JP3472825B2 - Energy transmission / reception system and receiver used therefor - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an energy transmitting / receiving system used for a device having an actuator array, for example, to selectively exchange energy wirelessly, and a receiver used therein.

[0002]

2. Description of the Related Art Conventionally, when supplying energy to a plurality of parts such as an actuator array on a device, individual actuators are individually wired from a power source.

[0003]

However, as the number of parts increases, the number of wires also increases, and as a result, it is necessary to arrange these wires so that they do not intersect.
It is extremely difficult to design.

The power source connected to these wirings is
At present, it is larger than an actuator, and as a result, the entire system is relatively large.

It is an object of the present invention to provide an energy transmitting / receiving system and method which can be designed easily and can make the entire system relatively small, and a receiver used therein.

[0006]

An energy transmitting / receiving system according to the present invention includes a transmitter for generating electromagnetic waves of a plurality of frequencies having a predetermined energy and an electromagnetic wave of a corresponding frequency among the plurality of frequencies. hand,
A receiver having a plurality of receiving and converting units for converting into energy, each of the receiving and converting units having a resonance frequency of the corresponding frequency and outputting the energy, and a circuit for outputting the energy. And a part driven by energy, and the circuit has a three-dimensional coil formed by planarly patterning but bending it once in the same direction.

According to the present invention, since energy is exchanged by electromagnetic waves, that is, wirelessly, it is not necessary to wire parts, and the degree of freedom in system design is improved. Further, since it is not necessary to connect the power source to the parts through the wiring, the whole system can be made relatively small.

The three-dimensional coil can be formed by using a semiconductor processing technique, in particular, a photolithography technique. In particular, a plating technique can be used to form a coil having a low resistance and a high inductance.

Another energy transmission / reception system according to the present invention includes a transmitter for generating electromagnetic waves of a plurality of frequencies having a predetermined energy and an electromagnetic wave of a corresponding frequency of the plurality of frequencies, respectively, and converts the electromagnetic waves into energy. A receiver having a plurality of receiving and converting units for converting, each of which has a resonance frequency of the corresponding frequency and outputs the energy, and energy output from the circuit. A part driven by the circuit, the circuit has a substrate, a planar coil formed on the substrate using a folding mechanism, a material that melts at low temperature is patterned into the folding mechanism, It is characterized in that the surface coil is separated from the substrate by utilizing the surface tension generated by melting this. It is.

According to the present invention, since energy is exchanged by electromagnetic waves, that is, by radio, it is not necessary to wire parts, and the degree of freedom in system design is improved. Further, since it is not necessary to connect the power source to the parts through the wiring, the whole system can be made relatively small.

The plane coil can be formed by using a semiconductor processing technique, in particular, a photolithography technique. Particularly, by using a plating technique, a coil having a low resistance and a high inductance can be formed.

The parts may be actuators, and the actuators may be electrostatic actuators (eg comb actuators), piezo actuators or shape memory alloy actuators.

The actuator may include a mirror. In this case, move the mirror without wiring, ie
Since the light reflection can be controlled by changing the angle of the mirror, the present invention can be applied to the image display device.

The part may be a heater containing a material that generates an eddy current such as NiFe. In this case, electromagnetic induction heating can be selectively performed, that is, the heater can be selectively heated.

The parts can also be a motor, such as an electrostatic micromotor. In this case, the motor is driven by selectively supplying energy to each stator.

The receiver according to the present invention comprises a plurality of receiving and converting units for respectively receiving electromagnetic waves of a corresponding frequency among a plurality of frequencies having a predetermined energy and converting the electromagnetic waves into energy. Respectively,
The circuit has a resonance frequency of the corresponding frequency and outputs the energy, and a part driven by the energy output from the circuit, the circuit being patterned in a plane direction in the same direction. It is characterized by having a three-dimensional coil formed by bending once.

According to the present invention, the degree of freedom in designing the system is improved, and the entire system can be made relatively small.

The three-dimensional coil can be formed by using semiconductor processing technology, especially photolithography technology.
By using the plating technique, a coil having low resistance and high inductance can be formed.

Another receiver according to the present invention comprises a plurality of receiving and converting units for respectively receiving electromagnetic waves of a corresponding frequency among a plurality of frequencies having a predetermined energy and converting the electromagnetic waves into energy. Each of the converters has a resonance frequency of the corresponding frequency and includes a circuit that outputs the energy and a part that is driven by the energy output from the circuit, the circuit including a substrate and a bending mechanism. A planar coil formed on the substrate by using, a material that melts at low temperature is patterned into the bending mechanism, and the surface tension generated by melting this is used to form the surface coil. And a plane coil separated from the substrate.

According to the present invention, the degree of freedom in designing the system is improved and the entire system can be made relatively small.

The planar coil can be formed using semiconductor processing technology, especially photolithography technology.
By using the plating technique, a coil having low resistance and high inductance can be formed.

The parts may be actuators, which may be electrostatic actuators (eg comb actuators), piezo actuators or shape memory alloy actuators.

The actuator may include a mirror. In this case, move the mirror without wiring, ie
Since the light reflection can be controlled by changing the angle of the mirror, the present invention can be applied to the image display device.

The part may be a heater containing a material for generating an eddy current such as NiFe. In this case, electromagnetic induction heating can be selectively performed, that is, the heater can be selectively heated.

The parts can also be a motor, such as an electrostatic micromotor. In this case, the motor is driven by selectively supplying energy to each stator.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of an energy transmitting / receiving system and a receiver used therein according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing an energy transmitting / receiving system according to the present invention. This energy transmission / reception system receives a transmitter 1 that generates electromagnetic waves of N (N is an integer) frequencies having a predetermined energy, and an electromagnetic wave of a corresponding frequency of N frequencies, respectively. , N receiving and converting units 2-1, 2-2 ,. ． ． , 2-N.

The transmitter 1 includes an AC power supply 11, a variable capacitor 12 connected to one end of the AC power supply 11, and these AC power supplies 11
And a coil 13 connected in parallel to the variable capacitor 12. In the present embodiment, the variable capacitance of the variable capacitor 12 is Ct, and the inductance of the coil 13 is Lt.

Reception and conversion units 2-1, 2-2 ,. ． ． ，
2-N includes coils 21a-1, 21a-2 ,. ． ． 21
a-N and a capacitor 21b connected in parallel therewith-
1, 21b-2 ,. ． ． LC circuit 2 having 21b-N
1-1, 21-2 ,. ． ． 21-N and actuators 22-1, 22-2 ,. ． ． 22-N and diode 2
3-1, 23-2 ,. ． ． 23-N. These LC circuits 21-1, 21-2 ,. ． ． 21-N, actuators 22-1, 22-2 ,. ． ． 22-N and diodes 23-1, 23-2 ,. ． ． 23-N can be formed on a silicon wafer by conventional semiconductor techniques as described below.

In the present embodiment, the coils 21a-1 and 21a-1 and 21a-2 are provided.
1a-2 ,. ． ． 21a-N have inductances Lr1, Lr2 ,. ． ． LrN. Note that these inductances are Lr1 <Lr2 <. ． ． <LrN
Have a relationship. Also, the capacitors 21b-1 and 21b
-2 .. ． ． 21b-N capacity is Cr1, Cr
2 ,. ． ． CrN. These capacities are Cr1 <C
r2 <. ． ． <Has a relationship of CrN.

As a result, the frequencies of the electromagnetic waves generated from the transmitter 1 are set to the LC circuits 21-1, 21-2 ,. ． ． 21-N
In order to match the resonance frequencies of the
t changes between Cr1 · Lr1 / Lt and CrN · LrN / Lt.

The coils 21a-1, 21a-2 ,. ． ． Two
1a-N is a three-dimensional coil as shown in FIG. 2 or FIG.
A plane coil as shown in is used. These coils can be formed using semiconductor processing technology, especially photolithography technology. By using the plating technique, a coil having low resistance and high inductance can be formed.

In the case of a three-dimensional coil, a three-dimensional coil can be formed by patterning a developed view of the coil into a flat shape (FIG. 2A) and bending it into a coil when it is formed into a three-dimensional shape (FIG. 2B). As described above, by using the bending technique from the plane, it is possible to form a minute and high-inductance coil.

In the case of the plane coil, as shown in FIG. 3, the plane coil 31 is formed on the substrate 33 by using the bending mechanism 32. As a result, the Q value of the coil (quality fa
ctor) and the selectivity of energy supply to each actuator can be improved. A hinge structure using polyimide is effective as the folding mechanism 32. At the time of assembly, a material that melts at a low temperature, such as solder, is patterned on the hinge portion of the bending mechanism 32, and the surface tension generated by melting the material is used to separate the planar coil 31 from the substrate 33.

Actuators 22-1, 22
2 ,. ． ． 22-N is an electrostatic actuator (for example, a comb actuator), a piezo actuator, or a shape memory alloy actuator.

The operation of this embodiment will be described. Transmitter 1
By adjusting the variable capacitance of the variable capacitor 12, the LC circuits 21-1, 21-2 ,. ． ． An electromagnetic wave having a corresponding resonance frequency of 21-N and a predetermined energy is generated. The amount of energy that the electromagnetic wave has is determined by the magnitude of the current supplied to the coil 13, the frequency, the distance between the transmitter 1 and the receiver 2, and the like.

The generated electromagnetic waves are LC circuits 21-1, 21-2 ,. ． ． 21-N and the corresponding actuators 22-1, 22-2
2 ,. ． ． 22-N is an LC circuit 21-1, 21-
2 ,. ． ． It is driven by the energy output from 21-N.

According to this embodiment, the coil 13 and the coils 21a-1, 21a-2 ,. ． ． 21a-N, the energy is exchanged by using inductive coupling with the actuators 22-1, 22-2 ,. ． ． 22-
It is not necessary to wire N, and the degree of freedom in system design is improved. Moreover, since it is not necessary to connect the AC power supply 11 to the parts through wiring, the entire system can be made relatively small.

FIG. 4 is a diagram for explaining a manufacturing process of a receiver of the energy transmitting / receiving system according to the present invention.
When manufacturing an energy transmission / reception system,
An SOI including a substrate 41a having a thickness of 550 μm, a SiO ₂ layer 41b having a thickness of 3.0 μm deposited thereon, and a single crystal layer 41c having a thickness of 5.5 μm deposited thereon.
41 is prepared (FIG. 4A).

Next, reactive ion etching (RIE) is performed to form the electrostatic actuator 42 (see FIG. 4).
B), spin coating and patterning of the polyimide 43 (FIG. 4C). Finally, Cu with a thickness of 5 μm
The receiving coil 44 is formed by sputtering and patterning (FIG. 4D), and the actuator 42
Is separated from SOI 41 (FIG. 4E).

The present invention is not limited to the above-mentioned embodiment, but various modifications and variations are possible. For example, the actuator may be an electrostatic flap actuator array in which a thin film via a substrate and an insulating layer is given a curvature and a voltage is applied to the substrate and the thin film so that the thin film adheres to or separates from the substrate. Further, a microactuator such as an electrostatic microactuator, a piezo microactuator, a shape memory alloy microactuator or the like can be used as a part.

The capacitance and inductance set in the above embodiment can be arbitrarily changed as desired.

Further, the actuator may have a mirror. In this case, since the mirror can be moved without wiring, that is, the angle of the mirror can be changed to control light reflection, the present invention can be applied to the image display device.

Instead of the actuator, it is possible to use a heater containing a material that generates an eddy current such as NiFe. In this case, electromagnetic induction heating can be selectively performed, that is, the heater can be selectively heated.

The actuator can also be a motor, such as an electrostatic micromotor. In this case, the motor is driven by selectively supplying energy to each stator.

[Brief description of drawings]

FIG. 1 is a diagram showing an energy transmitting / receiving system according to the present invention.

FIG. 2 is a diagram showing an elevation coil.

FIG. 3 is a diagram showing a flat coil.

FIG. 4 is a diagram for explaining a manufacturing process of a receiver of the energy transmitting / receiving system according to the present invention.

[Explanation of symbols]

1 transmitter 2 receivers 2-1, 2-2 ,. ． ． , 2-N receiving and converting unit 11 AC power supply 12 variable capacitors 13, 21a-1, 21a-2 ,. ． ． 21a-N coils 21-1, 21-2 ,. ． ． 21-N LC circuits 21b-1, 21b-2 ,. ． ． 21b-N capacitors 22-1, 22-2 ,. ． ． 22-N actuators 23-1, 23-2 ,. ． ． 23-N diode 31 plane coil 32 bending mechanism 33, 41a substrate 41 SOI 41b SiO ₂ layer 41c single crystal layer 42 electrostatic actuator 43 polyimide 44 receiving coil

─────────────────────────────────────────────────── --- Continuation of the front page (56) References JP-A-58-137206 (JP, A) JP-A-4-241004 (JP, A) JP-A-4-262132 (JP, A) JP-A-5- 146182 (JP, A) JP-A-6-6993 (JP, A) JP-A-8-47184 (JP, A) JP-A-2000-182851 (JP, A) (58) Fields investigated (Int.Cl. ⁷⁾ , DB name) B81B 7/02 B81C 3/00 H01F 27/30 H02J 17/00 H05K 1/16

Claims (14)

(57) [Claims] 1. A transmitter that generates electromagnetic waves of a plurality of frequencies having predetermined energy, and a plurality of receiving and converting units that respectively receive electromagnetic waves of a corresponding frequency of the plurality of frequencies and convert the electromagnetic waves into energy. And a receiver having a circuit having a resonance frequency of the corresponding frequency and outputting the energy, and a part driven by the energy output from the circuit. The energy transmitting / receiving system is characterized in that the circuit has a three-dimensional coil formed by planarly patterning but bending the same in the same direction once. 2. A transmitter for generating electromagnetic waves of a plurality of frequencies having predetermined energy, and a plurality of receiving and converting units for respectively receiving electromagnetic waves of a corresponding frequency of the plurality of frequencies and converting the electromagnetic waves into energy. And a receiver having a circuit having a resonance frequency of the corresponding frequency and outputting the energy, and a part driven by the energy output from the circuit. Then, the circuit has a substrate and a plane coil formed on the substrate by using a bending mechanism, and is generated by patterning a material that melts at a low temperature into the bending mechanism and melting the material. An energy transmitting / receiving system, wherein the surface coil is separated from the substrate by using surface tension. 3. The energy transmitting / receiving system according to claim 1, wherein the parts are actuators. 4. The energy transmitting / receiving system according to claim 3, wherein the actuator is an electrostatic actuator, a piezo actuator or a shape memory alloy actuator. 5. The energy transmitting / receiving system according to claim 3, wherein the actuator has a mirror. 6. The energy transmitting / receiving system according to claim 1, wherein the part is a heater including a material that generates an eddy current. 7. The energy transmitting / receiving system according to claim 1, wherein the part is a motor. 8. Receiving electromagnetic waves of corresponding frequencies among a plurality of frequencies having predetermined energy,
A plurality of receiving and converting units for converting into energy, each of which has a resonance frequency of the corresponding frequency and which is driven by energy output from the circuit and circuit that outputs the energy. The receiver has a three-dimensional coil formed by patterning in a plane shape but bending it once in the same direction. 9. An electromagnetic wave of a corresponding frequency among a plurality of frequencies having a predetermined energy is received,
A plurality of receiving and converting units for converting into energy, each of which has a resonance frequency of the corresponding frequency and which is driven by energy output from the circuit and circuit that outputs the energy. The circuit has a substrate and a plane coil formed on the substrate by using a bending mechanism, and a material that melts at a low temperature is patterned into the bending mechanism and melted. A receiver characterized in that the surface coil is separated from the substrate by utilizing surface tension generated by the above. 10. The receiver according to claim 8, wherein the parts are actuators. 11. The receiver according to claim 10, wherein the actuator is an electrostatic actuator, a piezo actuator or a shape memory alloy actuator. 12. The receiver according to claim 10, wherein the part has a mirror. 13. The heater according to claim 8, wherein the part is a heater including a material that generates an eddy current.
The receiver described. 14. The receiver according to claim 8, wherein the part is a motor.