JP3476901B2 - Cleaning method and cleaning device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method and a cleaning apparatus for cleaning objects to be cleaned such as optical parts and electronic parts.

[0002]

2. Description of the Related Art Conventionally, for cleaning optical elements, for example, a cleaning system such as a non-aqueous solvent, a detergent, a hydrophilic solvent, and a fluorocarbon was generally used. However, as is well known, CFCs have a large impact on the environment, and they are heading for global abolition. Therefore, in recent years, various alternative methods of cleaning systems using this CFC have been proposed. Of which
As one possible alternative cleaning method, patent international publication number W
There is a cleaning method disclosed in O 91/13697.

In this cleaning method, in the first cleaning step, a basic cleaning agent based on a non-aqueous cleaning agent such as low molecular weight siloxane or isoparaffin as a drainer or cleaning agent, or a basic cleaning agent and a surfactant or hydrophilic solvent are used. The method is such that a mixture with a cleaning performance improver is used, and this is further dipped in a basic cleaning agent based on low molecular weight siloxane or isoparaffin in the second cleaning, and then dried. Then, as a drying method, hot air drying at 60 ° C or lower or vapor drying of perfluorocarbon is performed, and as an auxiliary device, water in the cleaning liquid, specific gravity difference separation of oil, separation of only basic cleaning agent, and re-supply system are proposed. is doing.

[0004]

In the above prior art, in the first step (draining / washing step), the article to be washed is treated with a non-aqueous solvent such as low molecular weight siloxane or isoparaffin, or a surfactant or hydrophilic agent. Immersion in a mixture with an organic solvent is carried out. However, the non-aqueous solvent hardly dissolves the water and the surfactant remaining in the object to be cleaned in the step before the first step, so
The cleaning cannot be effectively performed, and there is a drawback that moisture or the like is attached to the surface of the object to be cleaned that has reached the cleaning step using the second non-aqueous basic cleaning agent. When water remains on the surface of the object to be cleaned, it has no chemical dissolving power in the next step, so that water cannot be drained unless some physical force is applied. However, the physical force is comparatively lacking in uniformity as compared with the chemical dissolving power, and it is easily influenced by the usage conditions of the hardware, and thus there is a problem in achieving precise cleaning.

When a cleaning performance improver such as a surfactant is mixed in the non-aqueous solvent in the first step, rinsing the surfactant is performed in the second non-aqueous solvent only step. Is very difficult. That is,
As a result, in both cases, a residue is likely to remain on the surface of the object to be cleaned, and the conventional method is unsuitable for cleaning especially in the field where the appearance quality is a problem.

Further, in the above-mentioned prior art, since the drying temperature is low, it is effective when the object to be cleaned is easily affected by temperature, but there is a drawback that it takes a uniform drying time.

[0007] The present invention has been made in view of such conventional problems, the invention according to claim 1, aims to provide a cleaning method capable of obtaining the best cleaning quality of the object to be cleaned To do. In addition to the above-mentioned object, the invention according to claim 2 achieves a multi-function by simultaneously performing replacement of isopropyl alcohol and cleaning / drying with a non-aqueous solvent,
It is an object of the present invention to provide a cleaning method capable of omitting one step. The inventions according to claims 3 and 4 are respectively
The cleaning method of the invention according to claims 1 and 2 can be carried out.
In addition to being able to regenerate non-aqueous solvents
It is an object of the present invention to provide a cleaning device .

[0008]

In order to solve the above-mentioned problems, the invention according to claim 1 uses a water-based cleaning agent to degrease or hydrophilic the object to be cleaned such as optical parts and electronic parts. A first step of degreasing with a semi-aqueous detergent containing a solvent as a main component, a second step of washing and rinsing with water or pure water, a third step of dehydrating with isopropyl alcohol, and a linear polydiorgano of isopropyl alcohol.
Select from siloxane and cyclic polydiorganosiloxane
Selected low molecular weight polyorganosiloxane or isopa
A fourth step of cleaning the object to be cleaned by substituting it with a non-aqueous solvent which is at least one selected from the raffinic solvents , and a fifth step of performing vapor cleaning and drying under reduced pressure of the non-aqueous solvent.
And the process.

The invention according to claim 2 is the cleaning method according to claim 1, wherein the fourth step of substituting the isopropyl alcohol with the non-aqueous solvent is omitted, and the process directly shifts to the fifth step (actually the fourth step). It was decided to.

In the cleaning method according to claim 1 or 2,
As the linear polydiorganosiloxane, for example, octamethyltrisiloxane, hexamethyldisiloxane, and decamethyltetraloxane are preferable, and as the cyclic polydiorganosiloxane, for example, octamethylcyclotetrasiloxane and decamethylcyclopentasiloxane are preferable. preferable.

The invention according to claim 3 is a processing means for degreasing with an aqueous cleaning agent or a dewatering with a semi-aqueous cleaning agent containing a hydrophilic solvent as a main component, and a processing means for cleaning / rinsing with water or pure water. A treatment means for dehydrating with isopropyl alcohol, a treatment means for substituting isopropyl alcohol with a soluble non-aqueous solvent to wash an object to be washed, and a washing for performing vapor cleaning / drying under reduced pressure of the non-aqueous solvent.
Drying means and non-aqueous system in which isopropyl alcohol is dissolved
A cleaning device was configured with means for regenerating the solvent .

According to a fourth aspect of the present invention, there is provided a processing means for degreasing with an aqueous cleaning agent or a dewatering with a semi-aqueous cleaning agent containing a hydrophilic solvent as a main component, and a processing means for cleaning / rinsing with water or pure water. , A treatment means for dehydration with isopropyl alcohol, a cleaning / drying means for performing vapor cleaning / drying while replacing isopropyl alcohol under a reduced pressure of a soluble non-aqueous solvent, and a means for dissolving isopropyl alcohol.
And a means for regenerating the solved non-aqueous solvent to constitute a cleaning device.

[0013]

That is, in the invention according to claim 1, the object to be cleaned is first degreased with an aqueous or semi-aqueous cleaning liquid, and then washed and rinsed in the previous step with water or pure water.
Next, water is drained with isopropyl alcohol (hereinafter simply referred to as "IPA"), and then immersed in a highly dry non-aqueous solvent (such as siloxane) to replace the IPA with the non-aqueous solvent, and finally to reduce the pressure. Processing is performed by a series of cleaning lines where vapor cleaning and drying are performed below.

Here, in the first and second steps, ordinary adhered oil, fingerprints, etc. are degreased or the abrasive is removed, and then the cleaning liquid is washed and rinsed. That is, washing / rinsing with water of the surfactant. Also,
By using IPA in the third step, the water adhering to the surface of the object to be cleaned and brought into this step is quickly dissolved by IPA, and is uniformly dissolved and dispersed in the solvent liquid. Therefore, even if the object to be cleaned that has been subjected to the second step using water or pure water is subjected to the IPA immersion in the third step, there will be no residual water on the surface to be cleaned. Therefore, the object to be cleaned was immersed in the non-aqueous solvent in the fourth step. In this case, the IPA on the surface is completely replaced with the non-aqueous solvent, and the surface is wetted uniformly. When the object to be cleaned is lifted from this state and cleaned and dried by vapor, generation of spots due to residual water on the surface to be cleaned is eliminated, and good cleaning quality can be obtained.

Further, since the present cleaning method uses the reduced pressure vapor cleaning in the final finishing step, compared with a series of methods such as dipping and pulling up to warm air drying, the cleaning finish quality is improved and the liquid residue is complicated. It is possible to satisfy a desired cleaning quality even for a cleaning sample having a different shape.

Further, paying attention to the third step for the purpose of cleaning, by using IPA, a sufficient degreasing force can be exhibited due to its polarity. That is, even if the dirt attached to the object to be cleaned and the cleaning liquid of the first step are brought into the third step, IPA has a greater cleaning power than the case of using non-aqueous siloxane or isoparaffin. Therefore, it is possible to completely eliminate the dirt brought into the next fourth step. Therefore, the life of the non-aqueous solvent used finally can be extended and the finished cleaning quality can be kept good for a long period of time.

For example, when the invention according to claim 1 is applied to the cleaning of the optical element, the polishing agent, the centering oil, the fingerprint, etc. are removed in the first step (the step of degreasing with the aqueous cleaning agent or the semi-aqueous cleaning agent), In the second step, the cleaning agent is washed and rinsed with water or pure water, the water is replaced (dehydrated) with IPA in the third step, and the IPA is replaced with a non-aqueous solvent in the fourth step. In the process, the non-aqueous cleaning liquid is cleaned and dried with a vapor under reduced pressure.

The IPA in the third step is used for the purpose of draining water as described above, but in the actual cleaning line, much water is brought into the third step, and it is necessary to control the water content of IPA. Is. Therefore, it is advisable to define and use the IPA replacement time based on the production amount and the carry-in amount. on the other hand,
The quality of the non-aqueous solvent in the following fourth step may be maintained by installing a regenerator.

As described above, when the reduced pressure vapor is used after the water is drained, a better result can be obtained than the finish quality obtained by dipping to warm air drying. Further, since the cleaning is performed with a vapor, even if it becomes dirty, the liquid that condenses and adheres to the surface of the object to be cleaned as a vapor and has a cleaning action is clean as in the case of distillation, and is safe and vaporized under reduced pressure. Cleaning with a cleaner liquid is performed.

Further, for the regeneration of the non-aqueous solvent used as the final finishing liquid, a water separator utilizing the difference in solubility between water and IPA and the difference in specific gravity is used. The exhaust gas and the waste liquid after drying under reduced pressure vapor are passed through a water tank while being cooled.
The IPA used in the previous dehydration step is soluble in water, but the non-aqueous solvent used for vapor drying is insoluble in water.
Separation occurs in the lower layer of water in which A is dissolved, and as a result, only the non-aqueous solvent can be taken out. The non-aqueous solvent can be used repeatedly by sending it to the vapor tank. Although IPA in the dehydration step is controlled so that the amount of water dissolved is always 10 wt% or less (preferably 5 wt% or less), even a small amount of water dissolved in the drying non-aqueous solvent is It is completely removed by passing it through a separator. Therefore, such a regeneration method is a good regeneration method having an extremely low IPA content.

[0021]

Example 1 A washing process as shown in FIG. 1 was set and washing was performed. In FIG. 1, part A is a degreasing step (first step), part B is a cleaning / rinsing step (second step), part C is a dehydration step (third step), and part D is a replacement of IPA with a non-aqueous solvent. Process (4th process) and washing / drying process (5th process)
Is. The cleaning apparatus according to the present embodiment has a structure including 11 processing tanks 1, and the first and second processing tanks 1 include a surfactant 2
(Olympus Chemtech Co., Ltd., water-based cleaning solution; EE-
1110), an alkaline surfactant 3 (manufactured by Olympus Chemitech Co., Ltd., an aqueous cleaning solution) in the third and fourth treatment tanks 1;
EE-1120), the pure water 4 is poured into the fifth to seventh treatment tanks 1, and the IPA 5 and the first treatment tanks 1 and 8 are used in the eighth and ninth treatment tanks 1.
Low molecular weight polysiloxane 6 (manufactured by Olympus Chemtech Co., Ltd., non-aqueous cleaning liquid; EE-3)
110) was added.

The low molecular weight polysiloxane 6 used was one containing octamethyltrisiloxane as a main component. An ultrasonic transducer 7 is provided at all bottoms of the processing tanks 1 to 9 and a pump 8 is closed except for the tank in which pure water 4 is put.
An overflow circulation tank was used. Reference numeral 9 is a filter. In particular, the IPA separator 10 is introduced into the tenth treatment tank 1 during the circulation process and brought in.
5 (lower layer) and the low molecular weight polysiloxane 6 were separated, and only the low molecular weight polysiloxane 6 was regenerated.

The frequency and output of ultrasonic waves are 40 kHz and 600 W, and the flow rate of overflow is 5 ml / m.
in. An optical lens was used as the object to be cleaned (cleaning sample) 11, and this basket was attached to the tip of the swing arm 12 and was quickly cleaned. The three-point support basket is shown in FIGS. This basket is a rod-shaped SU
The S frame 13 supports the article 11 to be cleaned by abutting the outer periphery of the article 11 to be cleaned from three locations, and in order to prevent the supported article 11 from laterally moving, a sawtooth fixing member ( A Teflon claw) 14 is provided. In this embodiment, the number of cleaning lenses for one basket is 60.

The eleventh processing tank 1 is a vacuum vapor machine as shown in FIG. 1, and the vacuum drying tank is used so that the vapor cleaning and drying can be performed under the reduced pressure of the low molecular weight polysiloxane 6. 15 and a vapor generator 16. Further, between the vacuum drying tank 15 and the vapor generator 16, a recovery tank 1 is provided to recycle the low molecular weight polysiloxane 6 by a pump 8 and a filter 9.
7 and the recycling tank 18 are interposed.

In this embodiment, the swinging speed of the swinging arm 12 is a reciprocating 2S / 50 mm stroke, and the cleaning time is 1 min for each tank. Further, as the reduced pressure vapor conditions, a vacuum degree of 100 Torr, a reduced pressure time of 1 min, and a steam feed time of 1
0 sec, scavenging time 15 sec, solvent vapor temperature 1
It was set to 40 ° C.

After washing in the above washing step, visual evaluation under a fluorescent lamp was carried out after washing, coating and resistance.
The results are shown in Table 1. According to this example, the cleaning quality was at a good level.

[0027]

[Table 1]

[0028]

[Embodiment 2] The fourth step of the above-mentioned Example 1 was omitted, and after the third step was carried out, the process directly proceeded to the vapor cleaning / drying step under reduced pressure of the non-aqueous solvent. Other steps and conditions were the same as in Example 1. When the object to be cleaned washed according to this example was evaluated in the same manner as in Example 1,
Similar to Example 1, the cleaning quality was at a good level.

In order to verify the effect of the present invention in comparison with the above-mentioned conventional technique, the conventional technique was carried out. As a result, in the above-mentioned conventional technique, most lenses (objects to be cleaned) have stains or the like. Oops. Therefore, an experiment was independently conducted using the cleaning liquid and the like used in the above examples. (Comparative Example 1) Cleaning was performed by setting a cleaning process as shown in FIG. The cleaning device has a structure of 11 tanks. The first and second processing tanks 1 have a surfactant 2 (the above-mentioned aqueous cleaning liquid EE-1110), and the third and fourth processing tanks 1 have an alkaline surfactant 3 (the above-mentioned). Aqueous cleaning liquid EE-1120) is charged, pure water 4 is poured into the fifth to seventh processing tanks 1, and low molecular weight polysiloxane 6 (the non-aqueous cleaning liquid EE-311 is supplied to the eighth to eleventh processing tanks 1).
0) was added. Part A of the cleaning apparatus is a degreasing process, part B is a cleaning / rinsing process, and part E is a draining and drying process. Except for the tenth and eleventh treatment tanks 1, all the treatment tanks 1 were provided with ultrasonic vibrators 7, and a closed overflow circulation tank was used except for the treatment tank 1 containing pure water 4. Figure 4
Inside, 19 is a water separator. As the low molecular weight polysiloxane 6, one having octamethyltrisiloxane as a main component was used. As a cleaning sample, an optical lens was quickly cleaned on a three-point supporting basket. The other detailed experimental conditions are the same as in Example 1. Further, a vacuum vapor machine was used in the eleventh treatment tank 1 as the drying step.

The reduced-pressure vapor condition is a vacuum degree of 100 Tor.
r, decompression time 1 min, vapor feed time 10 sec, scavenging time 15 sec, and solvent vapor temperature 140 ° C.
The same evaluation as in Example 1 was performed on the article to be cleaned in Comparative Example 1, and the results are shown in Table 1 together with Example 1. In Comparative Example 1, more defective products were generated than in Example 1.

(Comparative Example 2) A cleaning process as shown in FIG. 5 was set and cleaning was performed. The cleaning device has a structure of 6 tanks, and the first and second processing tanks 1 have a semi-aqueous cleaning liquid 20 (made by Olympus Chemtech Co., Ltd., EE).
-2210), isoparaffin 21 in the third and fourth treatment tanks 1, and low molecular weight polysiloxane 6 in the fifth and sixth treatment tanks 1 (EE-3110 manufactured by Olympus Chemitec Co., Ltd.).
Was thrown in. The F part of the cleaning device is a degreasing process, and the G part is a semi-aqueous solvent replacement and cleaning / drying process. An ultrasonic transducer 7 was provided in each of the first to fourth processing tanks 1. The structure of the processing tank 1 is such that all the tanks are closed and liquid is circulated through the filter 9 by the pump 8. The liquid flow is in the form of overflow. In FIG. 5, 19 is a water separator. 20mm x 20m as a cleaning sample
A test piece made of aluminum and copper and a glass slide were used. Cleaning time is 1 min for each tank
Only four tanks were shaken and washed while applying ultrasonic waves. The other cleaning conditions are the same as in Example 1. The reduced pressure vapor conditions are a vacuum degree of 100 Torr and a reduced pressure time of 1 mi.
n, vapor feed time was 10 sec, scavenging time was 15 sec, and the solvent vapor temperature was set to 140 ° C.

For the evaluation of the cleaning property, the sample after cleaning was visually and microscopically observed under a fluorescent lamp. The results are shown in Table 2. The results of the appearance observation are as shown in Table 2.
Staining was noticeable on aluminum and glass slides.

[0033]

[Table 2]

Reference Example Using the four-tank simple cleaning evaluation apparatus shown in FIG. 6, draining and drying properties were examined by combining a hydrophilic solvent and a non-aqueous solvent. The first treatment tank 1 is an overflow of flowing water, the second treatment tank 1 is a hydrophilic solvent or a non-aqueous solvent or a combination thereof, and the closed overflow circulation system and the third treatment tank 1 are not. It is a closed overflow tank equipped with a regeneration device for water-based solvents. First,
An ultrasonic oscillator 7 was attached to each of the two tanks. 4th drying process
The tank is a vacuum vapor machine using the same drainage solvent 6 as in the third treatment tank 1, the vacuum degree is 100 Torr, and the vacuum time is 1
min, steam feed time 10 sec, scavenging time 15 sec
And the solvent vapor temperature was set to 140 ° C. The washed sample was a slide glass. Table 3 shows each tank, the combination of the tested liquids, and the test results (visual appearance visual evaluation). From this result, it was found that the effect of draining was good in the case of the combination of IPA and the non-aqueous solvent (the present invention).

[0035]

[Table 3]

Siloxane has a solubility of IPA, and the solubility is 5 to 10 wt%.
Is regenerated by a water separator utilizing the difference in solubility in water. Of these, similarly good results were obtained with octamethylcyclotetrasiloxane and decamethylcyclotetrasiloxane, which are cyclic siloxanes other than straight chain. The water containing the IPA is separated below the tank due to the difference in specific gravity, and most of the IPA is absorbed in the water tank, which facilitates liquid exchange.

Hereinafter, an example in which the steps after the aqueous cleaning agent are the same as the steps according to claim 1, specifically, after carrying out the first step of primary degreasing with a non-aqueous solvent or a semi-aqueous solvent, A second step of secondary degreasing with an aqueous cleaning agent, and then a third step of cleaning and rinsing the second step liquid with water or pure water, and a fourth step of water rinse with IPA And then performing a fifth step of substituting IPA with a non-aqueous solvent to wash an object to be cleaned, and further performing a vapor cleaning / drying of the non-aqueous solvent under reduced pressure. The device will be described. This cleaning method is an effective method as a cleaning step for removing the pitch remaining after the optical element polishing process or the resin-based protective film applied for the subsequent steps. The solid pitch, resin, etc. adhering to the lens cannot be degreased only by the washing step of the water-based cleaning agent, and a degreasing step with a non-aqueous or semi-aqueous solvent is indispensable. This washing process is dissolution, not emulsification. The property of the solvent having the same solubility parameter as the object to be cleaned is utilized to make them compatible. The next step takes a flow of a series of washing steps such as water replacement, IPA replacement with a non-aqueous solvent having high drying property, and vacuum vapor drying. That is, the steps after degreasing with the water-based cleaning agent are the same as the steps of the invention according to claim 1, and the operation is also the same.
By performing this step, solid deposits such as pitch and fingerprints, abrasives, oils, etc. can be removed at once, and the finished quality can be made good without stains.

Next, a concrete example in which the cleaning method having the steps according to the first aspect of the present invention is carried out will be described as a modified example 1 with reference to FIG. Cleaning was performed by setting a cleaning process as shown in FIG. 7. The cleaning device is composed of 14 processing tanks 1, and in the first to third processing tanks 1, an organic solvent 22 (EE-4110 manufactured by Olympus Chemtech Co., Ltd.), and 4th to 7th.
Alkaline surfactant 3 (for example, E
E-1120), pure water 4 is poured over the eighth to tenth treatment tanks 1, and IPA5 and the first treatment tanks 11 and 12 are used.
Low-molecular-weight polysiloxane 6 (for example, EE-3110 described above) was placed in the treatment tanks 1 and 3 of No. 3. EE-4110
Is a non-aqueous terpene hydrocarbon solvent. In FIG. 7, the H part is the primary degreasing process, the I part is the secondary degreasing process, the J part is the cleaning rinse process, the K part is the draining process, and the L part is the IPA replacement and vapor cleaning / drying process.

As the low molecular weight polysiloxane 6, one having octamethyltrisiloxane as a main component was used. An ultrasonic transducer 7 was provided in each of the treatment tanks 1 except the 13th and 14th tanks, and a closed overflow circulation tank was used. As a cleaning sample, the lens with pitch after polishing was washed. Other cleaning conditions are the same as in Example 1. As for the cleaning time, while applying ultrasonic waves in each tank for 1 min,
Rocking was performed in the first to thirteenth tanks. The lens was washed in the main washing step, and an antireflection coat was applied to the finished lens. In the drying step, a reduced pressure vapor (use liquid Olympus Chemitec Co., Ltd., EE-3110) was used. The depressurization vapor conditions are a vacuum degree of 100 Torr, a depressurization time of 1 min, a steam feed time of 10 sec, and a scavenging time of 1.
The solvent vapor temperature was set to 140 ° C. for 5 seconds. After the cleaning, the appearance was free from stains in the appearance evaluation, and the result was good, and the same cleaning quality as that of the conventional 14 tank level trichlene-flon cleaning machine was confirmed. The results (as a first modification) are shown in Table 4.

[0040]

[Table 4]

The low-molecular-weight polysiloxane 6 had the same experimental result and its effect was confirmed when octamethylsiloxane and decamethyltetrasiloxane were used in the final finishing step.

In the invention according to claim 1, when a semi-water-based degreasing detergent is used, the second step, which is a rinse step with water, is omitted, and the cleaning is performed by moving directly to the third step, which is a rinse with IPA. A method is also possible. This method is a shortest and good quality cleaning step as a finishing drying step after degreasing with a semi-aqueous solvent. After the degreasing step of the semi-aqueous solvent, direct replacement is performed by utilizing the good solubility of the semi-aqueous solvent in a hydrophilic solvent such as IPA, and the final non-aqueous solvent vacuum vapor cleaning and drying is performed. To do. According to this cleaning method, desired cleaning quality can be realized in the shortest cleaning process.

Next, a concrete example in which the cleaning method in which the second step according to the first aspect of the present invention is omitted is carried out as a modified example 2 and will be described with reference to FIG. Cleaning was performed by setting a cleaning process as shown in FIG. The cleaning device is composed of six processing tanks 1, and the first and second processing tanks 1 have a semi-aqueous cleaning liquid 2
0 (EE-221 manufactured by Olympus Chemtech Co., Ltd.)
0), IPA 5 was charged in the third and fourth treatment tanks 1, and low molecular weight polysiloxane 6 (EE-3110, manufactured by Olympus Chemtech Co., Ltd.) was charged in the fifth and sixth treatment tanks 1. In FIG. 8, the M part is a degreasing process, the N part is a semi-aqueous solvent replacement process, and the O part is an IPA replacement process. First to fourth processing tanks 1
Up to this, the ultrasonic transducer 7 was arranged. The structure of the processing tank 1 is such that all the tanks are closed and liquid is circulated through a filter 9 by a pump 8. The liquid sent to the processing tank 1 by the pump 8 overflows and returns to the pump 8.

As a cleaning sample, 20 mm × 20 mm
A test piece made of aluminum and copper and a glass slide were used. The cleaning time is 1 min for each tank, and the first to fourth
Only the tank was shaken in all the tanks while applying ultrasonic waves and washed. A vacuum vapor machine was used for the drying step. The reduced pressure vapor conditions are a vacuum degree of 100 Torr and a reduced pressure time of 1.
min, steam feed time 10 sec, scavenging time 15 sec
And the solvent vapor temperature was set to 120 ° C. In addition, the washing conditions and the like are the same as those in the first embodiment. As the cleaning sample, an optical lens was used, and the cleaning property was evaluated by visually observing the sample after cleaning under a fluorescent lamp and observing with a microscope. The results (as Modification 2) are shown in Table 2 together with Comparative Example 2. The results of the appearance observation were good, as shown in Table 2, and there were no spots on the optical lens. The final low molecular weight polysiloxane 6 is
Not only octamethyltrisiloxane, but also hexadimethylsiloxane and decamethyltetrasiloxane produced similar results, confirming the effect.

[0045]

As described above, according to claims 1 and 2
According to the cleaning method of the present invention , the draining step can be sufficiently performed, and the final finish of the object to be cleaned can be excellent and stable quality can be achieved. Further, the cleaning of the invention according to claims 3 and 4
According to the device, by recycling the non-aqueous solvent,
Good cleaning quality without defects can be obtained.

[Brief description of drawings]

FIG. 1 is a process diagram illustrating a cleaning method according to a first embodiment.

FIG. 2 is a plan view showing a basket used in the first embodiment.

FIG. 3 is a side view showing a basket used in the first embodiment.

FIG. 4 is a process diagram showing a cleaning method of Comparative Example 1.

FIG. 5 is a process diagram showing a cleaning method of Comparative Example 2.

FIG. 6 is a process drawing showing the cleaning method of the reference example.

FIG. 7 is a process drawing showing the cleaning method of the first modification.

FIG. 8 is a process drawing showing the cleaning method of the second modification.

[Explanation of symbols]

1 processing tank 2 Surfactant 3 Alkaline surfactant 4 Pure water 5 IPA 6 Low molecular weight polysiloxane 11 Items to be cleaned 20 Semi-aqueous cleaning liquid 22 Organic solvent

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP 5-245451 (JP, A) JP 5-128595 (JP, A) JP 5-68951 (JP, A) JP 5- 96220 (JP, A) (58) Fields surveyed (Int.Cl. ⁷ , DB name) B08B 1/00-7/04

Claims (4)

(57) [Claims] 1. A degreaser that is degreased with a water-based detergent or a semi-water-based detergent whose main component is a hydrophilic solvent.
A second step of washing and rinsing with water or pure water,
The third step of dehydrating with isopropyl alcohol, and isopropyl alcohol with linear polydiorganosiloxane
And low content selected from cyclic polydiorganosiloxanes
Molecular weight polyorganosiloxane or isoparaffin-based solution
A cleaning method comprising a fourth step of cleaning the object to be cleaned by substituting it with a non-aqueous solvent which is at least one selected from the agents , and a fifth step of performing vapor cleaning / drying under reduced pressure of the non-aqueous solvent. . 2. A first degreasing method using a water-based cleaning agent or a semi-water-based cleaning agent containing a hydrophilic solvent as a main component.
A second step of washing and rinsing with water or pure water,
The third step of dehydration with isopropyl alcohol and isop
Ropyl alcohol was added to linear polydiorganosiloxane
And low content selected from cyclic polydiorganosiloxanes
Molecular weight polyorganosiloxane or isoparaffin-based solution
Of at least one non-aqueous solvent selected from the agents
The fourth that performs vacuum cleaning and drying at the same time as replacing under pressure
A cleaning method comprising steps. 3. Degreasing or hydrophilicity with an aqueous detergent
Of degreasing with a semi-aqueous cleaning agent whose main component is an organic solvent
Means and a treatment means for cleaning and rinsing with water or pure water,
A means of dehydration with isopropyl alcohol and an isop
Replace the ropyl alcohol with a soluble non-aqueous solvent and wash
Under the reduced pressure of the non-aqueous solvent and the processing means to wash the purified product
Cleaning / drying means to perform vapor cleaning / drying and isoprop
Means to regenerate the non-aqueous solvent in which pill alcohol is dissolved
A cleaning device comprising: 4. A processing means for degreasing with an aqueous cleaning agent or a degreasing with a semi-aqueous cleaning agent containing a hydrophilic solvent as a main component, and a processing means for cleaning / rinsing with water or pure water.
Replace the isopropyl alcohol under a reduced pressure of a soluble non-aqueous solvent with a treatment means for dehydration with isopropyl alcohol
Washing / drying means to perform vapor washing / drying at the same time
And the non-aqueous solvent containing isopropyl alcohol
Cleaning apparatus characterized by comprising a means for raw.