JP3092553B2 - Insulated gate field effect transistor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an insulated gate field effect transistor, and more particularly to an insulated gate field effect transistor having a high breakdown voltage.

[0002]

2. Description of the Related Art Conventionally, as this kind of insulated gate field effect transistor, a high withstand voltage insulated gate field effect transistor formed on a semiconductor substrate [hereinafter referred to as MOSFE]
T (Metal Oxidized Semiconductor)
or Field Effect Transisto
r)] is known. This MOSFET is disclosed in JP-A-56-4281 (hereinafter referred to as Reference Document 1).
).

FIG. 8 is a diagram showing a configuration of the MOSFET. In the figure, a high-concentration n-type drain region 622 is formed in a circle on the surface of a p-type semiconductor substrate 621. Further, the low concentration n-type region 623 is
2 and is formed in a shallow ring shape in contact with the outer periphery thereof so as to surround it.

Further, a ring-shaped gate electrode 625 and a gate insulating film 626 are formed on the outside thereof, and a source region 624 is formed on the outside thereof in a ring shape. Furthermore, on the surface of the p-type substrate 621 other than those described above, a high-concentration p-type region 627 and an oxide film 628 are formed.

In a conventional rectangular MOSFET, a high electric field in a region where a high-concentration p-type region and a drain region are introduced to prevent a parasitic transistor effect causes breakdown. Therefore, by arranging the drain region inside as shown in FIG.
The mold region 627 and the drain region 622 are completely separated.

A low concentration n-type semiconductor region 623 is formed inside the drain region 622 by an LDD (Lightly D
(Operated Drain) region, which has the effect of reducing the electric field intensity. Therefore, the breakdown voltage is higher than that of a rectangular MOSFET.

On the other hand, as another MOSFET, a circular MOSFET formed of a thin film semiconductor on an insulating substrate is known. For this MOSFET, see "An a
morphous silicon TFT with
Annular-shaped channel a
second reduced gate-source ca
capacity "(YH Byun et a
l. , IEEE Trans. Electron De
services Vol. 43, no. 5, 1996) (hereinafter referred to as Reference Document 2).

FIG. 9 is a schematic sectional view showing the structure of this MOSFET. This MOSFET has a gate electrode 732, a first interlayer insulating film 733,
A thin film semiconductor 734 of amorphous silicon or the like is sequentially stacked, and a drain region 735 and a source region 736 are formed concentrically as shown in FIG. 9, and finally, a source electrode wiring is formed via a second interlayer insulating film 737. 738 are connected.

The above-mentioned MOSFET is externally connected by a gate electrode 732, a drain electrode wiring 739, and a source electrode wiring 738, and is applied to an application device such as an analog switch for a pixel of a liquid crystal display or an image sensor or a thin film semiconductor integrated circuit. Incorporated.

[0010]

SUMMARY OF THE INVENTION The conventional MOS described above
In the FET, in order to further increase the withstand voltage between the source and the drain, it is desirable to weaken the electric field at the drain end by utilizing the effect of geometrical electric field relaxation.

However, in the configuration described in Reference 1, the drain region must be formed inside the source region without fail, and the effect of geometrical electric field relaxation cannot be used. In addition, when wiring is performed using a conductive material through an insulating film and a contact hole in each of the regions, there is no description about measures against deterioration of transistor performance due to parasitic capacitance caused by these wiring materials. Not.

In the structure described in Reference 2, the gate electrode, the drain electrode wiring, and the source electrode wiring intersect with each other via an insulating film, and a capacitance is generated between these wirings. Therefore, there is a problem that transistor performance is deteriorated.

In this case, there is a danger of the insulating film being destroyed by a high voltage at a place where these electrodes intersect. In particular, in an application device requiring a large number of transistors, such as an integrated circuit or a pixel switch of a liquid crystal display, This may cause the yield and reliability of these devices to deteriorate.

Further, a rectangular MOSFET and a circular MO
When the SFET and the SFET are respectively formed in regions having a constant area, there is no description of a performance comparison from the viewpoint of which MOSFET can flow a larger drain current.

As described above, the conventional circular MO
In the SFET, there is no countermeasure against deterioration of transistor performance due to parasitic capacitance, and a rectangular MO
When an SFET and a circular MOSFET are formed, it is not clear whether the circular MOSFET has a higher drain current than the rectangular MOSFET.

Further, the MOSFET described in Reference Document 1 cannot utilize the effect of geometrical electric field relaxation, and the MOSFET described in Reference Document 2 has a risk of dielectric breakdown where wirings cross. There is also.

Therefore, an object of the present invention is to solve the above-mentioned problems, to prevent the transistor from being degraded due to the parasitic capacitance, to make it difficult for dielectric breakdown to occur even when a high voltage is applied, and to sufficiently reduce the breakdown voltage. MOSF can be raised
To provide ET.

[0018]

SUMMARY OF THE INVENTION An insulated gate field effect transistor according to the present invention comprises a first and second arc-shaped transistors formed of a thin film semiconductor on an insulating substrate and having the same center point. A channel region including an end; a drain region formed by introducing a high-concentration impurity into the first end; and a source region formed by introducing a high-concentration impurity into the second end. And a gate electrode formed on one of the upper and lower portions of the channel region via an insulating layer, wherein the gate electrode and the wiring pattern for the gate electrode are formed in an Ω shape, and the The outer peripheral radius is smaller than the inner peripheral radius of the drain region, and is connected to the wiring pattern for the gate electrode, the electrode pattern for wiring connected to the drain region, and the source region. The electrode pattern for wiring is configured not to intersect with each other.

That is, in the first insulated gate field effect transistor of the present invention, the outer periphery of the source region and the inner periphery of the drain region are formed in an arc shape having the same center point,
The relationship a <b is established between the radius a of the outer periphery of the source region and the radius b of the inner periphery of the drain region, and the wiring pattern for the gate electrode and the electrode pattern for the wiring connected to the drain region and the source region Are formed on the same plane or on a plurality of planes via an insulating layer so that the electrode patterns do not cross each other.

The second insulated gate field effect transistor of the present invention is configured to have an arc-shaped region between the drain region and the channel region which contains an impurity whose concentration is lower than that of the drain region. .

The third insulated gate field effect transistor according to the present invention has an arc-shaped region between the drain region and the channel region, above or below the first insulating layer, where no gate electrode exists, with the first insulating layer interposed therebetween. It is configured as follows.

In the fourth insulated gate field effect transistor of the present invention, a second insulating layer thicker than the first insulating layer is provided above or below an arc-shaped region where no gate electrode is present. It is configured to include a gate electrode.

In the fifth insulated gate field effect transistor of the present invention, b ² / (ba) <2π (b−) is defined between the radius a of the outer periphery of the source region and the radius b of the inner periphery of the drain region.
a) / ln (b / a).

With the above configuration, the electric field is geometrically relaxed in the inner periphery of the drain region, so that the withstand voltage can be sufficiently increased. Also, MOSFET
Since the wirings connected to the three terminals are formed on the same plane, the parasitic transistor effect does not occur. In this case, since these wirings do not intersect via the insulating layer, even if a high voltage is applied, dielectric breakdown hardly occurs.

Further, since the capacitance between these wirings is small, it is possible to reduce the performance deterioration of the electronic circuit constituted by this MOSFET, and to operate the circuit at high speed. Further, in the MOSFET manufacturing process, the wiring material film forming process and the patterning process are each performed only once,
Manufacturing costs can be reduced.

[0026]

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1A is a plan view showing the configuration of the first embodiment of the present invention, and FIG.
It is an AA sectional view of (a).

In these figures, an insulated gate field effect transistor (hereinafter referred to as M) according to a first embodiment of the present invention is shown.
OSFET) is a thin film semiconductor 2 such as amorphous silicon or polycrystalline silicon on an insulating substrate 10.
Using 0, a source region 11, a channel region 14, and a drain region 12 are sequentially formed concentrically from the inside.

The thin film semiconductor 20 is formed in an island shape in a region indicated by a dotted line on the insulating substrate 10 and an adjacent MOS (not shown) is formed.
It is separated from the thin film semiconductor of an element such as an FET. The channel region 14 is formed by applying a voltage to the gate electrode 13 through the gate electrode wiring 23 to invert the thin film semiconductor 20 at a position corresponding to the gate electrode 13 via the first interlayer insulating film 16.

The source region 11 and the drain region 12 are connected to a source region wiring 21 and a drain electrode wiring 22 via a source region contact 31 and a drain electrode contact 32, respectively.
Each terminal of the SFET is connected to the outside. These wirings including the gate electrode wiring 23 are formed so as not to cross each other on the same plane on the first interlayer insulating film 16 as shown in FIG.

The operation of the MOSFET according to the first embodiment of the present invention will be described with reference to FIG. This MO
The operating principle in which the SFET functions as a transistor is the same as the conventional one. However, the MO according to the first embodiment of the present invention
The SFET has the following features.

First, the MOS according to the first embodiment of the present invention
The effect of electric field relaxation in the FET will be described. FIG.
In a, a is the radius of the outer periphery of the source region 11, and b is
Represents the inner radius of the drain region 12. Electric field strength Ea at the outer periphery of source region 11 and drain region 1
The ratio with the electric field strength Eb on the inner circumference of 2 is given by the following equation: Eb / Ea = a / b (1)

This indicates that the electric field intensity is lower inside the drain region 12 than outside the source region 11, and it is understood that the electric field is geometrically alleviated. When the electric field at the drain end is relaxed, a higher voltage can be applied between the drain and the source, and such an M
The OSFET can be used for a high breakdown voltage application device.

Subsequently, the MO according to the first embodiment of the present invention will be described.
The advantage of forming the wiring connected to the three terminals of the SFET on the same plane will be described. These wirings may be connected to adjacent elements such as MOSFETs (not shown). However, since the thin film semiconductors 20 are formed in an island shape,
No semiconductor layer exists below or above these wirings. Therefore, the MOSF according to the first embodiment of the present invention
No parasitic transistor effect occurs in ET.

Further, since these wirings do not intersect via the insulating layer, dielectric breakdown hardly occurs even when a high voltage is applied. Further, since the capacitance between these wirings is small, it is possible to reduce the performance deterioration of the electronic circuit constituted by this MOSFET. That is, high-speed circuit operation becomes possible. Furthermore, the wiring material forming step and the patterning step each need only be performed once in the MOSFET manufacturing process, and the manufacturing cost is reduced.

FIG. 2A is a plan view showing the structure of the second embodiment of the present invention, and FIG. 2B is a sectional view taken along the line BB of FIG. 2A. In these figures, a MOSFET according to a second embodiment of the present invention uses a thin film semiconductor 120 such as amorphous silicon or polycrystalline silicon on an insulating substrate 110 and concentrically forms a source region 11 from the inside.
1. A channel region 114, an LDD region 115, and a drain region 112 are sequentially formed.

The thin film semiconductor 120 is formed in an island shape in a region indicated by a dotted line on the insulating substrate 110, and an adjacent M (not shown) is formed.
It is separated from a thin film semiconductor of an element such as an OSFET.
The channel region 114 is formed by applying a voltage to the gate electrode 113 through the gate electrode wiring 123 to invert the thin film semiconductor 120 at a position corresponding to the gate electrode 113 via the first interlayer insulating film 116.

The source region 111 and the drain region 112 are connected to a source region wiring 121 and a drain electrode wiring 122 via a source region contact 131 and a drain electrode contact 132, respectively. Is connected to the outside. These wirings including the wiring 123 for the gate electrode are shown in FIG.
As shown in (b), they are formed so as not to cross each other on the same plane on the first interlayer insulating film 116.

The LDD region 115 is provided at the boundary between the drain region 112 and the channel region 114.
The DD region 115 can be formed by, for example, a step of ion-implanting a low-concentration impurity using the gate electrode 113 as a mask.

With such an LDD region 115, the depletion layer easily spreads in this region, and the electric field at the drain end is reduced. Therefore, the source-drain breakdown voltage can be further increased in addition to the above-described effect of the geometrical electric field relaxation.

FIG. 3A is a plan view showing the configuration of the third embodiment of the present invention, and FIG. 3B is a sectional view taken along the line CC of FIG. 3A. In these figures, the MOSFET according to the third embodiment of the present invention uses a thin film semiconductor 220 such as amorphous silicon or polycrystalline silicon on an insulating substrate 210 and concentrically forms the source region 21 from the inside.
1, a channel region 214, an offset region 218, and a drain region 212 are sequentially formed.

The thin film semiconductor 220 is formed in an island shape in a region indicated by a dotted line on the insulating substrate 210, and an adjacent M (not shown) is formed.
It is separated from a thin film semiconductor of an element such as an OSFET.
The channel region 214 is formed by applying a voltage to the gate electrode 213 through the gate electrode wiring 223 to invert the thin film semiconductor 220 at a position corresponding to the gate electrode 213 via the first interlayer insulating film 216.

The source region 211 and the drain region 212 are connected to a source region wiring 221 and a drain electrode wiring 222 via a source region contact 231 and a drain electrode contact 232, respectively. Is connected to the outside. These wirings including the wiring 223 for the gate electrode are shown in FIG.
As shown in (b), they are formed so as not to cross each other on the same plane on the first interlayer insulating film 216.

The offset region 218 corresponds to the drain region 21
The offset region 218 is formed at the same time as the channel region 214, and the only difference from the channel region 214 is whether or not the gate electrode 213 exists on the upper portion.

With such an offset region 218, the depletion layer easily spreads in this region, and the electric field at the drain end is reduced. Therefore, the source-drain breakdown voltage can be further increased in addition to the above-described effect of the geometrical electric field relaxation. However, the third embodiment of the present invention has a disadvantage that the on-current is reduced by the offset region 218 as compared with the first embodiment of the present invention.
That is, the MOSFET according to the first embodiment of the present invention is selected according to the required performance of the application device, whether the withstand voltage or the on-current is prioritized, or the MOSFET according to the third embodiment of the present invention is selected. You just have to select

FIG. 4A is a plan view showing the configuration of the fourth embodiment of the present invention, and FIG. 4B is a sectional view taken along the line DD in FIG. 4A. In these figures, the MOSFET according to the fourth embodiment of the present invention uses a thin film semiconductor 320 such as amorphous silicon or polycrystalline silicon on an insulating substrate 310 and concentrically forms a source region 31 from the inside.
1, a channel region 314, an offset region 318, and a drain region 312 are formed in this order.

The thin film semiconductor 320 is formed in an island shape in a region indicated by a dotted line on the insulating substrate 310, and an adjacent M (not shown) is formed.
It is separated from a thin film semiconductor of an element such as an OSFET.
The channel region 314 is formed by applying a voltage to the gate electrode 313 through the gate electrode wiring 323 to invert the thin film semiconductor 320 at a position corresponding to the gate electrode 313 via the first interlayer insulating film 316.

The source region 311 and the drain region 312 are connected to a source region wiring 321 and a drain electrode wiring 322 via a source region contact 331 and a drain electrode contact 332, respectively. Is connected to the outside. These wirings including the wiring 323 for the gate electrode are shown in FIG.
As shown in (b), they are formed so as not to cross each other on the same plane on the first interlayer insulating film 316.

The sub-gate electrode 319 is provided above the offset region 318 via the second interlayer insulating film 317. When a sufficiently high voltage is applied to the sub-gate electrode 319, the sub-gate electrode 319 becomes the offset region 218 in the third embodiment. The region 318 is equivalent to a part of the channel region 314, and when the voltage applied to the sub-gate electrode 319 is low, the region 318 is equivalent to the offset region 218 of the third embodiment. That is, by controlling the potential of the sub-gate electrode 319, the withstand voltage in the off state can be increased and the decrease in the drain current in the on state can be prevented.

The embodiments described above are all of the planar type M
The present invention relates to OSFETs,
T is not limited to this. That is, the same effect can be obtained even if the present invention is applied to a forward stagger type or reverse stagger type MOSFET.

FIG. 5A is a plan view showing the structure of the fifth embodiment of the present invention, and FIG. 5B is a sectional view taken along the line EE in FIG. 5A. In these figures, the fifth embodiment of the present invention shows an example in which the above-described configuration of the present invention is applied to a staggered MOSFET.

In these figures, the MOSFET according to the fifth embodiment of the present invention uses a thin film semiconductor 420 such as amorphous silicon or polycrystalline silicon on an insulating substrate 410 and concentrically forms the source region 41 from the inside.
1, a channel region 414 and a drain region 412 are formed in this order.

The thin film semiconductor 420 is formed in an island shape in a region indicated by a dotted line on the insulating substrate 410, and an adjacent M (not shown) is formed.
It is separated from a thin film semiconductor of an element such as an OSFET.
The channel region 414 is formed by applying a voltage to the gate electrode 413 through the gate electrode wiring 423 to invert the thin film semiconductor 420 at a position corresponding to the gate electrode 413 via the first interlayer insulating film 416.

Source region 411 and drain region 412
Are directly connected to a source region wiring 421 and a drain electrode wiring 422, respectively.
Each terminal of the FET is connected to the outside. These wirings including the gate electrode wiring 423 are formed so as not to cross each other on a plurality of planes via the first interlayer insulating film 416 as shown in FIG. 5B.

FIG. 6A is a plan view showing the structure of the sixth embodiment of the present invention, and FIG. 6B is a sectional view taken along the line FF of FIG. 6A. In these figures, the sixth embodiment of the present invention shows an example in which the above-described configuration of the present invention is applied to an inverted staggered MOSFET.

In these figures, the MOSFET according to the sixth embodiment of the present invention uses a thin film semiconductor 520 such as amorphous silicon or polycrystalline silicon on an insulating substrate 510 and concentrically forms the source region 51 from the inside.
1, a channel region 514 and a drain region 512 are formed in this order.

The thin film semiconductor 520 is formed in an island shape in a region indicated by a dotted line on the insulating substrate 510, and an adjacent M (not shown) is formed.
It is separated from a thin film semiconductor of an element such as an OSFET.
The channel region 514 is formed by applying a voltage to the gate electrode 513 through the gate electrode wiring 523 to invert the thin film semiconductor 520 at a position corresponding to the gate electrode 13 via the first interlayer insulating film 516.

Source region 511 and drain region 512
Are directly connected to a source region wiring 521 and a drain electrode wiring 522, respectively.
Each terminal of the ET is connected to the outside. Wiring for gate electrode 5
As shown in FIG. 6B,
The first interlayer insulating film 516 is formed so as not to cross each other on a plurality of planes.

In FIGS. 5 and 6, in the fifth embodiment and the sixth embodiment of the present invention, the wiring for the source region and the wiring for the drain region are on the opposite sides of the gate electrode with the interlayer insulating film interposed therebetween. The configuration is the same as that of the embodiment of the present invention shown in FIG.

In the fifth embodiment and the sixth embodiment of the present invention, the source region wiring and the drain region wiring are provided on the opposite side of the gate electrode with the interlayer insulating film interposed therebetween.
The positional relationship between the gate electrodes 413 and 513 and the semiconductor layers 420 and 520 is such that the gate electrodes 413 and 513 are formed on the upper side in FIG. 5 and on the lower side in FIG.

The operation and effect of the MOSFET according to the fifth embodiment and the sixth embodiment of the present invention are the same as those of the MOSFET according to the first embodiment of the present invention. However, in the fifth embodiment and the sixth embodiment of the present invention, the source region wiring and the drain region wiring may intersect the gate electrode with the interlayer insulating film interposed therebetween.

The capacitance thus generated becomes a load, which is disadvantageous for the high-speed operation of the circuit, and is not desirable for the high-speed operation of the circuit. However, if it is desired to positively utilize the capacitance thus generated, a desired capacitance can be formed by adjusting the shape of the region where the wiring crosses and the thickness of the interlayer insulating film. is there.

Next, the drain current when the MOSFET of the present invention is formed in a region having a certain area is considered.
A comparison is made with a general rectangular MOSFET. First, the drain current I in the saturation region of a circular MOSFET
d is given by the following equation as a result of a simple analysis. That is, if Co is the gate capacitance, μ is the carrier mobility, VG is the gate voltage, and VT is the threshold voltage, Id = １ ／ [Co · μ · 2π / ln (b / a)] (VG−VT ) ² ... (2)

Here, when Weq and Leq are defined by the following equations,
The drain current of a circular MOSFET is a general rectangular MO.
It is represented by exactly the same formula as the SFET. That is, Weq = 2π (ba) / ln (b / a) (3) Leq = ba (4), where Weq and Leq are the channel width and channel length of the rectangular MOSFET, respectively. It turns out that it is equivalent to

Second, it is assumed that circular and rectangular MOSFETs having a channel length Leq are formed in a square area of one side b. In the case of a circular MOSFET, the center of the square and the center of the circle are matched to form a MOSFET with a channel width Weq.
One ET can be formed.

On the other hand, in the case of a rectangular MOSFET, b / Leq MOSFETs having a channel width b and a channel length Leq can be formed. Therefore, the sum Wsum of the channel widths when connected in parallel is: Wsum = b · b / Leq = B ² / (b−a) (5)

That is, a circular MOS having a channel length Leq
When the FET and the rectangular MOSFET are formed in a square area of one side b, respectively, the ratio of the drain current of each MOSFET is given by the equations (3) and (5). ^{That, b 2 / (b-a} ) < is the expression 2π (b-a) / ln (b / a) a <b ...... (6) is obtained. Therefore, by selecting a and b so as to satisfy the expression (6), a circular MOSF can be obtained.
More current can be drawn from the ET.

FIG. 7 is a diagram showing a comparison between the first embodiment of the present invention and the current value of a conventional rectangular transistor. In FIG. 7, when a is fixed at 10 μm and b is changed,
6 is a graph showing how both sides of the above equation change.

In this case, the equation (6) holds except for the range where b is very close to a, and also for the range where b is extremely larger than a, although not shown, although not shown. For example, a = 1
At 0 μm, b = 2a, 3a, the drain current of the circular MOSFET is, as shown in FIG.
It is 2.26 times and 2.54 times that of the FET.

As described above, the source regions 11, 111, 2
11, 311, 411, 511 outer periphery and drain region 1
2, 112, 212, 312, 412, and 512 are formed in an arc shape with the same center point, and the source region 1
The radius a of the outer periphery of 1, 111, 211, 311, 411, 511 and the drain region 12, 112, 212, 312,
A relationship of a <b is established between the inner radius 412 and the inner radius b of the gate electrodes 412, 512, and the gate electrode wirings 23, 123, 223, 3
23, 423, 523 and drain region wirings 22, 12
2, 222, 322, 422, 522 and source region wirings 21, 121, 221, 321, 421, 521 are formed on the same plane or on a plurality of planes via an insulating layer so as not to cross each other. By doing so, the drain regions 12, 112, 212, 312, 412, 5
Since the electric field is geometrically relaxed in the inner periphery of 12, there is an effect that the withstand voltage can be sufficiently increased.

Since the wirings connected to the three terminals of the MOSFET are formed on the same plane, no parasitic transistor effect occurs. In addition, since these wirings do not intersect with each other via an insulating layer, dielectric breakdown hardly occurs even when a high voltage is applied.

Further, since the capacitance between these wirings is small, the performance degradation of the electronic circuit constituted by this MOSFET is reduced, and high-speed circuit operation becomes possible. Furthermore, in the MOSFET manufacturing process, the wiring material film forming process and the patterning process are each performed only once, and the manufacturing cost can be reduced.

[0072]

As described above, according to the present invention, the first and second ends formed of a thin film semiconductor on an insulating substrate and formed in an arc shape having the same center point are included. A channel region, a drain region formed by introducing a high-concentration impurity at a first end, a source region formed by introducing a high-concentration impurity at a second end, and an upper portion of the channel region. And a gate electrode formed on one of the lower part with an insulating layer interposed therebetween, wherein the outer peripheral radius of the source region is smaller than the inner peripheral radius of the drain region, and a wiring pattern for the gate electrode and the drain are provided. By configuring the wiring electrode pattern connected to the region and the wiring electrode pattern connected to the source region so as not to intersect each other, a high voltage can be applied without causing deterioration of the transistor due to parasitic capacitance. Also can be made difficult to occur dielectric breakdown, there is an effect that it is possible to sufficiently increase the breakdown voltage.

[Brief description of the drawings]

FIG. 1A is a plan view showing a configuration of a first embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along the line AA of FIG.

2A is a plan view showing a configuration of a second embodiment of the present invention, and FIG. 2B is a cross-sectional view taken along the line BB of FIG.

FIG. 3A is a plan view showing a configuration of a third embodiment of the present invention, and FIG. 3B is a cross-sectional view taken along the line CC of FIG.

FIG. 4A is a plan view showing a configuration of a fourth embodiment of the present invention, and FIG. 4B is a sectional view taken along the line DD in FIG.

5A is a plan view showing a configuration of a fifth embodiment of the present invention, and FIG. 5B is an EE sectional view of FIG.

FIG. 6A is a plan view illustrating a configuration of a sixth embodiment of the present invention, and FIG. 6B is a cross-sectional view of the FF in FIG.

FIG. 7 is a diagram showing a comparison between the first embodiment of the present invention and the current value of a conventional rectangular transistor.

8A is a plan view showing a configuration of a conventional example, and FIG. 8B is a GG sectional view of FIG.

9A is a plan view illustrating a configuration of a conventional example, and FIG. 9B is a cross-sectional view illustrating a configuration of a conventional example.

[Explanation of symbols]

10, 110, 210, 310, 410, 510 Insulating substrate 11, 111, 211, 311, 411, 511 Source region 12, 112, 212, 312, 412, 512 Drain region 13, 113, 213, 313, 413, 513 gate electrode 14, 114, 214, 314, 413, 513 channel region 16, 116, 216, 316, 416, 516 first interlayer insulating film 21, 121, 221 321 421, 521 source region wiring 22, 122, 222, 322, 422, 522 Drain region wiring 23, 123, 223, 323, 423, 523 Gate electrode wiring 31, 131, 231, 331 Source region contact 32, 132, 232, 332 Drain region contact 115 LDD area 218 Offset area Region 317 second interlayer insulating film 319 sub-gate electrode

Claims (8)

(57) [Claims] 1. A channel region including first and second ends formed of a thin film semiconductor on an insulating substrate and formed in an arc shape with the same center point, A drain region formed by introducing a high-concentration impurity, a source region formed by introducing a high-concentration impurity at the second end, and insulation at one of the upper and lower portions of the channel region. A gate electrode formed through a layer, wherein the gate electrode and the wiring pattern for the gate electrode are formed in an Ω shape, and an outer radius of the source region is smaller than an inner radius of the drain region. And wherein the wiring pattern for the gate electrode, the wiring electrode pattern connected to the drain region, and the wiring electrode pattern connected to the source region do not cross each other. Insulated gate field effect transistor to. 2. The wiring pattern for a gate electrode, the electrode pattern for a wiring connected to the drain region, and the electrode pattern for a wiring connected to the source region are the same.
Formed on one plane or on multiple planes through an insulating layer
Insulated gate field effect transistor according to claim 1, characterized in that as that. 3. An arc-shaped region containing an impurity whose concentration is lower than an impurity concentration of said drain region is formed between said drain region and said channel region. The insulated gate field effect transistor according to the above. 4. An arc-shaped region in which the gate electrode does not exist is formed between the drain region and the channel region via one of the insulating layer and the insulating layer. 3. The insulated gate field effect transistor according to claim 1. 5. The method according to claim 1, wherein a second gate electrode is formed on one of an upper portion and a lower portion of the arc-shaped region where the gate electrode does not exist via a second insulating layer thicker than the insulating layer. An insulated gate field effect transistor according to claim 4. 6. A ratio of b ² / (ba) between an outer radius a of the source region and an inner radius b of the drain region.
3. The insulated gate field effect transistor according to claim 1, wherein a relationship of <2.pi. (ba) / ln (b / a) is satisfied. 7. The insulated gate field effect transistor according to claim 1, wherein said gate electrode is a staggered type formed above said drain region and said source region. 8. The insulated gate field effect transistor according to claim 1, wherein said gate electrode is of an inverted stagger type formed under said drain region and said source region.