JP3216166B2 - XY positioning table - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY positioning table for positioning a table at an arbitrary position on a plane, and more particularly to a XY positioning table capable of reducing the overall thickness and easily achieving required accuracy, rigidity, resolution and the like. It has a flexible configuration that can respond.

[0002]

2. Description of the Related Art In a conventional XY positioning table, a sub-table movable in the X-direction and a first actuator for directly moving the sub-table in the X-direction are arranged on the upper surface of a bed. A main table movable in the Y direction and a second actuator for directly moving the main table in the Y direction are disposed on the upper surface of the first table. The first actuator is moved in accordance with the target displacement amount in the X direction. By driving, both the sub-table and the main table are moved in the X direction, and the second actuator is driven in accordance with the target displacement amount in the Y direction.
The main table is moved in the Y direction, and the uppermost main table is positioned at an arbitrary position on a plane including the X direction and the Y direction.

[0003]

However, in the conventional XY positioning table as described above, the two tables are stacked on a bed in order to share the movement in the X and Y directions between the two tables. Since it is necessary, there is a problem that the whole becomes thick.

[0004] In the conventional configuration, two actuators are required to drive two tables. However, since the driving directions are shifted by 90 degrees,
This is because, for example, interference between driving components is avoided. In addition, the arrangement positions of the actuators and the like are not so flexible. Therefore, for example, the arrangement positions of the actuators cannot be changed in accordance with the use positions and the like. There was also a problem that it was not good.

The present invention has been made in view of such problems of the prior art, and can reduce the overall thickness and relatively freely select the arrangement of members and the like. It is an object of the present invention to provide an XY positioning table having a flexible configuration that can be used.

[0006]

According to a first aspect of the present invention, there is provided an XY positioning table for positioning a table disposed on a bed at an arbitrary position on a plane. of the upper surface side, with disposing the first and second linear members capable linear identical or parallel straight line along said plane independently of each other, the first linear motion member, the guide Is a direction inclined with respect to the translation direction, and a member forming a first drive side guide surface parallel to the plane is provided , and a guide direction is provided on the second translation member. Is a member that forms a second driving-side guide surface that is inclined with respect to the linear motion direction, is parallel to the plane, and intersects the direction of guidance of the first driving-side guide surface. the provided, and, in the table
On a lower surface side , a first driven side guide surface aligned with the first drive side guide surface, and a second driven side guide surface aligned with the second drive side guide surface.
And the passive side guide surface. According to a second aspect of the present invention, in the XY positioning table according to the first aspect of the present invention, the first and second linearly moving members are capable of linearly moving independently on the same straight line along the plane. Two sets of the first and second linear motion members of one set and the linear motion direction of the first and second linear motion members of the other set are parallel to each other. Each was set on a straight line. The invention according to claim 3 is the XY positioning table according to claim 1 or 2, wherein
Of the members provided on the linear motion member and the second linear motion member.
The first drive side guide surface and the second drive side guide are provided on a side surface.
A surface is formed. Furthermore, the invention according to claim 4
XY positioning according to the first to third aspects of the present invention.
In the table, the space between the bed and the table is
Or, they are guided by static pressure bearings using air.
The invention according to claim 5 is the invention according to claims 1 to 4.
In the XY positioning table according to the invention, between the first drive side guide surface and the first passive side guide surface, and between the second drive side guide surface and the second passive side guide surface. Each of the intervals was guided by a hydrostatic bearing or a linear motion ball bearing.

[0007]

The direction in which the first and second linear members move linearly is defined as the X direction, and the direction orthogonal to the X direction and parallel to the plane on which the table is positioned is defined as the Y direction. And
Since the direction of the guide on the first drive-side guide surface and the direction of the guide on the second drive-side guide surface are not parallel and do not coincide with the X direction, an extension of the guide direction is considered. Then, the distance in the X direction between the extended lines changes linearly according to the position in the Y direction.

Therefore, if the first and second linear members are moved by the same amount in the same direction, the distance between the first and second linear members in the X direction does not change. The Y-direction positions of the first and second passive-side guide surfaces with which the second drive-side guide surface makes contact are the same before and after the movement of the first and second linear motion members, and therefore the first and second passive-side guide surfaces are in the same position. The displacement of the second linear motion member is transmitted to the table via the first and second driving side guide surfaces and the first and second passive side guide surfaces, and the table is moved by the first and second linear motion guide surfaces. The member is displaced in the X direction together with the member.

If the first and second linear members are moved by the same amount in the opposite direction to the above, the table together with the first and second linear members is in the X direction. However, it is displaced in a direction opposite to the above. On the other hand, the first and second
When the linear motion members are moved in the direction in which the distance in the X direction is reduced, the distance in the X direction between the extended lines is reduced, so that the first and second drive-side guide surfaces come into contact with each other. The position of the passive guide surface in the Y direction changes, and the table is displaced in the Y direction.

Further, when the first and second linear moving members are displaced in a direction in which the distance in the X direction increases, the distance in the X direction between the extension lines increases, so that the first and second driving side guides are provided. The Y-direction positions of the first and second passive guide surfaces contacting the surfaces change in the opposite direction, and the table is displaced in the Y-direction but in the opposite direction. As described above, since the table can be displaced in both the X direction and the Y direction, the table is positioned at an arbitrary position on the plane by appropriately moving the first and second linear motion members. You. According to the second aspect of the invention, two sets of first and second linear members that linearly move on the same straight line are provided, and the linear movement directions of the linear members of each set are separated in parallel. Therefore, the rigidity in the X direction and the Y direction becomes higher. In the invention according to claim 3, the first and second linear motions are provided.
The movement of the member can be efficiently transmitted to the table.
In the case of the invention according to claim 4, the table is a bed.
Can be slid more smoothly on the door. further,
According to the invention of claim 5, the movement in the X direction and the Y direction can be performed with low friction.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a first embodiment of the present invention,
FIG. 3 is a perspective view of the XY positioning table 1 in a state where a bed 2 and a table 3 are separated. First, the configuration will be described.

That is, the table 3 to be overlaid on the bed 2
Can slide on the upper surface of the bed 2 finished in a horizontal plane by a hydrostatic bearing using oil or air formed between the bed 2 and the table 3.
Two parallel grooves 2 extending in the X direction and extending from one side surface to the other side surface of the bed 2 are provided on the upper surface of the bed 2.
A and 2B are formed, and in the grooves 2A and 2B,
Two linear slides 4A, 4B, 4C and 4D respectively
Is fitted. The inner surfaces of the grooves 2A and 2B,
The end faces of the linear slides 4A, 4B, 4C, and 4D in the Y direction are bearing surfaces, whereby the linear slides 4A, 4B, 4C, and 4D move within the grooves 2A, 2B.
It can move individually in the X direction.

[0013] The end faces of the linear slides 4A, 4B, 4C and 4D facing the X direction on the side not facing the other linear slides extend in the X direction along the grooves 2A and 2B and are relatively long. Rods 5A, 5B, 5C and 5D whose parts protrude outside the side surface of the bed 2 are fixed. Further, on the side surface of the bed 2 where the grooves 2A, 2B are opened, drive devices 6A, 6B, 6C and 6C composed of electric motors and the like are arranged so that rods 5A, 5B, 5C and 5D pass therethrough. 6D (however, the driving devices 6A and 6B do not appear in FIG. 1 because of the position) is fixed.

The driving devices 6A, 6B, 6C and 6D are individually drivable, and rods 5A, 5B, 5C and 5D are provided between a pair of friction rollers 6a and 6b which are rotary output shafts located above the driving devices. Is sandwiched. Therefore, the driving force of the driving devices 6A, 6B, 6C, and 6D is transmitted to the rods 5A, 5B, 5C, and 5D via the frictional force of the friction rollers 6a, 6b.
Each of the rods 5A, 5B, 5C and 5D can independently advance and retreat in the X direction.

And, each linear slide 4A, 4B, 4C
Guide slides 7A, 7B, 7C and 7D each having an appearance of a rectangular parallelepiped are provided on the upper surface of
(The other side does not appear in FIG. 1 due to location.)
Guide ridges 7A and 7 at the diagonal position with the longer ridge line intersecting the axis in the X and Y directions at 45 degrees.
The guide slides 7B and 7C are fixed such that the end faces of D face each other and the end faces of the guide slides 7B and 7C face each other.

On the other hand, the table 3 has a square planar shape and has four guide grooves 3A, 3A, 3A,
3B, 3C and 3D are formed. These guide grooves 3
A, 3B, 3C and 3D are guide slides 7A, 7B,
The inner surfaces of the guide grooves 3A, 3B, 3C, and 3D and the side surfaces 7a of the guide slides 7A, 7B, 7C, and 7D serve as bearing surfaces. As a result, guide slides 7A, 7B,
7C and 7D can slide in the guide grooves 3A, 3B, 3C and 3D.

Next, the operation of this embodiment will be described. This X
The Y positioning table 1 is used by stacking the table 3 on the bed 2 so that the guide slides 7A, 7B, 7C and 7D fit into the guide grooves 3A, 3B, 3C and 3D. FIGS. 2A and 2B show an XY positioning table 1 for explaining the operation when the table 3 is displaced in the X direction.
FIG.

First, as shown in FIG.
The drive units 6A and 6B are driven in a direction in which the rods 5C and 5B are pulled out from the grooves 2A and 2B.
D in the direction in which D is pushed into the grooves 2A and 2B,
6D is driven. However, each rod 5A, 5B, 5C
And the moving amount and moving speed of 5D are equal. Then
The linear slides 4A, 4B, 4C and 4D (not shown in FIG. 2) move in the X direction by the same amount at the same speed, so that the guide slides 7A, 7 fixed to these move.
B, 7C, and 7D are also displaced in the X direction without changing their relative positional relationship.

Therefore, the displacement of the guide slides 7A, 7B, 7C and 7D in the X direction is directly applied to the guide grooves 3A, 3B,
Since it is transmitted to 3C and 3D, after all, the linear slide 4A,
The displacement in the X direction of 4B, 4C, and 4D is
A, 7B, 7C and 7D are transmitted to the table 3 via the guide grooves 3A, 3B, 3C and 3D, and the table 3 is displaced in the X direction.

Conversely, as shown in FIG.
A and 5B drive the driving devices 6A and 6B in the direction in which the rods 5C and 5D are pushed into the grooves 2A and 2B, respectively.
6C, in the direction in which the drive device 6C is pulled out from the grooves 2A, 2B.
6D (however, each rod 5
The moving amounts and moving speeds of A, 5B, 5C and 5D are made equal. ) And this time, the table 3 is displaced in the X direction in the opposite direction by the operation in the opposite direction.

As described above, the table 3 is provided with the driving device 6
By appropriately driving A, 6B, 6C and 6D,
It can be displaced to any position in the X direction. FIG.
(A) And (b) is a top view of the XY positioning table 1 explaining operation | movement when displacing the table 3 in a Y direction. First, as shown in FIG.
Drive units 6A and 6C are driven in the direction in which 5C is pushed into groove 2A.
Is driven, and the driving devices 6B and 6D are driven in a direction in which the rods 5B and 5D are pulled out from the grooves 2B. However, similarly to the above, each rod 5A, 5B, 5C
And the moving amount and moving speed of 5D are equal.

Then, the linear slides 4A and 4C (FIG. 3)
Is omitted here. ) In the X direction is reduced, and the distance between the linear slides 4B and 4D (omitted in FIG. 3).
Since the directional distance increases, the X-direction distance between the guide slides 7A and 7C fixed thereto also decreases, and the X-direction distance between the guide slides 7B and 7D also increases. When the distance in the X direction between the guide slides 7A and 7C is reduced, the guide slides 7A and 7C are fitted in the guide grooves 3A and 3C, and therefore move toward the center in the guide grooves 3A and 3C. When the X-direction distance between the guide slides 7B and 7D increases, the guide slides 7B and 7D
Since D is fitted into the guide grooves 3B and 3D, it moves toward the vertices in the guide grooves 3B and 3D.

However, the linear slides 4A, 4B, 4C to which the guide slides 7A, 7B, 7C and 7D are fixed.
And 4D are fitted in the grooves 2A, 2B extending in the X direction, so that the guide slides 7A, 7B, 7C and 7D
Can move only in the X direction with respect to the base 2,
As a result, the Y-direction component when the guide slides 7A, 7B, 7C, and 7D move in the guide grooves 3A, 3B, 3C, and 3D acts on the table 3 side. Displaced in the Y direction.

Conversely, as shown in FIG.
Drive device 6 in the direction in which A, 5C is pulled out of groove 2A.
A and 6C are driven, and the driving devices 6B and 6D are driven in the direction in which the rods 5B and 5D are pushed into the grooves 2B (however, similarly to the above, each of the rods 5A, 5B,
The moving amounts and moving speeds of 5C and 5D are made equal. )
This time, the distance in the X direction between the guide slides 7A and 7C increases, and the distance in the X direction between the guide slides 7B and 7D decreases, so that the guide slides 7A and 7C
And 3C move toward the top and guide slide 7B
And 7D will move toward the center in the guide grooves 3B and 3D.

As a result, since the table 3 is displaced in the Y direction in the opposite direction to the above, after all, the driving devices 6A, 6B,
By appropriately driving 6C and 6D, the table 3
Can be displaced to any position in the Y direction. As described above, the table 3 can be displaced in any of the X direction and the Y direction by appropriately driving the driving devices 6A, 6B, 6C, and 6D, so that the table 3 is positioned at an arbitrary position on the upper surface of the bed 2. be able to.

With the configuration of this embodiment, the table 3 can be displaced in both the X direction and the Y direction as described above, so that the table 3 can be displaced in the X direction as in the conventional XY positioning table. There is no need to stack a table to be displaced and a table that is displaced in the Y direction, so that the thickness of the entire apparatus can be reduced, and the apparatus can be downsized.

Further, in this embodiment, when the table 3 is displaced in the X direction, the linear motion slides 4A, 4B, 4
The displacement in the X direction of C and 4D is transmitted to the table 3 as it is, but when the table 3 is displaced in the Y direction, the guide slides 7A, 7B, 7C and 7D and the guide grooves 3A, 3B,
Since the Y-direction component of the relative displacement between 3C and 3D is the Y-direction displacement of the table 3, the guide slides 7A, 7
Since the angle between the directions of the guides B, 7C, and 7D and the axis in the X direction is 45 degrees, the linear motion slides 4A, 4
The displacement amounts of B, 4C, and 4D are the displacement amounts of the table 3 in the Y direction.

That is, in the configuration of the present embodiment, when the XY positioning table 1 of the present embodiment is applied to an apparatus that requires high-precision positioning, such as a semiconductor device manufacturing apparatus, high-precision positioning is performed. It is desirable that the direction in which X is required matches the Y direction of the XY positioning table 1 of the present embodiment. Then, as shown in FIG.
By increasing the angle θ between A, 3D and the guide grooves 3B, 3C, the resolution in the Y direction can be further increased. For example, in the above embodiment, θ = 90 degrees, but by setting θ = 120 degrees, the resolution in the Y direction can be increased to about 1.7 times as compared with the configuration of FIG. Can meet the requirements for positioning.

Further, as in this embodiment, the linear slide 4A and the linear slide 4C are linearly moved along the same straight line, and the linear slide 4B and the linear slide 4D are moved along another linear line. When the table 3 is linearly moved along the two directions and the two lines are parallel to each other, the rigidity of the table 3 in both the X direction and the Y direction can be increased, and accordingly, there is an advantage that the positioning can be performed with higher precision. . In addition,
With the configuration as in this embodiment, the guide slide 7A and
There is no need to connect 7D and guide slides 7B and 7
Since there is no need to connect C, these guide slides 7A
~ 7D height position (top surface height) can be aligned,
This also leads to a reduction in the overall thickness of the device.
You. In this embodiment, if the linear slide 4A is the first linear member, the linear slide 4C is the second linear member, the side surface 7a of the guide slide 7A is the first drive side guide surface, The side surface 7a of the guide slide 7C is a second drive side guide surface, the inner side surface of the guide groove 3A is a first passive side guide surface, and the inner side surface of the guide groove 3C is a second passive side guide surface. If the linear slide 4B is the first linear member, the linear slide 4D is the second linear member, the side surface 7a of the guide slide 7B is the first drive side guide surface, and the side surface 7a of the guide slide 7D. , The second drive side guide surface, the inner side surface of the guide groove 3B becomes the first passive side guide surface, and the inner side surface of the guide groove 3D becomes the second passive side guide surface.

FIG. 5 is a view showing a second embodiment of the present invention, and is a plan view of the XY positioning table 1. As shown in FIG. First, the configuration will be described. That is, on the upper surface of the bed 2 on which the table 3 is slidably stacked, a groove 2C extending in the X direction and extending from one side surface to the other side surface of the bed 2 is formed, and at both ends of the groove 2C, Electric motors 10A and 10B that can be driven individually are fixed with their output shafts facing the inside of groove 2C.

The output shafts of the electric motors 10A and 10B are connected to screw shafts 11A and 11B which constitute a ball screw mechanism and extend along the groove 2C so as to be able to transmit torque. The ends of 11A and 11B are rotatably supported by support bearings 11a, and the screw shafts 11A and 11B have grooves 2 respectively.
Nut 12 that constitutes the ball screw mechanism fitted in C
A and 12B are screwed together.

Further, the side surfaces of the nuts 12A and 12B,
The inner surface of the groove 2C opposed thereto forms a bearing surface, whereby the nuts 12A and 12B are prevented from rotating and can be individually displaced in the groove 2C in the X direction. The guide slide 13 is provided on the upper surface of the nut 12A so that the side surface and the axis in the X direction intersect at 45 degrees.
A is fixed, and a guide slide 13B is fixed to the upper surface of the nut 12B such that the side surface and the axis in the X direction intersect at 45 degrees. However, guide slide 1
3A and 13B are fixed so that their side surfaces do not become parallel.

On the other hand, the table 3 has a rectangular shape formed by combining two squares, and has a
Two guide grooves 14A and 14B are formed extending from the end of one longer side of the rectangle toward the center of the other side. However, the two guide grooves 14A and 14B intersect at right angles. And the guide grooves 14A, 14B
The guide slides 13A, 13B are formed to have a width corresponding to the width dimension, and both inner side surfaces of the guide grooves 14A, 14B and both side surfaces of the guide slides 13A, 13B are bearing surfaces.
As a result, the guide slides 13A and 13B are
4A and 14B can be slid.

Next, the operation of this embodiment will be described. This X
The Y positioning table 1 is used by superposing the table 3 on the bed 2 so that the guide slides 13A, 13B fit into the guide grooves 14A, 14B. When the electric motor 10A is rotationally driven, the screw shaft 11A connected to the output shaft rotates, and the rotational force is converted into the advance / retreat force of the nut 12A by the ball screw mechanism, and the nut 12A is moved along the groove 2C. Displaced in the X direction.

Similarly, when the electric motor 10B is driven to rotate, the screw shaft 11B connected to the output shaft rotates,
The rotational force is converted by the ball screw mechanism into an advance / retreat force of the nut 12B, and the nut 12B is displaced in the X direction along the groove 2C. When the nuts 12A and 12B are displaced in the same direction by the same amount, the nuts 12A and 1B are displaced.
Since the distance in the X direction between 2B does not change, the guide grooves 14A, 14B of the guide slides 13A, 13B fixed to them.
B does not change position, and therefore its nut 12
The table 3 is displaced in the X direction with the displacement of A and 12B.

When the nuts 12A and 12B are displaced in the direction in which the distance in the X direction between them decreases, the guide slide 13A moves in the guide groove 14A from the upper left to the lower right in FIG. The guide slide 13B moves in the guide groove 14B from the upper right to the lower left in FIG. 5, and the nut 1 to which the guide slides 13A and 13B are fixed.
2A and 12B cannot be displaced in the Y direction because they are fitted in the groove 2C. Therefore, the Y direction component of the relative displacement generated between the guide slides 13A and 13B and the guide grooves 14A and 14B acts on the table 3 side. And, as a result, Table 3
Is displaced upward in FIG. 5 which is the Y direction.

Conversely, when the nuts 12A and 12B are displaced in the direction in which the distance in the X direction between them increases, the guide slide 13A moves in the guide groove 14A from the lower right to the upper left in FIG. Since the guide slide 13B moves in the guide groove 14B from the lower left to the upper right in FIG. 5, the Y direction component of the relative displacement generated between the guide slides 13A, 13B and the guide grooves 14A, 14B is opposite to the above. Table 3
The table 3 is displaced downward in FIG. 5, which is the Y direction.

As described above, even in the configuration of this embodiment,
Since the table 3 can be displaced in any of the X direction and the Y direction, the table 3 can be positioned at an arbitrary position on the bed 2. According to the configuration of the present embodiment, the drive system components such as the electric motors 10A and 10B are half of those of the first embodiment.
Although the rigidity and accuracy are slightly inferior to those of the positioning table, the number of components is reduced, and the XY positioning table 1 can be made compact, lightweight and low-cost.

Since the nuts 12A and 12B are advanced and retracted by the ball screw mechanism, as in the first embodiment,
The rod for moving the linear slide does not protrude significantly outside the device. Here, in the present embodiment, the nut 12A corresponds to the first linear motion member, and the nut 1A
2B corresponds to the second linear motion member, and the side surface of the guide slide 13A constitutes a first drive side guide surface.
B constitutes a second drive side guide surface, and the guide groove 13A
Inner surface of the first groove constitutes a first passive side guide surface, and the guide groove 13B
Constitutes a second passive guide surface.

FIG. 6 is a view showing a third embodiment of the present invention, and is a plan view of the XY positioning table 1. As shown in FIG. The same members and parts as those in the configuration of the first embodiment are denoted by the same reference numerals, and redundant description will be omitted. That is, in this embodiment, two grooves 2 extending in the X direction are formed on the upper surface of the bed 2.
A and 2B are formed, and two linear slides 4A and 4C are fitted in one groove 2A so as to be able to linearly move, but the other groove 2B has a linear movement slide. Slide 4D
Is fitted so that it can move directly.

The guide slides 7A and 7B are fixed on the upper surfaces of the linear slides 4A and 4C so that the side surfaces thereof and the axis in the X direction intersect at an acute angle more than the configuration shown in FIG. The slide 7D is fixed to the upper surface of the linear slide 4D such that the side surface is parallel to the axis in the Y direction. On the lower surface of the table 3, on the other hand, a guide groove 3E extending in the Y direction is formed along with a guide groove 3A aligned with the guide slide 7A and a guide groove 3C aligned with the guide slide 7C.

With such a configuration, the table 3
Similarly to the first and second embodiments, the linear slides 4A and 4C are displaced in the opposite directions to each other to be displaced in the Y direction, but the guide grooves 3A and 3C and the guide slide 7 are displaced.
Since the directions of the guides A and 7C are closer to the axis in the X direction than the configuration shown in FIG. 4, the resolution in the Y direction can be further increased, and the demand for higher precision positioning can be satisfied. be able to.

When the table 3 is moved in the Y direction, since the guide directions of the guide groove 3E and the guide slide 7D coincide with the Y direction, the guide groove 3E and the guide slide 7D may not move. It will not be. On the other hand, if the linear slides 4A, 4C and 4D are displaced by the same amount in the same direction, the displacement is transmitted to the table 3 as it is.
The table 3 can be displaced in the X direction.

In this embodiment, the guide grooves 3A, 3C
Further, since the guide directions of the guide slides 7A and 7C are closer to the axis in the X direction than the configuration shown in FIG. 4, the resolution in the Y direction can be increased as described above. The rigidity in the X direction between the 3C and the guide slides 7A, 7C is reduced. However, the driving source 6D
Is transmitted to the table 3 via the guide slide 7D and the guide groove 3E whose guide direction is in the Y direction.
A decrease in rigidity in the X direction as a whole can be prevented.

Here, in this embodiment, the linear slide 4A
Is regarded as a first linear motion member, the linear motion slides 4C and 4C
D corresponds to the second linear member, the side surface of the guide slide 7A corresponds to the first drive side guide surface, and the respective side surface of the guide slides 7C and 7D corresponds to the second drive side guide surface. The inner surface of the guide groove 3A corresponds to the first passive-side guide surface, and the respective inner surfaces of the guide grooves 3C and 3E correspond to the second
Corresponding to the passive side guide surface.

FIG. 7 is a view showing a fourth embodiment of the present invention, and is a perspective view of the XY positioning table 1 in a state where the bed 2 and the table 3 are separated, as in FIG. In addition,
The same members and portions as those in the configuration of the first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated. That is, in the present embodiment, the electric motors 20A, 2B are disposed at the ends of the grooves 2A, 2B such that their output shafts face inside the grooves 2A, 2B.
0B, 20C and 20D are fixed, and screw shafts 21A, 21B, 21C and 21D which constitute a ball screw mechanism and extend along the grooves 2A and 2B are connected to the electric motors 20A, 20B, 20C and 20D. ing.

Each screw shaft 21A, 21B, 21C and 21
D are individually rotatably supported at their ends by support bearings 21a.
A, 20B, 20C, and 20D can be individually rotated by receiving the rotational force. And each screw shaft 21A, 21
B, 21C, and 21D have nuts 22 that constitute a ball screw mechanism that is linearly fitted into the grooves 2A, 2B.
A, 22B, 22C and 22D are screwed.

Further, bearings 23A, 23B, 23C and 23D constituting linear motion ball bearings are fixed on the upper surfaces of the nuts 22A, 22B, 22C and 22D so that the guide direction thereof is directed to the center of the bed 2. Have been.
The bearing 23 is provided on the lower surface of the table 3.
Rails 24A and 24B constituting a linear motion ball bearing together with A, 23B, 23C and 23D are fixed along a diagonal line of the table 3 having a square planar shape.

Even with such a configuration, substantially the same operation as in the first embodiment can be obtained, so that the table 3 can be positioned at an arbitrary position on the bed 2 and the first embodiment can be positioned. The same effect can be obtained. According to the configuration of the present embodiment, the rails 24A and 24B are fixed instead of forming the guide groove on the lower surface of the table 3, so that the process is simpler than the XY positioning table of the first embodiment. It becomes possible to manufacture. And above
Since a linear motion ball bearing is applied to the guide surface,
Bull 3 can be moved with lower friction and its movement is smooth
There is also the advantage of becoming.

Since the nuts 22A, 22B, 22C and 22D are advanced and retracted by the ball screw mechanism, the rod for moving the linear slide protrudes largely outside the device as in the first embodiment. There is no such thing.
Here, in the present embodiment, if the nut 22A is the first linear member, the nut 22C is the second linear member, the bearing surface of the bearing 23A is the first driving-side guide surface,
The bearing surface of C is the second drive side guide surface, of the rail 24A,
The portion where the bearing 23A fits is the first passive guide surface, and the portion of the rail 24B where the bearing 23C fits is the second passive guide surface.

If the nut 22B is used as the first linear member, the nut 22D is used as the second linear member and the bearing 23.
B is the first drive side guide surface, the bearing surface of the bearing 23D is the second drive side guide surface, and of the rail 24B, the portion where the bearing 23B is fitted is the first passive side guide surface.
A portion of the rail 24A where the bearing 23D is fitted becomes a second passive guide surface.

FIG. 8 is a view showing a fifth embodiment of the present invention, and is a plan view of the XY positioning table 1. As shown in FIG. That is, two sets of guide rails 30A, 30B and 31A, 31B extending in the X direction are fixed to the upper surface of the bed 2, and a sub-table 32 that can move linearly in the X direction along the guide rails 30A, 30B. , Guide rails 31A, 31
A sub-table 33 that can move linearly in the X direction along B is provided.

A screw shaft 34 extending in the X direction parallel to the guide rails 30A and 30B is rotatably disposed with both ends supported by support bearings 35a and 35b. One end of the shaft 34
It is connected to an output shaft of an electric motor 36 fixed to the side surface of the bed 2. Similarly, guide rails 31A and 31A
Between B, a screw shaft 37 extending in the X direction in parallel with them.
Are rotatably disposed with both ends supported by support bearings 38a and 38b, and one end of the screw shaft 37 is connected to the side of the bed 2 on the same side where the electric motor 36 is fixed. Is connected to the output shaft of an electric motor 39 fixed to the motor.

A nut constituting a ball screw mechanism is screwed into each of the screw shafts 34 and 37, and the upper surface of the nut screwed into the screw shaft 34 is
The upper surface of the nut fixed to the lower surface of the sub-table 32 and screwed to the screw shaft 37 is fixed to the lower surface of the sub-table 33. A pair of guide rails 40A and 40B are fixed on the upper surface of the sub-table 32 so as to be parallel to each other and intersect with the axis in the X direction at an angle of 45 degrees. Guide rails 41A, 41B are parallel to each other, intersect with the axis in the X direction at an angle of 45 degrees, and have guide rails 40A, 40B.
It is fixed so that it does not become parallel.

On the other hand, a pair of guide rails 42A and 42B sandwiching the guide rails 40A and 40B from the outside and a pair of guide rails 43A and 43B sandwiching the guide rails 41A and 41B from the outside are fixed to the lower surface of the table 3. Have been. And the guide rails 40A, 4
0B and the inner surfaces of the guide rails 42A and 42B constitute the bearing surface, and the guide rails 41A and 41
The outer surface of 1B and the inner surfaces of guide rails 43A and 43B constitute a bearing surface.

Even with such a configuration, if the sub-tables 32 and 33 are moved by the same amount in the same direction as in the above-described embodiments, the displacement of the sub-tables 32 and 33 is transferred to the table 3 as it is. As a result, the table 3 is displaced in the X direction, and if the sub-tables 32 and 33 are displaced in directions opposite to each other, the guide rails 40A and 40B are displaced.
And the Y direction component of the relative displacement between the guide rails 42A and 42B and the Y direction component of the relative displacement between the guide rails 41A and 41B and the guide rails 43A and 43B act on the table 3. Is displaced.
Therefore, the table 3 can be positioned at any position on the bed 2.

According to the structure of the present embodiment, the electric motors 36 and 39 are provided only on one side of the bed 2, so that the drive system components do not project on the other side. Therefore, there is an advantage that the arrangement becomes easy even when the space is limited. Other functions and effects are the same as those of the first embodiment. Here, in the present embodiment, the sub-table 32 corresponds to the first direct-acting member, the sub-table 33 corresponds to the second direct-acting member, and the outer surfaces of the guide rails 40A and 40B correspond to the first driving side. The outer surfaces of the guide rails 41A and 41B correspond to the second drive-side guide surfaces, and correspond to the guide surfaces.
The inner side surfaces of A and 42B correspond to the first passive side guide surface, and the inner side surfaces of the guide rails 43A and 43B correspond to the second passive side guide surface.

In each of the above embodiments, the members corresponding to the first and second linear motion members are provided on the bed 2 side. On the contrary, the linear motion members are provided on the lower surface of the table 3. The same operation and effect can be obtained even when the corresponding members are provided. Further, the driving method of the linear slide or the like is not limited to the configuration of each of the above-described embodiments, and may be configured to be driven using a hydraulic pump, a wire drive, a gear drive, a linear motor, or the like.

Further, on each bearing surface, a hydrostatic bearing, a rolling bearing, a linear guide, or the like can be appropriately used.

[0060]

As described above, according to the present invention,
Since the table placed on the bed can be moved in two directions orthogonal to each other, the thickness of the entire device can be reduced, and the drive source and the drive force transmission mechanism can be selected relatively freely. Therefore, it is possible to flexibly cope with required accuracy, rigidity, resolution, and the like. In particular, the invention according to claim 2 has an effect that positioning can be performed with higher precision, and the invention according to claims 3 to 5 has an effect that movement of the table can be smooth.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of a first embodiment of the present invention.

FIG. 2 is a plan view for explaining the operation of the first embodiment.

FIG. 3 is a plan view for explaining the operation of the first embodiment.

FIG. 4 is a plan view showing a configuration example for increasing the resolution.

FIG. 5 is a plan view showing a configuration of a second exemplary embodiment of the present invention.

FIG. 6 is a plan view showing the configuration of a third embodiment of the present invention.

FIG. 7 is a perspective view showing a configuration of a fourth embodiment of the present invention.

FIG. 8 is a plan view showing a configuration of a fifth embodiment of the present invention.

[Explanation of symbols]

1 XY positioning table 2 Bed 2A, 2B, 2C groove 3 Table 3A, 3B, 3C, 3D, 3E Guide groove 4A, 4B, 4C, 4D Linear slide 7A, 7B, 7C, 7D Guide slide 12A, 12B, nut 13A , 13B Guide slide 14A, 14B Guide groove 22A, 22B, 22C, 22D Nut 23A, 23B, 23C, 23D Bearing 24A, 24B Rail 32, 33 Subtable 40A, 40B, 41A, 41B Guide rail 42A, 42B, 43A, 43B Guide rail

Claims (5)

(57) [Claims] 1. An XY positioning table for positioning a table arranged on a bed at an arbitrary position on a plane, wherein the same or parallel straight lines along the plane are arranged independently on the upper surface of the bed. A first and a second linear member capable of linear movement are provided, and a guide direction on the first linear member is a direction inclined with respect to the linear movement direction and is on the plane. A member forming a first driving side guide surface which is parallel is provided , and a guide direction is provided on the second linear motion member in a direction inclined with respect to the linear motion direction and parallel to the plane. Forming a second drive-side guide surface which is present and intersects the direction of guidance of the first drive-side guide surface
A first driven side guide surface aligned with the first drive side guide surface and a second passive side aligned with the second drive side guide surface on the lower surface side of the table. An XY positioning table characterized by forming a guide surface. 2. Two sets of the first and second linear members which can linearly move independently on the same straight line along the plane, and one set of the first and second linear members are provided. 2. The XY positioning table according to claim 1, wherein the direction of the linear motion and the direction of the first and second linear members of the other set are set on two straight lines parallel to each other. 3. The first linear member and a second linear member.
The first drive side guide is provided on a side surface of a member provided on the material.
The XY positioning table according to claim 1 or 2, wherein the surface and the second drive-side guide surface are formed . 4. An oil-filled space between the bed and the table
Is guided by a hydrostatic bearing using air
An XY positioning table according to any one of claims 1 to 3.
Le. 5. The first drive-side guide surface and the first receiving member.
Between the moving side guide surface, and between the second drive side guide surface and the second drive side guide surface.
Each between the second passive guide surface and a hydrostatic bearing or
Claims 1 to 5 wherein the guide is provided by a linear motion ball bearing.
Item 6. An XY positioning table according to any one of Items 4.