JP3325258B2 - Scanning probe microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a scanning probe microscope, and more particularly to a scanning probe microscope with improved measurement accuracy.

[0002]

2. Description of the Related Art A scanning probe microscope is a surface observation apparatus capable of observing and analyzing a sample surface with atomic resolution. Typical examples are a scanning tunneling microscope (STM) using a tunnel current flowing between the probe tip and the sample surface, and an interaction force between the probe tip and the sample surface. Atomic Force Microscope (AFM). AFM is capable of observing a three-dimensional shape at high resolution even on a non-conductive sample surface, and is used for evaluating the surface shape of a semiconductor device, a recording disk, or the like. Here, as a prior art, Review of Scientific Instruments, Vol. 62 (1991)
Year 1393 (Review of Scientific Instruments)
62 (1991), 1393) will be described.

FIG. 7 shows a basic configuration of a feedback correction type AFM. The cantilever 2 is arranged such that the probe 1 provided at the tip thereof faces the surface of the sample 3 held by the sample holding section of the XYZ scanner 7. Probe 1 is XY
When the Z scanner 7 is driven, it moves relatively to the sample 3. When the probe 1 approaches the sample 3, the cantilever 2 bends due to the atomic force acting between them. This amount of deflection is detected by the lever displacement detection unit 4, and the output signal is sent to the Z servo circuit 5. In the lever displacement detector 4,
Displacement detection is performed by an optical lever method, a laser interference method, or the like. Z
In the servo circuit 5, the reference input sent from the Z signal setting unit 6 is compared with the main feedback amount sent from the lever displacement detecting unit 4, and a Z drive signal corresponding to the deviation is output to the XYZ scanner 7. Is done. That is, feedback control is performed so that the interatomic force acting on the probe 1 is kept constant.

On the other hand, an XY signal generator 9 outputs an X trigger signal and a Y trigger signal for XY scanning to an XY servo circuit 8. In the XY servo circuit 8, the X displacement of the XYZ scanner 7 detected by the X displacement detector 10 and the Y displacement
The displacement signal and the Y displacement signal are compared with the X trigger signal and the Y trigger signal, respectively, and the X drive signal and the Y drive signal corresponding to the deviation are output to the XYZ scanner 7. That is, the X trigger signal generated by the XY signal generator 9 and Y
X so that it moves exactly to the XY position indicated by the trigger signal.
The YZ scanner 7 is feedback-controlled.

[0005] The X trigger signal and the Y trigger signal are input to the image acquisition unit 12 and become a Z drive signal, that is, a timing signal for sampling a Z displacement signal of the XYZ scanner 7. The Z displacement signal sampled by the image acquisition unit 12 is stored in an image memory in the image acquisition unit 12 together with the X trigger signal and the Y trigger signal at that time, that is, the XY position signal. The signal stored in this image memory is
Is displayed on the display unit 13 as an image representing the surface shape of the image.

In this feedback correction method,
Since the XYZ scanner 7 is driven with the detection accuracy of the X displacement detecting unit 10 and the Y displacement detecting unit 11, when the XYZ scanner 7 is constituted by a piezoelectric element, the history phenomenon, creep phenomenon, nonlinearity, Responses and other undesirable characteristics of the probe microscope can be easily corrected,
Image distortion can be reduced.

[0007]

In the AFM of the feedback correction system, the causes of the deterioration of the scanning accuracy of the XYZ scanner are nonlinearity and detection sensitivity of the X and Y displacement detecting sections,
This is considered to be a feedback error at the turning point of scanning, which is a transient response of the system. For the former, the scanning accuracy can be improved by using a linear encoder, a laser interferometer, or the like which is excellent in linearity and detection sensitivity. In the linear encoder, interference fringes due to the grating are detected by a photodetector. The interference fringes are displaced with the relative displacement between the grating and the photodetector. With this displacement, a sine signal related to the almost complete period of the grating is obtained from the photodetector, and the sine signal is electrically multiplied so that even a small displacement within one cycle of the sine signal can be detected. This allows up to 0.15 nm
A degree of resolution is obtained, and the nonlinearity representing the deviation from the linear relationship between the detection signal and the relative displacement of the grating and the photodetector within one period of the sine signal is also considered to be zero.
It can be less than 1%. Further, in the laser interferometer, an interference light due to an optical path difference between two branched laser lights is detected by a photodetector. The optical path difference changes with the displacement of the object to be measured, and a nearly perfect sine signal having a period according to the laser wavelength is obtained from the photodetector. Similar to the linear encoder, the sine signal is multiplied. In this case, the same resolution and linearity as those of the linear encoder can be obtained.

The latter feedback error has an amplitude that increases with the scanning speed of the XYZ scanner and a time constant determined by the operation characteristics of the feedback control system. Therefore, along with the scanning speed, the image distortion due to this transient response widens its range from the turning point side on the image, and further increases its size. When measuring the sample size from such an image, the measurement accuracy deteriorates. Let it. The amplitude of the feedback error is
At a scanning speed of about several Hz, it is several percent of the scanning width. This is a serious problem in application of the probe microscope to a length measuring device.

The present invention has been made to solve such a problem, and an object of the present invention is to perform measurement with an accuracy of 0.1% or less of linearity of a high-precision displacement detector such as a linear encoder. An object of the present invention is to provide a feedback correction probe microscope that can correct image distortion due to a feedback error.

[0010]

In order to achieve the above object, a scanning probe microscope according to the present invention comprises a sample holding section for holding a sample, a probe opposed to the sample held by the sample holding section, Fine movement means for finely moving the holding unit or the probe, an XY scanning signal generation unit, detection means for detecting an interaction between the probe and the sample, and fine movement means for receiving the scanning signal from the scanning signal generation unit and When scanning in the XY direction orthogonal to the Z direction, which is a direction parallel to the facing direction of the sample, the scanning probe microscope obtains information on the sample surface based on the detection result obtained from the detection unit, and scans in the XY direction by the fine movement unit Displacement detecting means for detecting the displacement of the sample holder or the probe in the X and Y directions, and feedback of the detection result of the displacement detecting means to the control command value of the fine movement means. Servo control means, storage means for storing the scanning signal from the scanning signal generation unit, the detection result of the displacement detection means and the detection result of the detection means in association with each other, and the observation result of the sample surface based on the storage contents of the storage means. And correction means for correcting

The fine movement means may be a tube-type scanning mechanism made of a piezoelectric material, a tripod-type scanning mechanism constructed by combining three stacked piezoelectric elements, or a parallel plate type using elastic deformation of an elastic body by driving the piezoelectric element. An XYZ scanner such as a scanning mechanism capable of finely moving in a three-dimensional direction can be used. Further, the displacement detecting means is a laser interferometer,
It can be configured using at least one of a linear encoder, a capacitance type displacement meter, and a strain gauge.

The fine movement means is controlled by the Z servo circuit so that the magnitude of the interaction between the probe and the sample becomes a set value.
When the servo drive is performed in the direction, the output of the Z servo circuit is the detection result of the detection unit that detects the interaction between the probe and the sample. On the other hand, when the probe is not servo-driven in the Z direction, the output itself of the detection means for detecting the interaction between the probe and the sample is the detection result.

[0013] The correction means, for example, from the coordinate position designated by the scanning signal from the XY scanning signal generation unit and the corresponding detection position of the displacement detection means, the detection value of the detection means at the designated coordinate position (probe and sample The magnitude of the interaction between is calculated by interpolation and the image is corrected.

The scanning probe microscope according to the present invention also includes a sample holding section for holding a sample, a probe facing the sample held on the sample holding section, fine movement means for finely moving the sample holding section or the probe, and XY. A scanning signal generation unit, and a detection unit for detecting an interaction between the probe and the sample, wherein the fine movement unit receives the scanning signal from the scanning signal generation unit and is in a direction parallel to the facing direction of the probe and the sample. In a scanning probe microscope that forms an image reflecting information on a sample surface based on a detection result obtained from a detection unit when scanning in an XY direction orthogonal to a Z direction, a sample holding unit that is scanned in the XY direction by fine movement unit Alternatively, displacement detecting means for detecting displacement of the probe in the X and Y directions, and a servo for feeding back a detection result of the displacement detecting means to a control command value of the fine movement means Control means, storage means for storing the scanning signal from the scanning signal generation unit, the detection result of the displacement detection means and the detection result of the detection means in association with each other, and correction means for correcting an image based on the storage content of the storage means. And the distortion in the scanning direction in the image is ± 0.1% or less of the scanning width. Image distortion is defined as a distortion vector at each position on the image. That is, each coordinate position designated by the scanning signal of the XY scanning signal generation unit and the actual position of the probe on the sample surface at that time are each a starting point.
Defined as the strain vector to be the end point.

The scanning probe microscope has Z displacement detecting means for detecting displacement of the probe in the Z direction. The storage means stores the scanning signal generated by the scanning signal generating section, the detection result of the displacement detecting means, and the Z displacement. You may comprise so that the detection result of a detection means may be linked | related and memorize | stored.

That is, in this case, the storage means stores the detection result of the Z displacement detection means instead of the detection result of the detection means,
The scanning signal from the XY scanning signal generating unit and the detection result of the displacement detecting means are stored in association with each other. The correction means is, for example,
From the coordinate position designated by the scanning signal from the XY scanning signal generator and the corresponding detection position of the displacement detecting means, the detection result of the Z displacement detecting means at the designated coordinate position (the magnitude of the interaction between the probe and the sample) Is corrected by interpolation calculation.

As displacement detecting means for detecting displacement in the scanning direction, first displacement detecting means for servo control of fine movement means and second displacement detecting means for detecting displacement used by a correcting means for correcting an observation result. And a detecting means. The fine movement means preferably has a parallel plate scanning mechanism.

According to the present invention, the correction means for correcting the observation result of the sample surface based on the detection result of the displacement detection means stored in the storage means after the observation works so as to correct the feedback error of the feedback control means. . As a result, the image distortion due to the feedback error is corrected, so that an image with little distortion can be obtained even at the time of high-speed scanning, and highly accurate length measurement becomes possible.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. Note that, in order to facilitate understanding, in the drawings described below, elements performing the same operations as those described with reference to FIG. 7 are given the same names and reference numerals as in FIG. [Embodiment 1] FIG. 1 is a block diagram showing an example of a scanning probe microscope according to the present invention. At the free end of the cantilever 2, a sharpened probe 1 is provided. The sample 3 is held by a sample holding unit provided in an XYZ scanner 7 that can finely move in a three-dimensional direction. The probe 1 is arranged so as to face the sample 3, and can be displaced relative to the sample 3 by driving the XYZ scanner 7. As the XYZ scanner 7, a tube type made of a piezoelectric material, a tripod type configured by combining three stacked piezoelectric elements, a parallel plate type utilizing elastic deformation of an elastic body by driving the piezoelectric elements, or the like is used.

FIG. 6 shows a parallel plate type driving mechanism as an example. Although only one axis is shown in FIG. 6, a scanner that can be driven in three-dimensional directions can be configured by combining this drive mechanism in three-axis directions. The fixed portion 701, the moving portion 702, and the elastically deforming portions 704, 705, 706, and 707 were formed as an integral structure by wire cutting. When the piezoelectric element 703 incorporated between the fixed part 701 and the moving part 702 is driven in the direction of the arrow to apply a force, the elastically deforming parts 704 to 707 are elastically deformed, and the moving part 702 moves. In this case, the moving direction of the moving unit 702 is changed by the elastic deformation units 704 to 707 to the fixed unit 70.
Limited to the direction parallel to 1. Therefore, since a rotational component is not included in the moving direction unlike a tube-type scanner or the like, it is convenient when correcting nonlinearity or the like of the piezoelectric element. When these piezoelectric elements are used, the driving range is several hundred μm at the longest. To obtain a larger driving range,
This is realized using a motor-driven scanner such as a voice coil.

When the probe 1 and the sample 3 approach each other by the XYZ scanner 7, the cantilever 2 bends due to the interaction force. This amount of deflection is detected by the lever displacement detector 4 and output to the Z servo circuit 5. In the Z servo circuit 5, the deflection signal is compared with the Z signal from the Z signal setting unit 6, and a Z drive signal corresponding to the deviation signal is output to the XYZ scanner 7. By this feedback control, the XYZ scanner 7 moves the ZYZ so that the amount of deflection of the cantilever 2 is kept constant and the interaction force acting between the probe 1 and the sample 3 becomes constant.
Driven in the direction. On the other hand, the XY signal generator 9 outputs an X trigger signal and a Y trigger signal for causing the XYZ scanner 7 to perform XY scanning to the XY servo circuit 8. In the XY servo circuit 8, the X and Y displacement signals of the XYZ scanner 7 detected by the X displacement detecting unit 10 and the Y displacement detecting unit 11 are compared with the X and Y trigger signals, respectively. And the Y drive signal are output to the XYZ scanner 7. That is, feedback control is performed so that the XYZ scanner 7 is accurately displaced to the XY position indicated by the X trigger signal and the Y trigger signal generated by the XY signal generation unit 9.

Since the X and Y displacement detecting units 10 and 11 use displacement detecting means such as a laser interferometer and a linear encoder, XYZ with an accuracy of 0.1% or less with respect to the scanning width.
The displacement of the scanner 7 is detected. The X trigger signal and the Y trigger signal are also input to the image acquisition unit 12, and become timing signals for sampling the Z drive signal of the XYZ scanner 7. Further, in the present embodiment, X and Y together with the Z drive signal are used.
The X and Y displacement signals from the displacement detectors 10 and 11 are also sampled. The X, Y, and Z displacement signals sampled by the image acquisition unit 12 are stored in a storage unit in the image acquisition unit 12 together with the X trigger signal and the Y trigger signal at that time. The signals stored in the storage unit are processed by the software correction unit 22 in the image acquisition unit 12, and the X and Y displacement detection units 10, 1
The display unit 13 displays an image representing the surface shape of the sample 3 in a form in which distortion has been corrected to 0.1% or less, which is the inherent nonlinearity of the sample 1.
Will be displayed.

Next, the operation of the software correction unit 22 will be described with reference to FIG. A rectangular area 90 in FIG. 3A represents a scanning range determined by the X and Y trigger signals generated by the XY signal generator 9. The n × n intersections (x _i , y _j ) are X,
Represents the position where the Y and Z displacement signals are sampled. XY
If there is no scanning feedback error, this intersection point corresponds to the sample point on the sample 3. However, since there is actually a feedback error of several% with respect to the scanning width, the error position is shifted. . Rectangular range 9
As shown in FIG. 3 (b) in which a part of 0 is enlarged, the intersection (x _i , y _j ) on the sample 3 is shifted to the position (X _ij , Y _ij ) represented by the cross mark. The measured image will be distorted as represented by the cross mark.

In the software correction unit 22, the image acquisition unit 12
XY trigger signals (x_i, Y_j)
And XY displacement signal (X_ij, Y_ij) The Z displacement signal Z_ij
, Each position (x_i, Y_jZ value z)_ijIs the interpolation calculation
Is done. There are several interpolation calculation methods.
View of Scientific Instruments
Vol. 62 (1991) p. 1393 (Review of Scie
ntific Instruments 62 (1991), 1393)
Is used. In this method, z_ij= Σ (Z_k/
R_k) / Σ (1 / R_lEach position using the interpolation formula
(X_i, Y_jZ value z)_{i j}Is calculated by interpolation. Where Z
_k, R_k(K = 1, 2, 3, 4) is the position (x_i,
y_j), The four closest positions (X_k, Y_k) (K =
Z displacement signal at (1, 2, 3, 4) and position (x_i,
y_j) To each closest position. This interpolator
Each position (x_i, Y_jZ value z)_ijBut
It is stored in the storage unit. This (x_i, Y_j) For z-value
_ijIs used, the distortion of the sample 3 is corrected.
The image is displayed on the display unit 13 as an image representing the surface shape.

The following method was used to confirm how much image distortion was corrected in this embodiment. There are several methods for evaluating the image distortion, such as a method for evaluating the residual distortion of the image from the measurement results using a standard sample. Here, a method using a high-precision positioning stage was used. In the positioning stage, the position of the stage is detected using a laser interferometer, and the stage can be positioned with an accuracy of 0.1% or less. Here, a silicon substrate on which fine pits having a diameter of 0.1 μm were formed as one marker was fixed on a stage. By moving the positioning stage, the minute pits are moved in a grid pattern at a pitch of 0.1 μm, and an image is acquired at each position using the apparatus configuration of the present embodiment, and the minute pits on the image are acquired. Image distortion was evaluated from the position. As a result, it was confirmed that the distortion, which was about 0.80% with respect to the scanning width before the correction, was reduced to about 0.09%, which is almost 1/10.

In the scanning probe microscope shown in FIG.
XYZ scanner 7 using Z servo circuit 5 so that the deflection signal detected by lever displacement detection unit 4 is constant (so that the interaction force acting between probe 1 and sample 3 is constant). Is feedback-driven in the Z direction, and the Z drive signal of the XYZ scanner 7 is stored in the storage unit in the image acquisition unit 12 as the result of detection of the interaction between the probe 1 and the sample 3. On the other hand, a configuration of a scanning probe microscope that does not use a Z servo circuit is also possible. In such a case, the output of the lever displacement detection unit 4 is used as a detection result of the detection means for detecting the interaction between the probe and the sample, instead of the Z drive signal of the XYZ scanner 7, and the storage unit in the image acquisition unit 12 is used. , And processed by the software correction unit 22, and then displayed on the display unit 13 as an image representing the surface shape of the sample 3. This is the same in the embodiment described later.

[Embodiment 2] FIG. 2 is a block diagram showing another example of a scanning probe microscope according to the present invention.
In the present embodiment, a Z displacement detection unit 14 is newly provided to detect the displacement of the XYZ scanner 7 in the Z direction.
Here, a capacitance sensor was used as the Z displacement detection unit 14. The Z displacement signal from the Z displacement detection unit 14 is
2 and is sampled together with the X and Y displacement signals at the timing of the X and Y trigger signals generated by the XY signal generator 9. The operation of the other parts is essentially the same as in the first embodiment, and a detailed description thereof will be omitted.

In the first embodiment, the Z of the XYZ scanner 7
The drive signal was sampled as a Z displacement signal. In this case, the obtained image is distorted in the Z direction due to hysteresis or the like of the piezoelectric element constituting the XYZ scanner 7. In the present embodiment, the Z displacement of the XYZ scanner 7 is directly detected by the Z
Since the displacement signal is used, the surface shape of the sample 3 can be measured in a form in which the distortion in the Z direction as well as the X and Y directions has been corrected.

When the residual distortion of the measured image was evaluated in the same manner as in the first embodiment, the distortion in the X and Y directions was
Similarly to the above, it was 0.09% with respect to the scanning width. The evaluation in the Z direction was performed by measuring a step sample having a known dimension. The step of the sample used was 103.5 nm.
± 1.5 nm. As a result, a step forming error ± 1.
It was confirmed that it was within 5 nm. By the way, Z
When the distortion in the direction was not corrected, the measurement error in the Z direction was ± 5 nm due to the distortion due to the non-linearity of the piezoelectric element.

[Embodiment 3] FIG. 4 is a block diagram showing a scanning probe microscope according to a third embodiment of the present invention. In the present embodiment, a second X displacement detection unit 15 and a second Y displacement detection unit 16 are provided separately from a detection unit for feedback control of XY scanning, and the detection signal is sampled by the image acquisition unit 12. The operation of the other parts is essentially the same as in the first embodiment, and a description thereof will not be repeated. Even if this configuration is used, the same effect as in the first embodiment can be obtained.
The surface shape of the sample 3 can be measured with the directional distortion corrected. Further, the correction in the Z direction can be performed by adding the same configuration as in the second embodiment.

One example in which the configuration as in the present embodiment is required is when a general-purpose scanner having a built-in strain gauge, capacitance sensor, or the like is used. In such a case,
In the feedback correction method using the built-in sensor, the measurement accuracy is insufficient due to the non-linearity and the feedback error of the built-in sensor. Therefore, in order to improve the measurement accuracy sufficiently, the scanner displacement is detected using another sensor such as a linear encoder or laser interferometer with higher accuracy than the built-in sensor, and the soft correction is performed using the detection signal. There is a need to. When the residual distortion of the image was evaluated using the apparatus of the present embodiment in the same manner as in the first embodiment, it was confirmed that the distortion was reduced to the same degree as the detection accuracy of the linear encoder.

[Embodiment 4] FIG. 5 is a block diagram showing a scanning probe microscope according to a fourth embodiment of the present invention. In the above three embodiments, the configuration in which the sample 3 is scanned with respect to the probe 1 has been described. In the present embodiment, the cantilever 2 is fixed to the drive unit of the XYZ scanner 7 and the probe 1 is moved. The configuration is such that scanning is performed on the sample 3 held in a sample holding unit separate from the XYZ scanner 7. The operation of the other parts is essentially the same as in the first embodiment, and a description thereof will not be repeated. Even if this configuration is used, the same effect as in the first embodiment can be obtained, and the surface shape of the sample 3 can be measured in a form in which the distortion in the XY directions has been corrected. Further, the correction in the Z direction can be performed by adding the same configuration as in the second embodiment.

In the above four embodiments, the case of the measurement mode in which the control is performed in a state where the probe 1 is always in contact with the sample 3 has been described. Alternatively, the present invention can be applied to any other measurement mode such as a case where the probe 1 and the sample 3 intermittently repeat contact and non-contact.

Further, the present invention provides not only an atomic force microscope utilizing an interaction force between a probe and a sample, but also a scanning tunneling microscope utilizing a tunnel current flowing between the probe and a sample, Magnetic force microscope that detects magnetic fields leaking from the sample to obtain magnetic information, capacitance microscope that detects the capacitance between the probe and the sample, static electricity that uses the electrostatic force between the probe and the sample For all scanning probe microscopes using a scanner, such as a force microscope or a near-field light microscope that obtains optical information on the sample surface using near-field light leaking from the tip of the probe, the physical quantity detected by the probe is It goes without saying that it can be applied without depending on it.

[0035]

As described above, according to the present invention, since the correction means for correcting the observation result of the sample surface based on the detection result of the displacement detection means after the observation is provided, the feedback error of the feedback control means is provided. Can be corrected, whereby the image distortion due to the feedback error is corrected, an image with little distortion is obtained even at the time of high-speed scanning, and highly accurate length measurement becomes possible.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an example of a scanning probe microscope according to the present invention.

FIG. 2 is a block diagram showing another example of the scanning probe microscope according to the present invention.

FIG. 3A illustrates an apparent sampling position (x) set by an XY trigger signal generated by an XY signal generation unit;
_i , y _j ), and (b) is a diagram showing the actual sampling positions (X _ij , Y _ij ) on the sample.

FIG. 4 is a block diagram showing another example of the scanning probe microscope according to the present invention.

FIG. 5 is a block diagram showing another example of the scanning probe microscope according to the present invention.

FIG. 6 is a diagram showing a configuration of a parallel plate driving mechanism.

FIG. 7 is a diagram showing a configuration of a conventional technique.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Probe, 2 ... Cantilever, 3 ... Sample, 4 ... Lever displacement detection part, 5 ... Z servo circuit, 6 ... Z signal setting part, 7 ...
XYZ scanner, 8 XY servo circuit, 9 XY signal generation unit, 90 scanning range, 10 X displacement detection unit, 11 Y
Displacement detection unit, 12: image acquisition unit, 22: software correction unit,
13 display unit, 14 Z displacement detection unit, 15 second X displacement detection unit, 16 second Y displacement detection unit, 701 fixed unit, 7
02: moving unit, 703: piezoelectric element, 704, 705, 7
06,707 ... Elastic deformation part

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-88724 (JP, A) JP-A-7-71913 (JP, A) JP-A-7-120250 (JP, A) JP-A-8-87 254540 (JP, A) JP-A-9-218369 (JP, A) JP-A-10-246728 (JP, A) JP-A-6-201374 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 13/10-13/24 G12B 21/00-21/24 G01B 21/30 JICST file (JOIS)

Claims (5)

(57) [Claims] A sample holding unit for holding a sample, a probe facing the sample held by the sample holding unit, fine movement means for finely moving the sample holding unit or the probe, an XY scanning signal generation unit, Detecting means for detecting the interaction between the probe and the sample, and receiving the scanning signal from the scanning signal generating unit, and the fine movement means being orthogonal to the Z direction which is a direction parallel to the facing direction of the probe and the sample. X to do
A scanning probe microscope for obtaining information on a sample surface based on a detection result obtained from the detection means when scanning in the Y direction, wherein the fine movement means scans the sample holding portion or the probe in the XY direction Displacement detection means for detecting a displacement, servo control means for feeding back the detection result of the displacement detection means to a control command value of the fine movement means, a scanning signal from the scanning signal generation unit and a detection result of the displacement detection means, A scanning probe microscope, comprising: storage means for storing the detection result of the detection means in association with each other; and correction means for correcting the observation result of the sample surface based on the storage content of the storage means. 2. A sample holding unit for holding a sample, a probe facing the sample held by the sample holding unit, fine movement means for finely moving the sample holding unit or the probe, an XY scanning signal generation unit, Detecting means for detecting an interaction between the probe and the sample, wherein the fine movement means receives a scanning signal from the scanning signal generating unit and the fine movement means is in a Z direction which is a direction parallel to a facing direction of the probe and the sample. A scanning probe microscope that forms an image reflecting information on a sample surface based on a detection result obtained from the detection means when scanning in the XY directions orthogonal to the sample holding means, wherein the sample holding member is scanned in the XY directions by the fine movement means. Displacement detecting means for detecting displacement of the probe or the probe in the X and Y directions, and feedback of a detection result of the displacement detecting means to a control command value of the fine movement means. Servo control means, storage means for storing a scan signal from the scan signal generation unit, a detection result of the displacement detection means, and a detection result of the detection means in association with each other, and A scanning probe microscope comprising: a correcting unit for correcting an image, wherein distortion in the scanning direction in the image is ± 0.1% or less of a scanning width. 3. The scanning probe microscope according to claim 1, further comprising a Z displacement detecting means for detecting a displacement of the probe in a Z direction, wherein the storage means is generated by the scanning signal generating unit. A scanning probe microscope, wherein a scanning signal, a detection result of the displacement detecting means, and a detection result of the Z displacement detecting means are stored in association with each other. 4. The scanning probe microscope according to claim 1, wherein said displacement detecting means for detecting a displacement in a scanning direction is a first displacement detecting means for servo control of said fine movement means, and an observation result. And a second displacement detecting means for detecting a displacement used by the correcting means for correcting the displacement. 5. The scanning probe microscope according to claim 1, wherein said fine movement means has a parallel plate scanning mechanism.