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JP3244835B2 - Manufacturing method of printed wiring board - Google Patents

Manufacturing method of printed wiring board

Info

Publication number
JP3244835B2
JP3244835B2 JP01102893A JP1102893A JP3244835B2 JP 3244835 B2 JP3244835 B2 JP 3244835B2 JP 01102893 A JP01102893 A JP 01102893A JP 1102893 A JP1102893 A JP 1102893A JP 3244835 B2 JP3244835 B2 JP 3244835B2
Authority
JP
Japan
Prior art keywords
photoconductive layer
toner
electrodeposition
substrate
printed wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP01102893A
Other languages
Japanese (ja)
Other versions
JPH06224541A (en
Inventor
建二 兵頭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Paper Mills Ltd
Original Assignee
Mitsubishi Paper Mills Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Paper Mills Ltd filed Critical Mitsubishi Paper Mills Ltd
Priority to JP01102893A priority Critical patent/JP3244835B2/en
Publication of JPH06224541A publication Critical patent/JPH06224541A/en
Priority to US08/391,475 priority patent/US5494764A/en
Application granted granted Critical
Publication of JP3244835B2 publication Critical patent/JP3244835B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、電子写真法を用いたプ
リント配線板の作製方法に関し、より詳しくは電着法に
より配線版基板上に設けた光導電層上に電子写真反転現
像法によってトナー画像を設ける、新規なプリント配線
板の作製方法に関し、ストリッパ処理に先立って微細な
スルーホール内部に於てもトナー層が形成されたプリン
ト配線板の作製方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed circuit board using electrophotography, and more particularly, to a method for electrophotographic reversal development on a photoconductive layer provided on a wiring board by an electrodeposition method. The present invention relates to a method for manufacturing a novel printed wiring board provided with a toner image, and to a method for manufacturing a printed wiring board in which a toner layer is formed even inside a fine through hole prior to stripper processing.

【0002】[0002]

【従来の技術】従来、プリント配線板を作製するには、
一般に絶縁性基板に銅箔を張った積層板上に感光性フィ
ルムをラミネートし、写真ネガを重ねて露光及び現像し
た後、回路パターン以外の不要の銅箔をエッチング処理
して除去し、しかる後に感光性フィルムを脱膜すること
により絶縁性基板上にプリント回路を形成していた。こ
の感光性フィルムを用いた方法では、感光性フィルムの
厚みが一般に約50μmと厚いため、露光及び現像して
形成される回路パターンがシャープにならず、しかも銅
箔表面に均一にラミネートすることが困難であり、特に
スルーホール部分を被覆することは殆ど不可能であっ
た。
2. Description of the Related Art Conventionally, to manufacture a printed wiring board,
In general, after laminating a photosensitive film on a laminated board with copper foil on an insulating substrate, overlaying a photographic negative and exposing and developing, unnecessary copper foil other than the circuit pattern is removed by etching, and then A printed circuit was formed on an insulating substrate by removing the photosensitive film. In the method using this photosensitive film, since the thickness of the photosensitive film is generally as large as about 50 μm, the circuit pattern formed by exposure and development is not sharp, and it is possible to laminate the film uniformly on the copper foil surface. It was difficult, and in particular, it was almost impossible to cover the through-hole portion.

【0003】そこで、感光性フィルムの解像性等を向上
させるため、特開昭62−262855号、同64−4
672号公報等に、電着法による基材への感光性レジス
ト形成方法が開示されている。電着法による感光性層の
形成では、ラミネート法に比して感光性層の均一な薄層
化が可能であるものの、電着用フォトレジストは一般的
に感度が低かった。従って、光照射部を処理液に可溶化
させる所謂ポジ型の場合、十分な溶解性を得るには数百
mJ/cm2程度のエネルギーが必要であって、光照射を
レーザー等を用いて行なうには不適当であった。また、
スルーホール内部に光を照射することは困難であった。
In order to improve the resolution and the like of a photosensitive film, Japanese Patent Application Laid-Open Nos.
No. 672 discloses a method for forming a photosensitive resist on a substrate by an electrodeposition method. In the formation of the photosensitive layer by the electrodeposition method, although the photosensitive layer can be uniformly thinned as compared with the lamination method, the sensitivity of the electrodeposition photoresist is generally low. Therefore, in the case of a so-called positive type in which a light irradiation part is solubilized in a processing liquid, energy of about several hundred mJ / cm 2 is required to obtain sufficient solubility, and light irradiation is performed using a laser or the like. Was inappropriate. Also,
It was difficult to irradiate light inside the through-hole.

【0004】一方、感光性のレジスト以外の方法による
プリント配線板の作製方法として、電子写真法を利用し
た方法が西独特許第1,117,391号、同第2,52
6,720号、同第3,210,577号、特開昭52−
2437号、同57−48736号、同59−1684
62号公報等に提案されており、特開昭63−1296
89号公報では特にレーザーの波長に感度を有する電子
写真感光体を利用したプリント配線板作製法が提案され
ている。この電子写真法を利用したレーザーによる直接
回路描画では、必要露光量が50〜1μJ/cm2と低
く、従って使用するレーザーも低価格で低出力の半導体
レーザー等の使用が可能であるが、使用する光導電層
は、光導電性化合物を適当な絶縁性樹脂とともに有機溶
媒に分散もしくは溶解させた塗液を導電性基板に塗布す
るか、もしくは一旦仮基板に塗布したものを熱と圧力に
より導電性基板上に転写するかして設けられていたた
め、スルーホール内に光導電層を均一に設けることはで
きなかった。
On the other hand, as a method of manufacturing a printed wiring board by a method other than a photosensitive resist, a method utilizing electrophotography is disclosed in West German Patent Nos. 1,117,391 and 2,52.
No. 6,720, No. 3,210,577;
No. 2437, No. 57-48736, No. 59-1684
62, etc., and JP-A-63-1296.
No. 89 proposes a method for producing a printed wiring board using an electrophotographic photosensitive member having sensitivity to a laser wavelength. In direct circuit drawing by a laser using this electrophotography, the required exposure amount is as low as 50 to 1 μJ / cm 2, and therefore, the laser used can be a low-cost, low-output semiconductor laser or the like. For the photoconductive layer to be formed, a coating liquid in which a photoconductive compound is dispersed or dissolved in an organic solvent together with a suitable insulating resin is applied to a conductive substrate, or a coating once applied to a temporary substrate is applied by heat and pressure. The photoconductive layer could not be uniformly provided in the through-hole because it was transferred or provided on a conductive substrate.

【0005】[0005]

【発明が解決しようとする課題】本発明は、電気絶縁性
基板の両面に金属導電層を設けた導電性基板金属導電層
上に光導電層を設け、更に該光導電層上に電子写真法に
よりトナー画像を形成させ、次いでストリッパを用いて
トナー付着部以外の光導電層を溶解除去し、かつ場合に
応じて光導電層除去部基板表面をエッチングするプリン
ト配線板の作製方法に於て、露光画像再現性に優れ、ス
ルーホール内も均一な処理が行なえ、かつ電子写真の高
感度特性を活かしたプリント配線板の作製方法を提供す
ることにある。更に詳しくは、スルーホール内へも均一
に光導電層を設けることの可能なプリント配線板の作製
方法を提供することにある。
SUMMARY OF THE INVENTION The present invention relates to a conductive substrate having a metal conductive layer provided on both sides of an electrically insulating substrate, a photoconductive layer provided on the metal conductive layer, and an electrophotographic method provided on the photoconductive layer. Forming a toner image, and then using a stripper to dissolve and remove the photoconductive layer other than the toner-attached portion, and, if necessary, in a method of manufacturing a printed wiring board in which the photoconductive layer-removed portion substrate surface is etched. An object of the present invention is to provide a method for manufacturing a printed wiring board which has excellent reproducibility of an exposed image, can perform uniform processing even in a through hole, and utilizes the high sensitivity characteristics of electrophotography. More specifically, it is an object of the present invention to provide a method for manufacturing a printed wiring board that can uniformly provide a photoconductive layer even in a through hole.

【0006】[0006]

【課題を解決するための手段】本発明者らは上記問題を
解決するため検討した結果、電気絶縁性基板の両面に金
属導電層を設けた導電性基板金属導電層上に電着法によ
り光導電層を設け、更に該光導電層上に反転現像を用い
る電子写真法によりトナー画像を形成させ、次いでトナ
ー画像部以外の光導電層を溶解除去し、かつ場合に応じ
て光導電層除去部基板表面をエッチングするプリント配
線板の作製方法に於て、反転現像の電極を基板の両側に
設ければ良いことを見出し、本発明に至った。
Means for Solving the Problems The present inventors have studied to solve the above-mentioned problems, and as a result, have found that light is deposited on a conductive substrate metal conductive layer by providing a metal conductive layer on both surfaces of an electrically insulating substrate by an electrodeposition method. Providing a conductive layer, further forming a toner image on the photoconductive layer by electrophotography using reversal development, then dissolving and removing the photoconductive layer other than the toner image area, and optionally removing the photoconductive layer. In a method of manufacturing a printed wiring board for etching a substrate surface, it has been found that electrodes for reversal development may be provided on both sides of the substrate, and the present invention has been accomplished.

【0007】則ち、本発明はプリント配線版用金属導電
性基板を電極として電着法により光導電性を示す化合物
及び電着樹脂を電着して導電性基板上及びまたはスルー
ホール内に光導電性層を形成させ、トナー液を介して基
板の両側に基板の面に対面させて電極を設け反転現像を
行う電子写真法により光導電層上にトナー画像を形成さ
せた後にトナー画像部以外の非画像部光導電層をストリ
ッパにより溶解除去し、かつ必要な場合には更に非画像
部金属導電層をエッチング処理してプリント配線板を作
製するものである。
According to the present invention, a compound having photoconductivity and an electrodeposition resin are electrodeposited by an electrodeposition method using a metal conductive substrate for a printed wiring board as an electrode, and light is deposited on the conductive substrate and / or in a through hole. After forming a conductive layer, providing an electrode on both sides of the substrate via the toner liquid and facing the surface of the substrate, and performing reversal development, forming a toner image on the photoconductive layer by electrophotography, and then excluding the toner image portion The non-image portion photoconductive layer is dissolved and removed by a stripper, and if necessary, the non-image portion metal conductive layer is further subjected to etching treatment to produce a printed wiring board.

【0008】電着法は20年以上前から行なわれている
塗装方法の一種で、既に自動車のボディーの塗装や一部
のプリント基板用フォトレジストの塗装方法として実用
化されており、基材への追従性が良く、かつ基材の表面
形状に関係なく膜厚を均一化できる等の特徴を有してお
り、一般にカチオン性もしくはアニオン性を有する樹脂
の水分散液中に電極を浸漬させて電流を流し、電極表面
にそれらのイオン種を泳動させて電極表面で化学反応を
起こさせ、イオン性を喪失させることにより樹脂を水不
溶化させる方法である。
[0008] The electrodeposition method is a kind of coating method which has been performed for more than 20 years, and has already been put to practical use as a method for coating a body of an automobile or a photoresist for a part of a printed circuit board. The electrode has good characteristics of conforming to the surface, and has a feature that the film thickness can be made uniform irrespective of the surface shape of the substrate. Generally, the electrode is immersed in an aqueous dispersion of a resin having a cationic or anionic property. In this method, a current is applied to cause the ion species to migrate on the electrode surface to cause a chemical reaction on the electrode surface to lose ionicity, thereby insolubilizing the resin with water.

【0009】本発明の電着に使用する樹脂としては、プ
リント配線板基板を電極として通常の電着法により基板
上に水不溶性の樹脂層が形成でき、更に帯電性を含む電
子写真特性を満足し、ストリッパによる適度な溶解性を
有するものでなければならない。特にプリント配線板光
導電層除去部基板表面(銅層)を酸性エッチング処理す
るのであれば、耐エッチング性を発現させるために、ア
ニオン性官能基を有する樹脂が有利に使用される。形成
された樹脂層がアニオン性モノマの構成比が高いと水に
再溶解し易く、樹脂皮膜が脆弱になり、更にイオン電導
性が高くなって暗帯電性等の電子写真特性が悪化するの
で、本発明に係わる電着樹脂にはアニオン性モノマに非
イオン性モノマを共重合させて樹脂組成を適宜調整す
る。
As the resin used for the electrodeposition of the present invention, a water-insoluble resin layer can be formed on the substrate by a usual electrodeposition method using a printed wiring board substrate as an electrode, and the electrophotographic properties including the chargeability are satisfied. However, it must have appropriate solubility with a stripper. In particular, if the substrate surface (copper layer) of the printed wiring board photoconductive layer-removed portion substrate is subjected to an acidic etching treatment, a resin having an anionic functional group is advantageously used in order to develop etching resistance. If the formed resin layer has a high composition ratio of anionic monomer, it is easily redissolved in water, the resin film becomes brittle, and the ionic conductivity is further increased, and the electrophotographic properties such as dark charging property are deteriorated. The resin composition of the electrodeposition resin according to the present invention is appropriately adjusted by copolymerizing an anionic monomer with a nonionic monomer.

【0010】アニオン性官能基を有する樹脂中、特にカ
ルボン酸基を有するモノマ含有共重合体及びフェノ−ル
樹脂は、電荷保持力が高く有利に使用できる。カルボン
酸基を有するモノマ含有共重合体としては、スチレンと
マレイン酸モノエステルとの共重合体、アクリル酸或は
メタクリル酸とそれらのアルキルエステル、アリ−ルエ
ステルまたはアラルキルエステルとの二元以上の共重合
体が好ましい。また、酢酸ビニルとクロトン酸との共重
合体も良い。フェノ−ル樹脂中特に好ましいものとして
は、フェノ−ル、o-クレゾ−ル、m-クレゾ−ル、或はp-
クレゾ−ルとホルムアルデヒドまたはアセトアルデヒド
とを酸性条件下で縮合させたノボラック樹脂を挙げるこ
とができる。
[0010] Among resins having an anionic functional group, particularly, a monomer-containing copolymer having a carboxylic acid group and a phenol resin have a high charge retention ability and can be advantageously used. Examples of the monomer-containing copolymer having a carboxylic acid group include a copolymer of styrene and maleic acid monoester, and a copolymer of acrylic acid or methacrylic acid and their alkyl esters, aryl esters or aralkyl esters. Polymers are preferred. Further, a copolymer of vinyl acetate and crotonic acid is also good. Particularly preferred among phenol resins are phenol, o-cresol, m-cresol, and p-cresol.
A novolak resin obtained by condensing cresol with formaldehyde or acetaldehyde under acidic conditions can be mentioned.

【0011】本発明に係わる電着樹脂の具体例として
は、スチレン/マレイン酸モノアルキルエステル共重合
体、メタクリル酸/メタクリル酸エステル共重合体、ス
チレン/メタクリル酸/メタクリル酸エステル共重合
体、アクリル酸/メタクリル酸エステル共重合体、スチ
レン/アクリル酸/メタクリル酸エステル共重合体、酢
酸ビニル/クロトン酸共重合体、酢酸ビニル/クロトン
酸/メタクリル酸エステル共重合体等のスチレン、アク
リル酸エステル、メタクリル酸エステル、酢酸ビニル、
安息香酸ビニル等とアクリル酸、メタクリル酸、イタコ
ン酸、クロトン酸、マレイン酸、フマル酸等のカルボン
酸含有モノマとの共重合体や、メタクリル酸アミド、フ
ェノ−ル性水酸基、スルホン酸基、スルホンアミド基、
スルホンイミド基、ホスホン酸基を有するモノマを含有
する共重合体、フェノール樹脂、キシレン樹脂等が挙げ
られる。これら電着樹脂は単独でも、或は2種以上を混
合して用いても良い。
Specific examples of the electrodeposition resin according to the present invention include styrene / maleic acid monoalkyl ester copolymer, methacrylic acid / methacrylic acid ester copolymer, styrene / methacrylic acid / methacrylic acid ester copolymer, acrylic Styrene and acrylic acid esters such as acid / methacrylic acid ester copolymer, styrene / acrylic acid / methacrylic acid ester copolymer, vinyl acetate / crotonic acid copolymer, vinyl acetate / crotonic acid / methacrylic acid ester copolymer; Methacrylate, vinyl acetate,
Copolymers of vinyl benzoate and the like with carboxylic acid-containing monomers such as acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid and fumaric acid, methacrylamide, phenolic hydroxyl group, sulfonic acid group, sulfone An amide group,
Examples thereof include a copolymer containing a monomer having a sulfonimide group and a phosphonic acid group, a phenol resin, and a xylene resin. These electrodeposition resins may be used alone or in combination of two or more.

【0012】電着するに当たっては、上記電着樹脂を少
なくとも電着液中に均一分散させるかより好ましくは溶
解させておく必要がある。そのためには、上記樹脂中の
アニオン性基を有機もしくは無機の塩基で一部または、
全部を中和しておくことが好ましい。無機の塩基として
は例えば炭酸ナトリウム、水酸化ナトリウム、水酸化カ
リウム、アンモニア等をまた、有機の塩基としてはトリ
エチルアミン、エタノールアミン等を用いることができ
る。
For electrodeposition, it is necessary to uniformly disperse the above electrodeposition resin at least in the electrodeposition solution or more preferably to dissolve it. To that end, the anionic group in the resin is partially or organically or inorganicly base,
It is preferable to neutralize all of them. As the inorganic base, for example, sodium carbonate, sodium hydroxide, potassium hydroxide, ammonia and the like can be used. As the organic base, triethylamine, ethanolamine and the like can be used.

【0013】光導電層に用いる光導電性材料としては、
有機及びまたは無機の光導電性材料が使用できる。無機
光導電性材料としては、硫化カドミウム、酸化亜鉛、酸
化チタン等を挙げることが出来る。また、有機光導電性
材料としては、無金属或は金属(酸化物)フタロシアニ
ン及びナフタロシアニン、及びその誘導体等がある。さ
らに必要に応じてペリノン化合物、オキサジアゾール化
合物、アンザンスロン化合物、増感色素等を併用しても
良い。
As the photoconductive material used for the photoconductive layer,
Organic and / or inorganic photoconductive materials can be used. Examples of the inorganic photoconductive material include cadmium sulfide, zinc oxide, and titanium oxide. Examples of the organic photoconductive material include metal-free or metal (oxide) phthalocyanine and naphthalocyanine, and derivatives thereof. Further, if necessary, a perinone compound, an oxadiazole compound, an anthranthrone compound, a sensitizing dye or the like may be used in combination.

【0014】本発明の電着に使用する電着液浴は基本的
には上記の光導電性化合物と樹脂との水混合物からなっ
ているが、水の代わりに、又水と混合して有機溶媒を使
用することもできる。また、樹脂成分や光導電性化合物
が水や有機溶媒中に分散している状態でも一部溶解して
いる状態でも良い。樹脂に対する光導電性化合物の量は
樹脂組成によっても異なるが概ね樹脂量の0.1重量部
から40重量部程度の範囲が好ましい。また、電着液浴
の固形分濃度は、1重量%から30重量%の範囲内で一
定に保った方が通電量による膜厚の管理がしやすい。
The electrodeposition solution bath used for the electrodeposition of the present invention is basically composed of a water mixture of the above-mentioned photoconductive compound and resin. Solvents can also be used. Further, the resin component or the photoconductive compound may be in a state of being dispersed in water or an organic solvent or in a state of being partially dissolved. The amount of the photoconductive compound with respect to the resin varies depending on the resin composition, but is preferably in the range of about 0.1 to 40 parts by weight of the resin. Further, when the solid content concentration of the electrodeposition liquid bath is kept constant within the range of 1% by weight to 30% by weight, the film thickness can be easily controlled by the amount of electricity.

【0015】本発明に係わる電気絶縁性基板に金属導電
層を設けた導電性基板としては、「プリント回路技術便
覧」(社団法人日本プリント回路工業会編、1987年
刊行、日刊工業新聞社発行)に記載されているような一
般のフェノール樹脂含浸積層板、エポキシ樹脂含浸積層
板等に銅箔を貼り合わせたものを使用することができ
る。
As the conductive substrate provided with a metal conductive layer on the electrically insulating substrate according to the present invention, "Printed Circuit Technology Handbook" (edited by Japan Printed Circuit Industry Association, published in 1987, published by Nikkan Kogyo Shimbun) And a general phenolic resin-impregnated laminate, an epoxy resin-impregnated laminate, or the like, as described in (1), and a copper foil bonded thereto.

【0016】光導電層は薄いとトナ−現像に必要な電荷
が帯電できず、逆に厚いとストリッパの劣化を促進する
ばかりか非画像部光導電層除去の際に画線細りを誘引し
て再現性の良好な画像が得られないため、膜厚を0.5
0〜10μmに調整するよう電着条件を設定することが
肝要である。
If the photoconductive layer is thin, the charge required for toner development cannot be charged. Conversely, if the photoconductive layer is thick, not only the deterioration of the stripper is promoted, but also the thinning of the image is caused when the non-image portion photoconductive layer is removed. Since an image having good reproducibility cannot be obtained, the film thickness is set to 0.5.
It is important to set the electrodeposition conditions so as to adjust to 0 to 10 μm.

【0017】銅箔の厚さは種々の厚さのものが使用でき
るが一般には35μmから5μmのものが使われている
がそれよりも厚いものや薄いものも使用することができ
る。配線密度が高くなり導体の線幅が細くなるにつれて
銅箔は、薄手のものを使用した方が良い。
As the thickness of the copper foil, various thicknesses can be used. Generally, a thickness of 35 μm to 5 μm is used, but a thicker or thinner one can also be used. As the wiring density becomes higher and the line width of the conductor becomes thinner, it is better to use a thin copper foil.

【0018】電着は基本的にはプリント配線用導電性基
板と適当な金属からなる対極とを上記電着樹脂と光導電
性化合物とを含む溶液中に入れ、プリント配線用導電性
基板と対極との間に適当な電位を印加することにより行
う。
In the electrodeposition, basically, a conductive substrate for printed wiring and a counter electrode made of a suitable metal are placed in a solution containing the above electrodeposited resin and a photoconductive compound, and the conductive substrate for printed wiring and the counter electrode are And by applying an appropriate potential between them.

【0019】画像を形成させる為のトナーは、電子写真
印刷版に使用する湿式トナーを使用することができる
が、後工程である非画像部の光導電層の除去、及びそれ
により露出する導電性層のエッチング等に対して耐性を
有したものでなければならない。また、その荷電は使用
する光導電性化合物及びコロナ帯電の際の帯電極性、さ
らに現像方式に応じて正、負を使い分ける必要がある。
As a toner for forming an image, a wet toner used for an electrophotographic printing plate can be used. However, in a later step, removal of a photoconductive layer in a non-image portion, and the exposed conductive material are performed. It must be resistant to etching of the layer and the like. In addition, it is necessary to use either positive or negative charging depending on the photoconductive compound to be used, the charging polarity at the time of corona charging, and the developing method.

【0020】 トナー現像は一般の電子写真印刷板の現
像と同様に帯電露光した上記感光体をトナー分散液中と
接触させることにより行うが、その現像方法は大別する
と、静電潜像と反対の極性の荷電を有するトナーを用い
る正現像法、静電潜像と同じ極性を有するトナーを用い
る反転現像法とがある。スルーホールを有するようなプ
リント配線板の場合、スルーホールの穴径に比べ基板の
厚みが大きいような場合、則ち穴径と厚みのいわゆるア
スペクト比が大きい時にはスルーホール内部に静電潜像
を形成しにくくなる。このような場合、スルーホール内
に形成される静電潜像の電位はあまり高くすることがで
きず、静電潜像と反対の極性の荷電を有するトナーを利
用した正現像方式の場合、スルーホール内部に均一にト
ナー層を形成させることは困難であり、静電潜像と同じ
極性を持つトナーを利用していわゆる反転現像方式をと
る必要がある。
The toner development is performed by bringing the above-mentioned charged photoconductor into contact with a toner dispersion liquid in the same manner as in the development of a general electrophotographic printing plate. And a reversal development method using a toner having the same polarity as the electrostatic latent image. In the case of a printed wiring board having a through hole, when the thickness of the substrate is larger than the hole diameter of the through hole, that is, when the so-called aspect ratio of the hole diameter and thickness is large, an electrostatic latent image is formed inside the through hole. It becomes difficult to form. In such a case, the potential of the electrostatic latent image formed in the through hole cannot be too high, and in the case of the normal development method using a toner having a charge of the opposite polarity to the electrostatic latent image, the It is difficult to form a uniform toner layer inside the hole, and it is necessary to adopt a so-called reversal development method using a toner having the same polarity as the electrostatic latent image.

【0021】形成された光導電層の露光には前述したよ
うにレーザー光源等を用いることもできるが、これは使
用する光導電性化合物の種類等によりことなる。例えば
χ型のフタロシアニンを用いると半導体レーザーを使用
することができ、ε型銅フタロシアニン、及び500n
m前後に分光吸収を持つアンザンスロン化合物を用いる
とアルゴンレーザーを使用することができる。
As described above, a laser light source or the like can be used for exposing the formed photoconductive layer, but this depends on the type of the photoconductive compound used and the like. For example, when a フ タ -type phthalocyanine is used, a semiconductor laser can be used.
When an anthrone compound having a spectral absorption around m is used, an argon laser can be used.

【0022】トナー現像した上記光導電層のトナー画像
が形成されていない部分を溶解除去する方法としてスト
リッパーが用いられるが、基本的にはアルカリ現像液を
使用したPS版用の現像処理器を使用することができ
る。
A stripper is used as a method for dissolving and removing the toner-developed portion of the photoconductive layer where the toner image is not formed. Basically, a PS plate developing processor using an alkali developing solution is used. can do.

【0023】エッチングは、上記ストリッパにより光導
電性層が取り除かれ露出した銅箔を取り除く工程であ
り、前述した「プリント回路技術便覧」(社団法人日本
プリント回路工業会編、1987年刊行、日刊工業新聞
社発行)記載の装置等を使用することができる。また、
エッチング液も銅箔を溶解除去できるものであれば良
く、一般のプリント基板用エッチング液を使用すること
ができる。
The etching is a step of removing the exposed copper foil by removing the photoconductive layer by the above-mentioned stripper. The above-mentioned "Printed Circuit Technology Handbook" (edited by the Japan Printed Circuit Industry Association, published in 1987, Nikkan Kogyo) An apparatus described in a newspaper company) can be used. Also,
The etchant may be any one that can dissolve and remove the copper foil, and a general etchant for printed circuit boards can be used.

【0024】エッチング工程を経ることにより基本的に
は回路に必要な銅箔のパターンは得られるがエッチング
されなかった部分には光導電層及びトナーが存在してい
る。これらはそのまま存在していても良いが回路構成部
品、チップ等の接続の際に不要となる場合がある。この
ときは、一般の感光性高分子を利用したプリント配線板
製造時と同様にさらにアルカリ度の強い溶液で処理する
ことによりこれらを除去することができる。また、必要
によってはメチルエチルケトン、ジオキサンの様な有機
溶剤を使用することもできる。
Although a copper foil pattern necessary for a circuit can be basically obtained through the etching step, the photoconductive layer and the toner are present in the portions that have not been etched. These may be present as they are, but may not be necessary when connecting circuit components, chips, and the like. In this case, as in the case of manufacturing a printed wiring board using a general photosensitive polymer, these can be removed by treating with a solution having a higher alkalinity. Further, if necessary, an organic solvent such as methyl ethyl ketone or dioxane can be used.

【0025】電着工程は通常の電着塗装と同様な装置を
使用することができ、電着層に電着する基材電極と電気
を流す為の対極とを入れ、電極間に直流電流を流すこと
により光導電性層を形成することができる。形成された
光導電性層は、そのままでは一般的に多孔性であるが、
熱乾燥させることによりその穴が埋まり均一な層とな
る。また、この乾燥工程を経ることにより安定した暗闇
帯電性を持たすことができるようになる。
In the electrodeposition step, the same apparatus as that used in the ordinary electrodeposition coating can be used. A base electrode to be electrodeposited on the electrodeposition layer and a counter electrode for passing electricity are provided, and a direct current is applied between the electrodes. By flowing, a photoconductive layer can be formed. The formed photoconductive layer is generally porous as it is,
The holes are filled by heat drying to form a uniform layer. In addition, through the drying step, a stable dark charging property can be obtained.

【0026】[0026]

【実施例】本発明を実施例により更に具体的に説明する
が、本発明はその主旨を越えない限り、下記の実施例に
限定されるものではない。
EXAMPLES The present invention will be described more specifically with reference to examples, but the present invention is not limited to the following examples unless it exceeds the gist of the invention.

【0027】電着用樹脂の作製 メチルメタクリレート40重量部、ブチルアクリレート
40重量部、アクリル酸20重量部およびアゾビスイソ
ブチロニトリル2重量部からなる混合液を窒素ガス雰囲
気下において100℃に保持したジオキサン90重量部
中に3時間をかけて滴下し、さらに5時間かけてアクリ
ル樹脂溶液を得た。
Preparation of Electrodeposition Resin A mixture of 40 parts by weight of methyl methacrylate, 40 parts by weight of butyl acrylate, 20 parts by weight of acrylic acid and 2 parts by weight of azobisisobutyronitrile was kept at 100 ° C. in a nitrogen gas atmosphere. It was added dropwise to 90 parts by weight of dioxane over 3 hours, and an acrylic resin solution was obtained over 5 hours.

【0028】電着 先に作製した電着用樹脂溶液50重量部にχ型無金属フ
タロシアニン(大日本インキ(株)製、商品名:Fastogen
blue #8120)1重量部を添加後、トリエチルアミンを加
えて中和し、固形分含有率が10重量%になるよう更に
脱イオン水を加えて電着用浴とした。この電着用浴を用
いて直径0.6mm及び1.2mmのスルーホールを多
数有するプリント配線板用両面銅張り積層板(300×
300×1.6mm、銅箔厚:18μm)を陽極とし、
浴温25℃で120Vの直流電流を1分間通電して電着
を行った。得られた皮膜を水洗し、70℃で10分間乾
燥して厚さ約5μmの平滑な光導電性層を両面に有する
銅張り積層板を得た。
Fifty parts by weight of the resin solution for electrodeposition prepared at the electrodeposition destination were mixed with a χ-type metal-free phthalocyanine (Fastogen, manufactured by Dainippon Ink Co., Ltd.)
blue # 8120) After addition of 1 part by weight, triethylamine was added for neutralization, and deionized water was further added so that the solid content became 10% by weight to form an electrodeposition bath. Using this electrodeposition bath, a double-sided copper-clad laminate for printed wiring boards having a large number of through holes having a diameter of 0.6 mm and 1.2 mm (300 ×
300 × 1.6 mm, copper foil thickness: 18 μm) as an anode,
Electrodeposition was performed by applying a DC current of 120 V for 1 minute at a bath temperature of 25 ° C. The obtained film was washed with water and dried at 70 ° C. for 10 minutes to obtain a copper-clad laminate having a smooth photoconductive layer having a thickness of about 5 μm on both sides.

【0029】光導電層の評価 形成された光導電性層は銅表面への密着性が良く、かつ
傷などによって銅表面に凸凹がある場合でもきれいに被
覆していた。別途断面を調べたところスルーホール内壁
上にも光導電層が均一に形成されていることが顕微鏡等
により確認された。また、この銅張り積層板の光導電特
性を川口電機製静電場測定器SP−428にて評価し
た。コロナ印加電圧+6.0KVを印加したところ、V
0(初期電位)+300V、DD10(10秒後の暗減衰
電位保持率)91%であった。
Evaluation of the Photoconductive Layer The formed photoconductive layer had good adhesion to the copper surface and was well covered even when the copper surface was uneven due to scratches or the like. When the cross section was examined separately, it was confirmed by a microscope and the like that the photoconductive layer was also formed uniformly on the inner wall of the through hole. The photoconductive properties of this copper-clad laminate were evaluated with an electrostatic field meter SP-428 manufactured by Kawaguchi Electric. When a corona applied voltage of +6.0 KV is applied, V
0 (initial potential) + 300 V, was DD 10 (dark decay potential retention after 10 seconds) 91%.

【0030】トナー画像の形成 光導電層を形成させた両面銅張り積層板の両面を暗所に
て+250Vに帯電後、波長780nmを備えたレーザ
ープロッターにより線幅40μmの静電潜像を積層板の
両面に形成させた。この潜像を、、図1に示す様な現像
電極を用い、図2に示す様に基板の両側に反転現像用電
極を配置した現像器を使い、両面銅張り積層板21の銅
を接地して矢印方向に搬送し、二つの現像電極13に現
像バイアス+120Vを印加するとともにトナー供給管
14から正帯電性液体現像剤を供給し、該現像剤をトナ
ー吐出用スリットから吐出させながら反転現像した。現
像剤としては、三菱OPCプリンティングシステム用ト
ナー「ODP−TW」(三菱製紙(株)製)を用いた。
トナー現像後、基板を90℃の熱風乾燥器に3分間入
れ、トナー画像を定着させた。別途断面、及びスルーホ
ール周辺部の欠陥の発生状況を調べたところ、0.6m
m及び1.2mm径のスルーホール50個についてそれ
ぞれスルーホール部及び周辺部にもトナーが均一に現像
定着されていることが確認された。
Formation of a Toner Image A double-sided copper-clad laminate on which a photoconductive layer is formed is charged to +250 V in a dark place, and an electrostatic latent image having a line width of 40 μm is formed on the laminate by a laser plotter having a wavelength of 780 nm. Was formed on both sides. This latent image is obtained by grounding the copper of the double-sided copper-clad laminate 21 by using a developing device as shown in FIG. 1 and a developing device having reversal developing electrodes on both sides of the substrate as shown in FIG. And a developing bias of +120 V is applied to the two developing electrodes 13 and a positively chargeable liquid developer is supplied from the toner supply pipe 14, and the developer is reversely developed while being discharged from the toner discharge slit. . As a developer, a toner “ODP-TW” for Mitsubishi OPC printing system (manufactured by Mitsubishi Paper Mills, Inc.) was used.
After toner development, the substrate was placed in a hot air drier at 90 ° C. for 3 minutes to fix the toner image. When the occurrence of defects in the cross section and around the through hole was investigated separately, it was 0.6 m
It was confirmed that the toner was uniformly developed and fixed also in the through-hole portion and the peripheral portion of each of 50 through-holes having a diameter of m and 1.2 mm.

【0031】非画線部光導電層の除去 三菱OPCプリンティングシステム用溶出液「ODP−
DFII」を用いてトナーの付着していない部分の光導電
層を除去することによりトナー像およびその下の未溶解
光導電層を画線部とする配線画像を形成した。
Removal of non-image area photoconductive layer Eluate "ODP-" for Mitsubishi OPC printing system
The toner image and the undissolved photoconductive layer under the toner image were formed as image portions by removing the photoconductive layer where no toner was attached using "DF II ".

【0032】エッチング アルカリ水溶液により導電性基板上に形成されたトナー
及び未溶解光導電層よりなる配線画像をエッチングレジ
ストとして、基板に35℃に加熱されたボーメ42゜の
塩化第二鉄エッチング液をスプレー圧力2.5kg/c
2で1分間スプレーすることによりエッチングレジス
ト未被覆金属導電層のエッチングを行った。その後メチ
ルエチルケトンでトナー及び光導電層よりなるエッチン
グレジストを除去したところ、両面のエッチングレジス
ト部に線幅約40μmの銅回路が形成された。また、
0.6mmおよび1.2mm径のそれぞれ50個のスル
ーホール内壁及び周辺部の銅層も均一に存在しているこ
とが別途顕微鏡観察により確認された。
[0032] The wiring image made of a conductive toner and undissolved photoconductive layer formed on the substrate by etching an alkaline aqueous solution as an etching resist, the Baume 42 ° ferric chloride etching solution was heated to 35 ° C. in the substrate Spray pressure 2.5kg / c
The metal conductive layer not covered with the etching resist was etched by spraying with m 2 for 1 minute. Thereafter, when the etching resist composed of the toner and the photoconductive layer was removed with methyl ethyl ketone, a copper circuit having a line width of about 40 μm was formed in the etching resist portions on both sides. Also,
Microscopic observation separately confirmed that the inner wall of 50 through-holes having a diameter of 0.6 mm and the inner wall of the through-hole of 1.2 mm and the copper layer on the periphery were also uniformly present.

【0033】[0033]

【比較例】実施例と同様にして電着法により光導電性層
を形成した後、暗所にて−250Vに帯電させ、さらに
実施例と同様にレーザープロッターで露光した。静電潜
像の形成された積層板を図3に示す様に基板の上部にだ
け反転現像電極を設け、下部には、反転現像電極と同じ
大きさの絶縁性プラスチック板24を設けた現像器を使
い、三菱OPCプリンティングシステム用トナー「OD
P−TW」(三菱製紙(株)製)を用いて実施例と同様
にしてバイアス電圧を印加して反転現像し、両面にトナ
ー画像を形成した。トナー現像後、基板を90℃の熱風
乾燥器に3分間入れ、トナー画像を定着させた。別途、
0.6mm及び1.2mm径のスルーホール50個につ
いてそれぞれスルーホール部及び周辺部について欠陥の
発生状況を調べたところ、ほとんどすべてのスルーホー
ル及びスルーホール周辺部にトナーが均一に現像定着し
ていたが、1.2mmのスルーホールについては、5箇
所でスルーホール下部、及びスルーホール下部周辺のト
ナーが薄くなっていることが確認された。さらに、実施
例と同様に非画線部感光層を除去、さらにエッチング処
理を行ない、上記5箇所に対応した場所を別途顕微鏡観
察したところ、一部銅層がなくなっていることが確かめ
られた。
COMPARATIVE EXAMPLE A photoconductive layer was formed by an electrodeposition method in the same manner as in the example, charged to -250 V in a dark place, and exposed with a laser plotter as in the example. As shown in FIG. 3, a developing device in which a laminated plate on which an electrostatic latent image is formed is provided with a reversal developing electrode only on the upper portion of the substrate and an insulative plastic plate 24 having the same size as the reversal developing electrode is provided on the lower portion. , A toner for Mitsubishi OPC printing system "OD
Using a "P-TW" (manufactured by Mitsubishi Paper Mills), a bias voltage was applied in the same manner as in the example, and reversal development was performed to form toner images on both surfaces. After toner development, the substrate was placed in a hot air dryer at 90 ° C. for 3 minutes to fix the toner image. Separately,
The occurrence of defects in the through-hole portion and the peripheral portion of each of the 50 through-holes having a diameter of 0.6 mm and 1.2 mm was examined. As a result, the toner was uniformly developed and fixed in almost all the through-holes and the peripheral portion of the through-hole. However, with respect to the 1.2 mm through hole, it was confirmed that the toner at the lower portion of the through hole and the toner around the lower portion of the through hole became thin at five places. Further, the non-image area photosensitive layer was removed in the same manner as in the example, and etching treatment was performed. The portions corresponding to the above five portions were separately observed with a microscope. As a result, it was confirmed that the copper layer was partially removed.

【0034】[0034]

【発明の効果】以上説明した如く、本発明のプリント配
線板作製法により、高いアスペクト比のスルーホールを
有するような銅張り積層板に対して、電子写真法により
半導体レーザーのような低エネルギーの露光源を使いな
がらもきわめて解像度の高い配線回路を形成することが
できかつ、スルーホール内部の銅層も確実に保護するこ
とができる。
As described above, according to the method for producing a printed wiring board of the present invention, a copper-clad laminate having a through hole having a high aspect ratio can be subjected to electrophotography using a low-energy such as a semiconductor laser. An extremely high-resolution wiring circuit can be formed while using the exposure source, and the copper layer inside the through hole can be surely protected.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に使用する現像電極の構成図。(A)は
正面図、(B)は底面図、(C)は側面図。
FIG. 1 is a configuration diagram of a developing electrode used in the present invention. (A) is a front view, (B) is a bottom view, and (C) is a side view.

【図2】本発明に使用する現像装置の側面図。FIG. 2 is a side view of a developing device used in the present invention.

【図3】比較例として用いる現像装置の側面図。FIG. 3 is a side view of a developing device used as a comparative example.

【符号の説明】[Explanation of symbols]

11 トナー整流室 12 トナー吐出用スリット 13 現像電極 14 トナー供給管 21 静電潜像を形成した両面銅張り積層板 22 入り口側絞りロール 23 出口側絞りロール 24 絶縁性基板 DESCRIPTION OF SYMBOLS 11 Toner rectification chamber 12 Toner discharge slit 13 Developing electrode 14 Toner supply pipe 21 Double-sided copper-clad laminate on which an electrostatic latent image is formed 22 Entrance-side aperture roll 23 Exit-side aperture roll 24 Insulating substrate

フロントページの続き (56)参考文献 特開 平4−186791(JP,A) 特開 昭61−198795(JP,A) 特開 平4−69990(JP,A) 特開 平1−124879(JP,A) 特開 平4−109255(JP,A) 特開 平4−51253(JP,A) 特開 昭63−129689(JP,A) 特開 昭56−66863(JP,A) 特開 平4−371969(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05K 3/06 Continuation of the front page (56) References JP-A-4-186991 (JP, A) JP-A-61-198795 (JP, A) JP-A-4-69990 (JP, A) JP-A-1-124879 (JP) JP-A-4-109255 (JP, A) JP-A-4-51253 (JP, A) JP-A-63-129689 (JP, A) JP-A-56-66863 (JP, A) 4-371969 (JP, A) (58) Field surveyed (Int. Cl. 7 , DB name) H05K 3/06

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 スルーホールを有する電気絶縁性基板の
両面に金属導電層を設けた導電性基板金属導電層上に電
着法により光導電層を設け、更に該光導電層上に反転現
像を用いる電子写真法によりトナー画像を形成させ、次
いでトナー画像部以外の光導電層を溶解除去し、光導電
層除去部基板表面をエッチングするプリント配線板の作
製方法に於て、反転現像の為の電極を基板の両側に設け
ることを特徴とするプリント基板の作製方法。
A photoconductive layer is provided by an electrodeposition method on an electroconductive substrate having a metal conductive layer provided on both sides of an electrically insulating substrate having a through hole, and a reverse development is performed on the photoconductive layer. A toner image is formed by an electrophotographic method used, and then a photoconductive layer other than a toner image portion is dissolved and removed, and in a method of manufacturing a printed wiring board in which a photoconductive layer removed portion substrate surface is etched, a method for reversal development is used. A method for manufacturing a printed circuit board, wherein electrodes are provided on both sides of the board.
JP01102893A 1992-03-26 1993-01-26 Manufacturing method of printed wiring board Expired - Fee Related JP3244835B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP01102893A JP3244835B2 (en) 1993-01-26 1993-01-26 Manufacturing method of printed wiring board
US08/391,475 US5494764A (en) 1992-03-26 1995-02-21 Method for making printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01102893A JP3244835B2 (en) 1993-01-26 1993-01-26 Manufacturing method of printed wiring board

Publications (2)

Publication Number Publication Date
JPH06224541A JPH06224541A (en) 1994-08-12
JP3244835B2 true JP3244835B2 (en) 2002-01-07

Family

ID=11766641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01102893A Expired - Fee Related JP3244835B2 (en) 1992-03-26 1993-01-26 Manufacturing method of printed wiring board

Country Status (1)

Country Link
JP (1) JP3244835B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999052335A1 (en) * 1998-04-06 1999-10-14 Mitsubishi Paper Mills Limited Method and apparatus for manufacturing printed wiring board
DE10018634A1 (en) 1999-04-15 2000-12-07 Mitsubishi Paper Mills Ltd Liquid development method for printed circuit board by electrostatically charging surface and placing opposite surface on which latent image is formed

Also Published As

Publication number Publication date
JPH06224541A (en) 1994-08-12

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