JP2833491B2 - Scanning probe microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning probe microscope.

[0002]

2. Description of the Related Art A scanning tunneling microscope (ST) is a powerful device for measuring a fine structure of a metal or semiconductor on a sample surface.
M). Recently, a scanning probe that uses the STM technology to observe the fine structure of the sample surface using the force acting between the tip of the probe and the sample (eg, the attractive force between the atom and the tip of the probe) as a probe. Microscopes are being developed.

In this scanning probe microscope, when a cantilever having a probe is two-dimensionally scanned along the surface of a sample, the cantilever is displaced according to the surface shape of the sample to detect the displacement of the cantilever. This is an apparatus that measures the fine shape of the sample surface at the atomic level.

In this type of scanning probe microscope, as shown in FIG. 5, the output light of a laser diode LD is applied to a cantilever CL via a lens Le and a beam splitter BS, and the reflected light is applied to a photodiode. There is a structure in which a measurement optical unit configured to receive light with a PD is disposed above a sample S and detects displacement of the cantilever CL.

[0005]

According to the conventional scanning probe microscope, as shown in FIG. 6, the measurement optical unit 101 provided with the optical system for detecting the displacement of the cantilever CL is used for the sample S. Since the structure is such that measurement is performed by being fixedly arranged above the scanner (tube piezo) 121 to be placed, the measurement optical unit 10
1 had to be removed from the apparatus, and the work of exchanging the sample was complicated.

The present invention has been made to solve such a problem, and an object of the present invention is to provide a scanning probe microscope in which a sample can be easily exchanged.

[0007]

In order to achieve the above object, a scanning probe microscope according to the present invention comprises a measuring optical unit 1 provided to a scanner 21 as shown in FIGS. On the other hand, it is constituted by a base 12 fixed in a predetermined positional relationship and a measuring unit 11 arranged on the base 12, and a frame 11a of the measuring unit 11 has a cavity C extending from the opening on the front surface toward the rear. With the formed structure,
The cantilever 3 is arranged inside the cavity C, and
An optical system for detecting the displacement of the cantilever 3 is arranged on the frame 11a, and the measuring optical unit 1
The cantilever 3 is selectively disposed at one of a measurement position above the scanner 21 and a position not interfering with the region above the scanner 21 by moving the measurement unit 11 in the front-rear direction with respect to the base 12. And a fixing mechanism (fixing lever 6 and groove 11c) for fixing the measuring unit 1 to the base 12 when the measuring unit 11 is arranged at the measurement position. It is characterized by being provided.

[0008]

By simply moving the measuring section 11 in the front-rear direction with respect to the base 12, a space A for performing an exchange operation can be secured above the sample S placed on the scanner 21. Therefore, it is not necessary to remove the measuring optical unit 1 from the apparatus when exchanging the sample.

When the measuring section 11 is arranged at the measuring position, the measuring section 11 can be fixed to the base 12 by a fixing mechanism.
Even with the two units, there is no adverse effect on the measurement.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram schematically showing the structure of the embodiment of the present invention, wherein (a) and (b) show the state at the time of measurement and at the time of sample replacement, respectively. FIG. 2 is an external perspective view of the measuring optical unit 1 according to the embodiment of the present invention. FIG. 2A shows a state when the cantilever is replaced, and FIG. 2B shows a state when the sample is replaced.

Further, FIG. 3 is a view showing the structure of a main part of the measuring optical unit 1, in which (a) is a partial front sectional view, and (b) is (a).
It is sectional drawing in the XX arrow of No .. First, the microscope of this embodiment includes a measuring optical unit 1 and a scanning mechanism unit 2 for scanning the sample S.

The scanning mechanism 2 has a scanner (tube piezo) 21 on which the sample S is placed and a support 22. The measurement optical unit 1 is disposed above the support 22. Adjustment screws 23 are provided on the support base 22 at a plurality of locations (three places) around the scanner 21.
By operating the adjusting screws 23, the height position of the measuring optical unit 1 with respect to the sample S on the scanner 21 can be roughly adjusted. Note that the measuring optical unit 1 is
For example, screws and tension springs or plungers (not shown)
It is fixed by a mechanism using.

The measuring optical unit 1 is composed of two units, a measuring unit 11 and a base 12. In the frame 11a of the measuring section 11, a cavity C having an open front side is provided.
Is provided, and a cantilever 3 is provided at the back of the cavity C.
Are mounted using the holder 4. Also, the frame 11
Although not shown, an optical system (see FIG. 5 or FIG. 6) for detecting the displacement of the cantilever 3 is incorporated in a. A U-shaped notch 12a is provided at the center of the base 12, and the upper end of the scanner 21 faces the inside of the cavity C through the notch 12a.

Inner walls 11b are formed integrally with the lower portions of the left and right side walls of the frame 11a so as to extend at a predetermined distance from the side walls, respectively.
b, there are two links 5.
a. The other end of each link 5 is rotatably supported by a base 12 via a pin 5b, and the entire measurement unit 11 is moved relative to the base 12 by a four-bar linkage constituted by these members. It can be moved in the front-back direction.

In a state where the measuring section 11 is arranged at a position on the front side of the base 12, the cantilever 3 is positioned above the sample S placed on the scanner 21 to be in a measurable state. When exchanging S, a space A for the exchanging operation can be secured in the upper region of the sample S by a simple operation such as moving the measurement unit 11 backward.

Here, when the measuring section 11 is arranged at the measuring position, it is necessary to fix the measuring section 11 to the base 12, and in the embodiment of the present invention, a fixing lever 6 shown in FIG. 4 is provided. . The fixed lever 6 is attached to the base 1
2 is rotatably supported by a fulcrum 12b provided on the second member 2. By operating the fulcrum side, the tip 6a on the load point side fits into a groove 11c provided on the inner wall 11b of the measuring section 11. The groove 11c is formed so as to be inclined upward toward the rear side of the base 12, so that when the force point side of the fixed lever 6 is turned toward the front side of the base 12, the tip 6a of the fixed lever 6 is turned. The lower surface of the groove 11c is pressed downward, whereby the measuring unit 11 is firmly fixed to the base 12.

In the above embodiment, a link mechanism is employed as a moving mechanism of the measuring section 11. However, the present invention is not limited to this. For example, a slide mechanism for moving the measuring section 11 along the base 12 may be used. Other known mechanisms may be used. As the fixing mechanism, other known fixing means using, for example, a plunger or a pin may be employed instead of the fixing lever.

[0018]

As described above, according to the scanning probe microscope of the present invention, the measuring optical unit arranged above the sample is constituted by two units, the measuring unit and the base, and the measuring unit is used as the base. A mechanism (link mechanism, etc.) that moves in the front-rear direction with respect to the sample can be secured, so that when exchanging samples, a large space can be secured above the sample simply by moving the measurement unit. The performance is greatly improved.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing the structure of an embodiment of the present invention.

FIG. 2 is an external perspective view showing the structure of a measuring optical unit 1 according to the embodiment of the present invention.

FIG. 3 is a longitudinal sectional view showing a structure of a main part of the measuring optical unit 1.

FIG. 4 is a partial perspective view showing the structure of a fixed lever 6 according to the embodiment of the present invention.

FIG. 5 is a diagram illustrating a configuration example of a measurement optical unit of the scanning probe microscope.

FIG. 6 is a diagram showing an example of a conventional structure of a scanning probe microscope in which a measurement optical unit is arranged above a sample.

[Explanation of symbols]

 Reference Signs List 1 measurement optical unit 11 measurement unit 11a frame 11b inner wall 11c groove 12 base 12b fulcrum 2 scanning unit 21 scanner 22 support base 3 cantilever 4 holder 5.5 link 5a 5a 5b 5b pin 6 fixed lever 6a fixed Lever tip

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) G01N 37/00 G01B 21/30 G01B 7/34 G01B 11/30 H01J 37/28

Claims (1)

(57) [Claims] 1. A microscope for measuring a fine structure on a sample surface, comprising: a cantilever having a probe; and a scanner for scanning the sample in a two-dimensional direction with respect to the probe. In a scanning probe microscope in which a measuring optical unit is arranged, the measuring optical unit is constituted by a base fixed in a predetermined positional relationship to the scanner and a measuring unit arranged on the base, and the measuring unit The frame has a structure in which a cavity extending from the front opening to the rear side is formed, and the cantilever is arranged inside the cavity, and an optical system for detecting displacement of the cantilever is arranged in the frame. In addition, the measuring optical unit moves the measuring unit in the front-rear direction with respect to the base, and moves the cantilever to a measuring position above the scanner or the measuring position. A moving mechanism for selectively arranging the measurement unit at one of the positions not interfering with the upper region of the scanner, and when the measurement unit is arranged at the measurement position, the measurement unit is moved relative to the base. A scanning probe microscope having a fixing mechanism for fixing.