JP3213236U - Vacuum drying equipment - Google Patents

Abstract

Disclosed is a vacuum drying apparatus which can prevent electric leakage and can improve drying efficiency. A vacuum drying apparatus (100) includes a gas supply device (1), a vacuum drying chamber (4), a roots pump (2) connected to the gas supply device (1) via a first pipeline (10), and a second pipeline (20). The temperature control device 3 connected to the roots pump 2, the roughing pump 5 connected to the temperature control device 3 through the third pipeline 30, and the third pipeline 30 and the sixth pipe to the temperature control device 3. The vacuum drying chamber 4 is connected via the line 60 and connected via the third pipeline 30, the sixth pipeline 60, the roughing pump 5, and the seventh pipeline 70. The parts to be dried are dried in the vacuum drying chamber 4 by a helium gas of 40 ° C. or higher which is circulated by opening and closing valves provided in each pipeline. [Selection] Figure 1

Description

  The present invention relates to a technical field of a drying apparatus for drying a product, and specifically relates to a technical field of a vacuum drying apparatus.

  As the configuration of many conventional vacuum drying apparatuses, the following are known. Patent Document 1 discloses a vacuum drying apparatus in which a resistance heater is provided in a vacuum drying chamber, and the components are heated and dried in the vacuum drying chamber by heat generated by energizing the resistance heater.

  Patent Document 2 discloses a vacuum drying apparatus that irradiates a component with infrared rays using an infrared heater in order to increase the temperature in the vacuum drying chamber.

Japanese Patent Application Laid-Open No. 2006-144841 JP-A-8-94246

  In the vacuum drying apparatus described in Patent Document 1, it is necessary to lower the voltage applied to the resistance heater, and a large current is required to obtain predetermined power. In the process of drying the component, the moisture on the surface of the component evaporates in the vacuum drying chamber as the heating time elapses. When the water vapor comes into contact with the resistance heater, electric leakage is likely to occur and there is a risk.

  In the vacuum drying apparatus described in Patent Document 2, the temperature of the portion where the infrared ray hits efficiently increases, but the temperature of the portion where the infrared ray hardly hits does not increase efficiently. Therefore, there is unevenness in the drying efficiency of each part of the part, and the drying efficiency of the whole part is poor. Even if the heater is attached to the outer wall of the vacuum drying chamber and heated by the radiant heat of the wall surface, the material of the vacuum drying chamber is usually made of ordinary steel or stainless steel. The internal temperature rise efficiency is poor, and the drying efficiency of the parts is poor.

  In view of the above circumstances, an object of the present invention is to provide a vacuum drying apparatus that can prevent electric leakage and can improve drying efficiency.

In order to achieve the above object, a vacuum drying apparatus according to the present invention comprises:
A gas supply device;
A vacuum drying chamber having a reduced pressure, receiving a gas supplied from the gas supply device, and drying the inside by the compressed and heated gas; and
A roots pump connected to the gas supply device via a first pipeline;
A first valve provided in the first pipeline, and arranged in order in a direction toward the roots pump, a flow rate adjustment valve, and a first vacuum gauge;
A temperature control device connected to the roots pump via a second pipeline;
A roughing pump connected to the temperature controller via a third pipeline;
A second valve and a third valve provided in the third pipeline and arranged in order in a direction toward the roughing pump;
A fourth pipeline having one end connected between the first valve of the first pipeline and the flow rate adjustment valve, and the other end connected to the vacuum drying chamber;
A fourth valve provided in the fourth pipeline;
A fifth pipeline having one end connected in front of the fourth valve in the fourth pipeline and the other end connected between the second valve and the temperature control device in the third pipeline. When,
A fifth valve provided in the fifth pipeline;
A sixth pipeline having one end connected between the second valve and the third valve in the third pipeline, and the other end connected to the vacuum drying chamber;
A sixth valve provided in the sixth pipeline;
With
The vacuum drying chamber has a drying box in the chamber, an exhaust hole in the wall of the drying box,
The vacuum drying chamber is provided with a vacuum release valve,
The fourth pipeline communicates with the drying box inside the vacuum drying chamber;
An intermediate layer is further provided on the outer wall of the vacuum drying chamber,
The roughing pump is connected to the intermediate layer via a seventh pipeline,
It is characterized by that.

  The gas supplied into the gas supply device may be a helium gas at 40 ° C. or higher.

  A circulating water pipe and a thermometer may be provided inside the temperature control device.

  A second vacuum gauge may be provided in the second pipeline.

  The vacuum drying chamber may be formed of an aluminum alloy material.

  An infrared heater may be provided inside the vacuum drying chamber.

  According to the present invention, electric leakage can be made difficult to occur, and drying efficiency can be improved.

1 is a schematic structural diagram of a vacuum drying apparatus according to an embodiment of the present invention.

  In order to clarify the technical problems, technical solutions and advantages to be solved by the present invention, the following description will be made in detail with reference to the drawings and specific examples.

  As shown in FIG. 1, a vacuum drying apparatus 100 according to an embodiment of the present invention includes a gas supply device 1, a roots pump 2, a temperature control device 3, a roughing pump 5, a vacuum drying chamber 4, One pipeline 10, a second pipeline 20, a third pipeline 30, a fourth pipeline 40, a fifth pipeline 50, a sixth pipeline 60, and a seventh pipeline 70 are provided. .

  The gas supply device 1 is a device that is supplied with helium gas and supplies the helium gas to the vacuum drying chamber 4. Helium gas is used because a gas with high thermal conductivity is desirable.

  The roots pump 2 is connected to the gas supply device 1 via the first pipeline 10.

  The temperature control device 3 is connected to the roots pump 2 via the second pipeline 20. A circulating water pipe 33 and a thermometer 34 are provided in the temperature control device 3.

  The roughing pump 5 is connected to the temperature control device 3 via the third pipeline 30.

  The vacuum drying chamber 4 is connected to the temperature control device 3 via the third pipeline 30 and the sixth pipeline 60. The vacuum drying chamber 4 is connected to the temperature control device 3 via the third pipeline 30 and the seventh pipeline 70. A vacuum release valve 42 and a vacuum gauge 43 are connected to the vacuum drying chamber 4. The vacuum drying chamber 4 is made of an aluminum alloy material.

  An infrared heater 8 is provided inside the vacuum drying chamber 4. A drying box 7 is provided inside the vacuum drying chamber 4. A plurality of holes 701 are provided in the wall of the drying box 7. By providing the plurality of holes 701, high temperature gas is uniformly sprayed on the part to be dried. An intermediate layer 9 is provided on the outer wall of the vacuum drying chamber 4.

  In the first pipeline 10, a first valve 11, a flow rate adjustment valve 12, and a first vacuum gauge 13 are arranged in order from the gas supply device 1 toward the roots pump 2.

  A second vacuum gauge 21 is provided in the second pipeline 20.

  The third pipeline 30 is provided with a second valve 31 and a third valve 32 in order from the temperature control device 3 toward the roughing pump 5.

  One end of the fourth pipeline 40 is connected between the first valve 11 and the flow rate adjustment valve 12 in the first pipeline 10. The other end of the fourth pipeline 40 is connected to and communicates with the drying box 7 inside the vacuum drying chamber 4. A fourth valve 41 is provided in the fourth pipeline 40.

  One end of the fifth pipeline 50 is connected to the front of the fourth valve 41 in the fourth pipeline 40. The other end of the fifth pipeline 50 is connected between the second valve 31 and the temperature control device 3 in the third pipeline 30. The fifth pipeline 50 is provided with a fifth valve 51.

  One end of the sixth pipeline 60 is connected between the second valve 31 and the third valve 32 in the third pipeline 30. The other end of the sixth pipeline 60 is connected to the vacuum drying chamber 4. A sixth valve 61 is provided in the sixth pipeline 60.

  One end of the seventh pipeline 70 is connected to the roughing pump 5, and the other end of the seventh pipeline 70 is connected to the intermediate layer 9.

  The operation process of the vacuum drying apparatus 100 will be described below.

  (1-1) A product to be dried is placed in the drying box 7 of the vacuum drying chamber 4. Thereafter, the vacuum release valve 42 and the first valve 11 are closed, and the remaining valves (flow rate adjusting valve 12, second valve 31, third valve 32, fourth valve 41, fifth valve 51, sixth valve 61). Is opened. In this state, the roughing pump 5 is started and the vacuum drying chamber 4 and each pipeline are evacuated. That is, the vacuum drying chamber 4, the second pipeline 20, the third pipeline 30, the fourth pipeline 40, the fifth pipeline 50, the sixth pipeline 60, and the seventh pipeline 70 are evacuated. At this time, the vacuum drying chamber 4 is a decompressed chamber. The inside of the vacuum drying chamber 4 is set to a vacuum state. Moreover, a vacuum state shall mean the state of the space filled with the gas of the pressure lower than normal atmospheric pressure.

  (1-2) After the evacuation is completed, the second valve 31 and the fourth valve 41 are closed, and the first valve 11 is opened. As a result, the first pipeline is formed by the second pipeline 20, the third pipeline 30, the fifth pipeline 50, and the first pipeline 10.

  Then, the helium gas in the gas supply device 1 is sucked into the roots pump 2 in the first circulation line. While the pressure is measured by the first vacuum gauge 13 and the second vacuum gauge 21, the helium gas is simultaneously raised to a predetermined pressure P1 in the first circulation line.

  Subsequently, the first valve 11 is closed, and the circulating water pipe 33 in the temperature control device 3 is activated. At the same time, the flow rate adjustment valve 12 is adjusted, the temperature of the helium gas in the first circulation line is adjusted, and the thermometer 34 observes the result in real time.

  (2-1) After the temperature of the helium gas in the first circulation line is adjusted to a predetermined temperature, the fifth valve 51 is closed, and the second valve 31, the sixth valve 61, and the fourth valve 41 are opened. . A second circulation line is formed by the second pipeline 20, the third pipeline 30, the sixth pipeline 60, the vacuum drying chamber 4, and the fourth pipeline 40.

  Then, the vacuum drying chamber 4 is filled with helium gas, and the helium gas is compressed and heated by the Roots pump 2 to perform gas circulation. The helium gas is set to a high temperature of 40 ° C. or higher. The helium gas enters the vacuum drying chamber 4 from the sixth valve 61 on the sixth pipeline 60 and gradually fills the drying box 7 through a plurality of holes 701. Subsequently, the helium gas is discharged from the fourth pipeline 40 communicating with the drying box 7 and circulates in a specific direction, the drying efficiency is improved, and the generation of turbulent flow in the vacuum drying chamber 4 is prevented.

  (2-2) The installation of the infrared heater 8 can guarantee the gas temperature accuracy in the vacuum drying chamber 4 and improve the drying efficiency. The first vacuum gauge 13 detects that the pressure has increased to the predetermined pressure P2, and then detects that the third valve 32 has been opened and has decreased to the predetermined pressure P1. After the drying program is finished, the fourth valve 41 and the second valve 31 are closed, the sixth valve 61 is opened, the roughing pump 5 is activated, and the vacuum drying chamber 4 is evacuated. In this state, the helium gas is discharged from the intermediate layer 9 to the outside through the seventh pipeline 70, and the vacuum drying chamber 4 is kept warm and heated by the coarse heat of the helium gas. Realizes use, has energy-saving and environmentally friendly effects.

  (3-1) After the parts are dried for a predetermined time, the second valve 31 and the fourth valve 41 are closed, the third valve 32 is opened, the gas is discharged to the ultimate pressure, and the indoor water vapor pressure is reduced. .

  (3-2) Thereafter, the sixth valve 61 is closed, the vacuum release valve 42 is opened, and the vacuum gauge 43 reads the pressure value of the vacuum drying chamber 4, and when the vacuum drying chamber 4 is in the atmospheric pressure state. Subsequently, the parts are taken out.

  (4) The first valve 11 is opened, gas is sucked in until the first vacuum gauge 13 reaches a predetermined pressure, and then the first valve 11 is closed. The gas circulation path is formed by returning to the first pipeline 10 through the second pipeline 20, the third pipeline 30, and the fifth pipeline 50, thereby maintaining the gas temperature and leading to the next drying.

  According to the configuration of the present embodiment, the components are dried in the vacuum drying chamber 4 by helium gas having a high temperature and high thermal conductivity. Since a resistance heater is not used, a leakage phenomenon caused by water vapor generated during vacuum drying is suppressed, and safety is improved. Since helium gas is a gas, the parts are evenly wrapped at a constant pressure, and unevenness in drying is difficult to occur in each part of the parts, so that the drying efficiency is improved.

  Further, the high-temperature gas heated by the compression heat of the gas in the exhaust process of the roots pump 2 is circulated under reduced pressure using the roots pump 2. Therefore, the heat use efficiency is improved, and a gas heating mechanism is not required. As a result, the vacuum drying apparatus 100 of the present embodiment has high safety (does not adversely affect the environment), high reliability, and energy saving.

  Furthermore, since a plurality of holes 701 are provided in the drying box 7 inside the vacuum drying chamber 4, the high-temperature gas is uniformly blown onto the parts, so that the drying efficiency is improved and energy is saved.

  The vacuum drying chamber 4 is kept warm by the high-temperature exhaust gas of the roughing pump 5 and the exhaust gas heat is fully utilized, which has an energy-saving and environmentally friendly effect.

(Modification)
In this embodiment, helium gas is used, but the present invention is not limited to this gas. Any gas having higher thermal conductivity than air may be used in the vacuum drying apparatus 100 of the present embodiment.

  The above is a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention. Should also be regarded as the scope of protection of the present invention.

DESCRIPTION OF SYMBOLS 1 Gas supply apparatus 2 Roots pump 3 Temperature control apparatus 4 Vacuum drying chamber 5 Roughing pump 7 Drying box 8 Infrared heater 9 Middle layer 10 First pipeline 100 Vacuum drying apparatus 11 First valve 12 Flow control valve 13 First vacuum gauge 20 Second Pipeline 21 Second Vacuum Gauge 30 Third Pipeline 31 Second Valve 32 Third Valve 33 Circulating Water Pipe 34 Thermometer 40 Fourth Pipeline 41 Fourth Valve 42 Vacuum Release Valve 43 Vacuum Gauge 50 Fifth Pipeline 51 Fifth valve 60 Sixth pipeline 61 Sixth valve 70 Seventh pipeline 701 Hole P1 Pressure P2 Pressure

Claims (6)

A gas supply device;
A vacuum drying chamber having a reduced pressure, receiving a gas supplied from the gas supply device, and drying the inside by the compressed and heated gas; and
A roots pump connected to the gas supply device via a first pipeline;
A first valve provided in the first pipeline, and arranged in order in a direction toward the roots pump, a flow rate adjustment valve, and a first vacuum gauge;
A temperature control device connected to the roots pump via a second pipeline;
A roughing pump connected to the temperature controller via a third pipeline;
A second valve and a third valve provided in the third pipeline and arranged in order in a direction toward the roughing pump;
A fourth pipeline having one end connected between the first valve of the first pipeline and the flow rate adjustment valve, and the other end connected to the vacuum drying chamber;
A fourth valve provided in the fourth pipeline;
A fifth pipeline having one end connected in front of the fourth valve in the fourth pipeline and the other end connected between the second valve and the temperature control device in the third pipeline. When,
A fifth valve provided in the fifth pipeline;
A sixth pipeline having one end connected between the second valve and the third valve in the third pipeline, and the other end connected to the vacuum drying chamber;
A sixth valve provided in the sixth pipeline;
With
The vacuum drying chamber has a drying box in the chamber, an exhaust hole in the wall of the drying box,
The vacuum drying chamber is provided with a vacuum release valve,
The fourth pipeline communicates with the drying box inside the vacuum drying chamber;
An intermediate layer is further provided on the outer wall of the vacuum drying chamber,
The roughing pump is connected to the intermediate layer via a seventh pipeline,
A vacuum drying apparatus characterized by that. The gas supplied into the gas supply device is helium gas of 40 ° C. or higher.
The vacuum drying apparatus according to claim 1. A circulating water pipe and a thermometer are provided inside the temperature control device,
The vacuum drying apparatus according to claim 1 or 2. A second vacuum gauge is provided in the second pipeline;
The vacuum drying apparatus according to any one of claims 1 to 3. The vacuum drying chamber is formed of an aluminum alloy material;
The vacuum drying apparatus according to claim 1, wherein the apparatus is a vacuum drying apparatus. An infrared heater was provided inside the vacuum drying chamber,
The vacuum drying apparatus according to claim 1, wherein the apparatus is a vacuum drying apparatus.

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