JP3027159U - Inspection probe - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] Plural plungers are arranged at a finer pitch. SOLUTION: A coil spring 2 having a rectangular cross-sectional shape of a wire member is disposed in a through hole 4a of a block 4 so as to be prevented from coming off, and a plunger 3 is elastically supported by a tip end side of the coil spring 2 to form the through hole 4a. The tip end side of the plunger 3 is slidably protruded from the tip end side opening 4b to elastically contact the terminal of the component to be inspected.
Since the buckling is smaller than that of the conventional coil spring in which the wire has a circular cross-sectional shape, the coil spring 2 alone holds the plunger 3 with good straightness and stability without housing the coil spring 2 in the sleeve. Can be elastically brought into contact with the terminal of the component to be inspected, and a plurality of plungers 3 can be arranged at a finer pitch because there is no sleeve.

Description

[Detailed description of the device]

[0001]

[Technical field to which the device belongs]

 The present invention relates to an inspection probe used when an electric signal is taken out from a terminal of an electronic component such as a chip component, an LSI or an LCD for inspection.

[0002]

[Prior art]

 FIG. 5 is a schematic cross-sectional view showing an example of a conventional probe used for electrically inspecting electronic parts such as chip parts, LSIs and LCDs.

In this probe 100, a plurality of conductive plungers 101 are inserted into a plurality of holding holes 102a provided in an insulating block 102 via conductive cylindrical sleeves 103, respectively. , Are held in parallel with each other. Each plunger 101 is slidably fitted in a socket 104 whose rear end is electrically conductive by being urged outward by a coil spring 105 having a circular cross-sectional shape of the wire and prevented from coming off. And the socket 104 is fixed in the sleeve 103.

As described above, the plungers 101 are held in parallel with each other while being electrically insulated from the holding holes 102 a of the block 102 and elastically provided in the length direction by the coil springs 105. Has been done. Further, the number and the pitch of the plungers 101 are set corresponding to the respective terminals of the inspected component (not shown) such as LSI and LCD.

As shown in FIG. 6, a plurality of probes 100 having the above-described structure are arranged in a block 102 at a predetermined pitch, and the tip of each plunger 101 is provided for each of parts to be inspected (not shown) such as LSI and LCD. The terminals are brought into contact with each other, and an electric signal is taken out through the plunger 101, the coil spring 105 and the sleeve 103 to perform various inspections. Further, when the tip of the plunger 101 is brought into contact with the terminal of the component to be inspected, the plunger 101 comes into contact with the terminal at a predetermined pressure due to the elastic force of the coil spring 105, so that the inspection can be performed without damaging the terminal. .

[0006]

[Problems to be solved by the device]

 In recent years, as the density of electronic parts such as LSI and LCD, which are the parts to be inspected, has increased, the pitch between the terminals has become narrower. Therefore, the pitch between the plungers 101 described above also needs to be narrowed accordingly.

However, as described above, the conventional probe 100 is apt to buckle because the wire rod of the coil spring 105 has a circular cross-sectional shape. For this reason, a cylindrical sleeve 103 and a socket 104 for accommodating the coil spring 105 are provided outside the plunger 101. However, the thickness of the sleeve 103 or the like (for example, about 0.02 to 0.05 mm) is doubled. Since the probe 100 as a whole has a large diameter, it has become difficult to arrange a plurality of plungers 101 corresponding to terminals with a fine pitch such as a high-density mounted LSI or LCD.

Further, since the sleeve 103, the socket 104, and the like can be attached to the outside of the coil spring 105, the number of parts is increased and the assembling process is also increased, which causes a problem of high cost.

Therefore, an object of the present invention is to provide a probe for inspection in which a plurality of plungers can be arranged at a fine pitch and the cost can be reduced.

[0010]

[Means for Solving the Problems]

 The present invention has been made in view of the above circumstances, and the present invention biases a tip end of a slidably supported plunger with a coil spring so as to elastically contact a terminal of a component to be inspected. In the inspection probe, the coil spring is configured such that the wire rod has a rectangular cross-sectional shape and slidably supports the plunger. The coil spring serves as an outer cylinder. It is characterized by being installed in the hole of a block made of an insulating material.

Further, the coil spring is a compression coil spring made of a conductive member or a tension coil spring, and its cross-sectional shape is formed in a rectangular shape having longer sides in the longitudinal direction than sides in the radial direction. Is characterized by.

Further, the plungers are arranged in the respective holes of the block according to the number of terminals of the component to be inspected, and the pitch between the plungers is arranged at 0.10 to 0.30 mm. I am trying.

[0013]

[Embodiment of device]

 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic diagram showing an inspection probe according to a first embodiment of the present invention. This probe 1 is composed of a coil spring 2 of a compression spring type in which the wire rod has a thin plate cross section, and a cylindrical plunger 3 supported on the tip side of the coil spring 2, and is a block formed of an insulating member such as synthetic resin. 4 through holes 4a.

The coil spring 2 is formed of, for example, a hard steel wire into a cylindrical shape having a diameter of 0.15 mm, and the wire rod has a cross-sectional shape of, for example, a width w of 0.10 mm and a thickness of d 0.02 mm, which is an elongated rectangle in the longitudinal direction. (See FIG. 2), and is arranged in the through hole 4a of the block 4 with almost no clearance with the inner wall surface thereof. A plunger 3 is supported on the front end side of the coil spring 2, for example, by caulking, and a signal extraction plunger 5 is supported and biased on the rear end of the coil spring 2, for example, by caulking. Are locked in the openings 4b and 4c, respectively. The plunger 3, the coil spring 2, and the signal extraction plunger 5 are electrically connected. The outside of the signal extraction plunger 5 projects from the opening 4c on the rear end side of the through hole 4a and is connected to the measurement device (not shown) side.

In the plunger 3, the plunger rear portion 3a is elastically supported by the tip end side of the coil spring 2 by, for example, caulking, and the tip end side of the plunger 3 slidably projects from the opening 4b on the tip end side of the through hole 4a. There is. The plunger 3 has a diameter slightly smaller than that of the coil spring 2, and is formed with a diameter of 0.10 mm, for example.

The plunger 3 elastically supported by the coil spring 2 has, for example, 0. It is inserted into each through hole 4a arranged in plural in the block 4 at a fine pitch of 10 to 0.30 mm (0.20 mm in this embodiment). The number of the plungers 3 and the pitch thereof are set corresponding to each terminal of the inspected component such as LSI and LCD.

Next, the operation of the probe 1 according to the above-described first embodiment will be described. The tip of the plunger 3 is elastically brought into contact with each terminal (not shown) of the parts to be inspected, such as LSI and LCD, by the coil spring 2, so that the electric signal from each of the terminals is received by the plunger 3 and the coil spring. 2. Input to a measuring device (not shown) through the signal take-out plunger 5, and a predetermined inspection is performed.

At this time, since the coil spring 2 is formed in a thin plate rectangular shape in cross section, the spring pressure is much larger than that of the above-described conventional coil spring in which the wire rod has a circular cross section (for example, 2 As the total length of the coil spring 2 becomes shorter and the cross-sectional resistance value becomes smaller, the tip of the plunger 3 comes into contact with each terminal of LSI, LCD, etc. with a stable contact pressure, and an electric signal is transmitted. High-frequency current can be measured accurately.

Further, since the coil spring 2 has a rectangular cross section elongated in the longitudinal direction, the coil spring 2 is less buckled than the coil spring having the circular cross section of the conventional example described above, and the coil spring of the conventional example has the same shape as the coil spring. The plunger 3 can be stably supported with good straightness without using a cylindrical sleeve on the outside. Therefore, since a cylindrical sleeve is not required, the diameter of the probe 1 as a whole can be reduced accordingly, and the pitch between the adjacent plungers 3 can be made smaller (for example, as shown in the conventional example). With a probe using a cylindrical sleeve, the minimum pitch was about 0.4 mm, but it can be about 0.10 to 0.30 mm).

Further, since there is no cylindrical sleeve on the outside of the coil spring 2, the sleeve and the process of assembling the sleeve are unnecessary, and the cost can be reduced.

Further, since the coil spring 2 has a rectangular cross section elongated in the longitudinal direction, the coil spring 2 has better durability and a longer life than the above-described conventional coil spring having a circular cross section.

FIG. 3 is a schematic view showing an inspection probe according to a second embodiment of the present invention. This probe 10 includes a coil spring 12 of a tension spring type in which a wire rod has a thin plate-shaped cross section, and a cylindrical plunger inserted in the coil spring 12 in the longitudinal direction and supported on the rear end side of the coil spring 12. 13 and is inserted into the through hole 14a of the block 14 formed of an insulating member such as synthetic resin.

The coil spring 12 is formed of, for example, a hard steel wire into a cylindrical shape having a diameter of 0.15 mm, and the wire rod has a cross-sectional shape of, for example, a rectangular shape having a width w of 0.10 mm and a thickness of d 0.02 mm, which is elongated in the longitudinal direction. It is formed (see FIG. 4), and is disposed in the through hole 14 a of the block 14 with almost no clearance with the inner wall surface thereof. The flange 12a provided at the tip of the coil spring 12 is arranged in a groove 14b formed at the tip of the through hole 14a to prevent the coil spring 12 from coming off.

The plunger 13 is elastically supported by the rear end 12b of the coil spring 12 by, for example, caulking, and the tip side thereof slidably projects from the opening 14c on the tip side of the through hole 14a. The end side projects from the opening 14d on the rear end side of the through hole 14a and is drawn out to the measuring device (not shown) side. Further, the plunger 13 has a diameter slightly smaller than that of the coil spring 12, and is formed with a diameter of 0.08 mm, for example.

Plural plungers 13 elastically supported by the coil springs 12 are formed in the block 14 at a fine pitch of 0.10 to 0.30 mm (0.20 mm in the present embodiment), for example. It is inserted into each through hole 14a. The number of the plungers 13 and the pitch thereof are set corresponding to each terminal of the inspected component such as LSI and LCD.

Next, the operation of the probe 10 according to the above-described second embodiment will be described.

The tip end of the plunger 13 is elastically brought into contact with each terminal (not shown) of the device under test, such as LSI or LCD, by the coil spring 12, so that the electric signal from each terminal is transmitted to the plunger 13. It is input to the measuring device (not shown) through the and the prescribed inspection is performed.

At this time, since the coil spring 12 is formed in a thin plate rectangular shape in cross section, the spring pressure is larger (for example, twice as much as that of the conventional coil spring in which the wire rod has a circular cross section). As a result, the tip of the plunger 13 comes into contact with each terminal of the LSI, LCD, etc. with a stable contact pressure, and a weak electric signal can be accurately measured.

Further, since the coil spring 12 has a rectangular cross section elongated in the longitudinal direction, the buckling is smaller than that of the coil spring having the circular cross section of the conventional example described above, and the coil spring 12 has an outer side of the coil spring like the probe of the conventional example. The plunger 13 can be stably supported with good straightness without using a cylindrical sleeve. Therefore, since a cylindrical sleeve is not necessary, the diameter of the probe 10 as a whole can be made smaller, and the pitch between the adjacent plungers 13 can be made smaller (for example, the cylinder shown in the conventional example). The minimum pitch of the probe using a sleeve is 0.4mm, but it can be 0.10 to 0.30mm.)

Further, since there is no cylindrical sleeve on the outside of the coil spring 12, the sleeve and the process of assembling the sleeve are unnecessary, and the cost can be reduced.

Further, since the coil spring 12 has a rectangular cross-section elongated in the longitudinal direction, the coil spring 12 has better durability and a longer life than the above-described coil spring having a circular cross-section.

In each of the above-described embodiments, the diameter of the coil springs 2 and 12 is set to 0.15 mm, and the pitch between the adjacent plungers 3 and 13 is set to 0.20 mm. By making the diameters of the plungers 3 and 13 smaller, the pitch between the plungers 3 and 13 can be made smaller in the range of 0.20 mm to 0.10 mm.

[0034]

[Effect of device]

 As described above, according to the present invention, the coil spring having a smaller cross-sectional shape than that of the conventional coil spring having a circular cross-sectional shape has a rectangular cross-sectional shape to elastically support the plunger. , It is possible to stabilize the plunger with good straightness and to contact each terminal of the inspected part with a predetermined pressure only by the coil spring without arranging a cylindrical sleeve etc. around the coil spring as in the past. it can. Therefore, since the diameter can be reduced at least by the amount without the sleeve, multiple plungers can be arranged at a finer pitch, and measurement can be performed corresponding to each terminal of the inspected part arranged at a finer pitch. It can be performed.

Further, since the sleeve and the assembling process thereof which have been conventionally used are unnecessary, the cost can be reduced.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing an inspection probe according to a first embodiment of the present invention.

FIG. 2 is an enlarged sectional view showing a part of a coil spring of the inspection probe shown in FIG.

FIG. 3 is a schematic sectional view showing an inspection probe according to a second embodiment of the present invention.

4 is an enlarged cross-sectional view showing a part of a coil spring of the inspection probe shown in FIG.

FIG. 5 is a schematic cross-sectional view showing an inspection probe according to a conventional example.

FIG. 6 is a schematic diagram showing a conventional inspection probe having a plurality of arrays.

[Explanation of symbols]

 1, 10 probe 2 coil spring (compression spring type) 12 coil spring (tensile spring type) 3, 13 plunger 5 signal extraction member (signal extraction plunger) 4, 14 block 4a, 14a hole (through hole)

Claims (6)

[Scope of utility model registration request] 1. A probe for inspection in which a tip end of a slidably supported plunger is biased by a coil spring so as to elastically contact a terminal of a component to be inspected, wherein the coil spring is The wire rod is formed to have a rectangular cross-section and is configured to slidably support the plunger, and the coil spring is attached to a hole of a block made of an insulating material as an outer cylinder. Inspection probe characterized by. 2. The inspection probe according to claim 1, wherein the coil spring is a compression coil spring made of a conductive member. 3. The coil spring is a tension coil spring, the tip side of which is slidable with the tip side of the plunger inserted in the inside along the longitudinal direction, is retained in the hole, and the rear end side thereof. The probe for inspection according to claim 1, wherein the plunger supports the side opposite to the tip end portion of the plunger. 4. The inspection probe according to claim 1, wherein the coil spring is formed in a rectangular shape whose cross-sectional shape has a longer side in a longitudinal direction than a side in a radial direction. 5. A signal extracting member for extracting an electric signal from the terminal to the outside is slidably supported on the side opposite to the side supporting the plunger of the coil spring, and is biased by the coil spring. The inspection probe according to claim 1, 2 or 4, wherein the electric signal output from the terminal is taken out through the plunger, the coil spring, and the signal extracting member. 6. The plunger is arranged in each hole of the block according to the number of terminals of the inspected component,
Moreover, the pitch between the plungers is 0.10 to 0.30 m.
The probe for inspection according to claim 1, which is arranged in m.