JP3020360B2 - Method and apparatus for cleaning electronic parts or precision parts - Google Patents
Method and apparatus for cleaning electronic parts or precision partsInfo
- Publication number
- JP3020360B2 JP3020360B2 JP4271312A JP27131292A JP3020360B2 JP 3020360 B2 JP3020360 B2 JP 3020360B2 JP 4271312 A JP4271312 A JP 4271312A JP 27131292 A JP27131292 A JP 27131292A JP 3020360 B2 JP3020360 B2 JP 3020360B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaned
- holding
- jig
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、電子部品又は精密部品
類の洗浄方法及びその装置、詳しくは、油脂、機械油、
切削油、グリース、液晶及びフラックス等の汚染物質が
付着した電子部品又は精密部品類の洗浄方法及びその装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for cleaning electronic parts or precision parts.
The present invention relates to a method and an apparatus for cleaning electronic components or precision components to which contaminants such as cutting oil, grease, liquid crystal, and flux have adhered.
【0002】[0002]
【従来の技術及び発明が解決しようとする課題】従来、
精密部品又は治工具類等の固体表面に存在する、油脂、
機械油、切削油、グリース、液晶及びフラックス等の有
機物を主体とする汚れの除去には、ケロシン、ベンゼ
ン、キシレン等の炭化水素系溶剤;トリクロロエチレ
ン、テトラクロロエチレン等の塩素系溶剤;トリクロロ
トリフルオロエタン等のフロン系溶剤;界面活性剤やビ
ルダーを配合した水系の洗浄液等が使用されている。特
に、電子、電気、機械等の部品には、その高洗浄性、難
燃性という特性を生かしてフロン系溶剤又は塩素系溶剤
が使用されてきた。2. Description of the Related Art
Oils and fats on solid surfaces such as precision parts or tools
For removing dirt mainly composed of organic substances such as machine oil, cutting oil, grease, liquid crystal and flux, hydrocarbon solvents such as kerosene, benzene and xylene; chlorine solvents such as trichloroethylene and tetrachloroethylene; trichlorotrifluoroethane and the like A chlorofluorocarbon-based solvent; an aqueous cleaning solution containing a surfactant or a builder is used. In particular, fluorocarbon-based solvents or chlorine-based solvents have been used for components such as electronics, electricity, and machines, taking advantage of their high detergency and flame retardancy.
【0003】しかしながら、上記塩素系溶剤及びフロン
系溶剤を用いる洗浄液は、安全性、毒性、環境汚染性等
に大きな問題を有していることが明らかにされ、国際レ
ベルでその廃止が進められている。[0003] However, it has been revealed that cleaning solutions using the above-mentioned chlorinated solvents and chlorofluorocarbon-based solvents have serious problems in safety, toxicity, environmental pollution, etc., and their abolition has been promoted on an international level. I have.
【0004】この様な背景から塩素系溶剤やフロン系溶
剤に替わる洗浄液として、テルペン系溶剤、炭化水素系
溶剤、アルコール系溶剤等の溶剤系代替洗浄液や界面活
性剤等を含有する水系の洗浄液が開発され、これらの洗
浄液を用いた洗浄方法は、通常、被洗浄物を洗浄液中に
浸漬すること又はシャワーノズルを用いて洗浄液を被洗
浄物に噴射すること等による洗浄工程とこれらの洗浄工
程と同様にして実施されるすすぎ工程とを有する。[0004] From such a background, a solvent-based alternative cleaning solution such as a terpene-based solvent, a hydrocarbon-based solvent, or an alcohol-based solvent, or an aqueous-based cleaning solution containing a surfactant or the like, is used as a cleaning solution in place of a chlorine-based solvent or a fluorocarbon-based solvent. Cleaning methods using these cleaning liquids have been developed.These cleaning steps are usually performed by immersing the cleaning target in the cleaning liquid or spraying the cleaning liquid onto the cleaning target using a shower nozzle. And a rinsing step performed in the same manner.
【0005】上記の被洗浄物を洗浄液中に浸漬すること
による洗浄工程又はすすぎ工程において適用される洗浄
方法としては、超音波振動法、揺動法、液中シャワー法
及び液中回転法等が挙げられる。また、シャワーノズル
を用いて洗浄液又はすすぎ液を被洗浄物に噴射すること
等による洗浄工程又はすすぎ工程において適用される洗
浄方法としては、シャワーノズルとして回転ノズルを用
いる方法及び被洗浄物を回転させながら洗浄液又はすす
ぎ液を被洗浄物に噴射する方法等が挙げられる。As a cleaning method applied in the cleaning step or the rinsing step by immersing the object to be cleaned in a cleaning liquid, an ultrasonic vibration method, an oscillating method, a submerged shower method, a submerged rotation method, and the like are used. No. Further, as a cleaning method applied in a cleaning step or a rinsing step by spraying a cleaning liquid or a rinsing liquid onto the object to be cleaned using a shower nozzle, a method using a rotating nozzle as a shower nozzle and rotating the object to be cleaned are used. A method of injecting the cleaning liquid or the rinsing liquid onto the object to be cleaned while rinsing is used.
【0006】しかし、上記超音波振動法は、被洗浄物自
体が破損する場合があるという問題があり、上記揺動
法、上記液中シャワー法、及び上記シャワーノズルを用
いて洗浄液を被洗浄物に噴射すること等による方法は、
被洗浄物が単数の場合には効果的であるが、治具に複数
の被洗浄物がセットされた場合には全ての被洗浄物を効
率よく均一に洗浄することが困難となるという問題があ
った。また、上記液中回転法(実開昭61−10913
6号公報参照)は、上記の問題を解決する比較的良好な
手段であるが、この場合にも治具に複数の被洗浄物がセ
ットされた場合には被洗浄物間の液が共回りすることに
よって被洗浄物周辺の液の更新が行われ難いため洗浄性
が低下するという問題があった。[0006] However, the ultrasonic vibration method has a problem that the object to be cleaned may be damaged, and the cleaning liquid is applied to the object to be cleaned using the swinging method, the submerged shower method, and the shower nozzle. The method by injecting into
This is effective when the object to be cleaned is a single object.However, when a plurality of objects to be cleaned are set in a jig, it is difficult to efficiently and uniformly clean all the objects to be cleaned. there were. In addition, the above-mentioned liquid rotation method (Japanese Utility Model Application Laid-Open No. 61-10913)
No. 6) is a relatively good means for solving the above problem, but also in this case, when a plurality of objects to be cleaned are set in the jig, the liquid between the objects to be cleaned rotates together. By doing so, it is difficult to renew the liquid around the object to be cleaned, so that there is a problem that the cleaning property is reduced.
【0007】従って、本発明の目的は、電子部品又は精
密部品類の洗浄において、被洗浄物を破損することな
く、簡便に、かつ短時間で効率よく複数枚の被洗浄物を
洗浄することを可能にする電子部品又は精密部品類の洗
浄方法及びその装置を提供することにある。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to easily and efficiently clean a plurality of objects to be cleaned in a short time without damaging the objects to be cleaned in electronic parts or precision parts. It is an object of the present invention to provide a method and an apparatus for cleaning electronic parts or precision parts that can be used.
【0008】[0008]
【課題を解決するための手段】本発明者らは、上記目的
を達成すべく鋭意研究した結果、被洗浄物保持治具によ
り被洗浄物を保持し、液中回転法により複数の被洗浄物
を洗浄する際に、該被洗浄物保持治具の間に邪魔板を挿
入することにより洗浄性が向上することを知見した。本
発明は、上記知見に基づいてなされたもので、洗浄液に
よる一回以上の洗浄工程及び/又はすすぎ液による一回
以上のすすぎ工程を有する、電子部品又は精密部品類の
洗浄方法において、上記洗浄液又はすすぎ液を仕込んだ
洗浄槽内に、被洗浄物保持治具を装備した回転軸を配設
すると共に、被洗浄物を上記被洗浄物保持治具により保
持し、邪魔板を、上記被洗浄物保持治具の回転面に対し
て略平行に且つ少なくとも該邪魔板の一部が上記被洗浄
物の回転半径内に入るように設置し、上記回転軸を回転
させることにより被洗浄物を回転させて洗浄することを
特徴とする電子部品又は精密部品類の洗浄方法を提供す
るものである。また、本発明は、本発明の洗浄方法に用
いられる好ましい洗浄装置として、被洗浄物の入出口を
備えた洗浄槽と、該洗浄槽内に配設され、複数の被洗浄
物保持治具を装備した回転軸と、該被洗浄物の間に該被
洗浄物保持治具の回転面に対して略平行に挿入可能な複
数枚の邪魔板と、上記回転軸を回転させる回転手段とを
具備することを特徴とする電子部品又は精密部品類の洗
浄装置を提供するものである。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, the object to be cleaned is held by a jig for holding the object to be cleaned and a plurality of objects to be cleaned are rotated by a submerged rotation method. It has been found that, when cleaning is performed, the cleaning property is improved by inserting a baffle plate between the jigs for holding the object to be cleaned. The present invention has been made based on the above findings, and has a cleaning method for an electronic component or precision parts, which has one or more cleaning steps with a cleaning liquid and / or one or more rinsing steps with a rinsing liquid. Alternatively, a rotating shaft equipped with a jig for holding an object to be washed is disposed in a washing tank charged with a rinsing liquid, and the object to be washed is held by the jig for holding an object to be washed. The object to be cleaned is rotated by rotating the rotating shaft by setting the baffle plate substantially parallel to the rotation surface of the object holding jig and at least a part of the baffle plate within the rotation radius of the object to be cleaned. It is intended to provide a method for cleaning electronic parts or precision parts, which is characterized in that the cleaning is performed by cleaning. Further, the present invention provides, as a preferable cleaning apparatus used in the cleaning method of the present invention, a cleaning tank provided with an inlet / outlet for an object to be cleaned, and a plurality of jigs for holding an object to be cleaned, which are disposed in the cleaning tank. Equipped with a rotating shaft equipped, a plurality of baffle plates that can be inserted between the objects to be washed substantially parallel to the rotation surface of the jig for holding the object to be washed, and rotating means for rotating the rotating shaft. The present invention provides a cleaning device for electronic components or precision components.
【0009】以下、本発明の洗浄方法について詳細に説
明する。本発明の洗浄方法における洗浄工程は、洗浄液
により洗浄を行う工程である。上記洗浄工程における洗
浄方法としては、特に限定はなく、浸漬法(被洗浄物を
洗浄槽に浸漬させる方法)、例えば、超音波法、揺動
法、液中シャワー法、液中回転法等が挙げられ、又、シ
ャワー法(シャワーノズルを用いて洗浄液を被洗浄物に
噴射する方法)、例えば、シャワーノズルとして回転ノ
ズルを用いる方法、被洗浄物を回転させながら洗浄液を
被洗浄物に噴射する方法等が挙げられ、該洗浄工程は適
宜これらを組み合わせて実施される。Hereinafter, the cleaning method of the present invention will be described in detail. The cleaning step in the cleaning method of the present invention is a step of performing cleaning with a cleaning liquid. The washing method in the washing step is not particularly limited, and includes an immersion method (a method of immersing an object to be cleaned in a washing tank), for example, an ultrasonic method, a rocking method, a submerged shower method, a submerged rotation method, and the like. Also, a shower method (a method of spraying a cleaning liquid onto an object to be cleaned using a shower nozzle), for example, a method using a rotating nozzle as a shower nozzle, or spraying a cleaning liquid onto an object to be cleaned while rotating the object to be cleaned The washing step is performed by appropriately combining them.
【0010】本発明の洗浄方法におけるすすぎ工程は、
すすぎ液により、被洗浄物表面に残留する洗浄液や汚染
物質等をすすぎ落とす工程である。上記すすぎ工程にお
けるすすぎ方法としては、特に限定はなく、上記洗浄工
程における洗浄方法と同様に、例えば、シャワー法、浸
漬法等が挙げられ、該すすぎ工程は、適宜これらを組み
合わせて実施される。[0010] The rinsing step in the cleaning method of the present invention comprises:
This is a step of rinsing the cleaning liquid, contaminants, and the like remaining on the surface of the object to be cleaned with the rinsing liquid. The rinsing method in the rinsing step is not particularly limited, and includes, for example, a shower method, a dipping method, and the like, similar to the cleaning method in the cleaning step. The rinsing step is performed by appropriately combining these.
【0011】また、上記洗浄槽としては、通常の浸漬法
による洗浄工程に用いられる洗浄槽が挙げられる。[0011] Examples of the washing tank include a washing tank used in a washing step by a usual immersion method.
【0012】本発明の洗浄方法において、上記洗浄槽内
に配設される回転軸に装備される上記被洗浄物保持治具
としては、被洗浄物を保持し、邪魔板を、上記被洗浄物
保持治具の回転面に対して略平行に且つ少なくとも該邪
魔板の一部が上記被洗浄物の回転半径内に入るように設
置できるものであれば、特に制限されないが、好ましい
ものとしては、例えば、図1〜図4に示されるものが挙
げられる。In the cleaning method of the present invention, the jig for holding an object to be cleaned, which is provided on a rotating shaft provided in the cleaning tank, holds the object to be cleaned and removes the baffle plate from the object to be cleaned. It is not particularly limited as long as it can be installed substantially parallel to the rotation surface of the holding jig and at least a part of the baffle plate falls within the rotation radius of the object to be cleaned. For example, those shown in FIGS.
【0013】図1に示す被洗浄物保持治具3は、回転軸
2に鉛直に固定された2つの保持杆4と該保持杆4それ
ぞれの先端に設けられ被洗浄物1を挟持する保持部5と
からなり、該保持部5は、挟持用ネジ6を備えている。
上記被洗浄物保持治具3は、上記回転軸2の軸回り及び
軸方向に、適宜な数を設けることができる。尚、上記保
持杆4は、回転軸2に、実質的に直交しておればよく、
多少の傾きがあってもよい。図1に示す被洗浄物保持治
具による場合、上記被洗浄物1は、図1に示す如く、上
記保持部5に、上記挟持用ネジ6で該保持部5を締めつ
けることにより挟持される。A jig 3 for holding an object to be cleaned shown in FIG. 1 has two holding rods 4 vertically fixed to a rotating shaft 2 and holding sections provided at the ends of the holding rods 4 for holding the object 1 to be cleaned. 5, and the holding portion 5 includes a holding screw 6.
An appropriate number of the cleaning object holding jigs 3 can be provided around the rotation shaft 2 and in the axial direction. Note that the holding rod 4 only needs to be substantially orthogonal to the rotating shaft 2.
There may be some inclination. In the case of the object-to-be-cleaned jig shown in FIG. 1, the object to be cleaned 1 is held by the holding portion 5 by tightening the holding portion 5 with the holding screw 6, as shown in FIG.
【0014】図2に示す被洗浄物保持治具13は、回転
軸2に直交させ且つ該回転軸2を貫通させて該回転軸2
に嵌装された保持板14と、該保持板14の外部に設け
られた被洗浄物1を保持する保持部15とを具備してい
る。尚、上記保持板14は、上記回転軸2に実質的に直
交しておればよく、多少の傾きがあってもよい。そし
て、該保持部15は、図2に示すように留め具16、留
め具固定棒17及び留め具固定ネジ18を備えており、
該留め具16、該留め具固定棒17及び該留め具固定ネ
ジ18により被洗浄物1を保持するようになしてある。
上記被洗浄物保持治具13は、上記回転軸2の軸方向
に、適宜な数を設けることができる。尚、上記留め具1
6及び上記保持板14には、上記被洗浄物1との接触部
に、該被洗浄物1を安定状態に保持するために該被洗浄
物1の形状に応じた凹部(図示せず)等を設けてある。
図2に示す被洗浄物保持治具13による場合、上記被洗
浄物1は、図2に示す如く、上記留め具16を上記回転
軸2の中心方向に移動させ、該留め具16と上記保持板
14との間に上記留め具固定ネジ18で締めつけること
により両側から把持される。The jig 13 for holding an object to be cleaned shown in FIG. 2 is perpendicular to the rotating shaft 2 and penetrates the rotating shaft 2 so that the rotating shaft 2
And a holding portion 15 provided outside the holding plate 14 for holding the object 1 to be cleaned. Note that the holding plate 14 may be substantially perpendicular to the rotation shaft 2 and may have a slight inclination. The holding portion 15 includes a fastener 16, a fastener fixing bar 17, and a fastener fixing screw 18, as shown in FIG.
The object to be cleaned 1 is held by the fastener 16, the fastener fixing bar 17, and the fastener fixing screw 18.
The cleaning object holding jig 13 can be provided in an appropriate number in the axial direction of the rotating shaft 2. In addition, the above-mentioned fastener 1
6 and the holding plate 14 are provided with a concave portion (not shown) corresponding to the shape of the object 1 to be cleaned in order to keep the object 1 to be cleaned in a contact portion with the object 1 to be cleaned. Is provided.
In the case of the cleaning object holding jig 13 shown in FIG. 2, the cleaning object 1 moves the fastener 16 toward the center of the rotating shaft 2 as shown in FIG. It is gripped from both sides by being tightened between the plate 14 and the fastening screws 18.
【0015】図3に示す被洗浄物保持治具23は、回転
軸2に直交させ且つ該回転軸2を貫通させて該回転軸2
に嵌装された保持板24と、該保持板24の内部に設け
られた被洗浄物1を保持する保持部25とを具備してい
る。尚、上記保持板24は、上記回転軸2に実質的に直
交しておればよく、多少の傾きがあってもよい。上記保
持部25は、図3に示すように、保持板24の内部に、
保持する被洗浄物1の形状に合わせて移動可能に設けら
れている。即ち、上記保持部25は、上記回転軸2の半
径方向外側25aを固定し、上記回転軸2の半径方向内
側25bを可動とし、スプリング(図示せず)を用いて
被洗浄物1を締めつけるようになしてある。図3に例示
した保持板24は矩形板状体であるが、上記保持板24
としては、円板、又はその他の形状の板状体が挙げら
れ、上記被洗浄物保持治具23は、上記回転軸2の軸方
向に、適宜な数を設けることができる。図3に示す被洗
浄物保持治具23による場合、上記被洗浄物1は、図3
に示す如く、上記保持部25により、各頂点部分を固定
されて保持される。The cleaning object holding jig 23 shown in FIG. 3 is orthogonal to the rotating shaft 2 and penetrates the rotating shaft 2 so that the rotating shaft 2
And a holding portion 25 provided inside the holding plate 24 for holding the object 1 to be cleaned. Note that the holding plate 24 may be substantially perpendicular to the rotating shaft 2 and may have a slight inclination. As shown in FIG. 3, the holding portion 25 is provided inside the holding plate 24,
It is provided movably in accordance with the shape of the object 1 to be held. That is, the holding portion 25 fixes the radially outer side 25a of the rotary shaft 2 and makes the radially inner side 25b of the rotary shaft 2 movable, and tightens the object 1 to be cleaned using a spring (not shown). It has been done. The holding plate 24 illustrated in FIG. 3 is a rectangular plate,
Examples thereof include a disk or a plate-like body having another shape. An appropriate number of the jigs 23 for holding an object to be washed can be provided in the axial direction of the rotating shaft 2. In the case of the cleaning object holding jig 23 shown in FIG.
As shown in (5), each vertex portion is fixedly held by the holding unit 25.
【0016】図4に示す被洗浄物保持治具33は、図3
に示した被洗浄物保持治具23と同様の被洗浄物保持治
具であり、保持板34が円形状である他は被洗浄物保持
治具23と同じである。図4に示す被洗浄物保持治具3
3による場合、被洗浄物1は、図4に示す如く、保持部
35により、各頂点部分を固定されて保持される。The jig 33 for holding an object to be cleaned shown in FIG.
Is a jig for holding an object to be cleaned similar to the jig 23 for holding an object to be cleaned, and is the same as the jig for holding an object to be cleaned 23 except that the holding plate 34 is circular. Cleaning object holding jig 3 shown in FIG.
In the case of 3, as shown in FIG. 4, the to-be-cleaned object 1 is held by the holding unit 35 with each apex portion fixed.
【0017】本発明の洗浄方法において使用される邪魔
板は、上記被洗浄物保持治具の回転面に対して略平行に
且つ少なくとも該邪魔板の一部が上記被洗浄物の回転半
径内に入るように設置される。The baffle plate used in the cleaning method of the present invention is substantially parallel to the rotation surface of the jig for holding the object to be cleaned, and at least a part of the baffle plate is within the radius of rotation of the object to be cleaned. Installed to enter.
【0018】上記邪魔板の形状としては、矩形状、わん
曲した形状等が挙げられるが、板状体が好ましい。Examples of the shape of the baffle plate include a rectangular shape and a curved shape, but a plate-like body is preferable.
【0019】上記邪魔板の好ましい設置位置について図
5を参照しながら説明する。A preferred installation position of the baffle will be described with reference to FIG.
【0020】被洗浄物1は、回転させることにより、図
5に示すように、軌跡として回転円C1 を描く。上記回
転円C1 の円周と被洗浄物1の内側に接する円C2 の円
周との間の距離(回転円の半径方向の距離)をL1 と
し、邪魔板45の先端部と該邪魔板45を横切る上記回
転円C1 の円周との間の距離をLとする。上記邪魔板4
5の一部が上記被洗浄物1の回転半径内に入るように設
置することが好ましく、L≧0.5L1 となるように設
置することが洗浄の効果を向上する観点からより好まし
く、L≧L1 となるように設置することが更に好まし
い。The object to be cleaned 1 is rotated to draw a rotating circle C 1 as a locus, as shown in FIG. The distance (distance in the radial direction of the rotating disk) between the circumference of the circle C 2 that is in contact with the inner side of the rotating circle C 1 of the circumference and the article to be cleaned 1 and L 1, the baffle plate 45 tip and the across the baffle plate 45 the distance between the circumference of the rotating circle C 1 and L. Above baffle 4
5 is preferably installed so as to be within the rotation radius of the object 1 to be cleaned, and more preferably installed so that L ≧ 0.5L 1 from the viewpoint of improving the cleaning effect. More preferably, it is set so as to satisfy ≧ L 1 .
【0021】上記邪魔板45の先端が上記被洗浄物1の
回転半径内に入らない場合には、洗浄性に及ぼす邪魔板
の効果は小さくなる。When the tip of the baffle plate 45 does not fall within the radius of rotation of the object 1 to be cleaned, the effect of the baffle plate on the cleaning performance is reduced.
【0022】上記邪魔板45の幅B(図5参照)は、被
洗浄物の幅をb(図5参照)とすると、強度的に問題が
なければ特に限定されないが、0.05b≦B≦1.0
bとすることが好ましい。上記邪魔板45の回転軸2の
軸方向の長さD(被洗浄物回転面に対する垂直な方向の
長さ)は、被洗浄物1の種類、形状等によるが、通常、
1mm以上とされ、この長さDが大きいほど洗浄性向上
の効果が発揮されるが、被洗浄物1が複数の場合には、
被洗浄物保持治具44,44間の間隔から被洗浄物1の
厚さを引いた間隔をD1 とすると、0.1D1 ≦D≦
0.9D1 とするのが好ましい。The width B (see FIG. 5) of the baffle plate 45 is not particularly limited as long as there is no problem in strength, assuming that the width of the object to be cleaned is b (see FIG. 5). 1.0
It is preferably b. The length D of the baffle plate 45 in the axial direction of the rotation shaft 2 (the length in the direction perpendicular to the rotation surface of the object to be cleaned) depends on the type and shape of the object 1 to be cleaned.
1 mm or more, the effect of improving the cleaning performance is exhibited as the length D is larger, but when there are a plurality of objects 1 to be cleaned,
And the distance obtained by subtracting the thickness of the article to be cleaned 1 from the interval between the washload holding jig 44, 44 and D 1, 0.1D 1 ≦ D ≦
Preferably in the 0.9D 1.
【0023】本発明の洗浄方法は、回転軸2に装備した
複数の被洗浄物保持治具44の各々に被洗浄物1を保持
して洗浄する場合に特に有効である。The cleaning method of the present invention is particularly effective when the object 1 to be cleaned is to be washed while each of the plurality of jigs 44 for holding the object to be cleaned provided on the rotating shaft 2 is held.
【0024】本発明において用いられる上記回転軸の回
転方法としては、回転軸の一方の端をモーター等を駆動
源とする回転駆動装置に接続させる方法等が挙げられ
る。この場合、安定のため回転軸の他方の端をベアリン
グ等の機構で保持することが好ましい。As a method of rotating the rotary shaft used in the present invention, there is a method of connecting one end of the rotary shaft to a rotary driving device using a motor or the like as a drive source. In this case, it is preferable to hold the other end of the rotating shaft with a mechanism such as a bearing for stability.
【0025】上記回転軸の回転速度は、被洗浄物の大き
さ及び形状等により異なるが、被洗浄物の中心における
速度(線速度)が、好ましくは0.1m/s〜30m/
s、さらに好ましくは1m/s〜30m/sとなるよう
な回転速度とすればよい。上記被洗浄物の中心における
速度(線速度)が0.1m/s未満であると、洗浄効果
が小さく、30m/s超としても洗浄効果の向上が少な
く、また動力面において経済的に不利である。The rotation speed of the rotating shaft varies depending on the size and shape of the object to be cleaned, but the speed (linear velocity) at the center of the object to be cleaned is preferably 0.1 m / s to 30 m / s.
s, more preferably 1 m / s to 30 m / s. If the velocity (linear velocity) at the center of the object to be cleaned is less than 0.1 m / s, the cleaning effect is small, and even if it exceeds 30 m / s, the improvement of the cleaning effect is small, and power consumption is economically disadvantageous. is there.
【0026】尚、上記回転速度は、被洗浄物の中心を基
準とせずに、例えば、部品を搭載したプリント配線基板
等であれば、その部品の位置を基準としてもよく、ま
た、特に汚れを落としたい部位を基準にするなど、目的
に合わせて適宜な部位を基準として設定すればよい。The rotation speed may not be based on the center of the object to be cleaned, but may be based on the position of the component if the component is mounted on a printed circuit board or the like. It may be set based on an appropriate part according to the purpose, such as a part to be dropped.
【0027】また、該回転軸の回転方向は、一方向のみ
でもよく、所定時間ごとに反転させてもよく、被洗浄物
の形状及び汚れの性状により適宜選択すればよい。The rotation direction of the rotating shaft may be only one direction, or may be reversed at predetermined time intervals, and may be appropriately selected depending on the shape of the object to be cleaned and the nature of the stain.
【0028】本発明の洗浄方法に使用される洗浄液とし
ては、特に限定はないが、動植物から得られるd−リモ
ネン等のテルペン類を有効成分とするテルペン系溶剤、
ケロシン、ベンゼン、キシレン等の炭化水素を有効成分
とする炭化水素系溶剤、イソプロピルアルコール、エチ
ルアルコール、メチルアルコール等の低級アルコールを
有効成分とするアルコール系溶剤等の溶剤系代替洗浄
液、界面活性剤、及び水酸化ナトリウム、オルソケイ酸
ナトリウム等のアルカリ剤を含有する水系代替洗浄液あ
るいはこれらの希釈液があげられる。The washing liquid used in the washing method of the present invention is not particularly limited, but a terpene solvent containing a terpene such as d-limonene obtained from animals and plants as an active ingredient,
Kerosene, benzene, hydrocarbon-based solvents containing hydrocarbons as active ingredients such as xylene, isopropyl alcohol, ethyl alcohol, solvent-based alternative cleaning liquids such as alcohol solvents containing lower alcohols such as methyl alcohol as active ingredients, surfactants, And an aqueous alternative washing liquid containing an alkaline agent such as sodium hydroxide and sodium orthosilicate, or a diluent thereof.
【0029】上記界面活性剤としては、アニオン性、カ
チオン性、両イオン性、非イオン性界面活性剤等が用い
られるが電子部品等の部材への影響を考慮すると非イオ
ン性界面活性剤が好ましく、例えばアルキルエーテル
型、アルキルアリルエーテル型、アルキルチオエーテル
型等のエーテル型;アルキルエステル型、ソルビタンア
ルキルエステル型等のエステル型;ポリオキシアルキレ
ンアルキルアミン等のアミンとの縮合型;ポリオキシア
ルキレンアルキルアマイド等のアミドとの縮合型;ポリ
オキシエチレンとポリオキシプロピレンをランダム又は
ブロック縮合させたプルロニック又はテトロニック型;
ポリエチレンイミン系等の界面活性剤が挙げられる。こ
れらのうち、特に炭素数4〜22の炭化水素基を有する
ものが好ましい。As the above-mentioned surfactant, anionic, cationic, amphoteric, nonionic surfactants and the like are used, but in consideration of the influence on members such as electronic parts, nonionic surfactants are preferable. Ether type such as alkyl ether type, alkyl allyl ether type and alkyl thioether type; ester type such as alkyl ester type and sorbitan alkyl ester type; condensed type with amine such as polyoxyalkylene alkylamine; polyoxyalkylene alkyl amide A polyurethane or tetronic type obtained by random or block condensation of polyoxyethylene and polyoxypropylene;
A surfactant such as a polyethyleneimine-based surfactant may be used. Among them, those having a hydrocarbon group having 4 to 22 carbon atoms are particularly preferable.
【0030】上述のような非イオン性界面活性剤を含有
する洗浄液組成物は、これが混入したすすぎ洗い後のす
すぎ廃液が明瞭な曇点を示し、すすぎ廃液中の油状汚れ
及び洗浄液等の有機物を容易に分離除去することができ
るので排水処理の負荷が軽減され、排水処理性が特に良
好である。In the cleaning liquid composition containing a nonionic surfactant as described above, the rinse waste liquid after rinsing mixed with the nonionic surfactant shows a clear cloud point, and removes oily stains in the rinse waste liquid and organic substances such as the cleaning liquid. Since it can be easily separated and removed, the load of wastewater treatment is reduced, and wastewater treatment properties are particularly good.
【0031】また、上記水系代替洗浄液としては、界面
活性剤と、炭化水素化合物、難水溶性のアルキルエステ
ル類及びアルキルケトン類から選ばれる化合物とを含有
する洗浄液等も用いることができる。As the water-based alternative cleaning liquid, a cleaning liquid containing a surfactant and a compound selected from hydrocarbon compounds, poorly water-soluble alkyl esters and alkyl ketones can be used.
【0032】上記炭化水素化合物としては、例えば洗浄
又はリンス工程の温度で液状である炭素数6〜30の直
鎖又は分岐鎖の飽和又は不飽和結合を有するパラフィン
類、オレフィン類、あるいは芳香族炭化水素、脂環式炭
化水素を含む炭化水素化合物が挙げられる。上記アルキ
ルエステル類としては、例えば、洗浄又はリンス工程の
温度で液状である炭素数6〜40のモノエステル、ジエ
ステル、トリエステルが挙げられ、特に炭素数6〜18
の高級脂肪酸と炭素数1〜18のアルコールのエステ
ル;炭素数6〜18の高級脂肪酸と炭素数2〜8のジオ
ール又はトリオールとのエステル;炭素数1〜18のア
ルコールと炭素数2〜8のジカルボン酸又はトリカルボ
ン酸とのエステルが好ましい。また、上記アルキルケト
ン類としては、炭素数6〜40のジアルキルケトンが好
ましい。Examples of the hydrocarbon compound include paraffins, olefins, and aromatic hydrocarbons which are liquid at the temperature of the washing or rinsing step and have linear or branched saturated or unsaturated bonds having 6 to 30 carbon atoms. Hydrocarbon compounds including hydrogen and alicyclic hydrocarbons are exemplified. Examples of the alkyl esters include monoesters, diesters, and triesters having 6 to 40 carbon atoms which are liquid at the temperature of the washing or rinsing step, and particularly include 6 to 18 carbon atoms.
Esters of higher fatty acids and alcohols having 1 to 18 carbon atoms; esters of higher fatty acids having 6 to 18 carbon atoms and diols or triols having 2 to 8 carbon atoms; alcohols having 1 to 18 carbon atoms and 2 to 8 carbon atoms Esters with dicarboxylic or tricarboxylic acids are preferred. Further, as the alkyl ketones, dialkyl ketones having 6 to 40 carbon atoms are preferable.
【0033】本発明の洗浄方法に用いられる洗浄液(洗
浄液組成物)としては、上記の成分のほか、必要に応じ
てビルダー、キレート剤、防錆剤、消泡剤等を含有する
ものを使用することもでき、また、上記の様な化合物を
用途に応じて任意に2種以上組み合わせて使用してもよ
い。As the cleaning liquid (cleaning liquid composition) used in the cleaning method of the present invention, a liquid containing a builder, a chelating agent, a rust preventive, an antifoaming agent and the like, if necessary, in addition to the above-mentioned components is used. Alternatively, two or more of the above compounds may be used in combination depending on the application.
【0034】尚、被洗浄物の汚れが、水道水、脱イオン
水、純水等により除去可能な性質の汚れである場合に
は、これらの水を洗浄液として使用してもよい。In the case where the dirt on the object to be cleaned is a dirt that can be removed with tap water, deionized water, pure water or the like, such water may be used as the cleaning liquid.
【0035】また、本発明の洗浄方法に使用されるすす
ぎ液は、被洗浄物上の汚れ及び/又は洗浄液組成物をす
すぎ洗うための液である。上記すすぎ液としては、特に
制限はないが、例えば、水道水、脱イオン水、純水ある
いは数%程度洗浄液を含む液が用途に応じて用いられ
る。上記すすぎ液は、浄化処理をした後、放流又は再利
用される。上記浄化処理は、例えば凝集沈殿、加圧浮
上、活性汚泥、活性炭、イオン交換、膜処理方法等の一
般的な排水処理法を単独あるいは適宜組み合わせて行う
ことができる。The rinsing liquid used in the cleaning method of the present invention is a liquid for rinsing dirt and / or a cleaning liquid composition on an object to be cleaned. The rinsing liquid is not particularly limited. For example, tap water, deionized water, pure water, or a liquid containing several percent of a cleaning liquid is used depending on the application. The rinsing liquid is discharged or reused after purifying. The above-mentioned purification treatment can be performed by a general wastewater treatment method such as coagulation sedimentation, pressure flotation, activated sludge, activated carbon, ion exchange, and a membrane treatment method alone or in an appropriate combination.
【0036】本発明による洗浄の対象となる電子部品又
は精密部品類としては、電子部品又は精密部品類の組
立、加工又は洗浄時の保持に使用される治工具(治具)
等を包含する。The electronic parts or precision parts to be cleaned according to the present invention include jigs (jigs) used for assembling, processing or holding the electronic parts or precision parts during cleaning.
And the like.
【0037】上記電子部品としては、例えば、電算機及
びその周辺機器、家電機器、通信機器、OA機器、その
他電子応用機器等に用いられるプリント配線基板;IC
リードフレーム、抵抗器、コンデンサー、リレー等接点
部材に用いられるフープ材;OA機器、時計、電算機
器、玩具、家電機器等に用いられる液晶表示器(液晶表
示デバイス);映像・音声記録/再生部品、その関連部
品等に用いられる磁気記録部品;シリコンやセラミック
スのウェハ等の半導体材料;水晶振動子等の電歪用部
品;CD、PD、複写機器、光記録機器等に用いられる
光電変換部品等が挙げられる。The electronic components include, for example, printed wiring boards used in computers and their peripheral devices, home appliances, communication devices, OA devices, and other electronic application devices; ICs
Hoop materials used for contact members such as lead frames, resistors, capacitors, relays; Liquid crystal displays (liquid crystal display devices) used for OA equipment, clocks, computer equipment, toys, home appliances, etc .; Video / audio recording / reproduction parts And magnetic recording parts used for related parts; semiconductor materials such as silicon and ceramic wafers; parts for electrostriction such as quartz oscillators; photoelectric conversion parts used for CD, PD, copying equipment, optical recording equipment, etc. Is mentioned.
【0038】上記精密部品類としては、例えば、電機部
品、精密機械部品、樹脂加工部品、光学部品等が挙げら
れる。上記電機部品としては、例えば、ブラシ、ロー
タ、ステータ、ハウジング等の電動機部品;販売機や各
種機器に用いられる発券用部品;販売機、キャッシュデ
ィスペンサ等に用いられる貨幣検査用部品などが挙げら
れる。上記精密機械部品としては、例えば、精密駆動機
器、ビデオレコーダー等に用いられるベアリング;超硬
チップ等の加工用部品などが挙げられる。上記樹脂加工
部品としては、例えば、カメラ、自動車等に用いられる
精密樹脂加工部品などが挙げられる。更に、上記光学部
品としては、例えば、カメラ、眼鏡、光学機器等に用い
られるレンズ等が挙げられ、その他、上記精密部品とし
て、例えばメガネフレーム、時計ケース、時計ベルト等
が挙げられる。Examples of the precision parts include electric parts, precision machine parts, resin processed parts, optical parts and the like. Examples of the electric components include motor components such as brushes, rotors, stators, and housings; ticketing components used in vending machines and various devices; and currency inspection components used in vending machines and cash dispensers. Examples of the precision machine parts include bearings used for precision drive equipment, video recorders, and the like; machining parts such as carbide tips and the like. Examples of the resin processed parts include precision resin processed parts used for cameras, automobiles and the like. Further, examples of the optical components include lenses used for cameras, glasses, optical devices, and the like, and examples of the precision components include eyeglass frames, watch cases, watch belts, and the like.
【0039】また、上記治工具類としては、上述の各種
部品例で示したような電子部品又は精密部品類の製造、
成形、加工、組立、仕上げ等を行う各種工程において取
り扱う治具、工具の他、これらの電子部品又は精密部品
類を取り扱う各種機器、その部品等が挙げられる。As the jigs and tools, there are electronic parts or precision parts as shown in the above-mentioned various parts.
In addition to jigs and tools handled in various processes for forming, processing, assembling, finishing, and the like, various devices handling these electronic components or precision components, components thereof, and the like are included.
【0040】本発明の洗浄方法は、上述の電子部品又は
精密部品類の中で、特に、フラックスの残存したプリン
ト配線基板やガラス基板に付着した液晶等の洗浄時に好
適な性能を発揮する。尚、本発明の対象となる電子部品
又は精密部品類は、これらの例に限定されるものではな
く、組立加工工程において各種の加工油やフラックス等
の後の工程の妨害物質、又は製品の特性を低下させる各
種の油性汚染物質が付着している電子部品又は精密部品
類であれば、本発明の洗浄方法を適用することができ
る。The cleaning method of the present invention exhibits a suitable performance when cleaning the liquid crystal or the like adhered to a printed wiring board or a glass substrate in which the flux remains, among the above-mentioned electronic parts or precision parts. The electronic parts or precision parts to be covered by the present invention are not limited to these examples, but may be various processing oils, fluxes, and other interfering substances in the subsequent steps in the assembling processing step, or characteristics of the products. The cleaning method of the present invention can be applied to electronic parts or precision parts to which various types of oily contaminants that reduce the contamination are attached.
【0041】更に、本発明の洗浄方法は、上記汚染物質
が、例えば、油脂、機械油、切削油、グリース、液晶、
ロジン系フラックス等の、主として有機成分の汚れであ
る場合、本発明の洗浄方法の特徴が特に発揮され、これ
らに金属粉、無機物粉等が混入した汚染物質であっても
有効である。Further, in the cleaning method of the present invention, the contaminants may be, for example, fats and oils, machine oil, cutting oil, grease, liquid crystal,
In the case of mainly organic components such as rosin flux, the characteristics of the cleaning method of the present invention are particularly exhibited, and the present invention is effective even for contaminants in which metal powder, inorganic powder and the like are mixed.
【0042】本発明の洗浄方法は、上述のように被洗浄
物の形状には制限されないが、プリント配線基板のよう
な板状体の洗浄方法として特に有効である。Although the cleaning method of the present invention is not limited to the shape of the object to be cleaned as described above, it is particularly effective as a method for cleaning a plate-like body such as a printed wiring board.
【0043】以下に、本発明の洗浄方法を、その一実施
態様に基づいて説明する。先ず、被洗浄物を前述のよう
な回転軸に装備した被洗浄物保持治具を介して保持す
る。上記被洗浄物保持治具により被洗浄物を保持する際
の向きとしては、通常、被洗浄物が板状体の場合には、
該板状体の面が、上記回転軸に対して垂直になるような
向きとする。次いで、邪魔板を、上記被洗浄物保持治具
の回転面に対して略平行に且つ少なくとも該邪魔板の一
部が上記被洗浄物の回転半径内に入るように設置した
後、洗浄液を被洗浄物が浸漬される様に仕込む。次に、
被洗浄物を上記被洗浄物保持治具により保持した状態
で、上記回転軸を回転させることにより被洗浄物を回転
させて洗浄する洗浄方法により洗浄工程を行った後、被
洗浄物が液相に浸漬しない状態にして回転による液切り
を行う。被洗浄物が液相に浸漬しない状態にする方法と
しては、回転軸の回転駆動装置及び回転軸を上方に移動
させる方法、及び液相を槽底部等から排除する方法など
が挙げられる。Hereinafter, the cleaning method of the present invention will be described based on one embodiment. First, the object to be cleaned is held via the object to be cleaned holding jig provided on the rotating shaft as described above. As the orientation when holding the object to be cleaned by the object to be cleaned holding jig, usually, when the object to be cleaned is a plate,
The plate-like body is oriented so that the plane is perpendicular to the rotation axis. Next, the baffle plate is set substantially parallel to the rotation surface of the jig for holding the object to be cleaned and such that at least a part of the baffle plate falls within the rotation radius of the object to be cleaned, and then the cleaning liquid is applied. Prepare so that the washing is immersed. next,
After the object to be cleaned is held by the jig for holding the object to be cleaned and the cleaning step is performed by a cleaning method in which the object to be cleaned is rotated by rotating the rotating shaft and the object to be cleaned is subjected to a liquid phase. The liquid is drained by rotation without immersion. Examples of a method for preventing the object to be cleaned from being immersed in the liquid phase include a method of moving the rotation drive device and the rotation axis of the rotating shaft upward, a method of removing the liquid phase from the bottom of the tank, and the like.
【0044】次に、上記洗浄工程と同様にしてすすぎ工
程を行った後、すすぎ液に浸漬しない状態にして回転に
よる液切りを行う。すすぎ工程は、通常、1回以上行わ
れるが、洗浄工程のみの場合もある。このように、被洗
浄物を液相に浸漬しない状態で回転させることによる液
切りは、排水負荷の低減に効果的であり、また最終すす
ぎ終了後には被洗浄物の乾燥にも効果的である。Next, after performing the rinsing step in the same manner as the above-mentioned washing step, the liquid is removed by rotation without being immersed in the rinsing liquid. The rinsing step is usually performed one or more times, but may include only the washing step. Thus, draining by rotating the object to be cleaned in a state where it is not immersed in the liquid phase is effective in reducing the drainage load, and also effective in drying the object to be cleaned after the final rinsing. .
【0045】更に、本発明の洗浄方法は、空気等の気体
を被洗浄物に吹き付ける方法等の、周知の液切り促進方
法を併用することができる。Further, in the cleaning method of the present invention, a well-known drainage promoting method such as a method of blowing a gas such as air onto the object to be cleaned can be used together.
【0046】また、本発明の電子部品又は精密部品類の
洗浄方法の上述した洗浄方法と共に通常の洗浄方法を適
宜併用することができる。In addition, a normal cleaning method can be appropriately used together with the above-mentioned cleaning method of the electronic parts or precision parts of the present invention.
【0047】次に、本発明の電子部品又は精密部品類の
洗浄方法において用いられる好ましい洗浄装置の一実施
例について、図面を参照しながら説明する。図6(a)
は、本発明の洗浄装置を示す縦断面図、図6(b)は、
図6(a)の洗浄装置における洗浄時の一要部を示す平
面図、図6(c)は、図6(a)の洗浄装置における被
洗浄物入出時の一要部を示す平面図、図7は、本発明の
洗浄装置の別の例を示す縦断面図である。Next, an embodiment of a preferable cleaning apparatus used in the method for cleaning electronic parts or precision parts of the present invention will be described with reference to the drawings. FIG. 6 (a)
Is a longitudinal sectional view showing the cleaning apparatus of the present invention, and FIG.
FIG. 6A is a plan view illustrating a main part of the cleaning apparatus during cleaning, FIG. 6C is a plan view illustrating a main part of the cleaning apparatus illustrated in FIG. FIG. 7 is a longitudinal sectional view showing another example of the cleaning device of the present invention.
【0048】図6に示す本発明の洗浄装置40は、被洗
浄物の入出口を備えた洗浄槽41と、該洗浄槽41内に
配設され、複数の被洗浄物保持治具44を装備した回転
軸42と、該被洗浄物保持治具44,44の間に該被洗
浄物保持治具44の回転面に対して略平行に挿入可能な
複数枚の邪魔板45と、上記回転軸42を回転させる回
転手段とを具備する。本実施例においては、上記回転軸
42は上記洗浄槽41内に鉛直に配されている。上記洗
浄槽41には、その底部に該洗浄槽41内の液相の排出
孔43が設けられ、該排出孔43は、先端に弁47を具
備し、また、該洗浄槽41は、上部に蓋50が装着でき
るようになしてある。上記洗浄槽41の底部には、複数
の被洗浄物保持治具44を装備した回転軸42を回転さ
せる軸受け48が設けられている。上記軸受け48は、
上記洗浄槽41の外部でモーター等を駆動源とする回転
駆動装置49に接続されている。上記邪魔板45は、図
6(c)に示す状態から、邪魔板回転軸46を中心とし
て回転移動させることにより、図6(b)に示すように
上記被洗浄物保持治具44,44間に挿入できるように
なしてあり、洗浄槽の蓋50を開けて被洗浄物保持治具
44を装備した回転軸42と共に被洗浄物1の入出を行
うことが可能になっている。The cleaning apparatus 40 of the present invention shown in FIG. 6 is provided with a cleaning tank 41 provided with an inlet / outlet for an object to be cleaned, and a plurality of jigs 44 for holding the object to be cleaned, which are disposed in the cleaning tank 41. The rotating shaft 42, a plurality of baffle plates 45 which can be inserted between the cleaning object holding jigs 44, 44 substantially in parallel with the rotation surface of the cleaning object holding jig 44, Rotating means for rotating 42. In this embodiment, the rotating shaft 42 is disposed vertically in the cleaning tank 41. The washing tank 41 is provided at its bottom with a discharge hole 43 for the liquid phase in the washing tank 41, the discharge hole 43 is provided with a valve 47 at the tip, and the washing tank 41 is provided at the top. The lid 50 can be attached. At the bottom of the cleaning tank 41, a bearing 48 for rotating a rotary shaft 42 equipped with a plurality of jigs 44 for holding an object to be cleaned is provided. The bearing 48 is
Outside the cleaning tank 41, the cleaning tank 41 is connected to a rotary drive 49 using a motor or the like as a drive source. The baffle plate 45 is rotated around the baffle plate rotation shaft 46 from the state shown in FIG. 6C, so that the cleaning object holding jigs 44 are moved as shown in FIG. 6B. The object to be cleaned 1 can be moved in and out together with the rotating shaft 42 provided with the object to be cleaned holding jig 44 by opening the lid 50 of the cleaning tank.
【0049】図6に示した洗浄装置を用いて洗浄を行う
際は、回転軸42に装備された被洗浄物保持治具44に
被洗浄物1を保持させると共に、邪魔板45を図6
(c)の状態に移動させた後、該回転軸42を軸受け4
8に接続固定し、該邪魔板45を図6(b)に示すよう
に被洗浄物保持治具44,44間に挿入して固定ネジ等
(図示せず)により所定位置に固定し、蓋50を閉じ
る。次に、洗浄槽41の底部の弁47を開いて洗浄液を
供給し、供給終了後、弁47を閉じ、回転駆動装置49
により軸受け48を駆動させ、回転軸42及び被洗浄物
1を回転させることにより、洗浄工程を実施する。洗浄
工程終了後は、弁47を開き、排出孔43から洗浄液を
排出する。洗浄液排出後は、回転の遠心力を利用して液
切りを行うことができる。洗浄工程終了後は、邪魔板4
5を再び図6(c)の位置に移動させ、蓋50を開けて
回転軸42及び被洗浄物1を取り出すことができる。ま
た、必要に応じて上記洗浄工程終了後に同様の操作によ
りすすぎ工程を行ったのち回転軸42及び被洗浄物1を
取り出すこともできる。When cleaning is performed using the cleaning apparatus shown in FIG. 6, the cleaning object 1 is held by the cleaning object holding jig 44 provided on the rotating shaft 42, and the baffle plate 45 is moved to the position shown in FIG.
After moving to the state of (c), the rotating shaft 42 is
8 and the baffle plate 45 is inserted between the jigs 44 to be cleaned as shown in FIG. 6 (b) and fixed at a predetermined position with fixing screws or the like (not shown). Close 50. Next, the valve 47 at the bottom of the cleaning tank 41 is opened to supply the cleaning liquid, and after the supply is completed, the valve 47 is closed and the rotation driving device 49 is closed.
The cleaning process is performed by driving the bearing 48 to rotate the rotating shaft 42 and the object 1 to be cleaned. After the cleaning step, the valve 47 is opened, and the cleaning liquid is discharged from the discharge hole 43. After draining the washing liquid, the liquid can be drained using the centrifugal force of rotation. After the cleaning process is completed, the baffle plate 4
5 can be moved to the position shown in FIG. 6C again, the lid 50 can be opened, and the rotating shaft 42 and the object 1 can be taken out. If necessary, a rinsing step may be performed by the same operation after the above-mentioned cleaning step, and then the rotating shaft 42 and the object 1 to be cleaned may be taken out.
【0050】尚、上記回転軸42は、水平に設置しても
よい。また、必要に応じてシャワーノズル、超音波発振
装置、さらに乾燥用電熱器又は乾燥用熱風を導入できる
ようなノズルを上記洗浄槽41内に設置してもよい。The rotating shaft 42 may be installed horizontally. If necessary, a shower nozzle, an ultrasonic oscillator, and a drying electric heater or a nozzle capable of introducing hot air for drying may be provided in the cleaning tank 41.
【0051】また、邪魔板45の挿入枚数は、図6に示
した洗浄装置においては被洗浄物保持治具44一枚あた
りに二枚挿入されるが、一枚あるいは三枚以上挿入する
形式であってもよく、必要に応じて枚数を増やすことが
可能である。In the cleaning apparatus shown in FIG. 6, the number of the baffle plates 45 inserted is two per one jig 44 for holding the object to be cleaned, but one or more than three jigs are inserted. The number may be increased as needed.
【0052】図7に示した洗浄装置は、本発明の洗浄装
置の別の例である。図7に示した洗浄装置60は、邪魔
板65を、邪魔板駆動装置66により平行移動させて被
洗浄物保持治具64,64間に挿入できるようになして
ある他は、図6に示した洗浄装置と同様に構成してな
る。The cleaning device shown in FIG. 7 is another example of the cleaning device of the present invention. The cleaning device 60 shown in FIG. 7 is similar to that shown in FIG. 6 except that the baffle plate 65 is moved in parallel by a baffle plate driving device 66 so that the baffle plate 65 can be inserted between the jigs 64 to be cleaned. It has the same configuration as the cleaning device.
【0053】[0053]
【作用】上記洗浄液又はすすぎ液を仕込んだ洗浄槽内
に、被洗浄物保持治具を装備した回転軸を配設すると共
に、被洗浄物を上記被洗浄物保持治具により保持し、邪
魔板を、上記被洗浄物保持治具の回転面に対して略平行
に且つ少なくとも該邪魔板の一部が上記被洗浄物の回転
半径内に入るように設置し、上記回転軸を回転させるこ
とにより被洗浄物を回転させて洗浄する場合において、
被洗浄物が回転により邪魔板へ接近する際、被洗浄物に
対して液相から及ぼされるせん断力が一時的に増大し、
該被洗浄物の表面に付着した汚れ又は残留洗浄液を該表
面から剥離させる作用が増大し、洗浄及び/又はすすぎ
を促進する。A rotating shaft equipped with a jig for holding an object to be washed is disposed in a washing tank charged with the washing liquid or the rinsing liquid, and the object to be washed is held by the jig for holding an object to be washed. Is installed substantially parallel to the rotation surface of the object-to-be-washed jig and at least a part of the baffle plate is within the rotation radius of the object to be washed, and by rotating the rotating shaft, When rotating the object to be cleaned,
When the object to be cleaned approaches the baffle plate by rotation, the shear force exerted from the liquid phase on the object to be cleaned temporarily increases,
The effect of removing dirt or residual cleaning liquid adhering to the surface of the object to be cleaned from the surface increases, thereby promoting cleaning and / or rinsing.
【0054】このことは、被洗浄物が回転により邪魔板
に接近する際、該被洗浄物付近の圧力上昇が起こり、ま
た、該被洗浄物が邪魔板から遠ざかる場合には該被洗浄
物付近の圧力降下が起こることに起因する。This means that when the object to be cleaned approaches the baffle plate by rotation, a pressure rise occurs near the object to be cleaned, and when the object to be cleaned moves away from the baffle plate, the pressure increases near the object to be cleaned. Pressure drop occurs.
【0055】このため、被洗浄物に部品等が搭載されて
いる場合、該部品の搭載部分が邪魔板に接近する際に
は、上記の圧力上昇により該部品の周囲(外側)から該
部品裏(内側)への液の流れが発生し、逆に該部品の搭
載部分が邪魔板から遠ざかる際には、上記の圧力降下に
より該部品裏(内側)から該部品の周囲(外側)への液
の流れが発生する。その結果、該部品裏(内側)におい
ても液の更新が確実に行われ、洗浄及び/又はすすぎが
促進される。For this reason, when a component or the like is mounted on the object to be cleaned, when the mounting portion of the component approaches the baffle plate, the pressure rises as described above, so that the back of the component is placed around (outside) the component. When the flow of the liquid to the inside (inside) occurs and the mounting part of the part moves away from the baffle plate, the liquid flows from the back (inside) of the part to the periphery (outside) of the part due to the pressure drop described above. Flow occurs. As a result, the liquid is reliably renewed even on the back side (inside) of the part, and cleaning and / or rinsing is promoted.
【0056】上記のように、回転により被洗浄物が邪魔
板に接近することと邪魔板から遠ざかることが周期的に
繰り返されることによって、単なる液中回転法に比べ
て、被洗浄物の洗浄/すすぎ効果が向上する。As described above, the object to be cleaned approaches the baffle plate by rotation and moves away from the baffle plate periodically, whereby the cleaning / cleaning of the object to be cleaned is performed as compared with the simple submerged rotation method. The rinsing effect is improved.
【0057】上記のように、邪魔板を、上記被洗浄物保
持治具の回転面に対して略平行に且つ少なくとも該邪魔
板の一部が上記被洗浄物の回転半径内に入るように設置
して、被洗浄物を回転させて洗浄を行うことにより、被
洗浄物が複数で、且つその保持間隔が狭い場合でも洗浄
性及び/又はすすぎ性が低下することなく、効率よく洗
浄を行うことができ、同一空間内での被洗浄物処理量を
増大させることができる。As described above, the baffle plate is set so as to be substantially parallel to the rotation surface of the jig for holding the object to be cleaned and so that at least a part of the baffle plate falls within the radius of rotation of the object to be cleaned. Then, by rotating the object to be cleaned and performing cleaning, even when there are a plurality of objects to be cleaned and the holding interval is narrow, the cleaning performance and / or the rinsing performance is not reduced, and the cleaning is efficiently performed. Thus, the processing amount of the object to be cleaned in the same space can be increased.
【0058】[0058]
【実施例】次に、実施例を挙げて本発明の洗浄方法を更
に詳細に説明するが、本発明はこれらの実施例に限定さ
れるものではない。 実施例1 図8に示すような大きさ30mm×50mm、厚さ2m
mのガラスエポキシ樹脂81上に大きさ25mm×25
mm、厚さ1mmのガラス82を、そのクリアランスが
100μmとなるように該ガラスの中心部83を接着剤
により該ガラスエポキシ樹脂上に一点で保持するように
固定し、その隙間に汚れ物質として、フラックス84
(日本はんだRX363−207Bテトラヒドロフラン
抽出分)を充填した試料(被洗浄物)85を作製した。Next, the cleaning method of the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples. Example 1 Size 30 mm × 50 mm, thickness 2 m as shown in FIG.
25 mm × 25 on glass epoxy resin 81
The glass 82 having a thickness of 1 mm and a thickness of 1 mm is fixed so that the center portion 83 of the glass is held at a single point on the glass epoxy resin with an adhesive so that the clearance becomes 100 μm, and as a dirt substance in the gap, Flux 84
(Sample to be cleaned) 85 filled with (Nippon Solder RX363-207B tetrahydrofuran extractables) was produced.
【0059】上記試料(被洗浄物)を、図6に示す洗浄
装置において、図3に示す被洗浄物保持治具で図3に示
す如く保持し、被洗浄物の表面と、該被洗浄物に対向す
る保持板との間隔が20mmの状態とし、該被洗浄物が
液面に対して水平になるようにセットした。なおL1 は
35mm、被洗浄物の内側に接する円の半径は30mm
であった。次いで、邪魔板を、上記被洗浄物保持治具間
に挿入して図6(b)の位置で固定した。上記邪魔板
は、前記Lが50mm、前記回転円の接線方向の長さB
が10mm、回転軸の軸方向の長さDが10mmの矩形
板であり、被洗浄物表面と該邪魔板(被洗浄物に対向す
る邪魔板)との距離a=5mmであった。次に、洗浄槽
中に、上記被洗浄物及び被洗浄物保持治具が完全に浸漬
するように洗浄液を満たし、上記回転軸を、被洗浄物の
ガラス中心部において1.5m/sとなるように回転さ
せて60℃で10分間洗浄を行った。また、洗浄液とし
ては、非イオン界面活性剤40wt%、C14オレフィ
ン40wt%、水20wt%の混合物を用いた。更に、
被洗浄物の表面と、該被洗浄物に対向する保持板との間
隔を30mm(a=10mm)及び40mm(a=15
mm)とした他は、上記と同様にして洗浄を行った。洗
浄後の試料におけるフラックス除去率を下記〔表1〕に
示す。The sample (the object to be cleaned) is held in the cleaning apparatus shown in FIG. 6 by a jig for holding the object to be cleaned as shown in FIG. 3, as shown in FIG. The space between the object to be cleaned was set to 20 mm, and the object to be cleaned was set to be horizontal to the liquid surface. Incidentally L 1 is 35 mm, the radius of the circle tangent to the inside of the object to be cleaned is 30mm
Met. Next, a baffle plate was inserted between the jigs for holding an object to be cleaned and fixed at the position shown in FIG. The baffle plate has a length L of 50 mm and a length B in a tangential direction of the rotating circle.
Was 10 mm and the length D in the axial direction of the rotating shaft was 10 mm, and the distance a between the surface of the object to be cleaned and the baffle plate (a baffle plate facing the object to be cleaned) was 5 mm. Next, the cleaning object is filled with the cleaning liquid so that the object to be cleaned and the jig for holding the object to be cleaned are completely immersed in the cleaning tank, and the rotation axis is set to 1.5 m / s at the center of the glass of the object to be cleaned. For 10 minutes at 60.degree. In addition, a mixture of 40 wt% of a nonionic surfactant, 40 wt% of C14 olefin, and 20 wt% of water was used as the cleaning liquid. Furthermore,
The distance between the surface of the object to be cleaned and the holding plate facing the object to be cleaned is 30 mm (a = 10 mm) and 40 mm (a = 15 mm).
mm), cleaning was carried out in the same manner as described above. The following Table 1 shows the flux removal rate of the washed sample.
【0060】比較例1 邪魔板を用いなかった他は、実施例1と同様にして、被
洗浄物の表面と、該被洗浄物に対向する保持板との間隔
を20mm、30mm及び40mmとして洗浄を行っ
た。洗浄後の試料におけるフラックス除去率を下記〔表
1〕に示す。Comparative Example 1 The same procedure as in Example 1 was carried out except that the baffle plate was not used, and the distance between the surface of the object to be cleaned and the holding plate facing the object to be cleaned was set to 20, 30, and 40 mm. Was done. The following Table 1 shows the flux removal rate of the washed sample.
【0061】尚、上記フラックス除去率は、洗浄前のフ
ラックス充填部分の面積に対する、洗浄後のフラックス
の除去されていた部分の面積の比として算出した。The flux removal rate was calculated as the ratio of the area of the flux-removed portion after cleaning to the area of the flux-filled portion before cleaning.
【0062】[0062]
【表1】 [Table 1]
【0063】また上記実施例1及び比較例1におけるフ
ラックス除去率の、被洗浄物の表面と該被洗浄物に対向
する保持板との間隔に対する依存性を表すグラフを図9
に示す。FIG. 9 is a graph showing the dependence of the flux removal rate in Example 1 and Comparative Example 1 on the distance between the surface of the object to be cleaned and the holding plate facing the object to be cleaned.
Shown in
【0064】上記表1及び図9からわかるように、本発
明の洗浄方法によれば、フラックス除去率は邪魔板のな
い場合に比べて洗浄性が高く、しかも邪魔板がない場合
には被洗浄物の表面と、該被洗浄物に対向する保持板と
の間隔が狭くなると液の共回りによる洗浄性の低下が起
こるが、邪魔板を用いることによってこれを防ぐことが
できる。従って、本発明の洗浄方法によれば、高洗浄性
により洗浄時間の短縮がなされ、更に、同一空間内で被
洗浄物を多く処理することができ、生産性の向上が期待
できる。As can be seen from Table 1 and FIG. 9, according to the cleaning method of the present invention, the flux removal rate is higher than that of the case without the baffle, and the cleaning efficiency is higher when there is no baffle. When the distance between the surface of the object and the holding plate facing the object to be cleaned is reduced, the cleaning property is reduced due to the co-rotation of the liquid, but this can be prevented by using a baffle plate. Therefore, according to the cleaning method of the present invention, the cleaning time can be shortened due to the high cleaning performance, and more objects to be cleaned can be processed in the same space, and an improvement in productivity can be expected.
【0065】実施例2 被洗浄物保持治具の形式以外は図6に示したものと同様
の洗浄装置において、大きさ140mm×100mmの
ロジン系フラックスで処理したプリント基板を図1に示
す被洗浄物保持治具でL1 が110mm、被洗浄物の内
側に接する円の半径が140mmの状態で保持し、被洗
浄物の間隔を20mmとなるように図1に示す如く保持
し、該被洗浄物が液面に対して水平になるようにセット
した。次いで、邪魔板を、上記被洗浄物間に挿入して図
6(b)の位置で固定した。上記邪魔板は、前記Lが1
20mm、前記回転円の接線方向の長さが10mm、回
転軸の軸方向の長さが10mmの矩形板であり、被洗浄
物表面と該邪魔板(被洗浄物に対向する邪魔板)との距
離a=5mmであった。次いで、水道水を用いて上記洗
浄工程と同様にしてすすぎ工程(予備すすぎ)を実施
し、最後に純水を用いて上記洗浄工程と同様にしてすす
ぎ工程(最終すすぎ)を実施した。その後、洗浄の効果
を調べるため、MIL−P−28809に従って洗浄性
試験を行い、オメガメータ(日本メタル製、600R−
SC)により、イオン残渣の測定を行った結果、その測
定値は、0.6μg/in2 であり、イオン残渣の許容
値14μg/in2 を大幅にクリアする良好な洗浄性が
発揮されたことがわかった。Example 2 In a cleaning apparatus similar to that shown in FIG. 6 except for the type of the jig for holding an object to be cleaned, a printed circuit board treated with a rosin-based flux having a size of 140 mm × 100 mm was cleaned as shown in FIG. L 1 is 110mm in the object holding jig, the radius of the circle tangent to the inside of the object to be cleaned is held in the state of 140 mm, and held as shown in FIG. 1 so that 20mm spacing object to be cleaned,該被washed The object was set so as to be horizontal to the liquid surface. Next, a baffle plate was inserted between the objects to be cleaned and fixed at the position shown in FIG. In the above baffle plate, the L is 1
A rectangular plate having a length of 20 mm, a tangential length of the rotating circle of 10 mm, and an axial length of the rotating shaft of 10 mm, which is formed between the surface of the object to be cleaned and the baffle plate (a baffle plate facing the object to be cleaned); The distance a was 5 mm. Next, a rinsing step (preliminary rinsing) was performed using tap water in the same manner as in the above-described cleaning step, and finally, a rinsing step (final rinsing) was performed using pure water in the same manner as in the above-described cleaning step. Thereafter, in order to examine the effect of cleaning, a cleaning test was performed in accordance with MIL-P-28809, and an omega meter (600R-made by Nippon Metal Co., Ltd.) was used.
The SC), result of measurement of ion residue, the measured value is 0.6 [mu] g / in 2, that good detergency to significantly clear tolerance 14 [mu] g / in 2 of ion residue was exerted I understood.
【0066】[0066]
【発明の効果】本発明の電子部品又は精密部品類の洗浄
方法によれば、被洗浄物の汚れを短時間で、簡便に且つ
効率よく除去でき、また、多くの被洗浄物の処理が可能
である。更に洗浄工程またはすすぎ工程において効率よ
く簡便に液切りがなされるため、洗浄剤の使用量、排水
負荷の低減及び乾燥時間の短縮化を図ることができる。
従って、経済的且つ生産性の高い洗浄を行うことができ
る。According to the method for cleaning electronic parts or precision parts of the present invention, dirt on the object to be cleaned can be easily and efficiently removed in a short time, and a large number of objects to be cleaned can be processed. It is. Furthermore, since the liquid is drained efficiently and simply in the washing step or the rinsing step, the amount of the detergent used, the drainage load and the drying time can be reduced.
Therefore, economical and highly productive cleaning can be performed.
【図1】図1は、本発明の洗浄方法において用いられる
被洗浄物保持治具の一例を示す斜視図である。FIG. 1 is a perspective view showing an example of a jig for holding an object to be cleaned used in the cleaning method of the present invention.
【図2】図2は、本発明の洗浄方法において用いられる
被洗浄物保持治具の別の例を示す斜視図である。FIG. 2 is a perspective view showing another example of a jig for holding an object to be cleaned used in the cleaning method of the present invention.
【図3】図3は、本発明の洗浄方法において用いられる
被洗浄物保持治具の更に別の例を示す斜視図である。FIG. 3 is a perspective view showing still another example of the jig for holding an object to be cleaned used in the cleaning method of the present invention.
【図4】図4は、本発明の洗浄方法において用いられる
被洗浄物保持治具の更に別の例を示す斜視図である。FIG. 4 is a perspective view showing still another example of the jig for holding an object to be cleaned used in the cleaning method of the present invention.
【図5】図5は、本発明の洗浄方法において用いられる
邪魔板の好ましい設置位置を説明するための概略図であ
る。FIG. 5 is a schematic diagram for explaining a preferable installation position of a baffle plate used in the cleaning method of the present invention.
【図6】図6(a)は、本発明の洗浄装置の一例を示す
縦断面図、図6(b)は、図6(a)の洗浄装置におけ
る洗浄時の一要部を示す平面図、図6(c)は、図6
(a)の洗浄装置における被洗浄物入出時の一要部を示
す平面図である。6 (a) is a longitudinal sectional view showing an example of the cleaning apparatus of the present invention, and FIG. 6 (b) is a plan view showing a main part of the cleaning apparatus of FIG. 6 (a) during cleaning. , FIG. 6C shows FIG.
It is a top view showing one important section at the time of going in and out of a thing to be washed in a washing device of (a).
【図7】図7は、本発明の洗浄装置の別の例を示す縦断
面図である。FIG. 7 is a longitudinal sectional view showing another example of the cleaning apparatus of the present invention.
【図8】図8(a)は、実施例1及び比較例1で用いた
試料を示す平面図であり、図8(b)は、その側面図で
ある。FIG. 8A is a plan view showing a sample used in Example 1 and Comparative Example 1, and FIG. 8B is a side view thereof.
【図9】図9は、実施例1及び比較例1におけるフラッ
クス除去率の、被洗浄物の表面と該被洗浄物に対向する
保持板との間隔aに対する依存性を表すグラフである。FIG. 9 is a graph showing the dependence of the flux removal rate on the distance a between the surface of the object to be cleaned and the holding plate facing the object to be cleaned in Example 1 and Comparative Example 1.
1 被洗浄物 2 回転軸 3 被洗浄物保持治具 4 保持杆 5 保持部 6 挟持用ネジ 13 被洗浄物保持治具 14 保持板 15 保持部 16 留め具 17 留め具固定棒 18 留め具固定ネジ 23 被洗浄物保持治具 24 保持板 25a保持部 25b保持部 33 被洗浄物保持治具 34 保持板 35a保持部 35b保持部 40 洗浄装置 41 洗浄槽 42 回転軸 43 排出孔 44 被洗浄物保持治具 45 邪魔板 46 邪魔板回転軸 47 弁 48 軸受け 49 回転駆動装置 50 蓋 60 洗浄装置 61 洗浄槽 62 回転軸 63 排出孔 64 被洗浄物保持治具 65 邪魔板 66 邪魔板駆動装置 67 弁 68 軸受け 69 回転駆動装置 70 蓋 81 ガラスエポキシ樹脂 82 ガラス 83 中心部 84 フラックス 85 試料 DESCRIPTION OF SYMBOLS 1 To-be-cleaned object 2 Rotation axis 3 To-be-cleaned object holding jig 4 Holding rod 5 Holding part 6 Nipping screw 13 To-be-cleaned object holding jig 14 Holding plate 15 Holding part 16 Fastening 17 Fastening fixing rod 18 Fastening fixing screw 23 Cleaning object holding jig 24 Holding plate 25a holding unit 25b holding unit 33 Cleaning object holding jig 34 Holding plate 35a holding unit 35b holding unit 40 Cleaning device 41 Cleaning tank 42 Rotating shaft 43 Discharge hole 44 Cleaning object holding jig Component 45 Baffle plate 46 Baffle plate rotation shaft 47 Valve 48 Bearing 49 Rotation drive device 50 Lid 60 Cleaning device 61 Cleaning tank 62 Rotation shaft 63 Discharge hole 64 Cleaning object holding jig 65 Baffle plate 66 Baffle plate drive device 67 Valve 68 Bearing 69 rotation drive device 70 lid 81 glass epoxy resin 82 glass 83 central part 84 flux 85 sample
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭56−5173(JP,A) 特開 昭60−19061(JP,A) 特開 昭55−115332(JP,A) 実開 昭61−109136(JP,U) (58)調査した分野(Int.Cl.7,DB名) B08B 3/00 - 3/14 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-56-5173 (JP, A) JP-A-60-19061 (JP, A) JP-A-55-115332 (JP, A) 109136 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) B08B 3/00-3/14
Claims (5)
又はすすぎ液による一回以上のすすぎ工程を有する、電
子部品又は精密部品類の洗浄方法において、上記洗浄液
又はすすぎ液を仕込んだ洗浄槽内に、被洗浄物保持治具
を装備した回転軸を配設すると共に、被洗浄物を上記被
洗浄物保持治具により保持し、邪魔板を、上記被洗浄物
保持治具の回転面に対して略平行に且つ少なくとも該邪
魔板の一部が上記被洗浄物の回転半径内に入るように設
置し、上記回転軸を回転させることにより被洗浄物を回
転させて洗浄することを特徴とする電子部品又は精密部
品類の洗浄方法。1. One or more cleaning steps with a cleaning liquid and / or
Alternatively, in a method for cleaning electronic parts or precision parts having one or more rinsing steps with a rinsing liquid, a rotating shaft equipped with a jig for holding an object to be cleaned is disposed in a cleaning tank charged with the cleaning liquid or the rinsing liquid. At the same time, the object to be cleaned is held by the jig for holding the object to be cleaned, and the baffle plate is substantially parallel to the rotation surface of the jig for holding the object to be cleaned and at least a part of the baffle plate is covered by the jig. A method for cleaning an electronic component or a precision component, wherein the cleaning device is installed so as to be within a rotation radius of the cleaning object, and rotates the cleaning object by rotating the rotation shaft.
転軸が、垂直に配設されていることを特徴とする請求項
1記載の電子部品又は精密部品類の洗浄方法。2. The method for cleaning electronic parts or precision parts according to claim 1, wherein the rotating shaft equipped with the object holding jig is disposed vertically.
は2記載の電子部品又は精密部品類の洗浄方法。3. The method according to claim 1, wherein the object to be cleaned is a plate.
3記載の電子部品又は精密部品類の洗浄方法。4. The method according to claim 3, wherein the plate is a printed circuit board.
洗浄槽内に配設され、複数の被洗浄物保持治具を装備し
た回転軸と、該被洗浄物の間に該被洗浄物保持治具の回
転面に対して略平行に挿入可能な複数枚の邪魔板と、上
記回転軸を回転させる回転手段とを具備することを特徴
とする電子部品又は精密部品類の洗浄装置。5. A cleaning tank provided with an inlet / outlet for an object to be cleaned, a rotating shaft provided in the cleaning tank and equipped with a plurality of jigs for holding an object to be cleaned, and a rotating shaft provided between the object to be cleaned. Cleaning of electronic parts or precision parts, comprising: a plurality of baffle plates which can be inserted substantially in parallel to the rotation surface of the object to be cleaned, and rotation means for rotating the rotation shaft. apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4271312A JP3020360B2 (en) | 1992-10-09 | 1992-10-09 | Method and apparatus for cleaning electronic parts or precision parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4271312A JP3020360B2 (en) | 1992-10-09 | 1992-10-09 | Method and apparatus for cleaning electronic parts or precision parts |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06114351A JPH06114351A (en) | 1994-04-26 |
JP3020360B2 true JP3020360B2 (en) | 2000-03-15 |
Family
ID=17498300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4271312A Expired - Lifetime JP3020360B2 (en) | 1992-10-09 | 1992-10-09 | Method and apparatus for cleaning electronic parts or precision parts |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3020360B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5304455B2 (en) * | 2009-06-08 | 2013-10-02 | 株式会社デンソー | Substrate cleaning jig |
-
1992
- 1992-10-09 JP JP4271312A patent/JP3020360B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH06114351A (en) | 1994-04-26 |
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