JP3519229B2 - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JP3519229B2 JP3519229B2 JP00110497A JP110497A JP3519229B2 JP 3519229 B2 JP3519229 B2 JP 3519229B2 JP 00110497 A JP00110497 A JP 00110497A JP 110497 A JP110497 A JP 110497A JP 3519229 B2 JP3519229 B2 JP 3519229B2
- Authority
- JP
- Japan
- Prior art keywords
- die pad
- lead frame
- semiconductor device
- solder
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/2612—Auxiliary members for layer connectors, e.g. spacers
- H01L2224/26152—Auxiliary members for layer connectors, e.g. spacers being formed on an item to be connected not being a semiconductor or solid-state body
- H01L2224/26175—Flow barriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/27—Manufacturing methods
- H01L2224/27011—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature
- H01L2224/27013—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature for holding or confining the layer connector, e.g. solder flow barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/32257—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic the layer connector connecting to a bonding area disposed in a recess of the surface of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49111—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83385—Shape, e.g. interlocking features
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Punching Or Piercing (AREA)
- Lead Frames For Integrated Circuits (AREA)
Description
用のパワーデバイスなどの用途に用いる半導体装置とし
て、リードフレームに2素子のパワー半導体素子を搭載
し、その周域を樹脂封止して組立てたデュアル素子のS
OP(Small Outline Package)モールド型半導体装置に
関する。
ー半導体素子にIGBT(絶縁ゲート型バイポーラトラ
ンジスタ)を用いたデュアル素子SOPモールド型半導
体装置の従来における組立構造を図2に示す。図におい
て、1はリードフレーム、2はリードフレーム1に搭載
したパワー半導体素子、3は内部配線用のボンディング
ワイヤ、4は樹脂パッケージである。ここで、リードフ
レーム1には、僅かな裁断間隙を隔てて左右に並ぶ一対
のダイパッド1aと、左右に並ぶダイパッド1aを挟ん
でその両側に配列した外部リード1b(コレクタ端
子),1c(エミッタ端子),1d(ゲート端子)が形
成されている。なお、周知のように、リードフレームは
図示されていないタイバー,ガイドレールと組み合わせ
て前記したパターンをプレス加工により帯状の金属製リ
ボンに打ち抜いて形成される。
リードフレーム1に形成した左右のダイパッド1aの上
にコレクタ電極面を重ね合わせてパワー半導体素子2の
チップを1個ずつ振り分けて半田マウントし、続いてダ
イパッド1aとコレクタ端子の外部リード1bとの間,
およびパワー半導体素子2とエミッタ端子の外部リード
1c,ゲート端子の外部リード1dとの間にワイヤ3を
ボンディングし、さらにトランスファモールド法により
樹脂パッケージ4を成形した後、リードフレームをタイ
バーカットして製品が完成する。
来のパワー半導体装置では、ICパッケージ用のリード
フレームと同様なリードフレームを採用しており、その
リードフレームは全面域が平坦面で、かつダイパッドと
各外部リードとの間が切り離されており、パワー素子の
チップ搭載したダイパッドとコレクタ外部リードとの間
をボンディングワイヤ接続している。そのために、組立
性,および放熱性の面で次記のような問題点がある。
1aに振り分けてパワー半導体素子2のチップを半田マ
ウントする際に、溶融半田がダイパッドの面上を流動し
て左右広がり、このために半田がダイパッド1aの側縁
からはみ出して、左右に並ぶダイパッド1aの間が半田
5でブリッジしてしまう欠陥が生じ易い。そこで、従来
ではチップを半田マウントする際に、半田量を少な目に
調整してダイパッド相互間での半田ブリッジの発生を防
ぐようにしているが、半田量を減らすとダイパッド/チ
ップ間の接合強度が弱くなり、ヒートサイクルなどで熱
応力が繰り返し加わると、チップの半田接合面が剥離す
るなどして製品の信頼性が低下する。
の発生熱を効率よく放熱する必要があるが、従来のリー
ドフレーム1では、ダイパッド1aと各外部リード1b
との間が切り離されていて、両者間がボンディングワイ
ヤ3で相互接続されているだけであり、かつダイパッド
1aの周域は樹脂パッケージ4で封止されているため
に、外部リード1bを通じての外部への放熱が殆ど期待
できない。
であり、リードフレームを用いて組立てた頭記したデュ
アル素子のSOPモールド型半導体装置を実施対象に、
前記課題を解決して組立性,および放熱性の改善を図っ
た半導体装置を提供することを目的とする。
に、本発明によれば、リードフレームに2素子のパワー
半導体素子を搭載して組立てた樹脂封止型の半導体装置
で、左右に並べてリードフレームに形成した一対のダイ
パッドにそれぞれパワー半導体素子のチップを半田マウ
ントしたものにおいて、次記のように構成するものとす
る。
て、各ダイパッドの対向側縁に沿ってチップマウント側
に向けて起立し、前記半田の側方への広がりを阻止する
側壁部を形成するものとする。また、その側壁部を、リ
ードフレームをプレス加工で打ち抜き形成する際に同時
形成する。上記構成のリードフレームを採用することに
より、リードフレームのダイパッドにチップを半田マウ
ントする際に、ダイパッドごとにその側縁に起立形成し
た側壁部が溶融半田の広がりを阻止する仕切り壁の役目
を果たし、半田量を少な目に調整する必要なしに、ダイ
パッド相互間で半田ブリッジが生じるのを確実に防止す
ることができる。
ッドとその外部リードを一体に連結してリードフレーム
に形成する。この構成により、ダイパッド,およびダイ
パッドに連ねて樹脂パッケージから外方に引出した外部
リードを伝熱経路として、パワー半導体素子の発生熱を
外部へ効率よく放熱させることができる。
(b) に基づいて説明する。なお、実施例の図中で図2に
対応する同一部材には同じ符号が付してある。すなわ
ち、図1の実施例では、リードフレーム1のダイパッド
1aとその外部リード1b(パワー半導体素子2がIG
BTである場合にはコレクタ端子の外部リード、MOS
FETである場合にはドレイン端子の外部リード)とが
一体に連結されており、かつ各ダイパッド1aごとに、
互いに向かい合う側縁に沿ってチップマウント側に向け
て立ち上がる側壁部1a-1が形成されている。この側壁
部1a-1は、金属リボンからリードフレーム1を打ち抜
くプレス加工の際に、同時にプレス金型による剪断,押
し曲げ加工でダイパッド1aの対向側縁に沿って形成す
るものとする。なお、側壁部1a-1の起立角度は、プレ
ス金型の打ち抜き角度に合わせて直角,ないし直角に近
い鋭角に形成される。
ことにより、リードフレーム1のダイパッド1aにパワ
ー半導体素子2のチップを半田マウントする際に、半田
5が前記した側壁部1a-1で側方への広がりが阻止され
る。これにより、図3で述べたようなダイパッド相互間
の半田ブリッジの発生が確実に防げる。また、半導体装
置の通電に伴う半導体チップの発生熱はダイパッド1
a,およびダイパッド1aと一体に連なった外部リード
1bを伝熱して効率よく外部に熱放散される。
ば、リードフレームにおける左右一対のダイパッドに対
して、その対向側縁に側壁部を起立形成したことによ
り、各ダイパッドにパワー半導体素子のチップを半田マ
ウントする際に不要な溶融半田の側方への広がりを阻止
して、ダイパッド間に半田ブリッジが生じるのを確実に
防ぐことができる。
該ダイパッドに接続する外部リードを一体に連結したリ
ードフレームを用いることにより、ダイパッドと外部リ
ードを切り離した従来構造と比べてチップ素子の発生熱
に対する放熱性の向上が図れる。
ールド型半導体装置の組立構成図であり、(a) は平面
図、(b) は(a) の矢視X−X断面図
対象とした従来構成の平面図
チップを半田マウントした際に生じる半田ブリッジの発
生状況を表した図
Claims (3)
- 【請求項1】リードフレームに2素子のパワー半導体素
子を搭載して組立てた樹脂封止型の半導体装置であり、
左右に並べてリードフレームに形成した一対のダイパッ
ドに振り分けてパワー半導体素子のチップを半田マウン
トしたものにおいて、前記ダイパッドの対向側縁に沿っ
てチップマウント側に向けて起立し、前記半田の広がり
を阻止する側壁部を形成したことを特徴とする半導体装
置。 - 【請求項2】請求項1記載の半導体装置において、ダイ
パッドの側壁部を、リードフレームをプレス加工で打ち
抜き形成する際に同時形成したことを特徴とする半導体
装置。 - 【請求項3】請求項1記載の半導体装置において、各ダ
イパッドごとにダイパッドとその外部リードを一体に連
結してリードフレームに形成したことを特徴とする半導
体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP00110497A JP3519229B2 (ja) | 1997-01-08 | 1997-01-08 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP00110497A JP3519229B2 (ja) | 1997-01-08 | 1997-01-08 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10200023A JPH10200023A (ja) | 1998-07-31 |
JP3519229B2 true JP3519229B2 (ja) | 2004-04-12 |
Family
ID=11492185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP00110497A Expired - Lifetime JP3519229B2 (ja) | 1997-01-08 | 1997-01-08 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3519229B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106298723A (zh) * | 2015-05-13 | 2017-01-04 | 无锡华润安盛科技有限公司 | 一种双岛引线框框架 |
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WO2008056195A1 (en) | 2006-11-06 | 2008-05-15 | Infineon Technologies Ag | A multi-chip package |
JP4985809B2 (ja) | 2010-03-23 | 2012-07-25 | サンケン電気株式会社 | 半導体装置 |
JP6636846B2 (ja) * | 2016-04-14 | 2020-01-29 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
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CN106298723A (zh) * | 2015-05-13 | 2017-01-04 | 无锡华润安盛科技有限公司 | 一种双岛引线框框架 |
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