JP2981875B2 - Coating equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for intermittently discharging a coating liquid from a slit-shaped discharge port toward a running substrate to form a coating film having a predetermined length. It is about.

[0002]

2. Description of the Related Art As a coating apparatus for intermittent coating, a patent application by the present applicant (Japanese Patent Application No. 8-215585) has been filed.
There is an unknown thing concerning. This coating apparatus 1 is similar to that shown in FIG.
As shown in the figure, a slit-shaped discharge port 2 is opened at the end of the coating liquid passage 4 formed inside the die body 3, and a valve body 5 for opening and closing the discharge port 2 is provided outside the die body 3. The opening and closing operation device 6 for moving the valve body 5 from the open position to the closed position is provided outside the die body 3. The discharge port 2 is formed in an elongated slit shape along the transverse direction of the base material W. The opening / closing operation device 6 is attached to the die body 3 via a bracket 7 using an actuator of a pneumatic cylinder or a hydraulic cylinder so that the coating liquid C discharged from the discharge port 2 can be stopped.
a is joined to the valve body 5.

A substrate W to be subjected to intermittent coating is a sheet-like material made of a glass plate or the like conveyed and conveyed by a conveyor 8 or a sheet made of a plastic film or the like guided and rolled by a roll (not shown). There are things.

[0004]

The opening / closing operation device 6 uses an actuator composed of a pneumatic cylinder or a hydraulic cylinder and operates the actuator by fluid control using a control valve. , It takes a long time to move the valve element 5 to a predetermined opening / closing position. Therefore, the conventional coating apparatus 1 cannot respond to a request to open and close the discharge port 2 instantaneously. Further, in the opening / closing operation device 6, when the actuator formed by the pneumatic cylinder or the hydraulic cylinder is stopped, a large impact is generated, and vibration may be generated in the vicinity of the discharge port 2. Therefore, the conventional coating apparatus 1
May not be able to meet the demand for high-precision coating.

In order to solve the above problem, the present invention provides a coating apparatus which can instantaneously open and close a coating liquid passage after a command for opening and closing is issued, and does not generate a large impact at the time of opening and closing. For the purpose of providing.

[0006]

SUMMARY OF THE INVENTION An actuator for opening and closing a coating liquid passage instantaneously without generating a large impact .
In order to eliminate switching errors due to heat generation and changes in outside air temperature
Means adopted by the invention according to claim 1 is that a die body having a slit-shaped discharge port at the end of a wide coating liquid passage, and a movable valve body for opening and closing the coating liquid passage. An actuating device for generating an output displacement for moving said valve element in accordance with a change in supplied electricity.
A controller for outputting to the actuator an amount of electricity required to move and stop the valve element to a predetermined opening and closing state ;
A detector for detecting the position of the valve body, wherein the controller
In a relational expression set in advance between the valve element position and the amount of supplied electricity,
Substituting the valve position obtained by the detection of the detector,
A setting circuit for determining the required amount of supplied electricity is provided.
The moving stroke of the valve that moves to the end point
And set the above relational expression for each section, and move
Each section is decelerated so that the inner valve moves closer to the end point.
Wherein the rate of decrease in the amount of supplied electricity is set . In the present invention, the amount of electric power supplied to the controller for outputting to the actuator is determined in advance so that the output displacement of the actuator required for moving the valve to a predetermined opening / closing position and stopping is obtained. By setting, the valve body can be instantaneously moved to and stopped at a predetermined open / close position by the electric power supplied from the controller to the actuator. Further, according to the present invention, since the amount of change in the supplied electricity and the output displacement of the actuator can be accurately matched, the valve body can be stopped without generating a large impact. In the present invention, the supply
Heat generation of the actuator due to electricity and changes in the outside air temperature
Received, even if an error occurs in the closing position of the valve
To determine the amount of electricity to be supplied in relation to the
The valve body can be stopped at a fixed closed position. Furthermore, the book
In the invention, the moving speed of the valve just before reaching the end point
Can be extremely low speed, so
Eliminates or makes very small impacts
Becomes

[0007] In order to eliminate an opening / closing error due to the heat generated by the actuator, a cooling device for maintaining the actuator at a set temperature may be provided. In this case, even if the actuator generates heat due to supplied electricity, the set temperature is maintained by cooling the cooling device.
The valve and its peripheral devices are not thermally deformed, and the constant correspondence between the supplied amount of electricity and the fine movement stroke is maintained, so that the valve body can always be stopped at a predetermined opening / closing position.

[0008] The means adopted by the invention according to the second aspect of the present invention is such that the opening degree of the discharge port can be changed when the discharge port is opened and closed by the valve element. 2. The control device according to claim 1, wherein the controller is configured to open and close, and the controller can stop a tip of the valve body moving in a direction to open the discharge port at an arbitrary open position that does not fully open the discharge port. Coating device. According to the present invention, the thickness of the coating film can be changed by changing the degree of opening of the discharge port by controlling the stop position of the valve element to be in the open state by the controller.

When the discharge port is opened and closed by a valve body, the means adopted by the invention according to claim 3 is to improve the sealing property of the discharge port and improve the running out of the coating liquid. The controller opens and closes the discharge port, and the controller controls the supply electric quantity so as to stop the tip of the valve body moving in a direction to close the discharge port while being pressed against a valve seat of a die body. 3. The coating apparatus according to claim 1, wherein In the present invention, by controlling the closing position of the valve body with the controller, the tip of the valve body can be brought into close contact with the valve seat to completely close the discharge port.

In order to make the stop position of the valve element accurate, the means adopted by the invention according to claim 4 is the coating apparatus according to claim 1, further comprising a stopper for regulating a moving range of the valve element. According to the present invention, since the moving range of the valve body is regulated by the stopper, the valve body can be stopped at the accurate open / close position.

[0011]

[0012]

In order to make the thickness of the coating film uniform along the running direction of the substrate, the means adopted by the invention according to claim 5 is as follows:
The film thickness measuring device for measuring the thickness of the side edge of the coating film, and the controller, to start the movement, so as to eliminate the deviation between the measured film thickness obtained by the film thickness measuring device and the set film thickness. The coating device according to any one of claims 1 to 4 , further comprising a speed determination circuit that determines a speed of the valve body. In the present invention, the initial speed when the valve element starts moving toward the open position or the closed position is controlled so as not to have a coating thickness deviation. The discharge amount of the coating liquid can be made uniform.

According to a sixth aspect of the present invention, in order to instantly stop the discharge of the coating liquid from the discharge port, the valve element is seated as the valve element moves in the closing direction. The coating apparatus according to any one of claims 1 to 5 , wherein the coating apparatus is disposed so as to increase the volume of the coating liquid passage downstream of the valve seat.

In the present invention, when the valve body is closed to stop the discharge of the coating liquid, the volume of the coating liquid passage leading to the discharge port increases, so that the coating liquid near the discharge port is discharged. The liquid can be sucked up to the inside of the coating liquid passage and the discharge of the coating liquid at the discharge port can be stopped instantaneously.

According to a seventh aspect of the present invention, in order to use an actuator whose output stroke is a slight movement, the opening / closing operation device is configured to enlarge the output of the actuator by increasing the output of the actuator. The coating apparatus according to any one of claims 1 to 6 , further comprising an enlargement mechanism for obtaining an enlargement output stroke for opening and closing. According to the present invention, the valve element can be moved by enlarging the fine movement stroke of the actuator.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A coating apparatus according to the present invention (hereinafter referred to as "the apparatus of the present invention") will be described below based on an embodiment shown in the drawings.

(First Embodiment) FIGS. 1 to 10 show a first embodiment of the apparatus of the present invention. FIG. 1 shows a structure in which a die body and a valve body are arranged along a running direction of a base material. FIG. 2 is a bottom view showing the sectional view taken from arrows A and A in FIG. 1 and omitting a back-up roll, a transfer device and a base material, and FIG. FIG. 4 is an enlarged cross-sectional view of a guide device taken along arrow B in FIG. 2, and FIG. 5 is a coating liquid. FIG. 6 is an enlarged cross-sectional view of a main part of the opening / closing operation device, and FIG. 7 is an enlarged cross-sectional view of a main portion of another embodiment of the opening / closing operation device.

The coating apparatus 11 according to the present embodiment is shown in FIG.
As shown in FIG. 1, a transport device 12 including a belt conveyor or the like forming a substrate transport path R on the upper surface side, a backup roll 13 of the transport device 12, and a die body 14 disposed above the backup roll 13 are provided. ing. Die body 14
Is formed by joining the divided members 21 and 22 and the left and right end plates 23 and 23. The base material transport path is formed at the end of the wide coating liquid passage 15 formed at the joint of the divided members 21 and 22. R to the base material transporting path R
2 extends in the left-right direction (the direction of the arrow F in FIG. 2) which is the transverse direction of FIG. The die body 14 has a valve body 1 which is a shutter for opening and closing the discharge port 16 on the outside of the divided member 22.
7 and an opening / closing operation device 18 for moving the valve body 17 forward and backward. The dividing member 21 may be configured such that the leading edge 21a is a doctor edge that forms a predetermined coating gap with the base material W, or is separated from the coating film A (not shown). The dividing member 21 is formed with a valve seat 21b (see FIG. 3) on which the valve element 17 is seated.

The valve element 17 is slidably brought into contact with the inclined outer side surface 22a of the dividing member 22, and as shown in FIG. , 24. Valve element 17 and split member 22
This means that the coating liquid, which is sealed by the seal member 25 embedded in the divided member 22 and which has entered the gap between the valve element 17 and the divided member 22 from the discharge port 16, is prevented from leaking to the outside.

As shown in FIG. 4, each of the guide devices 24 includes a bracket 27 having an end plate 23 having a height-adjustable screw 26 and a guide plate 29 having a bracket 27 which can be inserted into and removed from the bracket 27 so as to be adjustable. The step 17a of the valve element 17 is slidably guided by a step 29a provided on the side edge of the guide plate 29. The valve element 17 is configured to open and close the discharge port 16 (see FIG. 1) to a closed position (see FIG. 3) where the discharge port 16 is completely closed. You can go back and forth instantly by operation. The opening and closing operation devices 18 are arranged one by one on the left and right, and are attached to the die body 14 via a bracket 40, and the output portion 19 is joined to the valve body 17.
Each of the opening / closing operation devices 18 includes an actuator 41 that instantaneously generates an output displacement that is a fine movement stroke in response to a change in supplied electricity, and an enlarged output stroke for opening and closing the valve body by expanding the fine movement stroke. The actuator includes an enlargement mechanism 42 and a controller 43 for outputting to the actuator 41 the electricity required for moving and stopping the valve element 17 to a predetermined open / close position.

As the actuator 41, as shown in FIG. 6, a magnetostrictive type based on a magnetostriction phenomenon of instantaneously converting electric energy to mechanical energy is selected.
The actuator 41 includes a casing 44, a driving coil 45 built in the casing 44, and permanent magnets 46 and 4.
6, movable yoke 47, damper 48 and magnetostrictive rod 49
And an output shaft 50 for outputting a fine movement stroke for the distortion generated in the magnetostrictive rod 49. Actuator 4
1 receives the supply electricity output from the controller 43 and instantaneously advances or retracts the output shaft 50 by a fine movement stroke in accordance with the supplied electricity amount. In addition,
It is also possible to select the heater 41 (not shown) based on the electrostriction (piezo) phenomenon or the like.

The expansion mechanism 42 utilizes a fluid pressure, and is connected to the casing 44 of the actuator 41 and formed therein so as to communicate a large-diameter fluid chamber 56a and a small-diameter fluid chamber 56b. Casing 56,
A large-diameter piston 57 slidably fitted in the large-diameter fluid chamber 56a and connected to the output shaft 50 of the actuator 41;
A small-diameter piston 58 which is fitted in the small-diameter fluid chamber 56b and has the output portion 19 protruding therefrom; the fluid chamber 56a, 56b between the two pistons 57, 58 is filled with a liquid such as oil or mercury; is there. The enlargement mechanism 42 enlarges the fine movement stroke of the output shaft 50 of the actuator 41 to generate an enlarged output stroke at the output section 19.

When each of the opening / closing operation devices 18 supplies a predetermined amount of forward electricity from the controller 43 to the actuator 41 with the output unit 19 retracted, the actuator 4
The one output shaft 50 instantaneously advances by a fine stroke together with the large-diameter piston 57 of the enlargement mechanism 42, and the small-diameter piston 58 of the enlargement mechanism 42 instantly advances by the enlarged stroke together with the output portion 19. . The opening and closing operation devices 18 and 18 shown in FIG.
9 moves forward by the enlarged stroke, the valve element 17 is advanced to a predetermined closed position, and as shown in FIG.
Is closed by the valve element 17 to immediately stop the discharge of the coating liquid.

Each of the opening / closing operation devices 18 closes the valve body 17 for a set time so that the running base material W forms a non-coating area, and then moves the controller 43 from the controller 43 to the actuator 41 to retract the valve body. When a predetermined amount of electricity is supplied, the actuator 4
The one output shaft 50 instantly retracts by a fine stroke together with the large-diameter piston 57 of the enlargement mechanism 42, and the small-diameter piston 58 of the enlargement mechanism 42 instantly retracts by the enlarged stroke together with the output portion 19. . When the interlocking output units 19, 19 are retracted by the enlarged stroke, the left and right opening / closing devices 18, 18 retract the valve body 17 to a predetermined open position, and open the discharge port 16 as shown in FIG. Discharge of working fluid is restarted instantly.

FIG. 7 shows another type of enlargement mechanism 62 provided in each opening / closing operation device 18. The enlargement mechanism 6
Reference numeral 2 denotes a casing 63 which is joined to the casing 44 of the actuator 41 and has a storage space 63a formed therein, and a bearing 64 which is slidably supported by the casing 63 and has a joint 65 with the output shaft 50 of the actuator 41. , An enlarged lever 68 housed in the storage space 63a and pivotally supported on the casing 63, and an output shaft 69 slidably supported on the casing 63 (opening and closing operation). Which forms the output portion 19 of the device 18), the tip surface 66 a of the input shaft 66 abuts on the original side of the magnifying lever 68, and the tip surface 6 of the output shaft 69.
9a is brought into contact with the end of the magnifying lever 68, and the actuator is actuated.
The fine movement stroke generated on the output shaft 50 of the motor 41 is enlarged to generate an enlarged output stroke on the output shaft 69. The output shaft 69 is fitted with a compression spring 71 so as to be biased in a retreating direction (the direction of arrow G) that presses the distal end surface 69a toward the enlargement lever 68, and the compression spring 7
It is designed to be able to retreat with the repulsive elastic force stored in 1.

In each of the opening / closing operation devices 18 having the above-mentioned enlargement mechanism 62, the output shaft 50 of the actuator 41 is connected to the enlargement mechanism 6
When the output shaft 69 of the enlargement mechanism 62 advances instantaneously by a fine stroke together with the second input shaft 66, the output shaft 69 advances in conjunction with the enlarged stroke to advance the valve body 17 to the closed position. Conversely, each opening / closing operation device 18 is provided with an actuator 41
When the output shaft 50 of the expansion mechanism 62 instantly retracts by the fine movement stroke together with the input shaft 66 of the expansion mechanism 62, the output shaft 69 of the expansion mechanism 62 instantly retracts by the stroke expanded by the repulsive elastic force of the compression spring 71, and the valve element 17 is retracted to the open position.

As shown in FIGS. 1 and 2, the opening / closing operation devices 18, 18 include left and right detectors 73, 73 for detecting the position of the valve element 17, and valves obtained by the detection of the detectors 73, 73. A setting circuit for setting the amount of supplied electricity based on the position of the body 17, and the setting circuit is formed in the controller 43. The setting circuit determines the supplied electric quantity by substituting the valve element position obtained by the detection of the detectors 73 and 73 into a preset relational expression between the position of the valve element 17 that has started moving and the supplied electric quantity. It is like that. The relational expression is directed from the position at which the discharge port 16 is opened to the position at which the discharge port 16 is closed so that the optimal valve body moving operation according to the moving direction of the valve body 17 can be performed in consideration of the hysteresis of the actuator 41 and the like. In some cases, two types of equations may be set, one for the case where the valve element 17 moves from the closed position and the other for the case where the valve element 17 moves from the position where the discharge port 16 is closed to the position where it is opened.

Each of the opening / closing operation devices 18 receives heat of the actuator 41 due to the supplied electric power, changes in the outside air temperature, and the like.
Even if an error occurs in the closing position of the valve element 17, the amount of supplied electricity is determined in relation to the detected valve element position, so that the valve element 17 can be accurately stopped at a predetermined closing position. As shown in FIG. 3, the predetermined closed position refers to a position of the valve element 17 that closes the discharge port 16 and does not allow the coating liquid C to leak out. Refers to a position where the user is seated in a moderately pressed state or approached as much as possible. The detector 73 is appropriately selected from a contact type such as a differential transformer type or a non-contact type such as a capacitance type, and is arranged so as to detect a relative positional relationship between the dividing member 21 and the tip of the valve element 17. I have.

The setting circuit of the controller 43 determines the movement stroke of the valve element 17 from the starting point (open position or closed position) at which the valve element 17 starts moving to the end point (closed position or open position) at which the movement stops. Equally or unequally divided into a plurality of sections, a relational expression between each section and the amount of supplied electricity in the section is set for each section, and the moving valve element 17 is decelerated as it approaches the end point. In some cases, the rate of decrease in the amount of supplied electricity in each section may be set. For example, the setting circuit divides the movement stroke into n as shown in FIGS. 8A and 8B for the closing operation of the valve element 17 and calculates the equations (1) and (2) for the amount of supplied electricity in each section. ),... (N) are set in advance.
Then, as shown in the flow sheet of FIG. 9 showing the control procedure, when the movement start signal is input, the setting circuit detects the supplied electricity amount based on the expression (1) and the detector 73 determines the valve element position L ₁ . outputs to detect, the followed by (2) the supply amount of electricity based on the equation, and outputs to the detector 73 detects the valve position L _2,
Further successively repeated the supply amount of electricity based on the (n) type, and outputs to the detector 73 detects the valve position L _n, when the valve member position L _n which is the end point of the supply amount of electricity I _n the final value The circuit is configured so as to output the output and set the valve body 17 to the closed position.

In the above equation (n), I _(n-1) is the position L
_The power supply amount in _(n-1) , i _cn is the power amount increased per unit time, and t is the elapsed time in each section. By setting i _c1 , i _c2 ,... i _cn to decrease gradually, the moving valve element 17 is decelerated as it approaches the end point, and reaches the end point at which the discharge port 16 is closed. The moving speed of the valve element 17 immediately before is extremely low. Thereby, the valve element 17
The impact during stopping can be eliminated or made very small.

[0032] The setting circuit, as the valve body 17 that has reached the discharge port 16 to close the end point L _n (see FIG. 3) is stopped in a state of being pressed valve body tip dividing member 21, the supplying also be configured to output a slightly larger supply electric quantity from the quantity of electricity I _n. Thereby, the discharge port 16 is
It becomes possible to improve the sealing property and to improve the coating liquid shortage.

The setting circuit of the controller 43 has the same circuit configuration for the opening operation of the valve element 17. In other words, the setting circuit divides the movement stroke into n, and the equations (n), (n−1),. ) Is set in advance. When the setting circuit receives a movement start signal for moving the valve element 17 in the closed position to the open position, the detector 73 detects the amount of supplied electricity based on the expression (n) and the detector 73 determines the valve element position L _(n− Output until ₁₎ is detected, then continue (n-1)
Detector 73 determines the amount of electricity supplied based on the equation
output until detection _(n-2), a further sequential repeated (1) supplying electric quantity based on the equation, and outputs to the detector 73 detects the valve position L _0, which is the end point valve member position L _The circuit is configured so that when it becomes ₀ , the final supply electric amount I ₀ is output and the valve element 17 is set to the open position.

In the equation (n), I _n is the amount of power supplied at the position L _n , i _0n is the amount of power to be reduced per unit time, and t is the elapsed time in each section.

I _0n , i _{0 (n−1)} ,..., I ₀₁ are set so as to gradually decrease, so that the moving valve element 17 is decelerated as it approaches the end point. The moving speed of the valve element 17 immediately before reaching the end point at which the outlet 16 is opened is extremely low. As a result, the valve element 17 can eliminate or greatly reduce the impact at the time of stopping.

When the valve body 17 is opened, the setting circuit of the controller 43 does not retract the valve body 17 to the end position L _O and at any position where the discharge port 16 is not fully opened.
May be configured to output the amount of supplied electricity so as to stop the operation. This makes it possible to change the degree of opening of the discharge port 16 to change the coating thickness. As described above, the setting circuit is configured to make the moving speed of the valve element 17 immediately before reaching the arbitrary stop position of the valve element 17 extremely low.

When the discharge port 16 is opened and closed by the valve element 17, the discharge amount of the coating liquid discharged from the discharge port 16 changes drastically. The thickness of the coating film A applied to the material W changes extremely at each side edge of the coating start end side and the coating end side, and the entire area may not be uniform along the traveling direction of the base material W. . Therefore,
The coating apparatus 11 includes a film thickness measuring device (not shown) for measuring the thickness of the side edge on the coating start side and / or the side edge on the coating end side of the coating film A. And a speed determining circuit for determining an initial speed of the valve element 17 which starts moving in the closing direction or the opening direction so as to eliminate a deviation between the measured film thickness obtained by the film thickness measuring device and the set film thickness. Sometimes. In this case, the coating device 11 controls the initial speed when the valve element 17 starts moving toward the open position or the closed position so that there is no coating thickness deviation. The discharge amount of the coating liquid immediately before the stop can be made uniform, and can be made uniform over the entire thickness of the coating film A.

As shown in FIG. 6, the actuator 41 is provided with a cooling device 51 for maintaining a set temperature. The cooling device 51 is provided with a cooling tool 52 disposed at an appropriate place inside or outside the casing 44, a temperature detector 53 built in the casing 44, and cooling based on a temperature difference between a detected temperature of the temperature detector 53 and a set temperature. And a temperature controller 54 for performing feedback control of the tool 52. Cooling tool 5
For 2, a pipe-shaped heat exchanger that allows a refrigerant such as a gas, a liquid, or a gas-liquid mixture to pass, or a cooling device that uses the Peltier effect is selected. The temperature controller 54 adjusts the refrigerant temperature in the case of the cooling tool 52 that allows the refrigerant to pass therethrough, and adjusts the amount of supplied electricity in the case of the cooling tool 52 applying the Peltier effect,
The actuator 41 maintains the set temperature. As a result, the coating device 11 is actuated by the actuator 41.
The valve body 17 can be always stopped at a predetermined opening / closing position while maintaining a constant correspondence between the supplied amount of electricity and the fine movement stroke without causing thermal deformation of the device and its peripheral devices.

As shown in FIG. 1, the coating liquid passage 15 has a primary manifold 15a on the upstream side and a secondary manifold 15b on the downstream side. As shown in FIG. 5, both ends of the downstream secondary manifold 15b communicate with the drain passages 31, 31 formed in the end plates 23, 23. The coating liquid supply device 32 joins the supply pipe 33 to the primary manifold 15a, and connects the reflux pipe 34 to the drain passage 31,
31. The supply pipe 33 is provided with a coating liquid tank 35.
And a liquid feed pump 36 and a flow rate control valve 37 are provided on the way. The reflux pipe 34 is provided with flow control valves 38, 38 in the middle thereof, and the end thereof is joined to the coating liquid tank 35.

Next, the coating operation of the coating apparatus 11 according to the present embodiment will be described. The die body 14 has the valve body 17 advanced to the closed position (see FIG. 3), the discharge port 16 is closed, and the die body 14 is kept on standby. Next, when the traveling base material W reaches a predetermined coating start position, the opening / closing operation device 18
Is actuated to instantaneously retract the valve element 17 to the open position (see FIG. 1), discharge the coating liquid from the discharge port 16, and form a coating film A on the base material W. Finally, when the traveling base material W reaches a predetermined coating end position, the opening / closing operation device 18
Is actuated to instantaneously advance the valve element 17 to the closed position E (see FIG. 3), and immediately stop the discharge of the coating liquid from the discharge port 16.

Confirmation that one base material W formed in a predetermined size has reached a predetermined coating start position or a coating end position is determined by a sensor (not shown) arranged in the vicinity of the transfer device 12 or the like. Do with. Actuator 41 of opening / closing operation device 18
Is performed based on a detection signal generated by the sensor or the like.

As described above, since the coating device 11 moves the valve element 17 forward and backward by the predetermined stroke by the opening and closing operation device 18 to open and close the discharge port 16 instantaneously and without generating a large impact, The film thickness of the film A can be formed uniformly from the start end to the end. Further, the coating device 11
Since the change amount of the supplied electricity and the output displacement of the actuator can be made to correspond accurately, the valve element 17 can be stopped at the open / close position without generating a large impact which lowers the coating accuracy. And high precision intermittent coating becomes possible. Further, the coating device 11 includes a manifold 15
Since a part of the coating liquid is discharged from both ends of b to the drain paths 31, a larger amount of coating liquid can be supplied to the manifold 15 b than when there is no drain path 31. . As a result, the coating apparatus 11 can reduce pressure fluctuation of the coating liquid existing from the manifold 15b of the coating liquid passage 15 to the discharge port 16 even when the valve 17 is opened and closed. The coating liquid is uniformly discharged from the start to the end of the coating, so that the thickness of the coating film A can be made uniform.

The coating device 11 includes an actuator 41 provided in an opening / closing device 18 for opening and closing the valve element 17.
As the basic principle of magnetostriction, which converts electrical energy into mechanical energy instantaneously, but is not limited to this, and the output displacement corresponding to changes in supplied electricity is selected. It is also possible to select a step motor type, a linear motor type, or the like capable of generating (output stroke) and control the controller 43. If the actuator 41 having a large output displacement is selected, the enlargement mechanism 42 can be omitted.

(Second Embodiment) FIG. 11 shows a second embodiment of the apparatus of the present invention, in which the valve body is retracted to the open position and the coating liquid is discharged from the discharge port. FIG. 3 is a side view in which a main part in a state of being in cross section is cut.

A different point of the coating apparatus 81 according to the present embodiment from the first embodiment is that the base material transport path R is formed on the surface 82a of the back-up roll 82 driven by forcible rotation to form a continuous sheet. That is, the intermittent coating is performed on the substrate W in the shape of a circle. Other than this configuration, it is substantially the same as the first embodiment, and the same reference numerals indicate the same components. B is a non-coating area formed between the adjacent coating films A, A.

(Third Embodiment) FIGS. 12 to 16 show a third embodiment of the device of the present invention.
2 is a left side view showing the whole of the coating equipment provided with the apparatus of the present invention, FIG. 13 is a left side view showing an enlarged cross section of a main part of the apparatus of the present invention, and FIG. FIG. 15 is a cross-sectional view, FIG. 15 is a left side view showing a further enlarged cross section of a main part in a state where the discharge of the coating liquid is stopped, and FIG.

As shown in FIG. 12, the coating apparatus 91 of the present invention is disposed above a transfer device 92 for transferring a substrate W to be coated, and constitutes a coating facility together with the transfer device 92. The transport device 92 includes a holding tool 93 for holding the base material W flat, and a guide tool 9 for guiding the holding tool 93 to be able to move back and forth.
4 and a drive device (not shown) for driving the holder 93 back and forth so that the base material W passes through a coating position below the coating device 91. The holding tool 93 has a plurality of suction ports opened on the upper surface, and is configured to detachably suck and hold a substrate W made of a glass plate, a thick film sheet, or the like. The coating device 91 is supported by a support frame 95, and is advanced (removed) by a lifting operation tool 96 from a lower coating position to an upper standby position.

As shown in FIGS. 13 and 14, the coating apparatus 91 includes a die body 97, a movable valve body 98 which can be moved forward and backward in the die body 97, and left and right opening and closing operations for moving the valve body 98 forward and backward. Devices 99, 99. Die body 9
Reference numeral 7 denotes a plurality of blocks 100, 101, and 102, which are overlapped and bolted 105, and bolted
06, 106... (See FIGS. 12 and 14)
4 and 104, and a coating liquid passage 103 is formed therein. The coating liquid passage 103 is connected to the blocks 101, 1
No. 02 and the block 100, 102 are formed so as to be wider in the left-right direction (the direction crossing the base material W). An elongated slit-shaped discharge port 103a provided over the entire width at the end of the coating liquid passage 103.
Are two lip members 107,
108. Two lip members 107,
108 is formed integrally with the block 100 or 102, or is formed separately (not shown) and
It may be possible to replace it by attaching it to 0 or 102 with a bolt or the like. The two lip members 107 and 108 are formed such that the tips thereof are formed at an acute one-sided inclined state so that the liquid can be easily drained, and the coating liquid does not adhere to the tip of the inclined outer surface. The block 100 has a concave groove 109 on the front side near the lower end.
Are extended in the left-right direction, a plurality of lip opening adjustment bolts 133 penetrating the concave groove 109 are arranged, and each of the bolts 133 is pushed and pulled to adjust the discharge port 103a.
(The opening of the lip, which is the gap between the lip members 107 and 108) can be adjusted over the entire width in the left-right direction. In addition, the bolt 133 may be disposed so as to be movable in the left-right direction (see Japanese Patent Application Laid-Open No. H08-215631).

The valve body 98 is formed so as to extend over the entire width of the coating liquid passage 103 in the width direction. The valve body 98 is disposed between the blocks 101 and 102, and is provided in a concave groove 102a provided in the block 102. The end side is slidably fitted.
The valve body 98 is provided with the seal members 130, 130 in the entire left and right widths so that the coating liquid C does not leak from between the groove 102a. The valve body 98 includes two connecting shafts 1 from the rear end side.
10, 110 are extended in parallel so that each connecting shaft 110 passes through two through holes 102b, 102b provided in the block 102. The block 102 is provided in each through hole 1.
The connecting shaft 110 is pivotally supported via a bearing 111 fitted to the valve 02b, and the valve body 98 is movably guided in the direction of the arrow H, which is the advance / retreat direction. The valve body 98 is connected to the die body 9.
The coating liquid passage 103 is formed between the fixing portion 7 (blocks 100 and 101). The valve element 98 is
In the middle of the area where the coating liquid passage 103 is formed, the valve portion 98a is provided.
And a volume adjusting surface 98b extending over the entire area of the coating liquid passage 103 in the left-right width direction is formed so as to intersect with the valve body moving direction (the arrow H direction). Volume adjustment surface 98b
As the valve element 98 moves in the arrow J direction, which is the seating direction (valve closing direction), the valve element 98 separates from the coating liquid passage forming surface 100a of the facing die body 97 and is downstream from the valve seat 112. In contrast, the volume of the coating liquid passage 103 on the side is increased, and conversely, as the valve element 98 moves in the arrow K direction which is the unseating direction (valve opening direction), the coating liquid passage forming surface 100a Approaching
The volume of the coating liquid passage 103 downstream of the valve seat 112 is reduced.

The fixing portion of the die body 97 (block 10)
In 1), a valve seat 112 is provided in a portion facing the coating liquid passage 103 over the entire left and right width of the coating liquid passage 103, and the valve portion 98a of the valve body 98 is detached and seated. Valve 9
Reference numeral 8 denotes a valve seat from which the valve portion 98a is separated from the valve seat 112 to open the coating liquid passage 103 (see FIG. 13).
The opening / closing operation device 99 allows the valve 98a to quickly move back and forth until the valve closing position (see FIG. 15) at which the valve portion 98a is seated and closes the coating liquid passage 103 in FIG. The valve element 98 is
As it retreats from the valve-opening stop position to the valve-closing stop position in the direction of the arrow J, the block 100 forming the coating liquid passage 103 is separated from the upstanding coating liquid passage forming surface 100a of the block 100. The volume adjustment surface 98b is retracted, and the valve seat 112
The volume of the coating liquid passage 103c on the further downstream side is increased. As shown in FIG. 15, the valve seat 112 and the valve portion 98a of the valve body 98 are configured so that both seating surface portions can slide in close contact with each other. Arrow J in the same direction as the direction in which the valve element 98 closes)
In the direction of the coating liquid.
The amount of increase in volume of 03c can be adjusted.

As shown in FIGS. 13 and 14, each of the opening / closing operation devices 99 stops the actuator 113 in which the output shaft 113a is connected to the connecting shaft 110 extending from the valve body 98, and the valve body 98 at a set position. Stop position adjusting device 114
And The stop position adjusting device 114 is a stopper 1 for changing a valve opening stop position of the advancing valve body 98.
15, a stop 116 for changing the valve closing stop position of the retreating valve element 98, and these stops 115, 1
16 and a stopper 117 for supporting the stopper 11
5 and 116 are individually provided. These stoppers 115 and 116 are arranged so as to penetrate the through-holes 119 provided in the connecting shaft 110, and the contact portions 1 formed in the through-holes 119 of the connecting shaft 110.
19a and 119b. The actuator 113 is a giant magnetostrictive type that instantaneously generates an output stroke that is an output displacement in response to a change in supplied electricity;
A step motor type or a linear motor type is used. A servomotor of a step motor type or the like is used as the advance / retreat operating tool 118. The support portion 117 is attached and fixed to the die body 97 with bolts or the like.

When the connecting shaft 110 retreats in the direction of the arrow J (the direction in which the valve body 98 is closed) by the actuator 113, the stop position adjusting device 114 comes into contact with the stop part 116.
When the connecting shaft 110 moves forward in the arrow K direction (the valve opening direction of the valve element 98) by the actuator 113, the stop part 1 contacts the stop part 115.
19a abuts and stops the advancement of the valve body 98. The stopper 115 has a cotter type in which the contact surface of the contact portion 119a is inclined, and moves forward and backward in the arrow M direction perpendicular to the arrow H direction which is the direction in which the valve element 98 moves forward and backward.
The position of the contact portion 119a to be contacted is changed by adjusting the movement of the valve member 98 to adjust the forward stop position of the valve element 98. Similarly, the stopper 116 is provided in the contact portion 1
The contacting surface of the contacting portion 119b is changed by adjusting the movement of the contacting portion 119b in the direction of the arrow M by adjusting the movement of the contacting portion 119b in the arrow M direction.
The retraction stop position of the valve body 98 is adjusted. The center of the contact portions 119a and 119b is
0 and are located on each center line of the output shaft 113a,
When contacting each stop 115 or 116, bending moment is not generated on the center line. The stop position adjusting device 114 can stop the valve element 98 without causing the connecting shaft 110 to generate a bending momentum that causes the rattling that lowers the accuracy, thereby improving the stopping accuracy. Although illustration of the stoppers 115 and 116 is omitted, the contact portions 1
It is also possible to select a screw type in which the contact surfaces of 19a and 119b are screw tip surfaces.

Although not shown, the stop position adjusting device 114 is provided with a detector for detecting the stop position of the valve element 98, and a stopper 115 or a stopper 115 for eliminating the deviation between the detection position of the detector and the set position. An operating tool 118 for automatically moving 116 in the direction of arrow M may be provided. Operation tool 11
8 is the movement amount of the valve body 98 and the stopper 115 or 116
Is determined in advance, and based on this relationship, the stopper 1 is moved by an amount necessary to eliminate the deviation amount.
15 or 116 may be moved. The detector is arranged between any one of the valve element 98, the connecting shaft 110, or the output shaft 113a and the support portion 117, and detects the valve opening stop position and the valve closing stop position of the valve element 98. The coating apparatus 91 having such a stop position adjusting device 114 can automatically correct the stop error of the valve element 98, and therefore, can increase the accuracy of the stop position of the valve element 98 and apply a coating film C described later. Can be improved in film thickness accuracy. In addition,
The stop position adjusting device 114 may be configured to detect only the valve opening stop position of the advancing valve body 98 and move the stopper 115 with the advance / retreat operating tool 118 according to the coating liquid or the conditions of the coating. It is also possible to detect the valve closing position of the retreating valve body 98 only and move the stopper 116 with the reciprocating operation tool 118.

Each of the opening / closing operation devices 99 includes a controller 43 for outputting to the actuator 113 a supply amount of electricity necessary for moving / stopping the valve body 98 to a predetermined opening / closing position, and a valve body 9.
And a setting circuit for setting the amount of supplied electricity based on the position of the valve element 98 obtained by the detection of the detector. It is. As in the first embodiment, the setting circuit of the controller 43 operates between the starting point (open position or closed position) at which the valve element 98 starts moving and the end point (closed position or open position) at which the valve element 98 stops moving. The moving stroke of the valve element 98 is equally or unequally divided into a plurality of sections, and a relational expression between each section and the amount of supplied electricity in the section is set for each section, so that the moving valve element 98 approaches the end point. The rate of decrease in the amount of supplied electricity in each section is set so that the contact portion 119a or 119
When b is brought into contact with the stopper 115 or 116, a large impact is not generated.

When the coating liquid passage 103 is opened and closed by the valve element 98, the discharge amount of the coating liquid discharged from the discharge port 103a changes drastically, and the coating apparatus 91 runs at a constant speed. The thickness of the coating film A applied to the base material W to be applied changes extremely at each side edge on the coating start end side and the coating end side, and the entire area is not uniform along the running direction of the base material W. There is. Therefore, the coating apparatus 91 includes a film thickness measuring device (not shown) for measuring the thickness of the side edge on the coating start side and / or the side edge on the coating end side of the coating film A, and the controller 43, a speed determining circuit for determining an initial speed of the valve element 98 to start moving in the closing direction or the opening direction so as to eliminate the deviation between the measured film thickness obtained by the film thickness measuring device and the set film thickness. We may prepare. The coating device 91 in this case sets the initial speed when the valve body 98 starts moving toward the open position or the closed position,
By controlling such that there is no deviation in the coating thickness, the discharge amount of the coating liquid immediately after the start of the coating and immediately before the stop of the coating can be made uniform, and can be made uniform over the entire thickness of the coating film A. .

As shown in FIG. 15, the coating liquid passage 103 is provided with a stepped throttle portion 120 over the entire width on the downstream side of the valve element 98, and the coating liquid C is discharged from the discharge port 103a. The flow rate is adjusted. The step forming the narrowed portion 120 is provided on one or both of the block 102 and the block 100 which are the fixing portion of the die body 97. When provided in the block 102, the valve body 98
A step portion is formed on the coating liquid passage forming surface 102d intersecting with the arrow H direction which is the direction of the forward / backward movement. When provided in the block 100, a step is formed on the coating liquid passage forming surface 100a which intersects the arrow H direction which is the direction of movement of the valve element 98.
The position of the throttle portion 120 is set to be downstream of the liquid surface Ca formed by the coating liquid C sucked into the coating liquid passage 103c with the valve closing operation of the valve element 98. As a result, the coating liquid C remaining in the coating liquid passage 103 due to the stoppage of the coating increases when the volume of the downstream coating liquid passage 103c increases with the retreat of the valve element 98 (valve closing operation). When the liquid surface Ca at the lower end moves upward (toward the back side) from the throttle portion 120, and conversely, when the valve is opened by rapid advance of the valve body 98 and coating is resumed, it flows toward the discharge port 103a. Occasionally, the squeezing unit 120 restricts the rapid movement of the squeezed portion 120, so that the squirt can be discharged at a substantially constant flow rate without rapidly discharging from the discharge port 103a. The valve body 98 stops moving forward except for the front edge 102c-1 so that the front edge 102c-1 of the guide surface 102c of the block 102 for guiding the valve 98 forms a stepped portion of the throttle 120. It is also possible to make adjustments. The adjustment of the advance stop position of the valve element 98 can be performed by the stop position adjusting device 114 (see FIG. 13).

The die body 97 is connected to the blocks 100, 1
As shown in FIG. 14, a seal plate 129 is interposed between each of the side valves 104 and the movable valve element 98 and the movable valve element 98, and the coating liquid C leaks from both left and right sides of the coating liquid passage 103. I try not to.

As shown in FIGS. 13 and 16, the coating liquid passage 103 has a manifold 103b extending over the entire width at an appropriate position upstream of the valve seat 112. As shown in FIG. 16, both ends of the manifold 103 b communicate with drainage channels 121, 121 formed in the side plates 104, 104. The die body 97 connects the supply pipe 33 of the coating liquid supply device 32 to the manifold 103b, and connects the reflux pipe 34 of the coating liquid supply device 32 to the drain passage 12.
1,121. The supply pipe 33 extends from the coating liquid tank 35, and is provided with a liquid feed pump 36 and a flow control valve 37 in the middle thereof. The reflux pipe 34 is provided with flow control valves 38, 38 in the middle thereof,
It is joined to.

The coating apparatus 91 discharges a part of the coating liquid from both ends of the manifold 103b to the drainage paths 121, 121, so that a larger amount of coating liquid is applied to the manifold 103b than when there is no drainage path 121, 121. A working liquid can be supplied. As a result, even if the valve element 98 is opened and closed, the coating device 91 can operate the manifold 103 b of the coating liquid passage 103.
And the pressure fluctuation of the coating liquid existing from the discharge port 103a to the discharge port 103a can be reduced, and the coating liquid can be discharged uniformly from the start to the stop of the coating to make the thickness of the coating film C uniform. it can.

Next, the coating operation of the coating apparatus 91 according to the present embodiment will be described. The die body 97 has the valve body 98 retracted to the valve closing stop position (see FIG. 15), and the discharge port 1
03a is kept on standby so that the coating liquid C is not discharged.
Next, when the base material W conveyed by the conveyance device 92 reaches a predetermined coating start position, the opening / closing operation device 99 is operated to quickly move the valve body 98 to the valve opening stop position (see FIG. 13). The coating liquid C is discharged from the discharge port 103a to form a coating film A on the substrate W being conveyed. At the time of this valve opening operation, the volume of the coating liquid passage 103c downstream of the valve seat 112 is rapidly reduced due to the rapid advance of the valve body 98, so that the coating liquid C is supplied to the coating liquid passage 103c. Discharge port 103a from inside
To move rapidly toward the
The rapid movement is suppressed by the resistance when passing through, and the coating liquid C is discharged at a constant flow rate from the discharge port 103a.

Subsequently, when the conveyed base material W reaches a predetermined coating end position, the opening / closing operation device 99 is actuated to quickly move the valve body 98 to the valve closing stop position (see FIG. 15). Retreat so as not to cause a large impact, and discharge port 1
The discharge of the coating liquid C from 03a is stopped. At the time of this retreat, the coating liquid passage 103c downstream of the valve seat 112
Of the discharge port 103a
The vicinity of the coating liquid 103c is moved to the inner side of the coating liquid passage 103c, so that the discharge of the coating liquid can be instantaneously stopped and the liquid can be surely drained.

The reason why the coating liquid near the discharge port 103a is sucked is as follows. In the valve closing operation, the valve section 9
8a approaches the valve seat 112, the valve portion 98a and the valve seat 1
12, the passage resistance becomes very large, and the passage 103 for coating liquid is substantially closed. From the state where the passage resistance is large, the valve portion 98a is further closed. Before moving toward the seating position and seating, the coating liquid passage 103 is substantially closed and the volume of the coating liquid passage 103c downstream of the valve seat 112 is increased. This is because the pressure of the coating liquid around 103a is reduced.

As shown in FIG. 15, when the valve body 98 can be further retracted in the direction of the arrow J while maintaining the seated state, the valve seat 112 is closed when the coating liquid passage 103 is completely closed. By further increasing the volume of the coating liquid passage 103c on the downstream side, the coating liquid near the discharge port can be reliably drained.

As described above, the coating device 91 moves the valve element 98 quickly and reciprocally by the opening / closing operation devices 99, 99 without generating a large impact, thereby causing the coating liquid passage 103 to move.
The coating liquid C is discharged at a constant flow rate from the discharge port 103a at the time of the valve opening operation.
At the time of the valve closing operation, the coating liquid near the discharge port 103a is sucked into the coating liquid passage 103 to reliably drain the liquid. It is possible to form a coating film A having a uniform thickness up to this point. Further, since the coating apparatus 91 opens and closes the coating liquid passage 103 and increases the volume of the coating liquid passage 103c on the downstream side with a single valve element 98, the structure is simpler than in the past, and handling is simplified. It will be easy.

The coating device 91 changes the valve-opening stop position of the valve element 98 by the stop position adjusting device 114 so that the coating liquid passage 103 formed by the valve element 98 in the closed state.
The thickness of the coating film A can be finely adjusted by changing the gap size of c. Further, the coating device 91 changes the valve closing stop position of the valve element 98 by the stop position adjusting device 114, and adjusts the volume increase amount of the coating liquid passage 103c when the valve is closed according to the characteristics of the coating liquid C. The outlet 103
The coating liquid in the vicinity of “a” can be surely sucked up to the inside of the reduced-pressure coating liquid passage 103c, and the discharge of the coating liquid at the discharge port 103a can be reliably stopped.

(Fourth Embodiment) FIG. 17 shows a fourth embodiment of the apparatus of the present invention, and is an enlarged sectional left side view of a main part in a state where the discharge of the coating liquid is stopped. is there. This embodiment is different from the third embodiment in that a sealing member 131 molded from an elastic material such as rubber is attached to a valve portion 98a of a valve body 98. Other than this configuration, it is substantially the same as the third embodiment, and the same reference numerals denote the same components.

In the present embodiment, the valve portion 98a immediately after sitting on the valve seat 112 is further moved in the seating direction (arrow J direction) while compressively deforming the sealing material 131 made of an elastic material. Thus, in a state where the coating liquid passage 103 is completely closed, the volume of the coating liquid passage 103c downstream of the valve seat 112 is increased to thereby increase the discharge port 1.
The coating liquid near 03a can be reliably drained by reducing the pressure. In the present embodiment, a stop position adjusting device 1 for changing a valve opening stop position and a valve closing stop position of the valve element 98 is described.
14 (see FIG. 13).

The place where the sealing material 131 formed of an elastic material such as rubber is mounted is not limited to the valve portion 98a of the valve body 98, and although not shown, the valve seat 112 is not shown.
To form a seating surface with the sealing material 131,
It is also possible to mount on both the valve part 98a and the valve seat 112 and form both seating surfaces with a sealing material.

(Fifth Embodiment) FIG. 18 shows a fifth embodiment of the apparatus of the present invention, and is an enlarged left side view of a main part in a state where the discharge of the coating liquid is stopped. is there. This embodiment is significantly different from the third embodiment in that a step portion 98a-1 forming a valve portion 98a of a valve body 98 is brought into liquid-tight contact with a step portion 112a forming a valve seat 112. That is, the valve was closed. Other than this configuration, it is substantially the same as the third embodiment, and the same reference numerals denote the same components. In this embodiment, the valve body 98
Stop Position Adjusting Device 1 for Changing Valve Opening Stop Position
14 (see FIG. 13).

(Sixth Embodiment) FIGS. 19 and 20 show a sixth embodiment of the apparatus of the present invention.
9 is a left side view showing an enlarged cross section of a main part, and FIG. 20 is a left side view showing a further enlarged main section. The difference between the coating apparatus 141 of the present embodiment and the third embodiment is that the distal end 148b of the movable valve element 148 has a discharge port 103a.
Is formed. Other than this configuration, it is substantially the same as the third embodiment, and the same reference numerals denote the same components.

The valve element 148 has a valve portion 148a which is separated from and seated on the valve seat 112. The valve element 148 has a coating liquid passage forming surface (volume adjusting surface) 148c that forms a portion of the coating liquid passage 103c downstream of the valve seat 112 whose volume increases with the valve closing operation of the valve element 148 (volume adjusting surface) 148c ( A throttle portion 120 formed of a step portion is provided on a surface intersecting the arrow H direction that is the direction in which the valve element 148 moves forward and backward. The position of the throttle section 120 is
8, the coating liquid C sucked into the coating liquid passage 103c in accordance with the valve closing operation is located downstream of the liquid surface Ca formed by the coating liquid C. The step forming the narrowed portion 120 may be provided on the coating liquid passage forming surface 100a of the block 100, which is the fixing portion of the die body 97, or may be provided on both the block 100 and the valve element 148.

The coating device 141 is provided with a stop position adjusting device 114 for changing the valve opening stop position and the valve closing stop position of the valve element 148, and the coating liquid formed by the valve element 148 in the closed state. The thickness of the coating film A can be changed by changing each dimension of the gap between the use passage 103c and the discharge port 103a.

(Seventh Embodiment) FIG. 21 shows a seventh embodiment of the apparatus of the present invention, and is a left side view showing the entire coating equipment provided with the apparatus of the present invention. This embodiment is different from the third or sixth embodiment in that the transport device 132 is formed by a back-up roll,
That is, the coating device 91 (or 141) is arranged above the second. Except for this configuration, it is substantially the same as the third or sixth embodiment, and the same reference numerals indicate the same components.

Transfer device 13 consisting of a back-up roll
2 can convey a continuous sheet-like substrate W, and the coating apparatus 91 forms the coating films A, A... It can be applied intermittently.

(Other Embodiments) The transport device for transporting the base material is not limited to the above-described embodiment.
It may be a belt conveyor, an endless steal belt conveyor, or the like. Coating device 91 (or 141)
In addition to disposing the coating liquid on the side of the transport device, the coating liquid can be discharged from the discharge port 103a toward the base material W in a horizontal state or an inclined state in addition to being disposed above the transport device. By disposing the coating liquid below the apparatus, the coating liquid can be discharged upward from the discharge port 103a.

The coating apparatus 91 (or 14
When performing the coating in 1), it is possible to perform the intermittent coating by stopping the substrate W and running the coating device 91.

[0077]

According to the first aspect of the present invention, there is provided a coating apparatus comprising:
It is possible to open and close the coating solution passage instantaneously, it is possible to uniform the film thickness of the coating film from the beginning to the end, rather than cause a large impact caused by the opening and closing of the valve body, also the valve body
Eliminate or minimize shocks that occur when stopping
Since it is Rukoto can intermittent coating precision, further temperature
Even if the degree changes, there will be no error in the valve closing position.
The liquid can be drained reliably, reducing the thickness of the coating film.
It can be uniform from the beginning to the end. According to the second aspect of the present invention, since the coating thickness can be changed by changing the degree of opening of the discharge port, it is possible to cope with various coating conditions.

According to the third aspect of the present invention, since the sealing property of the discharge port can be improved to improve the coating liquid shortage, the coating can be performed with high precision. According to the invention described in claim 4, since the stop position of the valve element is made accurate, high-precision coating can be performed.

[0079]

According to the fifth aspect of the present invention, since the discharge amount of the coating liquid can be made uniform immediately after the start of coating and immediately before the stop of coating, the thickness of the coating film can be made uniform from the beginning to the end. . In the coating apparatus according to the sixth aspect of the present invention, when the discharge of the coating liquid is stopped by closing the valve body, the coating liquid near the discharge port is sucked up to the inside of the coating liquid passage to form the coating liquid. Discharge can be instantaneously stopped. The coating apparatus according to the seventh aspect of the present invention can use an actuator whose output stroke is fine.

[Brief description of the drawings]

FIG. 1 shows a first embodiment of the present invention, and is a side view in which a die body and a valve body are sectioned along a transport direction of a base material.

FIG. 2 is a bottom view as viewed from arrows A and A in FIG. 1 and omitting a back-up roll, a conveying device, and a base material.

FIG. 3 is an enlarged cross-sectional side view of the same embodiment, showing a main part in a state in which the discharge of the coating liquid is stopped by advancing a valve body to a closed position.

FIG. 4 is an enlarged cross-sectional view of the guide device taken along the arrow B in FIG. 2;

FIG. 5 shows the same embodiment and is a flow sheet of a coating liquid pipe.

FIG. 6 shows the same embodiment, and is an enlarged sectional view of a main part of the opening / closing operation device.

FIG. 7 shows the embodiment, and is a partial cross-sectional view in which main parts of an opening / closing operation device of another aspect are enlarged.

8A and 8B show a case where a moving stroke of a valve body is divided into n pieces and a valve body is moved from an open position to a closed position, and FIG. 8A shows a relationship between the valve body position and the amount of supplied electricity. (B) is a graph showing the relationship between the movement elapsed time and the valve body position.

FIG. 9 is a flow sheet showing a control procedure when the valve body is moved from the open position to the closed position.

FIG. 10 is a flow sheet showing a control procedure when the valve body is moved from the closed position to the open position.

FIG. 11 shows a second embodiment of the device of the present invention, and is an enlarged cross-sectional side view of a main part in a state in which a valve body is retracted to an open position and a coating liquid is discharged from a discharge port. It is.

FIG. 12 shows the third embodiment of the present invention, and is a left side view showing the entirety of a coating facility provided with the present invention.

13 shows the same embodiment, and is an enlarged left side view of a main part of the device of the present invention. FIG.

FIG. 14 is a cross-sectional view along the line C-A in FIG.

FIG. 15 shows the same embodiment, and is a left side view in which a main part in a state where the discharge of the coating liquid is stopped is further enlarged in cross section.

FIG. 16 shows the same embodiment, and is a flow sheet showing piping for a coating liquid.

FIG. 17 is a left side view showing a fourth embodiment of the device of the present invention, and is an enlarged cross-sectional view of a main part in a state where the discharge of the coating liquid is stopped.

FIG. 18 is a left side view showing a fifth embodiment of the device of the present invention and is an enlarged cross-sectional view of a main part in a state where the discharge of the coating liquid is stopped.

FIG. 19 shows the sixth embodiment of the present invention, and is a left side view in which main parts are enlarged in cross section.

20 shows the same embodiment, and is a left side view in which a main part in a state where the discharge of the coating liquid is stopped is further enlarged in cross section. FIG.

FIG. 21 shows a seventh embodiment of the present invention, and is a left side view showing the entirety of a coating facility provided with the present invention.

FIG. 22 shows a conventional coating apparatus, and is a side view in an open state showing an enlarged cross section of a main part.

[Explanation of symbols]

15 (103): passage for coating liquid, 14: die body, 16
... Slit-shaped discharge port, 17 (98) ... Valve, 41 (11)
3) Actuator, 42 Magnifying mechanism, 43 Controller, 73 Detector

Continuation of the front page (56) References JP-A-58-58174 (JP, A) JP-A-8-257467 (JP, A) JP-A-9-103729 (JP, A) JP-A-9-314016 (JP) , A) European Patent Application Publication 761877 (EP, A1) (58) Fields investigated (Int. Cl. ⁶ , DB name) B05C 5/02 B05C 11/10 B05B 1/04 B05D 1/26

Claims (7)

(57) [Claims] 1. A coating apparatus comprising: a die body having a slit-shaped discharge port at the end of a wide coating liquid passage; and a retractable valve body for opening and closing the coating liquid passage. An actuator for generating an output displacement for moving the valve element in accordance with a change in the supplied electricity, and an actuator for supplying and supplying the amount of electricity required for moving and stopping the valve element to a predetermined opening and closing state.
And a detection device for detecting the position of the valve element.
And a controller, wherein the controller determines the position of the valve body and the amount of supplied electricity.
The valve position obtained by the detection of the detector in relation to a preset relational expression
To determine the amount of supply electricity required for valve body movement by substituting
A valve body having a circuit and moving from the starting point toward the end point;
Is divided into a plurality of sections, and the relational expression is
Set for each section, and decrease as the moving valve approaches the end point.
The rate of decrease in the amount of electricity supplied to each section so that it moves quickly
A coating apparatus characterized by being set . 2. The valve body opens and closes the discharge port, and the controller sets a tip of the valve body moving in a direction to open the discharge port at an arbitrary open position that does not fully open the discharge port. 2. The coating device according to claim 1, wherein the coating device can be stopped. 3. The valve body opens and closes the discharge port, and the controller presses a tip of the valve body moving in a direction to close the discharge port against a valve seat of a die body. The coating apparatus according to claim 1 or 2, wherein the supplied amount of electricity is set so as to stop at (1). 4. The coating apparatus according to claim 1, further comprising a stopper for restricting a moving range of the valve element. 5. A film thickness measuring device for measuring the thickness of a side edge of a coating film.
And setting the measured film thickness obtained by the film thickness measuring device to the controller.
The movement is started so as to eliminate the deviation from the film thickness.
A speed determining circuit for determining a speed of the valve body.
The coating device according to claim 4. 6. The valve body moves in the closing direction.
The body of the coating liquid passage downstream of the valve seat where the valve body sits
6. A method according to claim 1, wherein the arrangement is such that the product is increased.
A coating device according to any one of the preceding claims. 7. The actuator according to claim 7, wherein the opening / closing operation device includes the actuator.
To obtain an expanded output stroke for opening and closing the valve
The contractor according to any one of claims 1 to 6, further comprising an enlargement mechanism.
The coating device according to claim.