JP3098915B2 - Method and device for repairing liquid crystal display device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device in which a plurality of switching elements such as TFT (thin film transistor) elements are provided and active matrix driving is performed to correct display defects caused by the switching elements. And a correction device.

[0002]

2. Description of the Related Art In an active matrix drive type liquid crystal display device provided with a plurality of switching elements such as TFT elements, in order to improve the yield rate of products, display defects occur in the liquid crystal display device produced. It is checked whether there is a picture element or not, and if so, the switching element of that picture element is corrected.

FIG. 13 is a plan view showing one substrate member 101 of a conventional liquid crystal display device provided with a plurality of TFT elements 104. The liquid crystal display device has a structure in which a liquid crystal layer is interposed between a pair of substrate members. One of the pair of substrate members 101 has a light-transmitting substrate 102 and a liquid crystal layer side of the light-transmitting substrate 102. The picture element electrode 103 to be formed and TF
T element 104 and gate bus lines 105a to 105e
And source bus lines 106a to 106c, and an alignment film (not shown) formed to cover these members.

A plurality of gate bus lines 105 a to 105 e (hereinafter, collectively referred to as “gate bus lines 105”) which are parallel to each other are formed on one surface of the light-transmitting substrate 102. Represent a plurality of source bus lines 106a-1
06c (hereinafter, collectively referred to as “source bus line 1
06 ”). Gate bus line 105
And source bus line 106 are formed while maintaining insulation from each other, and gate and source bus lines 105 and 10 are formed.
The picture element electrodes 103 arranged in a matrix are formed in the rectangular area formed by 6. Picture element electrode 1
03 is connected to the gate and source bus lines 105 and 106 via the TFT element 104. Picture element electrode 1
03, a translucent substrate 10 on which a TFT element 104, a gate bus line 105 and a source bus line 106 are formed
On one surface of 2, an alignment film having an alignment treatment applied to the surface is formed so as to cover the formed member.

The other substrate member on which the one substrate member 101 is bonded is a light-transmitting substrate, a color filter formed on the liquid crystal layer side of the light-transmitting substrate, a counter electrode, and these members. And an alignment film formed so as to cover.

[0006] An inspection is performed on the produced liquid crystal display device to determine whether there is a picture element causing a display defect, that is, a so-called defect inspection, and then the switching element of the defective picture element is corrected. Is done. As this correction method, a method of visually confirming whether or not the switching element of the defective picture element is arranged in the predetermined correction area while the operator visually confirms the switching element of the defective picture element is arranged in the predetermined correction area. As described above, there is a method of automatically controlling the driving of the stage on which the liquid crystal display device is mounted. In the former case, since the operator performs the confirmation while confirming, the switching element of the defective picture element can be surely corrected. However, there are many operations depending on the operator, and there is a disadvantage that the correction takes time. For this reason, a method of controlling the driving of the stage and automatically arranging the switching element of the defective picture element in a predetermined correction area as in the latter case is adopted.

[0007]

In the above-described method of automatically controlling the driving of the stage, the switching elements arranged in a predetermined correction area are replaced by the switching elements to be corrected. The correction is performed immediately without determining whether there is any. For this reason, even when a switching element that should not be corrected is arranged in the correction area, the switching element is corrected, and the number of defective display pixels of the liquid crystal display device increases. Become.

[0008] The stage on which the liquid crystal display device is mounted moves in two directions parallel to the surface of the liquid crystal display device, for example, orthogonal to each other. Two stage driving means are provided for moving in these two directions. When the stage is moved by the driving unit, an absolute error occurs due to a mechanical structure for moving the stage. The inconvenience of increasing the number of defective display pixels as described above does not occur when the switching element to be corrected is arranged in a predetermined correction area, even if the error occurs. Occurs when the switching element to be corrected deviates from a predetermined correction area. Since the error increases as the moving distance of the stage increases, the inconvenience is likely to occur when there are a plurality of switching elements to be corrected and the distance between the switching elements is relatively long.

Further, if the movement accuracy of the stage is to be improved (for example, the error with respect to the movement of the stage of 100 mm is to be set to ± 1 μm or less), the correction device must be installed in a clean environment such as a clean room where dust and the like are extremely small. In order to further improve the slipperiness of the mechanical system, maintenance is required, such as periodically applying lubricating oil and removing dust. Such maintenance must be performed frequently in order to maintain the movement accuracy of the stage with high accuracy, which is bothersome and reduces productivity.

Further, in order to correct an error generated when the stage is moved, the relationship between the amount of movement and the amount of displacement in the stage to be used is investigated, and the amount of movement is corrected based on the obtained relationship. Although possible, it takes time and effort to investigate, and if the relationship between the amount of movement and the amount of displacement changes over time due to dust, etc., it must be investigated again, and it is not possible to reliably repair the defective switching element. Have difficulty.

An object of the present invention is to provide a method and a device for repairing a defective liquid crystal display device which can easily and reliably repair a defective switching device using a liquid crystal display device capable of distinguishing a plurality of switching elements. To provide.

[0012]

According to the present invention, a liquid crystal layer is interposed between a pair of light-transmitting substrates, and one of the pair of light-transmitting substrates is provided with one of the light-transmitting substrates. A plurality of picture element electrodes arranged in a matrix on the liquid crystal layer side of the conductive substrate; a vertical electrode wiring and a horizontal electrode wiring to which a display signal given to the plurality of picture element electrodes is applied; A plurality of switching elements individually provided on the pixel electrodes for supplying / cutting the display signal; and an alignment film covering the plurality of pixel electrodes, the electrode wirings, and the plurality of switching elements. In the method for repairing a liquid crystal display device, the optical substrate includes, on the liquid crystal layer side of the other light-transmitting substrate, at least a counter electrode facing the plurality of pixel electrodes, and an alignment film covering the counter electrode. Directional and lateral electrode wiring The one of the electrodes wires,
First identification information for identifying a switching element is provided based on the presence or absence of the narrowed portion or the length of the narrowed portion, by narrowing both sides in the width direction of the electrode wiring near each switching element. In the electrode wiring of (2), one side in the width direction of the electrode wiring near each switching element is narrowed, and the second identification for identifying the switching element is performed based on the presence or absence of the narrowed portion or the number of the narrowed portion. Information is provided, and there are three types of the first identification information. These three types of first identification information are repeatedly arranged in one electrode wiring in the same order, and there are three types of the second identification information. Are repeatedly arranged in the same order on the other electrode wiring, and each switching element is determined based on nine combinations of the first and second identification information formed near the switching element. Prepares a liquid crystal display device identified from adjacent switching elements, conducts a defect inspection of the liquid crystal display device in advance, detects a defective switching element and first and second identification information of the switching element, and A display device is mounted on a stage that moves in parallel with the surface of the liquid crystal display device, and the defect inspection is performed on an image recognition area selected to have a size including at least one switching element and first and second identification information. Moving the stage so as to include the defective switching element detected by the first and second identification information of the switching element, perform image recognition of the image recognition area, and obtain a second image obtained by the image recognition. The first and second identification information matches the first and second identification information of the defective switching element detected by the defect inspection. The case,
The switching element in the image recognition area is irradiated with laser light to correct the switching element, and when they do not match, the first and second identification information of the defective switching element, obtained by image recognition. Moving the stage in a direction determined based on the arrangement order of the first and second identification information and the first and second identification information stored in advance by an image recognition area length parallel to the direction. This is a method for correcting a liquid crystal display device, which is a feature.

Further, according to the present invention, a liquid crystal layer is interposed between a pair of light transmitting substrates, and one of the pair of light transmitting substrates is a liquid crystal layer of the one light transmitting substrate. Beside
A plurality of picture element electrodes arranged in a matrix; a vertical electrode wiring and a horizontal electrode wiring to which a display signal given to the plurality of picture element electrodes is applied; and a plurality of picture element electrodes individually provided for the plurality of picture element electrodes. A plurality of switching elements for supplying / cutting off the display signal, and an alignment film covering the plurality of picture element electrodes, the electrode wirings, and the plurality of switching elements. In a liquid crystal display device repairing apparatus having at least a counter electrode facing the plurality of picture element electrodes and an alignment film covering the counter electrode on the liquid crystal layer side of the optical substrate, the vertical and horizontal electrode wirings In either one of the electrode wirings, the width of both sides in the width direction of the electrode wiring near each switching element is narrowed, and a switch is formed based on the presence or absence of the narrowed portion or the length of the narrowed portion. The first identification information for identifying the switching element is provided, and the other electrode wiring is formed by narrowing one side in the width direction of the electrode wiring near each switching element, and the presence or absence of the narrowly processed portion or the narrowly processed portion Based on the number of the switching elements, there are provided three types of the first identification information, and the three types of the first identification information are repeatedly arranged in one electrode wiring in the same order. There are three types of the second identification information, and the three types of the second identification information are repeatedly arranged in the same order on the other electrode wiring, and the first and the second identification information formed near the switching element. A stage on which a liquid crystal display device in which each switching element is identified from an adjacent switching element based on nine combinations is mounted, and which moves in parallel with the surface of the liquid crystal display device; Storage means for storing a defective switching element detected by a defect inspection performed in advance on a device, first and second identification information of the switching element, and a liquid crystal display device mounted on the stage Image processing means for performing image recognition by reading an image of an image recognition area selected to have a size including at least one switching element and first and second identification information, and switching of the image recognition area Correction means for irradiating the element with laser light to correct the switching element; first and second identification information obtained by the image recognition; and first and second identification information stored in the storage means. When the information does not match, the first and second identification information of the defective switching element, the first and second identification information obtained by image recognition And control means for moving the stage by an image recognition area length parallel to the direction in a direction determined based on the arrangement order of the first and second identification information stored in advance. This is a correction device for a liquid crystal display device.

[0014]

[0015]

[0016]

[0017]

According to the present invention, in a liquid crystal display device provided with a plurality of switching elements, identification information for identifying the switching elements is provided around each switching element. In the liquid crystal display device, a liquid crystal layer is interposed between a pair of light-transmitting substrates, and one of the pair of light-transmitting substrates has a plurality of pixel electrodes on its liquid crystal layer side. When,
It has at least an electrode wiring, a plurality of switching elements, and an alignment film. The plurality of pixel electrodes are arranged in a matrix, and the switching elements are individually provided for the pixel electrodes. The switching element supplies / blocks a display signal applied to the electrode wiring to / from the picture element electrode. The alignment film covers the plurality of pixel electrodes, the electrode wiring, and the plurality of switching elements. On the other hand, the light-transmitting substrate has at least a counter electrode and an alignment film on the liquid crystal layer side. The counter electrode is an electrode facing the plurality of pixel electrodes, and the alignment film covers the counter electrode.

It is possible to identify a plurality of switching elements by the identification information, and to carry out the identification at the time of repair performed on a defective switching element when a display failure caused by the switching element has occurred. By determining whether or not the switching element is to be corrected based on the information, the correction can be reliably performed. Such identification information is given by, for example, changing the width of the electrode wiring. Also preferably,
There are at least three types of identification information, and the types of adjacent identification information are different from each other. Therefore, at least three adjacent switching elements can be identified.

Further, according to the present invention, the liquid crystal display device as described above is prepared, a defect inspection is performed on the liquid crystal display device in advance, and the position of the defective switching element and the identification information of the switching element are detected. Is done. Such a liquid crystal display device is mounted on a stage that moves in parallel with the surface of the liquid crystal display device, and a predetermined image recognition area includes a defect switching element and identification information detected by a defect inspection, The stage is moved to perform image recognition of the image recognition area. The image recognition area,
This is an area selected to have a size that includes switching elements for at least one switching element and identification information. When the identification information obtained by the image recognition matches the identification information detected by the defect inspection, the switching element in the image recognition area is irradiated with laser light to correct the switching element. I do. If they do not match, the stage is moved in the direction determined based on the identification information of all the switching elements stored in advance by the length of the image recognition area parallel to the direction.

The present invention is applied when the absolute error when the stage is moved is within the area related to one switching element. The direction in which the stage moves when the identification information does not match is the direction in which the identification information detected by the defect inspection is arranged in the image recognition area. Therefore, a switching element to be corrected is arranged in the image recognition area by moving the stage. It should be noted that only one switching element can be specified by selecting a size that does not include two or more switching elements and two or more identification information in the image recognition area. In addition, by using a liquid crystal display device provided with at least three types of identification information and types of adjacent identification information different from each other, the moving direction of the stage when the identification information does not match is determined. It is possible.

Therefore, if the identification information does not match even if the stage movement accuracy is low, the switching elements in the image recognition area are not corrected, and the switching elements to be corrected and the identification information are image-recognized. The stage moves so as to be included in the area. For this reason, it is possible to easily and reliably correct the switching element.

Still further, according to the present invention, in order to realize the above-described repair method, the repair device for the liquid crystal display device includes a stage on which the liquid crystal display device is mounted, and a defect detected by the defect inspection. Storage means for storing the position of the switching element and identification information of the switching element; image processing means for reading an image in the image recognition area to perform image recognition; and laser light for the switching element in the image recognition area To correct the switching element, and control means for moving the stage as described above when the identification information does not match.

[0023]

FIG. 1 is a sectional view showing the structure of a liquid crystal display device 1 according to one embodiment of the present invention. FIG. 2 is a plan view showing one substrate member 10 constituting the liquid crystal display device 1. The liquid crystal display device 1 is configured with a liquid crystal layer 12 interposed between a pair of substrate members 10 and 11. A pair of substrate members 1
One of the substrate members 10 is a transparent substrate 2.
And a pixel electrode 3 disposed on the liquid crystal layer side of the translucent substrate 2, a TFT element 4, an alignment film 5, gate bus lines 14a to 14d, and source bus lines 15a to 15d. Is done. On the other hand, the substrate member 11 is
And a color filter 7 disposed on the liquid crystal layer side of the translucent substrate 6, a counter electrode 8, and an alignment film 9.

Transparent substrate 2 realized by, for example, glass
As shown in FIG. 2, a plurality of gate bus lines 14 a to 14 d (hereinafter, collectively referred to as “gate bus lines 14”) are formed on one surface 2 a of the gate bus line 14. And a plurality of source bus lines 15a to 15d (hereinafter, referred to as
When collectively referred to as “source bus line 15”). The gate bus line 14 and the source bus line 15 are formed while maintaining insulation from each other. In a rectangular region formed by the gate and source bus lines 14 and 15, for example, ITO (indium tin oxide) is formed.
The picture element electrode 3 made of a transparent electrode such as the above is formed.

The picture element electrodes 3 are arranged in a matrix. The picture element electrode 3 is connected to the gate bus line 14 and the source bus line 15 via a TFT element 4 as a switching element. Picture element electrode 3, TFT element 4,
On one surface 2a of the translucent substrate 2 on which the gate bus lines 14 and the source bus lines 15 are formed, an alignment film 5 made of, for example, a polyimide resin is formed so as to cover the formed members. An alignment process such as a rubbing process is performed on the surface of the alignment film 5. Thus, one-sided substrate member 10 is configured.

For example, a color filter 7 is formed on one surface 6a of a light-transmitting substrate 6 made of the same glass as the light-transmitting substrate 2. The color filter 7 is a red (R) filter formed corresponding to the plurality of picture element electrodes 3,
It comprises a green (G) filter and a blue (B) filter. On one surface 6a of the light transmitting substrate 6 on which the color filter 7 is formed, an opposing electrode 8 made of a transparent electrode such as ITO is formed on the entire surface so as to cover the formed color filter 7. An alignment film 9 is formed on the surface of the counter electrode 8 in the same manner as the alignment film 5. Thus, the other substrate member 11 is configured.

The pair of substrate members 10 and 11 are arranged such that the alignment films 5 and 9 are opposed to each other, and their peripheral edges are bonded with an adhesive 13 at a predetermined interval. At this time, the substrate members 10 and 11 are bonded to each other with an injection hole for injecting a liquid crystal material. A liquid crystal material is injected from the injection hole into a space formed by the substrate members 10 and 11 and the adhesive 13 to form a liquid crystal layer 12 sandwiched between the pair of substrate members 10 and 11. When the injection of the liquid crystal material is completed, the injection hole is sealed. As the liquid crystal material, for example, a nematic liquid crystal material is used.

It should be noted that in the present invention, identification information for identifying the TFT elements 4 provided corresponding to each picture element is added to the periphery of each TFT element 4. Less than,
An example in which identification patterns 16 to 21 as identification information are respectively formed on the gate and source bus lines 14 and 15 will be described with reference to FIG. Gate bus line 1
4, three types of identification patterns 16 to 18 are formed. The identification pattern 16 is obtained by reducing the width of the gate bus line 14. As the identification pattern 17, in this embodiment, the other two patterns are provided by not providing the identification pattern.
It is distinguished from the type identification patterns 16 and 18. The identification pattern 18 is obtained by reducing the width of the gate bus line 14, and the length of the identification pattern parallel to the longitudinal direction of the gate bus line 14 is shorter than the identification pattern 16.
The identification patterns 16 to 18 are repeatedly provided on the gate bus line 14 in this order.

In this embodiment, although the wiring as the identification pattern 17 is not processed, an example in which the wiring is processed also belongs to the scope of the present invention.
L1 between pattern 6 and identification pattern 17, identification pattern 17
The spacing L2 between the identification pattern 18 and the identification pattern 18 and the spacing L3 between the identification pattern 18 and the identification pattern 16 are selected to have the same length.

On the source bus line 15, three types of identification patterns 19 to 21 are formed. Identification pattern 1
Reference numeral 9 denotes a case where the width of the source bus line 15 is narrowed by one place, the identification pattern 20 is narrowed at two places, and the identification pattern 21 is narrowed at three places. Identification patterns 19 to 21 are repeatedly provided in the source bus line 15 in this order. The interval S1 between the identification patterns 19 and 20, the interval S2 between the identification patterns 20 and 21, and the interval S3 between the identification patterns 21 and 19 are all set to the same length.

Such identification patterns 16 to 21 correspond to, for example, gate bus line 14 and source bus line 1
By providing a pattern having the above-described shape on a mask used for forming the gate 5, the mask 5 can be formed together with the formation of the gate and source bus lines 14 and 15. In this embodiment, the identification patterns 16 and
Reference numeral 18 is provided by processing both ends in the width direction of the wiring, and identification patterns 19 to 21 are provided by processing only one end in the width direction of the wiring to distinguish the identification patterns.

FIG. 3 is a view showing one T of the one substrate member 10.
FIG. 4 is an enlarged plan view showing a region related to the FT element 4. The length of the region of one TFT element 4 in the vertical direction on the paper of FIG. 3, that is, the length obtained by adding the width of one source bus line 15 to the interval between adjacent source bus lines 15 is selected as P1. It is. In addition, the length of a region related to one TFT element 4 in the horizontal direction on the paper of FIG. 3, that is, the length obtained by adding the width of one gate bus line 14 to the interval between adjacent gate bus lines 14 is P2 Is chosen. Therefore, the area related to one TFT element 4 is P1 × P2
It is represented by Also, P1 = L1 = L2 = L3, and P
2 = S1 = S2 = S3.

FIG. 4 is an enlarged plan view showing the TFT element 4 of the one substrate member 10. The TFT element 4 includes a gate electrode 22 connected to the gate bus line 14.
A source electrode 23 connected to the source bus line 15, and a drain electrode 24 connected to the pixel electrode 3.
It is comprised including. The correction of the TFT element 4 is performed in order to eliminate a display defect due to the TFT element 4 formed as a defective element at the time of panel production.

For example, a laser beam is irradiated to a laser beam irradiating section 25 as shown in the figure, and the drain electrode 24 and the gate electrode 22 are connected. In addition, the laser beam irradiation unit 2
6 is irradiated with laser light, and the source electrode 23 and the gate electrode 22 are connected. Further, the laser beam is irradiated to the laser beam irradiation section 27, and the gate electrode 22 and the gate bus line 14 are cut at this portion. As a result, the source electrode 23 of the source bus line 15 and the pixel electrode 3 are directly connected via the isolated gate electrode 22. Therefore, the TFT element 4 is connected to the gate bus line 1
4 is always turned on irrespective of the gate signal sent to the pixel electrode 4, and the source signal sent to the source bus line 15 is always given to the picture element electrode 3.

Hereinafter, a repairing device 31 and a repairing method for a liquid crystal display device capable of repairing such a defective TFT element will be described. In repairing the defective TFT element, a defect inspection is performed in advance. That is,
A predetermined voltage is applied between all the pixel electrodes 3 and the counter electrode 8 of the prepared liquid crystal display device 1 so that the substrate members 10, 1
By orienting the liquid crystal molecules between them so as to be perpendicular to the surface of the substrate member, the light incident on the liquid crystal layer 12 is transmitted so that all the picture elements are turned on. It is determined whether or not. If there is a non-lighted picture element, it is determined that the TFT element corresponding to the picture element has a defect. In this way, the defect inspection is performed, the TFT element having the defect is specified, and the identification pattern of the TFT element is detected. The liquid crystal display device 1 is positioned on a defect inspection stage so as to be aligned with a predetermined reference position. For example, while viewing the liquid crystal display device 1 displayed on the display screen of the display device, the defect is detected using the operation device. The defective TFT in all the TFT elements is designated based on the designated coordinate position by designating the TFT element having
The position of the element can be specified.

FIG. 5 is a front view showing a schematic configuration of the correction device 31 according to the present invention. FIG. 6 is a block diagram showing an electrical configuration of the correction device 31. As shown in FIG. The correction device 31 includes a stage 32, a plurality of columns 33, a base 34,
35, laser light source 36, optical axis adjusting means 37, objective lens 38, focus adjusting means 39, eyepiece 40, reflector 4
1, image reading means 42, image processing device 43, control means 4
4, power supply 45 for laser light source, display means 46, operation means 4
7 and the stage driving means 48.

The stage 32 on which the liquid crystal display device 1 is mounted is fixed to a base 34 held horizontally by a plurality of columns 33, and the stage 32 is mounted on the stage 32 by stage driving means 48. The liquid crystal display device 1 moves parallel to the surface of the liquid crystal display device 1. For example, they move in two directions orthogonal to each other. Above the stage 32,
A laser light source 36, an optical axis adjusting unit 37, an objective lens 38, a focus adjusting unit 39, and a base 35 provided in parallel with and spaced from a base 34 to which the stage 32 is fixed.
The eyepiece 40, the reflector 41 and the image reading means 42 are fixed.

On the optical axis of the laser light between the stage 32 and the laser light source 36 disposed opposite thereto, the stage 32
The objective lens 38 and the optical axis adjusting means 37 are arranged in order from the side. The defect T of the liquid crystal display device 1 mounted on the stage 32 by the laser light from the laser light source 36
The correction of the FT element is performed. The optical axis adjusting means 37 performs fine adjustment of the optical axis at the time of laser beam irradiation. As the objective lens 38, a lens having a desired magnification is appropriately selected from a plurality of lenses having different magnifications. A predetermined area of the stage 32 including the optical axis of the laser light can transmit light, and light from below the stage 32 is transmitted through the objective lens 38.
, And refracted by a semi-transparent mirror (not shown) to enter the eyepiece 40. Also, the light is refracted by a semi-transparent mirror and the reflection plate 41
And is incident on an image reading means 42 realized by, for example, a CCD (charge coupled device) camera. The focus adjusting unit 39 performs focusing when the image reading unit 42 reads an image.

On the base 35, an image processing device 43, a control means 44, a power supply 45 for a laser light source, a display means 46 and an operation means 48 are mounted. Image processing device 4
Reference numeral 3 denotes image data read by the image reading means 42
It converts the read image data into data that can be easily processed electrically. The control means 44 is, for example, a CPU
(Central processing unit), a RAM (random access memory) and a ROM (read only memory). The laser light source 36 and the stage driving unit 48 are controlled based on the data read and processed by the image processing device 43. Further, it controls the operation of the entire correction device 31.
Further, the ROM stores all identification pattern data. The laser light source power supply 45 supplies the laser light source 36 with:
A power supply voltage for laser light irradiation is supplied. The display unit 46 displays an image read by the image reading unit 42 or an image read by the image reading unit 42 and processed by the image processing device 43. Such a display means 46 is realized by, for example, a CRT (cathode ray tube). From the operation unit 47, instructions such as start and end of the correction operation or various instructions at the time of the image processing operation are performed by the operator.

FIG. 7 is a flowchart showing a method for correcting a liquid crystal display device according to the present invention. FIG. 8 is a plan view showing a defective TFT element 4a to be corrected. FIG. 9 is a plan view showing the recognition area 51. Further, FIG.
FIG. 4 is a diagram for explaining the size of the recognition area 51. First, data detected by a previously performed defect inspection, that is, position data of a defective TFT element and identification pattern data of the TFT element are stored in the RA of the control means 44.
M. This is input from the operating means 47 by the operator, for example. When there are a plurality of defective TFT elements in one liquid crystal display device, data corresponding to all the defects is input. Further, for example, by using the control means of the defect inspection apparatus and the control means 44 of the correction apparatus 31 in common, it is not necessary to perform data input by the operator as described above, and the convenience is improved.

In step a1, the liquid crystal display device 1 to be corrected is mounted on the stage 32. At this time, the liquid crystal display device 1 is placed in alignment with a predetermined reference position. In step a2, the horizontal inclination of the stage 32 is corrected. In step a3, it is determined whether or not all corrections for the defective TFT element have been completed. If it has been completed, the correction operation ends. If not completed, the process proceeds to step a4.

At step a4, the RAM of the control means 44
Is read out. For example, FIG.
In the case where a defect has occurred in the TFT element 4a shown in (1), the picture element formed by the picture element electrode 3a (shown by oblique lines) to which the TFT element 4a is connected is a defective picture element.
For example, when the X-axis is set rightward and the Y-axis is set downward on the page of FIG. 8, the position data (2, 2) is read.

In step a5, based on the read position data, the TFT element 4a to be corrected in the recognition area 51 shown in FIG. 9 and the identification data 1 of the TFT element 4a
The stage 32 moves so that 7a and 20a are arranged. The recognition area 51 is an area read by the image reading means 42 and subjected to image processing by the image processing device 43, and is an area set on the optical axis of the laser light. The size of the recognition area 51 is at least one T
The size is selected to be T1 × T2 which is the size including the TFT elements 4 for the FT elements and the identification information. The length T1 in the vertical direction (Y-axis direction) on the plane of FIG. 9 is selected to be equal to or less than the length P1, and the length T2 in the left-right direction (X-axis direction) is selected to be equal to or less than the length P2. As a result, one T
Only the identification information corresponding to the FT element 4 is arranged,
The T element 4 can be specified.

The minimum size of the recognition area 51 is selected as follows. That is, as shown in FIG. 10, the minimum length of the length T1 is the length of the identification patterns 16 to 18 formed on the gate bus line 14 in the direction parallel to the longitudinal direction of the gate bus line 14. Length is a
And the length obtained by subtracting the length a from the inter-identification pattern length L1 (L2, L3) is bisected as b,
a + b. Similarly, the source bus line 15 of the identification patterns 19 to 21 formed on the source bus line 15
Let a be the length in the direction parallel to the longitudinal direction of b, and let b be the remaining length obtained by subtracting the length a from the inter-identification pattern length S1 (S2, S3). , A + b.

In step a6, the image in the recognition area 51 is read by the image reading means 42 and processed by the image processing device 43. In step a7, RA
M and the identification pattern data stored in step a.
It is determined whether the identification pattern data obtained by performing the image processing in step 6 matches. If they match, the process proceeds to step a8, where the TFT in the recognition area 51
By irradiating the element 4a with a laser beam, the TFT element 4a is modified. Upon completion of the correction, the process returns to step a3. If not, step a
Then, as described later, the moving direction for moving the stage 32 again is determined. When the operation in step a9 ends, the process returns to step a5, and the stage 32 moves by the length T1 in the Y-axis direction or the length T2 in the X-axis direction of the recognition area 51 parallel to the determined direction.

FIGS. 11 and 12 are plan views for explaining the operation when the identification patterns do not match. For example, as shown in FIG.
Assuming that the TFT element 4b and the identification patterns 17a and 21a in 2) are arranged in the recognition area 51, the identification pattern data stored in the RAM is the identification patterns 17a and 20a.
Since the data has the shape indicated by a, the determination result in step a7 does not match. Therefore, in step a9, the positional relationship between the identification pattern 20a and the identification pattern 21a is determined based on all the identification pattern data stored in the ROM of the control means 44 in advance. In this case, it is determined that there is a shift in the X-axis direction. In step a5, the stage 32 moves in the X-axis direction by the length of the above-described recognition area 51 in the X-axis direction + T2. by this,
An area 51 a including the TFT element 4 a to be corrected and the identification patterns 17 a and 20 a of the TFT element 4 a is arranged in the recognition area 51.

Further, as shown in FIG. 12, the TFT element 4c at the coordinates (2, 3) and the identification patterns 18a, 2
If 0a is located in the recognition area 51, the identification pattern data stored in the RAM is data of the shape indicated by 17a and 20a, and the determination result in step a7 does not match. Therefore, in step a9, the positional relationship between the identification pattern 17a and the identification pattern 18a is determined based on all the identification pattern data stored in the ROM of the control means 44 in advance. In this case, it is determined that there is a shift in the Y-axis direction. In step a5, the stage 32 moves in the Y-axis direction by the length of the above-described recognition area 51 in the Y-axis direction + T1. Thus, the TFT element 4a to be corrected and the identification pattern 1 of the TFT element 4a
An area 51 a including 7 a and 20 a is arranged in the recognition area 51.

The absolute error that occurs when moving the stage 32 increases as the moving distance of the stage 32 increases.
When the distance between the FT elements is relatively long, the rate at which the identification patterns do not match increases. In this case, by moving the stage 32 again as described above, the TFT element to be corrected can be arranged in the recognition area 51. The moving distance of the stage 32 when the stage 32 is moved again is a length determined by the recognition area 51 and is relatively short. For this reason, the absolute error generated at the time of movement is reduced, and the TFT element that should not be corrected is not arranged in the recognition area 51.

By using the liquid crystal display device 1 in which the identification patterns 16 to 21 for identifying the TFT elements 4 are formed as described above, the TFT elements 4 included in the predetermined recognition area 51 are Can be determined whether or not is a device to be corrected, and the moving direction of the stage 32 for arranging the TFT device 4 to be corrected in the recognition area 51 can be determined. Therefore, the TFT element 4 can be surely corrected.
By performing the correction in this manner, the stage can be mounted without placing the correction device in a very clean environment as in the prior art and without requiring frequent maintenance, that is, at the expense of labor and cost. Correction can be made reliably without further improving the movement accuracy. Further, the correction can be easily made without investigating the relationship between the movement amount of the stage and the shift amount.

In this embodiment, three types of identification patterns are formed on the gate bus line 14 and three types of identification patterns are formed on the source bus line 15 as identification patterns.
The same effect as described above can be obtained as long as the types of adjacent identification patterns are different from each other.

The present embodiment is applied when the absolute error when the stage 32 of the correction device 31 is moved is P2 or less in the X-axis direction and P1 or less in the Y-axis direction.

[0052]

[0053]

In the above-described embodiment, an example of a liquid crystal display device for performing color display has been described. However, even in a liquid crystal display device for performing black and white display, similar effects can be obtained by forming similar identification patterns. Obtainable.

[0055]

As described above, according to the present invention, in a liquid crystal display device having a plurality of switching elements, identification information is provided around the switching elements, and the switching elements can be identified by the identification information. The identification information is attached to, for example, electrode wiring around the switching element. Also preferably, there are at least three types of identification information, and the types of adjacent identification information are different from each other. Therefore, at least three adjacent switching elements can be identified.

Further, according to the present invention, when the liquid crystal display device having the identification information is corrected, whether or not the switching element in the image recognition area is the switching element to be corrected is determined based on the identification information. If the switching element is not the one to be switched, the moving direction of the stage on which the liquid crystal display device is mounted is determined from the identification information of the adjacent switching element. Also, the stage moves by the length of the image recognition area parallel to the determined direction. By moving the stage in this manner, a switching element to be corrected and identification information of the switching element are arranged in the image recognition area. Therefore, the switching element can be easily and reliably corrected.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a configuration of a liquid crystal display device 1 according to an embodiment of the present invention.

FIG. 2 shows one substrate member 1 constituting the liquid crystal display device 1.
FIG.

FIG. 3 is an enlarged plan view showing a region relating to one TFT element 4 of the one substrate member 10;

FIG. 4 is an enlarged plan view showing the TFT element 4 of the one-sided substrate member 10;

FIG. 5 is a front view showing a schematic configuration of a correction device 31 of the liquid crystal display device according to the present invention.

FIG. 6 is a block diagram showing an electrical configuration of the correction device 31 of the liquid crystal display device.

FIG. 7 is a flowchart illustrating a method of correcting a liquid crystal display device according to the present invention.

FIG. 8 is a plan view showing a defective TFT element 4a to be corrected.

FIG. 9 is a plan view showing a recognition area 51.

FIG. 10 is a diagram for explaining the size of the recognition area 51;

FIG. 11 is a plan view for explaining an operation when the identification patterns do not match.

FIG. 12 is a plan view for explaining an operation when the identification patterns do not match.

FIG. 13 is a plan view showing one substrate member 101 of a conventional liquid crystal display device provided with a plurality of TFT elements 104.

[Explanation of symbols]

 Reference Signs List 1 liquid crystal display device 2, 6 translucent substrate 3 picture element electrode 4 TFT element 5, 9 alignment film 8 counter electrode 12 liquid crystal layer 14 gate bus line 15 source bus line 16 to 21 identification pattern 22 gate electrode 23 source electrode 24 drain Electrodes 25 to 27 Laser irradiation unit 31 Correction device 32 Stage 36 Laser light source 37 Optical axis adjustment unit 42 Image reading unit 43 Image processing unit 44 Control unit 45 Power supply for laser light source 46 Display unit 47 Operation unit 48 Stage driving unit 51 Recognition area

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G02F 1/1368 G02F 1/13 101 G02F 1/1343

Claims (2)

(57) [Claims] 1. A liquid crystal layer is interposed between a pair of light-transmitting substrates, and one of the pair of light-transmitting substrates is provided on the liquid crystal layer side of the one light-transmitting substrate. A plurality of picture element electrodes arranged in a matrix; a vertical electrode wiring and a horizontal electrode wiring to which a display signal given to the plurality of picture element electrodes is applied; and a plurality of picture element electrodes individually provided for the plurality of picture element electrodes. And a plurality of switching elements for supplying / cutting off the display signal, and at least an orientation film covering the plurality of picture element electrodes, the electrode wiring, and the plurality of switching elements. On the liquid crystal layer side of the optical substrate,
In a method for repairing a liquid crystal display device having at least a counter electrode facing the plurality of picture element electrodes and an alignment film covering the counter electrode, one of the vertical and horizontal electrode wirings may be The first identification information for identifying the switching element is provided based on the presence or absence of the narrowed portion or the length of the narrowed portion, by narrowing both sides in the width direction of the electrode wiring near each switching element, On the other electrode wiring, one side in the width direction of the electrode wiring in the vicinity of each switching element is narrowed, and the second element for identifying the switching element is determined based on the presence or absence of the narrowed part or the number of the narrowed part. Identification information is provided; there are three types of the first identification information, and the three types of the first identification information are repeatedly arranged in one electrode wiring in the same order; Are three types, and these three types of second identification information are repeatedly arranged in the same order on the other electrode wiring, based on nine types of combinations of the first and second identification information formed near the switching element. A liquid crystal display device in which each switching element is identified from an adjacent switching element is prepared, and a defect inspection of the liquid crystal display device is performed in advance to detect a defective switching element and first and second identification information of the switching element. Placing the liquid crystal display device on a stage that moves in parallel with the surface of the liquid crystal display device, and in an image recognition area selected to have a size including at least one switching element and first and second identification information; The stage is moved to include the defective switching element detected by the defect inspection and the first and second identification information of the switching element. The first and second identification information obtained by the image recognition and the first and second identification information of the defect switching element detected by the defect inspection are compared with each other. If you have
The switching elements in the image recognition area are irradiated with laser light to correct the switching elements, and if they do not match, the first of the defective switching elements
Image recognition parallel to the direction determined based on the arrangement order of the first and second identification information, the first and second identification information obtained by the image recognition, and the pre-stored first and second identification information. A method of repairing a liquid crystal display device, wherein the stage is moved by an area length. 2. A liquid crystal layer is interposed between a pair of light-transmitting substrates, and one of the pair of light-transmitting substrates is provided on the liquid crystal layer side of the one light-transmitting substrate. A plurality of picture element electrodes arranged in a matrix; a vertical electrode wiring and a horizontal electrode wiring to which a display signal given to the plurality of picture element electrodes is applied; and a plurality of picture element electrodes individually provided for the plurality of picture element electrodes. And a plurality of switching elements for supplying / cutting off the display signal, and at least an orientation film covering the plurality of picture element electrodes, the electrode wiring, and the plurality of switching elements. On the liquid crystal layer side of the optical substrate,
In a correction device for a liquid crystal display device having at least an opposing electrode facing the plurality of picture element electrodes and an alignment film covering the opposing electrode, one of the vertical and horizontal electrode wirings may have The first identification information for identifying the switching element is provided based on the presence or absence of the narrowed portion or the length of the narrowed portion, by narrowing both sides in the width direction of the electrode wiring near each switching element, On the other electrode wiring, one side in the width direction of the electrode wiring in the vicinity of each switching element is narrowed, and the second element for identifying the switching element is determined based on the presence or absence of the narrowed part or the number of the narrowed part. Identification information is provided. There are three types of the first identification information, and the three types of first identification information are repeatedly arranged in one electrode wiring in the same order. There are three types of information, and these three types of second identification information are repeatedly arranged in the same order on the other electrode wiring, based on nine types of combinations of the first and second identification information formed near the switching element. A liquid crystal display device in which each switching element is identified from an adjacent switching element is mounted, and a stage that moves in parallel with the surface of the liquid crystal display device is detected by a defect inspection performed on the liquid crystal display device in advance. Defective switching element, storage means for storing first and second identification information of the switching element, and a switching element for at least one switching element of the liquid crystal display device mounted on the stage. 1
Image processing means for reading an image in an image recognition area selected to have a size including the second identification information and performing image recognition; and irradiating a switching element in the image recognition area with a laser beam, Correcting means for correcting the defective switching element when the first and second identification information obtained by the image recognition do not match the first and second identification information stored in the storage means. First
Image recognition parallel to the direction determined based on the arrangement order of the first and second identification information, the first and second identification information obtained by the image recognition, and the pre-stored first and second identification information. Control means for moving the stage by an area length.