JP3260855B2 - Fine movement mechanism of microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine movement mechanism for finely moving a stage or a revolver of a microscope in an optical axis direction.

[0002]

2. Description of the Related Art Usually, focusing with a microscope is performed by:
This is performed by rotating the focusing handle to move the sample to the focal position of the objective lens. In this case, by rotating the focusing handle, the stage on which the sample is placed is moved up and down, or the revolver to which the objective lens is fixed is moved up and down.

[0003] Generally, the vertical movement of the stage or the revolver is performed by a rack and pinion interlocked with the rotation of the focusing handle.
By rotating the focusing handle, the stage or the revolver can be coarsely or finely moved in the optical axis direction.

[0004]

As described above, the vertical movement of the stage or the revolver is performed by the rack and pinion interlocked with the rotation of the focusing handle, so that backlash exists. become. Therefore, in the case of using the guide of the microscope focusing unit as a guide for precision fine movement, that is, in the configuration of rotating the focusing handle precisely and moving the stage or revolver up and down, it is assumed that the focusing handle is rotated precisely. Also,
The actual stage or revolver movement lacks precision due to rack and pinion backlash and errors in rack and pinion fabrication accuracy.

In a structure in which the fine movement axis of the microscope is minutely rotated directly, since a mechanism for minutely rotating the microscope is provided outside the main body of the microscope, it is difficult to make the rotation center of the mechanism coincide with the rotation center of the fine movement axis of the microscope. There is a possibility that the rotation amount of the drive source cannot be transmitted accurately. In order to achieve an accurate transmission of the driving force, it is necessary to take a rather precise configuration,
This leads to increased equipment costs.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a fine movement mechanism which realizes precise fine movement of a stage or a revolver with a simple structure, and which is very easily detachable from a microscope main body.

[0007]

In order to achieve the above object, a microscope fine movement mechanism according to claim 1 is detachably mounted on a movement mechanism movable in the optical axis direction with respect to the microscope main body.
Between the adapter is secured, a displacement generating device which is provided between the slidable revolver or stages and the adapter optical axis direction with respect to the adapter, the previous SL revolver or the stage with the adapter provided, anda displacement of transmission means Ru is fine movement in the optical axis direction the revolver or the stage reached transfer a displacement of the displacement generating device, before
The displacement generating element and the displacement transmitting means,
Or on the opposing surface between the stage and the adapter
It is characterized by being arranged .

[0008]

[0009]

[0010]

In the fine movement mechanism according to the first aspect, the displacement generated by the displacement generating element is transmitted to the stage or the revolver via the displacement transmitting means, and is guided by the adapter to finely move the stage or the revolver in the optical axis direction. It will be.

[0011]

[0012]

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a fine movement mechanism of a microscope according to a first embodiment of the present invention.

In the fine movement mechanism of this embodiment, a frame 2 as an adapter is removably mounted on a microscope focusing slide 1, a revolver 3 is mounted on the frame 2 so as to be slidable in the optical axis direction, and the revolver 3 Parts such as a generating element and displacement transmitting means are attached.

The microscope focusing slide 1 has a rack 4 formed in a direction parallel to an optical axis between an objective lens (not shown) of the microscope and a stage on which a sample is mounted. The pinion 4 is meshed with a pinion 5 connected to a focusing handle (not shown). A coarse movement mechanism includes the microscope focusing slide 1, the rack and pinion mechanism, the focusing handle, and the like. A fitting convex portion 6 is provided on one surface of the microscope focusing slide 1.
The dovetail groove 7 formed on one surface of the frame 2 fits into the groove.

The frame 2 is provided with a screw hole 8, and the frame 2 can be fixed to an arbitrary position of the microscope focusing slide 1 by a set screw 9 inserted into the screw hole 8. ing. A projection 10 is provided at the upper end of the frame 2. Further, a linear guide 11 for guiding the revolver 3 in the optical axis direction is provided on a surface of the frame 2 on which the dovetail groove 7 is not formed. On both sides of the linear guide 11, a pair of sliding pieces 12a and 12b are slidably attached to the linear guide 11 so as to sandwich the pair of sliding pieces 12a and 12b.

The pair of sliding pieces 12a, 12b
Is fixed to the back surface of the revolver 3 with screws, so that the revolver 3 is slidably mounted on the frame 2 in the optical axis direction.

On the back surface of the revolver 3, an L-shaped rotating lever 13 is pivotally supported at its bent portion by a fixing pin 14, and a lever 15 is connected at its center to the fixing pin 1.
6 pivoted. Also, on the back of the revolver 3,
A piezoelectric element 17 made of PZT is provided as a displacement generating element.

FIGS. 2A and 2B show the positional relationship among the rotating lever 13, the lever 15, the piezoelectric element 17, and the frame 2. FIG. 2A shows a state in which no displacement is given by the piezoelectric element 17, and FIG. 2B shows a state in which a displacement is given by the piezoelectric element 17, respectively.

In this embodiment, when the vertical portion 13a of the rotating lever 13 is displaced, the horizontal portion 1
One end of the piezoelectric element 17 in the direction of extension and contraction is
Abuts on the vertical portion 13a of the rim. The horizontal portion 13b of the rotating lever 13 is engaged from below one end 15b of the lever 15, and the protrusion 10 of the frame 2 is brought into contact with the other end 15a of the lever 15 from below. The rotation lever 13 is constantly urged to be in the state shown in FIG. Next, the operation of the present embodiment configured as described above will be described. First, the operation of the coarse movement mechanism will be described.

The pinion 5 rotates in conjunction with the rotation of the focusing handle provided on the microscope, and the microscope focusing slide 1 on which the rack 4 meshing with the pinion 5 is formed.
Moves up and down according to the direction of rotation.

Since the frame 2 is fixed to the microscope focusing slide 1 and the revolver 3 is supported by the frame 2 via the rotating lever 13 and the lever 15, the vertical movement of the microscope focusing slide 1 is increased. The revolver 3 moves up and down together with. The above operation is the coarse movement of the revolver 3 by the focusing handle. Next, the operation of the fine movement mechanism will be described with reference to FIGS.

The state shown in FIG. 2A is the initial state.
In this initial state, the first voltage that maintains the most contracted state is applied to the piezoelectric element 17, and the rotation lever 13
No pressing force is given to

Next, when a second voltage for maintaining a state in which the piezoelectric element 17 is extended by a predetermined amount is applied to the piezoelectric element 17, the piezoelectric element 17 extends to the state shown in FIG. The tip presses the vertical portion 13a of the rotating lever 13 leftward in the figure.

As a result, the rotating lever 13 is connected to the piezoelectric element 1
7 is rotated counterclockwise around the bent portion by the extension, and the state shown in FIG. 2B is obtained. The rotation of the rotation lever 13 causes the horizontal portion 13b of the rotation lever 13 to rotate.
Pushes up one end 15b of the lever 15 by a predetermined amount.
Along with this, the other end 15a of the lever 15 is pushed down by the same amount and presses the projection 10 of the frame 2 downward.

Here, the force for pushing the projection 10 downward acts as a force for pushing up the revolver 3. That is, since the frame 2 is fixed to the microscope focusing slide 1, the revolver 3 slightly moves upward through the linear guide 11.

At this time, in the fine movement adjustment of the revolver 3, the fine movement in the order of μm, which is difficult by the fine movement by the focusing handle, can be easily realized only by controlling the voltage applied to the piezoelectric element 7.

The amount of extension of the piezoelectric element 17 can be expanded to a sufficiently long stroke by adjusting the shape of the rotating lever 13 or the length of the arm of the lever 15, and conversely, the amount of extension of the piezoelectric element 17 can be increased. Can be reduced to smaller amounts.

As described above, according to this embodiment, the frame 2 is fixed to the microscope focusing slide 1, the revolver 3 is slidably mounted on the frame 2 via the linear guide 11, and further provided on the revolver 3. The displacement of the piezoelectric element 17 is
Since the power is transmitted to the frame 2 via the pivoting lever 13 and the lever 15 pivotally supported by the revolver 3, the revolver 3 can be finely adjusted without using the focusing handle.
With the simple configuration described above, it is possible to realize fine movement with high accuracy while eliminating the influence of backlash.

In this embodiment, since the linear guide 11 for fine movement is provided not on the microscope focusing slide 1 but on the frame 2, the microscope focusing slide 1 used in this embodiment has no fine movement mechanism. The same shape as that of the microscope focusing stage of the microscope can be used.
Therefore, a component replacement operation when a fine movement mechanism is newly provided in a microscope having no fine movement mechanism is simplified. In the above embodiment, the case where the revolver 3 is moved has been described. However, a stage for mounting a sample may be used instead of the revolver. Next, a second embodiment of the present invention will be described.

FIG. 3 is an exploded perspective view of a main part of the fine movement mechanism according to the second embodiment. In the fine movement mechanism of the present embodiment, a frame 21 as an adapter is slidably attached to a microscope main body (not shown). A sliding groove 22 is formed on the side surface of the frame 21 on the microscope main body side in parallel with the optical axis direction, and the sliding groove 22 is slidable on a fitting convex portion formed on the microscope main body side surface. Fit. On the other side surface of the frame 21, a pair of convex portions 23a, 23b
Are arranged in parallel with the longitudinal direction thereof facing the optical axis direction. The upper end surface of the frame 21 and the convex portions 23a, 2
A projecting portion 24 is formed between 3b to protrude on the opposite side to a turning ring to be described later. A projecting portion 25 is further implanted on the upper surface of the overhang portion 24.

The convex portions 23a, 23b of the frame 21
The linear guides 26a and 26b are located between the convex portions 23.
a and 23b are fixedly provided adjacent to each other. The movable member 27 is disposed so as to be sandwiched between the linear guides 26a and 26b.

A revolver 28 is mounted on the frame 21. The revolver 28 includes a turning ring, a mounting seat 28 a to which the turning ring is attached, and a sliding portion 28 b that is slidably fitted to the frame 21. The sliding portion 28b
It has a sliding groove 29 slidably fitted on both side surfaces of the frame 21 parallel to the optical axis direction, and a sliding groove 31 slidably fitted on both outer surfaces of the linear guides 26a and 26b. Then, the revolver 28 is fixed to the movable member 27 by screwing a screw from a screw hole formed on the back surface of the sliding portion 28a into a screw hole formed at a corresponding portion of the movable member 27. I have.

In the sliding portion 28b of the revolver 28, a window 32 through which the tip of the projecting portion 24 is inserted is formed at a portion facing the projecting portion 24. A piezo unit 33 is provided at the upper end of the sliding portion 28b.

FIG. 4 is a perspective view showing a positional relationship among the frame 21, the overhang portion 24, and the movable member 27. FIG. 5 is a side sectional view of the revolver fine movement mechanism. As shown in FIG. 4, the projecting portion 24 of the frame 21 projects on the end surface of the movable member 27, and regulates the upper limit of the movable member 27, that is, the revolver 28 in the optical axis direction. Further, as shown in FIG. 5, in a portion where the mounting seat 28 a and the sliding portion 28 b intersect, the projecting portion 2
In addition to the window 32 from which the front end of the projection 4 extends, a window 34 through which the projection 25 penetrates is formed. The piezo unit 33 is provided so as to house the projection 25 penetrating from the window 34. Reference numeral 35 denotes a turning ring, which is rotatably mounted on the mounting seat 28a.

The specific configuration of the piezo unit 33 is shown in FIG.
Is shown in As shown in FIG.
3 is a housing 36, a piezoelectric element 17 'as a displacement generating element,
It comprises a rotating lever 13 ', a lever 15' and the like.
The components interposed between the piezoelectric element 17 'and the projection 25 are connected to each other to form a link mechanism in the same manner as in the first embodiment.

In this embodiment configured as described above, the frame 21 receives a force in the direction of the optical axis via a coarse movement mechanism (not shown), and roughly moves in the direction of the optical axis relative to the microscope main body.
Since the revolver 28 is held by the frame 21 from below, the revolver 28 moves roughly in the optical axis direction in conjunction with the frame 21.

When a voltage is applied to the piezoelectric element 17 'in the direction of extension or contraction from outside the piezo unit, the piezoelectric element 1'
7 'expands and contracts, and the amount of expansion and contraction is given to the upper end of the projection 25 as the amount of displacement in the optical axis direction via the link mechanism described above. Since the frame 21 on which the projection 25 is formed is fixed to the microscope main body side, the revolver side relatively slightly moves in the optical axis direction by an amount corresponding to the displacement.

In this embodiment, the turning ring 35 is attached to the frame 21.
Is provided on the opposite side of the
Since the piezo unit 33 is disposed on the upper side, it is possible to secure a larger distance between the piezo unit 33 and the rotating ring 35 than in the first embodiment described above.
Therefore, various types of turning rings having different diameters can be attached.

As described above, according to this embodiment, the frame 21 connected to the coarse movement mechanism is slidably mounted on the microscope main body side, the revolver 28 is slidably mounted on the frame 21, and the piezoelectric element 17 'is further mounted. And link mechanism with revolver 2
Since the piezoelectric unit 33 is provided on the piezo unit 33 fixed to the eighth side, the same operation and effect as in the first embodiment can be obtained. Moreover, in the present embodiment, the overhanging portion 24 is provided on the frame 21 to secure a sufficiently large distance between the piezo unit 33 and the turning ring 35, so that it is possible to mount from a turning ring having a small diameter to a turning ring having a large diameter. Yes, the scope of application can be expanded.

In the second embodiment, the distal end of the piezoelectric element 17 'as a displacement generating element may be configured to directly contact the projection 25 without through a link mechanism.

FIG. 7 shows a schematic configuration of a fine movement mechanism of a microscope according to a third embodiment of the present invention. This embodiment is an example in which a part of the revolver is modified in the second embodiment, and other configurations are the same as those in the second embodiment. Therefore, only the modified part will be described in detail here to avoid duplication of description.

The revolver 40 used in this embodiment includes a turning ring 35, a mounting seat 40a on which the turning ring 35 is rotatably mounted, and a sliding portion 40b slidably mounted on the frame 21 (not shown). And especially the sliding part 40
b Mounting seat 4 integrally formed from the upper end toward the optical axis direction
0a is longer in the direction orthogonal to the optical axis than in the revolver (conventional type) shown in FIGS.

That is, in the second embodiment, by providing the overhang portion 24, the turning ring 35 and the piezo unit 3 are provided.
In the present embodiment, while the distance between the rotation ring 35 and the piezo unit 33 is extended by extending the mounting seat 40a of the revolver 40 in a direction perpendicular to the optical axis.
And secure a distance between them.

According to this embodiment, the turning ring 35 is also provided.
Since the distance between the piezo unit 33 and the piezo unit 33 can be increased, the present invention can be applied to a plurality of turning rings having different diameters. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

[0046]

As described above, according to the present invention, it is possible to realize a fine movement of the stage or the revolver with a simple structure and to provide a fine movement mechanism which can be easily attached to and detached from the microscope main body.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a configuration of a fine movement mechanism according to a first embodiment of the present invention.

FIG. 2 is an operation explanatory diagram of the fine movement mechanism according to the embodiment.

FIG. 3 is an exploded perspective view showing a configuration of a fine movement mechanism according to a second embodiment of the present invention.

FIG. 4 is a perspective view showing a frame and a movable member provided in a second embodiment.

FIG. 5 is a side sectional view of a fine movement mechanism according to a second embodiment.

FIG. 6 is a schematic diagram showing a configuration of a link mechanism provided in a second embodiment.

FIG. 7 is a diagram showing a main part of a fine movement mechanism according to a third embodiment of the present invention.

[Explanation of symbols]

1 ... microscope focusing slide, 2, 21 ... frame, 3, 2
8, 40 revolver, 10 protrusion, 11 linear guide, 12a, 12b sliding piece, 13, 13 'rotating lever, 15, 15' lever, 17, 17 'piezoelectric element, 3
3, 33 ': Piezo unit, 24: Overhang.

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) G02B 19/00-21/00 G02B 21/04-21/36

Claims (1)

(57) [Claims] An adapter detachably fixed to a moving mechanism movable in an optical axis direction with respect to a microscope main body, a revolver or a stage slidable in the optical axis direction with respect to the adapter, and the adapter. a displacement generating element arranged between, provided between the front Symbol revolver or the stage with the adapter, varying the Ru is fine movement of the revolver or the stage of displacement of the displacement generating device reaches heat in the optical axis direction comprising a position transmitting means, and said displacement generating device and said displacement transmission means, between the revolver or the stage with the adapter
A fine movement mechanism for a microscope, which is arranged on an opposing surface .