JP2607087B2 - Ultrasonic drive - Google Patents
Ultrasonic driveInfo
- Publication number
- JP2607087B2 JP2607087B2 JP62180254A JP18025487A JP2607087B2 JP 2607087 B2 JP2607087 B2 JP 2607087B2 JP 62180254 A JP62180254 A JP 62180254A JP 18025487 A JP18025487 A JP 18025487A JP 2607087 B2 JP2607087 B2 JP 2607087B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric vibrator
- rotating body
- voltage
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000004323 axial length Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、円筒状の圧電体振動子の内外面に形成した
電極を隙間を設けて分割した超音波駆動装置に関するも
のである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic drive device in which electrodes formed on inner and outer surfaces of a cylindrical piezoelectric vibrator are divided by providing a gap.
従来技術 近年、リング状または円盤状のセラミック圧電体等の
圧電体振動子に交流電圧を印加し、圧電体振動子の端面
または側面に回転体を圧接した超音波モータが提案され
ている。2. Description of the Related Art In recent years, there has been proposed an ultrasonic motor in which an AC voltage is applied to a piezoelectric vibrator such as a ring-shaped or disk-shaped ceramic piezoelectric body, and a rotating body is pressed against an end face or a side face of the piezoelectric vibrator.
発明が解決しようとする問題点 しかしながら、これら従来の超音波モータにおいて、
リング状の圧電体振動子の隣合った部分が互いに反内方
向に分極された多数の分極部分を構成し、それぞれの分
極部分に互いに90゜移相のずれた交流電圧を印加しなけ
ればならず、構成が複雑になるという問題があった。Problems to be Solved by the Invention However, in these conventional ultrasonic motors,
Adjacent parts of the ring-shaped piezoelectric vibrator constitute a number of polarized parts that are polarized in the opposite direction to each other, and AC voltages that are 90 ° out of phase with each other must be applied to each polarized part. However, there is a problem that the configuration becomes complicated.
また、円盤状の圧電体振動子でも、同様に部分的に分
極し、分極した部分に電極をそれぞれ設け、電圧を印加
して側面に回転振動を生じさせるようにしているが、構
成が複雑であるという問題があった。Similarly, a disk-shaped piezoelectric vibrator is also partially polarized, and electrodes are respectively provided on the polarized portions, and a voltage is applied to generate rotational vibration on the side surface, but the configuration is complicated. There was a problem.
問題点を解決するための手段 本発明は、上記問題点を解決するために、内面と外面
の間で分極した円筒状のセラミック圧電体振動子と、該
圧電体振動子の内面と外面に円筒の軸方向に直線状に形
成したそれぞれ対向する2つの隙間によってそれぞれ2
つに分割され、前記内面と外面の隙間を所望の角度でず
らし、かつ分割された部分の一部が内面と外面で互いに
重なり合うように構成した内電極及び外電極と、該内電
極及び外電極のそれぞれ1つの分割された電極に1つの
周波数の交流電圧を印加する1つの交流電源と、前記圧
電体振動子の端面又は側面に組合わせた回転体とからな
ることを特徴とする。Means for Solving the Problems In order to solve the above problems, the present invention provides a cylindrical ceramic piezoelectric vibrator polarized between an inner surface and an outer surface, and a cylindrical piezoelectric vibrator on the inner and outer surfaces of the piezoelectric vibrator. Are formed by two opposing gaps formed linearly in the axial direction of
An inner electrode and an outer electrode, wherein the inner and outer electrodes are separated from each other at a desired angle, and a part of the divided portion is overlapped on the inner and outer surfaces. And a rotating body combined with an end face or a side face of the piezoelectric vibrator to apply an AC voltage of one frequency to each of the divided electrodes.
作用 本発明によれば、円筒状の圧電体振動子の内電極と外
電極をそれぞれ対向する2つの隙間によってそれぞれ2
つに分割し、対向する2つの隙間を所望の角度でずら
し、分割された部分の一部が内面と外面で互いに重なり
合うように構成し、内電極と外電極の分割した電極のそ
れぞれ1つに1つの周波数の交流電圧を印加することに
より、圧電体振動子の端面または側面に正転または逆転
する回転振動が発生するので、この回転振動の発生する
部分に回転体を組合わせることにより回転体を回転する
ことができる。According to the present invention, the inner electrode and the outer electrode of the cylindrical piezoelectric vibrator are each separated by two opposing gaps.
And the two opposing gaps are shifted at a desired angle so that a part of the divided part is overlapped on the inner surface and the outer surface, and each of the inner electrode and the outer electrode is divided into one. By applying an AC voltage of one frequency, a rotating vibration that rotates forward or backward is generated on the end face or side face of the piezoelectric vibrator. By combining the rotating body with the portion where the rotating vibration is generated, the rotating body is rotated. Can be rotated.
実施例 第1図は、本発明の実施例の超音波駆動装置のステー
タの構成図で、内側と外側に分極した円筒状のセラミッ
ク振動子等の圧電振動子1の内面及び外面にそれぞれ円
筒の軸方向に形成された直線状の隙間2c、2d及び3c、3d
によって分割された内電極2a、2b及び外電極3a、3bを設
ける。そして、内電極2a、2b及び外電極3a、3bの隙間2
c、2d及び3c、3dを互いに所望の角度だけずらして設け
ることにより、内電極2a、2b及び外電極3a、3bのそれぞ
れ一部が重なり合うように構成され、そして、これらの
分割された内電極2a、2b及び外電極3a、3bの一方、例え
ば内電極2aと外電極3aに1つの周波数の電源Pを接続す
る。Embodiment FIG. 1 is a structural view of a stator of an ultrasonic driving apparatus according to an embodiment of the present invention. The inner surface and the outer surface of a piezoelectric vibrator 1 such as a cylindrical ceramic vibrator polarized inward and outward are respectively provided with cylindrical members. Linear gaps 2c, 2d and 3c, 3d formed in the axial direction
The inner electrodes 2a and 2b and the outer electrodes 3a and 3b divided by are provided. Then, the gap 2 between the inner electrodes 2a, 2b and the outer electrodes 3a, 3b
By disposing c, 2d and 3c, 3d at a desired angle from each other, each of the inner electrodes 2a, 2b and the outer electrodes 3a, 3b is configured to partially overlap, and these divided inner electrodes A power source P of one frequency is connected to one of 2a, 2b and the outer electrodes 3a, 3b, for example, the inner electrode 2a and the outer electrode 3a.
このように構成した本実施例のステータ4では、内電
極2aと外電極3に交流電圧を印加すると、第2図の矢印
Aで示すように一方向に回転する回転振動が発生し、ま
た内電極2bと外電極3bに交流電圧を印加すると、第2図
の矢印Bで示すように逆方向に回転する回転振動が発生
する。In the thus configured stator 4 of the present embodiment, when an AC voltage is applied to the inner electrode 2a and the outer electrode 3, a rotational vibration rotating in one direction is generated as shown by an arrow A in FIG. When an AC voltage is applied to the electrode 2b and the outer electrode 3b, a rotational vibration that rotates in the opposite direction is generated as shown by an arrow B in FIG.
これは、第3図(a)に示すように、円筒の半分を展
開した図を考慮した場合、例えば内電極2aと外電極3aに
交流電圧を印加したとき、矢印DE方向に伸びるとともに
矢印FG方向に短くなる。また、それによって、第3図
(b)の矢印Fのように径方向の振動が生じる。従っ
て、電圧を印加した側の圧電体振動子1は径方向の振動
及びそれによる縦方向の振動が発生するが、印加されな
い側の圧電体振動子1の径方向の振動及びそれによる縦
方向の振動が発生しないため、発生した径方向振動及び
縦方向振動によって高い方の面Cが波打つように回転振
動を発生するものと考えられる。また、例えば内電極2b
と外電極3bに交流電圧の印加した場も同様に波打つよう
に逆方向の回転振動が発生する。This is because, when considering a diagram in which a half of a cylinder is developed as shown in FIG. 3 (a), for example, when an AC voltage is applied to the inner electrode 2a and the outer electrode 3a, the electrode extends in the direction of arrow DE and the arrow FG Direction. This also causes radial vibration as indicated by arrow F in FIG. 3 (b). Therefore, the piezoelectric vibrator 1 on the side to which the voltage is applied generates radial vibration and the vertical vibration due thereto, but the radial vibration of the piezoelectric vibrator 1 on the side to which no voltage is applied and the vertical vibration due thereto. Since no vibration is generated, it is considered that the generated radial vibration and longitudinal vibration generate rotational vibration such that the higher surface C is wavy. Also, for example, the inner electrode 2b
Similarly, when an AC voltage is applied to the outer electrode 3b, a rotational vibration in the opposite direction is generated so as to undulate.
従って、第4図に示すように、ステータ4の端面に回
転体5を圧接すると、回転体5は非常に良く回転する。
また、この回転体5は側面に接触させても、非常に良く
回転した。Therefore, as shown in FIG. 4, when the rotating body 5 is pressed against the end face of the stator 4, the rotating body 5 rotates very well.
Further, even when the rotating body 5 was brought into contact with the side surface, it rotated very well.
なお、交流電圧の印加方向を反対にして、例えば内電
極2aと外電極3bまたは内電極2bの外電極3aのように印加
しても、同様に互いに逆方向の回転振動が発生する。ま
た、隙間2cと3c及び2dと3dを互いに所望の角度でずらし
て設けたが、ほぼ45゜または90゜ずらした場合には、回
転振動を正逆転させるために安定した状態を保持するこ
とができ、また、その位置は厳密なものではなく、任意
に設定することができる。さらに、隙間2cと3c及び2dと
3dを全くずらさず、互いに対向する位置にしてもよい
が、その場合は一方向のみに回転する。Note that, even if the application direction of the AC voltage is reversed and the AC voltage is applied, for example, like the inner electrode 2a and the outer electrode 3b or the outer electrode 3a of the inner electrode 2b, rotational vibrations in the opposite directions are similarly generated. Further, the gaps 2c and 3c and the gaps 2d and 3d are provided to be shifted from each other at a desired angle, but when the gaps are shifted by approximately 45 ° or 90 °, it is possible to maintain a stable state in order to reverse the rotational vibration. The position is not strict and can be set arbitrarily. Further, gaps 2c, 3c and 2d
The 3d may not be displaced at all and may be in a position facing each other, but in that case, it rotates only in one direction.
具体的な構成としては、第5図に示すように、ケース
6のベアリング7で回転体5の回転軸5aを支持し、また
スラストベアリング8で軸方向の回転を滑らかにし、さ
らに回転体5にステータ4の端面を接触させ、ケース6
の底蓋10によってスプリングワッシャ9を押えて締め付
けることにより、回転体5がステータ4に圧接し、内電
極2a、2b及び外電極3a、3bのいずれかに交流電圧を電極
にそれぞれ印加することにより、回転体5を回転するこ
とができる。As a specific configuration, as shown in FIG. 5, the bearing 7 of the case 6 supports the rotating shaft 5a of the rotating body 5 and the thrust bearing 8 smoothes the rotation in the axial direction. The end face of the stator 4 is brought into contact with the
By pressing and tightening the spring washer 9 with the bottom cover 10 of the above, the rotating body 5 is pressed against the stator 4, and an AC voltage is applied to any of the inner electrodes 2a, 2b and the outer electrodes 3a, 3b to the electrodes. , The rotating body 5 can be rotated.
また、第6図に示すように、回転体5に複数のボール
11が回転支持され、回転体5の回転軸5aはケース6のベ
アリング7で支持され、またボール11とケース6の内面
の間に支持板12が設けられ、さらにステータ4の上に接
触板13が設けられ、ボール11と接触されている。そし
て、ケース6の底蓋10によってスプリングワッシャ9を
押えて締め付けることにより、回転体5のボール11がス
テータ4に圧接し、交流電圧を内電極2aと外電極3a、3b
のいずれかに印加することにより、ボール11が一方向に
回転するとともに、内電極2bと外電極3a、3bのいずれか
に印加することにより、方向に回転体5が回転する。ま
た、本実施例のステータは内面または外面に電極が設け
られ、回転体が堅いセラミック圧電体の端面で受けられ
るため、電極を保護する必要がなく、セラミック圧電体
に保護材を設ける必要がない。In addition, as shown in FIG.
The rotating shaft 5a of the rotating body 5 is supported by the bearing 7 of the case 6, a support plate 12 is provided between the ball 11 and the inner surface of the case 6, and a contact plate 13 is provided on the stator 4. Are provided and are in contact with the ball 11. By pressing and tightening the spring washer 9 with the bottom cover 10 of the case 6, the ball 11 of the rotating body 5 is pressed against the stator 4, and the AC voltage is applied to the inner electrode 2a and the outer electrodes 3a, 3b.
, The ball 11 rotates in one direction, and by applying the voltage to either the inner electrode 2b or the outer electrodes 3a, 3b, the rotator 5 rotates in the direction. Further, in the stator of this embodiment, the electrodes are provided on the inner surface or the outer surface, and the rotating body can be received on the end face of the hard ceramic piezoelectric body. .
なお、上記実施例の円筒型の圧電体振動子は軸方向の
長さが長いものの実施例を説明したが、軸方向の長さが
短い圧電体振動子でも同様に回転振動が発生することが
できる。Although the cylindrical piezoelectric vibrator of the above embodiment has a long axial length, this embodiment has been described. However, a piezoelectric vibrator having a short axial length may similarly generate rotational vibration. it can.
第7図(a)、(b)は、短い圧電体振動子を使用し
た本発明の他の実施例で、カメラの鏡胴を移動するため
の概略構成図である。第7図において、ケース15にレン
ズ16を装着した鏡胴17が嵌め込まれ、またケース15に設
けた突起18が鏡胴17の外面の軸方向に設けられた溝17
a、17bに嵌合され、さらに、鏡胴17の外側面にヘリカル
状の溝19が設けられ、また、鏡胴17の外側で、ケース15
の突起20によって軸方向の長さの短い圧電体振動子1の
側面が支持され、また圧電体振動子1の端面に回転体21
を接触させ、蓋23をスプリングワッシャ22を介してケー
ス15に嵌合して回転体21を圧接する。また回転体21の内
面にヘリカル状の溝19に挿入された突起24が設けられて
いる。FIGS. 7 (a) and 7 (b) are schematic views of another embodiment of the present invention using a short piezoelectric vibrator for moving a lens barrel of a camera. In FIG. 7, a lens barrel 17 having a lens 16 mounted thereon is fitted into a case 15, and a projection 18 provided on the case 15 has a groove 17 provided in an axial direction on the outer surface of the lens barrel 17.
a, 17b, a helical groove 19 is provided on the outer surface of the lens barrel 17, and a case 15 is provided outside the lens barrel 17.
The side surfaces of the piezoelectric vibrator 1 having a short axial length are supported by the projections 20 of the piezoelectric vibrator 1.
And the lid 23 is fitted to the case 15 via the spring washer 22 to press the rotating body 21 in pressure. Further, a projection 24 inserted in the helical groove 19 is provided on the inner surface of the rotating body 21.
このように構成されたカメラにおいても、上記のよう
に圧電体振動子1に交流電圧を印加すると、トルクが大
きいので、回転体21が回転することにより、ヘリカル状
の溝19を通して鏡胴17を第7図(a)の左右に移動す
る。また、回転体21はスプリングワッシャ22で圧電体振
動子1に押圧されているため、交流電圧を遮断すると、
回転体21はその位置で確実に停止するので、従来のモー
タのように慣性による動きを停止するような機構を設け
る必要がない。In the camera having such a configuration, when the AC voltage is applied to the piezoelectric vibrator 1 as described above, the torque is large. Therefore, the rotating body 21 rotates, and the lens barrel 17 is moved through the helical groove 19. It moves left and right in FIG. 7 (a). Further, since the rotating body 21 is pressed against the piezoelectric vibrator 1 by the spring washer 22, when the AC voltage is cut off,
Since the rotating body 21 reliably stops at that position, there is no need to provide a mechanism for stopping the movement due to inertia unlike a conventional motor.
なお、実施例では、内電極2及び外電極3の分割電極
2a、2b、3a、3bの間の隙間2c、2d、3c、3dを円筒の軸方
向に平行に設けたが、第8図に示すように隙間2c、2d、
3c、3dを軸に対して傾斜させて設けても、同様に回転振
動を発生させることができる。In the embodiment, the divided electrodes of the inner electrode 2 and the outer electrode 3 are used.
The gaps 2c, 2d, 3c, 3d between 2a, 2b, 3a, 3b are provided parallel to the axial direction of the cylinder, but as shown in FIG. 8, the gaps 2c, 2d,
Even if 3c and 3d are provided to be inclined with respect to the axis, rotational vibration can be generated similarly.
発明の効果 以上の説明から明らかなように、本発明は、円筒状の
圧電対振動子の内電極及び外電極に対向する隙間を設け
てそれぞれ2つ以上に分割し、これらの隙間を所望の角
度でずらし、分割された内電極及び外電極のそれぞれ一
部が重なり合うように構成され、内電極及び外電極のそ
れぞれ1つの分割した電極に1つの周波数の交流電圧を
印加することにより、端面または側面に正転または逆転
する回転振動が発生するので、この回転振動の発生する
部分に回転体を組合わせることにより、内電極及び外電
極の分割電極の電圧印加方向の組合わせによって、回転
体を正逆転することができるので、この回転振動の発生
する部分に回転体を組合わせることにより、内電極及び
外電極及び外電極の電圧印加方向の組合わせによって、
回転体を回転することができ、さらに、構成が簡単であ
るので、小型の超音波モータを作ることができ、またカ
メラのレンズの駆動等にも使用できるなど、多目的に使
用することができるという利点がある。Effect of the Invention As is apparent from the above description, the present invention provides a gap facing the inner electrode and the outer electrode of the cylindrical piezoelectric pair vibrator and divides the gap into two or more, and divides these gaps into desired ones. The inner electrode and the outer electrode, which are shifted by an angle, are configured so that a part of each of the divided inner electrode and the outer electrode overlap with each other. By applying an AC voltage of one frequency to each of the divided electrodes of the inner electrode and the outer electrode, the end face or Rotational vibration that rotates forward or reverse occurs on the side surface.By combining the rotating body with the part where this rotational vibration occurs, the rotating body is combined by the combination of the voltage application directions of the divided electrodes of the inner electrode and the outer electrode. Since the rotation can be made forward and reverse, by combining the rotating body with the portion where this rotational vibration occurs, the combination of the inner electrode, the outer electrode, and the outer electrode in the voltage application direction,
The rotating body can be rotated, and the structure is simple, so that a small ultrasonic motor can be made, and it can be used for various purposes such as driving a camera lens. There are advantages.
第1図は本発明の実施例の超音波駆動装置のステータの
構成図、第2図及び第3図は第1図のステータの動作原
理を説明するための図、第4図は本発明の実施例の超音
波駆動装置の概略構成図、第5図及び第6図は本発明の
超音波駆動装置の具体的構成図、第7図は本発明の超音
波駆動装置を使用したカメラの鏡胴部分の概略構成図、
第8図は本発明の更に他の実施例の超音波駆動装置のス
テータの斜視図である。 1……圧電体振動子、2、3……内電極及び外電極、2
a、2b、3a、3b……分割電極、2c、2d、3c、3d……隙
間、4……ステータ、5……回転体。FIG. 1 is a structural view of a stator of an ultrasonic driving apparatus according to an embodiment of the present invention, FIGS. 2 and 3 are diagrams for explaining the operating principle of the stator of FIG. 1, and FIG. FIG. 5 is a schematic configuration diagram of an ultrasonic driving device according to an embodiment of the present invention. FIG. 5 and FIG. 6 are specific structural diagrams of the ultrasonic driving device of the present invention. Schematic configuration diagram of the trunk part,
FIG. 8 is a perspective view of a stator of an ultrasonic driving apparatus according to still another embodiment of the present invention. 1 ... piezoelectric vibrator, 2, 3 ... inner electrode and outer electrode, 2
a, 2b, 3a, 3b ... divided electrodes, 2c, 2d, 3c, 3d ... gaps, 4 ... stators, 5 ... rotating bodies.
Claims (4)
ック圧電体振動子と、該圧電体振動子の内面と外面に円
筒の軸方向に直線状に形成したそれぞれ対向する2つの
隙間によってそれぞれ2つに分割され、前記内面と外面
の隙間を所望の角度でずらし、かつ分割された部分の一
部が内面と外面で互いに重なり合うように構成した内電
極及び外電極と、該内電極及び外電極のそれぞれ1つの
分割された電極に1つの周波数の交流電圧を印加する1
つの交流電源と、前記圧電体振動子の端面又は側面に組
合わせた回転体とからなることを特徴とする超音波駆動
装置。A cylindrical ceramic piezoelectric vibrator polarized between an inner surface and an outer surface, and two opposing gaps formed on the inner and outer surfaces of the piezoelectric vibrator in a straight line in the axial direction of the cylinder. An inner electrode and an outer electrode, each of which is divided into two, the gap between the inner surface and the outer surface is shifted at a desired angle, and a part of the divided portion is overlapped on the inner surface and the outer surface, and Applying an AC voltage of one frequency to each divided electrode of the outer electrode 1
An ultrasonic drive device comprising: an AC power supply; and a rotating body combined with an end face or a side face of the piezoelectric vibrator.
線状の隙間のずれは45゜であることを特徴とする特許請
求の範囲第1項記載の超音波駆動装置。2. The ultrasonic driving apparatus according to claim 1, wherein a deviation of a linear gap between each of said inner electrode and said outer electrode is 45 °.
線状の隙間のずれは90゜であることを特徴とする特許請
求の範囲第1項記載の超音波駆動装置。3. The ultrasonic driving apparatus according to claim 1, wherein a deviation of a linear gap between each of said inner electrode and said outer electrode is 90 °.
間は円筒の軸に対して斜めに傾斜させたことを特徴とす
る特許請求の範囲第1項から第3項のいずれか1項記載
の超音波駆動装置。4. The apparatus according to claim 1, wherein the gap between the inner electrode and the outer electrode is inclined with respect to the axis of the cylinder. Ultrasonic drive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180254A JP2607087B2 (en) | 1987-07-20 | 1987-07-20 | Ultrasonic drive |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180254A JP2607087B2 (en) | 1987-07-20 | 1987-07-20 | Ultrasonic drive |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6426373A JPS6426373A (en) | 1989-01-27 |
JP2607087B2 true JP2607087B2 (en) | 1997-05-07 |
Family
ID=16080049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62180254A Expired - Lifetime JP2607087B2 (en) | 1987-07-20 | 1987-07-20 | Ultrasonic drive |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2607087B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4838603B2 (en) * | 2006-03-14 | 2011-12-14 | 創光科学株式会社 | Chemical vapor deposition apparatus and gas flow path apparatus |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6223382A (en) * | 1985-07-23 | 1987-01-31 | Sony Corp | Rotary type actuator |
JPH0646869B2 (en) * | 1985-09-26 | 1994-06-15 | ソニー株式会社 | Linear elastic wave motor |
-
1987
- 1987-07-20 JP JP62180254A patent/JP2607087B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6426373A (en) | 1989-01-27 |
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