JP3254583B2 - Processing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the occupation space of a system, to reduce clean room cost, to realize high speed transfer and access velocity and to improve a throughput. SOLUTION: In the system, a cassette station 10 for carrying substrates to be processed, e.g. semiconductor wafers W into the system from the outside at the unit of plural pieces, 25 pieces in a wafer cassette CR for example, or carrying them out from the system, a processing station 12 where the various processing units of a single wafer type for executing a prescribed processing on the semiconductor wafers W one by one in a developing coating process, are arranged for plural stages around a main wafer transfer mechanism 24 for plural groups G1 to G4, an interface part 14 transferring the semiconductor wafers W between the processing station 12 and the adjacent exposure device are integrally connected. The main wafer transportation mechanism 24 is equipped with a cylindrical supporting body having a side opening part which can rotate around a vertical axis, and a wafer transfer body which is installed inside the cylindrical supporting body so that it can move in a vertical direction (Z direction) and has tweezers which can move forward/backward in a horizontal direction so that it can pass through the side opening part of the cylindrical supporting body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing system having a series of processing units for processing a substrate such as a semiconductor substrate or an LCD substrate in a single-wafer manner.

[0002]

2. Description of the Related Art FIG. 27 shows an example of a resist coating and developing system used in a photolithography process for manufacturing a semiconductor device.

In this processing system, a cassette station 300 for loading / unloading a semiconductor wafer W as a substrate to be processed into / from a cassette, a brush cleaning unit 302 for brush cleaning the wafer W, and cleaning the wafer W with high-pressure jet water. A jet water cleaning device 304, an adhesion unit 306 for hydrophobizing the surface of the wafer W, a cooling unit 308 for cooling the wafer W to a predetermined temperature, a resist coating unit 310 for coating a resist on the surface of the wafer W, Baking unit 3 for heating wafer W before and after to perform pre-bake or post-bake
12, a peripheral exposure unit 314 for removing the resist on the peripheral portion of the wafer W, and an adjacent exposure apparatus (not shown)
Transfer table 31 for transferring wafers and wafers W
8, and a developing unit 316 for exposing the exposed wafer W to a developing solution and selectively dissolving the photosensitive portion or the non-photosensitive portion of the resist in the developing solution is integrated to improve the working efficiency. .

[0004] In the center of the system, a corridor-like wafer transfer path 320 is provided in the longitudinal direction.
Numerals 16 are arranged on the wafer transfer path 320 with their respective front faces facing, and the wafer transfer body 322 moves on the wafer transfer path 320 to transfer the wafer W to each of the units 300 to 318.

[0005]

The conventional processing system described above has a horizontally long system configuration in which various processing units 302 to 316 are arranged along a wafer transfer path 320 extending in the horizontal direction. The occupied space was large, and the clean room cost was high. In particular, if an attempt is made to increase the cleanliness of the entire system or each part by a vertical laminar flow method effective for this type of treatment system, the initial cost and maintenance cost of an air conditioner or a filter are extremely large because of the large space. It was expensive.

In order to access each part 300 to 318 in the system, the wafer transfer body 322 not only linearly moves (in the Y direction) on the wafer transfer path 320 but also moves.
The arm or the tweezers 322a of the wafer transfer body 322 can move up and down in the vertical direction (Z direction) and rotate (in the θ direction). Or move backward. As described above, since the wafer carrier 322 is a carrier that can move in four axes (X, Y, Z, θ), the configuration is complicated and the access speed is limited.
The busiest operation in this type of system is the wafer carrier 322 at the center of the system, and the access or transfer speed of the wafer carrier 322 determines the system throughput. Conventionally, the wafer carrier 322
Because of the limited access speed, system throughput was also limited.

In the above conventional processing system,
Adhesion unit 306 and baking unit 3
Oven type processing units such as 12 have a configuration in which units are stacked in multiple stages like a building block, so when repairing any of the processing units, all of the processing units placed on top of it are repaired. Once they had to retreat, the maintenance work became hard work. In addition, in the conventional baking unit 312,
Since the semiconductor wafer W is placed directly on the mounting table, there is a problem that dust on the mounting table adheres to the back surface of the wafer,
Due to minute irregularities on the surface of the mounting table, there is a possibility that heat conduction from the mounting table to the wafer W becomes non-uniform. Further, the alignment (centering) of the wafer W on the mounting table is performed exclusively on the wafer carrier 322 side, but the burden of software including teaching is large.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and greatly reduces the space occupied by the system, lowers the cost of a clean room, enables high-speed transport or access speed, and improves throughput. Its main purpose is to provide a processing system.

[0009]

[0010]

In order to achieve the above object, a first processing system according to the present invention comprises a cylinder having an opening formed on a side surface and rotatable about a vertical axis at the center as a rotation center axis. And a rotary drive for rotating the cylindrical support
Means and movably arranged in the vertical direction inside the tubular support, a target substrate carrier having a substrate to be processed supported portion which is movable in the horizontal direction through the side opening, the
The substrate to be processed is vertically moved inside the cylindrical support.
The first substrate transfer means is constituted by the raising and lowering drive means, and a plurality of single-wafer units are arranged in multiple stages around the first substrate transfer means in one or more sets. ,
The first substrate transport means transports the substrate to be processed to the plurality of units in a predetermined order, and a series of processing is performed on the substrate.

A second processing system according to the present invention has a cylindrical support having an opening formed in a side surface and rotatable about a vertical axis at a central portion as a rotation center axis, and a rotating member for rotating the cylindrical support.
Roll driving means, a substrate transfer body having a substrate support portion that is provided movably in the vertical direction inside the cylindrical support and that can move in the horizontal direction through the side opening , The substrate to be processed is suspended inside the cylindrical support.
An oven-type sheet carrying a predetermined process by placing a substrate to be processed on a mounting table around a first substrate to be processed by the vertical drive unit for directly moving the substrate, and placing the substrate to be processed around the first substrate to be processed. One or more sets of leaf-type processing units are arranged in one or more sets, and one or more sets of spinner-type single-wafer processing units for performing predetermined processing by placing the substrate to be processed on a spin chuck. Are arranged in multiple stages, and the first
The substrate transfer means transfers the substrate to be processed to the plurality of single-wafer processing units in a predetermined order, and a series of processing is performed on the substrate.

In the processing system according to the present invention, preferably, the substrate to be processed is connected to a drive belt and a rodless cylinder which are respectively attached to the cylindrical support and extend in a vertical direction.

In the processing system of the present invention,
Means that at least one set of multi-stage units is an oven type
And any other set of multi-stage processing units.
The knit is also spaced apart. According to such a configuration,
Reducing thermal interference between different multi-stage units
Can be. In a preferred embodiment, at least 1
The multi-stage unit consists of a spinner-type single-wafer processing unit.
Including a resist coating unit and a developing unit
And place the developing unit on top of the resist coating unit.
It becomes. According to such a configuration, the handling of the resist is generally
The troublesome dispensing unit is located at the bottom,
Significant advantages can be obtained both structurally and in terms of maintenance.

In the processing system of the present invention, required single-wafer units are arranged in multiple stages around the first substrate transfer means in one or more sets. In the first substrate transfer means, the cylindrical support is rotated at a predetermined angle by the rotary driving means, and the substrate transfer body is vertically moved by the vertical drive means in the cylindrical support at a predetermined angle. By moving up and down to the height position, each unit can be accessed at high speed. In other words, while the cylindrical support rotates, the substrate carrier moves vertically in the rotation system while supporting the substrate, and thus the substrate in the rotation direction and the vertical direction. Can be simultaneously executed as quickly and smoothly as possible, and stable high-speed access can be realized. Then, with the rotational movement of the cylindrical support and the vertical movement of the substrate carrier stopped at the position facing the unit to be accessed, the substrate carrier supports the substrate support part in a cylindrical manner. The substrate to be processed is loaded into or unloaded from the unit by moving it back and forth in the horizontal direction so as to pass through the side opening of the body.

[0015]

[0016]

Embodiments of the present invention will be described below with reference to FIGS.

FIGS. 1 to 3 show the overall configuration of a coating and developing system according to an embodiment of the present invention.
2 is a plan view, FIG. 2 is a front view, and FIG. 3 is a rear view.

In this processing system, a plurality of semiconductor wafers W as substrates to be processed, for example,
A cassette station 10 for loading and unloading semiconductor wafers W from the outside into and out of the system in units of five wafers, and loading and unloading semiconductor wafers W into and from the wafer cassette CR; Wafer W
Between a processing station 12 in which various single-wafer processing units for performing predetermined processing are arranged at predetermined positions in a multistage manner, and an exposure apparatus (not shown) provided adjacent to the processing station 12. It has a configuration in which an interface unit 14 for delivering and receiving W is integrally connected.

In the cassette station 10, as shown in FIG. 1, a plurality of wafer cassettes CR, for example, up to four wafer cassettes CR are provided at the positions of the projections 20a on the cassette mounting table 20 with their respective wafer entrances facing the processing station 12 side.
A wafer carrier 22 which is placed in a row in the direction and is movable in the cassette arrangement direction (X direction) and in the wafer arrangement direction (Z direction) of wafers stored in the wafer cassette CR selectively accesses each wafer cassette CR. It is supposed to. Further, the wafer carrier 22 is configured to be rotatable in the θ direction, and as will be described later, an alignment unit (ALIM) and an extension unit (ALIM) belonging to the multistage unit of the third set G3 on the processing station 12 side. EXT).

In the processing station 12, as shown in FIG. 1, a vertical transfer type main wafer transfer mechanism 24 is provided at the center, and all the processing units are multi-staged around one set or a plurality of sets around the main transfer mechanism 24. Are located in In this example, 5
The multi-stage arrangement of the sets G1, G2, G3, G4, G5 is such that the multi-stage units of the first and second sets G1, G2 are juxtaposed on the front side of the system (front side in FIG. 1). The multistage units are arranged adjacent to the cassette station 10, the multistage units of the fourth set G4 are arranged adjacent to the interface unit 14, and the multistage units of the fifth set G5 are arranged on the back side.

As shown in FIG. 2, in the first set G1, two spinner type processing units, for example, a resist coating unit (COT), for performing a predetermined processing by placing a semiconductor wafer W on a spin chuck in a cup CP. The developing unit (DEV) is stacked in two stages from the bottom. Second
In the set G2, two spinner type processing units, for example, a resist coating unit (COT) and a developing unit (DEV) are stacked in two stages from the bottom. In the resist coating unit (COT), the drainage of the resist solution is troublesome both mechanically and in terms of maintenance, so that it is preferable to arrange the resist solution in the lower stage. However, they can be arranged in the upper stage as needed.

As shown in FIG. 3, in the third set G3, an oven-type processing unit such as a cooling unit (COL) or an adhesion unit (AD) for performing a predetermined process by placing the semiconductor wafer W on the mounting table SP. ), Alignment unit (ALIM), extension unit (EXT), pre-baking unit (PREBAK)
E) and post-baking unit (POBAKE)
Are stacked in eight steps from the bottom. Also in the fourth set G4, oven-type processing units such as a cooling unit (COL), an extension cooling unit (EXTCOL), and an extension unit (E
XT), a cooling unit (COL), a pre-baking unit (PREBAKE), and a post-baking unit (POBAKE) are stacked in, for example, eight stages from the bottom.

As described above, the cooling units (COL) and (EXTCOL) having a low processing temperature are arranged in the lower stage, and the baking unit (PREBAKE) having a high processing temperature is provided.
By arranging the post-baking unit (POBAKE) and the adhesion unit (AD) at the top,
Thermal interference between units can be reduced. However, a random multi-stage arrangement is also possible.

The interface section 14 has the same dimensions as the processing station 12 in the depth direction, but is made smaller in the width direction. Interface section 14
A portable pickup cassette CR and a stationary buffer cassette BR are arranged in two stages at the front, a peripheral exposure device 28 is arranged at the back, and a wafer carrier 26 is provided at the center. I have. This wafer carrier 26 is
It moves in the X and Z directions to access both cassettes CR and BR and the peripheral exposure device 28. Further, the wafer carrier 26 is configured to be rotatable in the .theta. Direction, and to the extension unit (EXT) belonging to the multistage unit of the fourth set G4 on the processing station 12 side, and to the wafer transfer on the adjacent exposure apparatus side. A table (not shown) can be accessed.

Although this processing system is installed in a clean room, the cleanliness of each part is further increased in the system by an efficient vertical laminar flow system. 4 and 5
2 shows the flow of clean air in the system.

4 and 5, air supply chambers 12a, 14a, and 16a are provided above the cassette station 10, the processing station 12, and the interface unit 14.
Are provided, and each air supply chamber 12a, 14a, 16
Filters with a dustproof function, for example, ULPA filters 30, 32, and 34 are attached to the lower surface of a. As shown in FIG. 5, the air conditioner 3 is provided outside or behind the processing system.
6, air is introduced from the air conditioner 36 through the pipe 38 to the air supply chambers 12a, 14a, 16a, and the ULPA filters 30, 32, 3 of the air supply chambers are provided.
4. Cleaner air flows downflow in each part 10, 12, 1
4. The down-flow air passes through a large number of ventilation holes 40 provided at appropriate locations below the system and is collected at an exhaust port 42 at the bottom, and is collected from the exhaust port 42 through a pipe 44 to the air conditioner 36. It has become so.

As shown in FIG. 4, in the cassette station 10, the space above the cassette mounting table 20 and the moving space of the wafer transfer arm 22 are separated from each other by a hanging wall-type partition plate 11.
, And the downflow air flows separately in both spaces.

As shown in FIGS. 4 and 5, in the processing station 12, the resist coating units (COT) and (COT) arranged at the lower stage in the multistage units of the first and second sets G1 and G2. A ULPA filter 46 is provided on the ceiling of the air conditioner.
The air is sent to the filter 46 through a pipe 48 branched from the pipe 8. A temperature / humidity regulator (not shown) is provided in the middle of the pipe 48 so that clean air of a predetermined temperature and humidity suitable for the resist coating step is supplied to the resist coating units (COT) and (COT). It has become. A temperature / humidity sensor 50 is provided near the outlet side of the filter 46, and the sensor output is provided to a control unit of the temperature / humidity regulator, and the temperature and humidity of the clean air are accurately controlled by a feedback system. It is supposed to be.

In FIG. 4, an opening DR through which a wafer and a transfer arm enter and exit is provided on a side wall facing the main wafer transfer mechanism 24 of each of the spinner type processing units (COT) and (DEV). A shutter (not shown) is attached to each opening DR in order to prevent particles or contamination from each unit from entering the main wafer transfer mechanism 24 side.

As shown in FIG. 1, at the processing station 12, the third and fourth sets G3, G4 adjacent to the multi-stage units (spinner type processing units) of the first and second sets G1, G2. Ducts 52 and 54 are provided in the side wall of the multi-stage unit (oven-type processing unit) so as to extend vertically. These ducts 5
The downflow clean air or the air whose temperature has been specially adjusted is flowed through 2, 54. By this duct structure, the heat generated in the oven type processing units of the third and fourth sets G3 and G4 is cut off,
And the second set G1, G2 does not reach the spinner type processing units.

In this processing system, the fifth set G5 is also provided on the back side of the main wafer transfer mechanism 24 as shown by a dotted line.
Multi-stage unit can be arranged. The multistage units of the fifth set G5 can be shifted sideways as viewed from the main wafer transfer mechanism 24 along the guide rails 56. Therefore, even when the fifth set G5 of multi-stage units is provided, a space is secured by sliding, so that maintenance work can be easily performed from behind the main wafer transfer mechanism 24.

Next, the configuration and operation of the cassette station 10 in the present processing system will be described in more detail with reference to FIGS.

As shown, the cassette station 10
Is provided with a pair of tweezers 62 movable on the transfer base 60 in the Y direction (front-back direction). The transport base 60 is rotatably mounted in the θ direction on a lift 64 via a rotating shaft 63, and the lift 64 is supported by a horizontal movable base 66 so as to be vertically movable. The guide rail 68 is slidably supported in the same direction on a guide rail 68 laid horizontally in the X direction. Tweezers 62 to Y
The Y-direction drive unit for moving in the direction (front-back direction)
It is constituted by a drive motor and a belt (not shown) built in the transport base 60. A rotation drive unit for rotating the transfer base 60 in the θ direction is constituted by a drive motor (not shown) built in the lift 64. A Z-direction drive unit for moving the elevating table 64 up and down in the Z direction is constituted by a driving motor and a ball screw shaft (not shown) provided in the horizontal moving table 66. The X-direction drive unit for moving the horizontal moving table 66 in the X direction is constituted by a belt connected to the horizontal moving table 66 and a drive motor (not shown).

With the driving mechanism and the supporting mechanism as described above, the wafer transfer body 22 of the cassette station 10
X, Y, and X are set between each cassette CR on the cassette mounting table 20 and the extension unit (EXT) or the alignment unit (ALIM) on the processing station 12 side.
By moving in the Z and θ directions, the semiconductor wafers W can be transferred one by one.

The wafer transfer body 22 is provided with a wafer centering arm member 70 extending in an arc shape on both sides from the base end of the tweezers 62, and the transfer base 6.
A pair of wafer mapping sensor arms 72 and 74 that protrude forward in an L-shape from the front end of the “0” are also attached.

FIG. 6 shows an extension unit (EXT) on the processing station 12 side. The extension unit (EXT) is provided with a wafer transfer table 76 having a plurality of, for example, three wafer support pins 76a erected in the circumferential direction.

As shown in FIG. 7, a circuit board or a circuit box 78 on which a main controller (M / C) and various control circuits (E / C) are mounted or housed is provided below the cassette mounting table 20. Is provided.

In the wafer carrier 22 as described above,
It is preferable that the motor for rotational drive incorporated in the elevating table 64 is mounted in a state where the motor rotation axis is accurately aligned. For this reason, adjustment screws or bolts for adjusting the degree of horizontality or inclination are used in the motor mounting portion. However, when aluminum is used as the motor support plate, the support plate may be shaved at the tip of the abutting bolt while turning the adjusting bolt many times, and fragments thereof may cause particles. Although a shim (spacer) is used instead of such an adjustment bolt, there is a problem that fine adjustment is difficult. In this embodiment, this problem is solved by the configuration shown in FIGS.

In FIG. 8, an L-shaped support plate 80 made of aluminum is fixedly arranged in a lifting platform 64, and a housing 84 containing a drive motor 82 is mounted on the support plate 80. Flanges 84a are formed at lower ends of both side surfaces of the housing 84, and a plurality of fixed mounting screw holes 84b and a through screw hole 84c for adjusting parallelism are formed at appropriate intervals in the flange 84a. ing. On the other hand, on the upper surface of the support plate 80, a screw hole 80b is formed at a position corresponding to each fixed mounting screw hole 84b of the housing 84, and a circular hole is formed at a position corresponding to the parallelism adjusting screw hole 84c. A recess 80c is formed, and a stainless steel plate 86 is arranged in each recess 80c.

The housing 84 is placed on the support plate 80 such that the screw holes 84b and 84c of the housing 84 overlap the corresponding screw holes 80b or the recesses 80c of the support plate 80, and the bolts for adjusting the parallelism are provided. 88 is screwed into each screw hole 84c. Then, as shown in FIG. 9, the tip of each bolt 88 abuts on the stainless steel plate piece 86. By adjusting the degree of screwing of each bolt 88, the parallelism of the housing 84 or the motor 82 can be adjusted. After the adjustment, the fixing mounting bolt 90 is screwed into the fixing mounting screw holes 84b and 80b.

As described above, according to the present embodiment, the tip of the bolt 88 for adjusting the degree of parallelism directly contacts the stainless steel plate piece 86. There is almost no shavings. Further, since the adjustment is performed with the bolt 88, the parallelism can be more accurately adjusted than when using a shim. The parallelism adjusting means is not limited to the wafer carrier 22, but can be applied to any other mounting structure.

Next, the configuration and operation of the main wafer transfer mechanism 24 in the processing station 12 will be described with reference to FIGS. FIG. 10 shows the main wafer transfer mechanism 2
4 is a schematic perspective view showing the configuration of the main part of FIG. 4, FIG. 11 is a longitudinal sectional view showing the configuration of the main part of the main wafer transfer mechanism 24, and FIG.
13 is a cross-sectional plan view in the direction of arrow A, and FIG.
1 and FIG. 14 as viewed in the direction of arrow B in FIG.
FIG. 12 is an inside side view seen in the direction of arrow C in FIG. 11.

As shown in FIGS. 10 and 11, the main wafer transfer mechanism 24 has a cylindrical support 94 composed of a pair of opposed vertical walls 91 and 92 connected at the upper and lower ends.
The wafer transfer body 96 is mounted movably in the up-down direction (Z direction) inside the inside. The cylindrical support 94 is connected to a rotation shaft of a rotation driving motor 98, and the rotation driving force of the motor 98 causes the wafer carrier 9 to rotate around the rotation shaft.
6 to rotate together. The rotation drive motor 98 is fixed to the base plate 100 of the present system,
A flexible cable carrier (registered trademark) 102 for feeding power is wound around the motor 98. The cylindrical support 94
May be configured to be attached to another rotating shaft (not shown) rotated by the rotating drive motor 98.

The vertical movement range of the wafer carrier 96 is set such that the wafer carrier 96 can access all of the multi-stage units of the first to fifth sets G1 to G5.

A plurality of wafer transfer bodies 96, for example, three wafers movable in the X direction (front-back direction)
The book has tweezers 106A, 106B, and 106C. Each tweezer 106 can pass through a side opening 95 between both vertical walls 91 and 92 of the cylindrical support 94. An X-direction drive unit for moving each tweezers 106 in the X direction is configured by a drive motor and a belt (not shown) built in the transport base 104.

The uppermost tweezers 106A of the three tweezers may be used exclusively for transferring a cooled wafer. Further, a heat insulating plate may be arranged between the tweezers so as to prevent mutual interference of heat.

As shown in FIGS. 11, 12 and 13, a pair of pulleys 108 and 110 are attached to the upper and lower ends substantially at the center inside one vertical wall portion 91. An endless belt 112 for vertical drive is stretched between them. The transfer base 104 of the wafer transfer body 96 is connected to the vertical drive belt 112 via a belt clamp 114. Lower pulley 1
Reference numeral 10 is connected to a rotation shaft 116a of a drive motor 116 fixedly arranged on the bottom surface of the cylindrical support 94, and constitutes a drive pulley. As shown in FIGS. 12 and 13, a pair of guide rails 116 and 118 are provided at the left and right ends inside the vertical wall portion 91 so as to extend in the vertical direction, and project from the side surface of the transport base 104. A pair of horizontal support rods 12 provided
Sliders 12 provided at the tips of
4, 126 are slidably engaged with both guide rails 116, 118. With such a vertical belt driving mechanism and a vertical slider mechanism, the wafer transfer body 96 can be vertically moved by the driving force of the driving motor 116.

As clearly shown in FIGS. 12 and 13, a central portion inside the vertical wall portion 91 and one of the guide rails 116 are provided.
A rodless cylinder 130 extends vertically and extends vertically. Cylindrical movable portion 130 which is movably fitted outside the rodless cylinder 130
a is connected to the transfer base 104 of the wafer transfer body 96 via the horizontal support rod 120. Since the movable portion 130a is magnetically coupled to a piston (not shown) movably inserted into the cylinder 130, the movable portion 130a
Are connected so that the wafer carrier 96 and the piston can move simultaneously. Compressed air is supplied to the port 130b at the lower end of the cylinder 130 through the pipe 134 from the regulator 132 at a pressure such that a force substantially equal to the weight of the wafer transfer body 96 is generated on the piston. The port 130c at the upper end of the cylinder 130 is open to the atmosphere.

As described above, since the weight of the wafer carrier 96 is canceled by the lift of the cylinder 130,
The wafer carrier 96 can move up at a high speed without being affected by gravity. Furthermore, even if the drive belt 112 breaks, the wafer transfer body 96 is held at that position by the lift of the cylinder 130, and there is no risk of falling by gravity. Therefore, the wafer carrier 9
There is no possibility that the six or cylindrical support 96 is damaged.

As shown in FIGS. 10, 12, and 14, a flexible portion for supplying power and a control signal to the wafer transfer member 96 is provided at the center and both ends inside the other vertical wall portion 92. A sleeve 136 that accommodates the cable carrier 134 extending in the vertical direction is provided. Opposite outer surfaces of the two central sleeves 136 and 136 constitute a vertical guide 138, and the guide 138 guides the slider 104 a protruding from the side surface of the transport base 104. I have.

As shown in FIG. 10, a pair of openings 94b are provided on both sides of the rotation center shaft 94a on the upper surface of the cylindrical support 94, and the clean air of the downflow from the filter 32 on the ceiling surface is supplied to these openings. Through the opening 94b of the main wafer transfer mechanism 24. The down-flow clean air keeps the vertical moving space of the wafer transfer body 96 clean at all times.

Also, inside the vertical wall portions 91 and 92,
As shown in FIG. 12, vertical partition plates 91a and 92a are provided, and ducts 91b and 92b are formed by the back sides of these partition plates 91a and 92a and the vertical wall portions 91 and 92. These ducts 91b and 92b are connected to the vertical partition plates 91a and 92a by a plurality of fans 93 attached at regular intervals to the vertical wall portions 90 and 92.
Communicates with the inside space of Thus, dust generated from movable bodies such as the vertical drive belt 112, the rodless air cylinder 130, and the cable bear 134 is discharged to the ducts 91b and 92b by the fan 93.

As shown in FIGS. 11 and 12,
In the wafer transfer body 96 as well, the internal space of the transfer base 104 communicates with the internal space of the vertical wall portions 91 and 92 via the holes in the fans 142 and the horizontal support rods 120 and 122. As a result, dust generated by the tweezers driving motor and the belt built in the transport base 104 is also discharged to the ducts 91b and 92b.

Next, the configuration and operation of the alignment unit (ALIM) included in the multistage unit of the third set G3 in the processing station 12 will be described with reference to FIGS. FIG. 15 and FIG. 16 are a plan view and a side view showing the configuration of the main part in the alignment unit (ALIM) in detail.

This alignment unit (ALIM)
When the semiconductor wafer W is transferred between the wafer carrier 22 on the cassette station 10 side and the wafer carrier 96 of the main wafer carrier mechanism 24 on the processing station 12 side, the semiconductor wafer W is temporarily used as a buffer. It has a wafer delivery table 150 on which it is placed, and is configured to allow centering and orientation flat alignment on this wafer delivery table 150.

As shown in FIGS. 15 and 16, the wafer transfer table 150 has a plurality of, for example, three support pins 154 for supporting the back surface of the semiconductor wafer W on a horizontal support plate 152, and a semiconductor wafer W. A circumferential surface for holding the outer peripheral edge of the first member is formed in an arc shape, and is fixedly attached to two guide members 156 arranged opposite to each other. Horizontal support plate 152
Is provided with a circular opening 152a at the center thereof, and the spin chuck 158 can move up and down through this opening 152a. The spin chuck 158 is
The upper surface is capable of vacuum-sucking the semiconductor wafer W, and is coupled to a rotary drive shaft of a drive motor 160 provided below the horizontal support plate 152.

The drive motor 160 is connected to a piston shaft 164a of an air cylinder 164 fixed to the support base 162 via a horizontal support member 166.
The drive motor 160 and the spin chuck 158 move up and down integrally therewith by moving forward or backward in the vertical direction. A light emitting portion 168A of the optical sensor 168 for aligning the orientation flat of the semiconductor wafer W is attached to one end of one of the two guide members 156, and the light receiving portion 168A is directly above the light emitting portion 168A so as to face the light emitting portion 168A. The portion 168B is attached to a support member (not shown).

For example, the wafer transfer body 22 on the cassette station 10 side is connected to the alignment unit (ALI).
M) to access the semiconductor wafer W to the horizontal support plate 15
2, the spin chuck 158 moves to the position shown in FIG.
Move upward as shown by the dashed line 158 ′ to receive the semiconductor wafer W. Next, the spin chuck 158 is rotated by the drive of the drive motor 160 to rotate (spin) the semiconductor wafer W in the circumferential direction. Then, the optical sensor 16
When the wafer 8 detects the orientation flat of the semiconductor wafer W, the spin chuck 158 rotates by a predetermined angle from the position (time point) and stops, and the semiconductor wafer W is moved in a predetermined direction, for example, as shown in FIG. It is positioned in the direction that comes to the side.

After the orientation flat alignment is performed in this manner, the spin chuck 158 starts to descend, releases the vacuum suction, supports the semiconductor wafer W on the support pins 154 on the horizontal support plate 152, and guides the guide member 156. The center of the wafer is centered by bringing the peripheral portion of the wafer into contact with the wafer, and the wafer is lowered to a position lower than the horizontal support plate 152. Thereafter, the spin chuck 158 is raised again to hold the semiconductor wafer W, and the main wafer carrier 96 on the processing station 12 side inserts any of the tweezers 106 into the gap between the horizontal support plate 152 and the back surface of the semiconductor wafer W. Then, the semiconductor wafer W is lifted and received from the wafer delivery table 150.

Next, the baking unit (PREB) included in the multistage unit of the third and fourth sets G3 and G4 in the processing station 12 in FIGS.
AKE) and (POBAKE) will be described.

FIGS. 17 and 18 are a plan view and a sectional view showing the structure inside the baking unit in the present embodiment. FIG. 17 shows the horizontal shielding plate 1 for illustration.
It is the top view except 74.

The processing chamber 170 of this baking unit is formed by both side walls 172 and a horizontal shielding plate 174, and the front side (main wafer transfer mechanism 24 side) and the rear side of the processing chamber 170 become openings 170A and 170B, respectively. ing.
A circular opening 176 is formed at the center of the shielding plate 174, and a disk-shaped heating plate 178 having a built-in heating element such as a heater is provided in the opening 176 as the mounting table SP.

The hot plate 178 is provided with, for example, three holes 180, and a support pin 182 is inserted in each hole 180 in a loose fit state. When the semiconductor wafer W is loaded and unloaded, each support pin 182 is provided. Protrudes or rises above the surface of the hot plate 178 and the main wafer transfer mechanism 24
The transfer of the wafer W to and from the wafer carrier 94 is performed. On the outer periphery of the hot plate 178, a shutter 186 formed of a ring-shaped band plate having a large number of ventilation holes 184 formed circumferentially at intervals of, for example, 2 ° is provided. The shutter 186 is normally retracted to a position below the hot plate 178, but rises to a position higher than the upper surface of the hot plate 178 during the heating process as shown in FIG.
A ring-shaped side wall is formed between the cover and the cover body 188 so that the downflowed clean air flowing in from the front side of the apparatus flows evenly in the circumferential direction from the vent hole 184.

An exhaust port 1 for exhausting gas generated from the wafer surface during the heat treatment is provided at the center of the cover body 188.
An exhaust pipe 190a is provided at the exhaust port 188a.
Is connected. The exhaust pipe 190 is connected to the duct 52 (or 5) on the front side of the apparatus (the main wafer transfer mechanism 24 side).
4) or lead to a duct (not shown).

Under the shielding plate 174, a machine room 194 is formed by the shielding plate 174, the side walls 172, and the bottom plate 192, and a hot plate supporting plate 196, a shutter arm 198, a supporting pin arm 200, a shutter arm An elevation drive cylinder 202 and a support pin arm elevation drive cylinder 204 are provided.

As shown in FIG. 17, a plurality of, for example, four wafer guide supporting projections 206 are provided on the surface of the hot plate 178 on which the outer peripheral edge of the semiconductor wafer W is to be placed. FIG. 19 and FIG.
6A and 6B are a partial side view and a main part cross-sectional view for describing the configuration and operation of No. 6.

As shown in FIG. 20, each of the wafer guide supporting projections 206 has a conical taper (inclined surface) of a predetermined angle, for example, 45 ° via a flat plate piece 208 having a predetermined thickness D.
A trapezoidal section 210 having a trapezoidal section 210 a
And is fixed to the hot plate 178. Flat piece 208
Extends at least radially inward of the trapezoidal template piece 210. Both plate pieces 208 and 210 are made of, for example, ceramic, and the trapezoidal section plate piece 210 constitutes wafer guide means, and the flat piece 208 constitutes wafer support means.

As shown in FIG. 19, at the time of loading, the wafer support pins 182 move up to receive the semiconductor wafer W from the wafer carrier 94 (not shown). Plate 178
Above the semiconductor wafer W, the outer peripheral edge (edge) of the semiconductor wafer W rides on the tapered surface 210a of the trapezoidal plate-shaped plate piece 210 of the wafer guide support protrusion 206, and is dropped as it is to the flat plate piece 208 along the tapered surface 210a. It is positioned as shown at 20. Tapered surface 210 of trapezoidal section plate piece 210
The distance K between the upper end of a and the radial inner end of the flat plate piece 208 defines the centering width, and the cross-sectional trapezoidal plate piece 210
And the thickness D of the flat piece 208 can be set to a desired value.

As described above, when the wafer support pins 182 are lowered while carrying the semiconductor wafer W during loading, the semiconductor wafer W is guided along the tapered surface 210 a of the trapezoidal section 210 of the wafer guide support projection 206. Are automatically aligned (centered). Therefore, even if there is some error in the wafer transfer positioning on the wafer transfer body 94 side of the main wafer transfer mechanism 24, the error is absorbed (corrected) on the baking unit side, and the semiconductor wafer W is accurately placed on the hot plate 178. It can be placed in alignment. Further, the semiconductor wafer W is placed on the hot plate 1
78 from the surface of the wafer guide support projection 206
Since it is placed in a state of being floated by the thickness D of 08, there is no possibility that dust on the hot plate surface adheres to the back surface of the wafer, and the entire surface of the wafer is uniformly heated by radiant heat from the hot plate surface.

The cooling unit (COL) and the extension cooling unit (EXTCOL) in the present processing system are also different only in the processing temperature (the temperature of the mounting table SP), and are structurally constituted by a pre-baking unit (PREBAKE) and a post-baking. Since this unit is common to the unit (POBAKE), it is possible to apply the wafer guide support projection 206 according to the present embodiment to these units (COL) and (EXTCOL).

The shape of the wafer guide support projection 206 is not limited to the above-described one, but may be variously modified. For example, an arc shape corresponding to the outer peripheral edge of the semiconductor wafer W may be used.

Next, the configuration and operation of the adhesion unit (AD) included in the multistage unit of the third group G3 in the processing station 12 will be described with reference to FIG.

FIG. 21 is a sectional view showing the structure of the main part of the adhesion unit (AD) in this embodiment. The processing container 220 of this unit (AD) includes a cylindrical hot plate holder 226 containing a disk-shaped hot plate 224 as a mounting table SP and a gap and space 227 above the hot plate 224.
And a cover 228 that is covered via the 227a. An HMDS gas introduction port 228a for introducing HMDS gas into the container via a gas supply pipe 230 from an HMDS gas supply unit (not shown) is formed at the center of the lid 228.

The lid 228 is divided into two upper and lower parts from the vicinity of the gas inlet 228a toward the outside in the radial direction to form a double lid structure (228b, 228c).
A gap 228d is formed over substantially the entire circumference between the outer peripheral edge portion b and the inner side wall surface of the outer lid portion 228c. A connecting hole 228e between the two lids 228b and 228c is also formed with a through hole substantially over the entire circumference, and the two lids 228b and 228c are formed.
The gap 228f therebetween communicates with an exhaust port 231 provided on the outer surface of the lid 228. Thereby, the gas inlet 22
The HMDS gas introduced from 8a is uniformly diffused in the space 227a toward the periphery, and is uniformly exhausted from the gap 228d. The exhaust port 231 is connected to the exhaust pipe 23.
2 is connected to a pump (not shown).

The hot plate 224 is made of a metal having a high thermal conductivity, for example, aluminum, and a semiconductor wafer W is mounted on an upper surface thereof as an object to be processed. Inside the hot plate 224, a heater for heating the semiconductor wafer W, for example, a heating resistor, a temperature sensor, and the like are incorporated. Outside the hot plate 224, a temperature control mechanism (FIG. (Not shown) are also provided. The hot plate 224 is provided with through holes 224a at a plurality of positions, for example, at three positions, and vertically movable support pins 225 for wafer transfer are loosely inserted into these through holes 224a. When loading / unloading the wafer W, these support pins 2
The wafer 25 projects (rises) above the upper surface of the hot plate 224 to carry the wafer W, and transfers the wafer W to and from the wafer carrier 96 of the main wafer transport mechanism 24.

The adhesion unit (A
In D), the inside of the container 220 is not previously brought to a predetermined reduced pressure state so that the HMDS gas can be introduced, and the gas in the container is exhausted from the exhaust port 231 by a pump, and the HMDS
HMDS gas from the gas supply unit is introduced into the HMDS gas inlet 2
Introduce from 28a. The surface of the semiconductor wafer W is subjected to a hydrophobic treatment by being exposed to the introduced uniformly diffused HMDS gas atmosphere while being heated at a predetermined temperature. The gas after the treatment is applied to the gap 228d of the lid 228,
228f and the exhaust port 231 through the through hole and the container 22
It is discharged out of zero. After a certain time, HMDS
Instead of gas, N2 gas is supplied from a gas supply pipe 230, and the inside of the container 220 is replaced with this N2 gas, and purging is performed.

As described above, in the adhesion unit (AD) of the present embodiment, the HMDS gas is introduced while the inside of the container 220 is exhausted.
There is no danger of DS gas leaking. Further, the flow rate of the gas exhausted from the exhaust port 231 is set to be higher than the flow rate of the HMDS gas introduced into the container 220, and the outside air is supplied from the gap 227 between the lid 228 and the hot plate holder 226 to the container 22.
0, the gap 227 is formed.
HMDS gas can be more effectively prevented from leaking, and the container 220 does not need to have a highly sealed structure, so that the cost of the apparatus can be significantly reduced.

The shapes and mounting locations of the HMDS gas introduction port 228a and the exhaust port 231 are not limited to those described above, and various modifications are possible. For example, the exhaust port is provided on the hot plate holder 226 side, for example, at the upper end space. It is also possible to provide it near the 227a side.

Further, each of the above-mentioned baking unit, cooling unit, extension cooling unit, cooling unit, adhesion unit, alignment unit and the like, which are arranged in multiple stages above and below, may be configured as a slide type and made detachable. . Thereby, maintainability is improved.

Next, the configuration and operation of the interface unit 14 of the present processing system will be described with reference to FIGS. 22 and 23.

As shown in the figure, the wafer transfer body 26 in the interface section 14 is mounted on a transfer base 240 by a wafer transfer tweezers 2 which can be moved in the X direction (front-back direction).
42 are provided. The transport base 240 is rotatably mounted in the θ direction on a lifting platform 246 via a rotation shaft 244. The lifting platform 246 is supported by a horizontal moving body 248 so as to be able to vertically move (Z direction) and move vertically. The moving table 248 is Y
The guide rails 250 are slidably supported in the same direction by guide rails 250 which are horizontally mounted in the same direction. An X-direction drive unit for moving the tweezers 242 in the X direction is configured by a drive motor and a belt (not shown) built in the transport base 240. A rotation drive unit for rotating and moving the transfer base 240 in the θ direction is configured by a drive motor (not shown) built in the lift 246. Elevator 24
A Z-direction drive unit for moving the 6 up and down in the Z direction is constituted by a drive motor 252 provided in a horizontal moving table 248 and a ball screw shaft (not shown). The Y-direction driving unit that moves the horizontal moving table 248 in the Y direction is configured by a belt connected to the horizontal moving table 248 and a drive motor (not shown).

With the driving mechanism and the supporting mechanism as described above, the wafer transfer body 26 of the interface section 14 is provided with the pickup cassette CR and the buffer cassette BR on the front side of the interface section, the peripheral exposure device 28 on the rear side, and the processing station 12 side. The semiconductor device is moved in the X, Y, Z, and θ directions between the extension unit (EXT) belonging to the multi-stage unit of the fourth set G4 and a wafer transfer table (not shown) on the side of the adjacent exposure apparatus, and The wafers W can be transferred one by one. Wafer carrier 2
6 includes a pair of wafer mapping sensor arms 25 projecting forward in an L-shape from the tip of the transfer base 240.
4,256 are also attached.

The pickup cassette CR is removably loaded into the interface section 14 from an opening / closing door (not shown) on the front panel side of the processing system. A sample semiconductor wafer W is stored in the cassette CR. You.

The buffer cassette BR is a stationary cassette fixedly arranged in the interface section 14, and requires the semiconductor wafer W to be processed in the processing system or between the processing system and the exposure apparatus. Accordingly, it is temporarily stored in the cassette BR (usually for standby or storage). Since the movement stroke of the wafer carrier 26 is relatively large and the tweezers 242 has a relatively large plate thickness, the wafer storage interval (that is, the wafer storage groove pitch) of the buffer cassette BR is the same as that of an ordinary portable cassette CR. Larger dimensions have been chosen. For example, the wafer storage interval of a normal cassette CR is 6.35 m.
m, the wafer storage interval of the buffer cassette BR is selected to be 11 mm. Thus, the tweezers 242 of the wafer transfer body 26 can take the semiconductor wafer W in and out of each of the wafer storage grooves of the buffer cassette BR without any trouble.

The peripheral exposure device 28 is a spinner type processing unit which places the semiconductor wafer W on the spin chuck 28c and selectively exposes only the edge portion of the wafer W.
An exposure apparatus main body (not shown) is provided in the apparatus housing 28a, and a front side (the wafer transfer body 26) of the apparatus housing 28a is provided.
The semiconductor wafer W and the tweezers 242
Is provided with an opening 28b with a shutter for the entrance and exit.

In FIG. 23, the extension units (EX) belonging to the fourth group G4 on the processing station 12 side are shown.
T) is shown. This extension unit (EXT) has a plurality of units, for example, three at equal intervals in the circumferential direction.
A wafer delivery table 258 is provided on which the wafer support pins 258a are erected.

Next, a description will be given of a wafer transfer operation when the semiconductor wafer W undergoes a series of processing in the present processing system.

First, in the cassette station 10, the wafer carrier 22 accesses the cassette CR on the cassette mounting table 20, which stores the wafer before processing, and
One semiconductor wafer W is taken out from the cassette CR. When the semiconductor wafer W is taken out of the cassette CR, the wafer carrier 22 moves to the alignment unit (ALIM) disposed in the multistage unit of the third set G3 on the processing station 12 side, and the unit (ALI).
The semiconductor wafer W is mounted on the wafer mounting table 150 in M). The semiconductor wafer W is subjected to orientation flat alignment and centering on the wafer mounting table 150 as described above. Thereafter, the wafer transfer body 96 of the main wafer transfer mechanism 24
Accesses the alignment unit (ALIM) from the opposite side and receives the semiconductor wafer W from the wafer mounting table 150.

In the processing station 12, the main wafer transfer mechanism 24 first transfers the semiconductor wafer W to the adhesion unit (AD) belonging to the multistage unit of the third group G3.
Carry in. The semiconductor wafer W in this unit (AD)
Undergoes the adhesion processing as described above.

When the adhesion processing is completed, the main wafer transfer mechanism 24 unloads the semiconductor wafer W from the adhesion unit (AD) and then belongs to the third set G3 or the multi-stage unit of the fourth set G4. Carry in the cooling unit (COL). In this unit (COL), the semiconductor wafer W is cooled to a set temperature before the resist coating process, for example, 23 ° C.

When the cooling process is completed, the main wafer transfer mechanism 24 unloads the semiconductor wafer W from the cooling unit (COL) by the tweezers 106A, and then belongs to the multi-stage unit of the first set G1 or the second set G2. Carry in the resist coating unit (COT). In the resist coating unit (COT), the semiconductor wafer W is coated with a uniform thickness resist on the wafer surface by spin coating.

When the resist coating process is completed, the main wafer transfer mechanism 24 unloads the semiconductor wafer W from the resist coating unit (COT), and then moves the pre-bake unit (P
REBAKE). Pre-bake unit (P
The semiconductor wafer W is placed on the hot plate 178 in REBAKE) and heated at a predetermined temperature, for example, 100 ° C. for a predetermined time. Thus, the residual solvent is evaporated and removed from the coating film on the semiconductor wafer W.

When the pre-bake is completed, the main wafer transfer mechanism 24 transfers the semiconductor wafer W to the pre-bake unit (PR).
EBAKE), and then into an extension cooling unit (EXTCOL) belonging to the multistage unit of the fourth group G4. This unit (COL)
Inside, the semiconductor wafer W is cooled to a temperature suitable for the next step, that is, 24 ° C. for the peripheral exposure processing in the peripheral exposure device 28. After this cooling, the main wafer transfer mechanism 24
The semiconductor wafer W is transferred to the extension unit (EXT) immediately above, and the wafer W is mounted on the mounting table 258 in this unit (EXT).

This extension unit (EXT)
When the semiconductor wafer W is mounted on the mounting table 258, the wafer carrier 26 of the interface unit 14 accesses from the opposite side and receives the semiconductor wafer W as shown in FIG. Then, the wafer carrier 26 carries the semiconductor wafer W into the peripheral exposure device 28 in the interface unit 14. Here, the semiconductor wafer W is subjected to exposure processing on the edge portion of the wafer W.

When the peripheral exposure process is completed, the wafer carrier 26 unloads the semiconductor wafer W from the peripheral exposure device 28, and the wafer receiving table (not shown) on the adjacent exposure device side.
Transfer to In this case, the semiconductor wafer W may be temporarily stored in the buffer cassette BR before being transferred to the exposure apparatus.

When the semiconductor wafer W is returned to the wafer transfer table on the side of the exposure apparatus after the entire exposure processing is completed by the exposure apparatus,
The wafer transfer body 26 of the interface unit 14 accesses the wafer transfer table to receive the semiconductor wafer W, and as shown in FIG. The wafer is carried into an extension unit (EXT) and mounted on a wafer transfer table 258. Also in this case, the semiconductor wafer W may be temporarily stored in the buffer cassette BR in the interface unit 14 before being transferred to the processing station 12 side.

The above extension unit (EXT)
When the semiconductor wafer W is loaded into the main body, the main wafer carrier 24 accesses from the opposite side to receive the semiconductor wafer W,
The developer is carried into a developing unit (DEV) belonging to the multistage unit of the first set G1 or the second set G2. In the developing unit (DEV), the semiconductor wafer W is mounted on a spin chuck, and a developing solution is uniformly applied to the resist on the wafer surface by, for example, a spray method. When the development is completed, a rinsing liquid is applied to the wafer surface, and the developing liquid is washed away.

When the developing step is completed, the main wafer transfer mechanism 24 unloads the semiconductor wafer W from the developing unit (DEV), and then moves the post-baking unit belonging to the third set G3 or the multi-stage unit of the fourth set G4. (POBAK
Carry in E). In this unit (POBAKE), the semiconductor wafer W is placed on a hot plate 178, for example, 100
Heat at ゜ C for a predetermined time. Thereby, the resist swollen by the development is hardened, and the chemical resistance is improved.

When the post-baking is completed, the main wafer transfer mechanism 24 unloads the semiconductor wafer W from the post-baking unit (POBAKE), and then loads the semiconductor wafer W into one of the cooling units (COL). Here, after the semiconductor wafer W returns to normal temperature, the main wafer transfer mechanism 24
Next, the semiconductor wafer W is transferred to an extension unit (EXT) belonging to the third set G3.

This extension unit (EXT)
When the semiconductor wafer W is mounted on the mounting table 76 of FIG.
As shown in (1), the wafer carrier 22 on the cassette station 10 side accesses from the opposite side and receives the semiconductor wafer W. Then, the wafer carrier 22 puts the received semiconductor wafer W into a predetermined wafer accommodating groove of the cassette CR for accommodating the processed wafer on the cassette mounting table 20.

The busiest operation of the processing system is the main wafer transfer mechanism 24 in the processing station 12. The above-described wafer transfer operation is performed for a large number of semiconductor wafers W.
Is repeated one after another. Main wafer transfer mechanism 24
Transports the semiconductor wafer W between the units in the processing station 12 almost without interruption.

For each unit, the main wafer transfer mechanism 2
Reference numeral 4 denotes the rotation of the cylindrical support 94 in the θ direction and the vertical movement of the wafer carrier 96 at the same time, and the tweezers 106 are moved forward and backward in the X direction to receive the wafer W. Wafer transfer body 9 of main wafer transfer mechanism 24
6 has three tweezers 106A, 106B, and 106C, so that a desired unit is accessed while the semiconductor wafer W1 is held by, for example, the first tweezers 106A.
B, unloads the processed semiconductor wafer W2 from the unit, and then uses the first tweezers 106A to load the semiconductor wafer W2.
1 into the unit.

In this processing system, the processing station 1
2 are arranged in multiple stages around the main wafer transfer mechanism 24, and the wafer transfer members 9 of the main wafer transfer mechanism 24
Since the unit 6 can be moved vertically and / or rotated and does not move in the horizontal direction but can access all units, the access time is greatly reduced as compared with the related art.
As a result, the processing time of all the steps is significantly reduced, and the throughput is greatly improved. Also, the transport mechanism has been simplified.

Further, since all the units in the processing station 12 are arranged in multiple stages around the main wafer transfer mechanism 24, the occupied floor space (footprint) of the entire system is much smaller than before, and therefore, Low clean room cost. Further, there is an advantage that it is advantageous to apply the vertical laminar flow system in the system, that the cleaning efficiency is very high, and that the cost of equipment such as a filter is reduced.

The arrangement configuration of each unit in the processing system in the above embodiment is an example, and various modifications are possible.

For example, in the above-described embodiment, in the multi-stage unit configuration in the processing station 12, the first and second sets G1 and G2 each include a multi-stage spinner type processing unit arranged in two stages, and the third and fourth sets G1 and G2. In the sets G3 and G4, the oven-type processing unit and the wafer transfer unit are arranged in eight stages each in multiple stages, but any other number of stages are possible, and the spinner-type processing unit and the oven-type processing unit are included in one set. Alternatively, it is possible to mix a wafer delivery unit. It is also possible to add another processing unit such as a scrubber unit.

Further, as shown in FIGS. 1 and 24, the relative positional relationship between the cassette station 10 and the interface section 14 disposed on both sides of the processing station 12 can be reversed. The cassette station 10 and the interface unit 14 are detachably connected to the processing station 12 by connecting means BT such as bolts. Also, a control panel 264 attached to the front of the cassette station 10 is detachable. Thereby, it is possible to easily cope with a change in the layout. For example, it is possible to cope with a case where the exposure apparatus is disposed on either the left or right side. Also, there is no need for new design and production, and cost reduction can be achieved.

If an exposure apparatus is not provided adjacent to the processing system, the interface unit 14 is unnecessary, and
As shown in FIG. 25, it is also possible to adopt a system configuration in which only the cassette station 10 and the processing station 12 are connected. As shown in the illustrated example, a cassette mounting table 266 is provided in an empty space in the processing station 12, for example, behind the main wafer transfer mechanism 24, and the main wafer transfer mechanism 24 is mounted on the cassette CR mounted on this table. It can be configured so as to directly access the
(Not shown) can also be arranged.

Further, as shown in FIG. 26, a configuration may be adopted in which the cassette stations 10 are arranged on both left and right sides. Then, wafers of different lots are arranged on the left and right to enable continuous processing, and the flow of wafers is changed from left to right,
One-way or two-way traffic from right to left may be allowed. This makes it possible to improve productivity and improve responsiveness to layout changes.

Although the above embodiment relates to a resist coating and developing system used in a photolithography process for manufacturing a semiconductor device, the present invention can be applied to other processing systems, and a substrate to be processed can be used. Not limited to semiconductor wafers, LCD substrates, glass substrates, CDs
A substrate, a photomask, a printed substrate, a ceramic substrate, or the like is also possible.

[0111]

As described in the foregoing, according to the processing system of the present invention, greatly reduce the space occupied by the system, along with lowering the clean room cost, and enables high-speed conveyance or access speed, throughput Can be improved.

[0112]

[Brief description of the drawings]

FIG. 1 is a plan view showing the overall configuration of a resist coating and developing system according to an embodiment of the present invention.

FIG. 2 is a side view showing the overall configuration of the processing system according to the embodiment.

FIG. 3 is a rear view showing the overall configuration of the processing system according to the embodiment.

FIG. 4 is a schematic front view showing a flow of clean air in the processing system of the embodiment.

FIG. 5 is a schematic side view showing a flow of clean air in the processing system of the embodiment.

FIG. 6 is a schematic plan view illustrating a configuration of a cassette station in the processing system of the embodiment.

FIG. 7 is a schematic sectional side view showing a configuration of a cassette station in the processing system of the embodiment.

FIG. 8 is a perspective view showing a drive motor support structure in a wafer carrier of a cassette station to which the parallelism adjusting means according to the embodiment is applied.

9 is an enlarged partial cross-sectional view showing a main part of the parallelism adjusting means of FIG.

FIG. 10 is a schematic perspective view showing a configuration of a main part of a main wafer transfer mechanism in a processing station of the processing system of the embodiment.

FIG. 11 is a longitudinal sectional view illustrating a configuration of a main part of a main wafer transfer mechanism according to the embodiment.

FIG. 12 is a cross-sectional plan view seen in the direction of arrow A in FIG.

FIG. 13 is an inside side view seen in the direction of arrow B in FIG. 11;

14 is an inside side view seen in the direction of arrow C in FIG. 11;

FIG. 15 is a plan view illustrating a configuration of a main part in an alignment unit in the processing station according to the embodiment.

FIG. 16 is a side view showing a configuration of a main part in the alignment unit in the embodiment.

FIG. 17 is a plan view showing a configuration inside a baking unit in the embodiment.

FIG. 18 is a cross-sectional view showing a configuration inside a baking unit in the embodiment.

FIG. 19 is a partial side view illustrating a configuration of a wafer guide support protrusion in the baking unit of the embodiment.

20 is a fragmentary cross-sectional view showing the configuration of the wafer guide support protrusion of FIG. 19;

FIG. 21 is a cross-sectional view illustrating a configuration of an adhesion unit in the embodiment.

FIG. 22 is a side view illustrating a configuration of an interface unit of the processing system according to the embodiment.

FIG. 23 is a plan view illustrating a configuration of an interface unit according to the embodiment.

FIG. 24 is a plan view showing a modification of the processing system according to the embodiment.

FIG. 25 is a plan view showing another modification of the processing system in the embodiment.

FIG. 26 is a plan view showing another modification of the processing system in the embodiment.

FIG. 27 is a perspective view showing an example of a conventional resist coating and developing processing system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Cassette station 12 Processing station 14 Interface part 22 Wafer transfer mechanism of cassette station 24 Main wafer transfer mechanism 26 Wafer transfer mechanism of interface part 28 Peripheral exposure apparatus 94 Cylindrical support body 96 Wafer transfer body of main wafer transfer mechanism 98 Rotation Drive motor 112 Vertical drive belt 178 Hot plate 206 Wafer guide and support means 220 Processing container of adhesion unit 230 Exhaust port G1 to G5 Multistage unit

──────────────────────────────────────────────────の Continued on the front page (72) Koji Harada, Inventor 2655 Tsukurei, Kikuyo-cho, Kikuchi-gun, Kumamoto Prefecture Tokyo Electron Kyushu Co., Ltd. (72) Kazunari Ueda 2655 Tsukurei, Kikuyo-cho, Kikuchi-gun, Kumamoto East (56) References JP-A-63-5523 (JP, A) JP-A-3-274746 (JP, A) JP-A-5-178416 (JP, A) JP-A-5-183041 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01L 21/027 H01L 21/68

Claims (20)

(57) [Claims] 1. A opening in the side surface is formed, a cylindrical support member being rotatable vertical axis of the central portion as a rotation center axis, said barrel
A rotating drive means for rotating the support, and a substrate support provided movably in the vertical direction inside the cylindrical support and movable in the horizontal direction through the side opening. A substrate carrier, and the substrate carrier to be processed
A first substrate transporting means is constituted by an elevating drive means for vertically moving inside the cylindrical support, and one or a plurality of single-wafer units are provided around the first substrate transporting means. A plurality of units are arranged in a set, and the first substrate-to-be-processed transporting unit transports the substrate to be processed to a plurality of units in a predetermined order, so that a series of processing is performed on the substrate to be processed. A processing system, characterized in that: Wherein the opening on the side surface is formed, a cylindrical support member being rotatable vertical axis of the central portion as a rotation center axis, said barrel
A rotating drive means for rotating the support, and a substrate support provided movably in the vertical direction inside the cylindrical support and movable in the horizontal direction through the side opening. A substrate carrier, and the substrate carrier to be processed
A first substrate transporting means is constituted by an elevating drive means for vertically moving inside the cylindrical support, and a substrate to be processed is placed on a mounting table around the first substrate transporting means. One or more sets of oven-type single-wafer processing units for performing the processing are arranged in multiple stages, and the spinner-type single-wafer processing unit for performing a predetermined processing by placing the substrate to be processed on a spin chuck. One or a plurality of sets are arranged in multiple stages, and the first substrate transfer means conveys the substrate to be processed to the plurality of single-wafer processing units in a predetermined order. A processing system wherein a series of processing is performed. 3. The processing system according to claim 2, wherein
Each set including the oven-type single-wafer processing unit
The multi-stage unit may be any other set of the multi-stage arrangement.
Is also separated from the single-wafer unit
Processing system. 4. The processing system according to claim 2, wherein
The spinner-type single-wafer processing unit.
Two sets of said multistage units are juxtaposed to each other
A processing system, characterized in that: 5. The processing system according to claim 2, wherein
The spinner-type single- wafer processing unit
The set of multi-stage units includes the substrate to be processed.
Coating unit that applies a resist to the surface of the
The developer is supplied to the surface of the substrate and the substrate to be processed, and
Selectively the exposed or unexposed areas of the resist film on the surface
A developing unit for dissolving in a developing solution is provided.
That the image unit is arranged on the coating unit
Characteristic processing system. 6. The processing system according to claim 2, wherein
The oven-type single-wafer processing unit arranged in the multi-stage
Pre-bake or post-bake on the substrate to be processed.
A baking unit for performing a baking process;
Adhesion for applying adhesion processing to the substrate
A processing system characterized by including a unit. 7. The processing system according to claim 1,
In the stem, a cassette for accommodating the substrate to be processed in multiple stages is placed at a predetermined position.
And the unprocessed substrate is removed from the cassette.
Take out and process the processed substrate into the cassette
Cassette having second substrate transfer means for returning substrate
A station is set in a predetermined set of the multi-stage
Disposed adjacent to the knit, and in the predetermined set of the multi-tiered single-wafer units.
And a first substrate transfer means for transferring the substrate to be processed.
Means via the second means on the cassette station side
Transfer the substrate to be processed and the substrate to be processed
A processing system characterized by: 8. The processing system according to claim 1,
In the system, the substrate to be processed is transported to another adjacent processing system.
Or a third for unloading from said other single-wafer system.
The interface unit having the substrate transfer means to be processed is
Arranged adjacent to the set of multi-tiered single-wafer units
And the predetermined set of the multi-tiered single-wafer units
And a first substrate transfer means for transferring the substrate to be processed.
Through the means, the third processing on the interface unit side
Transfer the substrate to be processed and the substrate to be processed
A processing system characterized by: 9. The processing system according to claim 8, wherein
Outside the substrate to be processed in the interface section.
A peripheral exposure device for exposing the periphery is built in.
Processing system characterized in that: 10. The processing system according to claim 8, wherein
Then, the substrate to be processed is placed in the interface section.
Relatively large substrate to be stored occasionally in multiple stages
A buffer cassette having a board storage interval is provided.
A processing system, characterized in that: 11. The processing according to claim 1
In a physical system, any of the sets of
Single-wafer unit is configured to be able to move integrally in a predetermined direction
A processing system characterized in that: 12. The processing according to claim 1,
In the processing system, the substrate to be processed is
Drive shafts that are attached to the
Connected to the cylinder and rodless cylinder.
Characteristic processing system. 13. The processing system according to claim 12, wherein
The support is connected to the substrate transfer means side.
Process characterized by having an exhaust passage through which
system. 14. The processing system according to claim 2, wherein
The oven type processing unit and the spinner type processing
Note that a cooling duct is provided between
Processing system 15. The processing system according to claim 2, wherein
Each of the oven-type processing units has a common frame.
Each of which is detachably mounted on a slide
And a processing system characterized by: 16. The processing system according to claim 6, wherein
The adhesion unit is processed in a processing vessel.
Processing gas introduction means for introducing a gas;
Exhaust means for exhausting the gas.
Do not evacuate the vessel without substantially reducing
The processing gas is introduced into the container by the processing gas introducing means.
A processing system characterized by introducing the following. 17. The processing according to claim 1,
Clean air in the processing system
An air supply means is provided above the processing system for processing.
Exhaust the air supplied in a down flow into the system
Air outlet at the bottom of the processing system
Means and said exhaust port outside or behind the processing system
A processing system characterized by being connected to an arranged air conditioner
Tem. 18. The processing system according to claim 15,
Control the temperature of the clean air introduced into the processing system.
Temperature control means for controlling to the desired set value should be provided.
And a processing system characterized by: 19. The processing system according to claim 17,
Clean air introduced into the processing system
Humidity adjusting means for controlling air humidity to a desired set value
A processing system comprising: 20. The processing system according to claim 6, wherein
The baking unit places the substrate to be processed.
A mounting table for carrying out processing and an outer peripheral edge of the substrate to be processed.
The substrate to be processed,
In a state of being floated at a predetermined distance from the surface of the mounting table
Substrate plan to be provided on the mounting table to support
A processing system comprising: an internal support means.