JP3123826B2 - Sample cooling holder for electron microscope etc. - Google Patents
Sample cooling holder for electron microscope etc.Info
- Publication number
- JP3123826B2 JP3123826B2 JP04225889A JP22588992A JP3123826B2 JP 3123826 B2 JP3123826 B2 JP 3123826B2 JP 04225889 A JP04225889 A JP 04225889A JP 22588992 A JP22588992 A JP 22588992A JP 3123826 B2 JP3123826 B2 JP 3123826B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- cap
- sample holder
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001073 sample cooling Methods 0.000 title claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 239000003507 refrigerant Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000386 microscopy Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Description
【０００１】[0001]
【産業上の利用分野】本発明は電子顕微鏡等の冷却試料
交換装置に係わり、特に複数個の試料を装着できるよう
にした電子顕微鏡等の試料冷却ホルダに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooled sample exchange device such as an electron microscope, and more particularly to a sample cooled holder for an electron microscope or the like which can mount a plurality of samples.
【０００２】[0002]
【従来の技術】図４により、従来の試料冷却ホルダにつ
いて説明する。図４（ａ）に示すように、注入パイプ９
を通して液体窒素等の冷媒が入れられた冷却槽８内に一
端が位置して冷却される熱伝導棒７が、中空パイプ状の
試料棒６に収納されており、試料棒６の先端には、図４
（ｂ）の拡大図に示すように、試料ホルダ１が取り付け
られて熱伝導棒７により冷却されている。試料ホルダ１
はスライドキャップ２にスライド可能に嵌合し、図４
（ｃ）に示すようにその側面で互いに滑るようになって
いる。スライドキャップ２は内部に設けられたスプリン
グ３により試料ホルダ１と離れる方向に押されていて、
ピン４で最左端位置が規定されている。スライドキャッ
プ２には電子線通過用の孔２ａがその上下に設けられて
おり、スライドキャップ２が試料ホルダ１に対して最左
端位置にあるときは試料ホルダ１はキャップで蓋をされ
て試料に霜等が付かないようになっている。2. Description of the Related Art A conventional sample cooling holder will be described with reference to FIG. As shown in FIG.
A heat conducting rod 7 whose one end is cooled in a cooling tank 8 in which a coolant such as liquid nitrogen or the like is placed is housed in a hollow pipe-shaped sample rod 6. FIG.
As shown in the enlarged view of (b), the sample holder 1 is attached and cooled by the heat conducting rod 7. Sample holder 1
4 is slidably fitted to the slide cap 2, and FIG.
As shown in (c), the sides slide on each other. The slide cap 2 is pressed in a direction away from the sample holder 1 by a spring 3 provided therein,
The pin 4 defines the leftmost position. The slide cap 2 is provided with holes 2a for passing an electron beam on the upper and lower sides thereof. When the slide cap 2 is at the leftmost position with respect to the sample holder 1, the sample holder 1 is covered with a cap and the sample holder 1 is closed. Frost and the like do not adhere.
【０００３】この試料棒６を電子顕微鏡内に押し込んで
いくと、スライドキャップ２の左端が図示しない部材に
当たってスライドキャップ２は試料棒側にスライドし電
子線通過用の孔２ａが試料ホルダ１に取付けられた試料
１の所に位置した状態で、孔２ａを通して試料１ａに電
子線を照射し検鏡できるようになっている。When the sample rod 6 is pushed into the electron microscope, the left end of the slide cap 2 hits a member (not shown), and the slide cap 2 slides toward the sample rod, and the electron beam passing hole 2a is attached to the sample holder 1. The sample 1a is irradiated with an electron beam through the hole 2a in a state where the sample 1 is located at the place of the sample 1 so that the sample 1 can be inspected.
【０００４】このように電子顕微鏡内に試料ホルダをセ
ットするまでは、試料ホルダはスライドキャップ２で蓋
をされているため、冷媒で冷却されていても霜が付か
ず、電子顕微鏡にセットし、真空内に入った状態でスラ
イドキャップ２が試料ホルダ１に対して移動して蓋が開
き検鏡できる。[0004] Until the sample holder is set in the electron microscope, the sample holder is covered with the slide cap 2 so that even if it is cooled by the refrigerant, there is no frost, and the sample holder is set in the electron microscope. The slide cap 2 moves with respect to the sample holder 1 in a state of being in a vacuum, and the lid is opened to enable microscopy.
【０００５】[0005]
【発明が解決しようとする課題】ところで、図４に示す
冷却試料ホルダにあっては、装填される試料が１個のた
め、一回の検鏡において試料が作成不十分であったり、
同時に複数個検鏡したい場合は対応できず、また一度電
子顕微鏡にセットした試料が不良の場合には、一旦取り
出す必要があり、そのため、再度液体窒素等の冷媒を入
れ直す必要が生じてしまう。However, in the case of the cooled sample holder shown in FIG. 4, since only one sample is loaded, the sample cannot be prepared in a single microscopic examination.
It is not possible to cope with a case in which a plurality of microscopy is desired at the same time, and if the sample once set in the electron microscope is defective, it is necessary to take out the sample once, so that it is necessary to refill a refrigerant such as liquid nitrogen again.
【０００６】本発明は上記課題を解決するためのもの
で、一度の試料セットで複数個の試料の検鏡を行うこと
を可能にすると共に、耐震性を向上して高分解能の写真
をとることができ、かつ操作性良く試料押えを行うこと
ができる電子顕微鏡等の試料冷却ホルダを提供すること
を目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and enables a plurality of specimens to be inspected by a single specimen set, and provides a high-resolution photograph with improved seismic resistance. It is an object of the present invention to provide a sample cooling holder such as an electron microscope which can perform sample holding with good operability.
【０００７】[0007]
【課題を解決するための手段】本発明は、一端が冷却さ
れた熱伝導棒を収納する試料棒の先端に取り付けられ、
電子線通過用の孔が開けられたキャップに摺動可能に挿
入される試料ホルダであって、該試料ホルダに試料棒の
長さ方向に複数個の試料を収納するようにしたことを特
徴とする。また本発明は、キャップの中央部を内側に湾
曲させ、試料ホルダを弾性支持するようにしたことを特
徴とする。According to the present invention, there is provided a sample rod containing a heat-conducting rod cooled at one end.
A sample holder slidably inserted into a cap provided with a hole for passing an electron beam, wherein a plurality of samples are stored in the sample holder in a length direction of a sample rod. I do. Further, the present invention is characterized in that the central portion of the cap is curved inward to elastically support the sample holder.
【０００８】[0008]
【作用】本発明は冷媒で一端が冷却された熱伝導棒を収
納する試料棒先端に取付けられた試料ホルダに複数個の
試料を装填し、この試料ホルダを電子線通過用の孔を形
成したキャップ内にスライド可能に嵌合させる。この試
料ホルダを押し込んで各試料を順次キャップの孔の位置
に移動させて検査することにより、一度の試料セット
で、複数の試料の検鏡を行うことができる。また、試料
ホルダが挿入されるキャップは中央部を内側に湾曲さ
せ、試料ホルダを弾性的に支持することにより、冷媒の
沸騰あるいはその他の外部振動によって試料ホルダが共
振しないようにすることができる。このように、一度セ
ットした試料ホルダにより複数回の検鏡を行うことがで
きると共に、試料ホルダの振動が押えられるため耐震性
が向上し、高分解能の写真撮影を行うことが可能とな
る。According to the present invention, a plurality of samples are loaded into a sample holder attached to the tip of a sample rod for accommodating a heat conducting rod cooled at one end by a refrigerant, and the sample holder is formed with holes for passing electron beams. It is slidably fitted in the cap. By pushing the sample holder and sequentially moving each sample to the position of the hole of the cap for inspection, a plurality of samples can be inspected with a single sample set. In addition, the cap into which the sample holder is inserted is bent inward at the center, and elastically supports the sample holder, so that the sample holder does not resonate due to boiling of the refrigerant or other external vibration. As described above, the microscope can be performed a plurality of times by the sample holder that has been set once, and the vibration of the sample holder is suppressed, so that the earthquake resistance is improved and high-resolution photography can be performed.
【０００９】[0009]
【実施例】図１は本発明の試料冷却ホルダを示す図、図
２はキャップの１実施例を示す図、図３は試料押えの１
実施例を説明するための図である。図中、１０は試料ホ
ルダ、１０ａは試料押えネジ、１１はキャップ、１１ａ
は空間、１２はホルダ、１３はワイヤ、１４はベロー
ズ、１５は熱伝導棒、１６は試料棒、１７はブロック、
１８は熱伝導板、１９はピン、２０はラック、２１はピ
ニオン、２２はつまみ、２３はデュア、２４は冷媒、２
５は蓋、３０は試料交換治具である。1 is a view showing a sample cooling holder according to the present invention, FIG. 2 is a view showing an embodiment of a cap, and FIG.
It is a figure for explaining an example. In the figure, 10 is a sample holder, 10a is a sample holding screw, 11 is a cap, 11a
Is a space, 12 is a holder, 13 is a wire, 14 is a bellows, 15 is a heat conducting rod, 16 is a sample rod, 17 is a block,
18 is a heat conducting plate, 19 is a pin, 20 is a rack, 21 is a pinion, 22 is a knob, 23 is a duer, 24 is a refrigerant, 2
5 is a lid and 30 is a sample exchange jig.
【００１０】図１（ａ）において、先端に試料ホルダが
取り付けられる中空パイプからなる試料棒１６内には熱
伝導棒１５が収納され、その中心部にはワイヤ１３が貫
通する貫通孔が設けられている。この熱伝導棒１５の貫
通孔にはベローズ１４が設けられ、ワイヤ１３はベロー
ズ１４、ホルダ１２を貫通し、試料ホルダ１０に接続さ
れている。ベローズ１４はワイヤ１３を熱伝導棒１５の
中で動かしたときにその動きを吸収しつつ試料側を真空
に保持するためのものである。こうして試料ホルダ１０
は、デュア２３の側面に取り付けられた熱伝導板１８、
熱伝導棒１５、ホルダ１２を通して冷却される。また、
ワイヤ１３はブロック１７に固定され、ブロック１７は
ピン１９を介してピニオン２１で駆動されるラック２０
に係合している。従って、つまみ２２を回してピニオン
２１を回転すると、ラック２０が左右に移動し、このラ
ック２０から出ているピン１９によりブロック１７が左
右に移動し、この移動によりワイヤ１３が左右方向に移
動する。In FIG. 1A, a heat conducting rod 15 is accommodated in a sample rod 16 formed of a hollow pipe to which a sample holder is attached at the tip, and a through hole through which a wire 13 penetrates is provided at the center thereof. ing. A bellows 14 is provided in a through hole of the heat conducting rod 15, and a wire 13 passes through the bellows 14 and the holder 12 and is connected to the sample holder 10. The bellows 14 is for holding the sample side in a vacuum while absorbing the movement when the wire 13 is moved in the heat conducting rod 15. Thus, the sample holder 10
Is a heat conductive plate 18 attached to the side surface of the dewar 23,
Cooled through the heat conducting rod 15 and the holder 12. Also,
The wire 13 is fixed to a block 17, and the block 17 is a rack 20 driven by a pinion 21 via a pin 19.
Is engaged. Therefore, when the pinion 21 is rotated by turning the knob 22, the rack 20 moves right and left, and the block 17 moves left and right by the pins 19 protruding from the rack 20, and the wire 13 moves left and right by this movement. .
【００１１】図１（ｂ）に示すように、ワイヤ１３の先
端には、ホルダ１２に支持された試料ホルダ１０が取り
付けられ、試料ホルダ１０には３個の試料が装填できる
ようになっている。試料ホルダ１０はワイヤ１３を左側
に移動させると、キャップ１１の空間１１ａ内に進入す
るようになっており、このキャップ１１には電子線通過
用の孔１１ｂが上下に設けられている。なお、キャップ
１１も試料ホルダとともに冷却される。As shown in FIG. 1 (b), a sample holder 10 supported by a holder 12 is attached to the tip of a wire 13, so that three samples can be loaded into the sample holder 10. . The sample holder 10 moves into the space 11a of the cap 11 when the wire 13 is moved to the left, and the cap 11 is provided with holes 11b for passing an electron beam up and down. Note that the cap 11 is also cooled together with the sample holder.
【００１２】このような構成において、デュア１２の冷
媒２４により、熱伝導板１８を介して冷却した試料棒１
６を電子顕微鏡に装填し、つまみ２２を回すと、ピニオ
ン２１、ラック２０、ピン１９を介してブロック１７が
左側に移動し、その結果ワイヤ１３が熱伝導棒１５、ホ
ルダ１２内で左側に移動して試料ホルダ１０が左側に押
され、キャップ１１の空間１１ａ内に進入していく。試
料１０ａがキャップ１１に設けられた電子線を通すため
の孔１１ｂの位置に来たとき、孔を通して電線を試料に
照射することにより検鏡が行われる。従って、つまみ２
１を回して順次試料１０ｂ、１０ｃを孔１１ｂ下に位置
させることにより、一度の試料セットで複数の試料の検
鏡を行うことができる。In such a configuration, the sample rod 1 cooled by the refrigerant 24 of the dewar 12 via the heat conducting plate 18 is used.
6 is loaded into the electron microscope, and when the knob 22 is turned, the block 17 moves to the left through the pinion 21, the rack 20, and the pin 19, and as a result, the wire 13 moves to the left in the heat conducting rod 15 and the holder 12. Then, the sample holder 10 is pushed to the left, and enters the space 11 a of the cap 11. When the sample 10a comes to the position of the hole 11b for passing the electron beam provided in the cap 11, microscopy is performed by irradiating the sample with an electric wire through the hole. Therefore, knob 2
By turning 1 to sequentially position the samples 10b and 10c below the holes 11b, a plurality of samples can be inspected by a single sample set.
【００１３】なお、図２に示すように、試料ホルダ１０
が嵌合するキャップ１１の中央部を内側に湾曲させ、試
料ホルダ１０を弾性的に押さえることにより、冷媒の沸
騰、その他の外部振動に対して試料ホルダ１０が共振す
るのを防止することができ、その結果耐震性を向上し、
高分解能の写真撮影を行うことが可能となる。Note that, as shown in FIG.
By bending the central portion of the cap 11 in which is fitted inwardly and pressing the sample holder 10 elastically, it is possible to prevent the sample holder 10 from resonating against boiling of the refrigerant and other external vibrations. , Resulting in improved earthquake resistance,
High-resolution photography can be performed.
【００１４】図３は図１（ｃ）に示す試料押えネジの取
り付けのための試料交換治具３０を示したものである。
試料押さえネジ１０ａの内側には２つの切欠き１０ｂが
設けられており、試料交換治具３０には切欠き１０ｂに
嵌合する２つの突起３０ａが設けられており、上方より
試料押さえネジ１０ａの２つの切り欠き１０ｂに試料交
換治具３０の突起３０ａを合わせ、押し付けることによ
り試料押えネジ１０ａをクランプし、の試料ホルダ１０
にネジ込むことができる。また、試料交換治具の突起の
先端は傾斜しているため、単に引っ張るだけで容易に抜
き取ることができる。FIG. 3 shows a sample exchange jig 30 for mounting the sample holding screw shown in FIG. 1 (c).
Two notches 10b are provided inside the sample holding screw 10a, and two projections 30a that fit into the notches 10b are provided on the sample exchange jig 30, and the sample holding screw 10a is The sample holder 10 is clamped by aligning the projection 30a of the sample exchange jig 30 with the two cutouts 10b and pressing the same.
Can be screwed into. In addition, since the tip of the projection of the sample exchange jig is inclined, it can be easily extracted by simply pulling.
【００１５】[0015]
【発明の効果】以上のように、従来の冷却ホルダは試料
装填数が１個であったものに対し、本発明によれば試料
装填数を複数個にすることができるため、一度の試料セ
ットで複数の検鏡を瞬時に行うことができ、また、比較
チェック等を行うことが可能となる。さらにキャップの
中央部分を内側に湾曲させ、試料ホルダを押圧すること
により耐震性を向上させ、高分解能の写真撮影が可能に
なり、さらに試料押えネジと試料交換治具との工夫によ
り、試料押えの操作性の向上を図ることが可能となる。As described above, according to the present invention, the number of loaded samples can be increased, whereas the conventional cooling holder has only one loaded sample. Thus, a plurality of microscopes can be performed instantaneously, and a comparison check and the like can be performed. Furthermore, the center part of the cap is bent inward to improve the earthquake resistance by pressing the sample holder, enabling high-resolution photography.In addition, the sample holding screw and the sample exchange jig are used to improve the sample holding. Operability can be improved.
【図１】 本発明の試料冷却ホルダを示す図である。FIG. 1 is a view showing a sample cooling holder of the present invention.
【図２】 キャップの１実施例を示す図である。FIG. 2 is a view showing one embodiment of a cap.
【図３】 試料押えの１実施例を説明するための図であ
る。FIG. 3 is a view for explaining one embodiment of a sample holder.
【図４】 従来の試料冷却ホルダを示す図である。FIG. 4 is a view showing a conventional sample cooling holder.
１０…試料ホルダ、１０ａ…試料押えネジ、１１…キャ
ップ、１１ａ…空間、１２…ホルダ、１３…ワイヤ、１
４…ベローズ、１５…熱伝導棒、１６…試料棒、１７…
ブロック、１８…熱伝導板、１９…ピン、２０…ラッ
ク、２１…ピニオン、２２…つまみ、２３…デュア、２
４…冷媒、２５…蓋、３０…試料交換治具。10 sample holder, 10a sample holding screw, 11 cap, 11a space, 12 holder, 13 wire, 1
4 ... bellows, 15 ... heat conductive rod, 16 ... sample rod, 17 ...
Block, 18: heat conductive plate, 19: pin, 20: rack, 21: pinion, 22: knob, 23: dua, 2
4 ... refrigerant, 25 ... lid, 30 ... sample exchange jig.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 末房 浄 東京都多摩市聖ケ丘２−43−６ (56)参考文献 特開 昭61−200657（ＪＰ，Ａ) 実開 昭61−23256（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 37/20 H01J 37/26 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Joh Suebo 2-43-6, Seigaoka, Tama-shi, Tokyo (56) References JP-A-61-200657 (JP, A) Jpn. U) (58) Fields surveyed (Int. Cl. 7 , DB name) H01J 37/20 H01J 37/26
Claims (2)
料棒の先端に取り付けられ、電子線通過用の孔が開けら
れたキャップに摺動可能に挿入される試料ホルダであっ
て、該試料ホルダに試料棒の長さ方向に複数個の試料を
収納するようにしたことを特徴とする電子顕微鏡等の試
料冷却ホルダ。1. A sample holder, one end of which is attached to the tip of a sample rod containing a cooled heat conducting rod and slidably inserted into a cap provided with a hole for passing an electron beam. A sample cooling holder for an electron microscope or the like, wherein a plurality of samples are accommodated in a sample holder in a length direction of a sample rod.
て、キャップの中央部を内側に湾曲させ、試料ホルダを
弾性支持するようにしたことを特徴とする電子顕微鏡等
の試料冷却ホルダ。2. The sample cooling holder according to claim 1, wherein a center portion of the cap is curved inward to elastically support the sample holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04225889A JP3123826B2 (en) | 1992-08-25 | 1992-08-25 | Sample cooling holder for electron microscope etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04225889A JP3123826B2 (en) | 1992-08-25 | 1992-08-25 | Sample cooling holder for electron microscope etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0676777A JPH0676777A (en) | 1994-03-18 |
| JP3123826B2 true JP3123826B2 (en) | 2001-01-15 |
Family
ID=16836464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04225889A Expired - Fee Related JP3123826B2 (en) | 1992-08-25 | 1992-08-25 | Sample cooling holder for electron microscope etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3123826B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010055988A (en) * | 2008-08-29 | 2010-03-11 | Jeol Ltd | Thin film sample observation system, cooling sample holder, and thin film sample observation method |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5753924A (en) * | 1997-03-12 | 1998-05-19 | Gatan, Inc. | Ultra-high tilt specimen cryotransfer holder for electron microscope |
| US6410925B1 (en) * | 2000-07-31 | 2002-06-25 | Gatan, Inc. | Single tilt rotation cryotransfer holder for electron microscopes |
| JP4679279B2 (en) * | 2005-07-14 | 2011-04-27 | 日本電子株式会社 | Top entry type sample stage tilting device |
| JP5517559B2 (en) | 2009-10-26 | 2014-06-11 | 株式会社日立ハイテクノロジーズ | Charged particle beam apparatus and display method of three-dimensional information in charged particle beam apparatus |
| TW201222617A (en) | 2010-10-07 | 2012-06-01 | Hitachi High Tech Corp | Sample device for charged particle beam |
| JP5690243B2 (en) * | 2011-08-05 | 2015-03-25 | 株式会社Ｔｓｌソリューションズ | Sample cooling holder for transmission electron microscope |
| US8440982B1 (en) * | 2011-12-19 | 2013-05-14 | Korea Basic Science Institute | Cryo transfer holder for transmission electron microscope |
| JP7141874B2 (en) * | 2017-09-29 | 2022-09-26 | 株式会社堀場製作所 | Luminescence lighting device |
| CN113335767A (en) * | 2020-02-18 | 2021-09-03 | 中国科学院物理研究所 | Low-temperature container |
-
1992
- 1992-08-25 JP JP04225889A patent/JP3123826B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010055988A (en) * | 2008-08-29 | 2010-03-11 | Jeol Ltd | Thin film sample observation system, cooling sample holder, and thin film sample observation method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0676777A (en) | 1994-03-18 |
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