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JP2515856B2 - How to fix the print pattern - Google Patents

How to fix the print pattern

Info

Publication number
JP2515856B2
JP2515856B2 JP15236288A JP15236288A JP2515856B2 JP 2515856 B2 JP2515856 B2 JP 2515856B2 JP 15236288 A JP15236288 A JP 15236288A JP 15236288 A JP15236288 A JP 15236288A JP 2515856 B2 JP2515856 B2 JP 2515856B2
Authority
JP
Japan
Prior art keywords
pattern
enlarged portion
metal paste
abrasive
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15236288A
Other languages
Japanese (ja)
Other versions
JPH01319991A (en
Inventor
明好 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15236288A priority Critical patent/JP2515856B2/en
Publication of JPH01319991A publication Critical patent/JPH01319991A/en
Application granted granted Critical
Publication of JP2515856B2 publication Critical patent/JP2515856B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/225Correcting or repairing of printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

【発明の詳細な説明】 〔概要〕 グリーンシート上に形成した印刷パターンの修正方法
に関し、 異常な肥大部の金属ペーストを正確に削除して欠陥パ
ターンを容易に修正することを目的とし、グリーンシー
ト上に金属ペーストにより印刷したパターンを検査し、
前記パターン上に異常な肥大部を発見したらその肥大部
を削除する様にした印刷パターンの修正方法において、
該肥大部を挟んで吹き付け用のノズルと吸引用のダクト
を対向して配置する段階と、該ノズルから粉末の研削剤
を含む空気を該肥大部に吹き当てるとともに、該ダクト
を負圧に保って飛散する金属ペーストと前記研削剤とを
吸引する様に構成する。
DETAILED DESCRIPTION OF THE INVENTION [Outline] A method for correcting a printed pattern formed on a green sheet, which aims to correct a defective pattern easily by accurately removing a metal paste in an abnormally enlarged portion. Inspect the pattern printed with metal paste on the top,
In the method of correcting a print pattern, which is designed to delete the enlarged portion when an abnormal enlarged portion is found on the pattern,
A step of arranging a blowing nozzle and a suction duct so as to face each other with the enlarged portion sandwiched therebetween, and blowing air containing a powdered abrasive from the nozzle to the enlarged portion and keeping the duct at a negative pressure. It is configured to suck the metal paste and the abrasive that are scattered.

〔産業上の利用分野〕[Industrial applications]

本発明は、グリーンシート上に形成した印刷パターン
の修正方法に関する。
The present invention relates to a method for correcting a print pattern formed on a green sheet.

セラミック回路基板の製造工程で、グリーンシート上
に金属ペーストにより回路パターンを印刷し、この基板
を加熱して回路パターンを基板上に固化して固着する。
印刷された回路パターンに何らかの原因で余分な金属ペ
ーストが付着し肥大部を生じると、別のパターンと接触
するおそれがある。このため加熱前に、印刷の後工程
で、パターンのチエックを行い、異常な肥大部に対して
余分な金属ペーストを削り取ってパターンを完成させて
いる。従って、効率のいい印刷パターンの修正方法の開
発が望まれていた。
In the manufacturing process of a ceramic circuit board, a circuit pattern is printed on a green sheet with a metal paste, and the circuit pattern is heated to solidify and fix the circuit pattern on the board.
If extra metal paste adheres to the printed circuit pattern for some reason and causes a swelling portion, it may contact another pattern. Therefore, before heating, the pattern is checked in a post-printing step, and excess metal paste is scraped off from the abnormally enlarged portion to complete the pattern. Therefore, it has been desired to develop an efficient method for correcting a print pattern.

〔従来の技術〕[Conventional technology]

第3図において、グリーンシート1上には金属ペース
ト等からなる導体のパターン2が印刷されており、この
状態でパターン2は軟らかく未だ固化していない。この
パターン2は何らかの理由で余分な金属ペーストが付着
した箇所がある。
In FIG. 3, a conductor pattern 2 made of a metal paste or the like is printed on the green sheet 1, and in this state, the pattern 2 is soft and not yet solidified. In this pattern 2, there is a portion where extra metal paste is attached for some reason.

このような肥大部3を印刷後の顕微鏡検査で発見した
ら、作業者はその修正を行う。従来では実体顕微鏡で観
察しながら、針状の工具を使用して余分な肥大部を削り
取って修正していた。
If such an enlarged portion 3 is found by a microscopic inspection after printing, the operator corrects it. Conventionally, while observing with a stereoscopic microscope, a needle-shaped tool was used to scrape off and correct an excessively enlarged portion.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

しかしながら従来の修正方法では、肥大部を正確に削
り取ることは困難であり、削り過ぎてしまったり、削り
不足のため繰り返し削ったりして時間がかかるという欠
点があった。又実体顕微鏡を見ながら修正するので作業
者に負担がかかり、作業には熟練を要する等の欠点があ
った。
However, with the conventional correction method, it is difficult to accurately cut off the enlarged portion, and there is a drawback that it takes too much time, or it takes time to repeatedly cut due to insufficient cutting. Further, since the correction is made while looking at the stereoscopic microscope, the operator is burdened with the work, and there is a drawback that the work requires skill.

本発明は以上の問題点を解消するためになされたもの
で、異常な肥大部の金属ペーストを正確に削除して欠陥
パターンを容易に修正することを目的としている。
The present invention has been made to solve the above problems, and it is an object of the present invention to accurately correct the defective pattern by accurately deleting the metal paste in the abnormally enlarged portion.

〔課題を解決するための手段〕[Means for solving the problem]

上記問題点はグリーンシート上に金属ペーストにより
印刷したパターンを検査し、前記パターン上に異常な肥
大部を発見したらその肥大部を削減する様にした印刷パ
ターンの修正方法において、該肥大部を挟んで吹き付け
用のノズルと吸引用のダクトを対向して配置する段階
と、該ノズルから粉末の研削剤を含む空気を該肥大部に
吹き当てるとともに、該ダクトを負圧に保って飛散する
金属ペーストと前記研削剤とを吸引する様にした印刷パ
ターンの修正方法により達成できる。
The above problem is to inspect a pattern printed with a metal paste on a green sheet, and if an abnormal enlarged portion is found on the pattern, the enlarged portion is reduced in a method of correcting the printed pattern, in which the enlarged portion is sandwiched. A step of arranging a spraying nozzle and a suction duct to face each other, and spraying air containing a powdered abrasive from the nozzle to the enlarged portion and scattering while keeping the duct at a negative pressure. This can be achieved by a method of correcting a print pattern in which the abrasive and the abrasive are sucked.

〔作用〕[Action]

即ち、本発明は、検査時に記録した肥大部に一対のノ
ズルとダクトとを対向して配置し、ノズルから微粒の研
削剤を空気とともに高圧に肥大部に吹き付ける。これに
より肥大部の余分な金属ペーストは飛散するが、負圧の
吸引ダクトでこれらを吸い取り回りへの影響をなくす
る。パターン2へは非接触な方法で欠陥パターンの修復
が可能となる。
That is, according to the present invention, a pair of nozzles and ducts are arranged so as to face each other in the enlarged portion recorded at the time of inspection, and fine abrasive particles are blown together with air from the nozzles to the enlarged portion at high pressure. As a result, the excess metal paste in the enlarged portion is scattered, but the negative pressure suction duct absorbs these and eliminates the influence on the surroundings. The defective pattern can be repaired by a method that does not contact the pattern 2.

〔実施例〕〔Example〕

以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第3図において、グリーンシート1上のパターン2に
は側方に突出した肥大部3があるものとし、肥大部3は
余分な導体の金属ペーストが付着した箇所である。例え
ばパターン2の幅が80〜100μだとすると、印刷時の金
属ペーストのはみ出しにより、径が80μ程度の肥大部3
が発生する。セラミック回路基板の製造工程では、各段
階毎に検査工程があり、このようなパターン印刷後のグ
リーンシート1を所定のステージに載置して顕微鏡で自
動装置又は人手により検査する。
In FIG. 3, it is assumed that the pattern 2 on the green sheet 1 has a thickened portion 3 protruding laterally, and the thickened portion 3 is a portion to which a metal paste of an extra conductor is attached. For example, if the width of the pattern 2 is 80 to 100 μ, the enlarged portion 3 having a diameter of about 80 μ is caused by the protrusion of the metal paste during printing.
Occurs. In the manufacturing process of the ceramic circuit board, there is an inspection process at each stage, and the green sheet 1 after such pattern printing is placed on a predetermined stage and inspected by a microscope with an automatic device or manually.

次いで、パターン2上に肥大部3が発見された場合
は、ステージの目盛を読み取って、当該肥大部3の位置
を記録する。これはグリーンシート1上を全域にわたっ
て検査して、他にも肥大部3があり得るから、その後に
まとめて修正するためである。
Next, when the enlarged portion 3 is found on the pattern 2, the scale of the stage is read and the position of the enlarged portion 3 is recorded. This is because the entire area of the green sheet 1 is inspected, and there may be other enlarged portions 3, so that they are collectively corrected.

次にパターン2の幅よりやや小径のノズル4と吸引用
のダクト5とを肥大部3方へ移動する。ノズル4は所定
硬度の研削剤を含む高圧空気を噴き出すもので、対向し
て移動するダクト5は負圧に保たれている。研削剤は例
えば製造中の基板と同質の微粉末であってもよい。肥大
部3の座標をステージで読んで顕微鏡の視野内に再度位
置決めした後、一対のノズル4とダクト5を移動して肥
大部4を挟んで対向した位置に配置する。自動機械の場
合は予め基準位置に設置したノズル4とダクト5との間
に、ステージ移動により肥大部3を移動させて位置合わ
せする。
Next, the nozzle 4 having a diameter slightly smaller than the width of the pattern 2 and the suction duct 5 are moved toward the enlarged portion 3. The nozzle 4 blows out high-pressure air containing an abrasive having a predetermined hardness, and the duct 5 moving in opposition is kept at a negative pressure. The abrasive may be, for example, a fine powder of the same quality as the substrate being manufactured. After the coordinates of the enlarged portion 3 are read on the stage and positioned again within the field of view of the microscope, the pair of nozzles 4 and the duct 5 are moved to be arranged at positions facing each other across the enlarged portion 4. In the case of an automatic machine, the enlarged portion 3 is moved by the stage movement between the nozzle 4 and the duct 5, which are installed at the reference position in advance, to perform alignment.

次にノズル4から高速に空気とともに研削剤の粉末を
噴射して肥大部3に吹き当てる。従って肥大部3は空気
と研削剤により削除され、吹き飛んだ余分な金属ペース
トと研削剤の粉末及び空気はダクト5内に吸引される。
これにより適量の空気と研削剤の粉末を吹き付けること
により、非接触で欠陥パターンは修復される。
Next, the powder of the abrasive is sprayed from the nozzle 4 at high speed together with the air and sprayed on the enlarged portion 3. Therefore, the enlarged portion 3 is removed by the air and the abrasive, and the excess metal paste and the abrasive powder and the air blown off are sucked into the duct 5.
As a result, the defect pattern is repaired in a non-contact manner by spraying an appropriate amount of air and powder of the abrasive.

〔発明の効果〕〔The invention's effect〕

以上の発明から明らかなように、本発明によると、検
査により肥大した欠陥部分の位置が認識したら、ノズル
からアルミナ粉末等の研削剤と空気を吹きつけて肥大部
を除去して、2次障害を起こすことなく容易に欠陥パタ
ーンを修復できる。これにより修正技術の向上及び信頼
度向上に寄与する。
As apparent from the above invention, according to the present invention, when the position of the enlarged defect portion is recognized by the inspection, the enlarged portion is removed by blowing the abrasive such as alumina powder and air from the nozzle to remove the secondary obstacle. The defect pattern can be easily repaired without causing any damage. This contributes to improvement of the correction technique and reliability.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の修正方法を示す斜視図、第2図は第1
図の側面図、 第3図は一般的なパターンの平面図である。 図において、 1……グリーンシート、 2……パターン、 3……肥大部、 4……ノズル、 5……ダクトである。
FIG. 1 is a perspective view showing a correction method of the present invention, and FIG.
A side view of the drawing and FIG. 3 are plan views of general patterns. In the figure, 1 ... Green sheet, 2 ... Pattern, 3 ... Enlarged portion, 4 ... Nozzle, 5 ... Duct.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】グリーンシート(1)上に金属ペーストに
より印刷したパターン(2)を検査し、前記パターン
(2)上に異常な肥大部(3)を発見したらその肥大部
(3)を削除する様にした印刷パターンの修正方法にお
いて、該肥大部(3)を挟んで吹き付け用のノズル
(4)と吸引用のダクト(5)を対向して配置する段階
と、該ノズル(4)から粉末の研削剤を含む空気を該肥
大部(3)に吹き当てるとともに、該ダクト(5)を負
圧に保って飛散する金属ペーストと前記研削剤とを吸引
する様にしたことを特徴とする印刷パターンの修正方
法。
1. A pattern (2) printed with a metal paste on a green sheet (1) is inspected, and when an abnormal enlarged portion (3) is found on the pattern (2), the enlarged portion (3) is deleted. In the method of correcting a print pattern according to the above method, a step of disposing a blowing nozzle (4) and a suction duct (5) opposite to each other with the enlarged portion (3) interposed, and from the nozzle (4) Air containing powdered abrasive is blown onto the enlarged portion (3), and the duct (5) is kept at a negative pressure to suck the scattered metal paste and the abrasive. How to correct the print pattern.
JP15236288A 1988-06-22 1988-06-22 How to fix the print pattern Expired - Lifetime JP2515856B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15236288A JP2515856B2 (en) 1988-06-22 1988-06-22 How to fix the print pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15236288A JP2515856B2 (en) 1988-06-22 1988-06-22 How to fix the print pattern

Publications (2)

Publication Number Publication Date
JPH01319991A JPH01319991A (en) 1989-12-26
JP2515856B2 true JP2515856B2 (en) 1996-07-10

Family

ID=15538877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15236288A Expired - Lifetime JP2515856B2 (en) 1988-06-22 1988-06-22 How to fix the print pattern

Country Status (1)

Country Link
JP (1) JP2515856B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5782338B2 (en) * 2011-09-01 2015-09-24 株式会社不二製作所 End processing method for plate material and blasting apparatus

Also Published As

Publication number Publication date
JPH01319991A (en) 1989-12-26

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