JP2827729B2 - Infrared detector support device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in an infrared detector support device applied to an infrared detector of an infrared detector.

2. Description of the Related Art Temperature distribution has been detected in the phenomena of the natural world, in the fields of living organisms, industrial production, the field of medicine, and various academic researches, and various technical studies and analytical studies have been conducted. It has been realized that such a temperature distribution is visualized so as to be visually grasped, and further, coloring is performed according to the temperature.

[0005] A schematic configuration of a typical infrared imaging apparatus as shown in FIG.
The infrared light of the object 1 is received and condensed by an infrared optical lens 2, and the condensed light beam is turned by the horizontal scanning mirror 3 so that the object 1 is vibrated in the horizontal direction of arrow A in the horizontal plane as indicated by arrow B. To scan repeatedly.

Next, the light beam from the object 1 is repeatedly scanned in a vertical direction as indicated by an arrow C in a vertical state by the vertical plane scanning mirror 4 in a vibrating state. As a result, the object 1 is sequentially scanned in a two-dimensional direction, so that the object 1 is focused by the condenser lens 5 for infrared rays and is incident on the infrared detecting element section in the infrared detector 6.

[0005] The electric signal converted into a light / electric signal from the infrared detector 6 is subjected to signal processing by a signal processing unit 7, and the image display unit 8 sequentially performs shading or color classification according to the temperature by two-dimensional surface scanning. The heat distribution image is displayed.

[0006] Such an infrared detector 6 is, for example, HgCdT made of a ternary alloy as its infrared detecting element.
A cooling type such as e is used. Such a cooled infrared detecting element is used in a state of being cooled to the temperature of liquid nitrogen or cooled to the temperature of liquid helium, for example.

[0007] For this purpose, liquefied nitrogen is supplied to the infrared detecting element for cooling, or cooling is performed using a circulating cooling device capable of circulating and cooling a refrigerant. The former requires supply of the refrigerant in accordance with the evaporation of the refrigerant, and the latter is suitable for continuous use.

FIG. 6 shows the appearance of the infrared detector 6. FIG.
(A) is a plan view, (b) is a side view, and (c) is a bottom view. An infrared detecting element 13 is arranged inside an end of the vacuum chamber inside the main body 11 through an infrared transmitting window 12. The other end has a flange 1 for mounting.
4 At four corners of the flange 14, mounting holes 15 are provided in a notch shape.

The infrared detecting element 13 has a large number of elements formed in an array in a line. Reference numeral 16 is a screw hole for mounting a cooling device. On the other hand, it is necessary that the element portion of the infrared detector be accurately coincident with the focal position of the condenser lens 5 and also coincide with the center of the scanning range for scanning the object. The element position of the infrared detector is desirably fixed so that the mounting position of the infrared detector can be adjusted from the fact that the element position is slightly different due to replacement of the infrared detector or the like and the convenience of the optical system. For this purpose, a position-adjustable infrared detector support device is used.

[0010]

2. Description of the Related Art FIG. 7 shows an external view of an assembly of a conventional infrared detector support device. FIG. 7A is a plan view,
Figure (b) is a side view. FIG. 2B shows a part relating to the screw in a partially sectional view.

An infrared detector 10 is attached to a scanning section of an infrared imaging apparatus having an optical system such as horizontal and vertical scanning via an infrared detector support device 20. In the infrared detector support device 20, a substrate 22 is pressed by four screws 23 via a gap G on a base 21 attached and fixed to the scanning unit. The gap G is the substrate 2 of the three setscrews 24 screwed into the substrate 22 near the four screws 23.
It is formed by the protruding length from 2. Push screw 24
Is in contact with the upper surface of the base 21 and the set screw 2
The gap G can be set to an arbitrary height according to the amount of screw-in projection 4.

An infrared detector 10 is provided at the center of the substrate 22.
Is inserted and attached with four screws 25. Further, a cooling device 26 is attached to the infrared detector 10 with a screw 27. Reference numeral 28 indicated by a dotted line indicates an infrared detecting element array.

A push screw 32 is screwed into each of two adjacent protrusions of the flange 14 of the infrared detector 10 on two protrusions 31 protruding from the substrate 22, and the tip of the push screw 32 contacts the side end surface of the flange 14. Touched. A projection 33 is provided at the center of each of the other two adjacent sides, and a push screw 34 is screwed in. The tip of the projection 33 contacts the side end surface of the flange 14.

The flange 14 is pushed by loosening any one of the two opposing push screws 32 and one push screw 34 and retracting the other, and pushing the other, so that the substrate 22 is linearly moved.
By moving the flange 14 on the arrows X and Y, the position of the infrared detector 10 can be moved in the same direction to set the position of the infrared detecting element 28 at the focal position of the optical system.

Such a movement can be made to move by the difference between the diameter of the screw 25 and the inner diameter of the screw hole 15 (FIG. 6) of the flange 14. Further, by moving the three setscrews 24 equally, the infrared detector 10 is moved up and down in the axial Z direction together with the substrate 22 so that the infrared detector 28
Can be moved in the direction of the focal point of the optical system to match the focal position. As described above, adjustment can be made in the three axes of X, Y, and Z.

The adjustment in the X and Y directions is performed in a state where the screw 25 for fixing the flange 14 is not completely tightened, the state in which the flange 14 is slidable on the substrate 22, and tightened when the adjustment is completed. Fix it. In the state where the adjustment is completed also in the Z direction, the screw 23 is pressed and fixed.

[0017]

According to the above-mentioned conventional infrared detector support device, all adjustments in the three axial directions are performed by moving the push screws 24, 32, 34 forward and backward. All must be moved forward and backward equally, and a slight deviation will cause a large error in the position of the infrared detecting element 28. In particular, errors in the X and Y directions give the element 28 an error in the rotational direction. An error in the Z direction causes the axis of the infrared detector 10 to tilt.

As described above, the adjustment of the position of the element 28 is very delicate, requires a troublesome operation, and requires skill and time. The Z-axis fixing screw 23 requires the careful consideration of the tightening since the substrate 22 is bent and tilted by the fixing and tightening.

Since the means for adjusting the rotation direction of the element 28 is not particularly provided, the adjustment of the rotation direction is also used by utilizing the above-mentioned problem of causing errors in the X and Y directions. The adjustment in the X and Y directions will be confused.

An object of the present invention is to provide an infrared detector support device which can solve the above-mentioned complicated problems and can perform a reliable and easy operation.

[0021]

The gist of the present invention for solving the above-mentioned problems is to provide a fixing member having a sliding surface, which is attached to and fixed to the infrared detecting section, and a sliding member for the fixing member. A first surface which is slidably movable on the sliding surface with respect to the sliding surface through a guide in only one axial direction and both surfaces are sliding surfaces.
The movable surface of the first movable member is in contact with the second sliding surface of the first movable member, and is slidable via a guide only in a direction orthogonal to the moving direction of the first movable member, and the sliding surface is movable. A second movable member having a second sliding surface orthogonal to the second movable member, and a guide only in a direction in contact with the second sliding surface of the second movable member and moving toward and away from the fixed member. A third movable member which is slidable through and has a fitting hole at the center, and a third movable member which fits into the fitting hole of the third movable member and is slidable only in the rotation direction and has an infrared ray at its center. And a fourth movable member having a support for mounting the detector, wherein each of the first, second, third, and fourth movable members is capable of minutely moving in a direction in which it can move, and is optional. Fixing means for individually fixing and fixing each other at a set position are provided.

Further, the direction in which the first movable member can move is a direction parallel to the axial direction of the infrared detector attached to the fourth movable member.

[0023]

According to the gist of the present invention, the first movable member that slides on the fixed member is movable only in one axial direction, and the first movable member slides on the second sliding surface of the first movable member. The second movable member that slides is movable only in a direction orthogonal to the first movable direction.

The second movable member has a second sliding surface orthogonal to the sliding surface, and the second sliding surface has a third sliding surface which can be moved only in the direction of the fixed member. The movable member is provided so as to be slidable, the fourth movable member is fitted to the third movable member only in the rotational direction, and the infrared detector is attached to the fourth movable member.

As described above, since the movement adjustment is configured such that the X, Y, Z and rotation directions can be independently adjusted, there is no change in movement in other directions.
Since all of the sliding surfaces are in contact with each other, stable fixing can be performed without any change in the fastening by screwing.

[0026]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a configuration of an infrared detector supporting apparatus according to the present invention;

FIG. 1 is an exploded perspective view showing the principle structure of the infrared detector support device of the present invention. In FIG. 1, an infrared detector support device 40 has an L-shaped fixed member 41 and a first movable member 43 in contact with a vertical sliding surface 42 of the fixed member 41. A vertical guide groove 44 is formed on the sliding surface 42, and two guide protrusions 46 that fit into the guide groove 44 are formed on the sliding surface 45 of the first movable member 43 in the vertical direction. Embedded.

On the second sliding surface 47 on the front side of the first movable member 43, a horizontal guide groove 48 is formed in a direction orthogonal to the direction of the guide on the rear side. On the sliding surface 50 of the second movable member 49 slidable in contact with the second sliding surface 47 of the first movable member 43, two guide projections 51 that fit into the guide grooves 48 are provided. Embedded in the direction.

The second movable member 49 is provided with a second sliding surface 52 orthogonal to the vertical sliding surface 50 on a horizontal plane. The guide grooves 54, 54 to be viewed are formed on a straight line directed toward the fixing member 41.

The third movable member 57 having the sliding surfaces 55 and 56 on both surfaces is provided with the sliding surface 55 on the lower surface thereof.
In contact with the second sliding surface 52 of No. 9, guide protrusions 58 that fit into the guide grooves 54 are embedded in the sliding surface 55 at two places. A fitting hole 59 is formed in the center.

The sliding surface 61 of the fourth movable member 60 contacts the sliding surface 56 on the upper surface of the third movable member 57. At the center of the movable member, there is an insertion hole 62 for the infrared detector so that the infrared detector is inserted and the flange is screwed and fixed.
The lower surface is formed with a rotatable cylindrical portion 63 that is fitted in the fitting hole 59 of the third movable member 57.

In the above configuration, the fixing member 41 is attached and fixed to the housing 64 of the scanning section having the optical system. First movable member 43 fitted in guide groove 44 of fixed member 41
The movable direction of the first movable member 43 is restricted to only one axial direction by the projections 46. That is, the vertical Z-axis direction indicated by the orthogonal arrow.

The movable direction of the second movable member 49 is set in the horizontal X-axis direction indicated by the orthogonal arrow by the projection 51 of the second movable member 49 fitted into the guide groove 48 of the first movable member 43. Be regulated.

The movable direction of the third movable member 57 is determined by the projections 58 of the third movable member 57 fitted into the guide grooves 54 of the second movable member 49, and the movable direction of the third movable member 57 is the horizontal Y-axis indicated by an orthogonal arrow. Regulated in the direction.

The fourth movable member 60 in which the cylindrical portion 63 fits into the fitting hole 59 of the third movable member 57 is the third movable member 57
The sliding surface 56 on the upper surface and the sliding surface 61 on the lower surface slide in contact with each other, but can only rotate about the center line S with respect to the fitting hole 59 in the direction of the arrow W.

As described above, the moving direction of the first movable member 43 is a direction parallel to the direction of the central axis S to which the infrared detector is mounted. Although not shown, the first movable member 43 is provided with means for fixing to the fixed member 41, and the second movable member 49 is provided with means for fixing to the first movable member 43. is there. Means for fixing the third movable member 57 to the second movable member 49 are also provided, and means for fixing the fourth movable member 60 to the third movable member 57 are also provided. In this way, each movable member has a fixing means capable of individually connecting and fixing each other. Further, fine movement means is provided.

In this manner, the infrared detector can be fixed at an arbitrary set position by finely adjusting the three directions of X, Y, and Z orthogonally and the infrared detector around the central axis. In the above embodiment, the relationship between the guide groove and the projection may be reversed, and other guide means such as a key and a key groove can be applied.

FIG. 2 shows a specific embodiment of the present invention. FIG. 2 (a) is a front view, FIG. 2 (b) is a side view, and FIG. 3 is a front view. FIG. 2B is a cross-sectional view taken along line DD of FIG. 2A, and shows a state in which a rib on the near side is removed.

The main part of this embodiment has basically the same configuration as that of the principle diagram of FIG. That is, the L-shaped fixing member 71
A first movable member 73 is in contact with a vertical sliding surface 72 on the front side of the first movable member 73. A vertical guide groove 74 is formed on the sliding surface 72 of the fixed member 71, and the guide groove 74 has two upper and lower protrusions 76 embedded in the sliding surface 75 on the back side of the first movable member 73. Are fitted and can be moved up and down.

A horizontal guide groove 78 is formed in a second sliding surface 77 on the front side of the first movable member 73, and an L-shaped second groove is formed in the second sliding surface 77. Movable member 79
The two sliding surfaces 80 are in contact with each other, and two protrusions 81 on the left and right embedded in the sliding surface 80 are fitted into the guide grooves 78 and can move in the left-right direction.

At the center of the horizontal second sliding surface 82 of the second movable member 79, there are two holes 83 at which the main body 11 of the infrared detector 10 fits and two offset positions which are viewed through the holes 83. The guide grooves 84 are formed on a straight line toward the fixing member 71.

A lower sliding surface 85 of a third movable member 87 having sliding surfaces 85 and 86 on both surfaces is in contact with the second sliding surface 82 of the second movable member 79. Projections 88, 88 that fit into the guide grooves 84, 84 of the second movable member 79 are embedded in the sliding surface 85, and can move in the front-rear direction in the fitted state. The center of the third movable member 87 is provided with a fitting hole 8.
9 is open.

The lower sliding surface 91 of the fourth movable member 90 contacts the upper sliding surface 86 of the third movable member 87. A hole 92 into which the infrared detector 10 fits is formed in the center,
On the lower surface, a cylindrical portion 93 that fits into the fitting hole 89 of the third movable member 87 is provided.

The above configuration is the same as that of FIG. 1, but this embodiment has mutual coupling and fixing means and fine adjustment means having the following configuration. The fixing member 71 is fixed to the housing of the scanning device having the lower surface 100 with a screw through a mounting hole 101 in a housing having an optical system. The first movable member 73 is fixedly attached to the first movable member 73 by four fixing screws 102.
2 screws 1 of the support plate 103 attached to the upper end of
At 04 and 105, they are connected so as to be finely adjustable in the vertical direction.

The support plates 106 at both ends of the first movable member 73
The second movable member 79 is coupled so as to be finely movable in the horizontal direction by a screw 107 screwed into the first movable member 73, and the first movable member 73 and the second movable member 79 are connected by four fixing screws 108. Fixed.

The second movable member 79 and the third movable member 87
Is fixed by four fixing screws 109, but the support plate 11 attached to the front end of the second movable member 79.
The fixing member 71 is coupled to the fixing member 71 in a horizontal direction so as to be finely adjusted by two screws 111 and 112.

The fourth movable member 90 is a third movable member 87
Is fixed by two fixing screws 113, but the infrared detector 10 is attached by four screws 114, and is turned around the axis of the infrared detector 10 in a sliding state. Can move.

The cooling unit 26 of the circulating cooling device inserted into the infrared detector 10 from above is mounted with four screws 27. A description will be given of the fine adjustment for minutely moving in the X, Y, and Z directions with the above configuration. A point light source (black body furnace) is arranged at the center of the field of view of the object (FIG. 5), and the center of the optical scanning range is set based on the point light source (black body furnace). Adjust the position so that

The fixing screws 102, 108, and 109 are not fully fastened and fixed, but are slidably moved as half-tightened. Fixed member 71 and first movable member 7
3, and fine adjustment of the second movable member 79 and the third movable member 87 will be described with reference to FIG. Representatively, the fixed member 71 and the first movable member 73 will be described.
It should be understood that the same applies to the second movable member 79 and the third movable member 87.

As shown in the sectional view of FIG. 4A, the support plate 103 attached to the fixing member 71 has a screw hole 115 for two screws 104 and 105 and a through hole 11.
6 are formed, and a screw hole 117 corresponding to the through hole 116 is formed on the end surface of the sliding member 73, but a portion corresponding to the screw hole 115 is a flat surface.

[0051] As shown in FIG.
One of them 104 and 105 is screwed into the screw hole 115 of the support plate 103, and the tip is made to approach the flat surface of the first movable member 73. The other one 105 is screwed into the screw hole 117 of the first movable member 73 through the through hole 116 of the support plate 103.

Here, the screw 104 is separated from the end face of the first movable member 73 as shown in FIG. 5B, and the other screw 105 is screwed in this state.
3, the first movable member 73 is drawn toward the support plate 103. That is, the first movable member 73 is raised in the Z direction (FIG. 1).

When the head of the screw 105 is separated from the support plate 103 and the screw 104 is screwed in as shown in FIG. 5C, the first movable member 73 is pushed away from the support plate 103. That is, the first movable member 73 is lowered in the Z direction (FIG. 1).

When the above operation is repeated and set at an arbitrary desired position, the fixing screw is tightened to connect and fix the two. As described above, the distance between the second movable member 79 and the third movable member 87 in the direction of the fixed member 71 in the Y direction (FIG. 1) can be increased.

The support plates 106 at both ends of the first movable member 73
When one of the screws 107 is loosened and the other is screwed in, the second movable member 79 is slightly moved in any of the left and right directions. When it is reversed, it is slightly moved in the opposite direction. Since the second movable member 79 is thus moved in the X direction (FIG. 1), when the second movable member 79 is set at an arbitrary predetermined position, the fixing screw is tightened to fix the two together.

The fourth movable member 90 is not provided with any means for fine movement. However, this rotation does not cause any problem when compared with fine movement adjustment in the X, Y, and Z directions. It is sufficiently possible to measure the light receiving state by using a simple member or by manually setting the position.

The fourth movable member 90 is a third movable member 87
This is a sliding rotation between the sliding surfaces, and can be rotated in the W direction around the axis S in FIG. In the above-described embodiment, the first movable member 73 is in the Z direction with respect to the fixed member 71, and the second movable member 79 is in the X direction with respect to the first movable member 73. However, such a relationship is reversed. Although it is possible to do so, it is difficult to change the relation of the third movable member 79 to the second movable member 79 in the X direction.

Reversing the positional relationship between the guide groove and the guide member fitted into the groove is not problematic and is arbitrary. Although described in the above embodiment as vertical, horizontal, vertical, and horizontal, this is because the description has been made with reference to the drawings, and the present invention is not limited to such a state. It can be set not only in the vertical state but also in the opposite posture, horizontal direction, or any other direction, and can be applied to use while changing the direction.

[0059]

As described in detail above, according to the infrared detector support apparatus of the present invention, the infrared detector is rotated about the three axes in the X, Y, and Z directions and the axis thereof, thereby providing a fine structure. Position adjustments can be made independently of each other, and they can be connected and fixed to each other, eliminating troublesome difficulties as in the past, and having a tremendous practical effect of extremely smooth operation. It is.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating the principle configuration of an infrared detector support device according to the present invention.

FIG. 2 shows a specific embodiment of the present invention.

FIG. 3 is a front view of one embodiment of the present invention.

FIG. 4 is an explanatory diagram of fine adjustment for fine movement.

FIG. 5 is a diagram showing the basic configuration of an infrared imaging device;

FIG. 6 is an external view of an infrared detector.

FIG. 7 shows a conventional infrared detector support device.

[Explanation of symbols]

 Reference Signs List 10 infrared detector 11 main body 13 infrared detecting element 14 flange 40 infrared detector support device 41 fixing member 43 first movable member 49 second movable member 57 third movable member 60 fourth movable member 71 fixed member 72 sliding Moving surface 73 First movable member 74 Guide groove 76 Projection 77 Second sliding surface 78 Guide groove 79 Second movable member 80 Sliding surface 81 Projection 82 Second sliding surface 84 Guide groove 85, 86 Sliding Surface 87 Third movable member 88 Projection 89 Fitting hole 86 Sliding surface 90 Fourth movable member 91 Sliding surface 93 Cylindrical part

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G01J 1/02 G01J 5/48

Claims (2)

(57) [Claims] 1. A fixing member (41) having a sliding surface (42) and attached to and fixed to an infrared detecting section; and a sliding surface (42) of the fixing member (41) extending in one axis direction. A first movable member (43) slidable via only the guides (44) and (46) and having both surfaces as sliding surfaces (45) and (47); and the first movable member (43). In contact with the second sliding surface (47) of the first movable member, and is slidable via the guides (48) and (51) only in a direction orthogonal to the moving direction of the first movable member. ), A second movable member (49) having a second sliding surface (52) orthogonal to the second movable member (49), and a second sliding surface (52) of the second movable member (49) in contact with the second movable member (49). It is slidable via guides (54) and (58) only in the direction farther and farther from the direction of the member (41), and has a fitting hole (59) at the center. The third movable member (5
7) and a support portion (62) for fitting an infrared detector at the center thereof, which is fitted in the fitting hole (59) of the third movable member (57) and is slidable only in the rotating direction. The fourth movable member (6
0), and the first, second, third, and fourth movable members (43), (49), (57), and (60) can be minutely moved in the directions in which they can move, and can be arbitrary. An infrared detector support device, characterized in that the infrared detector support device is provided with fixing means capable of individually connecting and fixing each other at a set position. 2. The movable direction of the first movable member (43) is parallel to the axial direction of an infrared detector (10) attached to the fourth movable member (60). The infrared detector support device according to claim 1, wherein