chain line (the same applies hereinafter).
[0018]
The valve body (3) protrudes rightward from the right side surface (3c) of the portion where the actuator (4) (5) (6) is attached, and the second and third auxiliary passages (23) ( 24) is formed, and a block-like overhanging portion (7) is integrally formed as a screwing portion for connecting the valve body (3) to other members.
[0019]
Of the upper surface of the valve body (3), the mounting surface (3a) for the first valve actuator (4) on the front end side is an inclined surface with a front lowering, and the remaining two second and third valve actuators ( 5) The mounting surface (3b) for (6) is a flat surface parallel to the lower surface.
[0020]
The valve actuators (4), (5), and (6) are attached at right angles to the attachment surfaces (3a) and (3b). The actuator insertion recesses (18) and (19) of the valve body (3) are relatively shallow in the first valve actuator (4) insertion recess (18), and the second and third valve actuators (5). (6) The insertion recess (19) is relatively deep, and accordingly, the first valve actuator (4) is shorter than the second and third valve actuators (5) (6). Has been made. However, it is possible to make the valve actuators of the same length by making the depths of the valve actuator insertion recesses all the same. The first valve actuator (4) and the third valve actuator (6) are normally closed, and the second valve actuator (5) is normally open.
[0021]
The main passage (21) extends from the rear end surface of the valve body (3) to near the front end surface, and the first sub-passage (22) communicates with the front end surface of the valve body (3). A joint portion (9) with a nut for connecting a check valve, a pressure regulator or the like to the first auxiliary passage (22) is provided on the front end surface of the valve body (3). The second and third auxiliary passages (23) and (24) respectively pass through the projecting portion (7) of the valve body (3) and communicate with the lower surface of the valve body (3).
[0022]
In FIG. 2, when the fluid flows from the main passage (21) to the first sub-passage (22), the dead volume of the circuit breaker (1) is the main passage (21) and the second and third valve actuators. (5) Only short passages (25) and (26) connecting with (6). When the fluid flows from the main passage (21) to the second sub passage (23), the short passage (26) connecting the main passage (21) and the third valve actuator (6) and the first valve actuator ( The obtuse front end portions (21a) and (21b) of the main passage (21) between 4) and the second valve actuator (5) become a dead volume. When fluid flows from the main passage (21) to the third sub passage (24), the short passage (25) connecting the main passage (21) and the second valve actuator (5), the first valve actuator (4 ) Between the second valve actuator (5) and the second valve actuator (5), and between the second valve actuator (5) and the third valve actuator (6). An intermediate portion (21c) of a certain main passage (21) becomes a dead volume.
[0023]
In the above circuit breaker (1), the mounting surface (3a) for the first valve actuator (4) on the upper surface of the valve body (3) is for the first valve actuator in the conventional circuit breaker (61) shown in FIG. The mounting surface (63a) is set to have the same area. Therefore, compared with the conventional circuit breaker (61), the volume of the valve body (3) front upper part and the front-rear length of the front part are reduced by the amount of the inclined surface of the mounting surface (3a). The internal volume, volume and weight of the circuit breaker (1) are reduced. When the length of the first valve actuator mounting surface (63a) in the conventional break opener (61) is L and the inclination angle is θ, the break opener (1) has a longitudinal length of L (1-cos θ ) And the longitudinal cross-sectional area is further reduced by L × cos θ × sin θ ÷ 2. Regarding the dead volume, the volume of the obtuse front end portion (21a) (21b) of the main passage (21) decreases with the decrease in the longitudinal length of the valve body (3). The volume of the front end portions (67a) and (67b) of the passage (67) is reduced, and the dead volume of the entire breaker (1) is also reduced. As the angle of inclination increases, the obtuse front end portion (21a) (21b) decreases in the portion (21a) extending straight from the main passage (21) and increases in the bent portion (21b). However, as a whole, the amount of reduction in dead volume increases as the tilt angle increases.
[0024]
The fluid controller shown in FIG. 3 and FIG. 4 includes a mass flow controller (2), and a circuit breaker (1) (1) (1) provided on the inlet side (left side in FIG. 4) and outlet side (right side in FIG. 4). ). The shut-off device (1) on the inlet side is the one in which the shut-off device (1) shown in FIG. 1 and FIG.
[0025]
In the shut-off device (1) on the inlet side, the first sub-passage (22) farthest from the mass flow controller (2) is for the process gas inflow, and the second sub-passage (23) next to it is the purge gas The third sub-passage (24) closest to the inflow mass flow controller (2) is used for vacuum suction, and the first opener that is farthest from the mass flow controller (2) in the shut-off opener (1) on the outlet side The second sub-passage (23) is connected to the exhaust gas duct as a purge port. The third sub-passage (24) closest to the mass flow controller (2) is used for vacuum suction.
[0026]
An upper passage block (11) having a passage (11a) communicating with the lower surface is provided in a protruding manner at the lower ends of the inlet and outlet side surfaces of the mass flow controller (2). A lower passage block (12) is provided below each upper passage block (11), and each lower passage block (12) and each upper passage block (11) are connected to the upper passage block (11). Are connected by two mass flow controller mounting screws (13) screwed from above. The lower passage block (12) is formed with a passage (12a) that connects the passage (11a) of the upper passage block (11) and the main passage (21) of the valve body (3). The lower passage block (12) is connected to the valve body (3) by a circuit breaker mounting screw (14) screwed in from the block (12) side. The overhanging portion (7) of the valve body (3) is provided with piping passage blocks (15), (16) of the second and third auxiliary passages (23), (24), and the overhanging portion (7). Are connected by a pipe mounting screw (17) screwed from above. The third sub-passage (24) of the shut-off device (1) on the inlet side and the third sub-passage (24) of the shut-off device (1) on the outlet side are the passage blocks (15) for the respective pipes. (15) After being connected to each other by a pipe (27), they are connected to a vacuum suction pump (not shown). A joint (28) is provided on the lower surface of the passage block (16) that forms the second sub passage (23). The pipe connection portion of the joint (28) is positioned below the vacuum suction pipe (27), and therefore the purge gas pipe does not interfere with the vacuum suction pipe (27). . When installing the fluid controller (10), as shown in FIG. 4, the mass flow controller (2) and the circuit breaker (1) are mounted on the upper surface side of the substrate (29), and are connected to the passage block for piping. (15) (16) comes to the lower surface side of the substrate (29).
[0027]
In the fluid controller (10), when the mass flow controller (2) fails, the mass flow controller (2) can be removed and replaced by removing the mass flow controller mounting screw (13). When the circuit breaker (3) breaks down, the circuit breaker (3) can be removed and replaced by removing the circuit breaker mounting screw (14) and the pipe mounting screw (17).
[0028]
In the above fluid controller, the dead volume when the process gas flows is only in the short passage (25) (26) connecting the main passage (21) and the second and third valve actuators (5) (6). Become.
[0029]
FIG. 5 shows a second embodiment of the break opener (31) of the present invention. As shown in FIG. 6, the break opener (31) is provided on the inlet side and the outlet side of the mass flow controller (2) to constitute a fluid controller (40). The circuit breaker (31) differs from the circuit breaker (1) of the first embodiment in that the first sub-passage (32) communicates with the lower surface of the valve body (33). In the following description, the same components as those of the first embodiment are denoted by the same reference numerals and description thereof is omitted. In FIG. 5, the joint portion (9) on the front end face of the valve body (3) shown in FIG. 1 is removed, and the block-like overhanging portion (34) of the valve body (33) has second and third portions. In addition to the auxiliary passages (23) and (24), a first auxiliary passage (32) communicating with the lower surface is also formed. As shown in FIG. 6, in addition to the piping passage blocks (15) and (16) leading to the second and third auxiliary passages (23) and (24), the overhanging portion (34) includes: A pipe passage block (35) leading to the first sub-passage (32) is also connected. The pipe connection portion of the joint (36) provided on the lower surface of the pipe passage block (35) is located between the pipe (27) for vacuum suction and the joint (28) leading to the second sub-passage (23). Therefore, the process gas pipe does not interfere with the purge gas pipe or the vacuum suction pipe (27).
[0030]
The circuit breaker (1) shown in FIGS. 1, 2, and 5 includes three valve actuators (4), (5), and (6), but does not require the vacuum suction sub-passage (24). Sometimes there are two valve actuators. In this case, of course, the third valve actuator (6) may be removed and the length of the valve body may be shortened. However, as shown in FIGS. As it is, only the recess (19) for attaching the third valve actuator (6) and the vacuum suction sub-passage (24) may not be formed.
[0031]
In FIG. 7, the circuit breaker (41) includes a substantially rectangular parallelepiped valve body (43) and first (front end side) and second valve actuators (4) and (5) attached to the upper surface in the front-rear direction. In the valve body (43), the main passage (21) extending from the rear end surface of the valve body (43) to the vicinity of the front end surface and the communication with the main passage (21) are connected to each valve actuator (4) (5 ) And the first sub-passage (22) and (23) are formed. Of the upper surface of the valve body (43), the mounting surface (43a) for the first valve actuator (4) on the front end side is an inclined surface with a downward slope, and the remaining surface (43b) is parallel to the lower surface. It is a flat surface. The flat surface (43b) has an area where two valve actuators can be attached, and the second valve actuator (5) is attached to the front half thereof.
[0032]
In the circuit breaker shown in FIG. 7, a pressure sensor can be attached to the portion where the third valve actuator (6) is removed, as shown in FIG. In FIG. 8, the circuit breaker (51) includes a substantially rectangular parallelepiped valve body (53) and first (front end side) and second valve actuators (4) and (5) attached to the upper surface in the front-rear direction. In the valve body (53), the main passage (21) extending from the rear end surface of the valve body (53) to the vicinity of the front end surface and the communication with the main passage (21) are connected to each valve actuator (4) (5 ) And the first sub-passage (22) and (23) are formed. Of the upper surface of the valve body (53), the mounting surface (53a) for the first valve actuator (4) on the front end side is an inclined surface that is lowered forward, and the remaining surface (53b) is parallel to the lower surface. It is a flat surface. The flat surface (53b) has an area where two valve actuators can be attached. The second valve actuator (5) is attached to the front half of the flat surface (53b), and the pressure sensor is located at the center of the latter half. A mounting screw hole (54) is provided. The joint (55) provided on the front end face of the valve body (53) is of a type having a male thread.
[0033]
The fluid controllers (10) and (40) shown in FIGS. 3, 4 and 6 are appropriately combined to constitute a fluid control device for semiconductor manufacturing. FIG. 9 shows a part of such a fluid control device. In the same figure, a fluid controller (40) including a shut-off opener (31) having two valve actuators (4) (5) and a shut-off opener having three valve actuators (4) (5) (6) The fluid controller (10) including (1) is arranged in parallel and without a gap therebetween. Although not shown, similar fluid controllers are arranged in parallel to these fluid controllers (10) and (40) without being spaced apart from each other.
[0034]
Accordingly, a fluid control device in which the fluid controllers (10) and (40) are arranged in a plane can be obtained, and the first valve actuators (4) and the second valve actuator ( 5) All of them will be on the same line. In addition, the pipes (15), (16), (27), and (28) of the second and third passages (23) and (24) are performed below the substrate (29) (the back side in the figure), and the pipe portion (15), (16), (27), and (28) do not widen the entire width of the control device, facilitate maintenance, and make the appearance clean.
[0035]
In FIG. 9, the same circuit breakers (1) and (31) are used on the inlet side and outlet side of the mass flow controller (2), and the overhangs ( 7) (8) is located on the left side on the entrance side and on the right side on the exit side. On the other hand, in the fluid control device shown in FIG. 10, the protruding portions (46), (47) of the valve bodies (44), (45) on the inlet side are connected to the valve bodies (1), (31) on the outlet side. It is located on the same side as the protruding portions (7) and (8), that is, on the right side. In order to obtain such an inlet-side valve body (44) (45), for example, the overhanging portion (7) provided on the right side surface in FIG. It is only necessary to communicate with the passage in the exit (7). By doing so, in addition to all the second and third sub-passages (23), (24) communicating downward, these openings are all located on the right side of the valve body. Piping becomes easier to do.
[0036]
When the circuit breaker (1) (31) (41) (51) of the first to fourth embodiments is used, as shown in FIG. 3 or 6, the mass flow controller (2) and The lower passage block (12) is required to connect the breaker opener (1) (31) (41) (51). The lower passage block (12) is connected to the valve body (3) by a break opener mounting screw (14) screwed laterally from the lower passage block (12) side. When removing the circuit breaker (1) (31) (41) (51), the circuit breaker mounting screw (14) and pipe mounting screw (17) must be removed. The opener mounting screw (14) is removed after a fluid control device is configured by arranging a number of controllers (10) (20) (40) (50) in parallel (see FIG. 9 or FIG. 10). It becomes a very troublesome task.
[0037]
In the following, two embodiments of the circuit breaker that facilitates the work of removing the circuit breaker will be described.
[0038]
11 and 12 show a fifth embodiment of the circuit breaker of the present invention. This break opener (101) is based on the break opener (31) of the second embodiment shown in FIG. 5, and the main passage (121) does not communicate with the rear end face (103c). The difference is that the valve body (103) communicates with the lower surface of the valve body (103) via a downward passage (122) provided in the valve body (103). In the following description, the same components as those in the first or second embodiment are denoted by the same reference numerals and description thereof is omitted.
[0039]
11 and 12, in the valve main body (103), there are a main passage (121) extending from near the rear end surface of the valve main body (103) to near the front end surface, the main passage (121), and each valve actuator (4). (5) The first (front end side), second (middle) and third (rear end side) auxiliary passages (32), (23), (24) are formed through (6). Yes. The main passage (121) has a downward passage (122) that extends straight downward from the rear end thereof and communicates with the lower surface of the rear end portion of the valve body (103). Each of the sub passages (32), (23), and (24) passes through the block-like projecting portion (34) of the valve body (103) and communicates with the lower surface of the valve body (103). Of the upper surface of the valve body (103), the mounting surface (103a) for the first valve actuator (4) on the front end side is a slanting surface that falls forward, and the remaining two second and third valve actuators ( 5) The mounting surface (103b) for (6) is a flat surface parallel to the lower surface.
[0040]
In FIG. 12, when the fluid flows from the main passage (121) to the first sub-passage (32), the dead volume of the circuit breaker (101) is the main passage (121) and the second and third valve actuators. (5) Only short passages (25) and (26) connecting with (6). When the fluid flows from the main passage (121) to the second sub passage (23), the short passage (26) connecting the main passage (121) and the third valve actuator (6) and the first valve actuator ( The obtuse front end portions (121a) and (121b) of the main passage (121) between 4) and the second valve actuator (5) become a dead volume. When the fluid flows from the main passage (121) to the third sub passage (24), the short passage (25) connecting the main passage (121) and the second valve actuator (5), the first valve actuator (4 ) And an obtuse front end portion (121a) (121b) of the main passageway (121) between the second valve actuator (5) and between the second valve actuator (5) and the third valve actuator (6). An intermediate part (121c) of a certain main passage (121) becomes a dead volume.
[0041]
A fluid controller (140) constructed using this circuit breaker (101) is shown in FIGS. In the fluid controller (140) shown in FIG. 13, the lower passage block (12) is omitted as compared with the fluid controller (10) shown in FIG. 3. Therefore, the lower passage block (12) is omitted. The circuit breaker mounting screw (14) screwed in the lateral direction from the side is omitted. The passage (11a) of the passage block (11) connected to the mass flow controller (2) is opened downward, and this passage (11a) and the downward passage (122) are located below the valve body (103). In FIG. 2, the pipes are connected via a pipe joint (123).
[0042]
In this way, not only the first, second and third auxiliary passages (32), (23) and (24) but also the main passage (121) is connected below the valve body (103). The controller (2) and circuit breaker (101) equipment and piping such as passage blocks (15) (16) (35), fittings (28) (36), pipes (27) ) Are completely separated from each other above and below. In the fluid controller (140), when the mass flow controller (2) breaks down, the mass flow controller (2) can be removed and replaced by removing the mass flow controller mounting screw (13). When the breaker opener (101) breaks down, the breaker opener (101) can be removed and replaced by removing the pipe mounting screw (17). Accordingly, the devices and the piping are accommodated in a planar manner, the entire control device becomes compact, and the maintenance of the devices and the piping is further facilitated.
[0043]
15 and 16 show a sixth embodiment of the circuit breaker according to the present invention. The circuit breaker (131) has a main passageway (121) that communicates with the rear end face (133c) with reference to the circuit breaker (101) of the fifth embodiment shown in FIGS. The valve body (133) is connected to the lower surface of the valve body (133) via a downward passage (132) provided in the valve body (133), and the downward passage (132) is connected to the main passageway (121). From the middle part of the valve (between the second valve actuator (5) and the valve actuator (6)) through the block-shaped overhang (34) of the valve body (133) to the lower surface of the valve body (133) It is different in terms of communication. The fluid controller configured by using the circuit breaker (131) has the same characteristics as the fluid controller (140) shown in FIGS.
[0044]
Of course, the circuit breaker (1) (31) (41) (51) (101) (131) may be attached to a device other than the mass flow controller (2). Of course, in (41), (51), (101), and (131), a liquid may be flowed instead of a gas.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a first embodiment of a circuit breaker according to the present invention.
FIG. 2 is a longitudinal sectional view of the same.
FIG. 3 is a perspective view showing a first embodiment of a fluid controller according to the present invention.
FIG. 4 is a longitudinal sectional view of the same.
FIG. 5 is a perspective view showing a second embodiment of the circuit breaker according to the present invention.
FIG. 6 is a perspective view showing a second embodiment of the fluid controller according to the present invention.
FIG. 7 is a longitudinal sectional view showing a third embodiment of the circuit breaker according to the present invention.
FIG. 8 is a longitudinal sectional view showing a fourth embodiment of a circuit breaker according to the present invention.
FIG. 9 is a plan view showing one embodiment when a plurality of fluid controllers according to the present invention are arranged.
FIG. 10 is a plan view showing another embodiment when a plurality of fluid controllers according to the present invention are arranged.
FIG. 11 is a perspective view showing a fifth embodiment of a circuit breaker according to the present invention.
FIG. 12 is a longitudinal sectional view of the same.
FIG. 13 is a perspective view showing a fluid controller according to the present invention configured by using the circuit breaker of the fifth embodiment.
FIG. 14 is a longitudinal sectional view of the same.
FIG. 15 is a perspective view showing a sixth embodiment of a circuit breaker according to the present invention.
FIG. 16 is a longitudinal sectional view of the same.
FIG. 17 is a longitudinal sectional view showing a conventional circuit breaker.
[Explanation of symbols]
(1) (31) (41) (51) (101) (131) Circuit breaker
(2) Adjuster
(3) (33) (43)(44) (45)(53) (103) (133) Valve body
(3a) (33a) (43a) (53a) (103a) (133a) Inclined surface
(4) (5) (6) Valve actuator
(18) (19) Actuator insertion recess
(21) (121) Main passage
(21a) (21b) Obtuse front end (dead volume)
(22) (23) (24) (32) Secondary passage
(25) (26) Short passage (dead volume part)
(54) Screw hole for pressure sensor mounting

Claims (6)

A substantially rectangular parallelepiped valve body (3) (33) (43) (44) (45) (53) (103) (133) and a plurality of valve opening / closing valve actuators (4) ) (5) (6) , valve body (3) (33) (43) (44) (45) (53) (103) (133) , valve body (3) (33) (43) (44) (45) (53) (103) (133) Main passageway (21) (121) extending from the rear end surface of the rear end or the lower surface of the rear end to the valve actuator (4) (5) (6) near the front end , a main passage (21) (121) and the valve actuator (4) and (5) a plurality of sub-passages (6) through the connected (22) (23) (24) is formed, the main When the fluid flows from the passage (21) (121) to each of the sub passages (22) (23) (24) , a passage opener (21a) (21b) (25) (26) that creates a dead volume is generated . smell Te,
The surface on which the valve actuator (4) on the front end side of the valve body (3) (33) (43) (44) (45) (53) (103) (133 ) is attached is the front-lowering inclined surface. In addition, the main passage portion (21a) (21b) through which the fluid passes only when the fluid flows from the main passage (21) (121) to the corresponding auxiliary passage (22) via the valve actuator (4) on the front end side. ) Has an obtuse angle, which allows the corresponding sub-passage (23) (23) from the main passage (21) (121) via the valve actuator (5) (6) other than the valve actuator ( 4) on the front end side. 24. A circuit breaker that is characterized in that the volume of the passage portions (21a) and (21b) that become a dead volume when a fluid flows through 24) is reduced as compared with a case where the upper surface of the valve body is a flat surface . Valve body (3) (33) (43) (44) (45) (53) (103) (133) The valve actuator (4) (5) (6) Actuator insertion recess for mounting (18) (19) The circuit breaker according to claim 1, wherein: Recess for insertion of valve actuator (19) Screw hole for mounting pressure sensor (54) 3. The circuit breaker according to claim 2, wherein the pressure sensor can be attached by replacing the pressure sensor. A regulator (2) for adjusting fluid pressure or flow rate and a circuit breaker (1) (31) (41) (51) according to any one of claims 1 to 3 provided on the inlet side and the outlet side thereof, respectively. And fluid controller. A plurality of fluid controllers according to claim 4 are arranged in parallel, and the longitudinal lengths of the valve bodies (3), (33), (44), and (45) of the respective shut-off openers (1) and (31) are A fluid control device characterized by being equal regardless of the number of actuators (4), (5) and (6) . A plurality of sub-passages (22) (23) auxiliary passage that is connected via a front side of the valve actuator (4) of (24) (22), the valve body (3) (33) (43) (44 ) (45) (53) (103) (133) leading to the front or bottom surface, the remaining secondary passage (23) (24) is the valve body (3) (33) (43) (44) (45) (53) (103) (133) leads to the bottom surface of the remaining sub-passage (23) (24) all the valve body (3) (33) (43) (44) (45) (53) (103) The fluid control device according to claim 5 , wherein the fluid control device is performed below (133) .

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