JP2820089B2 - Soaking heater - Google Patents
Soaking heaterInfo
- Publication number
- JP2820089B2 JP2820089B2 JP29938795A JP29938795A JP2820089B2 JP 2820089 B2 JP2820089 B2 JP 2820089B2 JP 29938795 A JP29938795 A JP 29938795A JP 29938795 A JP29938795 A JP 29938795A JP 2820089 B2 JP2820089 B2 JP 2820089B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic heater
- test sample
- outside
- rays
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、均熱加熱装置に関
し、例えば、X線によるその場観察可能な均熱加熱装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a soaking apparatus, for example, to an in-situ observing apparatus using X-rays.
【0002】[0002]
【従来の技術】従来、均熱加熱装置には、より高均熱の
加熱溶融を得るため、特に人工衛星や落下棟および航空
機実験等のマイクログラビティ環境での材料の均熱溶融
ならびに凝固も行われている。一般的には、例えば実験
用として、材料をある特定した範囲に於いて精度良く均
一に溶融し結晶成長を実施したり、溶融材料中の各種物
理/化学現象を観察する等が行われる。このような目的
を持った加熱溶融炉に於いて、抵抗加熱体に金属加熱抵
抗体を使用することにより、供試材料の溶融状態の形成
を可能とした均熱加熱溶融炉がある。2. Description of the Related Art Conventionally, a soaking apparatus has been used for soaking and solidifying materials in a microgravity environment such as an artificial satellite, a falling wing, and an aircraft experiment in order to obtain a higher soaking temperature. Have been done. In general, for example, for experimental purposes, a material is precisely and uniformly melted in a certain specified range to carry out crystal growth, and various physical / chemical phenomena in the molten material are observed. In a heating and melting furnace having such a purpose, there is a soaking and heating furnace which can form a molten state of a test material by using a metal heating resistor as a resistance heating body.
【0003】従来例1の均熱溶融炉として、図2に示す
ものがある。本従来例の均熱溶融炉は、供試試料7を断
熱材料10等で支持するか、または供試試料を坩堝等の
容器に入れた状態で断熱材料10で支持し、加熱の為の
金属抵抗線を巻いた金属抵抗線ヒータ8と、更に輻射に
よる熱の漏洩を減ずるためのリフレクタ9等で構成され
ている。[0003] As a soaking furnace of the prior art 1, there is one shown in FIG. In the conventional soaking furnace, the test sample 7 is supported by a heat insulating material 10 or the like, or the test sample is supported by the heat insulating material 10 in a container such as a crucible or the like, and a metal for heating is used. It comprises a metal resistance wire heater 8 wound with a resistance wire, and a reflector 9 for reducing heat leakage due to radiation.
【0004】また場合によっては、供試試料7の均熱加
熱性を向上させる目的でヒータからの熱入力を拡散する
ための拡散層を供試試料の外側に配置したり、金属抵抗
線8の外側に断熱層を設けたりする。場合によっては更
に、断熱層やリフレクタを多層に設けたり、断熱の為の
真空層を設けた構成とする。[0004] In some cases, a diffusion layer for diffusing heat input from a heater may be arranged outside the test sample for the purpose of improving the uniform heating property of the test sample 7 or the metal resistance wire 8 may be provided. For example, a heat insulating layer is provided outside. Depending on the case, a structure in which a heat insulating layer or a reflector is provided in multiple layers or a vacuum layer for heat insulation is further provided.
【0005】従来例2の均熱溶融炉として、実開平4−
85100号の「宇宙環境における溶融金属観察装置」
がある。本従来例では、筒状加熱対を用い筒状の左右の
開口においてX線の透過を行なっている。[0005] As a soaking furnace of the prior art example 2, an actual heating furnace 4
No. 85100, "Molten metal observation device in space environment"
There is. In this conventional example, X-rays are transmitted through the left and right openings of the cylindrical shape using a cylindrical heating pair.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上記従
来例1の地上での使用を目的とした技術では、図2に示
す様に、抵抗加熱体として金属抵抗線を使用する。この
場合、加熱溶融炉の加熱温度範囲を高く設定する程、カ
ンタル等の比重の大きい抵抗線を用い、且つ大電流を流
すべく線径の太いものを使用する必要がある。このた
め、X線発生器11とX線ディテクタ12とを配置して
供試試料の状態をX線でその場観察するために金属抵抗
線の像影を除去することが困難となる。However, in the technique of the prior art 1 for use on the ground, as shown in FIG. 2, a metal resistance wire is used as a resistance heating element. In this case, as the heating temperature range of the heating and melting furnace is set higher, it is necessary to use a resistance wire having a large specific gravity, such as Kanthal, and to use a wire having a large wire diameter to allow a large current to flow. For this reason, it is difficult to remove the image of the metal resistance wire in order to arrange the X-ray generator 11 and the X-ray detector 12 and observe the state of the test sample in-situ with X-rays.
【0007】また、従来例2のようにX線の透過経路に
金属抵抗線を巻かず、観察窓を設ける構成にした場合に
は、供試試料の均熱加熱性能を著しく損なう問題点を伴
う。Further, when the observation window is provided without wrapping the metal resistance wire around the X-ray transmission path as in Conventional Example 2, there is a problem that the uniform heating performance of the test sample is significantly impaired. .
【0008】本発明は、高均熱のX線によるその場観察
可能な均熱加熱装置を提供することを目的とする。[0008] It is an object of the present invention to provide a soaking apparatus capable of in-situ observation with highly uniform X-rays.
【0009】[0009]
【課題を解決するための手段】かかる目的を達成するた
め、本発明の均熱加熱装置は、供試試料を収容する断熱
材で構成された堝炉と、この堝炉を取り囲む形態で形成
されたセラミックヒータと、このセラミックヒータの外
側の周囲を取り囲み断熱材で形成された保護壁と、保護
壁の一方の外側から他方の外側へ向かってX線を照射す
るX線発生手段と、他方の外側においてX線を受信する
ディテクタとを有し、堝炉内に収容された供試試料をセ
ラミックヒータで加熱し、且つX線発生手段とディテク
タとで供試試料のその場観察を可能としたことを特徴と
している。In order to achieve the above object, a soaking apparatus of the present invention comprises a tub furnace made of a heat insulating material for accommodating a test sample, and a form surrounding the tub furnace. A ceramic heater, a protective wall surrounding the outside of the ceramic heater and formed of a heat insulating material, X-ray generating means for irradiating X-rays from one outside of the protective wall to the other outside, and the other Having a detector for receiving X-rays on the outside, heating the test sample housed in the pot furnace with a ceramic heater, and enabling in-situ observation of the test sample with the X-ray generating means and the detector It is characterized by:
【0010】また、上記のセラミックヒータはPGとP
BNとを用いて構成し、板状に形成するとよい。[0010] Further, the above ceramic heater is composed of PG and P
It is preferable to use BN and form a plate.
【0011】したがって、本発明の均熱加熱装置によれ
ば、断熱材で構成された堝炉で供試試料を収容し、この
堝炉をセラミックヒータで取り囲み、セラミックヒータ
の外側周囲を断熱材で形成された保護壁で取り囲み、保
護壁の一方の外側から他方の外側へ向かってX線を照射
し、他方の外側において受信する。この構成によれば、
堝炉内に収容された供試試料をセラミックヒータで加熱
し、且つX線で供試試料のその場観察を可能とする。ヒ
ータとして電気抵抗層と断熱層の比重の差異が非常に少
なく、しかも比重の絶対値も抵いセラミックヒータを使
用することによってX線の透過を妨げる量が少なく、且
つヒータパターンが撮像されない画像を得ることができ
る。Therefore, according to the soaking apparatus of the present invention, the test sample is accommodated in a tub furnace made of a heat insulating material, the tub furnace is surrounded by a ceramic heater, and the outer periphery of the ceramic heater is made of a heat insulating material. Surrounded by the formed protection wall, X-rays are emitted from one outside of the protection wall to the other outside, and received at the outside of the other. According to this configuration,
A test sample accommodated in a pot furnace is heated by a ceramic heater, and X-rays enable in-situ observation of the test sample. The difference in specific gravity between the electric resistance layer and the heat insulating layer is very small, and the absolute value of the specific gravity is low. Obtainable.
【0012】[0012]
【発明の実施の形態】次に添付図面を参照して本発明に
よる均熱加熱装置の実施の形態を詳細に説明する。図1
を参照すると本発明の均熱加熱装置の一実施形態が示さ
れている。図1には、加熱炉を部分破断して内部構造を
示した実施形態の均熱加熱装置の全体斜視図と、加熱炉
の上面図が示されている。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a soaking apparatus according to the present invention. FIG.
Referring to FIG. 1, there is shown an embodiment of a soaking apparatus according to the present invention. FIG. 1 shows an overall perspective view of an equalizing heating apparatus according to an embodiment in which the heating furnace is partially broken to show an internal structure, and a top view of the heating furnace.
【0013】図1において、本実施例の均熱加熱装置
は、加熱炉とX線発生器5とX線ディテクタ6とにより
構成される。加熱炉はさらに細分化され、供試試料を収
容するいわゆる円筒状の堝を構成する断熱材料4と、こ
の断熱材料4の外周に円筒状に形成され供試試料1を溶
融させるセラミックヒータ2と、セラミックヒータ2の
外周に設けられ熱保持と断熱のための壁を構成するリフ
レクタ3とを有して構成される。In FIG. 1, the soaking apparatus of this embodiment comprises a heating furnace, an X-ray generator 5 and an X-ray detector 6. The heating furnace is further subdivided, and a heat insulating material 4 forming a so-called cylindrical tub for accommodating the test sample, and a ceramic heater 2 formed in a cylindrical shape on the outer periphery of the heat insulating material 4 to melt the test sample 1; And a reflector 3 provided on the outer periphery of the ceramic heater 2 and constituting a wall for heat retention and heat insulation.
【0014】上記の構成各部は、供試試料1を断熱材料
4で支持し、その外側に加熱の為のセラミックヒータ2
を配置し、更に輻射による熱の漏洩を減ずるためのリフ
レクタ3を配し、更に供試試料溶融時の観察を実施する
ためのX線発生器5とX線ディテクタ6の関係を持って
構成されている。Each component described above supports the test sample 1 with a heat insulating material 4 and has a ceramic heater 2 for heating on the outside thereof.
, A reflector 3 for reducing heat leakage due to radiation, and an X-ray generator 5 and an X-ray detector 6 for performing observation during melting of a test sample. ing.
【0015】上記の構成において、加熱炉とX線発生器
5およびX線ディテクタ6との位置関係は、X線を照射
するX線発生器5とX線を受信するX線ディテクタ6と
の、それぞれの中心軸線が加熱炉の供試試料の中心とさ
れる。In the above configuration, the positional relationship between the heating furnace, the X-ray generator 5 and the X-ray detector 6 is determined by the X-ray generator 5 for irradiating X-rays and the X-ray detector 6 for receiving X-rays. Each center axis is the center of the test sample of the heating furnace.
【0016】また、セラミッタヒータ2はCVD(化学
気相成長法)により生産される2種類のセラミックスか
ら構成されている。具体例として、一方が電気伝導性の
PG(Pyrolitic Graphaite)、他方がPBN(Pyrolit
ic Boron Nitride)等である。PGにより抵抗パターン
を構成し、PBNによってサンドイッチされた板状の高
温加熱ヒータとされる。The ceramic heater 2 is composed of two types of ceramics produced by CVD (chemical vapor deposition). As a specific example, one is electrically conductive PG (Pyrolitic Graphaite) and the other is PBN (Pyrolit Graphite).
ic Boron Nitride). A resistance pattern is constituted by PG, and a plate-like high-temperature heater sandwiched by PBN is used.
【0017】この構成において、PBNの比重が2.1
5、PGの比重が2.20程度と、非常に比重差が小さ
い。さらに従来用いていた金属抵抗線と比較した場合
に、比重が数分の一程度と絶対値も小さい。この特徴の
ためX線を透過し易く、X線が加熱炉を横断する際に、
セラミックヒータ2のパターンが透過するX線に与える
影響が少ない。よって、鮮明度の高いX線像が得られ、
観察窓を設けることなく高精度な供試試料の溶融状態の
その場観察を可能とする。さらに観察のためにセラミッ
クヒータ2の配置および構成について求められる考慮の
度合が軽くなる。In this configuration, the specific gravity of PBN is 2.1
5. The specific gravity difference is very small, with the specific gravity of PG being about 2.20. Further, when compared with a metal resistance wire conventionally used, the specific gravity is as small as several tenths and the absolute value is small. Because of this feature, it is easy to transmit X-ray, and when X-ray traverses the heating furnace,
The effect of the pattern of the ceramic heater 2 on the transmitted X-rays is small. Therefore, an X-ray image with high definition can be obtained,
This enables in-situ observation of the molten state of a test sample with high precision without providing an observation window. Further, the degree of consideration required for the arrangement and configuration of the ceramic heater 2 for observation is reduced.
【0018】以上説明したように本発明は、セラミック
ヒータを加熱源とすることにより、供試試料加熱に際し
て均熱加熱の外乱となる観察窓を設けることなく、X線
による外部からの観察を可能にする。さらに、実験用と
して材料をある特定された範囲において精度良く均一に
溶融し、結晶成長を実施したり、溶融材料中の各種物理
/化学現象を観察することができる。抵抗加熱体にセラ
ミックヒータを使用することにより、供試材料の溶融状
態をX線透過撮像装置を使用してその場観察を可能とす
る。As described above, according to the present invention, by using a ceramic heater as a heating source, external observation by X-rays can be performed without providing an observation window which is a disturbance of soaking in heating a test sample. To Further, it is possible to melt a material accurately and uniformly within a certain specified range for experimental use, perform crystal growth, and observe various physical / chemical phenomena in the molten material. By using a ceramic heater for the resistance heating element, the molten state of the test material can be observed in-situ using an X-ray transmission imaging apparatus.
【0019】尚、上述の実施形態は本発明の好適な実施
の一形態ではあるが本発明はこれに限定されるものでは
なく、本発明の要旨を逸脱しない範囲において種々変形
実施可能である。Although the above embodiment is a preferred embodiment of the present invention, the present invention is not limited to this embodiment, and various modifications can be made without departing from the spirit of the present invention.
【0020】[0020]
【発明の効果】以上の説明より明かなように、本発明の
均熱加熱装置は、供試試料を収容した堝炉をセラミック
ヒータで取り囲み、このセラミックヒータの外側周囲を
断熱材で形成された保護壁で取り囲み、保護壁の一方の
外側から他方の外側へ向かってX線を照射し、他方の外
側において受信する。この構成により堝炉内に収容され
た供試試料をセラミックヒータで加熱し、且つX線で供
試試料のその場観察ができる。セラミックヒータは、ヒ
ータとしての電気抵抗層と断熱層の比重の差異が非常に
少なく、しかも比重の絶対値も低いため、X線の透過を
妨げる量が少なく、且つヒータパターンが撮像され難い
画像を取得することができる。本発明の均熱加熱装置に
よれば,高均等加熱と鮮明画像を得ることができる。As is clear from the above description, in the soaking apparatus of the present invention, a porcelain furnace containing a test sample is surrounded by a ceramic heater, and the outer periphery of the ceramic heater is formed of a heat insulating material. Surrounded by a protective wall, X-rays are emitted from one outside of the protective wall to the other outside, and received at the other outside. With this configuration, the test sample accommodated in the pot furnace is heated by the ceramic heater, and the test sample can be observed in situ with X-rays. The ceramic heater has a very small difference in specific gravity between the electric resistance layer and the heat insulating layer as the heater, and has a low absolute value of the specific gravity. Can be obtained. ADVANTAGE OF THE INVENTION According to the soaking apparatus of this invention, high uniform heating and a clear image can be obtained.
【図1】本発明の均熱加熱装置の実施形態を示す図であ
り、加熱炉を部分破断して内部構造を示した均熱加熱装
置の全体斜視図と加熱炉の上面図である。FIG. 1 is a view showing an embodiment of a soaking apparatus according to the present invention, which is an overall perspective view of a soaking apparatus in which a heating furnace is partially broken to show an internal structure, and a top view of the heating furnace.
【図2】従来の金層抵抗線をコイル状に巻いたヒータを
使用した場合の均熱加熱装置の外観カット図である。FIG. 2 is an external cutaway view of a conventional soaking device when a conventional heater in which a gold layer resistance wire is wound in a coil shape is used.
1 供試試料 2 セラミックヒータ 3 リフレクタ 4 断熱材 5 X線発生器 6 X線ディテクタ DESCRIPTION OF SYMBOLS 1 Test sample 2 Ceramic heater 3 Reflector 4 Insulation material 5 X-ray generator 6 X-ray detector
Claims (3)
堝炉と、 該堝炉を取り囲む形態で形成されたセラミックヒータ
と、 該セラミックヒータの外側の周囲を取り囲み断熱材で形
成された保護壁と、 該保護壁の一方の外側から他方の外側へ向かってX線を
照射するX線発生手段と、 前記他方の外側において前記X線を受信するディテクタ
とを有し、 前記堝炉内に収容された供試試料を前記セラミックヒー
タで加熱し、且つ前記X線発生手段とディテクタとで前
記供試試料のその場観察を可能としたことを特徴とする
均熱加熱装置。1. A pot furnace made of a heat insulating material for accommodating a test sample, a ceramic heater formed so as to surround the pot furnace, and a heat insulating material surrounding the outer periphery of the ceramic heater. A protection wall, X-ray generating means for irradiating X-rays from one outside of the protection wall to the other outside, and a detector for receiving the X-rays on the outside of the other side; A test sample accommodated in the sample heater is heated by the ceramic heater, and in-situ observation of the test sample is enabled by the X-ray generation means and a detector.
を用いて構成されることを特徴とする請求項1記載の均
熱加熱装置。2. The apparatus according to claim 1, wherein the ceramic heater is formed using PG and PBN.
ることを特徴とする請求項1または2記載の均熱加熱装
置。3. The uniform heating device according to claim 1, wherein the ceramic heater is formed in a plate shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29938795A JP2820089B2 (en) | 1995-11-17 | 1995-11-17 | Soaking heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29938795A JP2820089B2 (en) | 1995-11-17 | 1995-11-17 | Soaking heater |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09138073A JPH09138073A (en) | 1997-05-27 |
JP2820089B2 true JP2820089B2 (en) | 1998-11-05 |
Family
ID=17871905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29938795A Expired - Lifetime JP2820089B2 (en) | 1995-11-17 | 1995-11-17 | Soaking heater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2820089B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10225899B4 (en) * | 2002-06-11 | 2004-12-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Portable device for the visualization of temperature-dependent processes |
EP2293050B1 (en) | 2009-04-07 | 2016-09-07 | ANBE SMT Co. | Heating apparatus for x-ray inspection |
-
1995
- 1995-11-17 JP JP29938795A patent/JP2820089B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH09138073A (en) | 1997-05-27 |
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