JP3448733B2 - Linear actuator mechanism in vacuum - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work, which is placed in a sealed chamber for processing a work such as glass in a reduced pressure atmosphere, a high vacuum, or an inert gas atmosphere having a certain constant pressure. about the vacuum linear actuator Organization for driving in at least one direction. The in-vacuum linear actuator mechanism according to the present invention is particularly suitable for a laser processing apparatus that performs laser annealing on a substrate such as glass.

[0002]

2. Description of the Related Art An XY stage device for positioning a workpiece used in a laser processing device has a wide processing range (stroke) and has a high motion accuracy within a stroke including acceleration / deceleration and high speed motion. No change is required.

An example of this type of XY stage device of the type used at atmospheric pressure will be described with reference to FIG. In FIG. 7, this XY stage device is
X combining servo motor 61 and ball screw 62
The axis stage 60 includes a servo motor 71 and a ball screw 72.
The Y-axis stage 70 that is a combination of the above and the above is configured to be stacked. Although not shown, the ball screw 62 is combined with a driven member that is driven in the X-axis direction by its rotation, and this driven member is combined with the Y-axis stage 7.
0 is installed. Then, the top plate 80 is combined with the ball screw 72 of the Y-axis stage 70, and the top plate 80 is driven in the Y-axis direction by the rotation of the ball screw 72. As a result, the combination of the X-axis stage 60 and the Y-axis stage 70 drives the top plate 80 in the X-axis direction and the Y-axis direction.

[0004]

As a position control method of the top plate 80, the X axis direction of the top plate 80 based on the rotation detection signals from the encoders 63 and 73 provided in the servo motors 61 and 71, respectively, A semi-closed loop position control system is adopted in which the position in the Y-axis direction is detected and controlled so as to match the target value. However, in this method, the rigidity of the ball screw portion and the influence of backlash are not fed back, so that an error occurs in the position of the top plate 80.

Therefore, instead of the above method, a full closed loop position control method may be adopted in which the position of the top plate 80 is directly detected and fed back. However, this method has a problem that the stability of the control loop due to the vibration of the ball screw portion at the time of high speed movement cannot be ensured and the responsiveness cannot be improved.

Further, in order to secure the positioning resolution, the lead of the ball screw is usually made small. In this case, the movement distance according to the rotation of the servo motor becomes small, and high speed performance is lost. On the contrary, in order to secure high speed, it is necessary to increase the lead of the ball screw. In this case, the moving distance becomes large according to the rotation of the servo motor, and it becomes difficult to ensure accuracy. Therefore, it is difficult to achieve both high-precision positioning and high-speed response.

Therefore, an object of the present invention is to provide a vacuum linear actuator mechanism which can realize a large stroke as compared with a conventional stage, and can realize high-speed and high-accuracy positioning and high trajectory following accuracy.

The present invention also relates to atmospheric pressure from 1.0 × 10 ^-6.
It is to provide a linear actuator mechanism in a vacuum that can be used in an atmosphere up to Torr.

[0009]

[0010]

Vacuum linear actuator mechanism according to the present invention SUMMARY OF THE INVENTION guides a driving source for driving movement of the stage for being placed in a vacuum chamber equipped with a workpiece, the movement of the stage Guide mechanism, position detection means for detecting the position of the stage, and position control for calculating a command value to the drive source from a position detection value from the position detection means and a position control amount target value. And a control device for controlling the drive source with a feedback control system , and the drive source includes :
The stage is driven in the X-axis direction by the X-axis linear motor.
X-axis drive mechanism and Y-axis linear drive
A Y-axis drive mechanism for driving the motor in the Y-axis direction
And the stage is driven by the X-axis drive mechanism.
Mounted on the X-axis base, the X-axis drive mechanism and the front
The X-axis base is driven by the Y-axis drive mechanism.
It is mounted on an axis base, and as the position detecting means, the X
X-axis linear encoder for detecting axis-based position
And a Y-axis linear for detecting the position of the Y-axis base
An encoder and a heater for heating the stage.
Of the stage and the X-axis base
Between the X-axis linear motor and the first and second Y-axis linear motors.
Motor, the X-axis linear encoder, the Y-axis linear
Each encoder has a combination of water cooling means.
Characterized in that that.

In this vacuum linear actuator mechanism
The guide mechanism is provided on the Y-axis base and is attached to the X-axis base.
X-axis linear bearing for guiding the shaft base,
It is provided on the ledge base to guide the Y-axis base.
Y-axis linear bearing for

The controller controls the X-axis drive mechanism.
X-axis feedback for controlling the feedback control system
And an X-axis feedback control unit,
For the control amount command value from the position controller for the secondary low-pass
Of the control amount estimated by the type filter
Inverse of the control target simulating the X-axis linear motor and load
X-axis linear with model and second-order low-pass filter
Estimated actual thrust value estimated from the position detection value from the encoder
Disturbance observer that estimates the difference between
And subtracting the estimated disturbance force from the control amount command value.
It includes a disturbance compensator consisting of a subtractor that compensates the disturbance with
Mu .

In this vacuum linear actuator mechanism,
The Y-axis drive mechanism is a pair of Y-axis drive mechanisms arranged in parallel with each other.
The first and second Y-axis linear motors are provided, and the first and second Y-axis linear motors are provided.
A pair of first and second pairs corresponding to the second Y-axis linear motor.
Y-axis linear encoder is installed and the controller is
The Y-axis drive mechanism is controlled by a feedback control system.
And a Y-axis feedback control unit for
Θ-axis feed bar for controlling the amount of rotation of the device around the Z-axis
And a Y-axis feedback control unit.
Is the first from the first and second Y-axis linear encoders.
Means for calculating the average value of the first and second position detection values, and the Y-axis
Calculate a first difference between the controlled variable target value and the average value
First subtraction means and Y-axis control based on the first difference
A Y-axis position controller for estimating a quantity command value,
The feedback control unit controls the first and second position detection values.
A second subtraction means for calculating a second difference between
Calculating a third difference between the control target value and the second difference
Third subtraction means and control of the θ axis based on the third difference
A Y-axis position controller for estimating a quantity command value,
The feedback control unit further controls the Y-axis control amount command value.
And a control amount command value for the θ-axis is calculated to calculate the difference
4th which outputs as a command value to the 1st Y-axis linear motor
Subtraction means, the θ-axis feedback control unit is
, The θ-axis control amount command value and the Y-axis control amount command value
And is added to the second Y-axis linear motor to obtain a command value.
It has an adding means for outputting .

A vacuum linear actuator according to another aspect of the present invention.
The chute mechanism is located inside the vacuum chamber
A drive source for driving the stage for mounting
A guide mechanism for guiding the movement of the stage,
A position detecting means for detecting the position of the stage;
The position detection value from the position detection means and the position control amount target value
A position controller for calculating a command value to the drive source from
In order to control the drive source with a feedback control system,
And a controller for controlling the stay as the drive source.
Drive the X-axis linear motor in the X-axis direction.
X-axis drive mechanism and Y-axis linear motor for the stage
Y-axis drive mechanism for driving in the Y-axis direction by
The stage is driven by the X-axis drive mechanism.
The X-axis drive mechanism and the X-axis are mounted on the X-axis base.
The Y axis base is driven by the Y axis drive mechanism.
The Y-axis drive mechanism is mounted on the
The pair of first and second Y-axis linear motors installed
Corresponding to the first and second Y-axis linear motors.
A pair of first and second Y-axis linear encoders are provided
The control device further feeds back the Y-axis drive mechanism.
Y-axis feedback control unit for controlling by control system
And to control the amount of rotation of the Y-axis base around the Z-axis
And the Y-axis feedback control unit.
The feedback controller is configured to operate the first and second Y-axis linear encoders.
Calculate the average of the first and second position detection values from the coder
Means between the Y-axis control amount target value and the average value.
A first subtraction means for calculating the difference between the
And a Y-axis position controller that estimates the Y-axis control amount command value.
Including the θ-axis feedback control unit,
A second subtraction to calculate a second difference between the two position detection values
Means and a third difference between the θ-axis control amount target value and the second difference.
A third subtraction means for calculating the difference between the
The θ-axis position controller that estimates the θ-axis control amount command value.
The Y-axis feedback controller may further include the Y-axis feedback controller.
The difference between the control amount command value of
Calculated as a command value for the first Y-axis linear motor
It has a fourth subtraction means for outputting, and the θ-axis feedback
The control unit further controls the θ-axis control amount command value and the Y-axis control value.
The control amount command value is added to add the second Y-axis linear motor.
It has an adding means for outputting as a command value to the computer.
And

A linear actuator in vacuum according to the above-mentioned another form.
The guide mechanism in the ETA mechanism is also based on the Y-axis base.
An X-axis linear provided for guiding the X-axis base
The bearing and the stage base are mounted on the Y-axis
Y-axis linear bearing for guiding the base.

A linear actuator in vacuum according to the above-mentioned another form
In the data mechanism, the position detecting means is also changed.
To detect the position of the X-axis base.
And an X-axis drive mechanism.
X-axis feed for controlling with feedback control system
A back controller, and the X-axis feedback controller is
The control amount command value from the position controller for the X axis is set to the secondary low range.
Estimated value of control amount filtered by a pass filter
And a control pair simulating the X-axis linear motor and load
The X-axis using an inverse model of an elephant and a second-order low-pass filter
Actual thrust estimated from position detection value from linear encoder
Disturbance observer that estimates the difference from the estimated value as the estimated disturbance force
And the estimated disturbance force from the control amount command value
A disturbance compensator consisting of a subtractor that compensates for the disturbance by
Including.

A linear actuator in vacuum according to another embodiment described above.
Also in the eta mechanism, the stage is for heating.
A heater is provided, and the stage and the X-axis base are
Between the X-axis linear motor and the first and second Y
Axis linear motor, the X-axis linear encoder, the first
Each of the first and second Y-axis linear encoders has a water-cooled hand.
The steps are combined.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION With reference to FIGS. 1 and 2, an embodiment of a mechanical structure of a linear actuator mechanism in a vacuum according to the present invention will be described. Here, a configuration suitable for being placed in a vacuum chamber for laser annealing will be described. The vacuum chamber is shown symbolically by dashed line 100 in FIG.
Any material can be used as long as it can be used in an atmosphere up to 0 × 10 ^-6 Torr.

A stage base 9 as a fixed base member is installed at the bottom of the vacuum chamber 100. Y-axis linear bearings 15 and 20 are attached to the stage base 9 so as to extend parallel to the Y-axis direction at distant positions. The Y-axis linear bearings 15 and 20 are
It is for linearly guiding the Y-axis base 14 combined therewith in the Y-axis direction. A pair of X-axis linear bearings 7 is attached to the Y-axis base 14 so as to extend parallel to the X-axis direction at a separated position.
The X-axis linear bearing 7 is for linearly guiding the X-axis base 6 combined therewith in the X-axis direction. The trolley 3 supporting the stage 2 having a built-in heater for heating is attached to the X-axis base 6.
A work (glass, etc.) 1 is placed on the stage 2.

The X-axis base 6 is an X-axis linear bearing 7
Is driven by a pair of X-axis linear motors 8 provided on the Y-axis base 14 adjacent to. The position of the X-axis base 6 is
It is detected by an X-axis linear encoder 10 installed on the Y-axis base 14 adjacent to one X-axis linear motor 8. This directly drives the X-axis base 6 and
Since the position is measured directly, accuracy deterioration due to the conventional backlash is eliminated, and high-speed response is possible.

The Y-axis base 14 is driven by two independently controllable linear motors 18 and 23 provided on the stage base 9. The position of the Y-axis base 14 is detected by two linear encoders 16 and 21 arranged on the stage base 9 adjacent to the linear motors 18 and 23 at two positions on the opposite sides. This gives X
Similar to the shaft, there is no deterioration in accuracy due to backlash, etc., and high-speed response is possible. Further, by detecting the position in the Y-axis direction by the linear encoders 16 and 21 at two locations on the opposite ends of the Y-axis base 14, the minute rotation of the Y-axis base 14 is detected and controlled by the difference between the detected values. can do. The minute rotation of the Y-axis base 14 is rotation around the Z-axis that is perpendicular to the X-axis and the Y-axis,
Hereinafter, this is referred to as rotation θ about the Z axis.

A water cooling plate 4 is provided between the trolley 3 and the X-axis base 6 in order to prevent the radiant heat from the heater of the stage 2 from being transmitted to the X-axis base 6 and the Y-axis base 14. Has been. Further, the X-axis base 6 also has a built-in water cooling mechanism to prevent troubles such as linear bearings due to radiant heat from the heater of the stage 2. Furthermore,
The coils of each linear motor that generate heat during stage operation are
X-axis motor coil cooling plate 11 provided for each linear motor,
The Y-axis motor coil cooling plates 19 and 24 are used for cooling. Further, the X-axis linear encoder 10 and the Y-axis linear encoders 16 and 21 are also provided with the X-axis encoder cooling plate 12 and the Y-axis encoder cooling plates 17 and 22 in order to prevent damage and accuracy deterioration due to thermal deformation. It is configured to be maintained at a constant temperature.

The moving X-axis linear encoder 1
A cable guide 13 is provided corresponding to the X-axis linear encoder 10 in order to guide the detection signal cable from the 0, Y-axis linear encoders 16 and 21 to the fixed portion.
Cable guides 25 are provided corresponding to the axial linear encoders 16 and 21, respectively.

As the X-axis linear bearing 7, the Y-axis linear bearings 15 and 20, and the X-axis linear motor 8 and the Y-axis linear motors 18 and 23, well-known ones can be used. Flat 10-35
The one disclosed in No. 8216 may be used.

Referring to FIG. 4, control of X-axis linear motor 8 is performed by an X-axis feedback control system. The position detection value of the X-axis linear encoder 10 is fed back, the deviation from the X-axis control amount target value is detected by the subtractor 41, and this deviation is given to the X-axis position controller 42. The X-axis position controller 42 creates a control amount command value for the X-axis based on this deviation. A disturbance compensator 43 using a disturbance observer 43-1 is added to the control loop of the X-axis feedback control system to change the friction resistance of the linear bearing.
It is configured to cancel disturbance factors such as water supply piping and current supply cable resistance. The control amount command value output from the disturbance compensator 43 is given to the motor amplifier 44 for the X-axis linear motor 8 as a current command value, and the motor amplifier 44 is based on the given current command value. Control.

Referring also to FIG. 5, the disturbance compensator 43 has the X
It is used to perform highly accurate positioning on the axis and to improve trackability. In the disturbance compensator 43, the control amount command value output from the X-axis position controller 42 is first filtered using the filter 43-11 including the second-order low-pass filter G (s). G (s)
Is the transfer function. In addition, an inverse model (Ms ² / Kf, where M is the mass of the linear motor and the load, Kf is the motor thrust constant) of the controlled object that simulates the X-axis linear motor 8 and the load, and the secondary low-pass filter G X-axis linear encoder 1 using filter 43-12 composed of (s)
The actual thrust estimation value applied to the controlled object is estimated from the position detection value detected at 0. Then, the subtractor 43-1
The disturbance force applied to the controlled object is estimated by taking the difference between the two according to 3. Further, the estimated disturbance force is subtracted from the control amount command value by the subtractor 45 to compensate the disturbance force.

As described above, by using the model composed of the X-axis linear motor 8 and the mass of the load as the controlled object model at the time of estimating the actual thrust, the frictional resistance fluctuation of the linear bearing, the water supply pipe, the current supply cable resistance Fluctuations can be estimated and compensated for as disturbance forces.

Referring to FIG. 6, since the Y-axis linear bearings 15 and 20 are mounted at large intervals on the Y-axis, a yawing error due to rotation θ around the Z-axis is likely to occur. Therefore, in order to ensure the positioning accuracy, each linear bearing is provided with a position measuring / driving system, and the Y-θ control system is adopted.

The position detection value of the Y-axis linear encoder 16 is Y1 _FB , and the position detection value of the Y-axis linear encoder 21 is Y2.
_{If FB} , the Y-axis feedback value Y _FB becomes Y _FB = (Y1 _FB + Y2 _FB ) / 2 by the adder 61 and the 1/2 calculator 62 that add the position detection value Y1 _FB and Y2 _FB. .

Further, the feedback value θ _FB of the θ axis is the second subtracter 67 for subtracting the position detection values Y1 _FB and Y2 _FB.
Therefore, θ _FB = Y1 _FB −Y2 _FB .

The first subtractor 63 uses the Y-axis control amount target value Y
The deviation between _ref and the feedback value Y _FB is calculated, and the Y-axis position controller 64 creates a control amount command value F _Y for the Y-axis based on this deviation.

On the other hand, the third subtractor 68 calculates the deviation between the θ-axis control amount target value θ _ref and the feedback value θ _FB ,
The θ-axis position controller 69 creates a control amount command value F _θ for the θ-axis based on this deviation.

Next, the fourth subtracter 65 subtracts the control amount command value F _{Y for the Y} axis from the control amount command value F _θ for the θ axis, and the subtraction result is the force command value F _Y2 in the motor amplifier. It is output to 66.

On the other hand, the adder 70 adds the control amount command value F _{Y for the Y} axis and the control amount command value F _θ for the θ axis, and the addition result is output to the motor amplifier 71 as the force command value F _Y1. It

The equations for calculating the force command values F _Y1 and F _{Y2 for} the Y-axis linear motors 18 and 23 are as follows.

F _Y1 = F _Y + F _θ F _Y2 = F _Y −F _θ By outputting the calculation result of the above equation to each of the motor amplifiers 66 and 71, the control in the Y-θ direction is performed. In this way, the independently controllable drive system is installed on the Y-axis base 14 with a certain distance, so that the Y-axis base 14 can be controlled.
It is possible to suppress the occurrence of an error due to yawing and to improve the positioning accuracy of the stage.

As described above, by controlling the thrust of each linear motor on the X-axis and the Y-axis based on the position feedback value of each linear encoder, the workpiece 1 placed on the stage 2 is positioned. X-axis and Y-axis 2
Can be done about directions.

Although the embodiment of the present invention has been described as applied to the X, Y biaxial stage, the present invention can be modified as follows. For example, the present invention can be applied to only one X-axis or Y-axis. It is also possible to add a rotation drive mechanism around the Z axis or a drive mechanism in the Z axis direction. That is, by adding a rotary drive mechanism that actively controls the yawing angle θ, the Y-axis base 14
Can be minutely rotated. By using a linear motor as the drive mechanism, the drive unit is non-contact and particle-free. However, the drive source is not limited to the linear motor, and an ultrasonic motor, an air cylinder, or the like may be used. On the other hand, although a linear encoder is adopted as the position detecting means, the position may be detected by using a laser interferometer or the like by attaching an optical mirror or the like to the movable portion. As the guide system, rolling guide using a linear bearing is adopted, but static pressure guide, sliding guide, etc. may be used.

INDUSTRIAL APPLICABILITY The present invention can be generally applied to a processing apparatus, an inspection apparatus, etc. in a sealed chamber that requires a positioning operation in a high vacuum or an inert gas atmosphere of a certain constant pressure.

[0040]

According to the present invention, the following effects can be obtained.

1) By adopting the linear motor drive system, high speed operation under high vacuum, which was difficult in the past,
It has become possible to perform highly accurate positioning.

2) By adding a disturbance observer to the X-axis feedback control system, a high trajectory following performance can be obtained in a low speed region which is important in the process.

3) Since the Y-axis is driven by two sets of independently controllable linear motors, a Y-θ control system can be constructed, and rotation (yawing) around the Z-axis is possible. Positioning accuracy deterioration can be prevented.

4) By attaching a cooling unit to each component, it is possible to provide a linear actuator drive mechanism in a vacuum that ensures a high positioning accuracy even under a high vacuum in which heat is not radiated by convection and is less likely to cause troubles due to heat. .

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view of a vacuum linear actuator drive mechanism according to the present invention.

2 is a vertical cross-sectional view taken along the line CC of FIG.

FIG. 3 is a diagram for explaining a schematic configuration of the drive mechanism of FIG.

FIG. 4 is a block configuration diagram of a control system regarding an X axis in the apparatus of FIG.

5 is a diagram for explaining a specific configuration of the disturbance compensator in FIG.

6 is a block configuration diagram of a control system regarding a Y-axis in the apparatus of FIG.

FIG. 7 is a diagram for explaining a conventional XY stage device.

[Explanation of symbols]

1 work 2 stages 3 trolley 4 Water cooling plate 6 X-axis base 7 X-axis linear bearing 8 X-axis linear motor 9 stage base 10 X-axis linear encoder 14 Y-axis base 15, 20 Y-axis linear bearing 18,23 Y-axis linear motor 16, 21 Y-axis linear encoder

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasushi Kohashigawa 63-30 Yuhigaoka, Hiratsuka City, Kanagawa Sumitomo Heavy Industries, Ltd. Hiratsuka Plant (56) Reference Japanese Patent Laid-Open No. 10-277771 (JP, A) ) JP-A-10-209033 (JP, A) JP-A-11-145049 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G05D 3/00-3/20 H01L 21 / 68

Claims (8)

(57) [Claims] 1. A are placed in a vacuum chamber and a driving source for driving movement of the stage for mounting a workpiece, and a guide mechanism for guiding the movement of the stage, for detecting the position of said stage And a position controller for calculating a command value to the drive source from the position detection value from the position detection means and the position control amount target value, and the drive source in a feedback control system. and a controller for controlling, as said drive source, a linear motor for the X-axis of the stage
An X-axis drive mechanism for driving in the X-axis direction by
The stage is driven in the Y-axis direction by the Y-axis linear motor.
A Y-axis driving mechanism for driving the stage, and the stage is driven by the X-axis driving mechanism.
The X-axis drive mechanism and the X-axis base are mounted on the axis base.
Is a Y-axis base driven by the Y-axis drive mechanism.
Is mounted on and detects the position of the X-axis base as the position detecting means.
X-axis linear encoder for
A Y-axis linear encoder for detecting the position, and a heater for heating is arranged on the stage.
Between the stage and the X-axis base, the X-axis linear model
Data, the first and second Y-axis linear motors, and the X-axis controller
Near encoder and Y-axis linear encoder
The linear actuator mechanism in vacuum is characterized by the combination of water cooling means . 2. The in-vacuum linear actuator mechanism according to claim 1, wherein the guide mechanism is provided on the Y-axis base, and
X-axis linear bearing for guiding the X-axis base,
Provided on the stage base to guide the Y-axis base
And a Y-axis linear bearing for use in a vacuum linear actuator mechanism. 3. The in-vacuum linear actuator mechanism according to claim 1 , wherein the control device feedback controls the X-axis drive mechanism.
Has an X-axis feedback control unit for controlling the system
The X-axis feedback control unit controls the position control for the X-axis.
The control amount command value from the instrument is filtered by a second low-pass filter.
Filtered control amount estimate and the X-axis linear model
Inverse model and secondary low of controlled object simulating data and load
The X-axis linear encoder from the pass filter
The difference from the actual thrust estimation value estimated from the position detection value is not estimated.
Disturbance observer estimated as disturbance force, and the estimated disturbance force
Disturbance is compensated by subtracting from the control amount command value
A vacuum linear actuator mechanism including a disturbance compensator including a subtractor . 4. The in-vacuum linear actuator mechanism according to claim 1, wherein the Y-axis drive mechanism is a pair of first and second Y-axis drive mechanisms arranged in parallel with each other.
The first and second Y-axis linear motors are provided, and the first and second Y-axis linear motors are provided.
A pair of first and second pairs corresponding to the two Y-axis linear motors.
A Y-axis linear encoder is provided, and the controller further controls the Y-axis drive mechanism to feed back.
Y-axis feedback control unit for control by the control system
And to control the amount of rotation of the Y-axis base around the Z-axis
And a Y-axis feedback control unit , wherein the Y-axis feedback control unit includes the first and second Y-axis feedback control units.
Of the first and second position detection values from the linear encoder for axes
Means for calculating an average value, Y-axis control amount target value, and the average
First subtraction means for calculating a first difference between the values;
Y-axis for estimating the control amount command value for the Y-axis based on the first difference
A position controller, and the θ-axis feedback control unit includes the first and second positions.
Second subtraction means for calculating a second difference from the detected position value
And a third difference between the θ-axis control amount target value and the second difference.
And a third subtraction means for calculating
Including a θ-axis position controller that estimates the θ-axis control amount command value.
The Y-axis feedback control unit further controls the Y-axis.
Calculate the difference between the quantity command value and the θ-axis control quantity command value
Output as a command value to the first Y-axis linear motor.
And a fourth subtraction unit, wherein the θ-axis feedback control unit further controls the θ-axis.
The amount command value and the Y-axis control amount command value
Adding hand you the output as a command value to the linear motor 2 for Y-axis
An in-vacuum linear actuator mechanism characterized by having steps . 5. A work is placed in a vacuum chamber for loading a work.
A drive source for driving the stage for mounting, a guide mechanism for guiding the movement of the stage, a position detecting means for detecting the position of the stage, and a position detection value from the position detecting means. And position control amount target value
A position controller for calculating a command value to the drive source from
Then, the drive source is controlled by a feedback control system.
And a control device for controlling the stage as the drive source.
An X-axis drive mechanism for driving in the X-axis direction by
The stage is driven in the Y-axis direction by the Y-axis linear motor.
A Y-axis driving mechanism for driving the stage, and the stage is driven by the X-axis driving mechanism.
The X-axis drive mechanism and the X-axis base are mounted on the axis base.
Is a Y-axis base driven by the Y-axis drive mechanism.
The Y-axis drive mechanism is mounted on the
The first and second Y-axis linear motors are provided, and the first and second Y-axis linear motors are provided.
A pair of first and second pairs corresponding to the two Y-axis linear motors.
A Y-axis linear encoder is provided, and the controller further controls the Y-axis drive mechanism to feed back.
Y-axis feedback control unit for control by the control system
And to control the amount of rotation of the Y-axis base around the Z-axis
And a Y-axis feedback control unit , wherein the Y-axis feedback control unit includes the first and second Y-axis feedback control units.
Of the first and second position detection values from the linear encoder for axes
Means for calculating an average value, Y-axis control amount target value, and the average
First subtraction means for calculating a first difference between the values;
Y-axis for estimating the control amount command value for the Y-axis based on the first difference
A position controller, and the θ-axis feedback control unit includes the first and second positions.
Second subtraction means for calculating a second difference from the detected position value
And a third difference between the θ-axis control amount target value and the second difference.
And a third subtraction means for calculating
Including a θ-axis position controller that estimates the θ-axis control amount command value.
The Y-axis feedback control unit further controls the Y-axis.
Calculate the difference between the quantity command value and the θ-axis control quantity command value
Output as a command value to the first Y-axis linear motor.
And a fourth subtraction unit, wherein the θ-axis feedback control unit further controls the θ-axis.
The amount command value and the Y-axis control amount command value
Adder that outputs as a command value to the 2nd Y-axis linear motor
An in-vacuum linear actuator mechanism characterized by having steps . 6. The in-vacuum linear actuator mechanism according to claim 5, wherein the guide mechanism is provided on the Y-axis base.
X-axis linear bearing for guiding the X-axis base,
Provided on the stage base to guide the Y-axis base
And a Y-axis linear bearing for use in a vacuum linear actuator mechanism. 7. The in-vacuum linear actuator mechanism according to claim 5 , wherein the position detecting means further includes a position of the X-axis base.
An X-axis linear encoder for detection is provided, and the control device feedback-controls the X-axis drive mechanism.
Has an X-axis feedback control unit for controlling the system
The X-axis feedback control unit controls the position control for the X-axis.
The control amount command value from the instrument is filtered by a second low-pass filter.
Filtered control amount estimate and the X-axis linear model
Inverse model and secondary low of controlled object simulating data and load
The X-axis linear encoder from the pass filter
The difference from the actual thrust estimation value estimated from the position detection value is not estimated.
Disturbance observer estimated as disturbance force, and the estimated disturbance force
Disturbance is compensated by subtracting from the control amount command value
A vacuum linear actuator mechanism including a disturbance compensator including a subtractor . 8. A linear actuator in vacuum according to claim 7.
In the data mechanism, the stage is provided with a heater for heating,
Between the stage and the X-axis base, the X-axis linear model
Data, the first and second Y-axis linear motors, and the X-axis controller
Near encoder, the first and second Y-axis linear encoders
Each da has a combination of water cooling means.
Characteristic linear actuator mechanism in vacuum.