JP2703345B2 - Positioning device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to an improvement in a positioning device for positioning a mask, a reticle, a wafer, and the like used in a semiconductor manufacturing apparatus or the like with high accuracy.

(Prior Art) In general, as a positioning device for positioning a mask, a reticle, a wafer, and the like used in, for example, a semiconductor manufacturing apparatus with high precision, a mask, a reticle, a wafer, and the like are accurately positioned in a plurality of directions by a plurality of drive tables. Is known. As this type, large and small frames are arranged on the same horizontal plane, and one frame can be displaced in the X direction on the substrate and the other frame can be displaced in the Y direction orthogonal to the X direction. X table and Y
Each table is formed, and a θ table that rotates and displaces around a rotation axis in a Z direction orthogonal to a horizontal plane is disposed inside a small frame formed by an X table or a Y table, and a mask, a reticle, A wafer has been developed in which a wafer or the like is minutely displaced in a rotation direction about a rotation axis in the X, Y, and Z directions by using the X table, the Y table, and the θ table. In this case, the X including the board surface of the substrate is located below the θ table.
A Z-tilt table that is displaceable in a Z direction perpendicular to the Y plane and is tiltable about first and second rotation axes arranged along the X and Y directions, respectively; By mounting the table movably in the surface direction with respect to the Z-tilt table, the θ table follows the operation of the Z-tilt table, and the mask, reticle,
The wafer can be displaced in the Z direction orthogonal to the XY plane,
In some cases, each of them can be tilted about first and second rotation axes arranged along the X and Y directions.

By the way, in the above configuration, the θ table is Z
・ It is only supported from below by a plurality of steel balls arranged at, for example, three or more places on the tilt table,
The downward force acting on the θ table is only the weight of the θ table. Therefore, for example, when the frictional force acting between the guide member for guiding the movement of the θ table in the Z direction and the sliding surface of the θ table is larger than the downward force acting on the θ table, for example, the Z-tilt table When moving downward, the θ table may be locked during descent due to frictional force between the sliding surface with the guide member, so it is difficult to make the θ table accurately follow the operation of the Z / tilt table. And the positioning accuracy deteriorates.

(Problem to be Solved by the Invention) In the case of a configuration in which a θ table is supported from below by way of a plurality of steel balls disposed at, for example, three or more places on a Z tilt table, the Z direction of the θ table The frictional force acting between the sliding surface between the guide member for guiding the movement of the
The downward force acting on the table is greater than the downward force, which may make it difficult for the θ table to accurately follow the operation of the Z / tilt table.

The present invention has been made in view of the above circumstances, and is capable of moving in a direction orthogonal to a plane including a plate surface of a substrate, and centering on first and second rotation axes arranged in two orthogonal directions. When the first table is tiltably mounted on the first table, the second table supported on the first table so as to be movable in the surface direction can accurately follow the first table, thereby improving the positioning accuracy. It is an object of the present invention to provide a positioning device that can perform the positioning.

[Structure of the Invention] (Means for Solving the Problems) The invention according to claim (1) is a substrate, a first table disposed on the substrate so as to be spaced apart from the substrate, and the first table and the substrate. And the first table is movable in a direction orthogonal to a plane including a plate surface of the substrate,
And a drive mechanism for driving the tiltable centering on a rotation axis in a plane parallel to the substrate plane, a second table spaced and opposed to the first table, and a second table. The second table disposed between the first table and the second table;
A support mechanism for supporting the table of the second table so as to be relatively movable in a direction following the surface facing the first table, and a support mechanism for supporting the table other than the direction following the surface facing the first table. And a movement direction restricting means for preventing movement in a direction.

Further, in the invention according to claim (2), the moving direction regulating means has a support rod having one end fixed to the second table and the other end extending toward the substrate of the first table, A relief portion provided on the table for avoiding contact between the support rod and the first table during relative movement of the first and second tables; and The moving direction restricting means comprising a preload generating section for generating a preload between the contact portions of the first and second tables and the support mechanism from (1) to (1). It is a positioning device.

Further, in the invention according to claim (3), the support mechanism and the movement direction regulating means are provided with magnets having different polarities at opposing portions of the first and second tables, respectively. 3. The moving mechanism according to claim 1, wherein the supporting mechanism is formed by a magnetic attraction mechanism in which a steel ball forming a supporting mechanism between the tables is disposed between the magnets. It is a positioning device.

According to a fourth aspect of the present invention, there is provided a stand in which the movement direction regulating means of the first aspect is fixed on a substrate, one end of which is fixed to an upper end of the stand, and the other end. A support arm formed with an extended portion extending to an upper position of the second table, and biasing means for biasing the extended portion of the support arm in a direction in which the extended portion is pressed against the second table. An air pad attached to the extension of the support arm and having a nozzle for ejecting air, an air supply mechanism connected to the nozzle of the air pad, and air from the nozzle of the air pad when the second table moves. Squirt
Air supply control means for stopping the ejection of air from the nozzles of the air pad when the movement of the second table is stopped is formed.

The invention according to claim (5) further comprises a wedge-shaped slider mounted on the substrate so as to be able to advance and retreat, and having an inclined surface formed on the upper surface whose height dimension gradually changes along the advance and retreat direction. Attached to the table side that is placed facing away from above,
Height adjustment mechanisms having rollers that abut against the inclined surface of the slider are arranged at at least three places between the substrate and the table, and the table moves the table surface of the substrate with each slider movement. A positioning mechanism provided with a drive mechanism that is movable in a direction orthogonal to a plane including the rotation axis and tiltably around a rotation axis in a plane parallel to the substrate plane; An arc surface centered on the center position of the roller is formed on the contact surface with the surface.

The invention according to claim (6) is characterized in that the wedge-shaped slider is mounted on the substrate so as to be able to advance and retreat, and has an inclined surface whose height dimension gradually changes along the advance and retreat direction formed on the upper surface; A height adjustment mechanism, which is mounted on the side of the table which is arranged to face away from the top and has a roller which comes into contact with the inclined surface of the slider, is arranged at at least three places between the substrate and the table, A drive mechanism is provided for driving the table in a direction orthogonal to a plane including the plate surface of the substrate in accordance with the reciprocating operation and for tilting around a rotation axis in a plane parallel to the substrate plane. In the provided positioning device, a self-aligning bearing rotatable around a center position of the roller is disposed between the roller of each of the height adjustment mechanisms and a support shaft of the roller, and on the table side. Movably serial support shaft in the axial direction is provided with a bearing portion that pivotally supports.

(Operation) In the invention according to claim (1), when the first table moves in a direction other than the direction following the surface, the second table is opposed to the first table by the movement direction regulating means. By preventing movement in a direction other than the direction following the surface, the second table can accurately follow the movement of the first table, thereby improving the positioning accuracy.

According to the invention of claim (2), a preload is generated between the contact portions of the first and second tables and the support mechanism from the substrate side by the preload generator, and the one end fixing portion of the support rod and the support rod are formed. Between the other end side extension portion and the preload generation portion.
When the first table is moved in a direction other than the direction following the surface, the second table is guided by moving the second table between the two tables in a state where relative movement only in the direction following the surface is possible. Even if the frictional force acting between the sliding surface of the guide member and the sliding surface of the second table becomes larger than the moving force of the first table, the second table is locked during the movement. To prevent the first table from moving
The first and second tables are accurately followed to improve the positioning accuracy, and at the time of relative operation of the first and second tables, the escape rods are used to avoid contact between the support rod and the first table so that the first and second tables can be contacted. This prevents the relative operation of the two tables from becoming impossible.

Furthermore, in the invention of claim (3), the second table is moved in a direction following the surface of the first table by the steel balls sandwiched between the first and second tables attracted by the magnet. And the second table moves in a direction other than the direction following the first table by attracting the first and second tables to each other by magnets having different polarities. In order to improve the positioning accuracy, the second table accurately follows the movement of the first table when the first table moves in a direction other than the direction following the surface by preventing the first table from moving. It is.

Further, in the invention according to claim (4), the air pad is separated from the second table by the pressure of the air jet from the nozzle of the air pad during the relative operation in which the second table moves in the surface direction of the first table, The relative movement in the surface direction between the first and second tables is smoothed, and the force of pressing the upper table against the first table always acts on the second table due to the jetting force of the air. When the movement of the table is stopped, the ejection of the air from the nozzles of the air pad is stopped, and the extension of the support arm is pressed against the second table by the biasing means, so that the first and second tables and the support mechanism are connected to each other. A preload is generated between the contact portions to prevent the second table from moving in a direction other than the surface direction of the first table, and to prevent the second table from moving in a direction other than the surface direction. The second table accurately follows the movement of the first table to improve the positioning accuracy.

Further, in the invention according to claim (5), the roller's arc surface is rolled along the slider's inclined surface when each slider of the height adjusting mechanism advances / retreats, so that the slider's inclined surface and the roller's center point. The distance between the slider and the roller is kept constant to prevent a partial contact between the inclined surface of the slider and the roller so that the table can be accurately positioned when the table is moved in a direction perpendicular to the plane including the plate surface of the substrate. It is like that.

According to the invention of claim (6), when the slider of the height adjusting mechanism moves forward and backward, the self-aligning bearing between the roller of each height adjusting mechanism and the support shaft of the roller makes the inclined surface of the slider smaller. While maintaining a constant distance between the roller and the center point, preventing a one-sided contact between the inclined surface of the slider and the roller, and at the time of tilting the table, the spindle is moved in the axial direction by the bearing on the table side, This prevents the rollers from slipping on the inclined surface of the slider due to the change in the distance between the rollers, and allows accurate positioning when the table is moved in a direction perpendicular to the plane including the board surface of the substrate. is there.

(Embodiment) Hereinafter, a first embodiment of the present invention will be described with reference to FIG. 1 to FIG.

FIG. 3 shows a schematic configuration of an entire positioning device used as, for example, a reticle table of a semiconductor manufacturing apparatus, and 1 is a substrate formed by a rectangular thick plate. On the upper surface of the substrate 1, a pair of support bases 2, 2
Is protruding. Each of the support tables 2 is provided with a pair of Y table guides 3 along the upper edge of the facing surface. A substantially rectangular frame-shaped Y table 5 is supported between the pair of supports 2 so as to be movable in the Y-axis direction along the Y table guides 3. In this case, a Y table drive motor 4 formed by, for example, a DC servo motor that can rotate forward and reverse is fixed to the upper surface of the substrate 1. Further, a rectangular rod-shaped Y-axis friction drive bar 6 projecting outward is fixed to the lower surface of the Y table 5.
The shaft friction drive bar 6 is a rotating shaft 4a of the Y table drive motor 4.
Is pressed at right angles from above. The Y-axis friction drive bar 6 is pressed against the rotary shaft 4a by receiving a preload by a friction drive mechanism (not shown) provided on the upper surface of the substrate 1, and is provided between the Y-axis friction drive bar 6 and the rotary shaft 4a. Slip is prevented. Therefore, the rotation of the rotation shaft 4a of the Y table drive motor 4 is transmitted to the Y-axis friction drive bar 6 via the friction pressure contact portion, and is changed to the linear movement of the Y-axis friction drive bar 6. Then, the Y table 5 is moved by the linear movement of the Y axis friction drive bar 6 so that the Y table guide 3
3 is displaced in the Y-axis direction of the coordinates indicated by the symbol A in FIG. The displacement of the Y table 5 is detected by a Y-axis sensor (not shown), and the position of the Y table 5 is feedback-controlled based on the detection result.

In the frame of the Y table 5, an X table 7 having a substantially rectangular frame shape smaller than the Y table 5 is arranged. These large and small Y, X tables 5, 7 are provided on the same horizontal plane, and between the Y table 5 and the X table 7, the X table 7 is orthogonal to the Y table 5 with respect to the Y axis direction. There are provided four X-table guides 8 for guiding in the X-axis direction. Further, a square rod-shaped X-axis friction drive bar 9 protruding outward is fixed to the lower surface of the X table 7. On the lower surface of the Y table 5, an X table driving motor 10 formed by, for example, a DC servo motor that can rotate forward and backward is fixed, and the X axis friction drive bar 9
It is pressed against the rotating shaft 10a of the table drive motor 10 at right angles from above. In this case, similarly to the Y-axis friction drive bar 6, the X-axis friction drive bar 9 also receives a preload by a friction drive mechanism (not shown) disposed on the upper surface of the substrate 1 and rotates the rotation shaft 10a.
The rotation of the rotary shaft 10a of the X-table drive motor 10 is transmitted to the X-axis friction drive bar 9 via a friction pressure contact portion, and the X-axis friction drive bar 9 The X table 7 is changed to the X table guide 8 ...
Along the X-axis direction of the coordinate A. The displacement of the X table 7 is detected by an X-axis sensor (not shown), and the position of the X table 7 is feedback-controlled based on the detection result.

Furthermore, large and small Y, X tables are set in the frame of the X table 7.
Θ table (second table) 1 on the same horizontal plane as 5 and 7
1 is located. A mounting table 11a on which a reticle (or a mask) 14 is mounted is provided substantially at the center of the θ table 11. The mounting table 11a is formed with suction ports 11b connected to a vacuum pressure source (not shown) so that the reticle 14 can be suction-fixed by a vacuum suction force. Further, the θ table 11 is a 3
The X table 7 is mounted on the X table 7 via two θ table guides 13 so as to be capable of minute rotational displacement. In this case, at least three circular arc portions 11c having the same radius are formed in the outer peripheral portion of the θ table 11, and these arc portions 11c
It is supported by the X table 7 via table guides 13. Further, the X table 7 can be rotated forward and reverse, for example, DC.
Z table drive motor formed by servo motor
The Z table drive motor 12 causes the θ table 11 to be minutely driven to rotate about a rotation axis in the Z-axis direction orthogonal to the same horizontal plane as the Y and X tables 5, 7. It has become.

A substantially rectangular frame-shaped Z is provided below the θ table 11.
A tilt table (first table) 15 is provided. Between the Z-tilt table 15 and the substrate 1, a Z-tilt drive mechanism (drive mechanism) 16, which will be described later, is provided. The Z-tilt table 15 is movable by the Z-tilt drive mechanism 16 in a direction perpendicular to a plane including the plate surface of the substrate 1, that is, in a Z direction, and in a plane parallel to the plane of the substrate 1. It is supported so as to be capable of minute rotation, that is, so-called tilting, about a rotation axis parallel to the X axis and the Y axis direction as the moving axis. Further, a plurality of steel balls 15a which are rotatable at predetermined positions are provided on the upper surface of the Z-tilt table 15, as shown in FIGS. A support mechanism 15s for supporting the θ table 11 through the support mechanism is formed. The steel balls 15a are in contact with both the θ table 11 and the Z / tilt table 15 to transmit the displacement of the Z / tilt table 15 to the θ table 11. Therefore, the θ table 11 moves up and down and tilts with respect to the substrate 1 following the movement of the Z-tilt table 15 below, and the steel ball
15a can be turned around a turning axis in the Z-axis direction. When the θ table 11 rotates, the steel ball 15
a ... function as bearings, and the rotation of the .theta.
-Transmission to the tilt table 15 is prevented.

On the other hand, the Z-tilt drive mechanism 16 is provided with height adjustment mechanisms 16a, 16b, 16c arranged at three places on the substrate 1. These height adjusting mechanisms 16a, 16b, 16c are arranged, for example, at both ends of one side of the rectangular frame of the Z-tilt table 15 and at the center of the opposite side of the rectangular frame. Further, each of the height adjusting mechanisms 16a, 16b, 16c is provided with a wedge-shaped slider 19 mounted on the substrate 1 so as to be able to advance and retreat, and a cam follower 15b mounted on the Z / tilt table 15 side. This slider 19 is formed on a substrate 1 by a Z.
The tilt drive motor 17 is driven to move forward and backward on the substrate 1 by the rotation of the rotation shaft 17b. In this case, a male screw portion is formed on the outer peripheral surface of the rotating shaft 17b of the Z-tilt drive motor 17, and a female screw-shaped screw portion that is screwed to the male screw portion is formed on the slider 19, The male screw portion and the threaded portion convert the rotation of the rotation shaft 17b of the Z / tilt drive motor 17 into a linear movement of the slider 19.

Further, on the upper surface of the slider 19, there is formed an inclined surface 18 whose height dimension gradually changes in the forward / backward direction, and the cam follower 15b contacts the inclined surface 18. And
The Z / tilt table 15 is supported on the substrate 1 via the slider 19 of each of the height adjustment mechanisms 16a, 16b, 16c and the cam follower 15b. Further, the Z / tilt drive motors 17 of the respective height adjusting mechanisms 16a, 16b, 16c are individually controlled, so that the sliders 19 can move on the substrate 1 simultaneously or separately. Here, each height adjustment mechanism 16
For example, when the rotary shafts 17b of the Z-tilt drive motors 17a, 16b and 16c are simultaneously driven to rotate in the same direction, each slider 19
Are simultaneously moved by the same distance, and the Z / tilt table 15 is moved in parallel in the Z-axis direction as the sliders 19 move. In addition, each height adjustment mechanism 16a, 16b, 16
By driving the Z / tilt drive motors 17 of c separately, the Z / tilt table 15 moves in the direction of the plate surface of the substrate 1 (horizontal plane direction) as shown in FIG. Is tilted about a rotation axis parallel to the X-axis or Y-axis direction, and the θ-table 11 is tilted via steel balls 15a following the tilting operation of the Z-tilt table 15. Has become.

Further, between the θ table 11 and the Z / tilt table 15, a movement direction restricting means 20 for preventing the θ table 11 from moving in a direction other than the surface direction of the Z / tilt table 15 is provided. The moving direction regulating means 20 has four T's.
Bars 21 are provided. As shown in FIGS. 1 and 2, the T bar 21 is provided with a connecting member 22 formed of a plate material and a columnar support rod 23 protruding from the center of the upper surface of the connecting member 22. . Also, θ table
At four corners of 11, insertion holes 24 for the support rod 23 are formed. Further, the four corners of the Z / tilt table 15 have θ
At the position corresponding to each insertion hole 24 of the table 11, the support rod 23
Rectangular holes 25 of an appropriate size are formed to escape contact with the holes. These Z-tilt table 15 rectangular holes
25 is formed sufficiently larger than the outer diameter of the support rod 23. A thread 26 is formed at the tip of the support rod 23 of each T-bar 21.
26 are inserted from below into the rectangular holes 25 of the Z / tilt table 15 and the insertion holes 24 of the θ table 11, respectively.
Is screwed by a fixing screw 27 on the upper surface side. Further, at both ends of the upper surface of the connecting member 22 of each T bar 21, a preload generating section 28 is provided. These preload generators
28 is formed, for example, by a one-point ball bearing 28a. This one point ball bearing 28
a is attached to the connecting member 22 via a highly rigid spring member such as a disc spring. And each T bar 21
At the time of mounting, the one-point ball bearings 28a, 28a of each T-bar 21 are pressed against the lower surface of the Z-tilt table 15 from the lower side. Between the ball bearings 28a, 28a, the θ table 11, each steel ball 15a, and the Z / tilt table 1
5 are integrally held, so that relative movement between the θ table 11 and the Z / tilt table 15 other than in the plane direction is restricted. Further, for example, the θ table 11 is displaced in the X-axis direction and the Y-axis direction with respect to the Z / tilt table 15,
During relative movement in the plane direction between the θ table 11 and the Z / tilt table 15 displaced in the rotation direction about the rotation axis in the Z-axis direction, each of the positions between the θ table 11 and the Z / tilt table 15 Rolling operation of steel balls 15a and Z / tilt table 15
.. Table 11 can be smoothly moved along the Z / tilt table 15 by the rolling operation of the one-point ball bearings 28a of each T bar 21 along the lower surface of the. Further, at the time of relative movement in the plane direction between the θ table 11 and the Z / tilt table 15, the θ table 11 and each T-bar 21... Move integrally with the Z / tilt table 15. , Rectangular holes 25 at the four corners of the Z / tilt table 15
The support rod 23 of each T-bar 21... And the .theta. Table 11 can freely move in the X-axis direction, the Y-axis direction, and the rotation direction.

Therefore, in the above configuration, the movement direction regulating means
20 between the screwed portion at the upper end of each T-bar 21 and the one-point ball bearings 28a, 28a, the θ table 11, the steel balls 1
5a ..., the Z / tilt table 15 is integrally held to prevent the θ table 11 from moving in a direction other than the surface direction of the Z / tilt table 15, so that the Z / tilt table 15 is When the θ table 11 moves in a direction other than the surface direction of the Z / tilt table 15 such as when the θ table 11 is displaced in the direction or tilted about a rotation axis parallel to the X-axis or Y-axis direction, each T The weight of the Z / tilt table 15 and each of the T bars 21... Can act on the θ table 11 as a downward force via the bar 21. Therefore, for example, when the Z / tilt table 15 moves downward, the frictional force acting between the sliding surfaces of the θ table guides 13... Which guide the movement of the θ table 11 in the Z direction and the arc portion 11 c of the θ table 11. Is larger than the downward force of the θ table 11 due to its own weight, it is possible to prevent the θ table 11 from being locked halfway down as in the related art.
The θ table 11 can accurately follow the operation of the Z / tilt table 15, and the positioning accuracy can be improved.

The θ table 11 is provided at the four corners of the Z / tilt table 15.
Since rectangular holes 25 serving as escape portions for escaping contact with the support rod 23 are formed at positions corresponding to the respective insertion holes 24, and the support rod 23 is inserted into these rectangular holes 25, the θ table 11 and Z During the relative movement in the plane direction with the tilt table 15, the contact between the support rod 23 and the Z / tilt table 15 can be avoided by these rectangular holes 25.
It is possible to prevent the relative operation of the Z / tilt table 15 from being disabled.

FIG. 5 shows a second embodiment of the present invention.

This is because, as the movement direction restricting means 20 for preventing the θ table 11 from moving in a direction other than the plane direction of the Z / tilt table 15, the permanent magnets 30, 31 is attached, and the steel balls 15a forming the support mechanism 15s between the θ table 11 and the Z / tilt table 15 are attracted by the permanent magnets 30, 31 of the θ table 11 and the Z / tilt table 15. This is formed by the mechanism 32. In this case, for example, the θ table 11 and the Z table 11 are displaced in the X-axis direction and the Y-axis direction with respect to the Z-tilt table 15 or are displaced in the rotation direction around the rotation axis in the Z-axis direction. When the relative movement in the plane direction with the tilt table 15 is performed, the θ table 11 is smoothly moved along the Z-tilt table 15 by the rolling operation of the steel balls 15 a between the θ table 11 and the Z-tilt table 15. Can be moved.

Therefore, in this case, the steel balls 15a forming the support mechanism 15s between the θ table 11 and the Z / tilt table 15 are fixed to the respective permanent magnets of the θ table 11 and the Z / tilt table 15.
The suction by the 30, 31 can prevent the θ table 11 from moving in a direction other than the surface direction of the Z / tilt table 15. Therefore, as in the case where the Z-tilt table 15 is displaced in the Z-axis direction or tilted about a rotation axis parallel to the X-axis or Y-axis direction, the θ table 11 Guides the movement of the θ table 11 in the Z direction when moving in a downward direction other than
Even if the frictional force acting between the sliding surfaces of the table guides 13 and the arc portion 11c of the θ table 11 becomes larger than the downward force of the θ table 11 due to its own weight, as in the related art, 11 can be prevented from being locked during descent.
15 can accurately follow the operation, and the positioning accuracy can be improved. In the second embodiment, the steel balls 15 forming the support mechanism 15s by the attraction of the permanent magnets 30, 31 of the θ table 11 and the Z / tilt table 15 are used.
a ... can be held, so steel balls 1
The holding mechanism of 5a ... can be omitted. Therefore, the number of components can be reduced as compared with the case where a plurality of T bars 21 and one-point ball bearings 28a, 28a are provided as in the first embodiment, and the configuration can be simplified. Furthermore, since the gap between the Z / tilt table 15 and the substrate 1 can be reduced, the entire positioning device can be made thinner and smaller.

6 to 9 show a third embodiment of the present invention.

As shown in FIG. 6, there are three stands 41 fixed on the substrate 1 as movement direction regulating means 20 for preventing the θ table 11 from moving in a direction other than the plane direction of the Z / tilt table 15. At the other end of the support arm 42, one end of which is fixed to the upper end of each stand 41, and an extension 43 extending to the upper position of the θ table 11 is formed at the other end of the support arm 42. A notch 44 is formed between the end side and the extension 43 to form a notch spring-like urging means for urging the extension 43 in the direction of pressing the extension 43 against the θ table 11. As shown in FIG. 7, an air pad 46 provided with a nozzle 45 for ejecting air is attached to the extension portion 43 of FIG. In this case, the air pad 46 is provided with a clamp plate 47 and a support member 48 for the clamp plate 47. A nozzle 45 is formed at the center of the clamp plate 47.
A flange 48b is formed at the lower end of a cylindrical support rod 48a in the support member 48.
Is fixed to the clamp plate 47.

Further, an air supply path 48c connected to the nozzle 45 is formed inside the support rod 48a. One end of an air supply pipe 49 is connected to the upper end of the air supply path 48c. The other end of the air supply pipe 49 is connected to a stand 41.
And the lower arm supply passage 50 formed in the support arm 42. Further, the air supply passage 50 is connected to an appropriate air supply source 51 such as an air compressor. The air supply source 51, the air supply passage 50, the air supply pipe 49, and the air supply passage 48c
An air supply mechanism 52 to 5 is formed. The air supply source 51 of the air supply mechanism 52 is connected to an air supply control means 53. The air supply control means 53 controls the air pad 46 when the θ table 11 and the Z / tilt table 15 are relatively moved in the plane direction. Jet high pressure air from the nozzle 45,
When the relative movement of the θ table 11 and the Z / tilt table 15 in the plane direction is stopped, the operation is controlled so that the ejection of air from the nozzle 45 of the air pad 46 is stopped.

Furthermore, the support rod 48a of the air pad 46 and the support arm 4
An automatic alignment device 54 is mounted between the second extension portion 43 and the second extension portion 43. This self-aligning device 54 is formed by a spherical body 54a mounted on the support rod 48a side and a bearing 54b mounted on the extension 43 side. Whatever the orientation of the θ table 11, the self-aligning device 54 holds the θ table 11 and the clamp plate 47 of the air pad 46 in a parallel state.

Therefore, in the above configuration, the air supply control means
The operation of the air supply source 51 is controlled by 53, and the θ table
At the time of relative operation of the plane 11 and the Z / tilt table 15 in the plane direction, high-pressure air is blown from the nozzle 45 of the air pad 46, and as shown in FIG. Separate the clamp plate 47 of the air pad 46 from the θ table 11 and
Table 11 according to the jet pressure of air from the nozzle 45
Floating can be prevented. Therefore, for example, θ
The table 11 is in the X-axis direction with respect to the Z / tilt table 15,
The θ table 11 and the Z / tilt table that are displaced in the Y-axis direction or displaced in the rotation direction about the rotation axis in the Z-axis direction.
During the relative movement in the plane direction between the table 15 and the table 15, the clamp table 47 of the air pad 46 and the table 11 can be held in a non-contact state. The θ table 11 can be smoothly moved along the Z / tilt table 15 by the rolling operation of the steel balls 15a.

Further, when the relative movement of the θ table 11 and the Z / tilt table 15 in the plane direction is stopped, the ejection of air from the nozzle 45 of the air pad 46 is stopped, and the notch spring formed in the extension 43 of the support arm 42 is formed. As shown in FIG. 8, the extension 43 of the support arm 42 is pressed against the θ table 11 by the urging means, and the notch spring-like urging means formed on the extension 43 of the support arm 42 causes the Z · Tilt table 15, θ table 11
The preload is generated between the contact portions of the support mechanism 15s and the steel balls 15a, so that the θ table 11 can be prevented from moving in a direction other than the surface direction of the Z / tilt table 15. . Therefore, as in the case where the Z-tilt table 15 is displaced in the Z-axis direction or tilted about a rotation axis parallel to the X-axis or Y-axis direction, the θ-table 11
Θ table guide for guiding the movement of the θ table 11 in the Z direction when the tilt table 15 moves downward other than the surface direction.
Even if the frictional force acting between the sliding surfaces of the .theta. Table 11 and the arc portion 11c of the .theta. Table 11 becomes larger than the downward force of the .theta. Table 11 due to its own weight, the .theta.
Since it is possible to prevent the 11 from being locked during the descent, the θ table 11 can accurately follow the operation of the Z / tilt table 15, and the positioning accuracy can be improved.

Furthermore, the support rod 48a of the air pad 46 and the support arm 4
The self-aligning device 54 is mounted between the second extending portion 43 and the θ-table 11 and the clamp plate 47 of the air pad 46 by the self-aligning device 54 regardless of the posture of the θ-table 11 in any posture. Between the two in a parallel state,
For example, as shown in FIG.
Can be constantly stabilized even when the .theta. Table 11 is separated from the .theta. Table 11, and reliability can be improved.

FIG. 10 to FIG. 12 show a fourth embodiment of the present invention.

This is a modification of the configuration of the height adjustment mechanisms 16a, 16b, 16c of the Z-tilt drive mechanism 16 of the first embodiment. That is, in this embodiment, as shown in FIG. 10, three cam followers 15b formed by rollers 61 are arranged on the lower surface of the Z-tilt table 15, and as shown in FIG. Height adjustment mechanisms 16a, 16b, 16
While each slider 19 of c is arranged facing each other,
As shown in FIG. 12, an arc surface 62 having a radius R with the center O at the center position of the roller 61 is formed on the contact surface of each roller 61 with the inclined surface 18 of the wedge-shaped slider 19. In this case, each roller 61 forming the three cam followers 15b
The support shaft 63 is mounted on a bearing member 64 protruding from the lower surface of the Z-tilt table 15.

Therefore, in the above configuration, the roller 61 is provided with a roller abutting surface with the inclined surface 18 of the wedge-shaped slider 19.
Since the arc surface 62 having the radius R with the center O at the center position of the center 61 is formed, the Z / tilt drive motors 17 of the respective height adjusting mechanisms 16a, 16b, 16c are separately driven, so that each slider 19
The Z / tilt table 15 is moved in the X-axis or Y-axis direction with respect to the plate surface direction (horizontal plane direction) of the substrate 1 as shown in FIG. When tilted about the parallel rotation axis, the interval R between the inclined surface 18 of the slider 19 and the center point O of the roller 61 can be always kept constant. Therefore, for example, a contact surface of each roller 61 with the inclined surface 18 of the wedge-shaped slider 19 is formed by a cylindrical surface parallel to the inclined surface 18, and each of the rollers 61 is held in a state where the Z-tilt table 15 is held in a horizontal position. As in the case where the contact surface between the roller 61 and the inclined surface 18 of the slider 19 is in surface contact, the Z-tilt table 15 is parallel to the X-axis or Y-axis direction with respect to the plate surface direction (horizontal plane direction) of the substrate 1. It is possible to prevent the one-sided contact between the inclined surface 18 of the slider 19 and the roller 61 when the roller is tilted about the rotation axis.
Positioning when the tilt table 15 is moved in a direction orthogonal to a plane including the plate surface of the substrate 1 can be accurately performed.

FIG. 13 to FIG. 16 show a fifth embodiment of the present invention.

This is a further modification of the configuration of the height adjustment mechanisms 16a, 16b, 16c of the Z-tilt drive mechanism 16 of the fourth embodiment. That is, in this embodiment, as shown in FIG.
The contact surface of each roller 71 forming the three cam followers 15b on the lower surface of the tilt table 15 with the inclined surface 18 of the wedge-shaped slider 19 is formed by a cylindrical surface 71a parallel to the inclined surface 18. And the contact surface of the slider 19 with the inclined surface 18 is brought into surface contact, and the height adjustment mechanisms 16a, 16b,
As shown in FIG. 14, a self-aligning bearing 73 rotatable about the center position of the roller 71 is disposed between the roller 71 of 16c and the support shaft 72 of the roller 71, and a Z-tilt table On the 15 side, a linear shaft that supports the spindle 72 so that it can move in the axial direction
A ball bush (bearing portion) 74 is provided. In this case, a large-diameter roller mounting portion 72a is provided on the inner end side of the support shaft 72 of the roller 71. And self-aligning bearing 73
Is disposed between the roller mounting portion 72a and the roller 71. Further, in the self-aligning bearing 73, for example, a large number of cylindrical rollers 73c are arranged in a double row between an inner ring 73a on the roller mounting portion 72a side and an outer ring 73b on the roller 71 side. The inner surface (track surface) is formed by a self-aligning radial roller bearing having a spherical surface.
The linear ball bush 74 is a Z-tilt table
The guide ring 74a is fitted in a mounting hole 76 formed at the tip of a support arm 75 protruding from the lower surface of the guide arm 15 and a number of balls 74b included in the guide ring 74a. The guide ring 74a is mounted on the support shaft 72 of the roller 71 via a number of balls 74b.
Further, fixing nuts 77 are screwed to both ends of the support shaft 72, and the Z / tilt table 15 side is located between the fixing nut 77 on the outer end side of the support shaft 72 and the roller mounting portion 72a. It is movable in the axial direction along the support shaft 72.

Therefore, in the above configuration, each height adjusting mechanism 16
A self-aligning bearing 73 rotatable around the center position of the roller 71 is disposed between the roller 71 of a, 16b, 16c and the support shaft 72 of the roller 71, and further, on the Z / tilt table 15 side. Spindle
Since the linear ball bush 74 that supports the 72 so as to be movable in the axial direction is provided, the Z / Z of each height adjustment mechanism 16a, 16b, 16c is set.
By separately driving the tilt drive motor 17, the movement amount of each slider 19 is appropriately changed, and according to the movement amount of each slider 19, as shown in FIG.
Is tilted about a rotation axis parallel to the X-axis direction or the Y-axis direction with respect to the plate surface direction (horizontal plane direction) of the substrate 1, the rollers 71 of the height adjusting mechanisms 16 a, 16 b, 16 c and this The distance between the inclined surface 18 of the slider 19 and the center point O of the roller 71 can be kept constant by the self-centering bearing 73 between the roller 71 and the support shaft 72. Therefore, when the Z-tilt table 15 is tilted, it is possible to prevent the one-sided contact between the inclined surface 18 of the slider 19 and the roller 71.
15 positioning in the Z direction can be performed accurately.

Further, when the Z-tilt table 15 is tilted, the support shaft 72 is moved in the axial direction by the linear ball bush 74 on the Z-tilt table 15 side. To prevent the roller 71 from slipping, so that when the Z-tilt table 15 is tilted,
It is possible to prevent the tilt table 15 from being displaced in the lateral direction from the reference position held in a horizontal state,
The positioning accuracy can be improved.

The effect of preventing the Z-tilt table 15 of the fifth embodiment from being displaced in the horizontal direction at the time of tilting is shown in FIGS. 15 and 16 in the height adjustment mechanism 16 of the fifth embodiment.
a, 16b, and 16c, and models of height adjustment mechanisms 16a, 16b, and 16c in which the support shaft 72 is fixedly supported on the Z-tilt table 15 side shown in FIGS. 17 to 19. This will be described while comparing with FIG.

First, in the models of FIGS. 17 to 19, 81 is a rigid fixed rod (corresponding to a temporary connecting rod connecting the left and right rollers 71, 71), and 82a, 82b are at both ends of the rod 81, respectively. The rollers which are firmly fixed by the two fixing pins 83 (corresponding to the left and right rollers 71, 71) and 84a, 84b are a pair of left and right elevating members (corresponding to the left and right sliders 19, 19) which move up and down. ). Further, in this model, FIG. 17 shows a state in which the rod 81 is held at the reference horizontal position, FIG. 18 shows a state in which the right lifting member 84b is raised from the reference horizontal position to tilt the rod 81, and FIG. The figure shows a state in which the rod 81 is returned to the horizontal posture by elevating the left elevating member 84a according to the height of the right elevating member 84b.

Then, in this model, as shown in FIG.
Is tilted, the left roller 82a rolls left on the surface of the elevating member 84a by δ ₁ = rθ, and the right roller 82a
b moves leftward on the surface of the elevating member 84b by δ ₂ = LL cos θ. Therefore, by moving the rod 81 from the reference horizontal position to the tilt position, the right roller 82b slides on the surface of the elevating member 84b. Further, as shown in FIG. 19, when the left lifting member 84a is raised from this tilted position to return the rod 81 to the horizontal posture, the right roller 82
b rolls rightward on the surface of the elevating member 84b by δ ₁ = rθ, and the left roller 82a moves while sliding leftward on the surface of the elevating member 84a. Therefore, when the rod 81 is moved from the reference horizontal position (initial state) shown in FIG. 17 to the position returned to the horizontal posture shown in FIG. 19 through the tilting state shown in FIG. point O ₁ will be shifted from the initial state only Δx. Accordingly, the displacement Δx of the center point O ₁ during the movement of the rod 81 in the Z direction is equal to the Z · tilt table.
Since it appears as a meandering motion during movement in the Z direction of 15,
This is a problem in improving the positioning accuracy of the Z / tilt table 15.

On the other hand, in the models shown in FIGS. 15 and 16, reference numeral 91 denotes an extensible rod (corresponding to a temporary connecting rod connecting the right and left rollers 71, 71), and 92a and 92b denote both end portions of the rod 91. Rollers (corresponding to the left and right rollers 71, 71) which are firmly fixed by two fixing pins 93, 93 respectively, and 94a, 94b are bearings (left and right rollers 71) rotatably supporting the rollers 92a, 92b. ,
Reference numerals 71a and 95b denote a pair of left and right elevating members (corresponding to the right and left sliders 19 and 19), respectively, which move up and down. Further, in this model, the position indicated by the dotted line in FIG. 15 is a state where the rod 91 is held at the reference horizontal position, and the position indicated by the solid line in FIG. FIG. 16 shows a state in which the rod 91 is returned to the horizontal posture by raising the left elevating member 95a in accordance with the height of the right elevating member 95b.

In this model, the rod indicated by the dotted line in FIG.
During the operation of raising the right elevating member 95b from the reference horizontal position 91, the rollers 92a, 92b rotate within the bearings 94a, 94b and move to the tilting position of the rod 91 shown by the solid line in FIG. During the tilting operation of the rod 91, the sliding of the bearings 94a and 94b does not occur on the surfaces of the elevating members 95a and 95b, so that the rod 91 is deformed into an elongated state. Further, when the left elevating member 95a is raised from this tilted position and the rod 91 is returned to the horizontal position as shown in FIG. 16, the rollers 92a and 92b are similarly rotated in the bearings 94a and 94b while FIG. Rod 9 shown by the solid line
Move from the tilt position 1 to the horizontal posture shown by the solid line in FIG. Since the bearings 94a and 94b do not slide on the surfaces of the elevating members 95a and 95b even during the movement of the rod 91, the length of the rod 91 is reduced. Therefore, during the movement in the Z direction in this model, since the shift of the center point O ₂ of the rod 91 does not occur, it is possible to prevent meandering operation of Z · tilt table 15, improving the positioning accuracy of Z · tilt table 15 Can be achieved.

The present invention is not limited to the above embodiments. For example, the number of T-bars 21 in the first embodiment is not limited to four, and the θ table 11 and the Z-tilt table
Any suitable number may be used as long as the configuration can stably hold 15. Further, in each of the above-described embodiments, the configuration in which the operation of the lower Z / tilt table 15 is transmitted to the upper θ table 11 has been described, but these may be arranged in reverse. Further, the substrate 1 does not necessarily need to be arranged in a horizontal state. Further, the T bar 21 of the first embodiment may be provided with a static pressure type preload mechanism instead of the one-point ball bearing 28a.

Further, an electromagnet may be used instead of the permanent magnets 30 and 31 of the second embodiment.

Further, in the third embodiment, the stand 41 fixed on the substrate 1 is provided at three places as the movement direction regulating means 20 and a clamp mechanism is provided on each of the stands 41. The number is not particularly limited. In the third embodiment, the support arm
The cutout portion 44 is formed between the fixed end portion side of 42 and the extending portion 43 to form a cutout spring-like biasing means, but instead of the cutout spring-like biasing means, A configuration using a leaf spring may be used.

Further, it goes without saying that various modifications can be made without departing from the spirit of the present invention.

According to the invention of claim (1), the movement direction restricting means prevents the second table from moving in a direction other than the direction following the surface of the first table. When the table moves in a direction other than the direction following the surface, the second table can accurately follow the movement of the first table, and the positioning accuracy can be improved.

Further, according to the invention of claim (2), a preload is generated between the contact portions of the first and second tables and the support mechanism from the substrate side by the preload generating portion, and the one end fixing portion of the support rod and the preload are generated. The first and second tables are held between the preload generating portion of the extension portion on the other end side of the support rod in a state where relative movement only in the direction following the surface can be performed. When moving in a direction other than the direction following the surface, the frictional force acting between the sliding surface between the guide member for guiding the movement of the second table and the second table is smaller than the moving force of the first table. Even if the size of the first table becomes large, the second table is prevented from being locked during the movement, and the second table accurately follows the movement of the first table, thereby improving the positioning accuracy. During the relative operation of the first and second tables. Since to avoid contact of the support rod and the first table by the Department, it is possible to prevent the first relative operation of the second of the two tables becomes impossible.

Further, according to the invention of claim (3), the direction in which the second table follows the surface of the first table by the steel balls sandwiched between the first and second tables attracted by the magnet. Can be moved smoothly,
Since the first and second tables are attracted to each other by magnets having different polarities, it is possible to prevent the second table from moving in a direction other than the direction following the surface of the first table, When the first table moves in a direction other than the direction following the surface, the second table can accurately follow the movement of the first table, and the positioning accuracy can be improved.

Further, according to the invention of claim (4), the air pad is separated from the second table by the pressure of the air ejected from the nozzle of the air pad during the relative operation in which the second table moves in the surface direction of the first table. I tried to make it
The relative movement in the surface direction between the first and second tables can be smoothed, and when the movement of the second table is stopped, the ejection of air from the nozzle of the air pad is stopped, and the support arm is moved by the urging means. The extension of the first table is pressed against the second table, so that a preload is generated between the contact portions of the first and second tables and the support mechanism, and the second table is placed in the surface direction of the first table. When the first table moves in a direction other than the surface direction by preventing the first table from moving in a direction other than the surface direction, the second table accurately follows the movement of the first table to improve the positioning accuracy. be able to.

Further, according to the invention of claim (5), the arc-shaped surface of the roller is rolled along the inclined surface of the slider when each slider of the height adjusting mechanism moves forward and backward, so that the inclined surface of the slider is When the table is moved in a direction perpendicular to a plane including the plate surface of the substrate, the distance between the roller and the center point can be kept constant to prevent a partial contact between the inclined surface of the slider and the roller. Can be accurately positioned.

According to the invention of claim (6), when the slider of the height adjusting mechanism moves forward and backward, the slider is tilted by the self-aligning bearing between the roller of each height adjusting mechanism and the support shaft of the roller. The distance between the roller surface and the center point of the roller is kept constant to prevent one-sided contact between the slider's inclined surface and the roller.In addition, when the table is tilted, the spindle is moved in the axial direction by the bearing on the table side. To prevent the rollers from slipping on the inclined surface of the slider due to a change in the distance between the rollers, so that the table can be accurately positioned when the table is moved in a direction orthogonal to the plane including the plate surface of the substrate. Can be made.

[Brief description of the drawings]

1 to 4 show a first embodiment of the present invention. FIG. 1 is a longitudinal sectional view of a main part showing a preload generating mechanism, and FIG.
FIG. 3 is an exploded perspective view of a preload generating mechanism, FIG. 3 is an exploded perspective view showing a schematic configuration of the entire positioning device, FIG. 4 is a longitudinal sectional view showing a schematic configuration of a Z-direction drive mechanism, and FIG. FIGS. 6 to 9 show a third embodiment of the present invention. FIG. 6 is a perspective view showing a state in which a support arm of an air pad is attached. , FIG. 7 is a longitudinal sectional view of the same, FIG. 8 is a longitudinal sectional view of a principal part showing a state of the θ table when the movement is stopped, and FIG. 9 is a longitudinal sectional view of a principal part showing a state of the θ table being moved. 10 to 12 show a fourth embodiment of the present invention. FIG. 10 is a plan view showing the arrangement of rollers on the lower surface of a Z / tilt table, and FIG. 11 is a height adjusting mechanism. FIG. 12 is a side view showing a schematic configuration of the slider, FIG. 12 is a side view showing a joint portion between the inclined surface of the slider of the height adjusting mechanism and the roller, and FIGS. 13 shows a fifth embodiment of the present invention. FIG. 13 is a side view showing a schematic configuration of a height adjusting mechanism, FIG. 14 is a longitudinal sectional view of a main part, and FIGS. FIG. 15 shows a model for explaining the operation of the adjustment mechanism, FIG. 15 is a schematic configuration diagram showing a state in which the model is moved to a tilt position, and FIG. 16 shows a state in which the model is returned to a horizontal posture. 17 to 19 show a model for comparison with the fifth embodiment of the present invention, and FIG. 17 is a schematic diagram showing a state in which this model is held at a reference horizontal position. FIG. 18 is a schematic configuration diagram showing a state in which the model is moved to a tilt position, and FIG. 19 is a schematic configuration diagram showing a state in which the model is returned to a horizontal posture. 1... Substrate, 11... Θ table (second table), 15
…… Z-tilt table (first table), 15a ……
Steel ball, 15 s... Support mechanism, 16... Z-tilt drive mechanism (drive mechanism), 20.

Claims (6)

(57) [Claims] 1. A substrate, a first table spaced and opposed on the substrate, and a first table disposed between the first table and the substrate, wherein the first table is mounted on a surface of the substrate. A drive mechanism that is movable in a direction perpendicular to a plane including the drive mechanism, and that is driven to be tiltable about a rotation axis in a plane parallel to the substrate plane, and is disposed on the first table so as to be spaced apart and opposed to the first table. A second table, the second table and the first table,
A support mechanism disposed between the first table and the second table, the support mechanism supporting the second table so as to be relatively movable in a direction following the surface facing the first table; A movement direction regulating means for preventing movement in a direction other than the direction following the surface facing the table. 2. A moving direction regulating means, wherein one end is fixed to a second table, and the other end is provided on the first table and a support rod extending to the substrate side of the first table. 1, an escape portion for avoiding contact between the support rod and the first table during relative movement of the second table, and an extension portion of the support rod extending toward the substrate, wherein the first and second portions are provided from the substrate direction. 2. The positioning device according to claim 1, wherein said positioning device is a movement direction restricting means including a preload generating portion for generating a preload between a contact portion of said table and said support mechanism. 3. The support mechanism and the movement direction regulating means are first and second.
Magnets having different polarities are provided at respective opposing portions of the two tables, and a steel ball forming a support mechanism between the first and second tables is formed by a magnetic attraction mechanism disposed between the magnets. The positioning device according to claim 1, wherein the positioning device is a support mechanism and a movement direction regulating unit. 4. A moving direction regulating means, comprising: a stand fixed on a substrate; one end fixed to an upper end of the stand;
A support arm having, at the other end, an extension that extends to an upper position of the second table; and a bias that biases the extension of the support arm in a direction of pressing the second arm against the second table. Means, an air pad mounted on the extension of the support arm and having a nozzle for air ejection, an air supply mechanism connected to the nozzle of the air pad, and a nozzle of the air pad when the second table is moved. And air supply control means for stopping the ejection of air from the nozzle of the air pad when the movement of the second table is stopped. ). 5. A wedge-shaped slider which is mounted on a substrate so as to be able to advance and retreat and has an inclined surface whose height dimension gradually changes in the advance and retreat direction is formed on an upper surface of the slider, and is arranged on the substrate so as to be spaced apart and opposed to each other. Height adjustment mechanisms mounted on the table side and provided with rollers abutting on the inclined surface of the slider are arranged at at least three places between the substrate and the table, and the table is moved with the advance / retreat operation of each slider. A positioning device provided with a drive mechanism that is movable in a direction orthogonal to a plane including the plate surface of the substrate, and that can be tiltably driven about a rotation axis in a plane parallel to the substrate plane; A positioning device, wherein an arc surface centered on a center position of the roller is formed on a contact surface of the roller with the inclined surface of the slider. 6. A wedge-shaped slider which is mounted on a substrate so as to be able to advance and retreat and has an inclined surface whose height gradually changes in the direction of advance and retreat is formed on the upper surface of the slider and is spaced apart and opposed to the substrate. Height adjustment mechanisms mounted on the table side and provided with rollers abutting on the inclined surface of the slider are arranged at at least three places between the substrate and the table, and the table is moved with the advance / retreat operation of each slider. A positioning device provided with a drive mechanism that is movable in a direction orthogonal to a plane including the plate surface of the substrate, and that can be tiltably driven about a rotation axis in a plane parallel to the substrate plane; A self-aligning bearing rotatable around a center position of the roller is disposed between a roller of each height adjusting mechanism and a support shaft of the roller, and the support shaft is axially moved to the table side. Possible Positioning apparatus characterized in that a bearing portion that pivotally supports.