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JP3093329B2 - Microspectroscopic analysis method and sample table used for the method - Google Patents

Microspectroscopic analysis method and sample table used for the method

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Publication number
JP3093329B2
JP3093329B2 JP14981991A JP14981991A JP3093329B2 JP 3093329 B2 JP3093329 B2 JP 3093329B2 JP 14981991 A JP14981991 A JP 14981991A JP 14981991 A JP14981991 A JP 14981991A JP 3093329 B2 JP3093329 B2 JP 3093329B2
Authority
JP
Japan
Prior art keywords
sample
infrared
condensed
solvent
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14981991A
Other languages
Japanese (ja)
Other versions
JPH04348256A (en
Inventor
昌彦 池田
博 内原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
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Filing date
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Priority to JP14981991A priority Critical patent/JP3093329B2/en
Publication of JPH04348256A publication Critical patent/JPH04348256A/en
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Publication of JP3093329B2 publication Critical patent/JP3093329B2/en
Anticipated expiration legal-status Critical
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  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、マイクロ分光分析方法
およびその方法に用いるサンプル台に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microspectroscopic analysis method and a sample table used for the method.

【0002】[0002]

【従来の技術】例えば顕微FTIR(フーリエ変換赤外
線分光光度計)やビームコンデンサ付きFTIR、その
他、集光レンズ付きFTIR等を用いたマイクロ分光分
析方法は、微小かつ微量の有機物分析にとって好適な方
法であるが、これまでの微量試料の凝縮手段では凝縮試
料が拡散して厚みが薄くなり、高感度分析のネックとな
っている。
2. Description of the Related Art For example, a micro-spectroscopic analysis method using a microscopic FTIR (Fourier transform infrared spectrophotometer), an FTIR with a beam condenser, and an FTIR with a condenser lens is a method suitable for analyzing minute and minute amounts of organic substances. However, in the conventional means for condensing a very small amount of sample, the condensed sample diffuses and becomes thinner, which is a bottleneck for high-sensitivity analysis.

【0003】即ち、従来は、溶媒に試料を含ませた溶液
を、分取器などの器具を用いて鏡面加工された金属製の
ベース上に微量滴下させ、かつ、当該溶液中の溶媒を蒸
発させて試料をベース上で凝縮させている。
[0003] That is, conventionally, a small amount of a solution containing a sample in a solvent is dropped on a mirror-finished metal base using an instrument such as a fractionator, and the solvent in the solution is evaporated. The sample is condensed on the base.

【0004】[0004]

【発明が解決しようとする課題】しかし、この凝縮手段
では、ベース上に滴下させた溶液が当該ベースの鏡面を
舐めるようにして拡がって、試料が島状に拡散して凝縮
することから、試料の厚みが薄くなるものであった。
However, in this condensing means, the solution dropped on the base spreads as if licking the mirror surface of the base, and the sample diffuses and condenses in an island shape. Was reduced in thickness.

【0005】より具体的には、10μリットルの流動パラ
フィンを 100mリットルのアセトンに溶解させた溶液の
1μリットルをベース上に滴下させた場合、この溶液は
直ちに3〜5mmφに拡がり、周辺部から溶媒の蒸発が
始まると同時に溶解した試料が無数の島となって、それ
らが3〜5mmφの環状に凝縮し、厚みが極めて薄くな
るものであった。
More specifically, when 1 μl of a solution obtained by dissolving 10 μl of liquid paraffin in 100 ml of acetone is dropped on a base, this solution immediately spreads to 3 to 5 mmφ, and the solvent is spread from the periphery. At the same time as the evaporation started, the dissolved samples became innumerable islands, which condensed into a 3 to 5 mmφ ring and became extremely thin.

【0006】これでは赤外線の吸収強度が不十分で、顕
微FTIR/FT−530(株式会社堀場製作所製)に
よって赤外線の透過率を測定したところ、図11に示す
ように、波数1450cm-1近辺での赤外線の透過率は9
8%程度であって、吸光度が0.01と極めて低く、顕微分
光分析方法による高感度分析が困難であった。
[0006] This is insufficient absorption intensity of the infrared ray, was measured for transmittance in the infrared by microscopic FTIR / FT-530 (manufactured by Horiba Ltd.), as shown in FIG. 11, in the vicinity wavenumber 1450 cm -1 Has an infrared transmittance of 9
It was about 8%, and the absorbance was extremely low at 0.01, making it difficult to perform high-sensitivity analysis by microspectroscopy.

【0007】本発明は、かゝる実情に鑑みて成されたも
のであって、試料を凝集させて凝縮させる手段を開発
し、試料が微小かつ微量の試料であっても、これを高感
度で分析することができるに至ったマイクロ分光分析方
法と、その方法に用いて好適なサンプル台を提供するこ
とを目的としている。
The present invention has been made in view of such circumstances, and has developed a means for aggregating and condensing a sample so that even if the sample is minute and minute, it can be used with high sensitivity. It is an object of the present invention to provide a microspectroscopic analysis method which can be analyzed by the above method, and a sample table suitable for the method.

【0008】[0008]

【課題を解決するための手段】上記の目的を達成するに
至った第1、第2及び第3発明によるマイクロ分光分析
方法は所謂赤外線反射タイプの分析方法であり、第4発
明によるマイクロ分光分析方法は所謂赤外線透過タイプ
の分析方法である。
The microspectroscopic analysis methods according to the first, second and third inventions which have achieved the above objects are so-called infrared reflection type analysis methods, and the microspectroscopic analysis method according to the fourth invention. The method is a so-called infrared transmission type analysis method.

【0009】即ち、第1発明による赤外線反射タイプの
マイクロ分光分析方法は、サンプル台の赤外線反射部材
に付されたフッ素系樹脂の薄膜上に、溶媒に試料を含ま
せた溶液の微量を滴下し、当該溶液中の溶媒を蒸発させ
て試料を凝縮させ、この凝縮試料をサンプル台ごとマイ
クロ分光分析部に位置させて加圧手段によってプレスし
平坦化させた凝縮試料に赤外線を照射し、当該凝縮試料
を通して赤外線反射部材から反射されたスペクトルを測
定することを特徴としている。
That is, in the infrared reflection type microspectroscopic analysis method according to the first invention, a trace amount of a solution containing a sample in a solvent is dropped on a fluororesin thin film attached to an infrared reflection member of a sample table. The solvent in the solution is evaporated to condense the sample, and the condensed sample is placed in the micro-spectroscopic analysis unit with the sample table pressed, and the condensed sample pressed and flattened by the pressurizing means is irradiated with infrared rays, and the condensed sample is condensed. It is characterized in that the spectrum reflected from the infrared reflecting member through the sample is measured.

【0010】第3発明による赤外線反射赤外線透過タイ
プのタイプのマイクロ分光分析方法は、フッ素系樹脂の
ベース上に、溶媒に試料を含ませた溶液の微量を滴下
し、当該溶液中の溶媒を蒸発させて試料を凝縮させ、こ
の凝縮試料を赤外線反射部材に転写させて、この転写試
料を赤外線反射部材ごとマイクロ分光分析部に位置させ
て凝縮試料に赤外線を照射し、当該凝縮試料を通して赤
外線反射部材から反射されたスペクトルを測定すること
を特徴としている。
According to a third aspect of the present invention, there is provided an infrared reflection infrared transmission type microspectroscopic analysis method in which a small amount of a solution containing a sample in a solvent is dropped on a base of a fluororesin, and the solvent in the solution is evaporated. To condense the sample, transfer the condensed sample to an infrared reflecting member, position the transferred sample together with the infrared reflecting member in the microspectroscopic analysis section, irradiate the condensing sample with infrared light, and pass the infrared reflecting member through the condensing sample. Is characterized by measuring the spectrum reflected from the.

【0011】[0011]

【0012】第4発明による赤外線透過タイプのマイク
ロ分光分析方法は、フッ素系樹脂のベース上に、溶媒に
試料を含ませた溶液の微量を滴下し、当該溶液中の溶媒
を蒸発させて試料を凝縮させ、この凝縮試料を赤外線透
過部材に転写させて、この転写試料を赤外線透過部材ご
とマイクロ分光分析部に位置させて凝縮試料に赤外線を
照射し、当該凝縮試料および赤外線透過部材を透過した
スペクトルを測定することを特徴としている。
In the infrared transmission type microspectroscopic analysis method according to the fourth invention, a trace amount of a solution containing a sample in a solvent is dropped on a base of a fluororesin, and the sample in the solution is evaporated by evaporating the solvent in the solution. The condensed sample is transferred to an infrared transmitting member, and the transferred sample is placed together with the infrared transmitting member in the micro-spectroscopic analysis section, and the condensing sample is irradiated with infrared light, and the spectrum transmitted through the condensing sample and the infrared transmitting member is conveyed. Is measured.

【0013】一方、第5発明はサンプル台に関する発明
であって、第5発明によるサンプル台は、フッ素系樹脂
のベースと、当該ベース上で凝縮された試料を転写させ
るための赤外線透過部材とから成る点に特徴を有する。
Meanwhile, fifth shots Ming is an invention relating to a sample stand, the sample table according to the fifth invention, the infrared ray transmitting member for transferring the base of the fluorine-based resin, a sample that has been condensed on the base The feature is that it consists of

【0014】[0014]

【作用】第1乃至第4発明によれば、フッ素系樹脂が性
状的に撥水性に富むことから、このフッ素系樹脂の表面
に滴下される溶液は、その拡散が制限されて表面張力で
球形を保つようになり、かつ、溶媒の蒸発に伴ってその
球形の直径が順次小となって、不揮発性物質すなわち試
料が凝集濃縮され、最後には拡がりが小さくて厚みのあ
る凝縮試料が得られる。
According to the first to fourth aspects of the present invention, since the fluororesin is highly water-repellent in nature, the solution dropped on the surface of the fluororesin is limited in its diffusion and is spherical due to surface tension. And, as the solvent evaporates, the diameter of the sphere gradually decreases, so that the non-volatile substance, that is, the sample, is coagulated and concentrated, and finally a condensed sample having a small spread and a large thickness is obtained. .

【0015】而して、凝縮試料の厚みが厚くなったこと
で、マイクロ分光分析部での試料の赤外線吸収強度が高
くなり、その結果、試料が微小かつ微量の試料であって
も、これを赤外線の反射あるいは透過による分析方法に
よって、高感度で分析することができる。
[0015] As the thickness of the condensed sample is increased, the infrared absorption intensity of the sample in the micro-spectroscopic analysis unit is increased. As a result, even if the sample is minute and minute, it can be reduced. Analysis can be performed with high sensitivity by an analysis method based on reflection or transmission of infrared rays.

【0016】[0016]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。図1は本発明による赤外線の反射によるマイクロ
分光分析方法を説明するための原理図で、図において、
1は試料Sを担持するためのサンプル台で、例えばFT
IRのマイクロ分光分析部に配置される。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a principle diagram for explaining a micro-spectroscopic analysis method by reflection of infrared rays according to the present invention.
1 is a sample table for supporting the sample S, for example, FT
It is located in the IR microspectroscopy section.

【0017】2はサンプル台1上の試料Sに赤外線IR
を照射するための光源、3は試料Sからの赤外線の反射
スペクトルを測定するためのスペクトル測定器で、この
測定器3による反射スペクトルの測定情報を基にして試
料の定量分析や定性分析等が行われる。
Reference numeral 2 denotes a sample S on the sample table 1 with an infrared ray IR.
A light source 3 for irradiating the sample 3 is a spectrum measuring device for measuring a reflection spectrum of the infrared ray from the sample S. Based on the measurement information of the reflection spectrum by the measuring device 3, quantitative analysis and qualitative analysis of the sample are performed. Done.

【0018】この実施例におけるサンプル台1は、鏡面
加工された金属製の赤外線反射部材4の鏡面部に、厚さ
が例えば25μm(一例であり、赤外線の吸収を抑止さ
せる上からは16μmあるいは8μmなど薄いほど好ま
しい)の撥水性に富むフッ素系樹脂の薄膜5を付して成
り、前記測定器3は、前記試料Sおよびフッ素系樹脂の
薄膜5を通して赤外線反射部材4で反射されたスペクト
ルを測定する。
The sample table 1 in this embodiment has a thickness of, for example, 25 .mu.m (for example, 16 .mu.m or 8 .mu.m from the viewpoint of suppressing infrared absorption) on the mirror surface portion of the mirror-finished metallic infrared reflecting member 4. The thinner is preferable.) The measuring device 3 measures the spectrum reflected by the infrared reflecting member 4 through the sample S and the thin film 5 of the fluororesin. I do.

【0019】尚、前記フッ素系樹脂の薄膜5を赤外線透
過部材(例えばKBrやNaCl等のアルカリハライド
系材料の結晶やフイルム)に例えばコーティングし、当
該赤外線透過部材を介してフッ素系樹脂の薄膜5を赤外
線反射部材4に付す構成とするもよく、かゝる構成によ
れば、前記フッ素系樹脂の薄膜5にピンホールが存在す
る場合に当該ピンホールが赤外線透過部材で埋められ、
フッ素系樹脂の薄膜5と赤外線反射部材4との間への溶
液のしみ込みが効果的に防止される。
The fluororesin thin film 5 is coated, for example, on an infrared transmitting member (for example, a crystal or a film of an alkali halide material such as KBr or NaCl), and the fluororesin thin film 5 is passed through the infrared transmitting member. According to such a configuration, when a pinhole exists in the fluororesin thin film 5, the pinhole is filled with an infrared transmitting member,
The permeation of the solution between the fluororesin thin film 5 and the infrared reflecting member 4 is effectively prevented.

【0020】一方、上記の試料Sは、例えば液体クロマ
トグラフイによって分離された溶出物であって、前記フ
ッ素系樹脂の薄膜5上に次のようにして担持させてい
る。即ち、図2に示すように、分取器などの器具を用い
て、溶媒に試料Sを含ませた溶液の微量をフッ素系樹脂
の薄膜5上に滴下させる。
On the other hand, the sample S is an eluate separated by, for example, liquid chromatography, and is carried on the fluororesin thin film 5 as follows. That is, as shown in FIG. 2, a small amount of a solution containing the sample S in a solvent is dropped on the fluororesin thin film 5 using an instrument such as a fractionator.

【0021】この時、前記フッ素系樹脂の薄膜5は、溶
媒として例えばメタノールやエタノールを選択した場合
でも、性状的に撥水性に富むことから、このフッ素系樹
脂の薄膜5上に滴下された溶液は拡散が制限され、その
表面張力で球形を保つことになる。
At this time, since the fluororesin thin film 5 is highly water-repellent in nature even when methanol or ethanol is selected as the solvent, the solution dropped on the fluororesin thin film 5 is used. Has a limited diffusion and will remain spherical due to its surface tension.

【0022】そして図3に示すように、前記溶液中の溶
媒を蒸発(自然蒸発或いはヒーター等で強制蒸発)させ
ると、前記溶液は球形を保ちつつ小径化されて不揮発性
物質すなわち試料Sが凝集濃縮され、最後には図4に示
すように、前記フッ素系樹脂の薄膜5上に試料Sのみの
凝縮物が形成されることになる。
As shown in FIG. 3, when the solvent in the solution is evaporated (natural evaporation or forced evaporation with a heater or the like), the solution is reduced in diameter while maintaining a spherical shape, and the non-volatile substance, that is, the sample S is aggregated. As a result, the condensate of only the sample S is formed on the fluororesin thin film 5 as shown in FIG.

【0023】この凝縮試料Sは、それまでの過程での溶
液の拡散制限によって厚みのある拡がりの小さいものと
なっており、因に、10μリットルの流動パラフィンを 1
00mリットルのアセトンに溶解させた溶液の1μリット
ルをフッ素系樹脂の薄膜5上に滴下させた場合、この溶
液は球形を呈して球面の周辺部から溶媒が蒸発し、試料
Sが 100μmφ程度の厚みのある円形に凝縮した。
The condensed sample S is thick and has a small spread due to the diffusion limitation of the solution in the process up to that point.
When 1 μl of a solution dissolved in 00 ml of acetone is dropped on the fluororesin thin film 5, the solution has a spherical shape, the solvent evaporates from the periphery of the spherical surface, and the sample S has a thickness of about 100 μmφ. Condensed into a circular shape.

【0024】この凝縮試料Sをサンプル台1ごとマイク
ロ分光分析部に位置させてマイクロ分光分析を行うので
あるが、好ましくは図5に示すように、適宜の加圧手段
6によって前記凝縮試料Sをプレスして平坦化させて測
定感度を向上させることである。
The condensed sample S is placed in the micro-spectroscopic analysis section along with the sample stage 1 for micro-spectroscopic analysis. Preferably, as shown in FIG. Pressing and flattening to improve the measurement sensitivity.

【0025】而して、上記の凝縮試料Sは厚みが厚いの
で、マイクロ分光分析部での試料Sの赤外線吸収強度が
高くなり、顕微FTIR/FT−530(株式会社堀場
製作所製)によって赤外線の透過率を測定したところ、
図10に示すように、波数1450cm-1近辺での赤外線
の透過率は10%程度であって、吸光度は 1.0と極めて
高く、既述した従来の手段に比較して、吸光割合が 100
倍になり、反射スペクトルの測定による試料分析が高感
度(従来に比べて 100倍の感度向上)で達成される。
Since the thickness of the above-mentioned condensed sample S is large, the infrared absorption intensity of the sample S in the micro-spectroscopic analysis unit is increased, and the infrared light is absorbed by the micro FTIR / FT-530 (manufactured by Horiba, Ltd.). When the transmittance was measured,
As shown in FIG. 10, the transmittance of infrared rays near the wave number of 1450 cm -1 is about 10%, the absorbance is extremely high at 1.0, and the absorbance ratio is 100% higher than that of the conventional means described above.
Sample analysis by reflection spectrum measurement is achieved with high sensitivity (100 times higher sensitivity than before).

【0026】尚、上記溶液中の溶媒の蒸発は、自然蒸発
に頼る以外にヒーター等で強制蒸発させるもよく、この
時、溶媒の蒸発速度を余り速くすると、試料Sの凝集が
遅れ勝ちとなって凝縮試料Sが拡がり気味になり、凝縮
試料Sの厚みが薄くなる懸念がある。
The solvent in the solution may be evaporated by a heater or the like instead of relying on spontaneous evaporation. At this time, if the evaporation rate of the solvent is too high, the aggregation of the sample S tends to be delayed. Therefore, there is a concern that the condensed sample S tends to spread and the thickness of the condensed sample S becomes thin.

【0027】この溶媒の強制蒸発の速度をコントロール
するための手段7を図6に示す。このコントロール手段
7は、下面にヒーター8を備えた架台9と、この架台9
上に載置される密閉容器10から成るもので、前記密閉容
器10には、排気コントロールバルブ11を備えた細管12が
貫設されている。
FIG. 6 shows means 7 for controlling the rate of forced evaporation of the solvent. The control means 7 includes a pedestal 9 having a heater 8 on its lower surface,
It comprises a sealed container 10 placed on top, and a narrow tube 12 provided with an exhaust control valve 11 is penetrated in the sealed container 10.

【0028】かゝる構成によれば、前記架台9上にサン
プル台1を位置させて、このサンプル台1の薄膜5上に
微量の溶液を滴下させると共に、当該サンプル台1を覆
うように前記架台9上に密閉容器10を載置させてヒータ
ー8を発熱させ、かつ、コントロールバルブ11によって
排気量をコントロールさせることで、前記溶液中の溶媒
が飽和蒸発の存在下で蒸発すると共に、その溶媒の蒸発
速度が制御されるもので、試料Sの集中性が向上するの
みならず、溶液ひいては凝縮試料Sの外気汚染も防止さ
れる。
According to such a configuration, the sample table 1 is positioned on the gantry 9, a small amount of solution is dropped on the thin film 5 of the sample table 1, and the sample table 1 is covered so as to cover the sample table 1. By mounting the closed vessel 10 on the gantry 9 to generate heat from the heater 8 and controlling the amount of exhaust by the control valve 11, the solvent in the solution evaporates in the presence of saturated evaporation, and The evaporation rate of the sample S is controlled, so that not only the concentration of the sample S is improved but also the contamination of the solution and the condensed sample S with the outside air is prevented.

【0029】図7は赤外線反射の分析方法に用いられる
別実施例のサンプル台1を示し、薄膜であることを問わ
ないフッ素系樹脂のベース13と、このベース13上で凝縮
された試料Sを転写させるための赤外線反射部材14とか
ら成り、より詳しくは、図2〜4で示した手段によって
試料Sを凝縮させるフッ素系樹脂のベース13と、この凝
縮試料Sを転写して担持し且つマイクロ分光分析部に位
置されるところの、試料担持面が鏡面加工された赤外線
反射部材14とから成る。
FIG. 7 shows a sample table 1 of another embodiment used in the method of analyzing infrared reflection. A base 13 made of a fluororesin, which may be a thin film, and a sample S condensed on the base 13 are shown. More specifically, the base 13 is made of a fluororesin that condenses the sample S by the means shown in FIGS. 2 to 4, and transfers and carries the condensed sample S by micro means. The sample supporting surface, which is located in the spectroscopic analysis unit, includes a mirror-finished infrared reflecting member 14.

【0030】かゝる構成によれば、光源2から照射され
た赤外線は転写試料Sに吸収されて赤外線反射部材14で
反射され、その反射された赤外線のスペクトルが測定器
3によって測定されるもので、図1に示したマイクロ分
光分析方法に比べて、赤外線の反射面部にフッ素系樹脂
の薄膜5が存在しないことで、測定感度が高くなる利点
がある。
According to such a configuration, infrared light emitted from the light source 2 is absorbed by the transfer sample S and reflected by the infrared reflecting member 14, and the spectrum of the reflected infrared light is measured by the measuring device 3. Therefore, as compared with the micro-spectroscopic analysis method shown in FIG. 1, there is an advantage that the measurement sensitivity is increased because the fluororesin thin film 5 does not exist on the infrared reflecting surface.

【0031】図8は本発明による赤外線の透過によるマ
イクロ分光分析方法を説明するための原理図で、この図
において、1は試料Sを担持するためのサンプル台、2
は試料Sに赤外線IRを照射するための光源、15,16は
集光鏡、17,18はビームコンデンサ、19はマスク、3は
試料Sを透過した後の赤外線の透過スペクトルを測定す
るためのスペクトル測定器で、この測定器3による透過
スペクトルの測定情報を基にして試料の定量分析や定性
分析等が行われる。
FIG. 8 is a principle diagram for explaining a micro-spectroscopic analysis method by transmission of infrared rays according to the present invention. In this figure, reference numeral 1 denotes a sample table for supporting a sample S;
Is a light source for irradiating the sample S with infrared IR; The spectrum measuring device performs quantitative analysis, qualitative analysis, and the like on the sample based on the measurement information of the transmission spectrum by the measuring device 3.

【0032】尚、前記ビームコンデンサ17,18は集光効
率をアップさせるために設けたもので、当該ビームコン
デンサ17,18を省略し、試料Sへの入射光路の途中に集
光レンズを配置しても集光効率のアップが達成される。
The beam condensers 17 and 18 are provided to increase the light-collecting efficiency. The beam condensers 17 and 18 are omitted, and a light-condensing lens is arranged in the middle of the optical path incident on the sample S. Even so, an increase in light collection efficiency is achieved.

【0033】この実施例におけるサンプル台1は、例え
ばKBrの結晶から成る赤外線透過部材20にフッ素系樹
脂の薄膜21を付したもので、前記赤外線透過部材20とし
ては赤外線を良好に透過させるもの、即ち、KBrの他
にNaClやCaF2 などのアルカリハライド系の材料
から成る結晶体やフィルムを選択でき、好ましくは、潮
解性の小さいものを選択する。
The sample table 1 in this embodiment is obtained by attaching a thin film 21 made of, for example, a fluorocarbon resin to an infrared transmitting member 20 made of, for example, a KBr crystal. That is, in addition to KBr, a crystal or a film made of an alkali halide material such as NaCl or CaF 2 can be selected, and preferably, a material having a small deliquescent is selected.

【0034】尚、強度的な問題がなければ、前記赤外線
透過部材20を省略し、フッ素系樹脂の薄膜21のみでサン
プル台1を構成することも可能である。
If there is no problem in strength, it is also possible to omit the infrared transmitting member 20 and to configure the sample table 1 only with the fluororesin thin film 21.

【0035】図9は赤外線透過の分析方法に用いられる
別実施例のサンプル台1を示し、薄膜であることを問わ
ないフッ素系樹脂のベース22と、このベース22上で凝縮
された試料Sを転写させるための赤外線透過部材23とか
ら成り、より詳しくは、図2〜4で示した手段によって
試料Sを凝縮させるフッ素系樹脂のベース22と、この凝
縮試料Sを転写して担持し且つマイクロ分光分析部に位
置されるところの、KBrやNaClなどのアルカリハ
ライド系材料の結晶体やフィルム等の赤外線反射部材23
とから成る。
FIG. 9 shows a sample table 1 of another embodiment used in the method of analyzing infrared transmission. A base 22 made of a fluororesin, which may be a thin film, and a sample S condensed on the base 22 are shown. An infrared transmitting member 23 for transfer, more specifically, a fluororesin base 22 for condensing the sample S by the means shown in FIGS. An infrared reflecting member 23 such as a crystal or a film of an alkali halide material such as KBr or NaCl, which is located in the spectral analysis section.
Consisting of

【0036】かゝる構成によれば、光源2から照射され
た赤外線は転写試料Sに吸収されて赤外線透過部材23を
透過し、その透過された赤外線のスペクトルが測定器3
によって測定されるもので、図8に示したマイクロ分光
分析方法に比べて、赤外線の透過部にフッ素系樹脂の薄
膜21が存在しないので、測定感度が高くなる利点があ
る。
According to such a configuration, the infrared light emitted from the light source 2 is absorbed by the transfer sample S and transmitted through the infrared transmitting member 23, and the spectrum of the transmitted infrared light is measured by the measuring device 3.
As compared with the micro-spectroscopic analysis method shown in FIG. 8, since there is no fluororesin thin film 21 in the infrared transmitting portion, there is an advantage that the measurement sensitivity is increased.

【0037】尚、前記赤外線反射部材4にフッ素系樹脂
の薄膜5を付する手段、あるいは、赤外線透過部材20に
フッ素系樹脂の薄膜21を付する手段としては、コーティ
ング(デイスパージョン)やフッ素系樹脂フイルムの貼
着といった手段を任意に選択することができる。
The means for applying the fluororesin thin film 5 to the infrared reflecting member 4 or the means for applying the fluororesin thin film 21 to the infrared transmitting member 20 includes coating (dispersion) or fluorine. Means such as sticking of the resin film can be arbitrarily selected.

【0038】[0038]

【発明の効果】以上説明したように本発明のマイクロ分
光分析方法は、撥水性に富むフッ素系樹脂によって拡散
を制限させた状態で溶液中の溶媒を蒸発させて、溶液に
含まれる試料を凝集させつつ凝縮させ、凝縮試料を拡が
りの小さい厚みのあるものにして、この凝縮試料を赤外
線反射法あるいは吸収法によってマイクロ分光分析させ
るものであって、凝縮試料の厚みを従来に比べて飛躍的
に厚くできることから当該凝縮試料の赤外線吸収強度が
高くなり、その結果、試料が微小かつ微量の試料であっ
ても、これを赤外線の反射あるいは透過による分析法で
高感度分析することができるようになった。
As described above, according to the microspectroscopic analysis method of the present invention, the solvent contained in the solution is evaporated by evaporating the solvent in the solution in a state where diffusion is limited by the fluorine resin having high water repellency. The condensed sample is made to have a small thickness with a small spread, and the condensed sample is subjected to micro-spectroscopic analysis by an infrared reflection method or an absorption method. The thickness can be increased, so that the infrared absorption intensity of the condensed sample is increased. As a result, even if the sample is small and minute, it can be analyzed with high sensitivity by the method of reflection or transmission of infrared light. Was.

【図面の簡単な説明】[Brief description of the drawings]

【図1】赤外線の反射によるマイクロ分光分析方法の原
理図である。
FIG. 1 is a diagram illustrating the principle of a microspectroscopic analysis method using infrared reflection.

【図2】サンプル台に溶液を滴下させた説明図である。FIG. 2 is an explanatory diagram in which a solution is dropped on a sample table.

【図3】溶液中の溶媒の蒸発途中を示す説明図である。FIG. 3 is an explanatory view showing a state in which a solvent in a solution is being evaporated.

【図4】試料の凝縮状態を示す説明図である。FIG. 4 is an explanatory diagram showing a condensed state of a sample.

【図5】凝縮試料を加圧して平坦化させた説明図であ
る。
FIG. 5 is an explanatory diagram in which a condensed sample is flattened by pressing.

【図6】溶媒の蒸発速度をコントロールさせるコントロ
ール手段の断面図である。
FIG. 6 is a cross-sectional view of control means for controlling the evaporation rate of a solvent.

【図7】赤外線反射の分析方法に用いられる別実施例の
サンプル台の説明図である。
FIG. 7 is an explanatory view of a sample table of another embodiment used for the infrared reflection analysis method.

【図8】赤外線の透過によるマイクロ分光分析方法の原
理図である。
FIG. 8 is a principle diagram of a micro-spectroscopic analysis method by transmission of infrared rays.

【図9】赤外線透過の分析方法に用いられる別実施例の
サンプル台の説明図である。
FIG. 9 is an explanatory view of a sample table of another embodiment used for the infrared transmission analysis method.

【図10】本発明の試料による赤外線の透過特性図であ
る。
FIG. 10 is a graph showing infrared light transmission characteristics of the sample of the present invention.

【図11】従来の試料による赤外線の透過特性図であ
る。
FIG. 11 is a graph showing infrared light transmission characteristics of a conventional sample.

【符号の説明】[Explanation of symbols]

1…サンプル台、4,14…赤外線反射部材、5,21…フ
ッ素系樹脂の薄膜、13,22…フッ素系樹脂のベース、2
0,23…赤外線透過部材、S…試料。
1 ... Sample stand, 4,14 ... Infrared reflective member, 5,21 ... Fluorine resin thin film, 13,22 ... Fluorine resin base, 2
0, 23: infrared transmitting member, S: sample.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平4−249736(JP,A) 特開 昭63−3244(JP,A) 特開 平4−136738(JP,A) 特開 昭63−171342(JP,A) 特開 平3−226670(JP,A) 特表 平4−506402(JP,A) 池田昌彦、「ピンポイント濃縮法の顕 微FT−IRへの応用」、ポリファイ ル、1992年3月1日株式会社大成社出版 発行、第32−33頁 (58)調査した分野(Int.Cl.7,DB名) G01N 21/00 - 21/61 G01N 1/00 - 1/34 JICSTファイル(JOIS)──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-249736 (JP, A) JP-A-63-1244 (JP, A) JP-A-4-1366738 (JP, A) JP-A 63-244 171342 (JP, A) JP-A-3-226670 (JP, A) JP-A-4-506402 (JP, A) Masahiko Ikeda, "Application of Pinpoint Concentration Method to Micro FT-IR", Polyfile, March 1, 1992 Published by Taiseisha Publishing Co., Ltd., pp. 32-33 (58) Fields investigated (Int. Cl. 7 , DB name) G01N 21/00-21/61 G01N 1/00-1/34 JICST file (JOIS)

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 サンプル台の赤外線反射部材に付された
フッ素系樹脂の薄膜上に、溶媒に試料を含ませた溶液の
微量を滴下し、当該溶液中の溶媒を蒸発させて試料を凝
縮させ、この凝縮試料をサンプル台ごとマイクロ分光分
析部に位置させて加圧手段によってプレスし平坦化させ
た凝縮試料に赤外線を照射し、当該凝縮試料を通して赤
外線反射部材から反射されたスペクトルを測定すること
を特徴とするマイクロ分光分析方法。
1. A small amount of a solution in which a sample is contained in a solvent is dropped on a fluororesin thin film attached to an infrared reflecting member of a sample table, and the solvent in the solution is evaporated to condense the sample. Then, the condensed sample is placed on the micro-spectroscopic analysis unit together with the sample table, and the condensed sample pressed and flattened by the pressurizing means is irradiated with infrared rays, and the spectrum reflected from the infrared reflecting member through the condensed sample is measured. A microspectroscopic analysis method characterized by the above-mentioned.
【請求項2】 前記フッ素系樹脂の薄膜が、赤外線透過
部材を介して前記赤外線反射部材に付されている請求項
1に記載のマイクロ分光分析方法。
2. The micro-spectroscopic analysis method according to claim 1, wherein the fluororesin thin film is attached to the infrared reflecting member via an infrared transmitting member.
【請求項3】 フッ素系樹脂のベース上に、溶媒に試料
を含ませた溶液の微量を滴下し、当該溶液中の溶媒を蒸
発させて試料を凝縮させ、この凝縮試料を赤外線反射部
材に転写させて、この転写試料を赤外線反射部材ごとマ
イクロ分光分析部に位置させて転写試料に赤外線を照射
し、当該転写試料を通して赤外線反射部材から反射され
たスペクトルを測定することを特徴とするマイクロ分光
分析方法。
3. A small amount of a solution containing a sample in a solvent is dropped on a base of a fluororesin, the solvent in the solution is evaporated to condense the sample, and the condensed sample is transferred to an infrared reflecting member. Micro-spectroscopic analysis characterized by irradiating the transferred sample with infrared light by placing the transferred sample together with the infrared reflecting member in the micro-spectroscopic analyzer, and measuring the spectrum reflected from the infrared reflecting member through the transferred sample. Method.
【請求項4】 フッ素系樹脂のベース上に、溶媒に試料
を含ませた溶液の微量を滴下し、当該溶液中の溶媒を蒸
発させて試料を凝縮させ、この凝縮試料を赤外線透過部
材に転写させて、この転写試料を赤外線透過部材ごとマ
イクロ分光分析部に位置させて転写試料に赤外線を照射
し、当該転写試料および赤外線透過部材を透過したスペ
クトルを測定することを特徴とするマイクロ分光分析方
法。
4. A small amount of a solution containing a sample in a solvent is dropped on a base of a fluororesin, the solvent in the solution is evaporated to condense the sample, and the condensed sample is transferred to an infrared transmitting member. A micro-spectroscopic analysis method comprising: locating the transferred sample together with the infrared transmitting member in the micro-spectroscopic analysis section, irradiating the transferred sample with infrared light, and measuring the spectrum transmitted through the transferred sample and the infrared transmitting member. .
【請求項5】 フッ素系樹脂のベースと、当該ベース上
で凝縮された試料を転写させるための赤外線透過部材と
から成ることを特徴とするサンプル台。
5. A sample table comprising a fluororesin base and an infrared transmitting member for transferring a sample condensed on the base.
JP14981991A 1991-05-25 1991-05-25 Microspectroscopic analysis method and sample table used for the method Expired - Fee Related JP3093329B2 (en)

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JPH04348256A JPH04348256A (en) 1992-12-03
JP3093329B2 true JP3093329B2 (en) 2000-10-03

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Country Link
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JP5732869B2 (en) * 2011-01-25 2015-06-10 富士通株式会社 Spectroscopic analysis method and sampling unit for spectroscopic analysis
WO2020174678A1 (en) * 2019-02-28 2020-09-03 三菱電機株式会社 Analysis method and sample preparation device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
池田昌彦、「ピンポイント濃縮法の顕微FT−IRへの応用」、ポリファイル、1992年3月1日株式会社大成社出版発行、第32−33頁

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