JP3234183B2 - Light scattering intensity measuring device - Google Patents
Light scattering intensity measuring deviceInfo
- Publication number
- JP3234183B2 JP3234183B2 JP31875997A JP31875997A JP3234183B2 JP 3234183 B2 JP3234183 B2 JP 3234183B2 JP 31875997 A JP31875997 A JP 31875997A JP 31875997 A JP31875997 A JP 31875997A JP 3234183 B2 JP3234183 B2 JP 3234183B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- light
- scattering intensity
- intensity measuring
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000149 argon plasma sintering Methods 0.000 title claims description 18
- 238000003384 imaging method Methods 0.000 claims description 22
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、試料からの散乱光
の強度を、散乱角の関数として測定することのできる光
散乱強度測定装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light scattering intensity measuring device capable of measuring the intensity of scattered light from a sample as a function of the scattering angle.
【0002】[0002]
【従来の技術】試料に光を当て、散乱光の角度依存性や
時間変化を測定することによって粒子の大きさ、形状、
分子量、熱運動などに関する情報を得ることができる。
この散乱光の角度依存性を測定する装置は、光散乱強度
測定装置といわれ、1方向から試料に光を照射し、散乱
光を検出する検出器を、試料の回りに回転するゴニオメ
ータの上に設置し、ゴニオメータを回転させていろいろ
な角度での検出を行う。2. Description of the Related Art The size, shape, and size of particles are measured by irradiating a sample with light and measuring the angle dependence and time change of scattered light.
Information on molecular weight, thermal motion, etc. can be obtained.
The device that measures the angle dependence of the scattered light is called a light scattering intensity measurement device, which irradiates the sample with light from one direction and places a detector that detects the scattered light on a goniometer that rotates around the sample. Install and rotate the goniometer to detect at various angles.
【0003】[0003]
【発明が解決しようとする課題】ところが、前記の光散
乱強度測定装置では、広い角度範囲の散乱光を測定しよ
うとすれば、測定に数十分以上かかり時間効率が悪いと
ともに、測定時間内に会合や凝集などの経時変化を起こ
す試料は測定できないという欠点がある。もし測定時間
を短縮しようとすると測定する角度ポイントを減らす必
要があり、そのためにデータの精度を犠牲にしなければ
ならない。However, in the light scattering intensity measuring apparatus described above, if it is desired to measure scattered light in a wide angle range, the measurement takes more than several tens of minutes and the time efficiency is low, and the measurement time is reduced. There is a disadvantage that a sample which causes a change with time such as association or aggregation cannot be measured. If the measurement time is to be shortened, it is necessary to reduce the number of angle points to be measured, thereby sacrificing data accuracy.
【0004】さらに、ゴニオメータを回転させた際に観
測ポイントがずれないように、非常に精度の高い機械設
計をしなければならず、このため装置製作に手間がかか
るという問題もあった。そこで、複数の検出器を試料の
回りに円環状に固定して、散乱光検出を行う装置も開発
されている。しかし、この装置では、測定される角度の
数は限られてしまう。Further, there is a problem that it is necessary to design a machine with extremely high precision so that the observation point does not shift when the goniometer is rotated, and it takes time to manufacture the apparatus. Therefore, an apparatus for detecting scattered light by fixing a plurality of detectors in an annular shape around a sample has been developed. However, with this device, the number of measured angles is limited.
【0005】本発明は、試料からの散乱光の強度を、散
乱角の関数として測定することのできる光散乱強度測定
装置において、360°を上限とする広い角度範囲での
散乱光の検出を極めて短時間で行うことのできる光散乱
強度測定装置を実現することを目的とする。According to the present invention, there is provided a light scattering intensity measuring apparatus capable of measuring the intensity of scattered light from a sample as a function of the scattering angle, and extremely detects scattered light in a wide angle range up to 360 °. It is an object of the present invention to realize a light scattering intensity measuring device that can be performed in a short time.
【0006】[0006]
【課題を解決するための手段】本発明の光散乱強度測定
装置は、試料に光を照射する照射光源と、試料からの散
乱光を反射させて集光するための反射鏡と、反射鏡から
の反射光の集光点に配置され、反射鏡の表面上の像を結
像する結像レンズと、前記集光点に配置された絞りと 、
前記結像レンズにより結像された像を記録する撮像手段
とを備えるものである(請求項1)。A light scattering intensity measuring apparatus according to the present invention comprises an irradiation light source for irradiating a sample with light, a reflecting mirror for reflecting and collecting scattered light from the sample, and a reflecting mirror. An imaging lens arranged at the focal point of the reflected light of the image forming an image on the surface of the reflector, and a diaphragm arranged at the focal point ,
Those comprising an imaging means for recording the image formed by said image forming lens (Claim 1).
【0007】前記の構成によれば、結像レンズは、反射
鏡の鏡面にできた像を撮像面に結像させることができる
ので、撮像手段は、散乱光の強度パターンを記録するこ
とができる。このように、結像レンズや撮像手段を備え
る点で、反射鏡を単に積分球の一種として利用するにす
ぎない特開平2−223845号公報、特開昭64−2
9737号公報に記載の発明とは異なっている。According to the above configuration, since the imaging lens can form an image formed on the mirror surface of the reflecting mirror on the imaging surface, the imaging means can record the intensity pattern of the scattered light. . Thus, in that it has an imaging lens and the imaging device, JP-2- 223845 discloses merely utilized as a kind of the reflector simply integrating sphere, especially HirakiAkira 64-2
This is different from the invention described in Japanese Patent No. 9737.
【0008】前記反射鏡は、回転楕円体面の一部から構
成される楕円面ミラーであってもよい(請求項2)。こ
の場合は、楕円面ミラーの鏡面にできた像を収差なく撮
像面に結像させることができる。前記反射鏡は、球面の
一部から構成される球面ミラー又は三角錐面の一部から
構成される三角錐ミラーであってもよい(請求項3)。
この場合は、楕円面ミラーと比べてミラーの製作が容易
になる。[0008] The reflecting mirror may be an elliptical mirror constituted by a part of a spheroidal surface. In this case, an image formed on the mirror surface of the elliptical mirror can be formed on the imaging surface without aberration. The reflecting mirror may be a spherical mirror composed of a part of a spherical surface or a triangular pyramid mirror composed of a part of a triangular pyramid surface.
In this case, the mirror can be easily manufactured as compared with the elliptical mirror.
【0009】[0009]
【発明の実施の形態】以下、本発明の実施の形態を、添
付図面を参照しながら詳細に説明する。図1は、本発明
に係る光散乱強度測定装置の概略図である。光散乱強度
測定装置は、測定試料を収容するガラス製の試料セル1
と、この試料セル1にミラー2a,2b、集光レンズ3
a,3b、ピンホール4を通してレーザ光線を投射する
レーザ装置5とを備え、さらに試料からの散乱光を結像
レンズ12に集光させるための楕円面ミラー6と、楕円
面ミラー6からの反射光を通すアパーチャ11と、結像
レンズ12と、CCDカメラ13とを配置している。結
像レンズ12は、楕円面ミラー6の鏡面にできた像をC
CDカメラ13の撮像面に結像させるものである。7は
試料セル1を真っ直ぐ透過したレーザ光線を吸収する吸
収板であり、透過したレーザ光線がガラスウィンドウ8
などに当たって反射・散乱されることを防ぐ。ピンホー
ル4やアパーチャ11は、レーザ光の周りの余分な迷光
をカットし、きれいなレーザ光プロファイルを作る役割
を果たしている。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a schematic diagram of a light scattering intensity measuring device according to the present invention. The light scattering intensity measuring device is a glass sample cell 1 for accommodating a measurement sample.
And mirrors 2a and 2b and a condenser lens 3 in this sample cell 1.
a, 3b, a laser device 5 for projecting a laser beam through a pinhole 4, an elliptical mirror 6 for condensing scattered light from a sample on an imaging lens 12, and a reflection from the elliptical mirror 6. An aperture 11 for transmitting light, an imaging lens 12, and a CCD camera 13 are arranged. The imaging lens 12 converts the image formed on the mirror surface of the ellipsoidal mirror 6 into C
The image is formed on the imaging surface of the CD camera 13. Reference numeral 7 denotes an absorption plate that absorbs a laser beam transmitted straight through the sample cell 1 and transmits the transmitted laser beam to a glass window 8.
Prevents reflection and scattering when hitting. The pinhole 4 and the aperture 11 play a role of cutting extra stray light around the laser beam and creating a clean laser beam profile.
【0010】なお、図1では、レーザ装置5の位置は、
平面作図の都合で試料セル1の上になっているが、試料
セル1に光を入射できるものであれば、この位置に限ら
れるものではなく、例えば試料セル1と同じ高さに置い
てもよい(この場合ミラーの配置はもちろん変わってく
る)。楕円面ミラー6は、図2(a) に示すように回転楕
円体の表面を輪切りにして内面を鏡面としたものであ
る。回転楕円体の性質により、一方の焦点61から出た
光は、楕円面ミラー6に当たり、他方の焦点62に集束
する。なお、楕円面ミラー6は必ずしも1周した輪状に
なっている必要はなく、図2(b) に示すように、一部が
欠けていてもよい。要するに、測定したい散乱角の範囲
にわたってミラーが存在していればよい。In FIG. 1, the position of the laser device 5 is
Although it is above the sample cell 1 for the sake of plan drawing, it is not limited to this position as long as light can enter the sample cell 1. For example, it can be placed at the same height as the sample cell 1. Good (in this case the mirror placement will of course change). As shown in FIG. 2 (a), the ellipsoidal mirror 6 has a spheroidal surface whose section is cut into a circle and whose inner surface is a mirror surface. Due to the nature of the spheroid, the light emitted from one focal point 61 hits the elliptical mirror 6 and is focused on the other focal point 62. Note that the elliptical mirror 6 does not necessarily have to be formed in an annular shape with one round, and may be partially missing as shown in FIG. 2 (b). In short, it is only necessary that the mirror exists over the range of the scattering angle to be measured.
【0011】本発明に係る光散乱強度測定装置は、前記
の回転楕円体の性質を利用して、一方の焦点を試料セル
1に置き、他方の焦点は、結像レンズ12に置いてい
る。したがって、試料セル1から出た散乱光で楕円面ミ
ラー6に当たったものは、楕円面ミラー6で反射されて
結像レンズ12に集光し、CCDカメラ13に入射す
る。In the light scattering intensity measuring apparatus according to the present invention, one focal point is placed on the sample cell 1 and the other focal point is placed on the imaging lens 12 by utilizing the properties of the spheroid. Therefore, the scattered light from the sample cell 1 that hits the elliptical mirror 6 is reflected by the elliptical mirror 6, condensed on the imaging lens 12, and enters the CCD camera 13.
【0012】図3は、光散乱強度測定装置の具体的構造
を示す図である。図3において、試料セル1にレーザ光
線を投射するためのレーザ装置、ミラー、集光レンズの
図示は省略している。試料セル1は、高屈折率の液体を
満たした恒温液浸バスの中にセットされ、試料セル1か
ら出た散乱光は、ガラスウィンドウ8を透過して、楕円
面ミラー6に当たり反射される。試料セル1の直下には
楕円面ミラー6により反射された光を折り返す平面ミラ
ー10が配置されている。この平面ミラー10は、反射
光を折り返すことにより装置全体の高さを抑える効果を
もたらす。FIG. 3 is a diagram showing a specific structure of the light scattering intensity measuring device. In FIG. 3, illustration of a laser device for projecting a laser beam onto the sample cell 1, a mirror, and a condenser lens is omitted. The sample cell 1 is set in a constant temperature immersion bath filled with a liquid having a high refractive index, and scattered light emitted from the sample cell 1 passes through the glass window 8 and is reflected by the elliptical mirror 6. A flat mirror 10 that folds the light reflected by the elliptical mirror 6 is disposed immediately below the sample cell 1. The flat mirror 10 has an effect of suppressing the height of the entire device by folding the reflected light.
【0013】平面ミラー10により折り返された光は、
アパーチャ11、結像結像レンズ12を通りCCDカメ
ラ13に入射する。CCDカメラ13は非常に高い位置
分解能(例えば512×512画素)の受光素子を使用
しており、これにより、測定角度分解能として散乱角1
°以下という高分解能のデータを得ることが可能であ
る。The light turned back by the plane mirror 10 is
The light enters the CCD camera 13 through the aperture 11 and the imaging lens 12. The CCD camera 13 uses a light receiving element having a very high positional resolution (for example, 512 × 512 pixels), and as a result, a scattering angle of 1 as a measurement angle resolution.
It is possible to obtain high-resolution data of less than °.
【0014】図4は、CCDカメラ13の撮像面に生じ
た散乱光の強度パターンを示している。この散乱光のパ
ターンは、図2(b) に示した約半分が欠けた輪状の楕円
面ミラー6のミラー面の結像パターンであり、散乱角φ
が5°から175°という角度範囲をカバーしている。
このパターンを散乱角φを横軸にとりグラフにしたもの
が図5である。FIG. 4 shows an intensity pattern of scattered light generated on the imaging surface of the CCD camera 13. This pattern of scattered light is imaged pattern of the mirror surface of the ellipsoidal mirror 6 of about half missing ring shown in FIG. 2 (b), the scattering angle φ
Cover an angle range of 5 ° to 175 °.
Those of the pattern scattering angle φ and the horizontal axis and the rig rough is FIG.
【0015】このように、光学系を構成する要素を動か
すことなしに、広い角度での散乱光強度データを一度に
取得することができる。なお、本発明は、前記の発明の
実施形態に限られるものではない。例えば、試料からの
散乱光を結像レンズ12に集光させるのに、楕円面ミラ
ー以外に、図6(a) に示すような三角錐の一部を輪切り
にしたミラー6bや、図6(b) に示すような球面の一部
を輪切りにしたミラー6cを使用してもよい。これらの
ミラー6b,6cを使うときは、楕円面ミラー6のよう
に1つの焦点から出て楕円面ミラー6に当たった光が無
収差で他の焦点に集まることはないが、輪の幅Wを小さ
くすることで1つの焦点から出てミラー6b,6cに当
たった光をほぼ1点に集めることは可能である。したが
ってこれらのミラー6b,6c使っても、楕円面ミラー
6を使ったのと遜色ない精度で散乱光のデータを得るこ
とができる。As described above, it is possible to acquire scattered light intensity data at a wide angle at a time without moving the constituent elements of the optical system. Note that the present invention is not limited to the above embodiment of the present invention. For example, in order to focus the scattered light from the sample on the imaging lens 12, besides the elliptical mirror, a mirror 6b in which a part of a triangular pyramid is sliced as shown in FIG. A mirror 6c in which a part of the spherical surface is cut into a circle as shown in b) may be used. When these mirrors 6b and 6c are used, the light coming out of one focal point and hitting the elliptical mirror 6 like the elliptical mirror 6 does not converge on the other focal point without aberration, but the width of the ring W It is possible to collect light that has come out of one focal point and hits the mirrors 6b and 6c at almost one point by reducing. Therefore, even if these mirrors 6b and 6c are used, scattered light data can be obtained with an accuracy comparable to that of using the elliptical mirror 6.
【0016】[0016]
【発明の効果】以上のように本発明の光散乱強度測定装
置によれば、散乱光の角度依存性を、非常に広い角度範
囲で、しかも光学系を構成する要素を動かすことなしに
一度に測定することができるので、測定の時間効率を格
段に向上させることができる。したがって、従来測定が
難しかった経時変化を起こす試料の測定が可能となる。As described above, according to the light scattering intensity measuring apparatus of the present invention, the angle dependence of the scattered light can be measured at a time in a very wide angle range without moving the components constituting the optical system. Since the measurement can be performed, the time efficiency of the measurement can be significantly improved. Therefore, it is possible to measure a sample that causes a temporal change, which has been difficult to measure conventionally.
【0017】また、光学系の構成要素に可動部分がない
ので、測定の安定性・信頼性が向上し、装置の寿命も長
くなる。光学系構成部品が少ないので、コスト面や製作
面で利点がある。Further, since there are no moving parts in the components of the optical system, the stability and reliability of the measurement are improved, and the life of the apparatus is prolonged. Since there are few optical system components, there are advantages in terms of cost and manufacturing.
【図1】本発明に係る光散乱強度測定装置の概略図であ
る。FIG. 1 is a schematic diagram of a light scattering intensity measuring device according to the present invention.
【図2】回転楕円体の表面を輪切りにして内面を鏡面と
した楕円面ミラーを示す図である。FIG. 2 is a diagram showing an ellipsoidal mirror in which the surface of a spheroid is sliced and the inner surface is a mirror surface.
【図3】光散乱強度測定装置の具体的構造を示す図であ
る。FIG. 3 is a diagram showing a specific structure of a light scattering intensity measuring device.
【図4】CCDカメラの撮像面に生じた散乱光の強度パ
ターンを示す図である。FIG. 4 is a diagram showing an intensity pattern of scattered light generated on an imaging surface of a CCD camera.
【図5】散乱光の強度パターンを散乱角φの関数として
示すグラフである。FIG. 5 is a graph showing the scattered light intensity pattern as a function of the scattering angle φ .
【図6】三角錐の一部を輪切りにしたミラー6bや、球
面の一部を輪切りにしたミラー6cを示す図である。FIG. 6 is a diagram showing a mirror 6b in which a part of a triangular pyramid is sliced, and a mirror 6c in which a part of a spherical surface is sliced.
1 試料セル 2a,2b ミラー 3a,3b 集光レンズ 4 ピンホール 5 レーザ装置 6 楕円面ミラー 10 平面ミラー 11 アパーチャ 12 結像レンズ 13 CCDカメラ DESCRIPTION OF SYMBOLS 1 Sample cell 2a, 2b Mirror 3a, 3b Condensing lens 4 Pinhole 5 Laser device 6 Ellipsoidal mirror 10 Planar mirror 11 Aperture 12 Imaging lens 13 CCD camera
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−122931(JP,A) 特開 昭63−243840(JP,A) 特開 平2−96636(JP,A) 特開 昭62−172242(JP,A) 特表 平3−500815(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01N 15/14 G01J 1/04 G01N 21/47 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-59-122931 (JP, A) JP-A-63-243840 (JP, A) JP-A-2-96636 (JP, A) JP-A-62-263 172242 (JP, A) Special Table Hei 5-500815 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01N 15/14 G01J 1/04 G01N 21/47
Claims (3)
として測定することのできる光散乱強度測定装置におい
て、 試料に光を照射する照射光源と、試料からの散乱光を反
射させて集光するための反射鏡と、反射鏡からの反射光
の集光点に配置され、反射鏡の表面上の像を結像する結
像レンズと、前記集光点に配置された絞りと 、 前記結像
レンズにより結像された像を記録する撮像手段とを備え
ることを特徴とする光散乱強度測定装置。1. A light scattering intensity measuring apparatus capable of measuring the intensity of scattered light from a sample as a function of a scattering angle, comprising: an irradiation light source for irradiating the sample with light; and a scattered light from the sample reflected. A reflecting mirror for condensing, an imaging lens arranged at a condensing point of the reflected light from the reflecting mirror, and an image forming an image on the surface of the reflecting mirror, and an aperture arranged at the condensing point , The imaging
A light scattering intensity measuring device, comprising: an imaging unit that records an image formed by a lens .
る楕円面ミラーである請求項1記載の光散乱強度測定装
置。2. The light scattering intensity measuring apparatus according to claim 1, wherein the reflecting mirror is an ellipsoidal mirror constituted by a part of a spheroidal surface.
ミラー又は三角錐面の一部から構成される三角錐ミラー
である請求項1記載の光散乱強度測定装置。3. The light scattering intensity measuring apparatus according to claim 1, wherein the reflecting mirror is a spherical mirror composed of a part of a spherical surface or a triangular pyramid mirror composed of a part of a triangular pyramid surface.
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31875997A JP3234183B2 (en) | 1997-11-19 | 1997-11-19 | Light scattering intensity measuring device |
PCT/JP1998/005232 WO1999026054A1 (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
CNB988112604A CN1170139C (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
US09/554,687 US6636308B1 (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
AU11749/99A AU753282B2 (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
CA002310625A CA2310625A1 (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
KR1020007005436A KR20010032235A (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
EP98954767A EP1035408A1 (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
TW087119164A TW388788B (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31875997A JP3234183B2 (en) | 1997-11-19 | 1997-11-19 | Light scattering intensity measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH11153534A JPH11153534A (en) | 1999-06-08 |
JP3234183B2 true JP3234183B2 (en) | 2001-12-04 |
Family
ID=18102630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31875997A Expired - Lifetime JP3234183B2 (en) | 1997-11-19 | 1997-11-19 | Light scattering intensity measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3234183B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012185121A (en) * | 2011-03-08 | 2012-09-27 | National Institute Of Advanced Industrial & Technology | Optical characteristic measurement device |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7151603B2 (en) | 2004-04-30 | 2006-12-19 | Samsung Electronics Co. Ltd. | Overhead transparency clarity simulator |
JP4742616B2 (en) * | 2005-02-25 | 2011-08-10 | 独立行政法人産業技術総合研究所 | Three-dimensional elliptical optical device |
TWI467125B (en) * | 2012-09-24 | 2015-01-01 | Ind Tech Res Inst | Measurement systems and measurement methods |
CN103163049B (en) * | 2013-03-15 | 2014-12-03 | 哈尔滨工业大学 | Method and device for measuring scattering property of horizontally oriented particle swarm |
JP6557022B2 (en) * | 2015-02-18 | 2019-08-07 | アズビル株式会社 | Particle detector |
AU2017398403B2 (en) * | 2017-02-10 | 2023-02-23 | Amgen Inc. | Imaging system for counting and sizing particles in fluid-filled vessels |
-
1997
- 1997-11-19 JP JP31875997A patent/JP3234183B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012185121A (en) * | 2011-03-08 | 2012-09-27 | National Institute Of Advanced Industrial & Technology | Optical characteristic measurement device |
Also Published As
Publication number | Publication date |
---|---|
JPH11153534A (en) | 1999-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6862097B2 (en) | Three-dimensional shape measuring method, and three-dimensional shape measuring apparatus | |
US5159412A (en) | Optical measurement device with enhanced sensitivity | |
TW200952102A (en) | Optical inspection system and method | |
TW388788B (en) | Apparatus for measuring characteristics of optical angle | |
US6954267B2 (en) | Device for measuring surface defects | |
JP2002071513A (en) | Interferometer for immersion microscope objective and evaluation method of the immersion microscope objective | |
JP3234183B2 (en) | Light scattering intensity measuring device | |
JP3934051B2 (en) | Measurement of surface defects | |
JP3520356B2 (en) | Magnetic film defect inspection system for magnetic disks | |
US8269157B2 (en) | Optical imaging system | |
JPS5979104A (en) | Optical device | |
JPH03189545A (en) | Defect inspecting device | |
CN103454065A (en) | Scattering measurement focusing device and method used for lithographic equipment | |
JP2010216922A (en) | Optical displacement meter and optical displacement measurement method | |
CN109000591A (en) | A kind of bias difference measuring instrument | |
JP3231268B2 (en) | Optical viewing angle measuring device | |
JPH0694613A (en) | Infrared microscopic measuring apparatus | |
JP3040131B2 (en) | Spherical surface scratch inspection device | |
JP2815808B2 (en) | Radiation thermometer | |
KR102547513B1 (en) | Apparatus for Optical Inspection | |
JPH08334309A (en) | Optical displacement-detecting apparatus | |
JP2002090302A (en) | Light quantity measuring device | |
JPH08166209A (en) | Polygon mirror evaluating device | |
JPH0454445Y2 (en) | ||
JPS6217607A (en) | Optical clinometer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20070921 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100921 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100921 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110921 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110921 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120921 Year of fee payment: 11 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120921 Year of fee payment: 11 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130921 Year of fee payment: 12 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |