JP2567913B2 - Ferroelectric ceramics - Google Patents
Ferroelectric ceramicsInfo
- Publication number
- JP2567913B2 JP2567913B2 JP63129797A JP12979788A JP2567913B2 JP 2567913 B2 JP2567913 B2 JP 2567913B2 JP 63129797 A JP63129797 A JP 63129797A JP 12979788 A JP12979788 A JP 12979788A JP 2567913 B2 JP2567913 B2 JP 2567913B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- ferroelectric ceramics
- piezoelectric
- ferroelectric
- nio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000919 ceramic Substances 0.000 title claims description 33
- 239000006104 solid solution Substances 0.000 claims description 15
- 229910021193 La 2 O 3 Inorganic materials 0.000 claims description 5
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 4
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 description 15
- 238000000034 method Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 229910020215 Pb(Mg1/3Nb2/3)O3PbTiO3 Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910002367 SrTiO Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 238000010532 solid phase synthesis reaction Methods 0.000 description 2
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Chemical class 0.000 description 1
- 239000002184 metal Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】 発明の技術分野 本発明は、Pb(Mg1/3Nb2/3)O3−PbTiO3−PbZrO3系強
誘電性セラミックスに関し、さらに詳しくは、大きな圧
電定数dを有するPb(Mg1/3Nb2/3)O3−PbTiO3−PbZrO3
系強誘電性セラミックスに関する。Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a Pb (Mg 1/3 Nb 2/3 ) O 3 —PbTiO 3 —PbZrO 3 ferroelectric ceramic, and more particularly, to a large piezoelectric constant d. Pb (Mg 1/3 Nb 2/3 ) O 3 -PbTiO 3 -PbZrO 3
System ferroelectric ceramics.
発明の技術的背景ならびにその問題点 従来、強誘電性セラミックスからなる圧電材料は、圧
電フィルタ、圧電トランス、超音波振動子あるいは圧電
ブザーなどの種々の用途に利用されている。これらの用
途に用いられている最も代表的な強誘電性セラミックス
としては、PbTiO3−PbZrO3系固溶体が知られている。ま
た、さらに圧電特性を改良したPb(Mg1/3Nb2/3)O3−Pb
TiO3−PbZrO3系固溶体(特公昭42−9716号公報など)な
らびにこれらの固溶体にBaTiO3、SrTiO3またはCaTiO3を
含有させた強誘電性セラミックスなども知られている。Technical Background of the Invention and Problems Thereof Conventionally, piezoelectric materials made of ferroelectric ceramics have been used for various applications such as a piezoelectric filter, a piezoelectric transformer, an ultrasonic vibrator, and a piezoelectric buzzer. As the most typical ferroelectric ceramics used for these applications, a PbTiO 3 -PbZrO 3 -based solid solution is known. Pb (Mg 1/3 Nb 2/3 ) O 3 -Pb with further improved piezoelectric properties
TiO 3 -PbZrO 3 -based solid solutions (JP-B-42-9716 and the like) and ferroelectric ceramics in which these solid solutions contain BaTiO 3 , SrTiO 3 or CaTiO 3 are also known.
ところで、圧電材料をたとえば変位制御用アクチュエ
ータとして用いることが検討されている。この場合、圧
電セラミックスにより電気エネルギーを機械的エネルギ
ーに変換し、この機械的エネルギーによって圧電セラミ
ックス自体が変位する必要があるため、圧電セラミック
スの圧電定数dを大きくする必要がある。By the way, use of a piezoelectric material as, for example, a displacement control actuator has been studied. In this case, electric energy is converted into mechanical energy by the piezoelectric ceramic, and the piezoelectric ceramic itself needs to be displaced by the mechanical energy. Therefore, it is necessary to increase the piezoelectric constant d of the piezoelectric ceramic.
一般に、圧電定数dと、電気機械結合係数Kおよび比
誘電率εとの間には、 なる関係があり、圧電定数dを大きくするためには、電
気機械結合係数Kおよび/または比誘電率εを大きくし
なければならない。Generally, between the piezoelectric constant d and the electromechanical coupling coefficient K and the relative permittivity ε, In order to increase the piezoelectric constant d, the electromechanical coupling coefficient K and / or the relative dielectric constant ε must be increased.
これまで、たとえばPb(Mg1/3Nb2/3)O3−PbTiO3−Pb
ZrO3系固溶体ならびにこれらの固溶体にBaTiO3、SrTiO3
またはCaTiO3を含有させた固溶体に、電気機械結合係数
Kおよび/または比誘電率εを大きくすることによっ
て、圧電定数dを大きくする目的で、さらに各種酸化物
を含有させた材料がいくつか提案されているが、圧電定
数dの大きさは必ずしく満足のいくレベルではない。た
とえばこれら固溶体にNiOをさらに含有させた場合、NiO
含有量の増加とともに圧電定数dが向上するが、限度を
越してNiOを含有させると、圧電定数dは低下してしま
う、これは、これら固溶体において、NiイオンがABO3で
表わされるペロブスカイト型結晶のBサイトに選択的に
入るため、限度を越してNiOを含有させると、Aサイト
のイオンが不足し、ついには一部のNiOがペロブスカイ
ト結晶に取り込まれなくなるためと考えられる。Until now, for example, Pb (Mg 1/3 Nb 2/3 ) O 3 -PbTiO 3 -Pb
ZrO 3 -based solid solutions and these solid solutions with BaTiO 3 and SrTiO 3
Alternatively, several materials are proposed in which a solid solution containing CaTiO 3 further contains various oxides for the purpose of increasing the piezoelectric constant d by increasing the electromechanical coupling coefficient K and / or the relative dielectric constant ε. However, the magnitude of the piezoelectric constant d is not always a satisfactory level. For example, when these solid solutions further contain NiO,
The piezoelectric constant d increases with the increase of the content, but when NiO is contained beyond the limit, the piezoelectric constant d decreases. This is because the perovskite type crystal in which Ni ions are represented by ABO 3 in these solid solutions. It is considered that when NiO is contained in excess of the limit because it selectively enters the B site, the ions at the A site become insufficient, and eventually some NiO is not incorporated into the perovskite crystal.
本発明者らは、このような知見に基づき、Niイオンの
ようなBサイトに入る金属イオンに加え、Aサイトに入
る金属イオンを併せて含有させることにより、これらの
酸化物をすべてプロブスカイト結晶中に取り込ませた場
合、Bサイトに入る金属イオンのみを含有させた場合に
比べ、圧電定数dをより大きくできることを見出して、
本発明を完成するに至った。Based on such knowledge, the present inventors have added all of these oxides to the perovskite crystal by including a metal ion such as Ni ion that enters the B site and a metal ion that enters the A site. It was found that the piezoelectric constant d can be made larger when incorporated into the film, as compared with the case where only metal ions entering the B site are contained.
The present invention has been completed.
発明の目的 本発明は、上記のような点に鑑みて完成されたもので
あって、電気機械結合係数Kおよび/または比誘電率ε
が大きく、したがって圧電定数dが大きく、圧電特性に
優れ、アクチュエータ等として用いて好適な強誘電性セ
ラミックスを提供することを目的としている。The present invention has been completed in view of the above points, and has an electromechanical coupling coefficient K and / or a relative dielectric constant ε.
Accordingly, an object of the present invention is to provide a ferroelectric ceramic which is suitable for use as an actuator or the like, having a large piezoelectric constant d and excellent piezoelectric characteristics.
発明の概要 このような目的を達成するために、本発明に係る強誘
電性セラミックスは、 Pb1-aMa(Mg1/3Nb2/3)xTiyZrZO3[ただし、MはBaまた
はSrであり、x+y+z=1]で表わされ、 a=0〜0.10 x=0.05〜0.70 y=0.25〜0.50 z=0.05〜0.70 であるペロブスカイト型固溶体に対し、下記のA群から
選ばれた少なくとも1種以上の酸化物と、下記のB群か
ら選ばれた少なくとも1種以上の酸化物(ただしNiOま
たはFe2O3は必ず含有される)とをともに含有せしめて
なるペロブスカイト型固溶体であることを特徴としてい
る。Summary of the Invention To achieve the above object, the ferroelectric ceramics according to the present invention, Pb 1-a M a ( Mg 1/3 Nb 2/3) x Ti y Zr Z O 3 [ However, M Is Ba or Sr and is represented by x + y + z = 1], and a = 0 to 0.10 x = 0.05 to 0.70 y = 0.25 to 0.50 z = 0.05 to 0.70 is selected from the following group A for the perovskite type solid solution. Perovskite-type solid solution containing at least one oxide selected from the group B and at least one oxide selected from the group B below (however, NiO or Fe 2 O 3 is always contained). It is characterized by being.
A群(La2O3、Bi2O3、Nd2O3) B群(NiO、Fe2O3、SnO2、Ta2O5) このような本発明に係る強誘電性セラミックスは、AB
O3で表わされるペロブスカイト型結晶におけるA,B両サ
イトに上記のような金属酸化物の金属イオンをそれぞれ
含有させるようにしたため、圧電定数dが、従来既知の
強誘電性セラミックスと比較して大幅に向上している。
したがって、本発明に係る強誘電性セラミックスは、ア
クチュエータ等の用途に用いた場合に優れた特性を示
す。Group A (La 2 O 3 , Bi 2 O 3 , Nd 2 O 3 ) Group B (NiO, Fe 2 O 3 , SnO 2 , Ta 2 O 5 ) Such ferroelectric ceramics according to the present invention is AB
Since the metal ions of the above metal oxides are contained at both the A and B sites in the perovskite-type crystal represented by O 3 , the piezoelectric constant d is significantly larger than that of the conventionally known ferroelectric ceramics. Has improved.
Therefore, the ferroelectric ceramics according to the present invention exhibit excellent characteristics when used for applications such as actuators.
発明の具体的説明 以下本発明に係る強誘電性セラミックスについて具体
的に説明する。Detailed Description of the Invention The ferroelectric ceramics according to the present invention will be specifically described below.
本発明に係る強誘電性セラミックスは、Pb1-aMa(Mg
1/3Nb2/3)xTiyZrZO3[ただし、MはBaまたはSrであ
り、x+y+z=1]で表わされ、a、x、y、zが下
記の範囲にあり、 a=0〜0.10、好ましくは0.01〜0.07 x=0.05〜0.70、好ましくは0.10〜0.60 y=0.25〜0.50、好ましくは0.30〜0.45 z=0.05〜0.70、好ましくは0.10〜0.60 このペロブスカイト型固溶体に対し、下記のA群から
選ばれた少なくとも1種以上の酸化物と、下記のB群か
ら選ばれた少なくとも1種以上の酸化物(ただしNiOま
たはFe2O3は必ず含有される)とをともに含有せしめて
なるペロブスカイト型固溶体である。Ferroelectric ceramics according to the present invention, Pb 1-a M a ( Mg
1/3 Nb 2/3 ) x Ti y Zr Z O 3 [wherein M is Ba or Sr, and x + y + z = 1], and a, x, y, and z are in the following ranges: a = 0 to 0.10, preferably 0.01 to 0.07 x = 0.05 to 0.70, preferably 0.10 to 0.60 y = 0.25 to 0.50, preferably 0.30 to 0.45 z = 0.05 to 0.70, preferably 0.10 to 0.60 For this perovskite solid solution, Contain both at least one oxide selected from the following Group A and at least one oxide selected from the following Group B (provided that NiO or Fe 2 O 3 is always contained): It is a perovskite-type solid solution that can be obtained.
A群(La2O3、Bi2O3、Nd2O3) B群(NiO、Fe2O3、SnO2、Ta2O5) 本発明に係る強誘電性セラミックスを構成するペロブ
スカイト型結晶をABO3で表わした場合、本発明では、A
サイトにはA群から選ばれた少なくとも1種以上の金属
酸化物が下記のような金属イオンの形態で入っており、
BサイトにはB群から選ばれた少なくとも1種以上の金
属酸化物(ただしNiOまたはFe2O3は必ず含有される)が
下記のような金属イオンの形態で入っている。Group A (La 2 O 3 , Bi 2 O 3 , Nd 2 O 3 ) Group B (NiO, Fe 2 O 3 , SnO 2 , Ta 2 O 5 ) Perovskite type crystal constituting the ferroelectric ceramics according to the present invention Is represented by ABO 3 , in the present invention, A
The site contains at least one or more metal oxides selected from Group A in the form of the following metal ions,
The B site contains at least one metal oxide selected from the group B (however, NiO or Fe 2 O 3 is always contained) in the form of metal ions as described below.
A群(La3+、Bi3+、Nd3+) B群(Ni2+、Fe3+、Sn4+、Ta5+) ここで、上記のPb1-aMa(Mg1/3Nb2/3)xTiyZrZO3[た
だし、MはBaまたはSr]なる固溶体に対し、A群の金属
イオンは該固溶体中のPbおよびM(MはBaまたはSr)の
合計原子当量100原子当量に対し、0.5〜5.0原子当量の
量で存在していることが望ましく、この範囲で圧電定数
dの向上効果が特に著しい。また、B群の金属イオンは
0.5≦N≦5.0(ただし、 は各々、A群、B群の金属イオンの原子価を表わし、x
Ai、xBjは各々、A群、B群の金属イオンの原子当量を
表わす)となる量で存在していることが望ましく、この
範囲で圧電定数dの向上効果が特に著しい。Group A (La 3+ , Bi 3+ , Nd 3+ ) Group B (Ni 2+ , Fe 3+ , Sn 4+ , Ta 5+ ) where Pb 1-a M a (Mg 1/3 Nb 2/3 ) x Ti y Zr Z O 3 [where M is Ba or Sr], the metal ion of group A is the total atomic equivalent of Pb and M (M is Ba or Sr) in the solid solution. It is desirable to exist in an amount of 0.5 to 5.0 atomic equivalents relative to 100 atomic equivalents, and the effect of improving the piezoelectric constant d is particularly remarkable in this range. The metal ions of group B are
0.5 ≦ N ≦ 5.0 (however, Represents the valencies of the metal ions of Group A and Group B, respectively, and x
Ai and xBj each desirably represent an atomic equivalent of the metal ions in Group A and Group B), and the effect of improving the piezoelectric constant d is particularly remarkable in this range.
このような本発明の組成を有した強誘電性セラミック
スは、焼結した際に各金属酸化物成分を提供しうるよう
な金属化合物たとえば金属酸化物あるいは金属塩などを
粉末状で用い、これを焼結することにより製造すること
ができる。これらの粉末状の金属化合物の製法は、特に
限定されるものではなく、液相法、固相法など種々の公
知の方法を用いることができる。たとえば、液相法にお
いては沈澱法、共沈法、アルコキシド法、ゾルゲル法な
どが適用でき、固相法においてはシュウ酸塩分解法、酸
化物混合法などが適用できる。以上いずれかの方法で得
られた粉末を800〜1000℃で仮焼し、この仮焼体をボー
ルミル粉砕したのち乾燥する。これを500〜1500kg/cm2
の圧力でプレス成形し、1000〜1300℃で焼成すれば、目
的とする強誘電性セラミックスが得られる。Such a ferroelectric ceramic having the composition of the present invention uses a metal compound such as a metal oxide or a metal salt which can provide each metal oxide component when sintered, in the form of powder. It can be manufactured by sintering. The method for producing these powdery metal compounds is not particularly limited, and various known methods such as a liquid phase method and a solid phase method can be used. For example, a precipitation method, a coprecipitation method, an alkoxide method, a sol-gel method and the like can be applied to the liquid phase method, and an oxalate decomposition method and an oxide mixing method can be applied to the solid phase method. The powder obtained by any of the above methods is calcined at 800 to 1000 ° C., and the calcined body is ball milled and then dried. 500 ~ 1500kg / cm 2
Press molding at a pressure of and firing at 1000 to 1300 ° C. yields the desired ferroelectric ceramics.
[実施例] 以下本発明を実施例によって説明するが、本発明はこ
れら実施例に限定されるものではない。[Examples] Hereinafter, the present invention will be described with reference to examples, but the present invention is not limited to these examples.
なお、径方向振動の電気機械結合係数(Kp)、比誘電
率(ε)および圧電定数(d31)の測定は電子材料工業
会標準規格(EMAS)に定められた方法に準拠して行なっ
た。The measurement of the electromechanical coupling coefficient (Kp), the relative dielectric constant (ε), and the piezoelectric constant (d 31 ) of the radial vibration was performed in accordance with the method defined in the Electronic Materials Industry Standard (EMAS). .
実施例1〜6、比較例1〜2 PbO、ZrO2、TiO2、MgCO3、Nb2O5、SrCO3、La2O3、NiO
およびSnO2を表1に示す組成を有するような量比に秤量
し、ボールミルにて粉砕混合した。得られた粉末を800
〜1000℃で1〜2時間仮焼し、この仮焼体をボールミル
粉砕したのち乾燥した。これを1000kg/cm2の圧力で力径
25mmの円板にプレス成形し、1050〜1250℃で1〜2時間
焼成した。かくして得られた焼結体を厚さ0.5mmまで研
磨したのち、両面に銀電極を塗布し、焼き付けた。さら
に、シリコンオイル中で20〜40KV/cmの直流電界を印加
することにより分極処理を施したのち、12時間エージン
グした試料を電気特性の測定に供した。Examples 1-6, Comparative Examples 1~2 PbO, ZrO 2, TiO 2 , MgCO 3, Nb 2 O 5, SrCO 3, La 2 O 3, NiO
And SnO 2 were weighed so as to have the composition shown in Table 1 and pulverized and mixed in a ball mill. 800 obtained powder
The calcined body was calcined at ~ 1000 ° C for 1 to 2 hours, and the calcined body was ground in a ball mill and then dried. This is applied at a pressure of 1000 kg / cm 2
It was press-molded into a 25 mm disk and fired at 1050-1250 ° C for 1-2 hours. After the thus obtained sintered body was polished to a thickness of 0.5 mm, silver electrodes were applied to both sides and baked. Furthermore, after applying a polarization treatment by applying a DC electric field of 20 to 40 KV / cm in silicon oil, the sample aged for 12 hours was subjected to measurement of electrical characteristics.
結果を表1に示す。 Table 1 shows the results.
表中、a、x、y、zは式Pb1-aSra(Mg1/3Nb2/3)xT
iyZrZO3[x+y+z=1]の各係数を表わし、p、
q、rはPbおよびRrの合計原子当量100原子当量に対す
る各金属イオンの原子当量を表わす。また、Nは は各々、A群、B群の金属イオンの原子価を表わし、x
Ai、xBjは各々、A群、B群の金属イオンの原子当量を
表わす)で定義される値を表わす。In the table, a, x, y, and z are represented by the formula Pb 1-a Sr a (Mg 1/3 Nb 2/3 ) x T
i y Zr Z O 3 Represents each coefficient of [x + y + z = 1], p,
q and r represent the atomic equivalent of each metal ion with respect to the total atomic equivalent of Pb and Rr of 100 atomic equivalents. N is Represents the valencies of the metal ions of Group A and Group B, respectively, and x
Ai and xBj represent the atomic equivalents of the metal ions in Group A and Group B, respectively.
実施例1〜6の結果より、比較例1のPb0.95Sr
0.05(Mg1/3Nb2/3)0.375Ti0.375Zr0.250O3なる組成を
有する強誘電性セラミックス(I)、あるいはこの強誘
電性セラミックス(I)にBサイトへ入るNi2+のみを加
えた比較例2の強誘電性セラミックスと比較して、強誘
電性セラミックス(I)にAサイトへ入るLa3+を含有さ
せ、しかもBサイトへ入るNi2+およびSn4+を併せて含有
させた強誘電性セラミックスは、より大きな圧電定数d
31を持つことがわかる。From the results of Examples 1 to 6, Pb 0.95 Sr of Comparative Example 1 was obtained.
0.05 (Mg 1/3 Nb 2/3 ) 0.375 Ti 0.375 Zr 0.250 O 3 Ferroelectric ceramics (I) having a composition of this composition, or only Ni 2+ entering the B site is added to this ferroelectric ceramics (I) Compared with the ferroelectric ceramic of Comparative Example 2, the ferroelectric ceramic (I) contains La 3+ that enters the A site, and also contains Ni 2+ and Sn 4+ that enter the B site. Ferroelectric ceramics have a larger piezoelectric constant d
You can see that you have 31 .
実施例7〜14 PbO、ZrO2、TiO2、MgCO3、Nb2O5、SrCO3と、A群(La
2O3、Bi2O3、Nd2O3)、B群(NiO、Fe2O3、SnO2、Ta
2O5)から選ばれた各々少なくとも1種以上の酸化物と
を、表2に示す組成を有するような量比に秤量し、ボー
ルミルにて粉砕混合した。以下、実施例1と同様の方法
で強誘電性セラミックスを作製し、電気特性を測定し
た。Example 7 to 14 PbO, and ZrO 2, TiO 2, MgCO 3 , Nb 2 O 5, SrCO 3, A group (La
2 O 3 , Bi 2 O 3 , Nd 2 O 3 ), Group B (NiO, Fe 2 O 3 , SnO 2 , Ta
At least one or more kinds of oxides selected from 2 O 5 ) were weighed in a weight ratio so as to have a composition shown in Table 2, and pulverized and mixed by a ball mill. Hereinafter, a ferroelectric ceramic was produced in the same manner as in Example 1 and its electric characteristics were measured.
結果を表2に示す。 The results are shown in Table 2.
これらの実施例からも、上記の強誘電性セラミックス
(I)に上記A群、B群の金属イオンをともに含有させ
ることにより、圧電定数d31が向上していることがわか
る。From these examples, the above-mentioned group A in the above ferroelectric ceramics (I), by both the inclusion of metal ions of the group B, it can be seen that the piezoelectric constant d 31 is improved.
実施例15〜17、比較例3〜5 Pb1-aSra(Mg1/3Nb2/3)xTiyZrZO3[x+y+z=
1]の各係数が実施例1〜14とは異なる強誘電性セラミ
ックスにLa3+、Ni2+およびSn4+を表3に示すような組成
を有するように所定量含有させた強誘電性セラミックス
を実施例1と同様の方法で作製し、電気特性を測定し
た。Examples 15 to 17 and Comparative Examples 3 to 5 Pb 1-a Sr a (Mg 1/3 Nb 2/3 ) x Ti y Zr Z O 3 [x + y + z =
Ferroelectricity in which a predetermined amount of La 3+ , Ni 2+ and Sn 4+ is contained in a ferroelectric ceramic having a coefficient different from that of Examples 1 to 14 so as to have a composition as shown in Table 3. Ceramics were produced in the same manner as in Example 1 and the electrical characteristics were measured.
結果を表3に示す。 Table 3 shows the results.
実施例18、比較例6 実施例1および比較例1でSrCO3の代わりにBaCO3を使
用した以外は、実施例1および比較例1と同様の方法で
強誘電性セラミックスを作製し、電気特性を測定した。Example 18, Comparative Example 6 Ferroelectric ceramics were prepared in the same manner as in Example 1 and Comparative Example 1 except that BaCO 3 was used instead of SrCO 3 in Example 1 and Comparative Example 1, and the electrical characteristics Was measured.
結果を表3に示す。 Table 3 shows the results.
発明の効果 以上の説明から明らかなように、本発明に係る強誘電
性セラミックスは、ABO3で表わされるペロブスカイト型
結晶におけるA,B両サイトに各々入り得る金属イオンを
含有させ、これらの酸化物をすべてペロブスカイト結晶
中に取り込ませたため、圧電定数dが、従来既知の強誘
電性セラミックスと比較して大幅に向上している。した
がって、本発明に係る強誘電性セラミックスは、アクチ
ュエータ等の用途に用いた場合に優れた特性を示すこと
ができる。 Effects of the Invention As is clear from the above description, the ferroelectric ceramics according to the present invention contains metal ions that can enter both the A and B sites in the perovskite-type crystal represented by ABO 3 and these oxides are used. Is entirely taken into the perovskite crystal, so that the piezoelectric constant d is greatly improved as compared with the conventionally known ferroelectric ceramics. Therefore, the ferroelectric ceramics according to the present invention can exhibit excellent characteristics when used for applications such as actuators.
Claims (1)
し、MはBaまたはSrであり、x+y+z=1]で表わさ
れ、 a=0〜0.10 x=0.05〜0.70 y=0.25〜0.50 z=0.05〜0.70 であるペロブスカイト型固溶体に対し、下記のA群から
選ばれた少なくとも1種以上の酸化物と、下記のB群か
ら選ばれた少なくとも1種以上の酸化物(ただしNiOま
たはFe2O3は必ず含有される)とをともに含有せしめて
なるペロブスカイト型固溶体であることを特徴とする強
誘電性セラミックス。 A群(La2O3、Bi2O3、Nd2O3) B群(NiO、Fe2O3、SnO2、Ta2O5)1. Pb 1-a M a (Mg 1/3 Nb 2/3 ) x Ti y Zr Z O 3 [wherein M is Ba or Sr and x + y + z = 1], and a = 0 to 0.10 x = 0.05 to 0.70 y = 0.25 to 0.50 z = 0.05 to 0.70 For perovskite type solid solution, at least one oxide selected from the following group A and the following group B are selected: Ferroelectric ceramics, which is a perovskite-type solid solution containing at least one oxide (however, NiO or Fe 2 O 3 is always included). Group A (La 2 O 3 , Bi 2 O 3 , Nd 2 O 3 ) Group B (NiO, Fe 2 O 3 , SnO 2 , Ta 2 O 5 )
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63129797A JP2567913B2 (en) | 1988-05-27 | 1988-05-27 | Ferroelectric ceramics |
MYPI89000687A MY104019A (en) | 1988-05-27 | 1989-05-23 | Ferroelectric ceramic material. |
US07/356,135 US4940681A (en) | 1988-05-27 | 1989-05-24 | Ferroelectric ceramic material |
EP89305332A EP0344978B1 (en) | 1988-05-27 | 1989-05-25 | Ferroelectric ceramic material |
AT89305332T ATE83762T1 (en) | 1988-05-27 | 1989-05-25 | FERROELECTRIC CERAMIC MATERIAL. |
DE8989305332T DE68903997T2 (en) | 1988-05-27 | 1989-05-25 | FERROELECTRIC CERAMIC MATERIAL. |
CA000600774A CA1335933C (en) | 1988-05-27 | 1989-05-26 | Ferroelectric ceramic material |
CN89103700A CN1018225B (en) | 1988-05-27 | 1989-05-27 | Ferroelectric ceramic material |
KR1019890007123A KR910009892B1 (en) | 1988-05-27 | 1989-05-27 | Ferroelectric ceramic material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63129797A JP2567913B2 (en) | 1988-05-27 | 1988-05-27 | Ferroelectric ceramics |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01298060A JPH01298060A (en) | 1989-12-01 |
JP2567913B2 true JP2567913B2 (en) | 1996-12-25 |
Family
ID=15018468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63129797A Expired - Lifetime JP2567913B2 (en) | 1988-05-27 | 1988-05-27 | Ferroelectric ceramics |
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Country | Link |
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JP (1) | JP2567913B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100537137B1 (en) * | 2003-07-11 | 2005-12-16 | (주)아이블포토닉스 | Ferroelectric ceramic single crystal material and manufacturing method thereof |
DE102007045089A1 (en) * | 2007-09-07 | 2009-03-12 | Epcos Ag | Ceramic material, method for producing the same and electroceramic component comprising the ceramic material |
JP5935187B2 (en) * | 2012-08-10 | 2016-06-15 | 日本特殊陶業株式会社 | Piezoelectric ceramics and piezoelectric actuator using the same |
-
1988
- 1988-05-27 JP JP63129797A patent/JP2567913B2/en not_active Expired - Lifetime
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JPH01298060A (en) | 1989-12-01 |
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