JP2507083B2 - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JP2507083B2 JP2507083B2 JP1235055A JP23505589A JP2507083B2 JP 2507083 B2 JP2507083 B2 JP 2507083B2 JP 1235055 A JP1235055 A JP 1235055A JP 23505589 A JP23505589 A JP 23505589A JP 2507083 B2 JP2507083 B2 JP 2507083B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- ultrasonic motor
- vibration
- vibrating
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、圧電体により励振した弾性振動を駆動力と
する超音波モータに関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor that uses elastic vibration excited by a piezoelectric body as a driving force.
従来の技術 近年、圧電セラミック等の圧電体により構成した振動
体に弾性振動を励振し、これを駆動力とした超音波モー
タが注目されている。2. Description of the Related Art In recent years, attention has been paid to an ultrasonic motor that excites elastic vibration in a vibrating body formed of a piezoelectric body such as a piezoelectric ceramic and uses this as a driving force.
以下、図面を参照しながら超音波モータの従来技術に
ついて説明を行う。Hereinafter, a conventional technique of an ultrasonic motor will be described with reference to the drawings.
第４図は超音波モータの斜視図であり、円板形の弾性
体１の主面の一方に、圧電体として円板形の圧電体２を
貼り合わせて振動体３を構成している。また、弾性体１
の他の主面には、機械出力取り出し用の突起体４が構成
されている。５は耐摩耗性材料の摩擦材、６は弾性体で
あり、互いに貼り合わせられて移動体７を構成してい
る。移動体７は、摩擦材５を介して、振動体３に設置さ
れた突起体４と加圧接触している。圧電体２に電界を印
加すると振動体３の周方向に曲げ振動の進行波が励振さ
れ、移動体７を摩擦力により駆動する。移動体７は回転
軸８を中心に回転運動を始める。FIG. 4 is a perspective view of the ultrasonic motor, in which a disc-shaped piezoelectric body 2 as a piezoelectric body is attached to one of the main surfaces of a disc-shaped elastic body 1 to form a vibrating body 3. Also, the elastic body 1
On the other main surface, a projection 4 for extracting the mechanical output is formed. Reference numeral 5 is a friction material made of a wear resistant material, and 6 is an elastic body, which are bonded to each other to form a moving body 7. The moving body 7 is in pressure contact with the protrusion 4 installed on the vibrating body 3 via the friction material 5. When an electric field is applied to the piezoelectric body 2, a traveling wave of bending vibration is excited in the circumferential direction of the vibrating body 3, and the moving body 7 is driven by a frictional force. The moving body 7 starts rotating around the rotation axis 8.
以上のように構成された超音波モータの圧電体２に
は、互いに、位置的に４分の１波長（＝90度）の位相差
を持った電極が構成されており、この電極に V1＝V0sin（ωｔ） ……（１） V2＝V0cos（ωｔ） ……（２） ただし、V0:電圧の瞬時値 ω：角周波数 t:時間 で表される電圧V1及びV2をそれぞれ印加すれば、振動体
３には ξ＝ξ０（cos（ωｔ）cos（kx） ＋sin（ωｔ）sin（kx）） ＝ξ0cos（ωｔ−kx） ……（３） ただし、ξ：曲げ振動の振幅値 ξ0:曲げ振動の瞬時値 k:波数（２π／λ） λ：波長 x:位置 で表せる、円周方向に進行する曲げ振動の進行波が励起
される。The piezoelectric body 2 of the ultrasonic motor configured as described above, together, the electrode having a phase difference of positionally quarter wavelength (= 90 deg) is configured, V 1 to the electrode ＝ V 0 sin (ωt) ・ ・ ・ (1) V 2 ＝ V 0 cos (ωt) ・ ・ ・ (2) where V 0 : instantaneous value of voltage ω: angular frequency t: voltage V 1 expressed by time and If V 2 is applied respectively, ξ = ξ 0 (cos (ωt) cos (kx) + sin (ωt) sin (kx)) = ξ 0 cos (ωt−kx) (3) However, , Ξ: Amplitude value of bending vibration ξ 0 : Instantaneous value of bending vibration k: Wave number (2π / λ) λ: Wavelength x: A traveling wave of bending vibration that advances in the circumferential direction, which can be represented by a position, is excited.
第５図は振動体３の表面のＡ点が進行波の励起によっ
て、長軸2w、短軸2uの楕円運動をし、振動体３上に加圧
して設置された移動体７が、楕円の頂点近傍で接触する
ことにより、摩擦力により波の進行方向とは逆方向にｖ
＝ωｕの速度で運動する様子を示している。FIG. 5 shows that the point A on the surface of the vibrating body 3 makes an elliptical motion of the long axis 2w and the short axis 2u by the excitation of the traveling wave, and the moving body 7 installed by pressing on the vibrating body 3 has an elliptic By contacting in the vicinity of the apex, frictional force causes v in the direction opposite to the traveling direction of the wave.
It shows a state of exercising at a speed of = ωu.
発明が解決しようとする課題 超音波モータは、振動体の振動エネルギーを、移動体
に伝達することにより、駆動力として取り出している。
従って、振動体の振動を妨げないような、しかも確実な
支持固定することが課題となっている。Problems to be Solved by the Invention An ultrasonic motor extracts vibration energy of a vibrating body as a driving force by transmitting it to a moving body.
Therefore, it is a subject to securely support and fix the vibration of the vibrating body without disturbing it.
本発明はかかる点に鑑みてなされたもので、振動の機
械的損失を小さくし、確実な位置固定ができる支持固定
によって、駆動効率のよい安定な超音波モータを提供す
ることを目的としている。The present invention has been made in view of the above points, and an object of the present invention is to provide a stable ultrasonic motor with high driving efficiency by supporting and fixing which can reduce mechanical loss of vibration and can reliably fix the position.
課題を解決するための手段 振動体として円板形の振動体を用い、振動モードとし
て径方向２次、周方向３次以上の曲げ振動を用い、かつ
振動体を上記振動モードの節円部近傍において、振動体
の厚みの中心近傍のみを介して支持固定する。Means for Solving the Problems A disk-shaped vibrating body is used as a vibrating body, a bending vibration of a radial second order, a circumferential third order or more is used as a vibration mode, and the vibrating body is in the vicinity of a node circle part of the vibration mode. In, the support is fixed only through the vicinity of the center of the thickness of the vibrating body.
作用 上記の構成によれば、振動体を上記振動モードの節円
部近傍において、振動体の厚みの中心近傍のみを介して
支持固定することにより、振動振幅の極めて小さい中性
面近傍での支持固定ができるので、振動の機械的損失を
小さくできるため、超音波モータを効率よく安定に駆動
することができる。Action According to the above configuration, the vibrating body is supported and fixed only near the center of the thickness of the vibrating body in the vicinity of the nodal circle of the vibration mode, thereby supporting in the vicinity of the neutral surface where the vibration amplitude is extremely small. Since it can be fixed, the mechanical loss of vibration can be reduced, so that the ultrasonic motor can be efficiently and stably driven.
実施例 以下、図面に従って本発明の実施例について詳細な説
明を行う。Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.
第１図は本発明の超音波モータの構成を示す切り欠き
斜視図である。円板形の弾性体１の主面の一方に、圧電
体として円板形の圧電体２を貼り合わせて振動体３を構
成している。また、弾性体１の他の主面には、機械出力
取り出し用の突起体４が構成されている。５は耐摩耗性
材料の摩擦材、６は弾性体であり、互いに貼合わせられ
て移動体７を構成している。移動体７は、摩擦材５を介
して、振動体３に設置された突起体４と加圧接触してい
る。圧電体２に電界を印加すると振動体３の周方向に曲
げ振動の進行波が励振され、移動体７を摩擦力により駆
動する。移動体７は回転軸８を中心に回転運動を始め
る。第２図は振動体３の支持穴の拡大断面図である。ま
た、第３図は径方向２次、周方向３次の曲げ振動を励振
した時の振動体３の振動変位状態と変位分布図である。FIG. 1 is a cutaway perspective view showing the configuration of an ultrasonic motor according to the present invention. The vibrating body 3 is configured by bonding the disc-shaped piezoelectric body 2 as a piezoelectric body to one of the main surfaces of the disc-shaped elastic body 1. Further, on the other main surface of the elastic body 1, a protrusion 4 for taking out mechanical output is formed. Reference numeral 5 is a friction material made of a wear resistant material, and 6 is an elastic body, which are bonded to each other to form a moving body 7. The moving body 7 is in pressure contact with the protrusion 4 installed on the vibrating body 3 via the friction material 5. When an electric field is applied to the piezoelectric body 2, a traveling wave of bending vibration is excited in the circumferential direction of the vibrating body 3, and the moving body 7 is driven by a frictional force. The moving body 7 starts rotating around the rotation axis 8. FIG. 2 is an enlarged sectional view of the support hole of the vibrating body 3. FIG. 3 is a vibration displacement state and displacement distribution diagram of the vibrating body 3 when the bending vibration of the secondary radial direction and the tertiary bending of the circumferential direction is excited.
第３図に示すように、振動体３に励振する振動モード
には、振動の節円部が存在するので、振動体３の上記節
円近傍に、第１図に示すように該節円を３分割するよう
に３点の穴をあけ、第２図に示すように、上記３点の穴
各々に上下からザグリを設け、振動体３の厚さの中心近
傍にのみネジ部を設ける。第１図に示したように支持基
台９の振動体側の上面に、上記振動の節円部に対応する
位置に突起を設け、かつ上記３点の穴に対応する位置に
穴を設け、ビス10によって振動体３を支持固定する。As shown in FIG. 3, in the vibration mode excited in the vibrating body 3, there is a nodal circle of vibration. Therefore, as shown in FIG. Two holes are drilled so as to be divided into three, and as shown in FIG. 2, counterbores are provided from above and below each of the three holes, and a screw portion is provided only near the center of the thickness of the vibrating body 3. As shown in FIG. 1, on the upper surface of the support base 9 on the side of the vibrating body, a protrusion is provided at a position corresponding to the node circle portion of the vibration, and holes are provided at positions corresponding to the three holes. The vibrating body 3 is supported and fixed by 10.
この機構によって、振動の振幅が極めて小さい中性面
近傍を介して振動体を支持固定することができるため、
振動の機械的損失が少く、しかも確実な支持固定ができ
る。With this mechanism, the vibrating body can be supported and fixed through the vicinity of the neutral surface where the amplitude of vibration is extremely small.
There is little mechanical loss of vibration, and moreover, it can be securely supported and fixed.
尚、図面には示していないが、第２図のようなネジ切
りの代わりに、３点の穴の上下からザグリを設け、振動
体３の厚さの中心近傍のみ穴の直径を小さくして、この
部分に支持棒を圧入して支持基台９に振動体を支持固定
しても同様の効果が得られる。Although not shown in the drawing, instead of threading as shown in FIG. 2, counterbores are provided from the top and bottom of the three-point hole, and the hole diameter is reduced only near the center of the thickness of the vibrating body 3. The same effect can be obtained by press-fitting the support rod into this portion and supporting and fixing the vibrating body on the support base 9.
発明の効果 本発明は、振動体として円板形の振動体を用い、振動
モードとして径方向２次、周方向３次以上の曲げ振動を
用い、かつ振動体を上記振動モードの節円部近傍におい
て、振動体の厚みの中心近傍のみを介して、振動体を支
持固定した超音波モータであるため、支持固定による振
動の機械的損失の少い、駆動効率のよい超音波モータを
提供できる。EFFECTS OF THE INVENTION The present invention uses a disk-shaped vibrating body as a vibrating body, uses bending vibration of radial second order, circumferential third order or higher as a vibration mode, and uses the vibrating body in the vicinity of a nodal circle of the vibration mode. In the above, since it is an ultrasonic motor in which the vibrating body is supported and fixed only through the vicinity of the center of the thickness of the vibrating body, it is possible to provide an ultrasonic motor with a small mechanical loss of vibration due to the supporting and fixing and a high driving efficiency.
第１図は、本発明の一実施例の超音波モータの切り欠き
斜視図、第２図は超音波モータの振動体支持穴の拡大断
面図、第３図は振動モードとして径方向２次、周方向３
次の曲げ振動を励振した時の円板形の振動体の振動状態
と径方向の変位分布図、第４図は従来の超音波モータの
きり欠き斜視図、第５図は超音波モータの動作原理の説
明図である。 １……弾性体、２……圧電体、３……振動体、４……突
起体、５……摩擦材、６……弾性体、７……移動体、８
……回転軸、９……支持基台、10……ビス。FIG. 1 is a cutaway perspective view of an ultrasonic motor according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of a vibrating body support hole of the ultrasonic motor, and FIG. Circumferential direction 3
Vibration state and radial displacement distribution diagram of the disk-shaped vibrating body when the following bending vibration is excited, Fig. 4 is a cutaway perspective view of a conventional ultrasonic motor, and Fig. 5 is an operation of the ultrasonic motor. It is explanatory drawing of a principle. 1 ... elastic body, 2 ... piezoelectric body, 3 ... vibrating body, 4 ... projection body, 5 ... friction material, 6 ... elastic body, 7 ... moving body, 8
...... Rotary axis, 9 ... Support base, 10 ... Screw.
Claims (1)
弾性体とから構成される振動体に弾性進行波を励振する
ことにより、該振動体上に接触して設置された移動体を
移動させる超音波モータにおいて、該振動体として円板
形の振動体を用い、振動モードとして径方向２次、周方
向３次以上の曲げ振動を用い、かつ該振動体を該振動モ
ードの節円部近傍において、該振動体の厚みの中心近傍
のみを介して、該振動体を支持固定することを特徴とす
る超音波モータ。1. A movement installed in contact with the piezoelectric body by driving the piezoelectric body with an alternating voltage to excite an elastic traveling wave in the vibrating body composed of the piezoelectric body and the elastic body. In an ultrasonic motor for moving a body, a disk-shaped vibrating body is used as the vibrating body, bending vibration of radial second order, circumferential third order or higher is used as the vibration mode, and the vibrating body An ultrasonic motor, wherein the vibrating body is supported and fixed only near the center of the thickness of the vibrating body in the vicinity of the nodal circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1235055A JP2507083B2 (en) | 1989-09-11 | 1989-09-11 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1235055A JP2507083B2 (en) | 1989-09-11 | 1989-09-11 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0398474A JPH0398474A (en) | 1991-04-24 |
| JP2507083B2 true JP2507083B2 (en) | 1996-06-12 |
Family
ID=16980418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1235055A Expired - Fee Related JP2507083B2 (en) | 1989-09-11 | 1989-09-11 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507083B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108696182A (en) * | 2018-05-30 | 2018-10-23 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100728370B1 (en) * | 2005-11-30 | 2007-06-14 | 엘지전자 주식회사 | Micro piezoelectric linear motor |
| KR100728371B1 (en) * | 2005-11-30 | 2007-06-14 | 엘지전자 주식회사 | Micro piezoelectric linear motor |
-
1989
- 1989-09-11 JP JP1235055A patent/JP2507083B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108696182A (en) * | 2018-05-30 | 2018-10-23 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
| CN108696182B (en) * | 2018-05-30 | 2019-06-07 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0398474A (en) | 1991-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4399386A (en) | Rotative motor using plural arrays of piezoelectric elements | |
| JPH01129782A (en) | Ultrasonic motor | |
| JP2507083B2 (en) | Ultrasonic motor | |
| US4399385A (en) | Rotative motor using a triangular piezoelectric element | |
| JPH01177877A (en) | Oscillatory wave motor | |
| JP2574284B2 (en) | Ultrasonic motor | |
| JP2769151B2 (en) | Ultrasonic motor | |
| JP2568707B2 (en) | Ultrasonic motor | |
| JP2636280B2 (en) | Driving method of ultrasonic motor | |
| JP3001956B2 (en) | Disk type ultrasonic motor | |
| JP2523634B2 (en) | Ultrasonic motor | |
| JPS60183981A (en) | Supersonic wave motor | |
| JP2543144B2 (en) | Ultrasonic motor | |
| JP3089750B2 (en) | Ultrasonic motor | |
| JP2506859B2 (en) | Ultrasonic motor | |
| JPH01177878A (en) | Oscillatory wave motor | |
| JP2537848B2 (en) | Ultrasonic motor | |
| JPH0479238B2 (en) | ||
| JPH04133676A (en) | Driving method for actuator and ultrasonic actuator realizing this driving method | |
| JPH02142368A (en) | Ultrasonic motor | |
| JP2885802B2 (en) | Ultrasonic motor | |
| JPS62196080A (en) | Ultrasonic motor | |
| JPH0636674B2 (en) | Ultrasonic motor | |
| JP2543160B2 (en) | Toroidal ultrasonic motor | |
| JPH067750B2 (en) | Ultrasonic motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |