JP2515316Y2 - Moving table - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a moving table.

[Conventional technology]

A work table such as a screen printer or a tape exposure device is required to have a moving table having a function of moving in two orthogonal directions and rotating at an arbitrary angle.

However, the conventional XY table has a structure in which two tables are vertically stacked, and in order to have a rotating function, it is necessary to mount the XY table on a rotary table having an indexing function. Therefore, there is a drawback that the height of the table becomes extremely large and the device becomes large.

In order to deal with such drawbacks, a movable plate is movably provided on a fixed plate via a thrust bearing, and the movable plate has an XY
A moving table is conceivable in which a driving device for performing directional movement and rotational movement is connected. In this structure, since the cage for holding the balls is only interposed between the fixed platen and the movable platen, there is an advantage that the height of the table can be made compact.

[Problems to be solved by the device]

However, in the structure in which the movable platen is supported by utilizing the rolling of the ball as described above, there is a problem that the support rigidity decreases as the distance from the support surface of the ball decreases, and the movable platen is easily lifted. In other words, when machining is performed on the movable platen and a machining load is applied to a position far away from the ball support surface, a vertical moment is generated at the load position with the ball support surface as the fulcrum. , The movable platen may be lifted.

The present invention has been made in view of the above problems, and in a structure that supports a movable platen via a thrust bearing, it is possible to provide a moving table that prevents the movable platen from rising and has improved support rigidity. Has an aim.

[Means for solving the problem]

In order to solve the above problems, the present invention provides a movable table in which a movable plate is slidably supported on a fixed plate through a thrust bearing in all directions on a horizontal plane, and a drive device is connected to the movable plate. A cylindrical pedestal portion and a flange portion that horizontally projects from the lower portion of the cylindrical pedestal portion are provided on the lower surface of the board, and the lower surface of the movable board, the side surface of the pedestal portion, and the upper surface of the flange portion along the outer circumference of the flange portion. An annular concave portion is formed, and movable side rolling surfaces are provided on the upper and lower surfaces of the concave portion, and the cylindrical pedestal portion is inserted into a circular hole of the fixed plate with a predetermined moving gap, and the fixed plate of the fixed plate is inserted. On both upper and lower sides of the circular hole peripheral edge, fixed side rolling surfaces facing the movable side rolling surfaces are formed respectively, and thrust rolling bearings are respectively interposed between the facing movable side and fixed law rolling surfaces, Mutually on the fixed plate in the water. Two or more drive devices that extend and contract in parallel with each other and one or more drive devices that extend and contract in the direction orthogonal to the drive devices are arranged, and the expansion and contraction part of each drive device and the side of the movable plate are connected by a joint. A horizontal guide member that is connected to the movable plate and fixed to the movable plate; a slider attached to the guide member; and a vertical rotation pin that joins the slider and the expansion / contraction portion. It was done.

[Action]

In the moving table having the above-described structure, the movable plate has a structure in which the peripheral edge of the circular hole of the fixed plate is sandwiched from above and below in the annular recess formed by the circumferential pedestal and the flange portion via the rolling bearing. As a result, the movement of the movable plate in the up-down direction is suppressed by the flange portion, and lifting is prevented.
As a result, high support rigidity can be obtained.

The rolling bearing is provided in the recess,
Moreover, the diameter of the cylindrical pedestal is formed to be as large as possible so as to be as close as possible to the rolling bearing. For this reason, the support rigidity of the movable platen is further increased, and the surface accuracy of the movable platen is increased in the movement in all directions.

Further, when a parallel drive device connected to the movable plate or a drive device orthogonal to the parallel drive device is expanded / contracted, the movable plate is orthogonalized to 2
Move linearly in the direction.

Further, when all the driving devices are expanded and contracted at the same time, the movable platen can be rotated around an arbitrary point or moved in an arbitrary direction on orthogonal coordinates, so that the positioning can be performed with high accuracy. Then, the surface accuracy of the movable plate in omnidirectional movement,
Combined with the highly accurate positioning by the joint structure, a compact and highly accurate moving table can be realized.

〔Example〕

An embodiment of the present invention will be described below with reference to the accompanying drawings.

As shown in FIGS. 1 to 3, the moving table 1 of the embodiment includes a fixed platen 2, a movable platen 6, and an upper thrust rolling bearing.
11, lower thrust rolling bearing 12, and three drive units 1
The main components are 6, 17, and 18.

The fixed platen 2 has a foot seat 2a on the periphery of the lower surface, and a circular hole 3 in the center.
Is formed. Around the circular hole 3, the fixed plate 2
Fixed upper rolling surface 25a and fixed lower rolling surface 25b on both upper and lower sides of
Is formed.

The movable plate 6 has, on its upper surface, a cylindrical pedestal portion 4b which is inserted into the circular hole 3 with a radial gap 5 therebetween.
A circular flange 4a is formed integrally with the lower end of the pedestal portion 4b so as to project in the horizontal direction. Further, a protrusion 4c is provided at the center of the upper end surface of the pedestal portion 4b, and a spacer plate 9 having the same diameter as the pedestal portion 4b is fitted into the protrusion 4c.
The movable plate 6 is fitted in the upper part of the.

The movable plate 6, the spacer plate 9 and the pedestal portion 4b are integrated by a bolt 10 screwed into the bolt hole 8 of the pedestal portion 4b through the movable plate 6 and the spacer plate 9, and an annular recess 28 is formed around the pedestal portion 4b. Is formed.

On the upper surface of the flange 4a forming the recess 28, a movable-side lower rolling surface 26b having a constant width is formed along the outer peripheral edge thereof,
The movable-side upper rolling surface 26a is formed on the lower surface of the support plate 6 of the recess 28 so as to face this.

Each of the rolling bearings 11 and 12 described above is one in which a large number of balls 14 are rotatably incorporated on the surface of a ring-shaped cage 13. The upper rolling bearing 11 is movably interposed in all directions between the movable-side upper rolling surface 26a of the movable plate 6 and the fixed-side upper rolling surface 25a of the fixed plate 2 that faces the movable-side upper rolling surface 26a. .

Further, the lower rolling bearing 12 is movably interposed in all directions between the movable side lower rolling surface 26b of the flange 4a and the fixed side lower rolling surface 25b of the fixed platen 2 which faces the movable side lower rolling surface 26b.

The preload applied to the two rolling bearings 11 and 12 is set by appropriately selecting the thickness of the spacer plate 9, and the preload provides rigidity that does not deteriorate the support accuracy even when an eccentric load is applied to the movable platen 6. It

Further, since the pedestal portion 4b of the movable plate 6 is formed at a position inward from the outer peripheral edge of the flange 4a by the width of the recess 28,
It has a relatively large diameter. Therefore, the rigidity of the movable plate 6 itself is increased.

One expandable and contractable drive device 16 is attached to one side of the fixed plate 2 via a mounting plate 15a, and the side faces orthogonal to it are parallel to each other via mounting plates 15b and 15c. Two extendable and retractable drive units 17, 18 are attached, and the extendable rods 19 of the drive units 16, 17, 18 are jointed respectively.
It is connected via 20 to the side edges 6a, 6b of the movable plate 6.

The joint 20 includes a horizontal guide rod 21 fixed along the sides 6a and 6b of the movable plate 6, a slider 22 movably attached to the guide rod 21, the slider 22 and the telescopic rod 19. And a telescopic rod 23 of each of the drive devices 16, 17, and 18 that is rotatable with respect to each side of the movable plate 6 and is movable in the telescopic direction. And is slidably connected in the direction orthogonal to each other.

For example, Japanese Patent Application No. 1-70
The ball screw shaft device proposed in No. 36 can be used, and in addition, a stretchable drive member such as a hydraulic cylinder can be used.

The movable table 1 of the embodiment having the above structure has two thrust bearings 1 in which the movable platen 6 sandwiches the fixed platen 2 from above and below.
Since the vertical movement is guided by 1 and 12, even if a load is applied to a position far away from the support surface of the ball 14,
The movement of the movable platen 6 is restricted by the flange 4a and the thrust bearing 12, so that the movable platen 6 is prevented from rising.

The work on the moving table 1 may be performed on the work table 24 mounted on the movable platen 6 as shown in FIG.

The operation of the moving table 1 is shown in FIG.
When the drive device 16 is operated without operating the drive devices 17 and 18, the slider 22 connected to the drive devices 17 and 18 slides on the guide rod 21 to linearly move the movable plate 6 in one direction.

Also, with the drive device 16 stopped, both drive devices 17,
When the same amount of 18 is operated, the movable platen 6 can be moved linearly in the direction perpendicular to the above.

Further, the drive device 18 is expanded and contracted while the drive device 17 is stopped, and the drive device 16 positioned correspondingly in the right angle direction.
When the movable plate 6 is expanded and contracted, the movable plate 6 rotates about the connection point of the stopped drive device 17 as a fulcrum.

Further, when the respective driving devices 16, 17, 18 are simultaneously expanded and contracted, the movable platen 6 can be rotated around an arbitrary point or moved in an arbitrary direction on the orthogonal coordinates.

In the above embodiment, the three driving devices 16, 17, and 18 were directly connected to the side of the movable plate 6, but the connection between these driving devices and the movable plate is shown in FIGS. ), Various structures can be taken. In this figure, reference numeral 25 is a connecting rod fixed to the movable platen 6, and each driving device is rotatably and slidably connected to the connecting rod 25 via a joint 20.

In the above example, the moving table that enables movement and rotation in two orthogonal directions is shown. However, by changing the number and arrangement of the driving devices, a moving table or an XY table can be moved in one direction. Can also be applied to.

[Effect of device]

As described above, according to the present invention, the upper and lower surfaces of the circular hole of the fixed platen are sandwiched by the movable platen and the flange part through the thrust rolling bearings, respectively, and the vertical displacement of the support plate is made by the flange part. Since the restriction is applied, even if an eccentric load is applied to the movable platen, the movable platen can be prevented from rising and the support rigidity can be significantly improved.

The thrust rolling bearing is provided in a recess on the outer peripheral surface of the movable platen, and the cylindrical pedestal portion of the movable platen is formed inward from the outer peripheral edge of the flange by the width of the rolling surface of the rolling bearing. As a result, the diameter of the pedestal part becomes considerably large. Since the movable platen and the flange are integrated with the pedestal portion having such a large diameter interposed therebetween, the rigidity of the movable platen is high and the accuracy of the movable platen is improved in the movement in all directions.

Furthermore, a simple structure in which a plurality of driving devices that extend and contract in parallel to the movable plate and a driving device that is orthogonal to the driving device are connected to each other enables movement in two orthogonal directions and rotation, and a guide member. It is possible to provide a compact and highly accurate moving table, which is highly accurately positioned through a joint composed of a slider and a pivot pin, and the surface accuracy of the movable plate and the highly accurate positioning in the joint structure are combined. .

[Brief description of drawings]

FIG. 1 is a plan view showing a part of the moving table of the embodiment with a part cut away, FIG. 2 is a sectional view taken along line II-II of FIG. 1, and FIG. 3 is a perspective view showing a part of the same with a part cut away. , FIG. 4 (a)-
(E) is a figure which shows typically the connection structure of a drive device and a movable board. 1 ... moving table, 2 ... stationary plate, 2a ... footrest, 3 ...
… Circular hole, 4a …… Flange, 4b …… Cylindrical pedestal, 4c…
… Protrusion, 5 …… Gap, 6 …… Movable plate, 8 …… Bolt hole, 9 …… Spacer plate, 10 …… Bolt, 11 …… Upper thrust rolling bearing, 12 …… Lower thrust rolling bearing, 13…
… Cage, 14 …… Ball, 15a, 15b, 15c …… Mounting plate, 1
6, 17, 18 ... Drive device, 19 ... Telescopic rod, 20 ... Joint, 21 ... Guide rod, 22 ... Slider, 23 ... Rotating pin,
24 …… Work table, 25a …… Upper fixed side rolling surface, 25b ……
Fixed side lower rolling surface, 26a …… Movable side upper rolling surface, 26b …… Movable side lower rolling surface, 28 …… Concave.

Claims (1)

(57) [Scope of utility model registration request] 1. In a moving table in which a movable plate is slidably supported on a fixed plate through thrust bearings in all directions on a horizontal plane, and a drive device is connected to the movable plate, a cylindrical pedestal is mounted on the lower surface of the movable plate. And a flange portion that horizontally extends from the lower portion of the cylindrical pedestal portion, forming an annular recess along the outer periphery of the flange portion by the lower surface of the movable plate, the side surface of the pedestal portion and the upper surface of the flange portion, Movable rolling surfaces are provided on the upper and lower surfaces of the recess, and the columnar pedestal is inserted into the circular hole of the fixed plate with a predetermined moving gap, and the upper and lower sides of the peripheral edge of the circular hole of the fixed plate are inserted. , Forming a fixed side rolling surface facing each of the movable side rolling surfaces, interposing thrust rolling bearings between the facing movable side and fixed side rolling surfaces, and 2 or more that expand and contract in parallel with each other A drive device and one or more drive devices that expand and contract in a direction orthogonal to the drive device are arranged, and the expandable part of each drive device and the side of the movable plate are connected by a joint, and the joint is connected to the movable plate. A movable table comprising a horizontal guide member fixed to the guide member, a slider attached to the guide member, and a vertical rotation pin connecting the slider and the expandable portion.