JP2822603B2 - Immersion coating equipment - Google Patents
Immersion coating equipmentInfo
- Publication number
- JP2822603B2 JP2822603B2 JP2135274A JP13527490A JP2822603B2 JP 2822603 B2 JP2822603 B2 JP 2822603B2 JP 2135274 A JP2135274 A JP 2135274A JP 13527490 A JP13527490 A JP 13527490A JP 2822603 B2 JP2822603 B2 JP 2822603B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- coated
- nozzle
- cylindrical body
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Coating Apparatus (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、浸漬塗布装置に関し、詳しくは、円筒状の
被塗布物の表面に形成される塗膜上部の膜厚ダレの発生
を減少することが可能な浸漬塗布装置に関する。Description: FIELD OF THE INVENTION The present invention relates to a dip coating apparatus, and more particularly, to reduce the occurrence of film thickness sagging on a coating film formed on the surface of a cylindrical object to be coated. The present invention relates to a dip coating apparatus capable of performing the above-mentioned operations.
(従来の技術) 円筒状の被塗布物の表面に、塗布によって感光層やそ
の他の層を形成することは、従来より広く行われてい
る。塗布方法の中でも、表面の平滑性が良好であること
などのために、浸漬塗布法が優れている。(Prior Art) Forming a photosensitive layer or other layers by coating on the surface of a cylindrical object to be coated has been widely performed conventionally. Among the coating methods, the dip coating method is excellent because of the good surface smoothness and the like.
浸漬塗布法は、膜厚が薄い場合には、均一に塗布する
ことが可能であるが、膜厚が厚い場合には、被塗布物の
上部の塗膜にダレが生じて、膜厚が不均一になるという
欠点がある。The dip coating method enables uniform coating when the film thickness is small. However, when the film thickness is large, sagging occurs on the coating film on the object to be coated, and the film thickness is unsatisfactory. There is a disadvantage that it becomes uniform.
この塗膜のダレ現象は、塗膜が乾燥する前に、下方に
ずり落ちることから発生するものであるから、これを防
止するためには、乾燥を速やかにすればよい。一方、乾
燥を遅らせる要因の一つに、塗料からの溶剤の蒸発によ
って、その蒸気が被塗布物の周囲に滞留して蒸気圧が高
くなり、塗膜の乾燥が遅れるという問題がある。This sagging phenomenon of the coating film occurs because the coating film slips downward before drying, and in order to prevent this, drying may be performed promptly. On the other hand, one of the factors that delay the drying is a problem that evaporation of the solvent from the paint causes the vapor to stay around the object to be coated, increasing the vapor pressure and delaying the drying of the coating film.
滞留する溶剤をなくすための手段として、特開昭59−
73074号公報には、塗膜に空気整流リングにより、空気
流を当てて乾燥させる装置が記載されており、また、特
開昭60−227261号公報には、円筒状の被塗布物を塗布面
から引き出しつつ、円筒状の被塗布物の周囲に、送風装
置により一様に気流を送り、塗膜を乾燥させる装置が記
載されている。As means for eliminating the staying solvent, JP-A-59-1984
Japanese Patent No. 73074 discloses an apparatus for drying a coating film by applying an air flow to the coating film with an air rectifying ring, and Japanese Patent Application Laid-Open No. Sho 60-227261 discloses a method of applying a cylindrical object to a coating surface. A device is described in which an airflow is uniformly sent by a blower around a cylindrical object to be coated while being pulled out from the substrate, and the coating film is dried.
(発明が解決しようとする課題) 上記特許公開公報に記載されたような従来の浸漬塗布
装置では、塗布面に気流を直接当てているため、ダレに
発生は改善されるものの、塗布ムラを生じやすい欠点が
あった。気流を当てる場合、気流の均一性が極めて重要
であり、気流が円筒状の被塗布物の円周方向で一様でな
いと、部分的に強く当る部分と弱く当る部分とが生じ、
さらに渦巻きを生じるなどして、塗膜の乾燥にムラが生
じる。その結果、被塗布物を引き上げていくにしたがっ
て、軸方向に厚い部分(又は薄い部分)がスジ状に発生
して、塗布むらを生じるが、従来の浸漬塗布装置におい
ては、その様な欠点があった。したがってまた、気流を
当てる装置を極めて高精度に加工して、適切に設置しな
ければならないという不都合があった。(Problems to be Solved by the Invention) In the conventional dip coating apparatus as described in the above-mentioned patent publication, since the air flow is directly applied to the coating surface, the generation of the dripping is improved, but the coating unevenness occurs. There was an easy drawback. When applying an airflow, the uniformity of the airflow is extremely important, and if the airflow is not uniform in the circumferential direction of the cylindrical object to be applied, a part that strongly hits and a part that hits weakly occur,
Further, unevenness occurs in drying of the coating film due to, for example, generation of a spiral. As a result, as the object to be coated is pulled up, a thick portion (or a thin portion) is generated in a streak shape in the axial direction, resulting in uneven coating. However, such a drawback occurs in the conventional dip coating apparatus. there were. Therefore, there is another inconvenience that the device for applying the airflow must be processed with extremely high precision and properly installed.
したがって、本発明の目的は、簡便な装置により、ダ
レによる塗膜の塗布むらを改善できる浸漬塗布装置を提
供することにある。Accordingly, an object of the present invention is to provide a dip coating apparatus that can reduce coating unevenness due to sagging with a simple apparatus.
(課題を解決するための手段) 本発明の浸漬塗布装置は、塗布液を保持する塗布槽
と、被塗布物を上下に移動可能に支持する支持手段とを
有し、円筒状の被塗布物を上下方向に移動して、塗布液
中に浸漬し、引き上げて塗布を行うものであり、そし
て、塗布槽の上方に送風装置を設けてなり、該送風装置
が、前記被塗布物の周りを取り囲む円筒体と、該円筒体
内に空気流を吹き出すノズルとを備え、該ノズルの先端
は、円筒体内壁の内側に位置するように取り付けられ、
且つ該ノズルの先端は、その向きが、ノズルの先端近傍
における円筒体内壁の接線方向と平行な方向に空気流を
吹き出して、空気流が円筒体内壁と被塗布物によって制
限された空間を流れるように設定されていることを特徴
とする。(Means for Solving the Problems) A dip coating apparatus according to the present invention includes a coating tank for holding a coating liquid, and a support means for vertically supporting the object to be coated, and a cylindrical object to be coated. Is moved in the vertical direction, dipped in the coating solution, pulled up to perform the coating, and a blower is provided above the coating tank, and the blower is provided around the object to be coated. A surrounding cylindrical body, and a nozzle for blowing air flow into the cylindrical body, a tip of the nozzle is attached so as to be located inside a cylindrical body wall,
The tip of the nozzle blows out an airflow in a direction parallel to a tangential direction of the inner wall of the cylinder near the tip of the nozzle, and the airflow flows through the space limited by the inner wall of the cylinder and the object to be coated. Is set as follows.
(作用) 本発明の浸漬塗布装置によって浸漬塗布を行う場合、
円筒状の被塗布物を塗布槽に保持された塗布液中に浸漬
した後、引き上げる際に、塗布槽上方に設けられた送風
装置から、空気が被塗布物表面に吹き付けられる。その
際、送風装置には、円筒状の被塗布物の周りを円周方向
に流れて被塗布物に当たる空気流を吹き出すように、円
筒体の接線方向に円筒体の内壁面のみに向けてノズルが
配置されている為、ノズルから出た気流は円筒体の壁面
に当たることによって円筒状の被塗布物の周りを、円周
方向に回転しながら被塗布物に当たるようになる。した
がって、被塗布物上に形成された塗膜には、気流が均一
に接触して、塗膜のダレによる塗布ムラの発生が防止さ
れる。(Operation) When dip coating is performed by the dip coating apparatus of the present invention,
When the cylindrical object to be coated is immersed in the coating solution held in the coating tank and then pulled up, air is blown onto the surface of the object from a blower provided above the coating tank. At this time, the blower has a nozzle directed tangentially to the inner surface of the cylindrical body only in a tangential direction of the cylindrical body so as to flow in a circumferential direction around the cylindrical object to be applied and blow out an air flow hitting the object to be coated. Is disposed, the airflow emitted from the nozzle hits the object while rotating in the circumferential direction around the cylindrical object by hitting the wall surface of the cylindrical body. Therefore, the airflow uniformly contacts the coating film formed on the object to be coated, thereby preventing the occurrence of coating unevenness due to dripping of the coating film.
(実施例) 次に、本発明の実施例を図面を参酌して説明する。(Example) Next, an example of the present invention will be described with reference to the drawings.
第1図は、本発明の浸漬塗布装置の概略の構成を示す
説明図であって、被塗布物が浸漬された状態を示し、第
2図は、第1図のA−A線断面図である。FIG. 1 is an explanatory view showing a schematic configuration of a dip coating apparatus of the present invention, and shows a state in which an object to be coated is dipped. FIG. 2 is a cross-sectional view taken along line AA of FIG. is there.
図中、1は塗布槽であり、内部に塗布液2が満たされ
ている。この塗布液は、塗布槽下部から導入されるよう
に構成されている。3は、堰であって、塗布槽上端縁か
ら溢流する塗布液の流れを緩やかにして、泡の発生を防
止するためのものである。In the figure, reference numeral 1 denotes a coating tank, in which a coating liquid 2 is filled. This coating liquid is configured to be introduced from the lower part of the coating tank. Reference numeral 3 denotes a weir for reducing the flow of the coating liquid overflowing from the upper edge of the coating tank to prevent the generation of bubbles.
塗布槽の外周には、塗布槽上端縁から溢流する塗布液
を保持するための外部槽4が設けられている。外部槽4
の底部には、配管5が取り付けられており、ポンプ6及
びフィルター7を介して、塗布槽下部に連通している。On the outer periphery of the coating tank, an external tank 4 for holding the coating liquid overflowing from the upper edge of the coating tank is provided. External tank 4
A pipe 5 is attached to the bottom of the tank, and communicates with the lower part of the coating tank via a pump 6 and a filter 7.
塗布槽1の上方には、送風装置8が配設されている。
この送風装置は、第2図に示されるように、円筒体9及
び円筒体の接線方向に気流が吹き出るように取り付けら
れたノズル10とから構成される。ノズルの形状は、気流
が吹き出るものであればどの様なものでもよい。円筒体
9と被塗布物11との間隔は、2〜10cm程度であることが
好ましい。ノズルの吹き出し方向は、円筒体の接線方向
であれば、水平方向でも、若干の上向きになっていても
よい。ノズルの取り付け高さは、円筒体の下から1〜5c
m程度がよい。なお、ノズルは、複数個存在してもよ
い。Above the coating tank 1, a blower 8 is provided.
As shown in FIG. 2, this blower is composed of a cylindrical body 9 and a nozzle 10 attached so that an air flow blows in a tangential direction of the cylindrical body. The nozzle may have any shape as long as the airflow blows out. The distance between the cylinder 9 and the object 11 is preferably about 2 to 10 cm. The blowing direction of the nozzle may be horizontal or slightly upward as long as it is tangential to the cylindrical body. The mounting height of the nozzle is 1 to 5c from the bottom of the cylinder
About m is good. Note that a plurality of nozzles may be present.
円筒体9の下部には、気流が塗布液表面に当たり、塗
布液が乾燥したり波立ったりすることを防止するため
に、被塗布物を挿入するための開口を有する蓋12を設け
るのが好ましい。In order to prevent the air flow from hitting the surface of the coating liquid and preventing the coating liquid from drying or waving, a lid 12 having an opening for inserting an object to be coated is preferably provided at a lower portion of the cylindrical body 9. .
13は支持部材であって、被塗布物11を支持し、モータ
ー14及びボールネジ15によって、上下に移動できるよう
になっている。Reference numeral 13 denotes a support member that supports the object to be coated 11 and that can be moved up and down by a motor 14 and a ball screw 15.
上記の浸漬塗布装置を用いて被塗布物14を塗布液によ
って塗布するには、モーター14を駆動して被塗布物11を
塗布槽1の塗布液2中に浸漬させる。次いで、所定の速
度で引き上げて浸漬塗布を行う。その際、塗布槽1内の
塗布液2は、ポンプ6を駆動することによって循環させ
る。すなわち、塗布槽上端縁から溢流して外部層4に回
収された塗布液は、配管5を通り、フィルター7で不純
物が除去された状態で、塗布槽1の下部に導入する。In order to apply the object 14 with the application liquid using the dip coating apparatus described above, the motor 14 is driven to immerse the object 11 in the application liquid 2 in the application tank 1. Next, it is pulled up at a predetermined speed to perform dip coating. At that time, the coating liquid 2 in the coating tank 1 is circulated by driving the pump 6. That is, the coating liquid overflowing from the upper end of the coating tank and collected in the outer layer 4 is introduced into the lower part of the coating tank 1 through the pipe 5 in a state where impurities are removed by the filter 7.
被塗布物11を引き上げる際に、送風装置のノズル10
に、図示されない送風機(コンプレッサー)から空気を
送り込み、気流を発生させる。ノズルから吹き出した気
流は、円筒体9の壁面に沿って、円周方向に渦巻状に回
転しながら流れ、塗膜表面と接触する。気流の量は、1
〜15Nm2の範囲が好ましく、それより少ない場合にはダ
レ防止効果が小さく、多すぎる場合には、塗膜にゆず肌
が発生したり、円周方向の膜厚むらが発生する。When pulling up the object to be coated 11, the nozzle 10
Then, air is sent from a blower (compressor) (not shown) to generate an air flow. The airflow blown out from the nozzle flows along the wall surface of the cylindrical body 9 while rotating in a spiral shape in the circumferential direction, and comes into contact with the surface of the coating film. The amount of airflow is 1
If the amount is less than 15 Nm 2, the sagging prevention effect is small, and if it is too large, the coating film has orange peel or uneven thickness in the circumferential direction.
気流は、水平面で回転しているので、塗膜の表面との
接触が均一になる。したがって、被塗布物表面に形成さ
れた塗膜は、均一に乾燥され、乾燥にむらが生じること
がなく、また、ダレの発生による塗布むらが生じること
もない。Since the air current is rotating in a horizontal plane, the contact with the surface of the coating film becomes uniform. Therefore, the coating film formed on the surface of the object to be coated is uniformly dried, so that there is no unevenness in drying, and no unevenness in coating due to the generation of sagging.
(発明の効果) 本発明の浸漬塗布装置は、上記のように送風装置に
は、円筒状の被塗布物の周りを円周方向に流れて被塗布
物に当たる空気流を吹き出すように、円筒体の接線方向
に円筒体の内壁面のみに向けてノズルが配置されている
ので、被塗布物上に形成された塗膜が、円周方向に流れ
る一様な気流と接触することになり、均一に乾燥され
る。したがって、塗布むらを生じることが防止される。(Effect of the Invention) The dip coating apparatus of the present invention is arranged such that the blower is provided with a cylindrical body so as to flow around the cylindrical object to be applied in the circumferential direction and blow out an air flow hitting the object to be applied. Since the nozzle is arranged only toward the inner wall surface of the cylindrical body in the tangential direction, the coating film formed on the object to be coated comes into contact with the uniform airflow flowing in the circumferential direction, Dried. Therefore, occurrence of uneven coating is prevented.
第1図は、本発明の浸漬塗布装置の概略の構成図、第2
図は、第1図のA−A線断面図である。 1……塗布槽、2……塗布液、3……堰、4……外部
槽、5……配管、6……ポンプ、配管、7……フィルタ
ー、8……送風装置、9……円筒体、10……ノズル、11
……被塗布物、12……蓋、13……支持部材、14……モー
ター、15……ボールねじ。FIG. 1 is a schematic configuration diagram of a dip coating apparatus of the present invention, and FIG.
The figure is a sectional view taken along line AA of FIG. DESCRIPTION OF SYMBOLS 1 ... Coating tank, 2 ... Coating liquid, 3 ... Weir, 4 ... External tank, 5 ... Piping, 6 ... Pump, Piping, 7 ... Filter, 8 ... Blower, 9 ... Cylindrical Body, 10 ... Nozzle, 11
An object to be coated, a lid, a support member, a motor, a ball screw.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) B05C 3/00 - 3/20 B05C 9/08 - 11/06──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) B05C 3/00-3/20 B05C 9/08-11/06
Claims (1)
下に移動可能に支持する支持手段とを有し、円筒状の被
塗布物を上下方向に移動して、塗布液中に浸漬し、引き
上げて塗布を行う浸漬塗布装置において、塗布槽の上方
に送風装置を設けてなり、該送風装置が、前記被塗布物
の周りを取り囲む円筒体と、該円筒体内に空気流を吹き
出すノズルとを備え、該ノズルの先端は、円筒体内壁の
内側に位置するように取り付けられ、且つ該ノズルの先
端は、その向きが、ノズルの先端近傍における円筒体内
壁の接線方向と平行な方向に空気流を吹き出して、空気
流が円筒体内壁と被塗布物によって制限された空間を流
れるように設定されていることを特徴とする浸漬塗布装
置。An apparatus has an application tank for holding an application liquid, and a support means for supporting the object to be moved up and down. In a dip coating device that dipped, pulled up, and applied, a blower was provided above a coating tank, and the blower blows out an air flow into the cylindrical body surrounding the object to be coated and the cylindrical body. A tip of the nozzle is mounted so as to be located inside the inner wall of the cylinder, and the tip of the nozzle has a direction parallel to a tangential direction of the inner wall of the cylinder near the tip of the nozzle. A dip coating device, wherein the dip coating device is set so that an air flow is blown out to the air flow through the space defined by the inner wall of the cylindrical body and the object to be coated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2135274A JP2822603B2 (en) | 1990-05-28 | 1990-05-28 | Immersion coating equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2135274A JP2822603B2 (en) | 1990-05-28 | 1990-05-28 | Immersion coating equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0429773A JPH0429773A (en) | 1992-01-31 |
JP2822603B2 true JP2822603B2 (en) | 1998-11-11 |
Family
ID=15147876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2135274A Expired - Lifetime JP2822603B2 (en) | 1990-05-28 | 1990-05-28 | Immersion coating equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2822603B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102941180A (en) * | 2012-11-30 | 2013-02-27 | 成都易态科技有限公司 | External filtration filter tube horizontal-type rotary membrane immersing device and system |
CN104690788A (en) * | 2013-12-04 | 2015-06-10 | 季叶俊 | Glue pool with air drying function |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11276961A (en) | 1998-03-27 | 1999-10-12 | Ricoh Co Ltd | Dip-coating apparatus |
JP3661828B2 (en) | 1998-03-27 | 2005-06-22 | 株式会社リコー | Immersion coating equipment |
JP2014076410A (en) * | 2012-10-09 | 2014-05-01 | Asahi Kasei Corp | Coating apparatus and coating method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5973074A (en) * | 1982-10-18 | 1984-04-25 | Minolta Camera Co Ltd | Apparatus for manufacture of tubular photosensitive body |
JPS60110373A (en) * | 1983-11-21 | 1985-06-15 | Konishiroku Photo Ind Co Ltd | Coating and drying apparatus |
JPH0360757A (en) * | 1989-07-26 | 1991-03-15 | Mita Ind Co Ltd | Dipping device |
-
1990
- 1990-05-28 JP JP2135274A patent/JP2822603B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102941180A (en) * | 2012-11-30 | 2013-02-27 | 成都易态科技有限公司 | External filtration filter tube horizontal-type rotary membrane immersing device and system |
CN102941180B (en) * | 2012-11-30 | 2015-10-07 | 成都易态科技有限公司 | Outer filter chimney filter horizontal rotary leaching film device and system |
CN104690788A (en) * | 2013-12-04 | 2015-06-10 | 季叶俊 | Glue pool with air drying function |
Also Published As
Publication number | Publication date |
---|---|
JPH0429773A (en) | 1992-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4113492A (en) | Spin coating process | |
US6666917B2 (en) | Apparatus for coating of a semiconductor wafer | |
JP2822603B2 (en) | Immersion coating equipment | |
JPH01165787A (en) | Adhesion of metal or alloy | |
US2763564A (en) | Means and methods for processing cathode ray tube bulbs | |
JP2001511067A (en) | Die edge cleaning system | |
US4528934A (en) | Thin-film coating apparatus | |
JP2844784B2 (en) | Immersion coating equipment | |
JP3064524B2 (en) | Immersion coating equipment | |
US5952045A (en) | Method and apparatus for improved coating of a semiconductor wafer | |
JPH0588385A (en) | Dip coating equipment | |
US20030132159A1 (en) | Apparatus and method for removing matter on a fluid surface of a tank | |
JP3136802B2 (en) | Substrate drying method | |
JP2629417B2 (en) | Dip coating method and dip coating device | |
JP3361872B2 (en) | Substrate cleaning equipment | |
JPS6369564A (en) | Spin coater for substrate | |
JP2889513B2 (en) | Immersion coating device and coating method | |
JPS624187B2 (en) | ||
JPH025903Y2 (en) | ||
JP3067398B2 (en) | Jet type wet etching equipment | |
JP3512270B2 (en) | Rotary substrate coating device | |
JPH0222056Y2 (en) | ||
JP2759369B2 (en) | Liquid processing apparatus and liquid processing method | |
JPH057811A (en) | Dip coating device | |
JPH0684785A (en) | Dipping type liquid processing device |