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JP3181090B2 - Vertically coupled dual mode leaky SAW filter - Google Patents

Vertically coupled dual mode leaky SAW filter

Info

Publication number
JP3181090B2
JP3181090B2 JP08273492A JP8273492A JP3181090B2 JP 3181090 B2 JP3181090 B2 JP 3181090B2 JP 08273492 A JP08273492 A JP 08273492A JP 8273492 A JP8273492 A JP 8273492A JP 3181090 B2 JP3181090 B2 JP 3181090B2
Authority
JP
Japan
Prior art keywords
saw filter
filter
width
idts
coupled dual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP08273492A
Other languages
Japanese (ja)
Other versions
JPH05251988A (en
Inventor
孝夫 森田
祐史 小川
Original Assignee
東洋通信機株式会社
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はSAWフィルタ、殊に広
帯域低損失で且つ急峻度が優れ、阻止域減衰量の大きな
縦結合二重モードリーキーSAWフィルタに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a SAW filter, and more particularly to a longitudinally coupled dual mode leaky SAW filter having a wide band, low loss, excellent steepness, and large stop band attenuation.

【0002】[0002]

【従来の技術】従来、VHF〜UHF帯の高周波領域に
於ける広帯域低損失SAWフィルタには、一方向性ID
Tを用いたトランスバーサル型SAWフィルタやマルチ
トランスジューサ方式SAWフィルタが広く用いられて
いる。一方向性IDTを用いたトランスバーサル型SA
Wフィルタは位相器を必要とし製造も難しいという欠点
を有すると共に方向性損失を完全になくすることが困難
であり低損失化が未だ不十分である。次にマルチトラン
スジューサ方式SAWフィルタはチップサイズが大きく
なりボンディングワイヤの本数が多くなる上に、IDT
内部の反射によるスプリアスが多く現われ、阻止域の減
衰量が不十分であるという欠点がある。
2. Description of the Related Art Conventionally, a unidirectional ID has been used for a wideband low-loss SAW filter in a high frequency range of a VHF to UHF band.
A transversal type SAW filter using T and a multi-transducer type SAW filter are widely used. Transversal SA using one-way IDT
The W filter requires a phase shifter and has a drawback that it is difficult to manufacture, and it is difficult to completely eliminate directional loss, and low loss is still insufficient. Next, the multi-transducer type SAW filter has a large chip size and a large number of bonding wires, and has a large IDT.
There is a drawback that many spurious components due to internal reflection appear, and the attenuation of the stop band is insufficient.

【0003】これに対してSAW共振器フィルタ、殊に
2個のIDTをSAWの伝搬方向に沿って近接配置し、
これらが励起するSAWがIDT間で互いに音響結合し
た際に生ずる1次モードと2次モードの2つの振動モー
ドを利用した縦結合二重モードSAWフィルタは低損失
を実現する上で前述の2つの方法よりも優れている。こ
の縦結合二重モードSAWフィルタの通過帯域幅は共振
子の容量比の制限を受ける為これまで広帯域フィルタへ
の適用は困難であるとされていたが、本発明者らは結合
係数が11%と大きい64°YカットX伝搬LiNbO
3 基板を伝搬するSAWを用いて2.5%以上の比帯域
幅を持つ広帯域低損失な縦結合二重モードリーキーSA
Wフィルタを発明した。(特願平2−337281)
On the other hand, a SAW resonator filter, in particular, two IDTs are arranged close to each other along the propagation direction of the SAW.
A longitudinally-coupled dual-mode SAW filter using two vibration modes, a first-order mode and a second-order mode, generated when the SAWs excited by these are acoustically coupled to each other between the IDTs, achieves the above-described two modes in order to realize low loss. Better than the method. The pass band width of this longitudinally-coupled dual-mode SAW filter has been considered to be difficult to apply to a wide-band filter because of the limitation of the capacitance ratio of the resonator. And large 64 ° Y-cut X-propagation LiNbO
Wide-band low-loss longitudinally coupled dual-mode leaky SA having a fractional bandwidth of 2.5% or more using SAW propagating through three substrates
W filter was invented. (Japanese Patent Application No. 2-337281)

【0004】更に例えば、携帯電話、自動車電話に用い
る900MHz帯RFフィルタでは比帯域幅が3〜4%
の広帯域低損失SAWフィルタが必要となり、これには
前述の64°YカットX伝搬LiNbO3 基板の伝搬方
向に沿って3つのIDTを近接配置し、これらが励起す
るSAWがIDT間で互いに音響結合した際に生ずる1
次モードと3次モードの2つの振動モードを利用する
と、前述の1次モードと2次モードを利用したフィルタ
に比べてモード間の周波数差が広がり実用上十分な広い
通過帯域幅を持つフィルタが構成できることを明らかに
した。
Further, for example, in a 900 MHz band RF filter used for a mobile phone or a car phone, the relative bandwidth is 3 to 4%.
In this case, three IDTs are arranged close to each other along the propagation direction of the aforementioned 64 ° Y-cut X-propagation LiNbO 3 substrate, and the SAWs excited by these are acoustically coupled between the IDTs. 1 that occurs when
When the two vibration modes, the second mode and the third mode, are used, the frequency difference between the modes is widened as compared with the filter using the first mode and the second mode, and a filter having a wide enough pass band width for practical use is obtained. Clarified that it can be configured.

【0005】しかしながら、携帯電話等の900MHz
帯RFフィルタでは、例えば北米仕様(AMPS)では
通過帯域幅が25MHz必要となるのに対して送受信の
周波数が45MHzしか離隔していない為より急峻度の
大きなフィルタを必要とする。前述の1次モードと3次
モードを利用した縦結合二重モードリーキーSAWフィ
ルタをこの携帯電話用900MHz帯RFフィルタに適
用すると低域側では比較的急峻な肩特性が得られ阻止域
減衰量も大きいのに対し、高域側では縦結合二重モード
フィルタ特有のスプリアスの為、阻止域減衰量が不足す
る上に肩特性の急峻度も未だ不十分であった。
[0005] However, 900 MHz for mobile phones and the like
In a band RF filter, for example, in the North American specification (AMPS), a pass band width of 25 MHz is required, whereas a filter for transmission and reception is separated by only 45 MHz. When the above-described longitudinally-coupled dual-mode leaky SAW filter using the first-order mode and the third-order mode is applied to the 900 MHz band RF filter for the cellular phone, a relatively steep shoulder characteristic is obtained in the low frequency side, and the stopband attenuation is also reduced. On the other hand, on the high frequency side, the spurious characteristic of the longitudinally coupled dual mode filter causes the stopband attenuation to be insufficient and the steepness of the shoulder characteristic to be insufficient.

【0006】これを解決する方法として、このフィルタ
を多段縦続接続して阻止域減衰量を大きくし、且つ肩特
性を急峻にすることが考えられるが、段数を増すに従っ
て挿入損失が増大すると共に通過帯域も狭くなり実用に
供しなくなる。従って例えば縦結合二重モードリーキー
SAWフィルタを2段縦続接続することによって挿入損
失を実用に耐え得る程度に小さくしても、高域側の阻止
域減衰量が不足し要求を満足できないという欠点があっ
た。
As a method for solving this problem, it is conceivable that the filters are connected in cascade in multiple stages to increase the amount of attenuation in the stop band and to sharpen the shoulder characteristics. The band becomes narrow and it is not practical. Therefore, for example, even if the insertion loss is reduced to a level that can be practically used by connecting two vertically coupled dual-mode leaky SAW filters in cascade, the attenuation in the high-frequency side is insufficient and the demand cannot be satisfied. there were.

【0007】[0007]

【発明の目的】本発明は上述した如き従来の縦結合二重
モードリーキーSAWフィルタの高域側の阻止域減衰量
が不足するという欠点を解決する為になされたものであ
って、広帯域低損失であり且つ急峻度が大きく阻止域減
衰量の十分大きなフィルタ特性を有する縦結合二重モー
ドリーキーSAWフィルタを提供することを目的とす
る。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned disadvantage of the conventional longitudinally coupled dual mode leaky SAW filter, in which the stop band attenuation on the high frequency side is insufficient. It is another object of the present invention to provide a longitudinally coupled dual mode leaky SAW filter having a filter characteristic having a large steepness and a sufficiently large stopband attenuation.

【0008】[0008]

【発明の概要】上述の目的を達成するため本発明に係る
縦結合二重モードリーキーSAWフィルタは、IDTの
電極指幅(ライン幅)hと間隔幅(スペース幅)aとの
関係が0.3≦h/(h+a)<0.5となるようにす
る。
SUMMARY OF THE INVENTION In order to achieve the above object, a longitudinally coupled dual mode leaky SAW filter according to the present invention has an IDT electrode finger width (line width) h and an interval width (space width) a of 0. 3 ≦ h / (h + a) <0.5.

【0009】[0009]

【実施例】以下本発明を図面に示した実施例に基づいて
詳細に説明する。図1は本発明に係る縦結合二重モード
リーキーSAWフィルタの一実施例の電極パターンの構
成図であって、圧電基板1の表面に入力IDT及びその
両側に出力IDT3、4を配置し、更にその両側に反射
器5、5を配している。このIDT周期をLT (=SA
Wの波長λ)、ライン幅をh、スペース幅をaとする。
[ここでLT =2(h+a)]この構成によりIDT間
の音響結合によって生ずる1次モードと3次モードの2
つの共振モードを利用した縦結合二重モードリーキーS
AWフィルタを実現できる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the embodiments shown in the drawings. FIG. 1 is a configuration diagram of an electrode pattern of one embodiment of a longitudinally coupled dual mode leaky SAW filter according to the present invention. An input IDT is provided on the surface of a piezoelectric substrate 1 and output IDTs 3 and 4 are arranged on both sides thereof. Reflectors 5 and 5 are arranged on both sides thereof. This IDT cycle is represented by L T (= SA
The wavelength λ of W), the line width is h, and the space width is a.
[Where L T = 2 (h + a)] With this configuration, the first mode and the third mode generated by acoustic coupling between IDTs
Coupled dual mode leaky S using two resonance modes
An AW filter can be realized.

【0010】次に、図2は図1に於いて、IDTのライ
ン幅hとスペース幅aを等しくh:a=1:1[即ちh
/(h+a)=0.5]とした従来の縦結合二重モード
リーキーSAWフィルタを2段縦続接続した場合の周波
数減衰特性を示す図であり、ここで基板は64°Yカッ
トX伝搬LiNbO3 、入力IDTは16対、出力ID
Tはそれぞれ10対、反射器は両側とも250本、交差
長は40λ、電極はアルミニウムで膜厚は0.2μmで
ある。同図から明らかな如く、通過域の高域側近傍に大
きなスプリアス6が現われ、例えば北米仕様(AMP
S)携帯電話の場合、通過帯域幅が25MHz必要とな
るのに対して送受信周波数間隔が45MHzであるの
で、同図中斜線で示すように中心周波数から±45MH
z離れた周波数で十分な減衰量が要求される。ところが
通過域の高域側近傍の大きなスプリアス6により減衰量
が悪化し規格を満足できなかったこと前述した通りであ
る。
Next, FIG. 2 shows that the line width h and the space width a of the IDT are equal to each other in FIG.
/(H+a)=0.5] is a diagram showing a frequency attenuation characteristic when a conventional longitudinally coupled dual mode leaky SAW filter with cascade connection of two stages is set, where the substrate is 64 ° Y-cut X-propagation LiNbO 3. , Input IDT is 16 pairs, output ID
T is 10 pairs each, the number of reflectors is 250 on both sides, the intersection length is 40λ, the electrode is aluminum and the film thickness is 0.2 μm. As is clear from the figure, a large spurious component 6 appears near the high frequency side of the passband.
S) In the case of a mobile phone, a pass band width of 25 MHz is required, whereas a transmission / reception frequency interval is 45 MHz, so ± 45 MHz from the center frequency as shown by hatching in FIG.
Sufficient attenuation is required at frequencies apart by z. However, as described above, the attenuation was deteriorated due to the large spurious component 6 near the high frequency side of the passband, and the standard could not be satisfied.

【0011】図3は他は同じ条件としてIDTのライン
幅hとスペース幅aの比を変えた時の周波数減衰特性の
実験値を示すグラフである。同図より明らかな如くID
Tのライン幅hとスペース幅aの比[h/(h+a)]
が小さくなる程通過域の高域側近傍のスプリアスが減少
し減衰量が大きくなる。しかし上述した如く従来IDT
のライン−スペース比はh:a=1:1とするのが一般
的であり、特にSAW共振子或はリーキーSAW共振子
ではライン幅がスペース幅より細くなると共振子のQが
低下する為、できるかぎり同じかむしろライン幅を太く
するように構成するのが常であった。[0.5≦h/
(h+a)]
FIG. 3 is a graph showing experimental values of frequency attenuation characteristics when the ratio of the line width h to the space width a of the IDT is changed under the same conditions. As is clear from FIG.
Ratio of line width h and space width a of T [h / (h + a)]
The smaller the value, the smaller the spurious near the high frequency side of the pass band and the greater the attenuation. However, as described above, the conventional IDT
Is generally set to h: a = 1: 1. Particularly, in a SAW resonator or a leaky SAW resonator, when the line width is smaller than the space width, the Q of the resonator decreases. It was usual to make the line width as large as possible or even as much as possible. [0.5 ≦ h /
(H + a)]

【0012】これに対して本発明の縦結合二重モードリ
ーキーSAWフィルタに於けるIDTのライン幅hは、
通過域の高域側近傍のスプリアスを減らし減衰量を大き
くする為スペース幅aよりも細くなるようにしたもので
ある。[h/(h+a)<0.5]図4はIDTのライ
ン幅hとスペース幅aの比h/(h+a)に対する通過
域の高域側近傍の減衰量の変化を示した図であって、h
/(h+a)を0.47以下にすると前述の北米向け携
帯電話の仕様(AMPS)を満足する25dB以上の減
衰量が得られた。更にh/(h+a)の値を小さくする
と減衰量は大きくなるものの、IDTのライン幅が細く
なる為、オーミックロスが増大しインピーダンスが高く
なる。図5はh/(h+a)=0.20の場合の周波数
減衰特性を示した図であって、他の条件は図2と同じで
ある。図5よりライン幅が極端に細くなると同じ終端条
件(50Ω)では通過域特性に大きな偏差が現われ、実
用に耐え難くなる。終端条件50Ωの場合、通過域に於
ける偏差が小さく挿入損失が劣化しない程度のライン幅
hとスペース幅aの比はh/(h+a)=0.30付近
であった。従って、通過域特性に著しい影響を与えるこ
となく前述の北米向け携帯電話の仕様(AMPS)を満
足する高域側近傍の減衰量を得るには、ライン幅hとス
ペース幅aの比h/(h+a)を0.3≦h/(h+
a)≦0.47とすればよいことが明らかとなった。
On the other hand, the line width h of the IDT in the vertically coupled dual mode leaky SAW filter of the present invention is as follows:
The width is narrower than the space width a in order to reduce spurious near the high frequency side of the passband and increase the attenuation. [H / (h + a) <0.5] FIG. 4 is a diagram showing a change in the amount of attenuation near the high frequency side of the passband with respect to the ratio h / (h + a) of the line width h and the space width a of the IDT. , H
When / (h + a) is set to 0.47 or less, an attenuation of 25 dB or more that satisfies the above-mentioned mobile phone specification for North America (AMPS) is obtained. When the value of h / (h + a) is further reduced, the amount of attenuation increases, but the line width of the IDT becomes narrower, so that the ohmic cross increases and the impedance increases. FIG. 5 is a diagram showing a frequency attenuation characteristic when h / (h + a) = 0.20, and other conditions are the same as those in FIG. As shown in FIG. 5, when the line width is extremely narrow, a large deviation appears in the passband characteristic under the same termination condition (50Ω), and the practical use becomes difficult. In the case of the termination condition of 50Ω, the ratio of the line width h to the space width a such that the deviation in the pass band is small and the insertion loss does not deteriorate is around h / (h + a) = 0.30. Therefore, in order to obtain the attenuation near the high frequency side that satisfies the above-mentioned mobile phone specification for North America (AMPS) without significantly affecting the passband characteristics, the ratio of the line width h to the space width a h / ( h + a) is 0.3 ≦ h / (h +
It became clear that a) ≦ 0.47 was sufficient.

【0013】尚、ライン幅hを細くすると質量負荷効果
の影響が小さくなって中心周波数が高い方へシフトする
のはもちろんであるが、反射係数(モード間結合係数κ
12´)が大きくなってストップバンド幅が広がり通過帯
域幅も広がっていくというメリットもある。以上、本発
明を北米向け携帯電話の仕様(AMPS)を例に説明し
てきたが、本発明はこれのみに限定されるものではな
く、広帯域低損失なフィルタを実現する為IDTのライ
ン幅hとスペース幅aとの関係を0.3≦h/(h+
a)<0.5とした縦結合二重モードリーキーSAWフ
ィルタを示したのである。又、本発明を64°Yカット
X伝搬LiNbO3 基板上のリーキーSAWを用い、1
次モードと3次モードの2つの共振モードを利用した縦
結合二重モードリーキーSAWフィルタについて説明し
たが、同様に1次モードと2次モードの2つの共振モー
ドを利用してもよいし、41°YカットX伝搬LiNb
3 、36°YカットX伝搬LiTaO3 等、他のカッ
ト、基板のリーキーSAWを用いてもよいこと明白であ
る。
When the line width h is reduced, the influence of the mass load effect is reduced and the center frequency shifts to a higher value.
12 ') there is a merit that it will also spread the pass band width wider stop band width increases. Although the present invention has been described above with reference to the specification of a mobile phone for North America (AMPS) as an example, the present invention is not limited to this. The relationship with the space width a is 0.3 ≦ h / (h +
a) A vertically coupled dual mode leaky SAW filter with <0.5 is shown. Further, the present invention uses a leaky SAW on a 64 ° Y-cut X-propagation LiNbO 3 substrate,
Although the longitudinally coupled dual mode leaky SAW filter using two resonance modes of the second mode and the third mode has been described, similarly, two resonance modes of the first mode and the second mode may be used. ° Y cut X propagation LiNb
Obviously, other cuts and leaky SAW of the substrate may be used, such as O 3 , 36 ° Y-cut X-propagation LiTaO 3, etc.

【0014】[0014]

【発明の効果】本発明は、以上説明した如く構成するも
のであるから、高周波領域に於いて広帯域低損失で且つ
阻止域減衰量の大きなフィルタを得る上で著しい効果が
ある。
Since the present invention is constructed as described above, it has a remarkable effect in obtaining a filter having a wide band, low loss and a large stop band attenuation in a high frequency region.

【0015】[0015]

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る縦結合二重モードリーキーSAW
フィルタの電極パターン構成を示す図。
FIG. 1 shows a longitudinally coupled dual mode leaky SAW according to the present invention.
The figure which shows the electrode pattern structure of a filter.

【図2】従来の縦結合二重モードリーキーSAWフィル
タ[h/(h+a)=0.5]の周波数減衰特性を示す
図。
FIG. 2 is a diagram showing a frequency attenuation characteristic of a conventional longitudinally coupled dual mode leaky SAW filter [h / (h + a) = 0.5].

【図3】図1の縦結合二重モードリーキーSAWフィル
タに於いてh/(h+a)を変えた時の周波数減衰特性
の変化を示す図。
FIG. 3 is a diagram showing a change in frequency attenuation characteristics when h / (h + a) is changed in the longitudinally coupled dual mode leaky SAW filter of FIG. 1;

【図4】図1の縦結合二重モードリーキーSAWフィル
タに於いてh/(h+a)を変えた時の通過域近傍の高
域側減衰量の変化を示す図。
FIG. 4 is a diagram showing a change in a high-frequency side attenuation near a pass band when h / (h + a) is changed in the longitudinally coupled dual-mode leaky SAW filter of FIG. 1;

【図5】図1の縦結合二重モードリーキーSAWフィル
タに於いてh/(h+a)=0.20とした時の周波数
減衰特性を示す図。
FIG. 5 is a diagram illustrating frequency attenuation characteristics when h / (h + a) = 0.20 in the longitudinally coupled dual mode leaky SAW filter of FIG. 1;

【符号の説明】[Explanation of symbols]

1・・・圧電基板 2・・・中央IDT 3、4・・・両側IDT 5・・・反射器 6・・・通過域の高域側近傍スプリアス DESCRIPTION OF SYMBOLS 1 ... Piezoelectric substrate 2 ... Central IDT 3, 4 ... Both-side IDT 5 ... Reflector 6 ... Spurious near high-pass side of a pass band

フロントページの続き (56)参考文献 特開 平1−212015(JP,A) 特開 平2−194714(JP,A) 特開 昭63−173412(JP,A) 特開 昭62−199111(JP,A)Continuation of the front page (56) References JP-A-1-212015 (JP, A) JP-A-2-194714 (JP, A) JP-A-63-173412 (JP, A) JP-A-62-199111 (JP) , A)

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】インタデジタル・トランスジューサ(ID
T)電極が励振又は受信するリーキー弾性表面波(SA
W)の伝搬方向に沿って圧電基板上に入出力IDTを近
接配置し、これらの両側に該リーキーSAWの振動を閉
じ込めて共振子とする為の反射器を設け、前記IDT間
の音響結合によって発生する2つの共振モードを利用す
る縦結合二重モードリーキーSAWフィルタに於いて、
前記IDTの電極指幅(ライン幅)hと間隔幅(スペー
ス幅)aとの関係が0.3≦h/(h+a)<0.5で
あることを特徴とする縦結合二重モードリーキーSAW
フィルタ。
An interdigital transducer (ID)
T) Leaky surface acoustic waves (SA) excited or received by electrodes
The input and output IDTs are arranged close to each other on the piezoelectric substrate along the propagation direction of W), and reflectors for confining the vibration of the leaky SAW and forming resonators are provided on both sides thereof, and acoustic coupling between the IDTs is provided. In a longitudinally coupled dual mode leaky SAW filter utilizing two generated resonance modes,
The relationship between the electrode finger width (line width) h and the interval width (space width) a of the IDT satisfies 0.3 ≦ h / (h + a) <0.5.
filter.
【請求項2】前記IDTが3個のIDTより成り、これ
らIDT間の音響結合によって発生する1次及び3次の
共振モードを利用したことを特徴とする請求項1記載の
縦結合二重モードリーキーSAWフィルタ。
2. The longitudinally coupled double mode according to claim 1, wherein said IDT comprises three IDTs, and utilizes first and third order resonance modes generated by acoustic coupling between said IDTs. Leaky SAW filter.
JP08273492A 1992-03-04 1992-03-04 Vertically coupled dual mode leaky SAW filter Expired - Fee Related JP3181090B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08273492A JP3181090B2 (en) 1992-03-04 1992-03-04 Vertically coupled dual mode leaky SAW filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08273492A JP3181090B2 (en) 1992-03-04 1992-03-04 Vertically coupled dual mode leaky SAW filter

Publications (2)

Publication Number Publication Date
JPH05251988A JPH05251988A (en) 1993-09-28
JP3181090B2 true JP3181090B2 (en) 2001-07-03

Family

ID=13782651

Family Applications (1)

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Country Status (1)

Country Link
JP (1) JP3181090B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07283682A (en) 1994-04-13 1995-10-27 Murata Mfg Co Ltd Surface acoustic wave resonator filter
JPH09167936A (en) 1995-10-13 1997-06-24 Fujitsu Ltd Surface acoustic wave device
WO2004102797A1 (en) * 1997-07-17 2004-11-25 Michiaki Takagi Two-port saw resonator
CN1108661C (en) * 1997-07-18 2003-05-14 东芝株式会社 Elastic surface acoustic wave filter
JP3280617B2 (en) * 1998-02-27 2002-05-13 東洋通信機株式会社 Broadband surface wave filter
US6472959B1 (en) * 1999-03-11 2002-10-29 Nortel Networks Limited Longitudinally coupled double mode resonator filters using shallow bulk acoustic waves
JP3391347B2 (en) * 2000-06-26 2003-03-31 株式会社村田製作所 Vertically coupled resonator type surface acoustic wave filter
WO2008038459A1 (en) * 2006-09-25 2008-04-03 Murata Manufacturing Co., Ltd. Boundary acoustic wave filter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62199111A (en) * 1986-02-27 1987-09-02 Toyo Commun Equip Co Ltd Idt excitation lateral coupling duplicated mode filter
JPS63173412A (en) * 1987-01-12 1988-07-18 Toyo Commun Equip Co Ltd Leaky saw resonator
JPH01212015A (en) * 1987-10-22 1989-08-25 Toyo Commun Equip Co Ltd Idt exciting longitudinal coupling type dual mode filter
JPH02194714A (en) * 1989-01-24 1990-08-01 Toyo Commun Equip Co Ltd Leaky saw resonator

Also Published As

Publication number Publication date
JPH05251988A (en) 1993-09-28

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