JP3155168B2 - 3D shape forming method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a three-dimensional shape, and more particularly, to a method for forming and manufacturing a three-dimensional three-dimensional article using a photocurable resin which is cured by light irradiation. It is about.

[0002]

2. Description of the Related Art A method of forming a three-dimensional shape using a photocurable resin can easily and accurately form a complicated three-dimensional shape without using a molding die or a complicated processing tool. As a method, it has been considered to use it for manufacturing various product models and three-dimensional models. Specifically, for example, JP-A-63-141724 and JP-A-2-1-1
There is a method disclosed in, for example, Japanese Patent No. 88229.

In the method disclosed in Japanese Patent Application Laid-Open No. 63-141724, a photo-curable resin liquid is stored in a resin liquid tank, and a vertically movable molding table is provided. Once the molding table is deeply immersed below the liquid level, the molding table is raised to a position slightly below the resin liquid level, and the molding table has a thickness corresponding to the required thickness of the photocurable layer. The photocurable resin liquid thin layer is formed spontaneously. The thin resin layer is scanned with a laser beam modulated with shape data by a scanner and irradiated to cure the thin layer. By repeating such a step of raising and lowering the molding table to form a thin resin layer and a step of irradiating a laser beam to form a photocurable layer, the photocurable layers are stacked on the molding table. Thus, a molded product having a desired three-dimensional shape is obtained.

In the method disclosed in Japanese Patent Application Laid-Open No. Hei 2-188229, the bottom of a resin liquid tank is formed of a light-transmitting plate, and a molding table is sunk to a small gap with the light-transmitting plate. XY moving device (scanner) scans and irradiates laser light modulated with shape data from below the light transmitting plate toward the inside of the resin liquid tank, and irradiates the resin liquid between the light transmitting plate and the molding table. Light cure the thin layer. After the light-cured layer is formed, if the molding table is raised slightly, the light-cured layer is lifted while adhering to the molding table, and a new resin liquid is supplied between the light-cured layer and the transparent plate. . By repeating such a process, the photocurable layers are stacked with the photocurable layer adhered to the lower surface of the molding table.

[0005]

According to the above-mentioned conventional forming method, accurate exposure with a laser beam can be performed in a short period of time. However, in long-time modeling, the laser light source shifts at the oscillation point, the laser light source and the support member that supports the optical system are bent due to changes in the ambient temperature, and the scanner itself changes in temperature due to factors such as the temperature change. It is difficult to irradiate laser light accurately.

FIG. 14 shows a change in the irradiation position when nine sensors A to I each composed of a two-dimensional PSD (position detecting element) for measuring the irradiation position at nine positions on the resin liquid surface are arranged. FIG. As is apparent from FIG. 14, when the laser light is irradiated for a long time, the irradiation position changes with time at each measurement position due to the above factors. If the irradiation position at the resin forming position is shifted due to the long-time irradiation of the laser beam and the resin liquid surface cannot be accurately exposed, the shape changes between the respective photo-cured layers and modeling cannot be performed with high accuracy. Problems arise.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for forming a three-dimensional shape which can be formed with high accuracy when forming a three-dimensional shape by using a light beam.

[0008]

To solve the above problems SUMMARY OF THE INVENTION The method of forming a three-dimensional shape according to the present <br/> onset Ming, the light beam irradiating the light curing resin solution stored in a resin solution tank forming a photo hardening layer Te, a method of obtaining a molded article having a desired three-dimensional shape of the photocurable layer stacked plurality of layers, said resin liquid tank
Using one or more sensors that move between the ends of the
By recognizing the deviation of the light beam irradiation position,
Morphism said light beam irradiation for serial photocurable resin liquid to correct for variations in position.

The basic equipment and working steps may be the same as those of the ordinary method of forming various three-dimensional shapes as disclosed in the above-mentioned prior art. The three-dimensional shape to be formed can be freely selected. For example, as the photocurable resin, a photocurable resin such as urethane, urethane-acrylate, epoxy, and epoxy-acrylate is used.

A light beam such as a laser beam is usually used as the light to be irradiated, and the light beam is scanned to form a photocured layer having a predetermined shape. The energy density of light depends on the oscillation intensity of the laser oscillator, the configuration of the optical system through which the irradiated light passes, the distance from the oscillator to the resin liquid to be irradiated, the scanning speed when scanning light, and the light transmission characteristics of the resin liquid. It depends on such conditions. In the case of a light beam, the energy density changes depending on the beam diameter.
The beam diameter is the smallest and the energy density is the largest,
The farther away from the focal point, the larger the beam diameter and the smaller the energy density.

The irradiation position can be measured by a sensor arranged at substantially the same height as the light source of the light beam.
The light beam is split and the irradiation position of one split beam can be measured by the sensor.

[0012] using one or a plurality of sensors to move
Thus, the irradiation position of the light beam can be recognized. Sensors may be attached to sweeping member sweep up by horizontally moving at least a portion of the liquid resin layer formed on the photocurable layer formed on forming table or above.

[0013] can be stationary at the center and ends of the shaping area of the shaped article a sweep can take-up member. It is possible to synchronize the light beam in the horizontal movement of the sweep can up member.
Fluctuation correction can be performed each time each photocurable layer is obtained.

[0014] can be carried out variation correction for each obtain every a certain time and / or constant layer. The focal length and / or a beam diameter of the light beam can be measured and further correcting the variation of the focal length of the light beam.

The output of the light source can be controlled by measuring the output of the light beam.

[0016]

In the method for forming a three-dimensional shape according to the present invention , when irradiating a light beam, the irradiation position of the light beam is measured by a sensor at a predetermined timing, and the irradiation position of the light beam is changed based on the measurement result. Is corrected. Then, a light curable layer is formed by irradiating the resin liquid layer stored in the resin liquid tank with a light beam, and the light curable layer is moved up and down to form a resin liquid layer in contact with the light curable layer. By repeating this step, a plurality of photocurable layers are stacked to obtain a shaped article having a desired three-dimensional shape. Here, the irradiation position of the light beam is measured, and the fluctuation of the irradiation position is corrected based on the measured position. Therefore, the irradiation position is less likely to fluctuate, and modeling can be performed with high accuracy.

The light beam of the light source substantially the same height-irradiation position measured by the sensor disposed at the position lever, it becomes less susceptible to deflection of the supporting member of the optical system of the resin liquid adhesion of problems Does not occur, the measurement accuracy is further improved, and the deterioration of the sensor performance can be prevented.

[0018] The light beam is spectrally can accurately correct lever irradiation position of one of the spectral beam is measured by the sensor, the variation in the irradiation position of the light beam during irradiation to the resin solution layer in real time, more precisely The modeling can be performed. Lever to recognize the irradiation position of the light beam using the one or more sensors to move, can be widely accurately measure the irradiation position of the light beam traveling.

The irradiation position sensor attached to the scavenging come up member is measured lever, you can move the sensor without using a separate movable member. Sweep can up member is lever to rest in the central portion and the end portion of the shaped area of the shaped product, the correction of the translation component in the resin liquid level (origin correction) as well, the deviation due to the distance from the reference point (end) A correction (gain correction) in consideration of the increment of the amount can also be performed, and the fluctuation can be corrected with higher accuracy.

The sweep can take-up lever to move the light beam is synchronized with the horizontal movement of the member, can correct for variations in any of the irradiation position during the irradiation of a plurality of finite sensors, performs modeling with higher precision be able to. Each photocurable layers get every variation correction line <br/> cracking lever, fabrication accuracy of the photo hardening layer is further improved.

[0021] a certain time and / or each variation correction for each obtain a constant layer is performed lever, molding accuracy is improved. For example, at a predetermined timing, the focal length of the light beam and / or
Or beam diameter is measured, the variation of the focal length of the light beam in addition to the correction of the variation of the irradiation position is further corrected
For example , the cured shape and the degree of curing of the resin at the time of light beam irradiation can be made constant, and modeling with higher precision and excellent adhesion between layers can be performed.

[0022] was example measured output of the light beam at a predetermined timing if, lever is output control of the light source based on the measurement result, variations in the output of the light source is suppressed, curing the shape of the resin during the light beam irradiation In addition, the degree of curing can be made constant, and modeling with higher precision and excellent adhesive strength between layers becomes possible.

[0023]

Next, the embodiment of the present invention and the reference technology will be described.
Embodiments will be described below with reference to the drawings. Embodiment 1 FIG. 1 shows an optical shaping apparatus used for carrying out Embodiment 1. In FIG. 1, a light forming apparatus includes a light source 10 and a light source 1.
Light scanning unit 1 that scans light irradiated from 0 on the XY plane
1, a rectangular frame-shaped resin liquid tank 12 for storing the photocurable resin liquid 15, a horizontal trapezoidal molding table 13 submerged in the resin liquid tank 12, and horizontally moving on the resin liquid tank 12. A doctor blade (sweeping member) 14.

The light source 10 is, for example, a gas laser oscillation source that emits ultraviolet laser light, and is mounted on the support stage 20. The optical scanning unit 11 is attached to the support stage 20 together with the light source 10. The optical scanning unit 11 includes three fixed mirrors 21, 22, and 23 that reflect laser light from the light source 10, an X scanning mirror 24 that scans light reflected by the fixed mirror 23 in the X direction, and an X scanning mirror 24. And a Y-scanning mirror 25 that scans the laser light scanned in the X direction in the Y direction and irradiates the resin light surface on the molding table 13 with the laser light. The X-scanning mirror 24 and the Y-scanning mirror 25 have respective driving units 26 and 27, and scan the laser light in the respective directions by changing the inclination angles of the driving units 26 and 27. That is,
In the optical scanning unit 11, the laser light 1 projected from the light source 10
7 is deflected in two directions of X and Y by two scanning mirrors 24 and 25 and is irradiated onto the molding table 13.

A rectangular parallelepiped concave portion 12 a is formed at one corner of the resin liquid tank 12, and a sensor 30 for detecting an irradiation position of the laser beam emitted from the light source 10 is provided in the concave portion 12 a. ing. The sensor 30 is 1
A plurality may be provided instead of an individual. The sensor 30 includes, for example, a two-dimensional position detecting element (PSD).
The amount of deviation in the X and Y directions of the irradiation position of the laser light irradiated on the laser beam from a predetermined position (usually the center of the light receiving surface) can be detected two-dimensionally. The sensor 30 is connected to a computer 31.

The computer 31 includes an X / Y drive unit 2
6, 27, the light source 10, the molding table elevating mechanism, and the doctor blade moving mechanism. Computer 31
In addition to controlling the movement of the molding table elevating mechanism and the doctor blade moving mechanism, the light source 10 and the X and Y driving units 26 and 27 are controlled based on the scanning data. The computer 31 irradiates the sensor 30 with laser light at a predetermined timing, and when the irradiation position is detected by the sensor 30, the computer 31 controls the driving units 26 and 27 based on the amount of deviation from the predetermined position, and , 25 are tilted to correct the variation of the irradiation position.

The molding table 13 can be moved up and down in the resin liquid 15 by an elevating mechanism (not shown) installed outside the resin liquid tank 12, and supports the formed photocurable layer 16. The doctor blade 14 is horizontally movable by a horizontal movement mechanism (not shown) installed outside the resin liquid tank 12. The doctor blade 14 horizontally sweeps the resin liquid thin film formed on the molding table 13 or the light-cured layer 16 formed previously to make the thickness of the resin liquid layer constant and smooth the surface. It is a member for.

Next, an example of a real施手order, with reference to the flowchart shown in FIG. When the power of the computer 31 is turned on, in step S1 of FIG.
A predetermined command value is transmitted to the driving units 26 and 27, and the X and Y scanning mirrors 24 and 25 are tilted to irradiate a laser beam toward the light receiving surface of the sensor 30. In step S2, the irradiation position (X0, Y0) of the laser beam from the sensor 30 is read. This irradiation position (X0, Y0) becomes the origin of the subsequent irradiation positions.

In step S3, the light source 10 and X, Y
The scanning data is transmitted to the driving units 26 and 27. Step S
In 4, the laser beam is scanned in the XY directions on the resin liquid surface. As a result, the exposed portion of the resin liquid 15 on the molding table 13 in the resin liquid tank 12 is cured in a predetermined shape by one layer, and the photocurable layer 16 is formed. In step S5, the molding table 13 is lowered by a predetermined amount, and then the doctor blade 14 is operated.
As a result, a smooth resin liquid thin film having a constant thickness is formed on the formed photocurable layer 16. In step S6, it is determined whether or not the shaping of all the photocurable layers 16 has been completed.
If the shaping of all the photocurable layers 16 has been completed, the process ends. If the shaping has not been completed, the process proceeds to step S7. In step S7, a predetermined command value is transmitted to the X and Y driving units 26 and 27 as in step S1, and the X and Y scanning mirrors 24 and 25 are tilted to irradiate a laser beam toward the light receiving surface of the sensor 30. . In step S8, the sensor 30
The laser beam irradiation position (X1, Y1) is read. In step S9, the correction amount (ΔX, ΔY) is obtained from the difference between the current irradiation position (X1, Y1) and the origin (X0, Y0). In step S10, the scanning data for forming the next photocurable layer 16 is corrected. Specifically, X (scan data after correction) = X (scan data before correction) −ΔX, Y
(Scan data after correction) = Y (scan data before correction) −
The data is corrected by ΔY. Upon completion of the correction in step S10, the process returns to step S3, where the next scan data of the photocurable layer 16 is transmitted to the light source 10 and the X and Y driving units 26 and 27, and the subsequent operations are repeated until the modeling is completed.

In this embodiment, each time a layer is formed by the sensor 30, the irradiation position is corrected to suppress the fluctuation of the irradiation position. Therefore, the irradiation position is always constant, and the modeling accuracy is improved. Further, since the sensor 30 is fixed to one corner of the resin liquid tank 12, the measurement accuracy of the sensor 30 is improved. Embodiment 2 FIG. 3 shows an optical shaping apparatus used for carrying out Embodiment 2. In the following drawings, the same or corresponding members as those of the first embodiment are denoted by the same reference numerals, and description thereof will be omitted. Also, of the X and Y mirrors 24 and 25 and their driving units 26 and 27, the illustration of the X mirror 24 and the X driving unit 26 is omitted, and the mirror 25 and the driving unit 27
It is assumed that laser light is scanned in the direction.

In FIG. 3, the sensor 30 is a resin liquid tank 1.
The light source 10 is provided not on one corner but on the support stage 20 to which the light source 10 is attached. A beam splitter 28 that splits the laser light from the fixed mirror 22 into two is disposed on the support stage 20. One of the laser beams split by the beam splitter 28 is
, And the other laser beam is applied to the center of the light receiving surface of the sensor 30. The other configuration is the same as that of the first embodiment, and the description is omitted.

Next, the procedure of Embodiment 2 will be described with reference to the flowchart of FIG. In the second embodiment, the processes in steps S1 and S7 are unnecessary. This is because the laser beam is always irradiated on the sensor 30. Therefore, in the second embodiment, the operation is started from step S2. Then, steps S3 to S1
The operation up to 0 (excluding step S7) is repeated until the modeling is completed. The measurement of the irradiation position may be performed at an arbitrary timing (for example, every scanning in the X direction) without performing the measurement for each layer.

In the second embodiment, since the irradiation position can be constantly measured, the correction can be performed in real time at an arbitrary timing, and precise control such as feedback control can be performed. Third Embodiment FIG. 4 shows an optical shaping apparatus used for implementing the third embodiment. In the first and second embodiments, the sensor is fixed, but in this embodiment, the sensor is movably arranged.

In FIG. 3, three sensors 30a, 30a are arranged on the doctor blade 14 at intervals in the longitudinal direction.
30b and 30c are arranged. The sensor 30a is arranged at the center of the doctor blade 14, the sensor 30b is arranged at the near side of the doctor blade 14 in FIG. 4, and the sensor 30c is arranged at the back side of the doctor blade 14 in FIG. Other configurations are the same as those of the first embodiment (FIG. 1), and the description is omitted.

Next, an example of the procedure of the third embodiment will be described with reference to FIG.
This will be described according to the flowchart shown in FIG. In step S11 in FIG. 5, the position of the doctor blade 14 is set to position 1. This position 1 is the end of the resin tank 12 as shown in FIG. In step S12, the command values (X'10, Y'10) to the drive unit 27 are set so that the irradiation position of the laser beam coincides with the center position of the area A (the light receiving surface of the sensor 30a) shown in FIG. I do. In step S13, the initial command value (X'10, Y ') is sent to the drive unit 27.
10), the scanning mirror 25 is tilted and the sensor 30a is
Is irradiated with a laser beam toward the light receiving surface of. Step S14
Then, it is determined whether or not the irradiation position (X1, Y1) matches a predetermined position (X10, Y10) in the area A. If the irradiation position does not match the predetermined position, the process proceeds to step S15. In step S15, the initial command value (X'1
0, Y'10). Specifically, the deviation between the irradiation position and the predetermined position is reduced from the initial command value (X′10 =
X′10− (X1−X10), Y′10 = Y′10−
(Y1-Y10)). When the correction is completed, the process returns to step S13, and the corrected new initial command value is transmitted to the drive unit 27, and the process proceeds to step S1 until the irradiation position matches the predetermined position.
5. The operations of S13 are repeated to correct the initial command value.

When the irradiation position coincides with the predetermined position,
The process moves from step S14 to step S16. In step S16, the position of the doctor blade 14 is set to position 2. The position 2 is substantially the center of the resin tank 12 as shown in FIG. 6, and is the center of the molding area. In step S17, operations similar to those in steps S12 to S15 are performed in the areas B and C, and the sensors 30a and 30b arranged in the areas B and C are operated.
(X'20, Y'20), (X'30,
Y'30).

In step S18, the doctor blade 1
Return position 4 to position 1. In step S19,
The scanning data is transmitted to the light source 10 and the driving unit 27, and the laser light is scanned in the XY directions on the resin liquid surface. As a result, the exposed portion of the resin liquid 15 on the molding table 13 in the resin liquid tank 12 becomes 1
The layers are cured into a predetermined shape, and the photocurable layer 16 is formed.
In step S20, the molding table 13 is lowered by a predetermined amount, and then the doctor blade 14 is operated. As a result,
A smooth resin liquid thin film having a constant thickness is formed on the formed photocurable layer 16. In step S21, it is determined whether or not modeling of all layers has been completed. If the modeling of all the layers has been completed, the process is terminated. If the modeling has not been completed, the process proceeds to step S22.

In step S22, the initial command value (X'1
0, Y'10), (X'20, Y'20), (X'3
0, Y'30) to the next layer command value (X'1, Y'1),
(X'2, Y'2) and (X'3, Y'3). In step S23, the command values (X'1, Y '
1) is transmitted, and the scanning mirror 25 is tilted to irradiate laser light toward the light receiving surface of the sensor 30a. In step S24, it is determined whether or not the irradiation position (X1, Y1) matches a predetermined position (X10, Y10) in area A. If the irradiation position does not match the predetermined position, the process proceeds to step S25. In step S25, the command values (X'1, Y '
Correct 1). Specifically, the deviation between the irradiation position and the predetermined position is subtracted from the command value (X'1 = X'1- (X1-X
10), Y'1 = Y'1- (Y1-Y10)). When the correction is completed, the process returns to step S23, where the corrected command value is transmitted to the drive unit 27, and the operations of steps S25 and S23 are repeated until the irradiation position matches the predetermined position, thereby correcting the command value.

When the irradiation position coincides with the predetermined position,
The process moves from step S24 to step S26. In step S26, the position of the doctor blade 14 is set to position 2. In step S27, the same operation as the operation in step S22 to step S25 is performed in area B and area C, and sensors 30a and
30b to the command values (X'2, Y'2), (X'3, Y '
Correct 3).

In step S28, each measurement area A,
In B and C, the command values (X′1, Y′1), (X′2,
Y'2), (X'3, Y'3) and the initial command value (X'1
0, Y'10), (X'20, Y'20), (X'3
0, Y′30), (ΔX1, ΔY1), (ΔX
2, ΔY2) and (ΔX3, ΔY3).
Here, each deviation is ΔX1 = X′1-X′10, ΔY1 = Y′1-Y′10 ΔX2 = X′2-X′20, ΔY2 = X′2-X′20 ΔX3 = X′3-X '30, ΔY3 = Y'3-Y'30
It is.

In step S29, the origin of the scan data of the next layer is corrected by the following equation. X (scan data after origin correction) = X (before correction) −ΔX2 Y (scan data after origin correction) = Y (before correction) −ΔY2 In step S30, the inclination (α, β) of the command value difference is calculated as follows. It is determined by the formula. α = (ΔX1−ΔX2) / g β = (ΔY2−ΔY3) / h where h = X20−X10 g = Y30−Y20 In step S31, the slope of the obtained command value difference (α,
According to β), the gain of the scan data of the next layer is corrected by the following equation.

X (scan data after gain correction) = X (after origin correction) + α (X (after origin correction) -X20) Y (scan data after gain correction) = Y (after origin correction) +
β (Y (after origin correction) -Y20) When the gain correction in step S31 is completed, step S
18, the doctor blade 14 is set to the position 1, and the operations of steps S18 to S31 are repeated until the modeling is completed.

Here, the moving doctor blade 14
Since the sensors 30a and 30b are arranged at the same position, the sensors 30a and 30b can be moved without using a special member. Further, by moving the plurality of sensors 30a and 30b to the end and the center of the resin liquid tank 12, not only the correction of the parallel movement on the resin liquid surface (origin correction) but also the reference point (end). (Gain correction) in consideration of the increment of the shift amount due to the distance, the fluctuation can be corrected with higher accuracy, and the modeling with higher accuracy can be performed.

Fourth Embodiment In the third embodiment, two of the three sensors 30a, 30
b, the correction is performed in a fixed area. In this embodiment, the number of correction points is increased by using three sensors 30a to 30c and moving the doctor blade 14 in synchronization with scanning. . Note that the structure is the same as that of the third embodiment, and the description is omitted.

An example of the procedure of the fourth embodiment will be described with reference to the flowchart shown in FIG. In step S41 of FIG. 7, the scanning mirror 25 of the optical scanning unit 11 and the doctor blade 14 are moved in synchronization with each other,
The laser beam can be received at a, the irradiation position is measured at a predetermined timing, and data of the irradiation position at a plurality of measurement points is obtained. The number of measurement points is preferably as large as possible, but it is preferable to determine the number of measurement points in consideration of the measurement time and the processing speed. In step S42, similarly, the irradiation position is measured at a predetermined timing such that the sensor 30b can always receive the laser beam. In step S43, similarly, the sensor 30c
And the laser beam can be received, and the irradiation position is measured at a predetermined timing. In this way, the initial values of the irradiation positions of the three sensors 30a to 30c are measured, and the initial position data of the irradiation positions is obtained.

In step S44, the scan data is transmitted to the drive unit 27, and the laser light is scanned in the XY directions on the resin liquid surface. As a result, the exposed portion of the resin liquid 15 on the molding table 13 in the resin liquid tank 12 is cured in a predetermined shape by one layer, and a photo-cured layer 16 having a predetermined thickness is formed. In step S45, the molding table 13 is lowered by a predetermined amount, and then the doctor blade 14 is operated. As a result, the formed photocurable layer 16
A smooth resin liquid thin film having a constant thickness to be a next photo-cured layer is formed on the substrate. In step S46, it is determined whether or not the shaping of all the photocurable layers has been completed. If the shaping of all the photocurable layers has been completed, the process ends. If the shaping has not been completed, the process proceeds to step S47.

In step S47, similarly to step S41, the scanning mirror 25 of the optical scanning unit 11 and the doctor blade 14 are moved synchronously so that the laser beam can be always received by the sensor 30a. Measure the irradiation position with. In step S48, similarly, the irradiation position is measured at a predetermined timing such that the sensor 30b can always receive the laser beam. In step S49, similarly, the laser beam is always received by the sensor 30c, and the irradiation position is measured at the same measurement point at a predetermined timing. Thus, three sensors 3
The irradiation position after completion of the layer shaping of 0a to 30c is measured.

In step S50, a deviation between the initial value at each measurement point and the irradiation position is determined. In step S51, it is determined which measurement point the scanning data of the next layer is closest to, and correction is performed by subtracting the correction amount (deviation between the initial value and the irradiation position) at the measurement point from the scanning data. Then, returning to step S44, the scanning data of the next layer is transmitted, and the formation of the layer is repeated until the modeling is completed.

Here, a deviation (displacement) at an infinite number (many) of measurement points using three sensors (finite number of sensors).
Can be measured, and more accurate modeling can be performed. Fifth Embodiment In the first to fourth embodiments, the correction is performed for each one-layer molding. However, in this embodiment, the correction is performed for each constant layer molding or every predetermined time. Note that the configuration is the same as that of the above-described embodiment, and a description thereof will be omitted.

An example of the procedure of the fifth embodiment will be described with reference to the flowchart shown in FIG. Here, the procedure will be described with the same configuration as that of the first embodiment, that is, with the sensor 30 of FIG. 1 fixed. However, the sensor may be moving. In step S61 of FIG. 7, a predetermined command value is transmitted to the X and Y driving units 26 and 27,
The X and Y scanning mirrors 24 and 25 are tilted to irradiate laser light toward the light receiving surface of the sensor 30. In step S62,
The irradiation position (X0, Y0) of the laser beam from the sensor 30 is read. This irradiation position (X0, Y0) becomes the origin of the subsequent irradiation positions.

In step S63, a variable i indicating the number of layers
Is set to “0”. In step S64, scanning data is transmitted to the light source 10 and the X and Y driving units 26 and 27.
In step S65, the laser beam is scanned in the XY directions on the resin liquid surface. As a result, the exposed portion of the resin liquid 15 on the molding table 13 in the resin liquid tank 12 is cured in a predetermined shape for one layer.
In step S66, the variable i is incremented. In step S67, the molding table 13 is lowered by a predetermined amount, and then the doctor blade 14 is operated. Step S6
At 8, it is determined whether or not modeling of all layers has been completed.
If the modeling of all the layers has been completed, the process is terminated. If the modeling has not been completed, the process proceeds to step S69.
In step S69, in order to determine the timing of the correction, it is determined whether or not the variable i indicating the number of laminations is a number divisible by 10. That is, the correction timing for every ten layers is determined.

When it is determined that the timing is the correction timing, step S6 is performed.
Then, the process moves from step 9 to step S70. In step S70, a predetermined command value is transmitted to the X and Y driving units 26 and 27 as in step S61, and the X and Y scanning mirrors 24 and 25 are tilted to irradiate the laser light toward the light receiving surface of the sensor 30. . In step S71, the irradiation position (X1, Y1) of the sensor 30 with the laser beam is read. In step S72,
The correction amount (ΔX, ΔY) is obtained from the difference between the current irradiation position (X1, Y1) and the origin (X0, Y0). Step S
At 73, the scanning data for forming the next photocurable layer is corrected. Specifically, X (scan data after correction) = X
The data is corrected by (scan data before correction) −ΔX, Y (scan data after correction) = Y (scan data before correction) −ΔY. Upon completion of the correction in step S73, the process returns to step S64, where the scanning data of the next layer is transmitted to the light source 10 and the X and Y driving units 26 and 27, and the subsequent operation is repeated until the modeling is completed. If it is determined in step S69 that it is not the timing for correction, the process proceeds to step S73.

In this case, since the correction is performed for each fixed layer (10 layers in the embodiment), the modeling can be performed at a higher speed than when the correction is performed for each layer. It should be noted that the correction may be performed at fixed time intervals instead of at each fixed layer. In this case, the determination in step S69 may be made not by the number of layers but by time, and the correction may be made, for example, every 10 minutes from the start of modeling.

Sixth Embodiment In the first to fifth embodiments, only the irradiation position is corrected.
In this example, the fluctuation of the focal length is further corrected. FIG. 9 shows an optical shaping apparatus used for implementing the sixth embodiment. In the figure, in addition to the configuration shown in FIG. 1, the optical shaping apparatus includes a focal length adjuster 29 disposed between the fixed mirror 23 and the scanning mirror 25, and a concave portion in which the sensor 30 of the resin liquid tank 12 is disposed. A beam diameter measuring sensor 32 is provided in the concave portion 12b symmetrical to the light receiving portion 12a with the light receiving portion facing upward. As shown in FIG. 10, the focal length adjuster 29 has a convex lens 35 and a concave lens 36 whose distance can be adjusted. The distance L between the lenses 35 and 39 is controlled by a command value from the computer 31. Here, increasing the distance L increases the focal length, while decreasing the distance L decreases the focal length. The sensor 32 is of a slit type including, for example, a light receiving unit and a slit that moves in front of the light receiving unit, and is connected to the computer 31. The sensor 32 moves the slit at the time of measurement, and the computer 3
1 calculates the beam diameter by measuring the time during which the light receiving section of the sensor 32 is detecting light.

Next, an example of the procedure of Embodiment 6 is shown in FIG.
1 will be described. FIG.
In step S81, a predetermined command value is transmitted to the drive unit 27, and the scanning mirror 25 is tilted to irradiate a laser beam toward the light receiving surface of the sensor 30. In step S82, the irradiation position (X0, Y0) of the laser beam from the sensor 30 is read.
This irradiation position (X0, Y0) becomes the origin of the subsequent irradiation positions.

In step S83, the scan data is transmitted to the light source 10 and the drive unit 27, and the laser light is applied to the XY plane of the resin liquid level.
Scan in the direction. As a result, the molding table 1 in the resin liquid tank 12
The exposed portion of the resin liquid 15 on the substrate 3 is cured into a predetermined shape by one layer, and a photo-cured layer 16 having a predetermined thickness is formed. In step S84, the molding table 13 is lowered by a predetermined amount, and then the doctor blade 14 is operated. As a result, a resin liquid thin film to be the next layer is formed on the photocurable layer 16. In step S85, it is determined whether or not the shaping of all the photocurable layers 16 has been completed. If the modeling of all the layers has been completed, the process ends. If the modeling has not been completed, step S
Go to 86. In step S86, a predetermined command value is transmitted to the drive unit 27, and the scanning mirror 25 is tilted to
A laser beam is emitted toward the second light receiving unit. Step S8
At 7, the beam diameter is measured based on the output of the sensor 32.
In step S88, it is determined whether or not the measured beam diameter is within a predetermined range. If the beam diameter is smaller than the predetermined range, the process proceeds from step S88 to step S89, in which the lens distance L of the focal length adjuster 29 is increased by a predetermined length to increase the focal length, and the beam diameter is increased. Return and measure the beam diameter again. If the beam diameter is larger than the predetermined range, the process proceeds from step S88 to step S90, in which the lens distance L of the focal length adjuster 29 is reduced by a predetermined length to shorten the focal length, the beam diameter is reduced, and the process proceeds to step S87. Return and measure the beam diameter again. As a result, the resin liquid 15 is always irradiated with a laser beam having a beam diameter within a predetermined range.

If the beam diameter is within the predetermined range, step S
The process proceeds from S87 to step S91, where a predetermined command value is transmitted to the drive unit 27 in the same manner as in step S81, and the scanning mirror 2
The laser light is emitted toward the light receiving surface of the sensor 30 by tilting 5. In step S92, the irradiation position (X1, Y1) of the laser beam from the sensor 30 is read. In step S93, the current irradiation position (X1, Y1) and the origin (X0, Y
0), the correction amount (ΔX, ΔY) is obtained. In step S94, the scan data for forming the next photocurable layer is corrected. Specifically, X (scan data after correction)
= X (scan data before correction) −ΔX, Y (scan data after correction) = Y (scan data before correction) −ΔY. When the correction in step S94 is completed, the process returns to step S83, where the scanning data of the next layer is transmitted to the light source 10 and the drive unit 27, and the subsequent operation is repeated until the modeling is completed.

Here, by correcting not only the deviation of the irradiation position but also the correction of the focal length (beam diameter), the cured shape and the degree of curing of the resin at the time of laser beam irradiation can be kept constant, and higher accuracy can be achieved. Thus, molding with good adhesion between layers can be performed. Seventh Embodiment In the first to fifth embodiments, only the irradiation position is corrected.
In, the output fluctuation of the light source 10 is further corrected.

FIG. 12 shows an optical shaping apparatus used for implementing the seventh embodiment. In the figure, in addition to the configuration shown in FIG. 1, the optical shaping apparatus is symmetrical with a light source control unit 33 connected between the light source 10 and a computer 31 and a concave portion 12 a in which the sensor 30 of the resin liquid tank 12 is arranged. And a sensor 34 for measuring beam power which is arranged in the concave portion 12b with the light receiving portion facing upward. The light source control unit 33 controls the output of the light source 10 according to a command value from the computer 31.
The sensor 34 is, for example, a normal optical sensor having a light receiving unit, and outputs a signal corresponding to the amount of received light (beam power) to the computer 31.

Next, an example of the procedure of the embodiment 7 is shown in FIG.
The description will be made according to the flowchart shown in FIG. FIG.
In step S101, a predetermined command value is transmitted to the driving unit 27, and the scanning mirror 25 is tilted to irradiate the light receiving surface of the sensor 30 with laser light. In step S102, the irradiation position (X0, Y0) of the laser beam from the sensor 30 is read. This irradiation position (X0, Y0) becomes the origin of the subsequent irradiation positions.

In step S103, the scan data is transmitted to the light source 10 and the drive unit 27, and the laser beam
Scan in the Y direction. As a result, the exposed portion of the resin liquid 15 on the molding table 13 in the resin liquid tank 12 is cured in a predetermined shape by one layer, and a photo-cured layer 16 having a predetermined thickness is formed. In step S104, the molding table 13 is lowered by a predetermined amount.
The doctor blade 14 is operated. As a result, a smooth resin liquid thin film having a predetermined thickness to be the next photocurable layer is formed on the photocurable layer 16. In step S105, it is determined whether or not modeling of all layers has been completed. If the modeling of all the layers has been completed, the process ends. If the modeling has not been completed, the process proceeds to step S106. Step S1
In step 06, a predetermined command value is transmitted to the drive unit 27, and the scanning mirror 25 is tilted to irradiate the sensor 34 with laser light. In step S107, the beam power is measured based on the output of the sensor 34. In step S108, it is determined whether the measured beam power is within a predetermined range. If the beam power is smaller than the predetermined range, step S108
Then, the process shifts to step S109 to output a command value for increasing the power of the light source 10 by a predetermined power to the light source controller 33. As a result, the output of the light source 10 increases by a predetermined power. Then, returning to step S107, the beam power is measured again. If the beam diameter power is larger than the predetermined range, the process proceeds from step S108 to step S11, and outputs a command value for reducing the power of the light source 10 by a predetermined power to the light source control unit 33. As a result, the output of the light source 10 decreases by a predetermined power. Then, returning to step S107, the beam power is measured again. As a result, the resin liquid 15 is always irradiated with a laser beam having a power within a predetermined range.

If the beam power is within the predetermined range, the process shifts from step S107 to step S111,
As in the case of 101, a predetermined command value is transmitted to the drive unit 27, and the scanning mirror 25 is tilted to irradiate the light receiving surface of the sensor 30 with laser light. In step S112, the irradiation position (X1, Y1) of the laser beam from the sensor 30 is read. In step S113, the correction amount (ΔX, ΔY) is obtained from the difference between the current irradiation position (X1, Y1) and the origin (X0, Y0). In step S114, the correction of the scan data at the time of forming the next photocurable layer is performed. Specifically, X (scan data after correction) = X (scan data before correction) −ΔX, Y
(Scan data after correction) = Y (scan data before correction) −
The data is corrected by ΔY. Upon completion of the correction in step S114, the process returns to step S103, in which the scanning data of the next layer is transmitted to the light source 10 and the driving unit 27, and the subsequent operation is repeated until the modeling is completed.

Here, in addition to correcting the displacement of the irradiation position, by controlling the beam power within a predetermined range,
It is possible to keep the cured shape and the degree of curing of the resin at the time of laser beam irradiation constant, and to perform modeling with higher precision and good adhesion between layers. Other Embodiments (a) In the above embodiments, an ultraviolet beam or another beam may be used instead of the laser beam.

(B) The installation positions of the sensors 30, 32, and 34 are merely examples, and any positions may be used as long as they can receive laser light.

[0065]

As described above, according to the present invention, according to the method for forming a three-dimensional shape according to the inventions, the irradiation position of the light beam is measured, the variation of the irradiation position based on the measurement position is corrected Therefore, the irradiation position is less likely to fluctuate, and modeling can be performed with high accuracy.

[0066] If fixed by irradiation position with one or more sensors is measured, the position of the sensor is improved reliably fixed measurement accuracy, it is possible to perform molding with higher accuracy. The light beam of the light source substantially irradiated position sensor located at the same height is measured lever, the resin liquid adhesion of problems no longer occur with less affected by bending of the support member of the optical system In addition, the measurement accuracy is further improved, and deterioration of the sensor performance can be prevented.

[0067] The light beam is spectrally can accurately correct lever irradiation position of one of the spectral beam is measured by the sensor, the variation in the irradiation position of the light beam during irradiation to the resin solution layer in real time, more precisely The modeling can be performed. Using one or more sensors to move, lever to recognize the irradiation position of the light beam at a predetermined position, can be widely accurately measure the irradiation position of the light beam traveling.

[0068] irradiation position sensor attached to the scavenging come up member is measured lever, you can move the sensor without using a separate movable member. Sweep can up member is lever to rest in the central portion and the end portion of the shaped area of the shaped product, the correction of the translation component in the resin liquid level (origin correction) as well, the deviation due to the distance from the reference point (end) A correction (gain correction) in consideration of the increment of the amount can also be performed, and the fluctuation can be corrected with higher accuracy.

[0069] sweep can take-up lever to move the light beam is synchronized with the horizontal movement of the member, can correct for variations in any of the irradiation position during the irradiation of a plurality of finite sensors, performs modeling with higher precision be able to. Each photocurable layers get every variation correction line <br/> cracking lever, fabrication accuracy of the photo hardening layer is further improved.

[0070] a certain time and / or each variation correction for each obtain a constant layer is performed lever, molding accuracy is improved. For example, at a predetermined timing, the focal length of the light beam and / or
Or beam diameter is measured, the variation of the focal length of the light beam in addition to the correction of the variation of the irradiation position is further corrected
For example , the cured shape and the degree of curing of the resin at the time of light beam irradiation can be made constant, and modeling with higher precision and excellent adhesion between layers can be performed.

[0071] was example measured output of the light beam at a predetermined timing if, lever is output control of the light source based on the measurement result, variations in the output of the light source is suppressed, curing the shape of the resin during the light beam irradiation In addition, the degree of curing can be made constant, and modeling with higher precision and excellent adhesive strength between layers becomes possible.

[Brief description of the drawings]

1 is a perspective view of an optical molding apparatus used in the practice of the first embodiment.

FIG. 2 is a flowchart showing the procedure of the operation.

FIG. 3 is a perspective view of an optical shaping apparatus used for implementing the second embodiment.

FIG. 4 is a perspective view of an optical shaping apparatus used for implementing a third embodiment.

FIG. 5 is a flowchart showing the procedure of the operation.

FIG. 6 is a plan view illustrating a measurement area.

FIG. 7 is a flowchart illustrating an implementation procedure of a fourth embodiment.

FIG. 8 is a flowchart showing an implementation procedure of the fifth embodiment.

FIG. 9 is a perspective view of an optical shaping apparatus used for implementing the sixth embodiment.

FIG. 10 is a schematic diagram showing a configuration of a focal length adjuster.

FIG. 11 is a flowchart illustrating an implementation procedure of a sixth embodiment.

FIG. 12 is a perspective view of an optical shaping apparatus used for implementing the seventh embodiment.

FIG. 13 is a flowchart showing the procedure of the operation.

FIG. 14 is a graph showing a change over time in an irradiation position.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Light source 11 Optical scanning part 12 Resin liquid tank 13 Molding stand 14 Doctor blade 15 Photocurable resin 16 Photocurable layer 17 Laser beam 24, 25 X, Y scanning mirror 26, 27 X, Y drive part 28 Beam splitter 29 Focal length Adjuster 30, 30a-30c Sensor 31 Computer 32, 34 Sensor 33 Light source controller

Continuation of the front page (72) Inventor Kikuma Higashi, 1048 Odakadoma, Kadoma, Osaka Pref. Matsushita Electric Works, Ltd. (56) References JP-A-4-91929 (JP, A) JP-A-4-506110 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B29C 67/00

Claims (8)

(57) [Claims] 1. A molded article having a desired three-dimensional shape by irradiating a light beam to a photocurable resin liquid stored in a resin liquid tank to form a photocurable layer, and stacking a plurality of such photocurable layers. In the method for obtaining the resin liquid, one piece moving between the ends of the resin liquid tank
Or the light beam irradiation position using a plurality of sensors
By recognizing the deviation, the photocurable resin liquid
Method of forming a three-dimensional shape, characterized in that for correcting the variation of the light beam irradiation morphism position that. Wherein said sensor, according to claim 1 which is attached to the sweeping members sweep up by horizontally moving at least a portion of the liquid resin layer formed on the photocurable layer formed on the molding base or previous A method for forming the three-dimensional shape according to the above. 3. The method for forming a three-dimensional shape according to claim 2, wherein the sweeping member is stopped at a center portion and an end portion of a shaping area of the shaping object. 4. A method of forming a three-dimensional shape according to claim 1 or 2, wherein synchronizing the light beam in the horizontal movement of the sweeping member. 5. A method of forming a three-dimensional shape according to any one of claims 1 to 4 for the variation correction for each obtain each photocurable layer. 6. A method of forming a three-dimensional shape according to any one of claims 1 to 4 for the variation correction for each obtained for a predetermined time and / or each constant layer. 7. measure the focal length and / or beam diameter of the light beam, the method of forming the three-dimensional shape according to any one of claims 1 to 6, further correcting the variation of the focal length of the light beam. 8. measures the output of the light beam, the three-dimensional shape forming method according to any one of claims 1 to 7 for controlling the output of the light source.