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JP3359150B2 - Optical component optical loss measurement method - Google Patents

Optical component optical loss measurement method

Info

Publication number
JP3359150B2
JP3359150B2 JP11036494A JP11036494A JP3359150B2 JP 3359150 B2 JP3359150 B2 JP 3359150B2 JP 11036494 A JP11036494 A JP 11036494A JP 11036494 A JP11036494 A JP 11036494A JP 3359150 B2 JP3359150 B2 JP 3359150B2
Authority
JP
Japan
Prior art keywords
optical
optical component
measured
light intensity
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11036494A
Other languages
Japanese (ja)
Other versions
JPH07294380A (en
Inventor
正幸 南野
健男 清水
久治 柳川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THE FURUKAW ELECTRIC CO., LTD.
Original Assignee
THE FURUKAW ELECTRIC CO., LTD.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THE FURUKAW ELECTRIC CO., LTD. filed Critical THE FURUKAW ELECTRIC CO., LTD.
Priority to JP11036494A priority Critical patent/JP3359150B2/en
Publication of JPH07294380A publication Critical patent/JPH07294380A/en
Application granted granted Critical
Publication of JP3359150B2 publication Critical patent/JP3359150B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、光通信等に用いられる
光部品の光損失測定方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring light loss of an optical component used for optical communication and the like.

【0002】[0002]

【従来の技術】光通信を行う際等に、光ファイバや光導
波路チップ等の光部品の光損失を測定することが行われ
ており、図3には、光導波路チップ8の光損失(光導波
路チップ8のコア4の光損失)を測定する装置の一例が
示されている。同図において、発光ダイオード(LE
D)等の光源11に入射光導入用光部品として機能するシ
ングルモード光ファイバ6が接続されており、シングル
モード光ファイバ6の出射側の端面20側には、光損失測
定対象となる測定対象光部品として機能する光導波路チ
ップ8のコア4の入射側端面21が間隔Lを介して対向配
置されており、コア4の出射側端面22にはコア径の大き
なマルチモード光ファイバ14がコア4と光軸がほぼ合っ
た状態で接続されており、マルチモード光ファイバ14に
は光パワーメータ13が接続されている。光導波路チップ
8は固定されており、微動ステージ10を微動することに
より、シングルモード光ファイバ6の光軸と光導波路チ
ップ8のコア4の光軸とが位置合わせされるようになっ
ている。
2. Description of the Related Art The optical loss of an optical component such as an optical fiber or an optical waveguide chip is measured during optical communication or the like. FIG. An example of an apparatus for measuring the optical loss of the core 4 of the waveguide chip 8 is shown. In the figure, a light emitting diode (LE)
A single-mode optical fiber 6 functioning as an optical component for introducing incident light is connected to a light source 11 such as D), and a measurement object to be measured for optical loss is provided on the end face 20 of the single-mode optical fiber 6 on the emission side. The incident side end face 21 of the core 4 of the optical waveguide chip 8 functioning as an optical component is arranged to face the center of the core 4 with an interval L therebetween, and the output side end face 22 of the core 4 is provided with a multimode optical fiber 14 having a large core diameter. The optical power meter 13 is connected to the multi-mode optical fiber 14 in a state where the optical axes are approximately aligned with each other. The optical waveguide chip 8 is fixed, and the optical axis of the single mode optical fiber 6 and the optical axis of the core 4 of the optical waveguide chip 8 are aligned by finely moving the fine movement stage 10.

【0003】このような装置において、光導波路チップ
8のコア4の光損失を測定するときには、光源11からシ
ングルモード光ファイバ6に導入した入射光を光導波路
チップ8のコア4に入射させ、このとき、シングルモー
ド光ファイバ6とコア4との光軸が合うように微動ステ
ージ10を微動させながら、コア4の出射側の端面22から
出射される光の受光強度をマルチモード光ファイバ14を
介して光パワーメータ13により測定し、受光強度が最大
となる位置をシングルモード光ファイバ6と光導波路チ
ップ8のコア4との光軸が合った調心位置と判断する。
そして、この位置での受光強度と前記入射光の強度との
差に基づいて、入射光強度の値から受光強度の値を差し
引いて光導波路チップ8のコア4の光通過損失を求める
ようになっている。
In such an apparatus, when measuring the optical loss of the core 4 of the optical waveguide chip 8, the incident light introduced into the single mode optical fiber 6 from the light source 11 is made incident on the core 4 of the optical waveguide chip 8. At this time, while finely moving the fine movement stage 10 so that the optical axis of the single mode optical fiber 6 and the core 4 are aligned, the received light intensity of the light emitted from the end face 22 on the emission side of the core 4 is changed via the multimode optical fiber 14. Then, the position where the received light intensity is maximum is determined as the centering position where the optical axes of the single mode optical fiber 6 and the core 4 of the optical waveguide chip 8 are aligned.
Then, based on the difference between the received light intensity at this position and the intensity of the incident light, the light transmission loss of the core 4 of the optical waveguide chip 8 is obtained by subtracting the value of the received light intensity from the value of the incident light intensity. ing.

【0004】なお、この測定に際し、マルチモード光フ
ァイバ14のコア径が大きく、コア4の端面22とマルチモ
ード光ファイバ14との光結合損失はほぼ無視することが
可能であり、マルチモード光ファイバ14の光通過損失も
無視できると仮定して、光パワーメータ13により測定さ
れる受光強度の値をそのままコア4の端面22から出射さ
れる光の受光強度としており、また、シングルモード光
ファイバ6とコア4とが調心位置にあるときにシングル
モード光ファイバ6とコア4との光結合損失が無視でき
ることから、前記調心位置での受光強度(最大受光強
度)の値を前記入射光の強度の値から差し引いてコア4
の光通過損失を測定していた。
In this measurement, the core diameter of the multimode optical fiber 14 is large, and the optical coupling loss between the end face 22 of the core 4 and the multimode optical fiber 14 can be almost neglected. Assuming that the light passing loss of the optical power meter 14 can be neglected, the value of the received light intensity measured by the optical power meter 13 is used as it is as the received light intensity of the light emitted from the end face 22 of the core 4. Since the optical coupling loss between the single mode optical fiber 6 and the core 4 is negligible when the and the core 4 are at the centering position, the value of the received light intensity (maximum received light intensity) at the centered position is determined by the value of the incident light. Core 4 subtracted from the strength value
Was measured for light transmission loss.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記の
方法で光導波路チップ8のコア4の光通過損失の測定を
行うためには、シングルモード光ファイバ6とコア4と
の光軸のずれを例えば0.1 μm単位で調整して、シング
ルモード光ファイバ6とコア4との光軸のずれがほぼ零
となるように調心する必要があり、そのためには、微動
ステージ10によりシングルモード光ファイバ6を0.1 μ
m単位で微動することを何度も繰り返してシングルモー
ド光ファイバ6とコア4との調心を行わなければなら
ず、非常に時間がかかるといった問題があった。特に複
数のコア4を形成した光導波路チップ8や多心の光ファ
イバを配設した光ファイバアレイ等の光部品の光損失
(光通過損失)を測定する場合には、シングルモード光
ファイバ6等の入射光導入用光部品と光導波路チップ8
のそれぞれのコア4とを調心するといったように、光損
失測定対象となる測定対象光部品の複数のコアや複数の
光ファイバについて、それぞれ調心を行わなければなら
ないために、非常に時間がかかり問題であった。
However, in order to measure the light passing loss of the core 4 of the optical waveguide chip 8 by the above-described method, for example, the displacement of the optical axis between the single mode optical fiber 6 and the core 4 is measured. It is necessary to adjust the optical axis in units of 0.1 μm so that the deviation of the optical axis between the single mode optical fiber 6 and the core 4 becomes almost zero. 0.1 μ
Alignment between the single mode optical fiber 6 and the core 4 must be performed by repeating the fine movement in units of m many times, and there is a problem that it takes a very long time. In particular, when measuring the optical loss (light transmission loss) of an optical component such as an optical waveguide chip 8 having a plurality of cores 4 or an optical fiber array having multiple optical fibers, a single mode optical fiber 6 or the like is required. Optical component and optical waveguide chip 8 for introducing incident light
Since the cores and the optical fibers of the optical component to be measured for optical loss must be aligned respectively, such as when the respective cores 4 are aligned, it takes a very long time. It was a problem.

【0006】本発明は上記従来の課題を解決するために
なされたものであり、その目的は、短時間で光部品の光
通過損失を測定することができる光部品の光損失測定方
法を提供することにある。
The present invention has been made to solve the above-mentioned conventional problems, and an object of the present invention is to provide a method for measuring the optical loss of an optical component, which can measure the optical transmission loss of the optical component in a short time. It is in.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明は次のように構成されている。すなわち、本
発明は、入射光導入用光部品と光損失測定対象となる測
定対象光部品とを対向配置し、入射光導入用光部品から
測定対象光部品に入射光を入射させ、該測定対象光部品
の出射側から出射される光の受光強度を測定して該受光
強度と前記入射光の強度との差に基づいて測定対象光部
品の光通過損失を求める光部品の光損失測定方法であっ
て、入射光導入用光部品と測定対象光部品の光軸中心の
軸ずれによる光結合強度の分布を受光強度H(dB)の
分布で表し、a,b,cを定数として、光軸に垂直なX
−Y平面のX方向の軸ずれ量ξと、Y方向の軸ずれ量η
によって受光強度をH=aξ+bη+cの2次関数
で近似し、入射光導入用光部品と測定対象光部品とを対
向配置した位置からX方向とY方向の一方向又は両方向
の異なる位置に入射光導入用光部品と測定対象光部品の
一方又は両方を微動したときの5点の受光強度をそれぞ
れH,H,H,H,HとしてHからH
5元の連立2次方程式を作り、この連立2次方程式を解
いて前記2次関数のξとηの値が零となるときのcの値
を求め、このcの値を入射光導入用光部品と測定対象光
部品との光軸中心の軸ずれが零となるように光軸調整を
行ったときの光軸調整後の受光強度としてこの受光強度
と前記入射光の強度との差に基づいて測定対象光部品の
光通過損失を求めることを特徴として構成されている。
In order to achieve the above object, the present invention is configured as follows. That is, the present invention provides an optical component for introducing incident light and an optical component to be measured which is an optical loss measurement object, facing each other, and makes incident light incident on the optical component to be measured from the optical component for introducing incident light, and An optical component light loss measuring method for measuring a light receiving intensity of light emitted from an emission side of an optical component and obtaining a light passing loss of an optical component to be measured based on a difference between the received light intensity and the intensity of the incident light. The distribution of the optical coupling intensity due to the axis deviation of the optical axis center between the optical component for introducing incident light and the optical component to be measured is represented by the distribution of the received light intensity H (dB), and a, b, and c are constants, X perpendicular to
-The amount of axial deviation の in the X direction on the Y plane and the amount of axial deviation η in the Y direction
Approximating, different incident light introduction optical component and the target light component from opposed positions of one or both directions of the X direction and the Y direction position by a quadratic function of the received light intensity H = aξ 2 + bη 2 + c by The light receiving intensities at five points when one or both of the optical component for introducing the incident light and the optical component to be measured are slightly moved are denoted by H 0 , H 1 , H 2 , H 3 , and H 4 , respectively, from H 0 to H 4 . An original simultaneous quadratic equation is created, and the simultaneous quadratic equation is solved to obtain the value of c when the values of ξ and η of the quadratic function become zero. Based on the difference between the received light intensity and the intensity of the incident light as the received light intensity after the optical axis adjustment when the optical axis is adjusted such that the axis deviation of the optical axis center between the optical component and the optical component to be measured becomes zero. It is characterized in that the light transmission loss of the optical component to be measured is obtained.

【0008】[0008]

【作用】上記構成の本発明において、受光強度がX方向
の軸ずれ量ξとY方向の軸ずれ量ηによってH=aξ2
+bη2 +cの2次関数で近似され、入射光導入用光部
品と測定対象光部品とを対向配置した位置からX方向と
Y方向の一方向又は両方向の異なる位置に入射光導入用
光部品と測定対象光部品の一方又は両方が微動され、異
なる位置での5点の受光強度がH0 〜H4 の5元の連立
2次方程式で表され、この連立2次方程式を解くことに
より入射光導入用光部品と測定対象光部品との光軸中心
の軸ずれが零となるように光軸調整を行ったときの光軸
調整後の受光強度が求められ、この受光強度と入射光の
強度との差に基づいて測定対象光部品の光通過損失が求
められる。
[Action] In the present invention configured as described above, the received light intensity is axial misalignment of the shaft misalignment amount ξ and Y direction of the X-direction η H = aξ 2
+ Bη 2 + c, which is approximated by a quadratic function of the incident light introducing optical component and the incident light introducing optical component at one or both different directions in the X direction and the Y direction from the position where the incident light introducing optical component and the measurement target optical component are arranged to face each other. One or both of the optical components to be measured are finely moved, and the received light intensities at five points at different positions are expressed by a quinary simultaneous quadratic equation of H 0 to H 4. By solving this simultaneous quadratic equation, the incident light is obtained. The received light intensity after the optical axis adjustment when the optical axis adjustment is performed so that the axis deviation of the optical axis center between the introduction optical component and the optical component to be measured becomes zero is obtained, and the received light intensity and the intensity of the incident light are obtained. Then, the light transmission loss of the optical component to be measured is obtained based on the difference from the optical component.

【0009】[0009]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。なお、本実施例の説明において、従来例と同一名
称部分には同一符号を付し、その詳細説明は省略する。
図1には本発明に係る光部品の光損失測定方法により、
光損失測定を行う装置の一例が示されている。
Embodiments of the present invention will be described below with reference to the drawings. In the description of the present embodiment, the same symbols are assigned to the same parts as in the conventional example, and the detailed description thereof is omitted.
FIG. 1 shows an optical component light loss measuring method according to the present invention.
One example of an apparatus for performing optical loss measurement is shown.

【0010】同図において、発光ダイオード(LED)
等の光源11の光源光出射側端面23側には、光ファイバ配
列具9の入射側端面25が接続されており、光ファイバ配
列具9は微動ステージ10を備え、この微動ステージ10の
働きにより光ファイバ配列具9の光軸Zに垂直なX−Y
平面上でX方向とY方向に微動できるように構成されて
いる。光ファイバ配列具9の出射側端面20側には光部品
の光導波路チップ8が間隔Lを介して対向配置されてお
り、光導波路チップ8の出射側端面22にはコア径50μm
のマルチモード光ファイバ14が接続されており、マルチ
モード光ファイバ14の出射側端面24側には光パワーメー
タ13が接続されている。
Referring to FIG. 1, a light emitting diode (LED)
On the side of the light source light emitting side end face 23 of the light source 11 and the like, the incident side end face 25 of the optical fiber array 9 is connected, and the optical fiber array 9 is provided with a fine moving stage 10, and by the function of the fine moving stage 10. XY perpendicular to the optical axis Z of the optical fiber array device 9
It is configured to be finely movable in the X and Y directions on a plane. An optical waveguide chip 8 of an optical component is disposed on the emission side end face 20 side of the optical fiber arraying device 9 with an interval L therebetween, and the emission side end face 22 of the optical waveguide chip 8 has a core diameter of 50 μm.
The multimode optical fiber 14 is connected, and the optical power meter 13 is connected to the exit side end face 24 side of the multimode optical fiber 14.

【0011】光ファイバ配列具9はシングルモード光フ
ァイバ6を誤差範囲0.5 μm以下となるように正確に25
0 μmピッチで8本並べて内蔵したものであり、両端側
の2本のシングルモード光ファイバ6a,6bの入射側
端面25から光源11の光が入射するように構成されてい
る。光導波路チップ8はシリコンの基板上に石英ガラス
を積層し、石英ガラス上にチタンをドープした幅8μm
の矩形状のコア4を8本積層形成し、コア4の周りをク
ラッドで覆った平行導波路であり、コア4とクラッドの
屈折率差は0.3 %である。なお、本実施例では、前記光
ファイバ配列具9の両端側のシングルモード光ファイバ
6a,6bが入射光導入用光部品として機能するもので
あり、導波路チップ8の両端側のコア4a,4bが光損
失測定対象となる測定対象光部品であり、上記シングル
モード光ファイバ6a,6bから上記コア4a,4bに
入射光(光源11からの光)が入射されるようになってい
る。
[0011] The optical fiber arranging device 9 accurately adjusts the single mode optical fiber 6 so that the error range is 0.5 μm or less.
The two single-mode optical fibers 6a, 6b at both ends are configured such that the light of the light source 11 is incident from the incident-side end faces 25 of the two single-mode optical fibers 6a, 6b. The optical waveguide chip 8 has a width of 8 μm in which quartz glass is laminated on a silicon substrate and titanium glass is doped on quartz glass.
This is a parallel waveguide in which eight rectangular cores 4 are laminated and the periphery of the core 4 is covered with a cladding, and the refractive index difference between the core 4 and the cladding is 0.3%. In this embodiment, the single-mode optical fibers 6a and 6b at both ends of the optical fiber array tool 9 function as optical components for introducing incident light, and the cores 4a and 4b at both ends of the waveguide chip 8 are provided. Is an optical component to be measured as an optical loss measurement target, and incident light (light from the light source 11) is incident on the cores 4a and 4b from the single mode optical fibers 6a and 6b.

【0012】また、上記光ファイバ配列具9と導波路チ
ップ8との間隔Lは5μm以内とし、シングルモード光
ファイバ6とコア4との間隔Lによる光結合損失は0.01
dB以下としてほぼ無視できるようになっており、さら
に、光ファイバ配列具9と導波路チップ8との光軸の角
度ずれは0.1 deg以内となるように光ファイバ配列具
9と導波路チップ8とが配置され、シングルモード光フ
ァイバ6とコア4との光軸の角度ずれによる光結合損失
もほぼ無視できるようになっている。したがって、本実
施例におけるシングルモード光ファイバ6とコア4との
光結合損失は殆どシングルモード光ファイバ6とコア4
との光軸Zに垂直なX−Y平面上でのX方向よびY方向
の位置ずれにより決定される。
The distance L between the optical fiber arrangement 9 and the waveguide chip 8 is within 5 μm, and the optical coupling loss due to the distance L between the single mode optical fiber 6 and the core 4 is 0.01 μm.
The optical fiber arrangement 9 and the waveguide chip 8 are arranged such that the deviation of the optical axis between the optical fiber arrangement 9 and the waveguide chip 8 is within 0.1 deg. Are arranged so that the optical coupling loss due to the angular deviation of the optical axis between the single mode optical fiber 6 and the core 4 can be almost ignored. Therefore, the optical coupling loss between the single mode optical fiber 6 and the core 4 in this embodiment is almost
Is determined on the XY plane perpendicular to the optical axis Z in the X and Y directions.

【0013】光パワーメータ13にはパーソナルコンピュ
ータ12が接続され、パーソナルコンピュータ12は前記微
動ステージ10に接続されている。パーソナルコンピュー
タ12は光パワーメータ13により検出される受光強度と、
光ファイバ配列具9に内蔵されたシングルモードファイ
バ6の光軸Zに垂直なX−Y平面上でのX方向、Y方向
の位置を同時に記録し、演算回路で解析するとともに、
微動ステージ10の微動を制御し、光ファイバ配列具9を
X方向、Y方向に所望に移動させる機能を備えている。
A personal computer 12 is connected to the optical power meter 13, and the personal computer 12 is connected to the fine movement stage 10. The personal computer 12 receives light intensity detected by the optical power meter 13 and
The positions of the single mode fiber 6 incorporated in the optical fiber array 9 in the X and Y directions on the XY plane perpendicular to the optical axis Z are simultaneously recorded and analyzed by the arithmetic circuit.
It has a function of controlling the fine movement of the fine movement stage 10 and moving the optical fiber alignment tool 9 in the X direction and the Y direction as desired.

【0014】以上のように、光損失測定装置は構成され
ており、次に、光ファイバ配列具9に内蔵された両端側
2本のシングルモード光ファイバ6a,6bから光導波
路チップ8のコア4a,4bに入射光を同時に入射させ
てコア4a,4bの光損失(光通過損失)を求める動作
について説明する。まず、光源11の出射側端面23側から
出射されて光ファイバ配列具9の両端側のシングルモー
ド光ファイバ6a,6bを通り、シングルモードファイ
バ6a,6bの出射側端面20から出射する各光強度を、
予め光パワーメータ13により測定し、それらの測定値を
入射光強度としてパーソナルコンピュータ12に記憶させ
る。
As described above, the optical loss measuring device is constructed. Next, the core 4a of the optical waveguide chip 8 is connected to the two single-mode optical fibers 6a and 6b at both ends incorporated in the optical fiber array device 9. , 4b will be described, and the operation of obtaining the optical loss (light transmission loss) of the cores 4a, 4b at the same time will be described. First, each light intensity emitted from the emission side end face 23 side of the light source 11, passes through the single mode optical fibers 6 a, 6 b on both ends of the optical fiber arrangement tool 9, and emerges from the emission side end face 20 of the single mode fibers 6 a, 6 b. To
The measurement is performed by the optical power meter 13 in advance, and the measured values are stored in the personal computer 12 as the incident light intensity.

【0015】次に、シングルモード光ファイバ6a,6
bから出射した光を光導波路チップ8のコア4a,4b
入射側端面21から入射し、光導波路チップ8のコア4
a,4bを通して、マルチモード光ファイバ14を通し、
マルチモード光ファイバ14の出射側端面24から出射させ
る。そして、マルチモード光ファイバ14の出射側端面24
から出射した光を、光パワーメータ13で受光強度H(単
位はdB)により検出し、検出した受光強度Hをパーソ
ナルコンピュータ12に入力する。このとき、パーソナル
コンピュータ12は光ファイバ配列具9に内蔵されたシン
グルモード光ファイバ6の光軸Zに垂直なX−Y平面上
でのX方向とY方向の位置も同時に検出し、記録する。
Next, the single mode optical fibers 6a, 6
b emitted from the optical waveguide chip 8 into the cores 4a and 4b.
The core 4 of the optical waveguide chip 8 enters from the incident side end face 21.
a, 4b, through the multimode optical fiber 14,
The light is emitted from the emission side end face 24 of the multimode optical fiber 14. Then, the exit side end face 24 of the multimode optical fiber 14
The light emitted from is detected by the optical power meter 13 based on the received light intensity H (unit: dB), and the detected received light intensity H is input to the personal computer 12. At this time, the personal computer 12 simultaneously detects and records the positions of the single mode optical fiber 6 incorporated in the optical fiber array 9 in the X and Y directions on the XY plane perpendicular to the optical axis Z.

【0016】ところで、受光強度Hは、図2に示すよう
に、例えばシングルモード光ファイバ6とコア4のよう
な光部品同士の光軸Zが調心位置にあるときに最大とな
り、光部品同士の光軸Zが調心位置からずれると小さく
なることが既に知られており、この受光強度Hの分布は
2次関数曲線と近い曲線分布となる。そこで、本実施例
では、受光強度Hの分布を光軸に垂直なX−Y平面のX
方向の軸ずれ量ξと、Y方向の軸ずれ量ηによって次式
(1)に示すξとηの2次関数で近似し、この2次方程
式をパーソナルコンピュータ12に内蔵された演算回路で
解くことにより、下記のようにして受光強度が最大とな
る光軸調心位置における受光強度を算出し、その受光強
度の値に基づいてコア4の光損失を求めることにした
(a,b,cは定数)。
As shown in FIG. 2, the light receiving intensity H becomes maximum when the optical axis Z of the optical components such as the single mode optical fiber 6 and the core 4 is at the centering position, and It is already known that the optical axis Z becomes smaller when the optical axis Z deviates from the centering position, and the distribution of the received light intensity H is a curve distribution close to a quadratic function curve. Therefore, in the present embodiment, the distribution of the received light intensity H is expressed by the X-Y plane perpendicular to the optical axis.
軸 and η in the Y direction are approximated by a quadratic function of ξ and η shown in the following equation (1), and this quadratic equation is solved by an arithmetic circuit built in the personal computer 12. As a result, the light receiving intensity at the optical axis alignment position where the light receiving intensity becomes maximum is calculated as described below, and the optical loss of the core 4 is determined based on the value of the received light intensity (a, b, c). Is a constant).

【0017】H=aξ2 +bη2 +c・・・・・(1)H = aξ 2 + bη 2 + c (1)

【0018】まず、光ファイバ配列具9と光導波路チッ
プ8とを対向配置してシングルモード光ファイバ6a,
6bとコア4a,4bとをそれぞれ対向させた位置にお
いて、それぞれの受光強度H0 を測定し、また、このと
きの光軸調心位置からのシングルモード光ファイバ6
a,6bとコア4a,4bとの光軸Zに垂直なX−Y平
面のX方向の軸ずれ量をξ、Y方向の軸ずれ量をηと仮
定して、この位置での受光強度H0 を上記式(1)に示
した2次関数の方程式により、次式(2)のように表
し、ξとηの2次関数で近似する(a,b,cは定
数)。
First, the optical fiber array tool 9 and the optical waveguide chip 8 are arranged to face each other and the single mode optical fibers 6a,
At positions where the core 6a and the cores 4a and 4b face each other, the received light intensity H 0 is measured, and the single mode optical fiber 6 from the optical axis alignment position at this time is measured.
Assuming that the amount of axial deviation in the X direction on the XY plane perpendicular to the optical axis Z between the a and 6b and the cores 4a and 4b is ξ and the amount of axial deviation in the Y direction is η, the received light intensity H at this position is assumed. 0 is expressed as the following equation (2) by the quadratic function equation shown in the above equation (1), and is approximated by a quadratic function of ξ and η (a, b, and c are constants).

【0019】 H0 =aξ2 +bη2 +c・・・・・(2)H 0 = aξ 2 + bη 2 + c (2)

【0020】次に、この受光強度H0 を測定した位置を
基準位置とし、パーソナルコンピュータ12の制御によ
り、微動ステージ10を微動させ、シングルモードファイ
バ6をX−Y平面上でX方向とY方向の一方向又は両方
向の異なる位置に微動して、このときの受光強度を光パ
ワーメータ13で検出し、受光強度Hn をX方向の微動量
Δξn 、Y方向の微動量Δηn により次式(3)で表
し、近似する。なお、nは整数であり、Δξn ,Δηn
の値は零を含む実数である。
Next, the position at which the received light intensity H 0 is measured is set as a reference position, and the fine movement stage 10 is finely moved under the control of the personal computer 12 to move the single mode fiber 6 in the X and Y directions on the XY plane. and fine movement in one or both directions of different locations, and detecting the received light intensity at this time by the optical power meter 13, the following equation received light intensity H n fine movement amount .DELTA..xi n in the X direction, the Y-direction fine movement amount .DELTA..eta n Represented by (3) and approximated. Here, n is an integer, and Δξ n , Δη n
Is a real number including zero.

【0021】 Hn =a(ξ−△ξn 2 +b(η−Δηn 2 +c・・・・・(3)H n = a (ξ− △ ξ n ) 2 + b (η−Δη n ) 2 + c (3)

【0022】したがって、例えば、前記基準位置からX
方向、Y方向の一方向又は両方向の異なる4点位置に微
動したときの受光強度は次式(4)〜(7)により近似
される。
Therefore, for example, X from the reference position
The received light intensity at the time of fine movement to four different positions in one direction or both directions in the direction and the Y direction is approximated by the following equations (4) to (7).

【0023】 H1 =a(ξ−Δξ1 2 +b(η−Δη1 2 +c・・・・・(4)H 1 = a (ξ−Δξ 1 ) 2 + b (η−Δη 1 ) 2 + c (4)

【0024】 H2 =a(ξ−Δξ2 2 +b(η−Δη2 2 +c・・・・・(5)H 2 = a (ξ−Δξ 2 ) 2 + b (η−Δη 2 ) 2 + c (5)

【0025】 H3 =a(ξ−Δξ3 2 +b(η−Δη3 2 +c・・・・・(6)H 3 = a (ξ−Δξ 3 ) 2 + b (η−Δη 3 ) 2 + c (6)

【0026】 H4 =a(ξ−Δξ4 2 +b(η−Δη4 2 +c・・・・・(7)H 4 = a (ξ−Δξ 4 ) 2 + b (η−Δη 4 ) 2 + c (7)

【0027】なお、本実施例では、Δξ1 =+2μm,
Δη1 =0,Δξ2 =−2μm,Δη2 =0,Δξ3
0,Δη3 =+2μm,Δξ4 =0,Δη4 =−2μm
としてシングルモード光ファイバ6a,6bを微動し、
各微動位置での受光強度H1,H2 ,H3 ,H4 を測定
し、上記式(4)〜(7)により近似した。
In this embodiment, Δξ 1 = + 2 μm,
Δη 1 = 0, Δξ 2 = −2 μm, Δη 2 = 0, Δξ 3 =
0, Δη 3 = + 2 μm, Δξ 4 = 0, Δη 4 = −2 μm
To slightly move the single mode optical fibers 6a and 6b,
The received light intensity H 1, H 2, H 3 , H 4 of each fine movement position was measured and approximated by the equation (4) to (7).

【0028】次に、コア4a側とコア4b側とで測定し
た受光強度の値と受光強度の式(2)および式(4)〜
式(7)の5元連立2次方程式を解くことにより、ξお
よびηの値が零のときのc値をそれぞれ求め、このそれ
ぞれのcの値をシングルモード光ファイバ6aとコア4
a、シングルモード光ファイバ6bとコア4bを光軸中
心の軸ずれ(X方向Y方向の位置ずれ)が零となるよう
に光軸調整を行ったときの光軸調整後の受光強度の値と
する。
Next, the values of the received light intensity measured on the core 4a side and the core 4b side and the received light intensity formulas (2) and (4) 〜
By solving the quinary simultaneous quadratic equation of the equation (7), c values when the values of ξ and η are zero are obtained, and the respective values of c are determined by the single mode optical fiber 6 a and the core 4.
a, the value of the received light intensity after the optical axis adjustment when the optical axis adjustment is performed such that the axis deviation (positional deviation in the X direction and the Y direction) of the optical axis center between the single mode optical fiber 6b and the core 4b becomes zero. I do.

【0029】そして、これらの受光強度の値を、パーソ
ナルコンピュータ12に記憶されている前記入射光強度の
値からそれぞれ差し引くことにより、各コア4a,4b
の光通過損失の値を算出した。
By subtracting these values of the received light intensity from the values of the incident light intensity stored in the personal computer 12, the respective cores 4a, 4b
Was calculated.

【0030】本実施例によれば、上記動作により、光フ
ァイバ配列具9を微動してシングルモード光ファイバ6
の位置を最初にコア4と対向配置した位置からX方向と
Y方向のいずれか一方向の異なる位置に微動して、その
ときの5点の受光強度を測定するとともに、各受光強度
をH0 からH4 の5元の連立2次方程式で近似してこの
連立2次方程式を解いて2次関数のcの値を求めるだけ
で、シングルモード光ファイバ6とコア4との調心を行
わなくとも調心位置での受光強度を求めることができ
る。そのため、例えば0.1 μm単位で微動させて調心を
行ってそのときの受光強度を測定する従来の方法のよう
に時間がかかることはなく、短時間で光軸調整後の受光
強度(調心位置での受光強度)を求めることが可能とな
り、この受光強度の値と入射光の強度との差に基づいて
短時間で正確に光導波路チップ8のコア4a,4bのそ
れぞれの光通過損失を同時に求めることができる。
According to the present embodiment, by the above operation, the optical fiber alignment tool 9 is slightly moved to
Is slightly moved from the position where the core 4 is first arranged to face the core 4 to a different position in one of the X direction and the Y direction, the received light intensity at five points at that time is measured, and each received light intensity is set to H 0. ## EQU00001 ## by approximating with a quaternary simultaneous quadratic equation of H.sub.4 and solving this simultaneous quadratic equation to obtain the value of c of the quadratic function, without aligning the single mode optical fiber 6 with the core 4. In both cases, the received light intensity at the centering position can be obtained. Therefore, unlike the conventional method of measuring the received light intensity at the time by performing fine adjustment in units of 0.1 μm and performing alignment, the received light intensity (alignment position) after the optical axis adjustment is shortened in a short time. At the same time, and based on the difference between the value of the received light intensity and the intensity of the incident light, the light transmission loss of each of the cores 4a and 4b of the optical waveguide chip 8 can be accurately and simultaneously determined in a short time. You can ask.

【0031】また、本実施例によれば、上記のように、
シングルモード光ファイバ6a,6bと光導波路チップ
8のコア4a,4bの光軸を完全に一致させる必要はな
いために、光ファイバ配列具9のシングルモード光ファ
イバ6のピッチ間隔と光導波路チップ8のコア4のピッ
チ間隔とが数μmずれていたとしても支障なく光導波路
チップ8の各コア4の光通過損失を測定することができ
る。
According to the present embodiment, as described above,
Since the optical axes of the single-mode optical fibers 6a and 6b and the cores 4a and 4b of the optical waveguide chip 8 do not need to be completely aligned, the pitch interval between the single-mode optical fibers 6 of the optical fiber array device 9 and the optical waveguide chip 8 Even if the pitch interval between the cores 4 is shifted by several μm, the light transmission loss of each core 4 of the optical waveguide chip 8 can be measured without any problem.

【0032】なお、本発明は上記実施例に限定されるこ
とはなく、様々な実施の態様を採り得る。例えば、上記
実施例では、光導波路チップ8の両端側のコア4a,4
bの光通過損失の測定のみを行ったが、光ファイバ配列
具9に配列されている全てのシングルモード光ファイバ
から光導波路チップ8の全てのコア4に入射光を入射
し、例えばマルチモードファイバアレイを用いて、マル
チモードファイバアレイに配列されているマルチモード
光ファイバ14を光導波路チップ8の全てのコア4の出射
側端面22に接続して各コア4の端面22側から出射される
受光強度を光パワーメータ13により検出するようにすれ
ば、光導波路チップ8の全てのコアの光通過損失を同時
に測定することができる。このように、同時に測定を行
う測定対象光部品の数等は適宜設定されるものである。
The present invention is not limited to the above-described embodiment, but can take various embodiments. For example, in the above embodiment, the cores 4a, 4a at both ends of the optical waveguide chip 8 are used.
b, only incident light was measured, but incident light was incident on all the cores 4 of the optical waveguide chip 8 from all the single-mode optical fibers arranged in the optical fiber aligner 9, for example, a multimode fiber. Using the array, the multi-mode optical fibers 14 arranged in the multi-mode fiber array are connected to the outgoing end faces 22 of all the cores 4 of the optical waveguide chip 8 to receive light emitted from the end face 22 of each core 4. If the intensity is detected by the optical power meter 13, the light transmission loss of all the cores of the optical waveguide chip 8 can be measured simultaneously. As described above, the number of optical components to be measured at the same time is appropriately set.

【0033】また、上記実施例では、微動ステージ10に
より光ファイバ配列具9を微動させるときに、シングル
モード光ファイバ6とコア4とを対向配置した位置(基
準位置)からX方向とY方向のいずれか一方向の異なる
位置に微動したが、基準位置からX方向とY方向の両方
向の異なる位置に微動しても構わない。さらに、上記実
施例では、基準位置での受光強度をH0 とし、この基準
位置を含む異なる5点位置での受光強度H0 からH4
基づいて光軸調整後の受光強度を求めたが、基準位置で
の受光強度を含めずに、基準位置から異なる5点位置に
微動したときの受光強度をH0 からH4 としてそのH0
からH4 の値に基づいて光軸調整後の受光強度を求める
ようにしても構わない。また、上記のように、異なる5
点位置での受光強度に基づいて光軸調整後の受光強度を
求めることはできるが、異なる5点以上の位置での受光
強度を求めて5元以上の連立2次方程式を作り、その連
立2次方程式を解いて光軸調整後の受光強度を求めても
構わない。
In the above embodiment, when the optical fiber alignment tool 9 is finely moved by the fine movement stage 10, the single mode optical fiber 6 and the core 4 are arranged in the X direction and the Y direction from the position where they are opposed to each other (reference position). Although the fine movement has been made to a different position in any one direction, the fine movement may be made to a different position in both the X direction and the Y direction from the reference position. Further, in the above embodiment, the received light intensity at the reference position is defined as H 0, and the received light intensity after the optical axis adjustment is obtained based on the received light intensity H 0 to H 4 at the five different positions including the reference position. , the H 0 without including the received light intensity at the reference position, the received light intensity when the fine movement in five different positions from the reference position as H 4 from H 0
It may be calculated for the received light intensity of the adjusted optical axis based on the values of H 4 from. Also, as mentioned above, the different 5
Although the received light intensity after optical axis adjustment can be obtained based on the received light intensity at the point position, the received light intensity at five or more different positions is obtained to form a five-element or more simultaneous quadratic equation. The following equation may be solved to determine the received light intensity after the optical axis adjustment.

【0034】さらに、上記実施例では、光ファイバ配列
具9のシングルモード光ファイバ6を基準位置からX方
向又はY方向の一方向に±2μm微動したが、シングル
モード光ファイバ6の微動距離は1μmでも構わない
し、3μmでも構わないし、シングルモード光ファイバ
6の微動距離は適宜設定されるものである。
Further, in the above embodiment, the single mode optical fiber 6 of the optical fiber arrangement tool 9 is finely moved by ± 2 μm from the reference position in one direction of the X direction or the Y direction, but the fine movement distance of the single mode optical fiber 6 is 1 μm. However, the fine movement distance of the single mode optical fiber 6 may be appropriately set.

【0035】さらに、上記実施例では、光導波路チップ
8は固定してコア4の位置は固定したまま、微動ステー
ジ10により光ファイバ配列具9を微動させてシングルモ
ード光ファイバ6を微動させるようにしたが、その逆
に、シングルモード光ファイバ6の位置を固定して光導
波路チップ8を微動ステージ10により微動させてコア4
の位置を微動してもよく、また、光ファイバ配列具9と
光導波路チップ8の両方を微動させてシングルモード光
ファイバ6とコア4の位置を共に微動するようにしても
構わない。
Further, in the above-described embodiment, the single mode optical fiber 6 is finely moved by finely moving the optical fiber alignment tool 9 by the fine movement stage 10 while the optical waveguide chip 8 is fixed and the position of the core 4 is fixed. On the contrary, the position of the single mode optical fiber 6 is fixed, and the optical waveguide chip 8 is finely moved by the fine movement stage 10 so that the core 4 is moved.
May be finely moved, or both the optical fiber alignment tool 9 and the optical waveguide chip 8 may be finely moved to finely move the positions of the single mode optical fiber 6 and the core 4 together.

【0036】さらに、上記実施例では、入射光の強度、
すなわち、シングルモード光ファイバ6a,6bの出射
側端面20から出射する各光強度を予め光パワーメータ13
により測定し、それらの測定値を入射光強度としてパー
ソナルコンピュータ12に記憶させておき、その入射光強
度と、シングルモード光ファイバ6a,6bとコア4
a,4bとの光軸調整後の受光強度との差に基づいてコ
ア4a,4bの光通過損失を求めるようにしたが、入射
光強度は必ずしも予め測定するとは限らず、シングルモ
ード光ファイバ6a,6bとコア4a,4bとの光軸調
整後の受光強度を測定した後に、入射光強度を測定し、
その入射光強度と前記光軸調整後の受光強度との差に基
づいてコア4a,4bの光通過損失を求めるようにして
も構わない。
Further, in the above embodiment, the intensity of the incident light,
That is, each light intensity emitted from the emission side end face 20 of the single mode optical fibers 6a and 6b is previously measured by the optical power meter 13.
The measured values are stored in the personal computer 12 as the incident light intensity, and the incident light intensity, the single mode optical fibers 6a and 6b and the core 4 are measured.
Although the light passing loss of the cores 4a and 4b is determined based on the difference between the received light intensities of the cores 4a and 4b, the incident light intensity is not necessarily measured in advance, and the single mode optical fiber 6a , 6b and the cores 4a, 4b, after measuring the received light intensity after the optical axis adjustment, the incident light intensity is measured,
The light passing loss of the cores 4a and 4b may be determined based on the difference between the incident light intensity and the received light intensity after the optical axis adjustment.

【0037】さらに、上記実施例では、入射光導入用光
部品はシングルモード光ファイバ6とし、測定対象光部
品は光導波路チップ8のコア4としたが、入射光導入用
光部品はシングルモード光ファイバ6とは限らず、測定
対象光部品も光導波路チップ8のコア4とは限らず、入
射光導入用光部品や測定対象光部品は、光通信に用いら
れる他の光部品としても構わない。また、光導波路チッ
プ8のコア4等の測定対象光部品の出射側に、上記実施
例のようにマルチモード光ファイバ14を接続する代わり
に、シングルモード光ファイバを接続するようにしても
よく、光損失測定用の装置は、測定対象光部品の出射側
から出射される光の受光強度が測定できるように構成さ
れていれば構わない。
Furthermore, in the above embodiment, the incident light introducing optical component is the single mode optical fiber 6 and the measuring object optical component is the core 4 of the optical waveguide chip 8, but the incident light introducing optical component is the single mode optical fiber. The optical component to be measured is not limited to the fiber 6, and the optical component to be measured is not limited to the core 4 of the optical waveguide chip 8, and the optical component for introducing incident light and the optical component to be measured may be other optical components used for optical communication. . Further, instead of connecting the multi-mode optical fiber 14 as in the above embodiment, a single-mode optical fiber may be connected to the emission side of the optical component to be measured such as the core 4 of the optical waveguide chip 8, The optical loss measuring device may be configured to measure the light receiving intensity of light emitted from the emission side of the optical component to be measured.

【0038】[0038]

【発明の効果】本発明によれば、入射光導入用光部品と
測定対象光部品とを対向配置した位置から入射光導入用
光部品と測定対象光部品の一方又は両方を異なる位置に
微動したときの5点の受光強度を測定し、各受光強度を
連立2次方程式で近似してその連立2次方程式を解くこ
とにより、入射光導入用光部品と測定対象光部品との光
軸中心の軸ずれが零となるように光軸調整を行ったとき
の光軸調整後の受光強度を求めることができるために、
入射光導入用部品と測定対象光部品の一方又は両方を例
えば0.1 μm単位で微動して光軸調整を行い、このとき
の受光強度を求める従来の方法のように時間がかかるこ
とはなく、短時間で光軸調整後の受光強度を正確に求め
ることができる。そのため、求めた光軸調整後の受光強
度と測定対象光部品への入射光の強度との差に基づいて
測定対象光部品の光通過損失を短時間で正確に求めるこ
とができる。
According to the present invention, one or both of the incident light introducing optical component and the measuring object optical component are slightly moved from the position where the incident light introducing optical component and the measuring object optical component are opposed to each other to different positions. The received light intensity at the five points at the time is measured, and each received light intensity is approximated by a simultaneous quadratic equation to solve the simultaneous quadratic equation, thereby obtaining the center of the optical axis between the optical component for introducing incident light and the optical component to be measured. Since the received light intensity after the optical axis adjustment when the optical axis adjustment is performed so that the axis deviation becomes zero can be obtained,
One or both of the incident light introducing component and the optical component to be measured are finely moved, for example, in units of 0.1 μm to adjust the optical axis, and it does not take much time as in the conventional method for obtaining the received light intensity at this time. The received light intensity after the optical axis adjustment can be accurately obtained with time. Therefore, the light transmission loss of the optical component to be measured can be accurately obtained in a short time based on the difference between the obtained light receiving intensity after the optical axis adjustment and the intensity of the light incident on the optical component to be measured.

【0039】特に、従来は、多心の光導波路を形成した
光導波路チップの各光導波路の光通過損失を測定すると
きや、多心の光ファイバを配列した光ファイバアレイの
各光ファイバの光通過損失を測定するときに、各光導波
路や各光ファイバごとに光軸調整を行い、光軸調整後の
受光強度を求めることから非常に多くの時間を有したの
に比べ、本発明によれば、多心の光導波路や多心の光フ
ァイバの出射側から出射される受光強度を同時にそれぞ
れ測定し、それぞれの受光強度を連立2次方程式で近似
してそれらの連立2次方程式を解くことにより、同時に
各光導波路や各光ファイバの入射光導入用光部品との光
軸調整後の受光強度を求めることができるため、光部品
の移動の回数や1心当たりの受光強度の測定回数を増や
す必要もなく、求めた光軸調整後の受光強度の値に基づ
き、各光導波路や光ファイバの光通過損失を極めて短時
間で正確に求めることができる。
In particular, conventionally, when measuring the light transmission loss of each optical waveguide of an optical waveguide chip having a multi-core optical waveguide, the optical fiber of an optical fiber array having a multi-core optical fiber array is used. When measuring the passage loss, the optical axis is adjusted for each optical waveguide or each optical fiber, and the light receiving intensity after the optical axis adjustment is obtained. For example, simultaneously measuring the received light intensity emitted from the output side of a multi-core optical waveguide or a multi-core optical fiber, and approximating each received light intensity with a simultaneous quadratic equation to solve those simultaneous quadratic equations As a result, the received light intensity after adjusting the optical axis of each optical waveguide and each optical fiber with respect to the incident light introducing optical component can be obtained at the same time, so that the number of movements of the optical component and the number of measurements of the received light intensity per core are increased. No need, Was based on the value of the light reception intensity after optical axis adjustment, it is possible to obtain the light transmission loss of the optical waveguides and the optical fiber very short time precisely.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る光部品の光損失測定方法に基づ
き、光導波路チップ8のコア4の光損失を測定する装置
の一例を示す構成図である。
FIG. 1 is a configuration diagram showing an example of an apparatus for measuring an optical loss of a core 4 of an optical waveguide chip 8 based on an optical component optical loss measuring method according to the present invention.

【図2】光部品同士の光軸のずれ量による受光強度分布
を示す説明図である。
FIG. 2 is an explanatory diagram showing a received light intensity distribution according to a shift amount of an optical axis between optical components.

【図3】従来の光部品の光損失測定方法により光損失測
定を行う装置の一例を示す説明図である。
FIG. 3 is an explanatory diagram showing an example of an apparatus for performing optical loss measurement by a conventional optical component optical loss measurement method.

【符号の説明】 4 コア 6 シングルモード光ファイバ 8 光導波路チップ 9 光ファイバ配列具 10 微動ステージ 12 パーソナルコンピュータ 13 光パワーメータ[Description of Signs] 4 Core 6 Single Mode Optical Fiber 8 Optical Waveguide Chip 9 Optical Fiber Array Tool 10 Fine Movement Stage 12 Personal Computer 13 Optical Power Meter

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平6−281850(JP,A) 特開 平4−190307(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01M 11/00 - 11/02 G02B 6/00 G02B 6/24 - 6/26 G02B 6/36 - 6/42 G02B 7/00 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-281850 (JP, A) JP-A-4-190307 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01M 11/00-11/02 G02B 6/00 G02B 6/24-6/26 G02B 6/36-6/42 G02B 7/00

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 入射光導入用光部品と光損失測定対象と
なる測定対象光部品とを対向配置し、入射光導入用光部
品から測定対象光部品に入射光を入射させ、該測定対象
光部品の出射側から出射される光の受光強度を測定して
該受光強度と前記入射光の強度との差に基づいて測定対
象光部品の光通過損失を求める光部品の光損失測定方法
であって、入射光導入用光部品と測定対象光部品の光軸
中心の軸ずれによる光結合強度の分布を受光強度H(d
B)の分布で表し、a,b,cを定数として、光軸に垂
直なX−Y平面のX方向の軸ずれ量ξと、Y方向の軸ず
れ量ηによって受光強度をH=aξ+bη+cの2
次関数で近似し、入射光導入用光部品と測定対象光部品
とを対向配置した位置からX方向とY方向の一方向又は
両方向の異なる位置に入射光導入用光部品と測定対象光
部品の一方又は両方を微動したときの5点の受光強度を
それぞれH,H,H,H,HとしてHから
の5元の連立2次方程式を作り、この連立2次方程
式を解いて前記2次関数のξとηの値が零となるときの
cの値を求め、このcの値を入射光導入用光部品と測定
対象光部品との光軸中心の軸ずれが零となるように光軸
調整を行ったときの光軸調整後の受光強度としてこの受
光強度と前記入射光の強度との差に基づいて測定対象光
部品の光通過損失を求めることを特徴とする光部品の光
損失測定方法。
1. An optical component for introducing incident light and an optical component to be measured as an optical loss measuring object are arranged to face each other, and incident light is made incident on the optical component to be measured from the optical component for introducing incident light. An optical loss measuring method for an optical component, comprising measuring a light receiving intensity of light emitted from an emission side of the component and obtaining a light passing loss of the optical component to be measured based on a difference between the received light intensity and the intensity of the incident light. Then, the distribution of the optical coupling strength due to the axis shift of the optical axis center between the optical component for introducing incident light and the optical component to be measured is determined by the received light intensity H (d
B), where a, b, and c are constants, and the received light intensity is expressed as H = a に よ っ て2 by the amount of axis deviation の in the X direction on the XY plane perpendicular to the optical axis and the amount of axis deviation η in the Y direction. + Bη 2 + c 2
Approximate by the following function, the incident light introducing optical component and the measuring object optical component are placed at different positions in one or both directions of the X direction and the Y direction from the position where the incident light introducing optical component and the measuring object optical component are arranged to face each other. On the other hand, or the received light intensity of 5 points when both were finely respectively H 0, H 1, H 2 , H 3, as H 4 from H 0 to make a 5-way simultaneous quadratic equations H 4, the secondary simultaneous The value of c when the values of ξ and η of the quadratic function become zero is determined by solving the equation, and the value of c is calculated as the axis shift of the optical axis center between the optical component for introducing incident light and the optical component to be measured. The light transmission loss of the optical component to be measured is obtained based on the difference between the received light intensity and the intensity of the incident light as the received light intensity after the optical axis adjustment when the optical axis adjustment is performed so that is zero. Optical component loss measurement method.
JP11036494A 1994-04-25 1994-04-25 Optical component optical loss measurement method Expired - Lifetime JP3359150B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11036494A JP3359150B2 (en) 1994-04-25 1994-04-25 Optical component optical loss measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11036494A JP3359150B2 (en) 1994-04-25 1994-04-25 Optical component optical loss measurement method

Publications (2)

Publication Number Publication Date
JPH07294380A JPH07294380A (en) 1995-11-10
JP3359150B2 true JP3359150B2 (en) 2002-12-24

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US5953112A (en) * 1997-03-20 1999-09-14 Hartford Hospital Method and apparatus for evaluating the performance characteristics of endoscopes
KR100444268B1 (en) 2002-06-05 2004-08-12 주식회사 한택 Apparatus and method for measuring beam using array type photo devices
JP5445324B2 (en) * 2010-05-17 2014-03-19 住友電気工業株式会社 Alignment device, core position specifying method, core loss measuring method, and crosstalk measuring method between cores
CN104316294B (en) * 2014-10-22 2016-12-07 中国电子科技集团公司第四十一研究所 A kind of optical fiber fusion welding point loss test device and method based on leak light detection
CN107677455B (en) * 2017-09-29 2019-11-08 武汉光迅科技股份有限公司 A kind of multichannel waveguide core slip automatic testing equipment and method

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