JP2897742B2 - Optical transceiver module - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stable and simple optical transmission / reception module constituting a bidirectional optical communication system.

[0002]

2. Description of the Related Art Recently, the necessity of a two-way communication system has been increased, and it is desired to introduce this system to homes. A system using light has been studied from the viewpoint of the amount of information and high speed. Optical transmitters and receivers are required as devices for bidirectional communication using light. However, if these devices are individually configured, the size of the optical transmitter / receiver increases, which hinders the spread of the system. Furthermore, it is uneconomical to construct optical fibers for transmitting information of the transmitting and receiving devices separately from them, and it is desirable to perform two-way communication with one optical fiber. Therefore, with one optical fiber and an optical transmitter,
A device with an integrated receiver is desired. Also, by multiplexing light having different wavelengths into one optical fiber, and demultiplexing and extracting the light, a signal having a different function, such as a video signal, is output from the light having different wavelength separately from the signal for bidirectional communication. Can be placed.

From such a background, an optical transceiver module using an optical waveguide has been studied as a structure aiming at miniaturization, high integration, and low cost. FIG. 9 shows a plan view of an optical transceiver module using this structure. In the optical transmitting / receiving module of FIG. 9, an optical waveguide 2 is formed on a substrate 1, and an optical branching section 3 is formed in the optical waveguide 2. Generally, the optical branching unit 3 is configured using a Y-branch having a low loss and a simple structure. An optical fiber 4 is optically coupled to the waveguide 2 before branching of the optical branching unit 3, and an optical transmitter 5 for transmitting signal light to the two waveguides after branching and a signal transmitter for receiving signal light. An optical receiver 6 is optically coupled.

FIG. 10 is a plan view of an optical transceiver module having a structure in which a multiplexing / demultiplexing function is added to the optical transceiver module of FIG. In the optical transmission / reception module of FIG. 10, an optical multiplexer / demultiplexer 8 is further added to the structure of FIG. The optical multiplexer / demultiplexer 8 generally includes a directional coupler,
It is constituted by a waveguide type such as a Mach-Zehnder optical interferometer type, or a method of forming a groove in a waveguide and inserting a dielectric multilayer filter or the like into the groove. One of the lights split by the optical multiplexer / demultiplexer 8 is optically coupled to the optical fiber 9 and output to the outside, and is used for various purposes such as a video signal monitor.

[0005]

As described above, an optical transmission / reception module used in a system for performing bidirectional communication is expected to use an optical waveguide as a structure aiming at miniaturization, high integration, and low cost. is there. However, in order to spread this two-way optical communication system, an optical transmission / reception module is required in each home. For that purpose, mass production and cost reduction are indispensable. In the current optical transceiver module using an optical waveguide, functions such as optical branching and optical multiplexing / demultiplexing can be integrated on a single substrate by using an optical waveguide as shown in FIGS. 9 and 10. The assembly is very complicated. That is,
The optical coupling between the optical waveguide and the optical fiber, the optical coupling between the optical waveguide and the optical transmitter, and the optical coupling between the optical waveguide and the optical receiver, etc., need to be individually and precisely aligned. And labor, it requires miniaturization, high integration,
This is a bottleneck for cost reduction.

Conventionally, various methods have been proposed and implemented as a method for easily performing these individual optical couplings. For example, regarding the optical coupling between an optical fiber and an optical waveguide, the present inventors have proposed an optical waveguide substrate. A method has been previously proposed in which a precise fiber guide is formed using anisotropic etching of a substrate, and an optical fiber is installed in accordance with the guide to perform optical coupling without adjustment (Japanese Patent Application Laid-Open No. HEI 9-163572). 07
-0359848).

As for the optical coupling between the optical transmitter and the optical waveguide and the optical coupling between the optical receiver and the optical waveguide, NT
As described in T. Yamada et al.'S document (Proceedings of the 1996 IEICE General Conference SC-2-5), the mode field diameter of the optical transmitter is made closer to that of the optical waveguide, and the coupling error and the positional accuracy tolerance are allowed. Optical coupling by mounting these chips directly on a substrate on which a waveguide is formed by using a spot size conversion laser diode (SSC-LD) or a waveguide type optical receiver (WG-PD) with increased There is a way to do it.

[0008] The use of the above-described method simplifies the optical coupling of individual components.
Since each optical coupling needs to be performed in a separate step, it takes time to assemble one module. An object of the present invention is to provide an optical transceiver module that is easier to assemble than a conventional optical transceiver module.

[0009]

As a means for solving the above problems, an optical transmitting / receiving module according to the present invention comprises: an optical branching unit having an optical waveguide forming an optical branching portion on a first substrate; An optical transmitter and an optical receiver on a substrate and an optical transmitting and receiving unit in which an optical fiber optically coupled to each of the optical transmitter and the optical receiver are arranged, and the optical waveguide after branching is the optical fiber. It is characterized by being optically coupled.

An optical branching unit having an optical waveguide for forming an optical branching section and an optical multiplexing / demultiplexing section on a first substrate;
An optical transmitter and an optical receiver, and an optical transmitting and receiving unit in which optical fibers that are optically coupled to the optical transmitter and the optical receiver are arranged. And an optical waveguide demultiplexed by the optical multiplexing / demultiplexing section is optically coupled to a second optical fiber disposed on the second substrate.

Further, an optical branching unit having an optical waveguide forming an optical branching section and an optical multiplexing / demultiplexing section on a first substrate, an optical transmitter and first and second optical receivers on a second substrate. An optical fiber optically coupled to the optical transmitter and the first optical receiver, respectively, and an optical transceiver unit in which a second optical fiber optically coupled to the second optical receiver is disposed. The optical waveguide after branching is optically coupled to the optical transmitter and the first optical receiver by an optical fiber, and the optical waveguide after branching is optically coupled to the second optical fiber. It is characterized by being.

An optical branch unit in which optical fibers respectively optically coupled to optical waveguides forming an optical branch on the first substrate are arranged, and an optical transmitter and an optical receiver on the second substrate are provided. And an optical transmitter / receiver of the optical transceiver unit, wherein an optical transmitter and an optical receiver of the optical transceiver unit are optically coupled to the optical fiber.

Further, a fiber guide for positioning an optical fiber is provided on the first or second substrate.

An optical waveguide forming an optical branch on the first substrate; an optical branch unit having a fiber guide formed on the substrate such that the optical waveguide is optically coupled to an optical fiber; An optical transmitter and an optical receiver disposed on a substrate, and an optical transceiver unit having a fiber guide formed so that each of the optical transmitter and the optical receiver is optically coupled to an optical fiber, An optical transmitter and an optical receiver of the optical transmitting and receiving unit and an optical waveguide after branching of the optical branching unit are optically coupled by an optical fiber.

Further, an optical branch having an optical waveguide forming an optical branching portion and an optical multiplexing / demultiplexing portion on a first substrate and a fiber guide formed on the substrate so that the optical waveguide is optically coupled to an optical fiber. An optical transceiver comprising a unit, an optical transmitter and an optical receiver disposed on a second substrate, and a fiber guide formed such that the optical transmitter and the optical receiver are each optically coupled to an optical fiber. An optical waveguide composed of a unit, wherein an optical transmitter and an optical receiver of the optical transmitting and receiving unit and an optical waveguide after branching of the optical branching unit are optically coupled by an optical fiber and demultiplexed by an optical multiplexing / demultiplexing unit. Is optically coupled to a second optical fiber disposed on a fiber guide formed on the second substrate.

An optical branch having an optical waveguide forming an optical branching section and an optical multiplexing / demultiplexing section on a first substrate, and a fiber guide formed on the substrate so that the optical waveguide is optically coupled to an optical fiber. A unit, an optical transmitter disposed on a second substrate, and first and second optical receivers, and the optical transmitter and the first and second optical receivers are each optically coupled to an optical fiber; The optical transmitter and the first optical receiver of the optical transmitter / receiver unit and the optical waveguide after branching of the optical branching unit are optically connected by an optical fiber. And the optical waveguide after demultiplexing and the second optical receiver are optically coupled by a second optical fiber.

Further, the fiber guide is formed by anisotropic etching of the substrate.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An optical transceiver module according to the present invention comprises
An optical branching unit having an optical waveguide having a branch portion formed on a waveguide substrate, and an optical transmitting and receiving unit having an optical transmitter and an optical receiver on a substrate different from the waveguide substrate. Optical coupling between the optical transmitter and the optical receiver and the optical waveguide of the optical branching unit is performed via an optical fiber.

In the optical transceiver module of the present invention, the optical branching unit and the optical transceiver unit are formed on different substrates,
Since each optical coupling is performed via an optical fiber, each unit can be manufactured on a separate line. In addition, there is a merit that various kinds of optical transmitting / receiving modules can be provided simply by changing the combination of the optical transmitting / receiving unit or the optical branching unit.

The optical coupling between the optical transmitting / receiving unit and the optical branching unit is performed, for example, by optically mounting an optical fiber, an optical transmitter, and an optical receiver in the optical transmitting / receiving unit in advance.
In addition, by mounting the optical fiber so that the relative position of the optical fiber matches the relative position of the optical waveguide of the optical branching unit, the optical coupling between the optical fiber and the optical waveguide of the optical branching unit can be simplified.

Further, by providing a fiber guide in advance on the substrate of the optical transmission / reception unit, the alignment of the optical transmitter and the optical receiver on the substrate with the optical fiber can be simplified. In addition, by providing a fiber guide in advance also on the optical waveguide substrate of the optical branching unit, the optical coupling between the optical transmitter and optical receiver of the optical transmitting and receiving unit and the optical waveguide of the optical branching unit can be collectively performed only by simple optical fiber mounting. You can do it. The fiber guide may be formed on only one of the optical transmitting / receiving unit and the optical receiving unit, or may be formed on both.

The optical fiber is not limited to a single mode fiber, but a multimode fiber is used as an optical fiber for coupling an optical receiver and a branched optical waveguide.
Using the size of the core diameter of the optical fiber, the connection between the optical fiber optically coupled to the optical receiver and the branched optical waveguide can be further simplified.

As described above, according to the present invention, it is possible to provide a configuration capable of shortening the time required for an assembling step in manufacturing an optical transceiver module.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIG. In the optical branching unit in the first embodiment, the substrate 1
The optical waveguide 2 is formed thereon, and the optical waveguide 2 has an optical branching section 3.
Is provided. Generally, the optical branching unit 3 is configured using a Y-branch having a low-loss and simple structure. An optical fiber 4 is connected to the optical waveguide before branching of the optical branching unit 3.

The optical transmitting / receiving unit is a substrate 1 different from the substrate 1.
1, an optical transmitter 5, an optical receiver 6, and two optical fibers 10
Is arranged. The optical fiber 10 is optically coupled to the optical transmitter 5 and the optical receiver 6 by a fiber guide 13 formed on a substrate 11, and the relative positions of the two optical fibers 10 are determined by the branching of the optical branching unit. The relative position of the latter two optical waveguides 2 is matched.

The two optical waveguides 2 after branching are optically coupled to an optical transmitter 5 for transmission and an optical receiver 6 for reception, respectively, and these optical couplings are performed through two optical fibers 10. The optical coupling between the two optical fibers 10 and the optical waveguide is performed at once with high precision.

Next, mounting of the optical fiber 10 on the substrate 11 and coupling of the optical fiber 10 with the optical transmitter 5 and the optical receiver 6 in the optical transmission / reception unit of this embodiment will be described. First, mounting of the optical fiber 10 on the substrate 11 will be described. The V-groove fiber guide 13 on the substrate 11 forms a mask on the plane (100) plane of the crystal substrate on which the optical fiber is to be installed by a usual photolithography process, removes the mask by anisotropic etching, and removes the plane orientation (111 ) V consisting of
It is obtained by forming a letter-shaped groove. Anisotropic etching is suitable for mass production because batch processing is possible, and the V-groove obtained by anisotropic etching has an accurate installation surface angle for producing the installation surface of the optical fiber 5 and has high surface accuracy. Only by placing the optical fiber on the V-groove, the optical fiber 5 can be installed at an optimal position for optical coupling with the optical waveguide. Two fibers 10 are mounted in this groove.

As the substrate, generally, Si, GaAs, InP
In the case of a Si substrate, a quartz-based optical waveguide doped with P, Ge, B, Ti, or the like is used as an optical waveguide, and the manufacturing method is a CVD method, an EB evaporation method, a sputtering method, a flame method, or the like. There is a deposition method and the like. In the case of an InP or GaAs substrate, a semiconductor optical waveguide such as InGaAsP or AlGaAs is often used. As an anisotropic etching solution, a solution of KOH, KOH + alcohol, ethylenediamine + pyrocatechol or the like is generally used for a Si crystal substrate, and H ₂ is used for a GaAs or InP crystal substrate.
A solution of SO ₄ + H ₂ O ₂ + H ₂ O, HCl, HBr or the like is used. Further, as the mask material, a material having an etching rate lower than that of the (100) plane of the substrate crystal with respect to the above-described etching solution is selected. Can be

In the case of the fiber guide 13 using a V-groove, the height of the optical fiber is adjusted by adjusting the width of the V-groove so that the optical fiber 10 is installed at a desired height when mounted on the substrate 11. be able to. That is, the position of the light emitting unit of the optical transmitter 5 mounted on the substrate 11 from the substrate surface or the position of the light receiving unit of the optical receiver 6 is determined, and V is set so that the center of the optical fiber 10 is located at that position. Set the mask width of the groove. As described above, the positioning in the height direction can be determined without adjustment by using the V-groove.

Further, it is desirable that the alignment of the substrate 11 in the plane direction is also performed without adjustment. As a method for realizing this, there is a method of providing a positioning marker on the substrate 11 and the optical transmitter 5, detecting the positions of both markers using infrared light, and performing positioning. According to this method, the positioning is automated because it is the same as the photolithography step performed in the normal process.

Next, the connection between the optical transmitter 5 and the optical fiber 10 will be described. When combined with a normal optical fiber and a laser diode generally used as an optical transmitter,
The coupling efficiency is about 10 dB. As a method for improving the coupling efficiency, a type in which the spot size of a laser diode is converted has been developed, and by using this, the coupling efficiency can be improved to about 2 dB.

Also, in the case of a general laser diode, the tip of the optical fiber to be coupled is processed into a spherical shape so as to be close to the spot size of the laser diode, thereby obtaining a 4d laser.
A coupling efficiency of about B can be obtained.

Next, the connection between the optical receiver 6 and the optical fiber 10 will be described. At present, surface photodiodes are generally used for photodiodes used as optical receivers. Since the light receiving surface of the photodiode is relatively large, the positional accuracy is not as strict as coupling between the laser diode and the optical fiber. FIG. 3 shows coupling with the optical fiber 10 on the substrate 11 when a general photodiode is used. In this example, a V-groove formed by the fiber guide 13 is formed up to the side surface of the substrate, and the light receiver 6 which is a surface-receiving photodiode disposed on the side surface.
And the optical fiber 10 are coupled.

However, when this photodiode is coupled to an optical fiber, as shown in FIG.
Must be coupled vertically to the optical fiber 10. In such a case, it is impossible to perform the alignment using the marker as described above, which hinders mass production in which a low-cost and simple manufacturing process is required.

FIG. 4 shows a method for mass production using a photodiode for surface light reception. A fiber guide 13 having a V-groove formed by anisotropic etching is provided on the substrate 11, and the optical fiber 10 is positioned in the V-groove. A photodiode carrier 15 is further provided on the substrate 11, and the light emitted from the optical fiber 10 is reflected by a reflection surface 16, and then coupled to the light receiving surface 14 of the optical receiver 6 provided on the photodiode carrier. ing.

The photodiode carrier 15 uses a method similar to that for the V-groove formed by the above-described anisotropic etching, thereby providing an accurate 54.7 reflecting crystal anisotropy.
A smooth surface having an angle of 4 ° can be easily manufactured. The reflection surface 16 is obtained by forming a thin film of Au, Ag, Al, or the like as a reflection film on this surface. By mounting the optical receiver 6 thereon, the optical coupling between the optical fiber 10 and the surface-receiving photodiode can be easily achieved.

The optical receiver can be easily installed by forming AuSn solder or the like between the substrate 11 and the photodiode carrier 15 and between the photodiode carrier 15 and the photodiode 6.

In the case of the present invention, since the two optical waveguides 2 to be coupled are at the same height, the two fibers 10 also need to be set at the same height. Therefore, the optical fiber 10
Is emitted from the laser diode mounted at the same position as that of the laser diode mounted next, and the photodiode carrier 15 may be set and arranged so as to be emitted upward at this position.

Here, since the light receiving surface of the photodiode for surface light reception generally has a diameter of about several tens μm to about 100 μm, not only a single mode fiber but also a multimode fiber can be applied to the optical fiber 10. Since the core diameter of the multi-mode fiber is larger than the core diameter of the single-mode fiber, optical coupling with the optical waveguide after branching can be easily achieved, and positioning accuracy can be reduced, so that cost can be reduced.

The problem of mass production can be dealt with by using a photodiode having a waveguide structure like a laser diode or the like instead of a general surface receiving photodiode as an optical receiver.

As described above, the optical fiber, the optical transmitter and the optical receiver are optically mounted in advance on a substrate different from the substrate on which the optical waveguide is formed, and the optical fiber is aligned with the position of the optical waveguide. The optical coupling between the optical waveguide and the optical transmitter and the optical receiver can be easily achieved simply by optically coupling the optical fiber and the optical waveguide together.

Next, a second embodiment of the present invention is shown in FIG.
The second embodiment differs from the first embodiment in the configuration of the optical branching unit, and the configuration of the optical transmission / reception unit is the same. Therefore, the description of the optical transmission / reception unit of the second embodiment is omitted.

In the second embodiment, a fiber guide 12 for an optical fiber to be coupled to the optical waveguide 2 is provided on the substrate 1. The fiber guide of the second embodiment is formed in the same manner as the fiber guide of the first embodiment. In the second embodiment, by providing this fiber guide, the optical coupling between the optical waveguide 2 before branching and the optical fiber 4 and the optical coupling between the optical waveguide 2 after branching and the two optical fibers 10 from the optical transceiver unit are performed. Coupling can be easily performed without adjustment.

Next, a third embodiment will be described with reference to FIG.

In the optical branching unit according to the third embodiment, an optical branching section 3 and an optical waveguide 2 constituting an optical multiplexer / demultiplexer 8 are formed on a substrate 1 as shown in FIG. The optical multiplexer / demultiplexer 8 of the present embodiment is a directional coupler, and one of the two waveguides forming the directional coupler uses the optical waveguide before branching. The optical fiber 4 is connected to one side of the optical multiplexer / demultiplexer 8.

The optical transmission / reception unit of the third embodiment comprises a substrate 1
An optical transmitter 5, an optical receiver 6, an optical transmitter and an optical fiber 10 coupled to the optical receiver provided on a separate substrate 11,
It is composed of an optical fiber 9. The optical fiber 10 and the optical fiber 9 are positioned by a fiber guide 13 formed on the substrate 1 similarly to the optical transmission / reception unit of the first embodiment.

The optical fiber 10 positioned by the fiber guide 13 is optically coupled to the optical transmitter 5 and the optical receiver 6, respectively. The relative positions of the two optical fibers 10 and 9 are And the relative positions of the two optical waveguides 2 and the optical waveguide 2 extended from the directional coupler.

Optical fiber 9 for coupling with the demultiplexed signal light
And the optical coupling between the optical fiber 10 and the optical transmitter 5 and the optical receiver 6 is performed in advance on another substrate 11, and the relative positions of the three optical fibers are demultiplexed and divided into three. By matching the relative positions of the optical waveguides, the optical coupling of the three optical fibers and the optical waveguides is performed at a time with high precision.

In the third embodiment, by changing the interval, length or refractive index of the optical waveguides of the directional coupler in the optical multiplexer / demultiplexer 8, a WDM having a desired wavelength can be formed, and signal lights having different wavelengths can be formed. The signal is multiplexed on the fiber 4 and the optical multiplexer / demultiplexer 8 is provided with a wavelength demultiplexing function, so that this signal can be used for applications such as video signals separately from bidirectional communication, and the system can be expanded. At this time, the number of optical fibers to be mounted is increased by one, and the assembly becomes very complicated. However, by using the present invention, the module can be easily assembled.

Although a directional coupler which can be relatively easily configured is used as the optical multiplexer / demultiplexer 8, the invention is not limited to this, and a Mach-Zehnder optical interferometer type or the like may be used.

A fourth embodiment of the present invention will be described with reference to FIG. In the fourth embodiment, a fiber guide 12 is provided on the substrate 1 on which the optical waveguide 2 is formed, as in the second embodiment. By providing the fiber guide 12 on the substrate 1, the optical coupling between the three optical fibers and the optical waveguide can be easily performed without adjustment as compared with the third embodiment.

A fifth embodiment of the present invention will be described with reference to FIG. The fifth embodiment differs from the fourth embodiment in the optical transmission / reception unit. In the fourth embodiment, the signal light demultiplexed by the optical multiplexer / demultiplexer 8 is coupled to the optical fiber 9 and then taken out of the optical transmission / reception module by the optical fiber 9 as it is. The optical receiver 6 described above as shown in FIG.
Similarly to the above, another optical receiver 17 may be mounted on the substrate, and the signal light may be processed in the module.

[0053]

According to the present invention, it is possible to construct an optical transceiver module in which the module can be easily assembled. The reason is that in the present invention, the optical coupling between the optical transmitter and the optical receiver and the optical waveguide is performed via two optical fibers, respectively, and the optical fiber, the optical transmitter and the optical receiver are
Before optically coupling with the optical waveguide formed on the waveguide substrate, optical coupling is performed on another substrate on which a fiber guide is formed in advance, and further, coupling between the optical fiber and the optical waveguide is performed on the waveguide substrate. This is because the optical waveguide and the optical transmitter and the optical receiver can be collectively coupled together through the fiber guide formed beforehand.

[Brief description of the drawings]

FIG. 1 is a plan view showing a first embodiment of an optical transceiver module according to the present invention.

FIG. 2 is a side view showing the optical transmission / reception unit used in the present embodiment.

FIG. 3 is a side view showing another optical transmission / reception unit used in the present embodiment.

FIG. 4 is a side view showing another optical transmission / reception unit used in the present embodiment.

FIG. 5 is a plan view showing a second embodiment of the optical transceiver module according to the present invention.

FIG. 6 is a plan view showing a third embodiment of the optical transceiver module according to the present invention.

FIG. 7 is a plan view showing a fourth embodiment of the optical transceiver module according to the present invention.

FIG. 8 is a plan view showing a fifth embodiment of the optical transceiver module according to the present invention.

FIG. 9 is a plan view showing a conventional optical transceiver module.

FIG. 10 is a plan view showing a conventional optical transceiver module.

[Explanation of symbols]

 Reference Signs List 1 substrate 2 optical waveguide 3 optical branching part 4 optical fiber 5 optical transmitter 6 optical receiver 8 optical multiplexer / demultiplexer 9 optical fiber 10 optical fiber 11 substrate 12 fiber guide 13 fiber guide 14 photodiode light receiving surface 15 photodiode carrier 16 reflection Face 17 optical receiver

Continuation of front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G02B ^6/ 26-6/42

Claims (9)

(57) [Claims] 1. An optical branching unit having an optical waveguide forming an optical branching part on a first substrate, an optical transmitter and an optical receiver, and an optical transmitter and an optical receiver on a second substrate. An optical transmission / reception module, comprising: an optical transmission / reception unit in which an optical fiber that is optically coupled is disposed, wherein the branched optical waveguide is optically coupled to the optical fiber. 2. An optical branching unit having an optical waveguide forming an optical branching section and an optical multiplexing / demultiplexing section on a first substrate, and an optical transmitter, an optical receiver, and the optical transmitter on a second substrate. An optical transmitting and receiving unit in which optical fibers respectively optically coupled to the optical receiver are arranged. The optical waveguide after branching is optically coupled to the optical fiber, and the optical waveguide split by the optical multiplexer / demultiplexer. An optical transceiver module, wherein a wave path is optically coupled to a second optical fiber disposed on the second substrate. 3. An optical branching unit having an optical waveguide forming an optical branching section and an optical multiplexing / demultiplexing section on a first substrate, an optical transmitter and first and second optical receivers on a second substrate. And an optical fiber optically coupled to the optical transmitter and the first optical receiver, respectively, and an optical transmitting / receiving unit having a second optical fiber optically coupled to the second optical receiver. The branched optical waveguide is optically coupled to the optical transmitter and the first optical receiver by an optical fiber, and the demultiplexed optical waveguide is optically coupled to the second optical fiber. An optical transceiver module, comprising: 4. An optical branching unit in which optical fibers respectively optically coupled to optical waveguides forming an optical branching portion on a first substrate are arranged, and an optical transmitter and an optical receiver on a second substrate. An optical transmitting and receiving unit comprising: an optical transmitting and receiving unit, wherein an optical transmitter and an optical receiver of the optical transmitting and receiving unit are optically coupled to the optical fiber. 5. The optical transceiver module according to claim 1, wherein a fiber guide for positioning an optical fiber is provided on the first or second substrate. 6. An optical branch unit having an optical waveguide forming an optical branch on a first substrate, and a fiber guide formed on the substrate so that the optical waveguide is optically coupled to an optical fiber. An optical transmitter and an optical receiver disposed on two substrates, and an optical transmitting and receiving unit having a fiber guide formed so that the optical transmitter and the optical receiver are each optically coupled to an optical fiber. An optical transceiver module, wherein an optical transmitter and an optical receiver of the optical transceiver unit and an optical waveguide after branching of the optical branch unit are optically coupled by an optical fiber. 7. A light having an optical waveguide forming an optical branching portion and an optical multiplexing / demultiplexing portion on a first substrate, and a fiber guide formed on the substrate so that the optical waveguide is optically coupled to an optical fiber. A light having a branching unit, an optical transmitter and an optical receiver disposed on a second substrate, and a fiber guide formed such that the optical transmitter and the optical receiver are each optically coupled to an optical fiber. The optical transmitter / receiver of the optical transmission / reception unit is optically coupled to the optical waveguide after branching of the optical branching unit by an optical fiber, and the optical waveguide split by the optical multiplexing / demultiplexing unit. An optical transceiver module, wherein the optical path is optically coupled to a second optical fiber disposed in a fiber guide formed on the second substrate. 8. A light having an optical waveguide forming an optical branching portion and an optical multiplexing / demultiplexing portion on a first substrate, and a fiber guide formed on the substrate so that the optical waveguide is optically coupled to an optical fiber. A branching unit, an optical transmitter and first and second optical receivers disposed on a second substrate, and the optical transmitter and the first and second optical receivers are each optically connected to an optical fiber. An optical transmitter / receiver unit having a fiber guide formed so as to be coupled, wherein an optical transmitter and a first optical receiver of the optical transmitter / receiver unit and an optical waveguide after branching of the optical branching unit are optically coupled by an optical fiber. To combine
An optical transceiver module, wherein the optical waveguide after demultiplexing and the second optical receiver are optically coupled by a second optical fiber. 9. The optical transceiver module according to claim 5, wherein said fiber guide is formed by anisotropic etching of a substrate.