JP3423304B1 - Light irradiation device and light irradiation unit - Google Patents

Abstract

Abstract: [PROBLEMS] To fully utilize the features of a lighting system in which a light irradiation device and a light source device are separated by interposing an optical fiber, and sufficiently respond to recent work inspection requirements in terms of light collection area and light collection efficiency. Provide what you can. The light irradiating device has a housing structure. A first lens for a light source for holding the light emitting end of each optical fiber one by one in close proximity or close contact with each other, and on the light source device side, converting the irradiation light emitted from the LED into substantially parallel light. And a second light source lens for condensing the light from the first light source lens and introducing the light to the light emitting end of the optical fiber bundle.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light irradiating device and the like for irradiating light on an irradiation target portion in order to inspect the appearance and scratches of products.

[0002]

2. Description of the Related Art Conventionally, as disclosed in Japanese Patent Application Laid-Open No. 5-248820, light is guided from a light source device such as a halogen lamp to a light irradiation device through an optical fiber bundle in which a plurality of optical fibers are bundled, There is known a system in which the light irradiation device irradiates a work with light to illuminate the work. According to such a system, by interposing an optical fiber, it is possible to improve the installation flexibility of the light irradiation device and to make it compact regardless of the size and shape of the light source device.

In this type of light irradiator, for example, as shown in the same publication, the light emitting end of an optical fiber is held by a ring-shaped fiber holding member so as to circulate, and the fiber is held. It is known that a work installed below the center of a member is directly irradiated with light from the light emitting end of each optical fiber to illuminate the work from the surroundings.

Further, in the above-mentioned structure in which the light from the light emitting end is directly irradiated to the work, light escaping to the outside is generated at each light emitting end, and therefore, as shown in Japanese Patent Laid-Open No. 5-199442, a ring having a ring shape is formed. A lens has been developed in which a lens is arranged below the light emission end, and this ring lens refracts light so as not to escape to the outside to improve the light collection efficiency.

[0005]

By the way, recently, as a work to be inspected, a very small portion such as a semiconductor chip or a portion of the semiconductor chip to be soldered to a printed circuit board is brightly illuminated and a precise inspection is required. Demand is increasing, and for this reason, it is necessary to focus light more and to illuminate a target site with brighter light more efficiently.

From this point of view, however, the conventional light irradiating device of this type is insufficient in terms of the light collecting area and the light collecting efficiency. For example, in the light irradiation device disclosed in the above-mentioned Japanese Patent Laid-Open No. 5-199442, although the ring lens can surely prevent the light from escaping to the outside, regarding the radial direction component of the ring lens in the light irradiated from the fiber, Although refraction occurs and light is condensed, the refraction does not occur in regard to the circumferential component and light is not condensed, so that sufficient light cannot be condensed on a minute area.

Therefore, in the present invention, in this type of illumination system for inspection or the like, the light irradiating device has a structure capable of remarkably improving the converging degree and the converging efficiency as compared with the conventional one, and the converging area and the converging efficiency are improved. The main objective is to provide products that can sufficiently meet the recent demands for work inspection.

[0008]

That is, a light irradiating device according to the present invention irradiates an irradiation target site with light introduced through an optical fiber bundle composed of a plurality of optical fibers, and includes a housing. , Separate the optical fiber bundle one by one
Comprising the fiber holding portion for holding disposed in a state in which the light-emitting end portion and a plurality discrete arrangement of the optical fibers, before the convex lens provided one by one corresponding to each of the optical fibers
Serial is characterized in that it has to be held close to or brought close to the light-emitting end of the optical fibers.

In this case, one of the optical fibers
To become the convex lens one each corresponding to the one is attached, and easily can be made smaller condensing area. Further, since it is possible to easily arrange a convex lens close to or close to the light emitting end of the optical fiber, the light emitted from the optical fiber can be refracted without leakage and irradiation with extremely high efficiency. The target area can be irradiated. As a result, it is possible to reasonably meet the demand for a small portion such as a semiconductor chip or a soldering portion of the semiconductor chip to a printed board, which requires a precise inspection.

[0010] Here, a convex lens only needs to correspond functionally one by one separated in correspondence with the optical fiber, do not have to be physically one by one separated. For example, the convex lenses may be connected to each other at their peripheral portions by a thin plate or the like, and a plurality of convex lenses may be physically formed integrally.

The fiber holding portion is provided with each of the optical fibers.
Holds a plurality of light emitting end parts of a ring in a discrete arrangement
It is preferable that As a preferred embodiment for condensed with a small number of parts, is matched with the optical axis of the convex lenses corresponding to the axis of the light-emitting end of the optical fiber, the irradiation target is the optical axis thereof axes and convex lens Those configured so as to face the site are preferable.

On the other hand, in order to contribute to the degree of freedom in manufacturing, the optical axis of the light emitting end of the optical fiber and the optical axis of the corresponding convex lens are shifted so that the light emitted from the light emitting end is shifted. the optical axis is preferably those to be configured to face the bent and the irradiation target region by the convex lens.

In order to collect light more favorably and to facilitate the adjustment of the focal length according to the distance from the light irradiation device to the irradiation target site and the size of the irradiation target site, each light emission is performed. with light emitted through the convex lens is configured so as to be substantially parallel light each other from the end, the single located between the irradiation target portion and the convex lens 2
It is preferable that a lens is further provided, and the irradiation light emitted from each of the convex lenses is refracted by the second lens and collected to the irradiation target site. This is because the focal length can be freely changed only by exchanging the second lens in such a case. The second lens may be a convex lens or a Fresnel lens.

In a preferred specific embodiment for illumination such as inspection, the casing has an observation hole for observing the irradiation target portion, and the fiber holding portion has the observation hole. There may be mentioned a plurality of fiber holding holes which are intermittently or equidistantly provided along the circumferential direction of the above, and through which optical fibers are inserted and held.

As a specific embodiment, the convex lens is
Close to or close to the light emitting end of each optical fiber
The lens holding hole that holds provided, the lens holding hole is provided in correspondence with said fiber insertion hole, it is possible to hold to accommodate the convex lens is given. A so-called ball lens having a spherical shape is preferable as a lens that is preferably held in such a lens holding hole.

[0016] In order to achieve simplification, etc. of the assembly, the fiber holding holes, which become by penetrating the columnar member with the lens holding hole and equal cross-section, said columnar member, inserting a convex lens It is desirable that the lens holding hole is fitted to the side opposite to the irradiation site. It should be noted that the columnar member is preferably a cylinder from the viewpoint of manufacturing, but may have any other shape such as a square pillar or a triangular pillar as long as it has an equal cross-sectional shape. Here, by forming the central axis fiber holding holes along the columnar members, it is possible to the axis of the optical axis and the optical fiber of the convex lens as described above is to match. On the other hand, if a fiber holding hole is provided at a portion deviated from the central axis, the optical axis of the convex lens and the axis of the optical fiber are deviated from each other, so that the direction different from the direction of light emission from the optical fiber, it can be bent optical axis of the irradiation light through a convex lens. That is,
It is also possible to make the optical axis of the irradiation light face the irradiation target site without necessarily setting the axis line at the light emitting end of the optical fiber so as to face the irradiation target site.

As described above, according to the above-mentioned light irradiating device, it is possible to obtain an effect that the degree of converging can be remarkably improved as compared with the conventional case.

The above-mentioned light irradiation device and the light irradiation device
The light source device that supplies light can be connected by an optical fiber bundle, but depending on the application, a light irradiation unit in which the light irradiation device and the light source device are integrated as a unit is convenient. In some cases, it is preferable.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. <First Embodiment> In the first embodiment, the light irradiation device will be described by taking as an example a case where the light irradiation device is used as a component of a product inspection system as shown in FIG.

This product inspection system consists of two horizontal axes,
That is, the XY stage X1 that is a movable support that can move horizontally in the X-axis direction and the Y-axis direction is used.
A light conducting tube X2 supported by the stage X1, an image pickup device X8 for photographing the workpiece XW to be inspected through the light conducting tube X2, and a power source X3 installed at a place different from the XY stage X1. And an LED light source device X5 that is supplied with power from its power source X3 through a robot cable X4.
A, X5B and light irradiation ports X6Aa, X6Ba for irradiating the work XW which is an object to be illuminated with the light conducting tube X.
2 from the light irradiation devices X6A and X6B and the LED light source devices X5A and X5B to the light irradiation device X6.
Optical fiber bundle X that is a light guide that guides light to A and X6B
7A and X7B. Then, the irradiation light emitted from the irradiation ports X6Aa and X6Ba is applied to the irradiation target portion (inspection portion) of the work XW conveyed by a conveying device (not shown), and the appearance state is observed and inspected by the image pickup device X8. It is a thing.

Each part will be described.

The XY stage X1 is, as shown in FIG.
For example, an X stage X11 supported horizontally slidable in the X axis direction by a fixed body XK installed on the transfer device or the floor, and a Y stage X12 supported horizontally slidable in the Y axis direction by the X stage X11. And the Y stage X12 is configured so that the position of the Y stage X12 can be freely set in the horizontal two-dimensional direction. Each stage X
11 and X12 are driven by remote control or automatic position setting using a drive mechanism such as a stepping motor (not shown).

As shown in the figure, the light conducting tube X2 has a cylindrical shape which is fixed to the XY stage X1, specifically, the Y stage X12 via a bracket XB and stands upright. Inside the light conducting tube X2, optical components such as a half mirror and a lens (not shown) are housed. The central axis of the light conducting tube X2 is the work W.
The XY stage X1 is driven to move the photoconductive tube X2 so as to face the irradiation target region.

The image pickup device X8 is, for example, a CCD camera, and is fixed to the upper end of the photoconductive tube X2 so that its image pickup surface faces downward.

The power source X3 is the LED light source device X5A, X5.
It is of a direct current type for supplying power to B and is arranged at a predetermined location apart from the XY stage X1. The robot cable X4 extending from the power source X3 is inserted into the bellows-shaped cable bear X41, and the LED light source device X5 is inserted.
A, X5B. In FIG. 1, the cable carrier X41 has one end attached to the X stage X11 and the other end attached to the Y stage X12. The cable X4 is twisted or twisted by the movement of the Y stage X12 with respect to the X stage X11. Plays a role in preventing Of course, another cable bear may be provided between the fixed body XK and the X stage X11.

The LED light source devices X5A and X5B are provided with, for example, two types in this embodiment. One of them X
5A has one power LED X52 and casing X53
On the other hand, a plurality of (three of R, G, and B) power LEDs X52 of different colors are built in the casing X53 on the other hand.

More specifically, one of the LED light source devices X5A, as shown in FIG. 2, collects the LED X52 arranged on the substrate X51 and the light emitted from the LED X52 to a predetermined condensing portion X54a. Luminous lens mechanism X54
A casing X53 containing a built-in optical fiber bundle X7
Optical input connector X71 attached to the light introducing end of A
And a light output connector X55 for positioning the light-introducing end face of the optical fiber bundle X7A in the light-collecting portion X54a.

The casing X53 is a hollow metal interior having an outer wall, and a fin XFin is integrally provided on the outer wall so as to perform a heat radiating action for the heat generated by the LED X52.

The LED X52 is a surface emitting type bare chip, and an electric cable X4 is connected to a substrate X51 which supports the LED X52 and extends from a side plate X531 of a casing X53. In addition, this side plate X531
Is configured so that the board X51 and the LED X52 can be removed together and replaced.

The lens mechanism X54 is a pair of lenses X54.
1 and X542 are arranged in series, and LEDX5
2 and the optical output connector X55. Then, the first lens X5 for the light source arranged on the LEDX52 side
The light emitted from the LED X52 is made substantially parallel by 41, and the light is condensed by the second lens for light source X542. In the present embodiment, the first lens X541 is a substantially cone-shaped cone that expands outward in the direction in which light travels, and the irradiation portion of the LED X52 is located inside the conical surface on the light introducing end side. It is formed by forming a recessed portion X541a that enters. The light emitted from the LEDX 52 within a predetermined angle is refracted by a refracting / collimating section provided inside the LEDX 52 to be substantially parallel to the lens optical axis, and at the same time, spreads outside the predetermined angle. As for the LEDX, the reflection collimating portion provided on the inner surface is set to be substantially parallel to the lens optical axis.
The light emitted from 52 is made to be substantially parallel light that advances in the lens optical axis direction with almost no leakage. The second lens for light source X542 is the first lens for light source X541.
Is a convex lens disposed so as to face each other with the lens optical axes aligned with each other, and is configured to condense substantially parallel light that has passed through the first lens for light source X541 to the condensing unit X54a.

The optical output connector X55 is a casing X5.
It is attached to the side opposite to the LED side of 3, and the optical fiber bundle X7
It has a connector hole X551 for fitting and holding the optical input connector X71 attached to the end of A. Optical input connector X connected to this optical output connector X55
Reference numeral 71 positions the light-introducing end of the optical fiber bundle X7A at the light-collecting section X54a. The light-introducing end surface of the optical fiber bundle X7A is formed by integrating the end portions of the respective optical fibers X7a constituting the optical fiber bundle X7A by heat melting to form a mirror surface. The diameter of the light condensed by is substantially the same as that of the light introducing end face, and the light is introduced into each optical fiber X7a substantially uniformly.

As shown in FIGS. 3 and 4, the other LED light source device X5B is formed by arranging three LEDs X52 in parallel, and accordingly, there are also three substrates X51 and three lens mechanisms X54. is doing. The colors of the LEDs X52 may be the same, but in the present embodiment, different colors such as R, G, and B are set. The optical output connector X55 has the same shape as that of the one light source device X5A, and only one is provided. Condensing part X54a of each lens mechanism X54
, One end of the internal optical fiber bundle 56 is tightly bundled and attached, and the other end of the internal optical fiber bundle 56 is integrally and randomly densely bundled to the optical output connector X55. It is attached. Therefore, in particular, in the optical output connector X55 of the light source device X5B, the optical connection mechanism XCN is provided inside, and the optical connection mechanism XCN is provided.
In the CN, the light emitted from the internal optical fiber bundle 56 is uniformly mixed, and the uniform light with no color unevenness can be efficiently introduced into each optical fiber forming the external optical fiber bundle X7B. ing.

More specifically, the optical connection mechanism XCN is such that the outer periphery of the cylindrical glass member XGL excluding the end face is mirror-finished and fitted into the connector hole X54a. The glass member has substantially the same diameter as each of the optical fiber bundles X56, X7B, and the axis thereof is the optical fiber bundles X56, X7.
7B and the end faces thereof are arranged so as to be in close contact with the end faces of the optical fiber bundles X56 and X7B. By this, the glass member XGL plays a role as an optical path for conducting and mixing light.
The mirror surface coating portion XCT on the outer periphery thereof plays a role as a catadioptric portion that reflects the light traveling through the glass member XGL inward and does not escape. As described above, the present invention is particularly effective when light is uniformly mixed in the light source device X5B in which the number of LEDs is not limited to three and the LEDs have different colors. Of course, the optical connection mechanism XCN may also perform, for example, a mirror surface treatment on the inner peripheral surface of the connector hole so that the space between the other end of the optical fiber bundle 56 and the input end of the optical input connector is completely surrounded by the mirror surface. May be present, or a clad rod type glass member composed of two layers of a core and a clad may be used to obtain the same effect. In addition, this LED light source device X
Also in 5B, each substrate X51 and LED X52 can be individually pulled out, removed, and replaced.

From these LED light source devices X5A and X5B, optical fiber bundles X7A and X7B, which are flexible light guides covered with an outer tube, extend and pass through the outside, and a light irradiation device X6A is attached to the device main body 2. X6B
Connected to. This optical fiber bundle X7A, X7B is 3
It is an extremely short length of about 0 cm to 40 cm, and a light input connector X71 fitted to the light output connector X55 is attached to the base end thereof, while the light irradiation devices X6A and X6B are attached to the tip end thereof, respectively. . Note that FIG. 9 shows an optical fiber bundle X formed by tightly bundling the optical fibers X7a.
An example of 7A (7B) is shown. The wire diameter is smaller in (b) than in (a) in the figure.

The light irradiation device X6A is supplied with light from the LED light source device X5A through the optical fiber bundle X7A,
The light is for illuminating the irradiation target portion from the surroundings, and is an ultra-small one having an outer diameter of about 10 mm to 30 mm. This light irradiation device X6A is attached to the irradiation target site side end of the light conducting tube X2, that is, the lower end, and is used for observing the irradiation target site XW as shown in FIGS. 6 to 8. It comprises a cylindrical casing X6A1 having an observation hole X6H, a fiber bundle holder X6A2 for holding one end of the optical fiber bundle X7A, and a cover body X6A3 for covering the casing X6A1 from the outside. .

More specifically, the casing X6A1 has a cylindrical shape and its inner periphery is the observation hole X6H.
A11 and a ring-shaped head portion X6A which is fitted onto the housing body X6A11 and protrudes outward in a brim shape from the peripheral edge portion of the observation hole X6H, that is, the end portion on the irradiation target site side.
12 and.

The collar portion of the head portion X6A12 has
A plurality of through holes XHL set at a predetermined angle with respect to the axis of the observation hole X6H so that the central axis line XL passes through the center point of the irradiation target portion XW are arranged at equal intervals along the circumferential direction. It is provided.

[0038] The through-hole XHL, as shown enlarged in FIG. 8, the inner diameter is at the same or substantially the same as the outer diameter of the convex lens serving as a ball lens X9, only one end portion of the irradiated portion W side Ball lens X9 with slightly smaller diameter
Plays a role as the lens holding hole that fits in the other end side without a gap and holds the one end side so as not to come off.
The irradiation target site side opening of each through hole XHL is a light irradiation opening X6Aa. However, at the other end of the lever through hole XHL, a columnar member XB having the same or substantially the same diameter as the inner diameter thereof is formed.
However, the ball lens X9 is also fitted by press-fitting or the like so as to prevent the ball lens X9 from being pulled out. The columnar member XB is, for example, a resin molded product such as polyacetal, and has a fiber holding hole XB1 penetrating along its central axis, and an optical fiber X7a is inserted and held in the fiber holding hole XB1.

The fiber holding hole XB1 has an inner diameter set to be the same as or substantially the same as the outer diameter of the optical fiber X7a, and the large diameter portion XB11 formed by conically forming from one end on the irradiation site XW side. The small diameter portion XB12 is formed by melting the light irradiation end portion of the optical fiber X7a inserted from the other end portion toward the one end portion using a hot plate or the like, and the melting portion X7a1 is formed into the large diameter portion. It is fitted into the XB11 without any gap. In the present embodiment, the tip end surface of the fusion zone X7a1 is irradiated with the irradiation site XW on the cylindrical member XB.
Side of the melted part X
The front end surface of 7a1 is in contact with the ball lens X9.

That is, with such a configuration, the ball lenses X9 are brought into close contact with the light emitting ends of the respective optical fibers X7a one by one, and the axis line XL and the light of the ball lenses X9 at the light emitting ends of the respective optical fibers X7a. The irradiation target region XW is illuminated from the surroundings by setting the axes so as to face the irradiation target region XW.

The fiber bundle holder X6A2 is a housing X6A.
The optical fiber bundle X7A is attached so as to project to the outside of the optical fiber bundle 1 and holds one end of the optical fiber bundle X7A as described above. Then, each optical fiber X7a is connected to this fiber bundle holding unit X
Up to 6A2, keep the shape as a bundle, from here 1
The light emitting end portions are held by the respective fiber holding portions XB1 apart from the book. Optical fiber bundle X7A
A connector X71 is attached to the other end of the LED light source device X5A so that the irradiation light emitted from the LED light source device X5A can be introduced.

The cover body X6A3 has a cylindrical shape, and a space XS is formed between the cover body X6A3 and the outer peripheral surface of the lower end portion of the casing X6A1.
Is attached to the housing X6A1 so as to form Then, in the space XS, the optical fibers X7
contain and protect a.

On the other hand, as shown in FIG. 5, the other light irradiating device X6B has a slender cylindrical shape for tightly bundling and holding the ends of the optical fiber bundle X7B extending from the other LED light source device X5B. A circular irradiation port X formed at the tip of the light irradiation device X6B from the densely gathered tip surfaces.
Light is emitted through 6Ba. This light irradiation device X6B, as shown in FIG.
6Ba is attached to the upper end of the light conducting tube X21 in a posture in which it is oriented in a direction orthogonal to the axial direction of the light conducting tube X21. Then, the light emitted from the irradiation port X6Ba is reflected and refracted through an optical member such as a half mirror provided inside the light conducting tube X21, travels downward along the axial direction of the light conducting tube X21, and the housing X6A1. It is configured to be emitted from the lower end opening to illuminate the irradiation target portion XW from above.

The present system configured as described above operates as follows.

First, when a work such as a printed circuit board is carried by the carrying device, for example, the alignment mark of the work is taken in from the image pickup device X8 and recognized by an image recognition unit (not shown), and the position information of the alignment mark is calculated. To do. Then, based on the position information, the XY stage X1 is automatically controlled so as to position the photoconductive tube X21 just above the irradiation target portion W of the work. As a result, the irradiation target region W is illuminated from the surroundings and directly above by the light emitted from the light irradiating devices X6A and X6B, and the imaging device X is illuminated.
An image of the irradiation target site W is obtained by 8. By performing the position control of the XY stage X1 in this manner, conversely, the position information of the work can be obtained. This position information may be used in the subsequent steps, and the present device can also be used as a position measuring device for the workpiece. In addition, it can also be used for reading barcodes.

Therefore, the light irradiation device X according to the present embodiment.
According to 6A, the light emitted from each of the optical fibers X7a is refracted by the ball lens X9 provided corresponding to each optical fiber X7a so as to have a strong directivity. Therefore, the irradiation target site XW
It is possible to easily reduce the light collecting area at. Further, since the ball lens X9 is arranged in close contact with the light emitting end of the optical fiber X7a, each optical fiber X7
The light emitted from 7a is refracted with almost no leakage,
It is possible to irradiate the irradiation target portion XW with extremely high efficiency.

Further, the light source device X5 in the present embodiment.
According to A and X5B, the pair of light source lenses X541 and X54
542 is provided, and in particular, in the lens X541 on the LEDX52 side, a concave portion X541 that accommodates the irradiation surface of the LEDX52
After providing a, since most of the light emitted from the LEDX 52 is once made into substantially parallel light by the refraction and parallelization sections and the reflection and parallelization section, the converging area of the final condensing area is reduced. It can be made as small as possible. on the other hand,
In the optical fiber, the light incident on the light introducing end is emitted from the emitting end at an angle equal to the incident angle,
With such light source devices X5A and X5B, the incident angle of light to each optical fiber X7a can be adjusted all at once by simply setting the second lens for light source 542 appropriately. Therefore, particularly in the light irradiation device X6A in which the ball lenses 9 are associated with the respective optical fibers 7a as in the present embodiment, it is not necessary to adjust each lens 9 individually, and the preferable emission angle and light concentration for light collection are obtained. The area can be easily adjusted.

Then, such light irradiation devices X6A, X6
By using B and the light source devices X5A and X5B in combination, these features are superposed, and a very small portion such as a semiconductor chip or a soldering portion of the semiconductor chip to a printed circuit board requires precise inspection. It is possible to build a system that can easily meet the demands of customers.

On the other hand, in terms of the system as a whole, the LED light source devices X5A and X5B can be easily reduced in weight and size. Therefore, although the LED light source devices X5A and X5B are attached to the XY stage X1, it can be said that XY
It is possible to make the driving of the stage X1 and the light irradiation devices X6A and X6B little affected.

Even if the light irradiation devices X6A and X6B frequently move to correspond to the positions of the respective works, only the electric cable X4 moves, and the LED light source devices X5A and X5B and the light irradiation devices X6A and X6B move relative to each other. Since the positional relationship does not change in principle, the optical fiber bundles X7A and 7B are not deformed. Since the electric cable X4 is far superior to the optical fiber 7a in flexibility, durability, price, etc.,
The XY stage X1 and the light irradiation devices X6A and X6B can be driven with a very small load as compared with the conventional load caused by moving the optical fiber, and the durability and reliability are excellent. . Of course, it is possible to prevent the damage due to the movement of the optical fiber bundles X7A and 7B, and it is possible to eliminate the adverse effects on the reliability and life of the device.

The present invention is not limited to the above embodiment, and various modifications can be made.

10 and 11 show a light irradiation device 6 in which the irradiation opening X6a is formed on a concave spherical surface.
The irradiation ports X6a are densely arranged on the concave spherical surface, and each irradiation port X6a
The tip of the optical fiber X7a faces a through the ball lens X9. The light irradiation device X6 has a plurality (three) of light input connectors X71 and a plurality (three) of optical fiber bundles X7 corresponding thereto. And unlike the above-mentioned embodiment, the optical fibers X7a forming the respective fiber bundles X7 are connected corresponding to the lower, middle, and upper stages, and can be used as a color highlight illumination.
Similar to the above-described embodiment, a through hole that penetrates vertically is provided in the center, and the workpiece XW is inspected through this through hole. The optical fiber bundles X7 may be randomly gathered in the light irradiation device X6.

FIG. 12 shows a ring type light irradiating device X6 as in the above embodiment. This is because the light irradiating device X6 has a small thickness and can be used for a work piece XW such as a microscope.
It is suitable for use in a case where the distance between the irradiation port X6a and the irradiation port X6a is short.

In FIG. 13 , the optical axis of the irradiation light is bent through the lens X9 by setting the optical axis of the lens X9 and the axis of the optical fiber X7a at the light exit end so that the optical axis is bent. It is a fragmentary sectional view of the light irradiation device X6 which turned the irradiation target site | part XW. In this way, the axis at the light emitting end of the optical fiber X7a does not necessarily have to be set to face the irradiation target portion XW.
Specifically, for example, the fiber holding hole XHL may be formed in a portion deviated from the central axis of the columnar member XB.

Further, as shown in FIG. 14 , each lens X9
In order to further collect the light from the
It is also possible to dispose and implement a single second condenser lens (5A is a Fresnel lens in the figure, but any lens such as a convex lens) X75 on which 5A is formed.
In this case, the ball lens X9 is the second lens X7.
Considering the light condensing at 5, it is preferable to convert the light from the optical fiber X7a into substantially parallel light.

Further, depending on the application, the light source device may be integrally provided in the housing of the above-mentioned light irradiation device to form a unit. In that case, it is desirable that the light irradiation device and the light source device are connected by an optical fiber, and the optical fiber is housed in the housing.

Of course, modifications other than the light irradiation device can be considered. Note that various modifications of the light source device will be mainly described in the second embodiment.

For example, by disposing the LED light source device in the vicinity of the irradiation port, the optical fiber can be shortened and the weight can be reduced. Therefore, even if the light irradiation device is movably supported on the XY stage, It is possible to drive it without difficulty. At this time, the light irradiation device may be configured to move slightly or slowly with respect to the XY stage within a range where there is no problem with the reliability and life of the optical fiber.

Further, not only the optical fiber bundle but also one optical fiber can be used. A battery may be built in or attached to the LED light source device as a power source. In this way, cableless can be achieved. Further, electric power may be supplied to the LED light source device from another mechanism that constitutes the present light irradiation device, such as an image pickup device or an XY stage drive mechanism.

Further, the movable support is not limited to the XY stage, and various types such as those capable of three-dimensional position setting can be used.

In the case of performing full-color illumination using LEDs of a plurality of colors (three colors), it is preferable that the optical fibers emitting light of the respective colors are arranged evenly on the side of the light irradiation devices 6A and 6B. <Second Embodiment> In the second embodiment, various aspects on the light source device side will be mainly described. Note that the reference numerals in the following description have nothing to do with the first embodiment.

[0063] 15 and 16, the light source device is shown. In this light source device, a large number of bare chips 2 constituting a chip type light emitting diode as a light emitting body mounted on a substrate K having a substantially rectangular shape (or a circular shape) with its irradiation surface facing forward, each of the light emitting diodes described above. The lens array 3 as the first lens for the light source, which is arranged on the irradiation surface side of the light emitting diode so that the irradiation light emitted from the lens is substantially parallel light, and the light from the lens array 3 is condensed to guide the light. A Fresnel lens 5 as a second lens for a light source for introducing into a light introducing end 4A of an optical fiber bundle (also referred to as a light guide) 4 in which a plurality of optical fibers as a member are bundled, and cooling for cooling the back surface of the substrate K. Means 6 are provided, which are provided in a casing 7.

The substrate K is composed of a glass epoxy substrate or the like, and the upper substrate 17 is formed with the base substrate 1 located on the lower side and the mortar-shaped hole 17a integrated thereabove.
However, the substrate K may be composed of only the base substrate 1 without the upper substrate 17. A portion of the upper substrate 17 having the mortar-shaped hole 17a is referred to as a reflector. By providing the reflector 17a, there is an advantage that the light that spreads to the left and right of the light from the bare chip 2 can be reflected by the reflector 17a and guided to the front side, but it is not necessary.

The light source device is suitable for being used mainly for the purpose of inspecting products in factories and inspection rooms, but may be used for other purposes. The number of optical fibers forming the optical fiber bundle 4 may be any number as long as it is plural. Further, the lens array 3 is composed of the same number of lens portions 3A arranged corresponding to the bare chips 2 of the respective light emitting diodes, but is capable of converting the light from the bare chips 2 of the light emitting diodes into substantially parallel light. It may have any configuration as long as it is provided. Reference numeral 4B shown in FIG. 15 is a light emitting end, and the light emitted from the light emitting end 4B is applied to the inspection object to perform the inspection.
For example, a camera (not shown) for capturing the reflected light reflected from the inspection object or the transmitted light transmitted through the inspection object is provided, and the light emitting diode is turned on when the shutter of the camera is opened or before the shutter is opened. Further, lighting control means (not shown) for controlling lighting of the light emitting diode may be provided to turn off the light emitting diode after a lapse of a predetermined time after the shutter is closed. Reference numeral 24 shown in FIG. 15 is a dimming knob, and 25 is ON to the power source.
This is a power switch for turning off.

The bare chip 2 of the light emitting diode is shown in FIG.
16 and 19 , a portion of the substrate K excluding the outer peripheral edge of the upper substrate 17, that is, a large number of mortar-shaped holes 17a.
Directly in a predetermined order on the base substrate 1 corresponding to, that is, in the order of the bare chip 2A of the red light emitting diode, the bare chip 2B of the green light emitting diode, and the bare chip 2C of the blue light emitting diode from the top at the same pitch in the lateral direction. After mounting, the bare chip 2 is hermetically protected with a transparent material (plastic such as epoxy or silicone, elastomer, or glass) 19. Here, a bare chip is mounted on the base substrate 1 corresponding to a large number of mortar-shaped holes 17a of the upper substrate 17 constituting the substrate K to form a light emitting diode. However, in a light emitting diode with a reflector having one hole, It may be one in which a large number is connected, or one without a reflector. Alternatively, the reflection efficiency may be increased by plating the surface of the upper substrate 17 or coating the surface with a reflective layer. In addition, a chip-type light-emitting diode is a surface mount type (a cathode and an anode) provided with a pair of electrodes (cathode and anode) through through holes (which may be omitted) on the front and back of a base made of an insulating material such as resin or glass epoxy. Surface
Mount device), or may be a chip type light emitting diode having another structure. By using a chip type light emitting diode,
Although there is an advantage that the packaging density can be increased, a shell type light emitting diode may be used depending on the case. Figure
Reference numeral 26 shown in 17 is a wire for connecting the bare chip and an electrode (not shown).

On the outer peripheral edge of the upper substrate 17 which constitutes the substrate K, bare chips 2A, 2B of the light emitting diode,
Current limiting resistors 18R, 18G, 1 connected to 2C
8B is attached. Here, since the base substrate 1 and the upper substrate 17 are integrated to form the substrate K, the resistors 18R, 1 are provided on the outer peripheral edge of the upper substrate 17 of the substrate K.
8G and 18B are attached, but when the upper substrate 17 is not provided or a separately formed reflector having a size smaller than that of the base substrate 1 is set, that is, bare chips 2A, 2B and 2C can be attached In the case of providing a separately formed reflector having a size of 1 mm, the reflector is directly attached to the outer peripheral edge of the base substrate 1.
Further, the resistor 18R, 18G, placement 18B is 19
The arrangement other than that shown in FIG. Further, as shown in FIG. 17 , by providing one resistor for a predetermined number of bare chips (the number is four in the figure, any number may be provided), which is advantageous in terms of downsizing and assembly. It is also possible to connect one resistor to each bare chip.

As shown in FIGS. 15 and 16 , a cylindrical member 20 into which the introduction end 4A side portion of the optical fiber bundle 4 can be inserted is attached to the front surface of the casing 7, and the optical fiber bundle 4 is introduced into the cylindrical member 20. The cylindrical member 20 is provided with a screw 23 for fixing the end 4A portion in the inserted state.

[0069] Further, the cylindrical member 20, FIG. 20 (a)
21 (b) and 21 (c), the inner diameter is different from that shown in FIGS. 21 (b) and 21 (c), and the three different types of cylindrical members 20, 21, 22 have different outer diameters. The optical fiber bundle 4 can be attached. 20 (a), (b), (c)
Then, the mounting means for mounting the optical fiber bundle 4 having three different outer diameter dimensions in the casing 7 is configured by providing the three types of cylindrical members 20, 21, 22. However, the inner diameter can be changed. The mounting means may be configured by one type of configured cylindrical member, or may be another configuration. In addition, 2 of the optical fiber bundles 4 having different outer diameter dimensions
It is also possible to implement one or four or more mountable.

As shown in FIG. 21 , the diameter of the inner diameter of the optical fiber bundle 4 can be increased by providing an adapter into which the introduction end 4A side portion of the optical fiber bundle 4 can be inserted and which is detachably attached to the casing 7 with a screw. Only by preparing a plurality of types of adapters having different outer diameters, the optical fiber bundles 4 having different outer diameter dimensions can be replaced. Specifically, the cylindrical portion 27 into which the introduction end 4A side portion of the optical fiber bundle 4 is inserted, and the cylindrical portion by screwing or loosening the intermediate portion of the cylindrical portion 27 into a screw hole (not shown) of the casing 7 An adapter is constituted by a rectangular flange portion 28 having four screw (screw) insertion holes for fixing and releasing the fixing of 27 to the casing 7.
Further, as shown in FIG. 21 , the introduction end 4 of the optical fiber bundle 4 is
In A, a circumferential groove 29A is formed at a substantially central portion in the longitudinal direction, and a cylindrical insertion portion 29 to be inserted into the cylindrical portion 27 and a light guide holding portion 30 are externally fitted in order from the end side. A cylindrical portion 27 that is fixed and constitutes the adapter
The circumferential groove 29A is formed in one ball (not shown) arranged in a state in which it is protruded inward by a coil spring.
By engaging with each other, the insertion portion 29 can be positioned with respect to the cylindrical portion 27. 27A shown in the figure is a screw hole into which the screw 23 is screwed, and by screwing the screw 23, the insertion portion 29 can be securely fixed to the cylindrical portion 27.

As shown in FIGS. 15 and 16 , the cooling means 6 has a heat-dissipating insulating rubber sheet on the back surface of the front and back surfaces of the substrate K opposite to the side on which the bare chip 2 of the light emitting diode is mounted. (A heat radiation grease etc. may be used) 8
Cooling plate arranged via (optional) 9
And a Peltier element 10 for cooling the substrate K by utilizing the Peltier effect that heat is transferred by passing an electric current through two semiconductor elements having different properties to generate a temperature difference, and the heat generated in the Peltier element 10. The heat radiation fins 11 for transmitting and discharging the heat radiation, and the heat radiation fan 12 for applying cooling air to the heat radiation fins 11 to accelerate the heat radiation. Therefore, the heat transferred through the heat radiating insulating rubber sheet 8 and the cooling plate 9 is cooled by the Peltier element 10, and the heat generated on the opposite side of the Peltier element 10 from the cooling plate 9 is transferred to the heat radiation fin 11. The heat radiation fan 12 accelerates the heat radiation of the heat radiation fins 11.

Although the cooling means 6 is composed of the Peltier element 10, the heat radiation fins 11 and the heat radiation fan 12 as described above, there is an advantage that the cooling can be efficiently performed, but it depends on the number of the light emitting diodes 2 and the like. The Peltier element 10 alone may be provided for implementation, or the radiation fin 11
Alternatively, only the heat radiation fan 12 may be provided.

As shown in FIG. 18 , temperature detecting means 13 including a temperature sensor for detecting the temperature of the substrate K, temperature setting means 14 for setting the temperature of the substrate K as a desired target temperature, and A temperature as a control device for driving and controlling the Peltier element current control unit 15 that controls the current of the Peltier element 10 so that the detected temperature of the substrate K matches or substantially matches the target temperature set by the temperature setting unit 14. The control means 16 is provided to keep the temperature of the substrate K at the set target temperature.

The Fresnel lens 5 is connected to the substrate K (see FIG.
15 ), and the outer shape having substantially the same size is cut into a substantially square shape.
A Fresnel lens that remains circular may be used. Further, by using the Fresnel lens 5, the light emitting diode 2 can be brought closer to the Fresnel lens 5 as compared with the case where a normal convex lens (including a compound lens) is used as well as the reduction in size and weight. The efficiency of taking in light to the light introduction end 4A of the split optical fiber bundle 4 can be increased, but a normal convex lens may be used. In FIG. 17,
Although a state is shown in which a certain amount of gap is formed between the Fresnel lens 5 and the lens array 3, it may be in a close state with almost no gap, or in some cases in contact with each other. . The larger the gap, the harder it is for the heat from the light emitting diode 2 to be transferred, which is effective against problems such as deformation.

As shown in FIG. 19 , with respect to the substrate K, 18 pieces of the red light emitting diode bare chip 2A, the green light emitting diode bare chip 2B, and the blue light emitting diode bare chip 2C are arranged in the horizontal direction in the order of 18 pieces at the same pitch. Although there is an advantage that a well-balanced white light can be obtained by attaching it to the substrate K at, another arrangement may be used. In addition to the bare chips of a plurality of types of light emitting diodes other than the above three types, the bare chips of a single color of the same color may be used.

By implementing and implementing a PWM control circuit for stabilizing the output (voltage, current, power, etc.) by controlling the ON time (pulse width) of the bare chip of the light emitting diode, It is possible to perform light amount control such that the light amount from 2 can be made constant.

As described above, by providing the mortar-shaped hole 17a in the upper substrate 17 which also serves as the substrate K on the irradiation side of the light emitting diode 2, the light which could not be captured is also captured and the amount of light is increased. There is an advantage that can be made.

[0078] The light source device may be a light source device of convenient small (hand-held) to carry as shown in FIGS. 22 to 24. 22 (a) and 22 (b), a cylinder for inserting and supporting the optical fiber bundle 31 at the tip (front end) and internally fitting and supporting the rear end of the cylindrical holding portion 33 that can be fixedly held by the screw 32. -Shaped tip portion 34, a front conical portion 35 having a rear end side that extends outwardly toward the rear end, and a front conical portion 35 that extends rearward from the rear end of the front conical portion 35. A casing 39 is composed of a casing main body 37 including the side cylindrical portion 36 and a lid 38 for closing the rear end opening of the casing main body 37. And the lid 3 that constitutes the casing 39
8 is composed of metal radiation fins, and the radiation fins 3
A heat conductive material 40 is fixed to the inner surface of 8, and a large number of shell type light emitting diodes of three primary colors, that is, 4
A board 44 to which the red light emitting diodes 41, the four green light emitting diodes 42, and the four blue light emitting diodes 43 are attached is fixed in contact with each other. The material 40
As the solid material such as a silicone elastomer sheet filled with an appropriate filler (for example, ceramic particles having good thermal conductivity) for improving thermal conductivity, a semi-solid material formed into a gel, A liquid such as grease can be used.

Further, the light emitting diodes 41, 42, 43
And a lens array (first lens for light source for making light from the light emitting diode into substantially parallel light) 45 including the same number of lens portions 45A arranged corresponding to the respective light emitting diodes in front of In front of the lens array 45, a Fresnel lens 46 is arranged as a second lens for a light source for collecting the light from the lens array 45 and introducing it to the light introducing end 31A of the optical fiber bundle 31. Then, one end of a power cord 47 for supplying electric power to the light emitting diodes 41, 42, 43 is connected to an electrode (not shown) of the substrate 44, and the other end is connected to the heat radiation fin 3
It is configured such that it is exposed to the outside through a hole 38A formed in No. 8 and can be connected to an external power source.

Since the light source device configured as described above does not have a power source, the entire light source device can be made small and lightweight, and the long optical fiber bundle (light guide) 4 described above is unnecessary. Therefore, when the long optical fiber bundle 4 is drawn around and the work is irradiated with light, there is an advantage that damage such as bending of the optical fiber bundle 4 can be prevented. In FIG. 22 (a), the said and the tip of the optical fiber bundle 31 is set to be the same as the distal end of the holding portion 33, but to set a little longer than the tip of the holding portion 33, be carried out by setting a bit shorter You can also or,
Since the optical fiber bundle 31 can be fixed and released by the screw 32, the optical fiber bundle 31 can be used by being replaced with the optical fiber bundle 31 having different lengths. The length of the holding portion 33 is not limited to that shown in the figure. In addition, the four red light emitting diodes 41,
4 green light emitting diodes 42 and 4 blue light emitting diodes 43 for a total of 12 light emitting diodes 41, 42, 4
3 are arranged on the two concentric circles S1 and S2, and the light emitting diodes adjacent to each other in the circumferential direction on the circles on each concentric circle S1 or S2 are light emitting diodes of different colors. The light emitting diodes of the same color are not arranged and can be dispersed. Here, four light emitting diodes are arranged in one concentric circle S1 on the smaller diameter side, and eight light emitting diodes are arranged in the other concentric circle S2 on the larger diameter side, but the number is limited to these. Not a thing.
In the drawings, the letters R, G, B are abbreviated on the surface of the light emitting diodes for easy understanding of the arrangement of the light emitting diodes 41, 42, 43 at a glance.

Figure23In (a) and (b),22
Light emitting diode of the small light source device shown in (a) and (b).
Increase the number of cards 41, 42, 43 (12) to 24
The basic configuration is23a),
Since it is the same as that of (b), it is
The description is omitted. In the figure, the light emitting diode 4
1, 42, 43 are arranged in four concentric circles S1, S2, S
3, S4, light emitting diodes adjacent to each other in the circumferential direction on each circle
Arranged so that the LEDs are light emitting diodes of different colors
is doing. Specifically, the concentric circle S1 with the smallest diameter
Place 4 light emitting diodes, then have the larger diameter
8 LEDs are arranged in the concentric circle S2
Four concentric circles S3 with a diameter
Place 8 pieces on the concentric circle S4 with the next largest diameter.
The light emitting diode of the same color is arranged though the light emitting diode is arranged.
Can be distributed and arranged without being concentrated in one place
If it can be done, it is not limited to the arrangement shown in the figure.
Yes.

The small-sized (handy type) light source device is shown in FIG.
24 (a), (b) may be configured. This is a holding portion 48 that holds the optical fiber bundle 31, and a front case portion 50 that is formed of a cylindrical portion 49 that is formed in a stepwise manner so that the outer surface from the rear end of the holding portion 48 expands outward toward the rear end side. A cylindrical rear case portion 5 having a front open-type bottom portion 51A which is externally fitted and fixed to the front case portion 50, and has a heat radiation fin (which may be omitted) on the side surface.
The casing 52 is composed of 1 and 1. A substrate 54 having a single (one) light emitting diode 53 attached thereto is fixed to the inner surface of the bottom portion 51A of the rear case portion 51 with bolts 55. In front of the light emitting diode 53,
A transparent condensing member 56 having a substantially cone-shaped (generally trumpet-shaped) outer shape as the first lens for the light source for making the light from the light emitting diode 53 into substantially parallel light is disposed. A concave portion 56A into which the irradiation portion 53A of the light emitting diode 53 is inserted is formed on the end face. Further, the front end of the light collecting member 56 is held in a state of being sandwiched between a fixing member 57 for positioning fixed inside the rear case portion 51 and the irradiation portion 53A. Further, in front of the condensing member 56, a convex lens (also a Fresnel lens) as a second lens for a light source for condensing the light from the condensing member 56 and introducing it to the light introducing end 31A of the optical fiber bundle 31. 58) is arranged. Therefore,
Of the light from the light emitting diode 53, the light emitting diode 5
The light which is emitted at a large angle with respect to the optical axis of
The light is reflected by the light reflection layer 56B provided on the outer peripheral surface of No. 6 and is incident on the convex lens 58. 59 shown in the figure
Is a power cord, and has a socket 59A at its end for connecting and disconnecting the power source.

It is also possible to provide a discharge fan (not shown) in the light source device shown in FIGS. 22 to 24 to discharge the hot air inside to increase the cooling efficiency. Although the optical fiber bundle 31 is used as the light guiding member in FIGS. 22 to 24 , it may be composed of a single columnar member made of crystal glass or the like. In this case, it may be possible to irradiate strong light by converging the light so that it is tapered toward the light emission end (tip) side.

The small light source device shown in FIGS. 24 (a) and 24 (b) may be configured and implemented as shown in FIGS. 25 (a) and 25 (b). FIG. 24 (a), the state in which it upper end portion of the optical fiber bundle 31B connectable to a state capable of passing light by inserting the holding portion 48 of the light source device shown are bundled by bands such as in (b) The optical fiber bundle 31A is housed in the cover member 60 and
The front ends of the optical fiber bundles are arranged in a line (or two or more lines) on the lower end of the cover member 60 so that the adjacent optical fiber bundles in a circular shape (ring shape) are in close contact with each other with no gap. Therefore, for example, when the cover member 60 is attached to the tip of the long optical fiber bundle (light guide) 4 described above and the long optical fiber bundle 4 is drawn around to irradiate light to the work as described above, There is no trouble such as damage such as breaking, and there is an advantage that it can be used satisfactorily for a long period of time. A through hole 60A is formed in the cover member 60 shown in the figure, and a lens of a camera, which is an imaging means, is inserted into the through hole 60A, and the light reflected by irradiating the work from the extending portion 31A is reflected by the camera. It is also possible to pick up an image by means such as the above, and to process the image, or it is possible to visually confirm the reflected light from the through hole 60A. 60B shown in FIG. 25A is
A boss portion for internally fitting and supporting the holding portion 48 on the upper end of the cover member 60, and a screw 61 for fixing the internally fitted (inserted) holding portion 48 is provided on the boss portion 60B. I have it. Further, in addition to arranging the tip of the optical fiber bundle 31A in a circular shape, the tip of the optical fiber bundle 31A is arranged in a rectangular shape, an elliptical shape, or a polygonal shape to configure the shape of the annular light emitted from the tip of the optical fiber bundle 31A into any shape. You may. The components shown in the drawing and not described are the same as those described above, and are designated by the same reference numerals.

By constructing the optical fiber bundle 4 or 31 by twisting a large number of optical fibers like a twisted wire, particularly when three kinds of light (red, green, blue) are irradiated through the optical fiber bundle 4 or 31. It becomes possible to obtain a well-balanced (uniform) white color, which is advantageous when using white light.

Further, by implementing the light source device shown in FIG. 25 in such a form that it can be housed in the cover member 60 as shown in FIG. 26 , the size of the light source device can be reduced. The optical fiber bundle 31B shown in FIG. 26 is an extension of the optical fiber bundle 31 of the light source device. or,
In practice, the cover member 60 shown in FIG. 26 is configured so that only one wall is detachable so that the vertical split type, the horizontal split type, or the light source device can be inserted into the cover member 60. Further, by omitting the casing 52 and by configuring only the constituent members constituting the light source device, that is, only the lens 58, the light collecting member 56, the light emitting diode 53, and the optical fiber bundle 31 in the cover member 60, Further, the size of the light source device can be reduced.

Further, the light source device shown in FIG. 15 may be constructed as shown in FIGS. 27 and 28 . 27 and 2
In 8, (although in the figure is a nine, may be any number as long as it is two or more) number of light-emitting diode 53 which is integrated in the substrate 54 shown in FIG. 24 is provided, each of these light-emitting diodes Each light emitting diode 53 is provided with a condensing member 56, which is a substantially cone-shaped (almost trumpet-shaped) and transparent first lens for the light source, for making the irradiation light emitted from 53 substantially parallel.
Of the optical fiber bundle (light guide member) 62 in which a plurality of (or one) optical fibers are bundled by being arranged on the irradiation surface side of the light collecting member 56.
A convex lens (which may be a Fresnel lens) 58, which is the second lens 58 for the light source, to be introduced into A is first for each light source.
The optical fiber bundle is arranged in front of the lens 56, and the end portions (tip portions) of the nine optical fiber bundles 62 on the light emission side are bundled so that the optical fiber bundles are randomly arranged so that the light is not biased due to the variation in the brightness of the light emitting diodes. It is also referred to as a random part because it is bundled together) 62S. In the figure,
Although a light collecting member 63 for further collecting the light from the convex lens 58 on the optical fiber bundle 62 is provided, it may be omitted. Also, FIG. 27 and FIG.
Reference numeral 68 shown in FIG. 28 denotes a radiation fin arranged in contact with the back surface of the substrate 69 to cool the nine substrates 69 (one radiation fin is shown in the drawing, but is divided into nine). 12) shown in FIG. 28 .
Is the heat dissipation fan shown in FIG. 15 , and the details will be described later. In addition, the light emitting end (tip) of the collecting portion 62S is connected to the optical fiber bundle 4 (FIG.
The cylindrical portion 2 provided at the end of the cylindrical member 20 on the side of the casing 7 that holds the internal fitting
By inserting it into 0, the light from the collecting portion 62S can be delivered to the light introducing end 4A of the optical fiber bundle 4 which is fitted and held in the cylindrical member 20. Therefore, as shown in FIG. 15 , by moving the light emitting end 4B of the flexible optical fiber bundle 4 to an arbitrary position,
It is possible to irradiate light from all directions with the inspection object in a predetermined position. FIG. 27
In the above, the case where the nine light emitting diodes 53 are attached to the nine substrates 69 is shown, but the nine light emitting diodes 53 may be attached to a single (single) substrate. Further, although the two lenses, that is, the first lens 56 for the light source and the second lens 58 for the light source are used here, a combination of these two lenses may be used. Further, each of the first lens 56 for the light source and the second lens 58 for the light source is configured by a single lens array or a single Fresnel lens in which a single transparent body is provided with nine lens portions. You can also do it. In addition, FIG. 27
Alternatively, the reflector 17a shown in FIG. 18 may be used. On the other hand, in FIG. 27 , a cylindrical glass member (not shown) is fitted in the cylindrical portion 20A of the cylindrical member 20, and the tip of the optical fiber collecting portion 62S and the light introducing end 4A of the optical fiber bundle 4 (see FIG. 15 )), the columnar glass member is interposed between the glass member and the glass member, so that the light emitted from the tip of the optical fiber collecting portion 62S is efficiently reflected completely by the glass member without causing waste and color unevenness. Uniform light without light, and the optical insertion end 4 of the optical fiber bundle 4
You can lead to A.

Such a structure is effective for uniformly mixing the lights from the light emitting diodes of two or more different colors.

In FIG. 27 , a configuration is shown in which light from nine light emitting diodes is collected in the optical fiber condensing section 62S, but light from any number of light emitting diodes, such as three or six, is collected by the optical fiber. The configuration may be such that they are collected in the section 62S.

Instead of the columnar glass member, a cylindrical glass member having a hollow inside, a metal member having a mirror-finished inner surface, or a clad rod type glass member having two layers of a core and a clad may be used. .

The light condensing member 63 will be described in detail. For example, as shown in FIG. 29 , the four layers 64A, 64B, 64C and 6 are made to have different refractive indexes in multiple stages (four stages in the figure).
As shown in FIG. 27 , a large number of 4D multi-step structure optical fibers 64 are expanded while applying heat, so that the diameter becomes smaller toward the tip side (light emission side). Type or taper type), it has the effect of eliminating the light leaking to the outside by changing the trajectory of the light to the inside, but it is composed of one glass rod. May be
As shown in FIG. 30 , the optical fiber has a taper portion 65A having a smaller diameter toward the tip side and a straight portion 65B having the same diameter from the tip of the taper portion 65A in which the refractive index is gradually and continuously changed. The optical fiber 65 may be a GI (Grated Index) type optical fiber (the optical fiber may be formed only by the tapered portion 65A without the straight portion 65B). Also, the four layers 64A, 64B, 64C, 64
An optical fiber 64 having a multi-step structure such as D, which has a different refractive index stepwise (intermittently) may be used. Further, the optical fiber 65 has a double structure composed of a core 66A which is a high refractive index region and a clad 66B having a low refractive index which surrounds the core 66A, but may have another structure. Further, although the tip end of the light condensing member 63 and the base end of the optical fiber 62 are connected by an adhesive or heat welding, they may be connected by other methods. Reference numeral 67 shown in FIG. 27 is a casing, which is composed of a rectangular tubular casing main body 67B that accommodates the various components, and nine rectangular plate-shaped front lids 67A that close the front opening of the casing main body 67B. There is. Further, behind the nine casing bodies 67B, a single heat radiation fin 68 is arranged which closes all the openings and also serves as a fixing member for fixing the nine substrates 69 with screws. Other configurations may be used. In addition, as shown in FIG. 2
As shown in FIG. 7 , a radiating fan 1 for applying cooling air to the rear side of the radiating fins 68 to accelerate heat release.
2 is provided so that there is an advantage that the reduction of the light emitting efficiency of the light emitting diode 53 due to heat can be avoided and the life can be extended. The radiation fin 68 and the light emitting diode 5
3 A solid material such as a silicone elastomer sheet filled with an appropriate filler (for example, ceramic particles having good thermal conductivity) for improving thermal conductivity between each mounting substrate 69, and a gel. You may implement by providing the configured semi-solid thing or liquid things, such as grease. 27 and 28
Since the other members shown by are the same as those shown in FIG. 15 , the same reference numerals are given and the description thereof is omitted.

The light source device shown in FIGS. 25 (a) and 25 (b) may be configured as shown in FIGS. 31 (a) and 31 (b). That is, FIG. 24 (a), the optical fiber bundle shown in (b) (composed of one glass rod may be) 31 omitted, an optical fiber 71 which gave provided in the guide member 60 shown in FIG. 25 (a) In addition, the light from the convex lens 58 is directly incident. In detail, the casing 5
2 in FIG. 31 (a), the rear case portion 51 and the cylindrical portion 4
The convex lens 5 is composed of two members 9
The light from 8 directly enters the incident end face 71A of the optical fiber 71.
Since it can be made incident on, there is an advantage that the attenuation of the spectrum can be avoided. Reference numeral 72 shown in the figure is a holding member for holding the light incident side end of the optical fiber 71 in the guide member 60, and 73 is a lens 74 of a camera as an image pickup means in a through hole of the guide member 60. A screw 73 (two in the drawing, but any number) may be fixed in the inserted state. The exit ends of the optical fibers 71 are arranged in a circular shape (any shape such as an elliptical shape, a triangular shape, a polygonal shape or the like) at a predetermined interval in a single state or in a state of bundling a plurality of bundled optical fibers 71 in a ring shape. However, as shown in FIG. 25 (b), they can be arranged without any gap.

[0093] The light-emitting end of the light source device shown in FIG. 31, FIG.
As shown by 32 , a convex lens for converting the light from the large number of optical fibers 71 arranged at appropriate intervals on the circumference into substantially parallel light (if it can be converted into substantially parallel light, Fresnel (May be a lens, etc.) 70
A large number (as many as the optical fibers 71) are arranged, and an opening 75 is formed in the center to collect the light from these lenses 71.
It is also possible to dispose and implement a condenser lens (any lens such as a Fresnel lens or a convex lens) 75 on which A is formed. In this way, the convex lens 70
By arranging, the light which is trying to spread from the light emitting end of the optical fiber 71 among the light condensed by the convex lens 58 can be surely taken in by making it substantially parallel light, and the irradiation surface is correspondingly. There is an advantage that the amount of light per unit area can be increased. Further, by changing the convex lens 58 to a lens having a different refractive index,
In FIG. 31, it is possible to change the emission angle emitted from the emission end of the optical fiber 71, and in FIG. 32 , the irradiation range of the light emitted from the condenser lens 75 can be changed. or,
If it can be replaced with the condenser lens 75,
The focusing distance (the distance from the light exit end face to the target work) L can be changed simply by replacing the focusing lens with another focusing lens according to various inspections. Since the other members shown in FIGS. 31 and 32 are the same as those shown in FIGS. 24 and 25 , the same reference numerals are given and the description thereof will be omitted.

[0094]

As described above in detail, according to the present invention, the light collecting efficiency and the light collecting efficiency can be remarkably improved as compared with the conventional one, and the light irradiation device and the light source device are separated by interposing the optical fiber. While utilizing the features of the system described above, it is possible to reasonably meet the demand for a precise inspection that is an extremely small portion such as a semiconductor chip or a soldering portion of the semiconductor chip to a printed circuit board.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a light irradiation device according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view and a rear view of one LED light source device in the same embodiment.

FIG. 3 is a partially cutaway front view of the other LED light source device in the same embodiment.

FIG. 4 is a partially cutaway side view of the other LED light source device in the same embodiment.

FIG. 5 is an overall view of the other light irradiation device in the same embodiment.

FIG. 6 is a vertical cross-sectional view of one light irradiation device in the same embodiment.

FIG. 7 is a bottom view of one light irradiation device in the same embodiment.

FIG. 8 is a partial cross-sectional view of one light irradiation device in the same embodiment.

FIG. 9 is an end view showing a densely bundled state of the optical fibers according to the same embodiment.

FIG. 10 is a vertical cross-sectional view of a light irradiation device according to a modified example of the same embodiment.

FIG. 11 is a bottom view of the light irradiation device according to the modification.

FIG. 12 is an optical illumination according to still another modification of the embodiment.
FIG.

FIG. 13: Illumination in still another modification of the same embodiment .
The partial longitudinal cross-sectional view of the injection apparatus.

FIG. 14 is an illuminator according to still another modification of the embodiment.
The partial longitudinal cross-sectional view of the injection apparatus.

FIG. 15 is an outline of a light source device according to a second embodiment of the present invention .
FIG.

FIG. 16 is a schematic view showing the inside of the light source device in the same embodiment .
Schematic plan view.

FIG. 17 shows a main part inside a light source device according to the same embodiment .
Sectional drawing to show.

FIG. 18 is a control block diagram in the same embodiment.

FIG. 19 is a schematic view showing a light emitting diode according to the embodiment
The front view of the scraped board.

FIG. 20 shows three types of cylindrical members in the same embodiment .
The front view of ((a), (b), (c)).

FIG. 21 is a perspective view of the adapter according to the same embodiment.

FIG. 22 shows a small light source device in the same embodiment,
(A) is a sectional view showing the internal structure, (b) is in (a)
The II sectional view taken on the line.

FIG. 23 is a small light in which the light source device of FIG . 22 is slightly enlarged.
FIG. 3A is a cross-sectional view showing an internal structure, FIG.
Is a sectional view taken along line II-II in (a).

FIG. 24 is a small light according to a modification of the embodiment .
FIG. 3A is a cross-sectional view showing an internal structure, FIG.
Is the rear view of it.

FIG. 25 is a cover member on the tip of the small light source device of FIG . 24;
Is attached, (a) is a side view thereof, (b)
Is a bottom view of the main part of it.

FIG. 26 is a cover member with the light source device shown in FIG .
FIG. 5 is a cross-sectional view showing another small light source device in the completed state.

FIG. 27 shows another modification of the embodiment .
FIG. 3 is a cross-sectional view showing a structure of a main part inside a light source device according to the present invention.

28 is a schematic perspective view of the light source device shown in FIG . 27.

FIG. 29 shows a specific configuration of a light collecting member in the modified example .
Front view.

FIG. 30 is a diagram showing a light condensing device according to still another modification of the embodiment.
The side view which shows the specific structure of a member.

FIG. 31 is an optical fiber provided in the light source device shown in FIG . 25.
-Another small light source device without a bundle is shown (a).
A vertical side view of this, (b) is a bottom view of it.

FIG. 32 is a diagram showing a light source device shown in FIG .
FIG. 6 is a vertical sectional side view showing another small light source device in a state.

[Explanation of symbols]

X7a, X7b ... Optical fibers X7A, X7B, X7 ... Optical fiber bundle XW ... Irradiation target site X6H ... Observation hole X6A1 ... Housing XB1 ... Fiber holding part ( fiber holding hole) X9,70 · · · lens (ball lens) XHL · · · lens holder (lens holding hole) XB · · · columnar member (cylindrical member) X 75 · · · second lens

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁷ Identification code FI // F21W 131: 40 F21W 131: 40 F21Y 101: 02 F21Y 101: 02 (31) Priority claim number Japanese Patent Application No. 2002-175335 (P2002) -175335) (32) Priority date June 17, 2002 (June 17, 2002) (33) Priority claiming country Japan (JP) Application for accelerated examination (72) Inventor Shigeki Masumura Kamigyo-ku, Kyoto City, Kyoto Prefecture Karasuma Dori Independent Sales Le Sakura 374 Tsuruen-cho, CCS Co., Ltd. (56) Reference JP-A-5-199442 (JP, A) JP-A-9-281053 (JP, A) JP-A-63-48445 ( JP, A) JP 7-13041 (JP, A) JP 2001-250409 (JP, A) JP 11-295785 (JP, A) Actually open 4-31202 (JP, U) Actually open 60-64507 (JP, U) International publication 00/036336 (WO, A1) (58) Field (Int.Cl. ^7, DB name) G01N 21/84 F21V 8/00 G02B 6/00 H01L 33/00 H04N 5/225

Claims (9)

(57) [Claims] 1. A device for irradiating an irradiation target site with light introduced through an optical fiber bundle composed of a plurality of optical fibers, wherein the optical fiber bundles are separated from each other in a casing.
That the fiber holding portion for holding disposed in a state in which the light-emitting end portion and a plurality discrete arrangement of the optical fibers, the said convex lens provided one by one corresponding to each of the optical fibers
Hold close to or close to the light emitting end of each optical fiber
The light irradiation device characterized in that. 2. The fiber holding section is provided for each of the optical fibers.
Holds a plurality of light emitting end parts of a ring in a discrete arrangement
The light irradiation device according to claim 1, wherein 3. A pair with an axis line at the light emitting end of an optical fiber
Align the optical axis of the corresponding convex lens, and
It is configured so that the optical axis of the lens faces the irradiation target part.
The light irradiation device according to claim 1 or 2. 4. A pair of axes at the light emitting end of an optical fiber
The optical axis of the corresponding convex lens is shifted, and it comes out from the light emitting end.
The optical axis of the light is bent by a convex lens
The illuminator according to claim 1 or 2, which is configured to face the position.
Shooting device. 5. The light emitted from each light emitting end through a convex lens is
If they are configured so that they are parallel light beams that are substantially parallel to each other,
Both are located between the convex lens and the irradiation target site.
A single second lens is further provided, and this second lens allows
And refracts the irradiation light emitted from each of the convex lenses to
3. The structure according to claim 1 or 2, which is configured to collect in an elephant part.
Light irradiation device. 6. The housing observes the irradiation target site.
An observation hole for
A plurality of holding parts are provided along the circumferential direction of the peripheral edge of the observation hole.
A fiber holder that is provided and holds the optical fiber.
The light irradiation device according to claim 1, which is a holding hole.
Place 7. The convex lens is used to emit light from each of the optical fibers.
Provide a lens holding hole to hold it close to or close to the end,
The lens holding hole corresponds to the fiber holding hole.
It is provided to accommodate and hold the convex lens.
The light irradiation device according to claim 6 . 8. The lens holding hole is the fiber holding hole.
It is made by penetrating a columnar member having the same sectional shape as
Yes, the lens in which a convex lens is inserted in the columnar member
8. The fitting according to claim 7, wherein the holding hole is fitted on the side opposite to the irradiation site.
Light irradiation device. 9. The light irradiation device according to claim 1.
And a light source device that supplies light to the light irradiation device.
The light source device is connected with a fiber bundle and
Light irradiation integrally held in the housing of the light irradiation device
unit.