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JP3200314B2 - Organic wastewater treatment equipment - Google Patents

Organic wastewater treatment equipment

Info

Publication number
JP3200314B2
JP3200314B2 JP31922094A JP31922094A JP3200314B2 JP 3200314 B2 JP3200314 B2 JP 3200314B2 JP 31922094 A JP31922094 A JP 31922094A JP 31922094 A JP31922094 A JP 31922094A JP 3200314 B2 JP3200314 B2 JP 3200314B2
Authority
JP
Japan
Prior art keywords
water
treated
treatment
biological treatment
wastewater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP31922094A
Other languages
Japanese (ja)
Other versions
JPH08150400A (en
Inventor
幸雄 佐藤
理一 池上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corp filed Critical Organo Corp
Priority to JP31922094A priority Critical patent/JP3200314B2/en
Publication of JPH08150400A publication Critical patent/JPH08150400A/en
Application granted granted Critical
Publication of JP3200314B2 publication Critical patent/JP3200314B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00Technologies for wastewater treatment
    • Y02W10/10Biological treatment of water, waste water, or sewage

Landscapes

  • Biological Treatment Of Waste Water (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Water Treatment By Sorption (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、有機物を含有する酸性
排水を生物処理及び脱イオン処理によって純水製造若し
くは排水処理を行なう有機物含有酸性排水処理装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic matter-containing acidic wastewater treatment apparatus for producing pure water or treating wastewater containing organic matter by biological treatment and deionization treatment.

【0002】[0002]

【従来の技術】半導体や液晶等の電子デバイスの製造工
程において、洗浄用水として超純水が使用されている
が、貴重な水資源の保護及び環境保全並びに製造コスト
低減を目的としてイオン量の比較的少ない洗浄排水は、
これを回収し、再利用することが行なわれている。
2. Description of the Related Art Ultrapure water is used as cleaning water in the manufacturing process of electronic devices such as semiconductors and liquid crystals, and the amount of ions is compared for the purpose of protecting valuable water resources, preserving the environment, and reducing manufacturing costs. Very little washing wastewater
This is collected and reused.

【0003】一般に、超純水製造システムは、原水を逆
浸透膜装置、イオン交換装置、紫外線殺菌装置、真空脱
気装置等により処理を行なう一次系システムと、該シス
テムにより得られた一次純水を紫外線酸化装置、イオン
交換装置、限外ろ過装置等により処理を行なって超純水
を製造する二次系システムと、超純水を半導体ウエハ等
の洗浄に用いて生じた洗浄排水を回収し、超純水として
再利用するための回収系システムからなる。
Generally, an ultrapure water production system includes a primary system for treating raw water by a reverse osmosis membrane device, an ion exchange device, an ultraviolet sterilizer, a vacuum deaerator, and the like, and a primary pure water obtained by the system. A secondary system for producing ultrapure water by treating the ultrapure water with an ultraviolet oxidation device, an ion exchange device, an ultrafiltration device, etc., and collecting cleaning wastewater generated by using ultrapure water for cleaning semiconductor wafers and the like. And a recovery system for reuse as ultrapure water.

【0004】上記洗浄排水には、製造工程で使用された
アルコール、界面活性剤等の有機物及びフッ酸、硫酸、
リン酸、酢酸等の酸が含まれているため、回収系システ
ムにおいては有機物除去処理及び脱イオン処理が必要で
あり、そのため、従来からこの回収系システムにおいて
は、有機物除去処理を行なうための生物処理装置と脱イ
オン処理を行なうためのイオン交換装置が設けられてい
る。
[0004] The washing wastewater contains organic substances such as alcohol and surfactant used in the production process, hydrofluoric acid, sulfuric acid, and the like.
Since an acid such as phosphoric acid or acetic acid is contained, an organic matter removal treatment and a deionization treatment are required in the recovery system, and therefore, in the conventional recovery system, a biological material for performing the organic matter removal treatment is conventionally used. A processing apparatus and an ion exchange apparatus for performing deionization processing are provided.

【0005】ここで、図3に基づき、従来の回収系シス
テムにおいて用いられている装置を説明すると、1はp
H調整槽、2は生物処理装置、3は膜分離装置、4はイ
オン交換装置である。この装置において、半導体ウエハ
等の洗浄に用いた超純水の回収水即ち洗浄排水をpH調
整槽1により中和を行なう。洗浄排水(以下、被処理水
という)には上記した如くフッ酸等の酸が含まれてお
り、pH域は酸性を示すため、この状態で生物処理装置
に流入させると微生物の増殖が阻害され、その働きが失
われる。そのためカセイソーダ等のアルカリ溶液を添加
して被処理水の中和を行ない、該被処理水のpHを通常
5〜9の範囲に調整する。
Here, an apparatus used in a conventional recovery system will be described with reference to FIG.
H adjusting tank, 2 is a biological treatment device, 3 is a membrane separation device, and 4 is an ion exchange device. In this apparatus, collected water of ultrapure water used for cleaning a semiconductor wafer or the like, that is, cleaning wastewater is neutralized by a pH adjusting tank 1. Washing wastewater (hereinafter referred to as “treatment water”) contains an acid such as hydrofluoric acid as described above, and since the pH range is acidic, if it flows into a biological treatment apparatus in this state, the growth of microorganisms is inhibited. , Its work is lost. For this purpose, the water to be treated is neutralized by adding an alkaline solution such as caustic soda, and the pH of the water to be treated is usually adjusted to the range of 5 to 9.

【0006】中和後の被処理水は生物処理装置2に送ら
れ、ここで微生物により有機物の分解が行なわれる。
[0006] The water to be treated after neutralization is sent to the biological treatment apparatus 2, where microorganisms decompose organic matter.

【0007】生物処理終了後の被処理水は次いで膜分離
装置3に送られ、該被処理水中に混入している微生物を
分離除去する。更に膜分離装置3の膜透過水はイオン交
換装置4に送られ、ここで脱イオン処理を行なって最終
処理水が得られる。
After the biological treatment, the water to be treated is then sent to the membrane separation device 3 to separate and remove microorganisms mixed in the water to be treated. Further, the permeated water of the membrane separation device 3 is sent to the ion exchange device 4, where the deionized treatment is performed to obtain the final treated water.

【0008】得られた最終処理水は一次系システムに循
環供給し、超純水を製造するために再利用される。
[0008] The obtained final treated water is circulated to the primary system and reused for producing ultrapure water.

【0009】[0009]

【発明が解決しようとする課題】上記した従来の装置に
おいては、pH調整槽を設け、回収水にアルカリ溶液を
添加して中和を行なうものであるが、このアルカリ溶液
の添加によって被処理水(回収水)中のカチオンの量が
増加するという問題がある(例えば、アルカリ溶液とし
てカセイソーダ溶液を使用すればNaイオン量が増加す
る)。
In the above-mentioned conventional apparatus, a pH adjusting tank is provided and neutralization is performed by adding an alkaline solution to the recovered water. There is a problem that the amount of cations in (recovered water) increases (for example, if a sodium hydroxide solution is used as an alkaline solution, the amount of Na ions increases).

【0010】被処理水中のカチオンの量が増加すれば、
生物処理の後段において行なわれる脱イオン処理に当た
って、イオン交換樹脂に対するイオン負荷が増大するこ
ととなり、これに対処するためにはイオン交換樹脂量を
増加するか、或いはイオン交換処理時間を短縮して再生
サイクルを早めることが必要となる。
If the amount of cations in the water to be treated increases,
In the deionization treatment performed in the latter stage of the biological treatment, the ion load on the ion exchange resin increases, and in order to cope with this, the amount of the ion exchange resin is increased or the ion exchange treatment time is shortened for regeneration. It is necessary to accelerate the cycle.

【0011】しかしながら、イオン交換樹脂量を増加す
れば必然的にイオン交換装置の大型化を招き、それに伴
い再生時に用いる薬品の量及び再生廃液量も増大し、設
備コスト及びランニングコストが上昇するという不具合
がある。また、イオン交換処理時間を短縮して再生サイ
クルを早めれば、同様にランニングコストの上昇という
問題を生じる。尚、脱イオン処理に当たって逆浸透膜装
置が用いられる場合があるが、この場合にあっては、イ
オン負荷増大に伴い、処理水の水質の低下、濃縮廃液の
増加等の不具合を生じるものである。
However, an increase in the amount of ion-exchange resin inevitably leads to an increase in the size of the ion-exchange apparatus, which leads to an increase in the amount of chemicals used for regeneration and the amount of waste liquid for regeneration, which leads to an increase in equipment costs and running costs. There is a defect. In addition, if the ion exchange processing time is shortened and the regeneration cycle is advanced, the problem of a rise in running cost also arises. In addition, a reverse osmosis membrane device may be used in the deionization treatment, but in this case, with an increase in the ion load, problems such as a decrease in the quality of the treated water and an increase in the concentration of the waste liquid are caused. .

【0012】本発明者等は上記従来の欠点を解消するた
め鋭意検討した結果、生物処理装置の前段に弱塩基性ア
ニオン交換樹脂を充填したアニオン交換装置を設けて、
被処理水を該アニオン交換装置によりイオン交換処理す
れば、意外にも、被処理水のpHを生物処理に適用可能
なpH範囲に調整できるという知見を得た。これはまさ
に、イオン交換処理による中和処理を実現するものであ
り、本発明はこのような知見に基づき完成されたもので
ある。
The present inventors have conducted intensive studies to solve the above-mentioned conventional drawbacks. As a result, an anion exchange device filled with a weakly basic anion exchange resin was provided at the front stage of the biological treatment device.
It has been surprisingly found that if the water to be treated is subjected to ion exchange treatment by the anion exchange device, the pH of the water to be treated can be adjusted to a pH range applicable to biological treatment. This is exactly what realizes the neutralization treatment by the ion exchange treatment, and the present invention has been completed based on such knowledge.

【0013】而して、本発明はイオン負荷を増すことな
く生物処理を行なって被処理水中の有機物を分解し、更
に脱イオン処理を行なうことにより水質良好な処理水を
得ることのできる有機物含有酸性排水処理装置を提供す
ることを目的とする。
[0013] Thus, the present invention provides a biological treatment without increasing the ion load to decompose organic substances in the water to be treated, and further perform deionization treatment to obtain an organic substance containing water with good quality. An object of the present invention is to provide an acidic wastewater treatment device.

【0014】[0014]

【課題を解決するための手段】本発明は、(1)有機物
を含有する酸性排水を処理する装置であって、被処理水
中の酸成分におけるアニオンを除去して被処理水のpH
を生物処理に適用可能なpH範囲に調整するための弱塩
基性アニオン交換樹脂を充填したアニオン交換装置と、
被処理水中の有機物の分解処理を行なうための生物処理
装置と、生物処理後の被処理水に混入している微生物を
除去するための固液分離装置と、前記微生物除去処理後
の被処理水を脱イオン処理するための脱イオン処理装置
とからなることを特徴とする有機物含有酸性排水処理装
置、(2)生物処理装置が、微生物付着担体上に好気性
生物膜を形成したものを用いる好気性生物膜処理装置で
ある上記(1)記載の有機物含有酸性排水処理装置、
(3)固液分離装置が分離膜を備えた膜分離装置である
上記(1)又は(2)記載の有機物含有酸性排水処理装
置、(4)有機物を含有する酸性排水が、半導体や液晶
等の電子デバイスを超純水で洗浄する際に発生する希薄
洗浄排水である上記(1)記載の有機物含有酸性排水処
理装置を要旨とする。
SUMMARY OF THE INVENTION The present invention provides (1) an apparatus for treating acidic wastewater containing organic substances, which removes anions in acid components in the water to be treated and adjusts the pH of the water to be treated.
An anion exchange device filled with a weakly basic anion exchange resin to adjust the pH range applicable to biological treatment,
A biological treatment device for performing a decomposition treatment of organic substances in the water to be treated, a solid-liquid separation device for removing microorganisms mixed in the treatment water after the biological treatment, and a treatment water after the microorganism removal treatment A deionization treatment device for deionizing water, and (2) a biological treatment device using an aerobic biofilm formed on a microorganism-adhered carrier. The organic matter-containing acidic wastewater treatment device according to the above (1), which is a gaseous biofilm treatment device,
(3) The organic matter-containing acidic wastewater treatment device according to the above (1) or (2), wherein the solid-liquid separation device is a membrane separation device provided with a separation membrane; The gist is the organic wastewater treatment apparatus according to the above (1), which is a dilute washing wastewater generated when the electronic device is washed with ultrapure water.

【0015】本発明は弱塩基性アニオン交換樹脂を充填
したアニオン交換装置と生物処理装置と脱イオン処理装
置を有し、これらの装置により有機物分解処理及び脱イ
オン処理を行なうものであるが、生物処理後の被処理水
には通常、微生物が混入しているので、該微生物を除去
するため生物処理装置の後段に固液分離装置を設ける。
The present invention has an anion exchange device filled with a weakly basic anion exchange resin, a biological treatment device, and a deionization treatment device. These devices perform organic matter decomposition treatment and deionization treatment. Since microorganisms are usually mixed in the water to be treated after the treatment, a solid-liquid separation device is provided downstream of the biological treatment device to remove the microorganisms.

【0016】生物処理後の被処理水中における微生物の
混入量を極力少なくし、微生物の過剰流出による後段装
置への負荷増大を避けるために、本発明における生物処
理装置としては、微生物付着担体上に好気性生物膜を形
成したものを用いる好気性生物膜処理装置が好ましい。
In order to minimize the amount of microorganisms mixed in the water to be treated after the biological treatment and to avoid an increase in the load on the downstream equipment due to excessive outflow of the microorganisms, the biological treatment device of the present invention is provided on a microorganism-attached carrier. An aerobic biofilm treatment apparatus using an aerobic biofilm is preferably used.

【0017】[0017]

【実施例】以下、本発明の実施例を図面に基づき説明す
る。図1に示す如く本発明装置は、弱塩基性アニオン交
換樹脂を充填したアニオン交換装置10を有し、該装置
10に連結配管11を介して生物処理装置12が連結さ
れている。13はアニオン交換装置10に連結された被
処理水供給管である。
Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the apparatus of the present invention has an anion exchange apparatus 10 filled with a weakly basic anion exchange resin, and a biological treatment apparatus 12 is connected to the apparatus 10 via a connection pipe 11. Reference numeral 13 denotes a treated water supply pipe connected to the anion exchange device 10.

【0018】アニオン交換装置10は弱塩基性アニオン
交換樹脂を用いるものであり、該弱塩基性アニオン交換
樹脂は塩化ナトリウム等の中性塩を分解してそのアニオ
ンを吸着する能力や、シリカ、重炭酸等の弱アニオンを
吸着する能力はないが、F-、SO4 2- 、Cl- 等の化
学的に酸性状態にあるアニオンを効率よく吸着し、しか
も再生にあたってはイオン交換容量とほぼ同一当量のカ
セイソーダ等のアルカリによって効率よく再生されると
いう特性を有する。
The anion exchange device 10 uses a weakly basic anion exchange resin. The weakly basic anion exchange resin is capable of decomposing a neutral salt such as sodium chloride to adsorb its anion, silica, heavy water, etc. without the ability to adsorb weakly anion such as carbonate, F -, sO 4 2-, Cl - chemically anions efficiently adsorbed in the acidic conditions such as, moreover substantially identical equivalent ion exchange capacity when reproduction It has the property of being efficiently regenerated by alkali such as sodium hydroxide.

【0019】本発明において、アニオン交換装置10に
充填するイオン交換樹脂を弱塩基性アニオン交換樹脂と
したのは、強塩基性アニオン交換樹脂では被処理水中の
中性塩のアニオンまでも吸着するため、例えば中性塩が
塩化ナトリウムである場合、イオン交換によりカセイソ
ーダが生じ、被処理水が強いアルカリ性(通常、pH9
以上)を呈することとなり、後段の生物処理に適用し得
なくなるからである。
In the present invention, the ion exchange resin to be charged into the anion exchange apparatus 10 is a weakly basic anion exchange resin because a strongly basic anion exchange resin adsorbs even anions of neutral salts in the water to be treated. For example, when the neutral salt is sodium chloride, ion exchange generates caustic soda, and the water to be treated is strongly alkaline (usually pH 9).
This is because the above cannot be applied to the biological treatment in the subsequent stage.

【0020】生物処理装置12は微生物の働きによって
被処理水中の有機物を分解する処理を行なわせるもの
で、該装置としては、微生物を微生物付着担体に着生さ
せたものを装置内で流動させる流動床式、又は該着生し
たものを装置内に固定させる固定床式のものと、該担体
に着生させないで微生物を装置内に浮遊状態にしておく
浮遊式のものが挙げられるが、微生物の過剰流出による
後段装置への負荷増大を避けるために流動床式、固定床
式のもの即ち微生物付着担体上に好気性生物膜を形成し
たものを用いる好気性生物膜処理装置が好ましい。
The biological treatment device 12 performs a process of decomposing organic substances in the water to be treated by the action of microorganisms. The biological treatment device 12 is a fluid treatment device in which microorganisms are deposited on a microorganism-adhering carrier and flow in the device. A bed type or a fixed bed type in which the set is fixed in the device, and a floating type in which the microorganisms are suspended in the device without being set on the carrier, are exemplified. An aerobic biofilm treatment apparatus using a fluidized-bed type or fixed-bed type, that is, a type in which an aerobic biofilm is formed on a microorganism-adhered carrier, is preferred to avoid an increase in load on a downstream device due to excessive outflow.

【0021】このような生物膜処理装置において用いら
れる微生物付着担体としては、繊維状活性炭、粒状活性
炭、球状活性炭等が挙げられるが、なかでも繊維状活性
炭、特に繊維状活性炭のフェルト布状成形体が好まし
い。図中、14は生物処理に必要な酸素を供給するため
の空気導入管である。
Examples of the microorganism-attached carrier used in such a biofilm treatment apparatus include fibrous activated carbon, granular activated carbon, and spherical activated carbon. Among them, fibrous activated carbon, especially a felt cloth-like molded article of fibrous activated carbon Is preferred. In the figure, reference numeral 14 denotes an air introduction pipe for supplying oxygen necessary for biological treatment.

【0022】生物処理装置12には連結配管15を介し
て固液分離装置16が連結される。固液分離装置16は
生物処理後の被処理水に混入した微生物を分離除去する
ためのもので、該装置としては、精密ろ過膜(MF)、
限外ろ過膜(UF)、逆浸透膜(RO)等の分離膜を用
いた膜分離装置や凝集沈澱ろ過装置等が挙げられる。生
物処理装置12として好気性生物膜処理装置を用いる場
合、固液分離装置16としては通常、膜分離装置が用い
られる。
A solid-liquid separation device 16 is connected to the biological treatment device 12 via a connection pipe 15. The solid-liquid separation device 16 is for separating and removing microorganisms mixed in the water to be treated after biological treatment, and includes a microfiltration membrane (MF),
Examples include a membrane separation device using a separation membrane such as an ultrafiltration membrane (UF) and a reverse osmosis membrane (RO), and a coagulation-sedimentation filtration device. When an aerobic biofilm treatment device is used as the biological treatment device 12, a membrane separation device is generally used as the solid-liquid separation device 16.

【0023】更に、固液分離装置16の後段には連結配
管17を介して脱イオン処理装置18が連結されてい
る。脱イオン処理装置18は生物処理後の被処理水中の
不純物イオンを除去するためのもので、該装置18とし
てはイオン交換装置、逆浸透膜装置等が挙げられる。イ
オン交換装置としては、カチオン交換樹脂及びアニオン
交換樹脂を同一の塔内に、或いは別々の塔内に充填した
通常、脱イオン処理の目的のために用いられるものと同
様のものが使用される。尚、脱イオン処理装置18とし
ては、イオン交換装置、逆浸透膜装置のいずれか一方を
用いる場合に限られず、両装置を併用するものであって
もよい。
Further, a deionization treatment device 18 is connected to the subsequent stage of the solid-liquid separation device 16 via a connection pipe 17. The deionization apparatus 18 is for removing impurity ions in the water to be treated after biological treatment, and examples of the apparatus 18 include an ion exchange apparatus and a reverse osmosis membrane apparatus. As the ion exchange device, the same ion exchange device as that usually used for the purpose of deionization treatment in which the cation exchange resin and the anion exchange resin are packed in the same column or in separate columns is used. The deionizing device 18 is not limited to the case where one of an ion exchange device and a reverse osmosis membrane device is used, and may be a device that uses both devices in combination.

【0024】脱イオン処理装置18には、脱イオン処理
後の処理水を排出するための処理水排出管19が連結さ
れている。
A treated water discharge pipe 19 for discharging treated water after the deionization treatment is connected to the deionization treatment device 18.

【0025】本発明は、超純水を洗浄用水等として使用
した後の回収水を再利用するための回収系システムにお
いて用いられる排水処理装置、即ち超純水製造装置にお
ける回収系システムに適用される排水処理装置として特
に有益である。しかし本発明はそのような用途に限定さ
れるものではなく、一般的な排水の高度処理等の如く、
比較的有機物濃度の低い排水の処理装置としても適用可
能である。
The present invention is applied to a wastewater treatment apparatus used in a recovery system for reusing recovered water after using ultrapure water as washing water or the like, that is, a recovery system in an ultrapure water production apparatus. It is particularly useful as a wastewater treatment device. However, the present invention is not limited to such applications, such as general advanced wastewater treatment,
The present invention is also applicable as a wastewater treatment device having a relatively low organic matter concentration.

【0026】以下、本発明を超純水製造装置における回
収系システムに適用される排水処理装置として用いた場
合を例にとり、図2に基づき本発明の作用を説明する。
The operation of the present invention will be described below with reference to FIG. 2 by taking, as an example, the case where the present invention is used as a wastewater treatment apparatus applied to a recovery system in an ultrapure water production apparatus.

【0027】半導体製造工場等のユースポイント20に
おいて超純水で半導体ウエハ等の電子デバイスを洗浄す
る際に発生するイオン量の比較的少ない洗浄排水(以
下、被処理水という)が被処理水供給管13を通して本
発明排水処理装置21におけるアニオン交換装置10に
供給される。この被処理水には、アルコール、界面活性
剤等の有機物及びフッ酸、硫酸、リン酸、酢酸等の酸が
含まれ、そのpHは通常1〜4である。
Cleaning wastewater (hereinafter referred to as “treatment water”) having a relatively small amount of ions generated when cleaning an electronic device such as a semiconductor wafer with ultrapure water at a use point 20 such as a semiconductor manufacturing plant is supplied to the treatment water. It is supplied to the anion exchange device 10 in the wastewater treatment device 21 of the present invention through the pipe 13. The water to be treated contains organic substances such as alcohols and surfactants, and acids such as hydrofluoric acid, sulfuric acid, phosphoric acid, and acetic acid.

【0028】アニオン交換装置10においてイオン交換
処理されることにより、被処理水中のF- 、SO4 2-
PO4 3- 、CH3 COO- 等の酸成分におけるアニオン
が除去され、それにより被処理水のpHは、生物処理に
適用可能なpH範囲(通常、pH6〜9)に調整され
る。
[0028] By being an ion exchange treatment in an anion exchange device 10, in the for-treatment water F -, SO 4 2-,
Anions in acid components such as PO 4 3− and CH 3 COO 2 are removed, whereby the pH of the water to be treated is adjusted to a pH range applicable to biological treatment (usually pH 6 to 9).

【0029】次いで、被処理水は生物処理装置12に送
られる。該装置12において、空気導入管14から被処
理水中に空気が吹き込まれた状態で、装置内の微生物の
働きによって生物処理が行なわれ、これにより被処理水
中の有機物が分解される。
Next, the water to be treated is sent to the biological treatment device 12. In the device 12, biological treatment is performed by the action of microorganisms in the device in a state where air is blown into the water to be treated from the air introduction pipe 14, whereby organic matter in the water to be treated is decomposed.

【0030】生物処理後の被処理水は固液分離装置16
に供給され、被処理水中に混入した微生物の分離除去が
行なわれる。
The water to be treated after the biological treatment is applied to a solid-liquid separator 16.
And the microorganisms mixed into the water to be treated are separated and removed.

【0031】微生物の分離除去がなされた被処理水は次
いで脱イオン処理装置18に供給され、ここで被処理水
中の不純物イオン、即ち塩化ナトリウム等の中性塩やシ
リカ、重炭酸等の弱酸成分、その他の不純物イオンが除
去され、純水に近い水質の処理水が得られる。
The treated water from which the microorganisms have been separated and removed is then supplied to a deionizer 18 where impurity ions in the treated water, such as neutral salts such as sodium chloride and weak acid components such as silica and bicarbonate, are added. , And other impurity ions are removed, and treated water having a quality similar to pure water is obtained.

【0032】かくして得られた処理水は、処理水排出管
19を通して超純水製造装置の一次系システムにおけ
る、逆浸透膜装置、イオン交換装置等からなる処理装置
22に循環され、例えば該処理装置22における逆浸透
膜装置に供給される。ここで一次系システムにおける各
種処理がなされた後、処理水は二次系システムにおけ
る、紫外線酸化装置、イオン交換装置等からなる処理装
置23に送られ、ここで各種処理が行なわれ、超純水が
製造される。
The treated water thus obtained is circulated through a treated water discharge pipe 19 to a treatment device 22 comprising a reverse osmosis membrane device, an ion exchange device and the like in the primary system of the ultrapure water production device. It is fed to the reverse osmosis membrane device at 22. Here, after various treatments in the primary system are performed, the treated water is sent to the treatment device 23 in the secondary system, which includes an ultraviolet oxidizer, an ion exchanger, etc., where the various treatments are performed, and Is manufactured.

【0033】図2に示した如く、一次系システムに逆浸
透膜装置、イオン交換装置等からなる処理装置22が設
置されている場合は、脱イオン処理装置18を省略し、
一次系システム内の逆浸透膜装置やイオン交換装置を脱
イオン処理装置18として共用することも可能である。
As shown in FIG. 2, when the processing system 22 including a reverse osmosis membrane device and an ion exchange device is installed in the primary system, the deionization processing device 18 is omitted,
The reverse osmosis membrane device and the ion exchange device in the primary system can be shared as the deionization treatment device 18.

【0034】アニオン交換装置10における弱塩基性ア
ニオン交換樹脂がイオンで飽和されると被処理水のpH
は急激に下がり始めるので、それ以前の段階で再生を行
なう必要がある。ここにおいて、アルカリ剤を用いて再
生処理を行なうに当たり、特公平5−41300号公報
に示される方法を採用して、アルカリ剤が装置上部まで
行き渡り、装置内を充分に満たすようにアルカリ剤を供
給することが好ましい。このにようにすることにより、
通常、バクテリアが繁殖し易い部分、例えば流入水のデ
ィストリビューターにアルカリ剤を接触させることがで
き、その結果、装置内でのバクテリアの繁殖を防ぐこと
ができ、従来みられたバクテリアの繁殖による流量低下
や差圧上昇という弊害を未然に防止できる効果がある。
When the weakly basic anion exchange resin in the anion exchange device 10 is saturated with ions, the pH of the water to be treated is changed.
Starts to fall sharply, so it is necessary to regenerate at an earlier stage. Here, in performing the regeneration treatment using the alkaline agent, the method disclosed in Japanese Patent Publication No. 5-41300 is adopted, and the alkaline agent is supplied to the upper part of the apparatus and supplied so as to sufficiently fill the inside of the apparatus. Is preferred. By doing this,
Usually, an alkaline agent can be brought into contact with a portion where bacteria can easily propagate, for example, a distributor of influent water, so that the growth of bacteria in the device can be prevented, and the flow rate due to the conventional bacterial growth can be prevented. This has the effect of preventing the adverse effects of lowering and increasing the differential pressure.

【0035】次に、本発明装置を用いて排水処理を行な
った場合の具体的実施例を示す。 実施例 図1に示す本発明装置を用いて半導体製造工程における
洗浄排水を処理した。洗浄排水の水質は以下の通りであ
る。 pH: 2.5 TOC: 3.5mg C/L 全カチオン: 10mg CaCO3 /L 全アニオン: 110mg CaCO3 /L アニオン交換装置10に弱塩基性アニオン交換樹脂アン
バーライトIRA−68(ロームアンドハース社製)を
30L充填し、まず5w/v%のカセイソーダ溶液を用
いて再生処理を行ない、押出水によって残留するカセイ
ソーダ溶液を押出し且つ洗浄水(純水)によって洗浄し
た後、上記洗浄排水(以下、被処理水という)を1m3
/hrの流速で通水した。
Next, a specific example in which drainage treatment is performed using the apparatus of the present invention will be described. Example Cleaning wastewater in a semiconductor manufacturing process was treated using the apparatus of the present invention shown in FIG. The water quality of the washing wastewater is as follows. pH: 2.5 TOC: 3.5 mg C / L Total cations: 10 mg CaCO 3 / L Total anions: 110 mg CaCO 3 / L Weakly basic anion exchange resin Amberlite IRA-68 (Rohm and Haas Co.) Was refilled with 5% w / v caustic soda solution, and the remaining caustic soda solution was extruded with extruded water and washed with washing water (pure water). 1m 3
/ Hr flow rate.

【0036】このアニオン交換装置10にて被処理水の
pHを6〜9の範囲に調整した。次いで被処理水を生物
処理装置12に供給した。生物処理装置としては、繊維
状活性炭のフェルト布状成形体に微生物を着生したもの
を装置内に充填してなる好気性生物膜処理装置を用い
た。装置下部の空気導入管14より空気を吹き込み、生
物処理を行なった。曝気空気LVは10m/hr、通水
SVは2であった。
The pH of the water to be treated was adjusted in the range of 6 to 9 in the anion exchange device 10. Next, the water to be treated was supplied to the biological treatment device 12. As the biological treatment device, an aerobic biofilm treatment device was used in which a material obtained by growing microorganisms on a felt-like molded article of fibrous activated carbon was filled in the device. Air was blown from the air introduction pipe 14 at the lower part of the apparatus to perform biological treatment. The aeration air LV was 10 m / hr, and the water flow SV was 2.

【0037】生物処理後の被処理水を固液分離装置16
に供給し、微生物を分離除去して処理水を得た。固液分
離装置16として、日本メムテック株式会社製精密ろ過
膜装置を使用した。得られた処理水の水質を表1に示
す。
The water to be treated after biological treatment is separated into a solid-liquid separator 16.
And the microorganisms were separated and removed to obtain treated water. As the solid-liquid separator 16, a microfiltration membrane device manufactured by Nippon Memtech Co., Ltd. was used. Table 1 shows the quality of the obtained treated water.

【0038】比較例 図3に示す従来装置を用いて上記実施例と同様の洗浄排
水を用い、処理を行なった。まず洗浄排水(被処理水)
をpH調整槽1に1m3 /hrの流速で通水した。pH
調整槽1としては、攪拌器及びpH計を備えた容量0.
5m3 のポリエチレン製タンクからなるものを用い、該
槽内において被処理水に0.5w/v%カセイソーダ溶
液を中和用のアルカリ剤として添加し、被処理水のpH
が6〜9になるように調整した。pH調整後、実施例と
同様の条件にて処理を行ない固液分離処理後の処理水を
得た。得られた処理水の水質を表1に示す。
Comparative Example Using the conventional apparatus shown in FIG. 3, treatment was performed using the same washing wastewater as in the above-mentioned embodiment. First of all, washing wastewater
Was passed through the pH adjusting tank 1 at a flow rate of 1 m 3 / hr. pH
The adjusting tank 1 has a capacity of 0,0 including a stirrer and a pH meter.
Using a 5 m 3 polyethylene tank, a 0.5% w / v caustic soda solution was added to the water to be treated in the tank as an alkali agent for neutralization, and the pH of the water to be treated was adjusted.
Was adjusted to 6 to 9. After the pH was adjusted, the treatment was performed under the same conditions as in the example to obtain treated water after the solid-liquid separation treatment. Table 1 shows the quality of the obtained treated water.

【0039】[0039]

【表1】 [Table 1]

【0040】上記結果から明らかなように、本発明装置
を用いた場合には、被処理水中のカチオンの量が増加し
ないが、従来装置を用いた場合にはカチオンの量が著し
く増加することが判る。また本発明装置を用いた場合に
は、被処理水中の酸成分におけるアニオンが除去される
ため、アニオンの量が減少している。このように、本発
明によれば、カチオンの量を増やさずに被処理水を中和
できるばかりか、中和の際、同時にアニオンの量を減少
できるという利点があることが判る。
As is clear from the above results, the amount of cations in the water to be treated does not increase when the apparatus of the present invention is used, but the amount of cations increases significantly when the conventional apparatus is used. I understand. Further, when the apparatus of the present invention is used, the amount of anions is reduced because the anions in the acid components in the water to be treated are removed. Thus, according to the present invention, it is found that not only the water to be treated can be neutralized without increasing the amount of cations, but also that the amount of anions can be reduced at the same time as the neutralization.

【0041】[0041]

【発明の効果】以上説明したように、本発明は生物処理
装置の前段に弱塩基製アニオン交換樹脂を充填したアニ
オン交換装置を設けたので、被処理水を該アニオン交換
装置にて処理することにより、被処理水中の酸成分にお
けるアニオンを除去して被処理水のpHを生物処理に適
用可能なpH範囲に調整することができる。
As described above, according to the present invention, an anion exchange apparatus filled with an anion exchange resin made of a weak base is provided at the preceding stage of the biological treatment apparatus, so that water to be treated is treated by the anion exchange apparatus. Thus, the pH of the water to be treated can be adjusted to a pH range applicable to biological treatment by removing anions in the acid component in the water to be treated.

【0042】本発明によれば脱イオンによってpHを調
整するものであるから、従来装置のようにアルカリ剤の
添加によってpHを調整するものとは異なり、被処理水
におけるカチオンの量を増加するという不具合はなく、
従って生物処理の後段において行なわれる脱イオン処理
に当たって、イオン交換樹脂等に対するイオン負荷を増
大するということがない。
According to the present invention, since the pH is adjusted by deionization, unlike the conventional apparatus in which the pH is adjusted by adding an alkaline agent, the amount of cations in the water to be treated is increased. No defects,
Therefore, in the deionization treatment performed in the latter stage of the biological treatment, the ion load on the ion exchange resin or the like does not increase.

【0043】しかも本発明によれば、被処理水のpH調
整に当たって、該pH調整と同時にアニオンの量を減少
することができ、後段の脱イオン処理におけるイオン負
荷を減少させることができ、その結果、装置規模の大型
化、再生薬品使用量の増大等従来装置にみられた欠点を
解消でき、経済的にも極めて有利となる効果がある。
Further, according to the present invention, when adjusting the pH of the water to be treated, the amount of anions can be reduced simultaneously with the pH adjustment, and the ion load in the subsequent deionization can be reduced. In addition, the disadvantages of the conventional apparatus, such as an increase in the scale of the apparatus and an increase in the amount of regenerated chemicals, can be eliminated, and this has the effect of being extremely economically advantageous.

【0044】而して、本発明によれば、イオン負荷を増
すことなく生物処理を行なって被処理水中の有機物を分
解し更に脱イオン処理を行なうことにより水質良好な処
理水を得ることのできる有機物含有酸性排水処理装置を
提供できる効果がある。
According to the present invention, treated water having good water quality can be obtained by performing biological treatment without increasing the ion load, decomposing organic substances in the water to be treated, and performing deionization treatment. There is an effect that an organic wastewater treatment device can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明装置の概略を示すブロック図である。FIG. 1 is a block diagram schematically showing an apparatus of the present invention.

【図2】本発明装置を超純水製造装置に適用した場合の
概略を示すブロック図である。
FIG. 2 is a block diagram schematically showing a case where the apparatus of the present invention is applied to an ultrapure water production apparatus.

【図3】従来装置の概略を示すブロック図である。FIG. 3 is a block diagram schematically showing a conventional device.

【符号の説明】[Explanation of symbols]

10 アニオン交換装置 12 生物処理装置 16 固液分離装置 18 脱イオン処理装置 Reference Signs List 10 Anion exchange device 12 Biological treatment device 16 Solid-liquid separation device 18 Deionization treatment device

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI C02F 9/00 503 C02F 9/00 503B 503C 503G 1/42 1/42 B 1/44 1/44 J 1/66 510 1/66 510L 521 521Z 530 530G 540 540C 540J 3/06 ZAB 3/06 ZAB (58)調査した分野(Int.Cl.7,DB名) C02F 9/00 501 C02F 9/00 502 C02F 1/42 C02F 1/66 C02F 3/00 - 3/34 101 ──────────────────────────────────────────────────続 き Continuation of front page (51) Int.Cl. 7 Identification code FI C02F 9/00 503 C02F 9/00 503B 503C 503G 1/42 1/42 B 1/44 1/44 J 1/66 510 1 / 66 510L 521 521Z 530 530G 540 540C 540J 3/06 ZAB 3/06 ZAB (58) Fields investigated (Int. Cl. 7 , DB name) C02F 9/00 501 C02F 9/00 502 C02F 1/42 C02F 1 / 66 C02F 3/00-3/34 101

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 有機物を含有する酸性排水を処理する装
置であって、被処理水中の酸成分におけるアニオンを除
去して被処理水のpHを生物処理に適用可能なpH範囲
に調整するための弱塩基性アニオン交換樹脂を充填した
アニオン交換装置と、被処理水中の有機物の分解処理を
行なうための生物処理装置と、生物処理後の被処理水に
混入している微生物を除去するための固液分離装置と、
前記微生物除去処理後の被処理水を脱イオン処理するた
めの脱イオン処理装置とからなることを特徴とする有機
物含有酸性排水処理装置。
An apparatus for treating acidic wastewater containing organic matter, which removes anions in an acid component in water to be treated and adjusts the pH of the water to be treated to a pH range applicable to biological treatment. An anion exchange device filled with a weakly basic anion exchange resin, a biological treatment device for decomposing organic substances in the water to be treated, and a solid solution for removing microorganisms mixed in the water to be treated after the biological treatment. A liquid separation device;
An organic matter-containing acidic wastewater treatment device, comprising: a deionization treatment device for deionizing water to be treated after the microorganism removal treatment.
【請求項2】 生物処理装置が、微生物付着担体上に好
気性生物膜を形成したものを用いる好気性生物膜処理装
置である請求項1記載の有機物含有酸性排水処理装置。
2. The organic wastewater treatment device according to claim 1, wherein the biological treatment device is an aerobic biofilm treatment device using an aerobic biofilm formed on a microorganism-adhered carrier.
【請求項3】 固液分離装置が分離膜を備えた膜分離装
置である請求項1又は2記載の有機物含有酸性排水処理
装置。
3. The organic wastewater treatment apparatus according to claim 1, wherein the solid-liquid separation device is a membrane separation device provided with a separation membrane.
【請求項4】 有機物を含有する酸性排水が、半導体や
液晶等の電子デバイスを超純水で洗浄する際に発生する
希薄洗浄排水である請求項1記載の有機物含有酸性排水
処理装置。
4. The organic wastewater treatment apparatus according to claim 1, wherein the acidic wastewater containing organic matter is a dilute washing wastewater generated when an electronic device such as a semiconductor or a liquid crystal is washed with ultrapure water.
JP31922094A 1994-11-29 1994-11-29 Organic wastewater treatment equipment Expired - Fee Related JP3200314B2 (en)

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JP31922094A JP3200314B2 (en) 1994-11-29 1994-11-29 Organic wastewater treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31922094A JP3200314B2 (en) 1994-11-29 1994-11-29 Organic wastewater treatment equipment

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Publication Number Publication Date
JPH08150400A JPH08150400A (en) 1996-06-11
JP3200314B2 true JP3200314B2 (en) 2001-08-20

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ID=18107756

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Publication number Priority date Publication date Assignee Title
WO2014021397A1 (en) 2012-07-31 2014-02-06 株式会社オリエントナノ Microbial flora activator, anti-filamentous fungi agent comprising said microbial flora activator as active ingredient, and method for treating waste water containing oil, fat, etc. using said microbial flora activator
US9352992B2 (en) 2012-07-31 2016-05-31 Orientnano Co., Ltd. Microbial flora activator and its use in treating wastewater containing oil and fat

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