JP2024104633A - Titrating device and concentration management system including the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a titrating device capable of more accurately measuring concentration of an effective constituent included in liquid, and to obtain a concentration management system using the same.

SOLUTION: Provided is a titrating device 1 that includes a container section 2 having an opening in an upper side and an effluent tube 3 disposed inside via the opening of the container section while the effluent tube 3 is held so as to be moved vertically. The titrating device 1 may have a holding section 4 for holding the effluent tube so as to be moved vertically. The holding section 4 includes an elevation device 41, a shaft 42, and a holding arm 43, and the holding arm 43 holds the effluent tube 3.

SELECTED DRAWING: Figure 1

COPYRIGHT: (C)2024,JPO&INPIT

Description

Application for application of Article 30, Paragraph 2 of the Patent Act filed (1) Publication date: September 26, 2022, Disclosed by: Kyoseki Sangyo Co., Ltd., Disclosed at: Kyocera Corporation (Head office address: 6 Takeda Tobatono-cho, Fushimi-ku, Kyoto City, Kyoto Prefecture) Kagoshima Sendai Plant (1810 Takajo-cho, Satsumasendai City, Kagoshima Prefecture) (2) Publication date: September 28, 2022, Disclosed by: Kyoseki Sangyo Co., Ltd., Disclosed at: Ibiden Co., Ltd. (Head office address: 2-1 Kanda-cho, Ogaki City, Gifu Prefecture) Ogaki Central Business Office (100-1 Kasanui-cho, Ogaki City, Gifu Prefecture)

The present invention relates to a titration device and a concentration management system including the titration device.

There are technical fields that require strict concentration control of specific components contained in liquids. For example, a resist stripper used in the manufacturing process of semiconductor substrates is used to strip the resist film applied to the semiconductor substrate, but as the resist film is stripped by the resist stripper, the concentration of the active ingredient in the stripper, such as an organic amine compound, gradually decreases. As the concentration of the active ingredient decreases, the efficiency of stripping the resist film gradually decreases, so it is necessary to monitor the concentration of the active ingredient in the resist stripper and adjust the concentration as appropriate.

When analyzing the concentration of the active ingredient in such a stripping solution, it is common to measure the change in concentration of the active ingredient in the resist stripping solution by neutralization titration, oxidation-reduction titration, or measuring the change in absorbance of the resist stripping solution. In addition, in order to perform the resist stripping process continuously, the monitoring and concentration adjustment as described above must also be performed continuously. The following Patent Document 1 discloses an invention of a monitoring system that includes a reaction tank to which a solution is supplied, an indicator burette that drips an indicator into the reaction tank, a reagent burette that drips an acidic reagent into the reaction tank, an absorptiometry detector immersed in the solution, a measuring device that controls the indicator burette, the reagent burette, and the absorptiometry detector and analyzes the transmittance of the solution detected by the absorptiometry detector to measure the alkalinity of the solution, a first system that collects a sample of the treatment liquid from a treatment tank that stores an alkaline treatment liquid and supplies it to the reaction tank as the solution, a discharge system that discharges the solution from the reaction tank, and a control device, where the control device controls the operation of the first system, outputs a completion signal to the measurement device when the supply of the solution to the reaction tank is completed, and controls the discharge system to discharge the solution from the reaction tank when the measurement of the alkalinity by the measurement device is completed.

JP 2021-60242 A

By using the monitoring system of Patent Document 1, it is possible to continuously monitor and manage the concentration of the active ingredient contained in the liquid, but there is a growing demand to further improve the accuracy of the monitoring and concentration management in Patent Document 1.

As a result of extensive research, the inventors have found that the above problems can be solved by a specific configuration, and have arrived at the present invention.
That is, the present invention provides:
[1] A container portion having an opening on an upper side,
a drainage tube disposed inside the container portion through an opening thereof, the drainage tube being held so as to be movable up and down;
[2] The titration device according to [1], wherein the drainage tube is held by a holding part that is arranged above the container part and can move up and down.
[3] The titration device according to [1], wherein the bottom of the container portion has a slope.
[4] The titration apparatus according to [3], further comprising a stirring means and a measurement sensor, the tips of the stirring means and the measurement sensor being fixed at or above the starting point of the inclination of the bottom portion.
[5] The titration apparatus according to [1], further comprising a stirring means and a measurement sensor, the stirring means and the measurement sensor being held so as to be movable up and down.
[6] The titration apparatus according to [1], further comprising a stirring means and a measurement sensor, the stirring means and the measurement sensor being held by a vertically movable holding part disposed above the container part.
[7] The titration device according to [1], in which the titration solution is supplied from a titration solution supply tube by a pump capable of continuously supplying a constant volume of titration solution, and [8] a concentration management system including the titration device according to any one of [1] to [7].

By using the titration device of the present invention, when it is necessary to continuously monitor and manage the concentration of an active ingredient in a sample, particularly a liquid sample, it becomes possible to more accurately and continuously measure the concentration of an active ingredient in, for example, a resist stripping solution or an etching solution used in a resist stripping or etching process.

1 is a diagram showing one embodiment of a titration device of the present invention. 1 is a diagram showing various examples of the shape of the container portion; FIG. 1A is a schematic diagram showing one form of holding a drainage tube with rollers, (B) is a schematic diagram showing the state in which the drainage tube is lowered using the rollers of (A), and (C) is a schematic diagram showing the state in which the drainage tube is raised using the rollers of (A). FIG. 1A is a front view of a holding part that moves the drainage tube up and down, (B) the holding part of (A) with the shaft raised, and (C) a plan view of the holding part of (A). (A) A schematic diagram illustrating the situation in which a measured sample is discharged through a drainage tube lowered downward, (B) a schematic diagram of a titration device with the drainage tube raised upward, and (C) a schematic diagram illustrating the situation in which a measured sample is supplied with the drainage tube raised upward. 1 is a drawing showing one form of titration device in which a drainage tube, stirring means and measurement sensor are held in the same holder. FIG. 1 is a system configuration diagram showing an example of a concentration management system. 1 is a diagram showing an example of a flow of concentration management by a concentration management system.

A preferred embodiment of the present invention will be described with reference to the drawings. It goes without saying that the present invention is not limited to the following embodiments and aspects, and various modifications are possible within the technical scope of the present invention. In addition, "up and down," "front and back," and "left and right" in the text refer to the directions shown in each drawing.

As shown in FIG. 1, the titration device 1 of the present invention is a titration device including a container part 2 having an opening on the upper side, and a drainage tube 3 that is disposed inside the container part through the opening and is held so as to be movable up and down. In addition to the above components, the titration device 1 of the present invention also includes a stirring means 5, a measurement sensor 6, a titration liquid supply tube 7, a sampling tube 8, and a load cell unit 9. Each component will be described in detail below.

1. Container part 2
The container part 2 of the present invention is a container having an opening on its upper side. Any container conventionally used in titration devices can be used as the container part 2 of the present invention. The material of the container can be selected without particular limitation from resin materials such as polycarbonate and acrylic, and materials such as glass, provided that the material is not excessively damaged by the measurement sample and titration solution. The capacity of the container part 2 can be appropriately adjusted based on the type and amount of the measurement sample and titration solution. A specific capacity of the container part 2 can be, for example, 50 to 200 ml.

Preferably, the bottom of the container 2 has an incline. By having an incline in the bottom of the container 2, the sample after the measurement is completed flows toward the bottom along the incline. By extending the drainage tube 3 described later to the bottom of the incline, the sample after the measurement is completed can be more efficiently sucked out by the drainage tube 3. In addition, by having an incline in the bottom of the container 2, when the tips of the stirring means 5 and the measurement sensor 6 are fixed to be located at the starting point of the incline or above the starting point as described later, it is not necessary to supply an excessive amount of diluent when supplying a measurement sample in an amount that does not immerse the stirring means 5 and the measurement sensor 6, and then immersing the stirring means 5 and the measurement sensor 6 in the diluent. The shape and angle of the incline can be appropriately adjusted on the condition that the above-mentioned effect can be achieved. For example, as shown in FIG. 2(A), the shape may be inclined in one direction from one wall of the container 2 toward the opposite wall, or as shown in (B), the incline may be provided toward the center of the bottom of the container 2. In addition, when the incline is provided toward the center of the bottom of the container part 2, the apex of the incline may have an angle as in (B), or may have a flat surface with the apex of the crossing incline cut as in (C). As described later, when the titration device 1 includes a load cell unit 9, the load cell unit 9 can perform mass measurement more accurately, so a shape in which the incline is provided toward the center of the bottom of the container part 2 and the apex of the incline is cut as in (C) is more preferable. In addition, the angle of the incline can be adjusted as appropriate, but for example, by setting the angle of the incline (θ in FIG. 2(C)) to about 30±5°, the measured sample can be more efficiently drawn out by the drainage tube 3 and the size of the container part 2 is not excessively large, which is preferable.

2. Drainage tube 3
The drainage tube 3 is a tube that is disposed inside the container part through the opening and is held so as to be movable up and down. The drainage tube 3 can be a tube that has been conventionally used in titration devices, such as a silicon tube, without any particular restrictions. The drainage tube 3 is connected to a pump or the like, and by driving the pump, liquid can be sucked from its tip and discharged outside the container part 2. A burette may be provided at the tip of the drainage tube 3. As a method for holding the drainage tube 3 so as to be movable up and down, for example, as shown in FIG. 3(A), the drainage tube 3 may be held by being clamped between two rollers 31, 31 rotatably fixed to the housing of the titration device 1. The rollers 31, 31 are connected to a motor, and the rotation of the motor is controlled as shown in FIG. 3(B) to move the drainage tube 3 upward, and the drainage tube 3 can be moved downward by controlling the rotation as shown in FIG. 3(C).

The drainage tube 3 may also be held by a holding part 4 arranged above the container part 2 and capable of moving up and down. An example of a specific shape of the holding part 4 is shown in FIG. 4. The holding part 4 includes a lifting device 41, a shaft 42 that moves up and down by driving the lifting device 41, and a holding arm 43 supported by the shaft 42. The lifting device 41 can be a mechanism that can move the shaft 42 up and down, such as an air cylinder, a robot cylinder, or a hydraulic cylinder, without any particular restrictions. The shaft 42 is a rod-shaped member made of metal or resin, and moves up and down by the lifting device 41 as described above. The holding arm 43 is a member made of metal or resin, and has a hole 44 penetrating in the up and down direction. The holding arm 43 is a member supported above the shaft 42 and is provided in a direction approximately perpendicular to the axial direction of the shaft 42. There is no particular restriction on the shape of the holding arm 43, provided that it is a shape that can hold the drainage tube 3 (in FIG. 4, the holding arm 43 is a rod-shaped rectangular parallelepiped). If the drainage tube 3 can be moved up and down using only the shaft 42, the holding arm 43 is not particularly necessary. The holding arm 43 moves up and down as the shaft 42 moves up and down as shown in Figures 4 (A) and (B). The drainage tube 3 is held in the holding part 4 by passing it through a hole 44 opened in the holding arm 43, and its tip is placed inside the container part 2.

After the titration by the titration device 1 is completed, the tip of the drainage tube 3 is placed at the bottom of the container part 2 in order to suck out the sample after completion (see FIG. 5(A)). The pump connected to the drainage tube 3 is driven to remove the measured sample (S in FIG. 5(A)) inside the container part 2. After removing the measured sample, the drainage tube 3 is lifted up from the bottom of the container part 2 (see FIG. 5(B)). With the drainage tube 3 lifted up from the bottom, the sample to be measured (S' in FIG. 5(C)) is supplied from the sampling tube 8 described later (see FIG. 5(C)). Here, if the drainage tube 3 is immersed in the sample when the sample is supplied inside the container part 2, it becomes extremely difficult to accurately measure the mass of the measurement sample supplied due to the mass of the drainage tube 3. In the measurement device of the present invention, when supplying a measurement sample into the container 2, the drainage tube 3 is raised from the bottom of the container 2 so that the drainage tube 3 is not immersed in the supplied sample, allowing the initial mass of the supplied sample to be measured more accurately, and the concentration of the active ingredient contained in the measurement sample to be measured more accurately by titration.

4. Stirring means 5
The stirring means 5 is provided to stir the measurement sample and titration solution supplied inside the container part 2. The stirring means 5 may be disposed, for example, inside the container part 2 and fixed to a wall or the like inside the housing of the titration device 1. As the stirring means 5, any stirring means that has been conventionally used in titration can be used without any particular restrictions. Examples of such stirring means include a propeller (disper) rotated by a motor and a magnetic stirrer. It is more preferable to use a disper so that the initial mass of the measurement sample can be measured more accurately without being affected by the mass of the rotor.

5. Measurement sensor 6
The measurement sensor 6 is a sensor used when measuring the concentration of an active ingredient contained in a measurement sample during titration. The measurement sensor 6 may be disposed in the container part 2 and fixed to a wall or the like inside the housing of the titration device 1. As the measurement sensor 6, any sensor that has been conventionally used in titration can be used without any particular restrictions. Examples of such sensors include a pH sensor and an absorbance sensor.

When providing the stirring means 5 and the measurement sensor 6 as described above, it is more preferable that the tips of the stirring means 5 and the measurement sensor 6 are fixed at or above the starting point of the inclination at the bottom of the container part 2. Here, "at or above the starting point of the inclination at the bottom of the container part 2" means at or above the position α in FIG. 1. By fixing the stirring means 5 and the measurement sensor 6 at the above-mentioned positions, the amount of the measurement sample supplied to the inside of the container part 2 can be adjusted to easily prevent the stirring means 5 and the measurement sensor 6 from being immersed in the measurement sample, and the mass measurement of the measurement sample supplied to the inside of the container part 2 can be performed more accurately.

When providing the stirring means 5 and the measurement sensor 6 as described above, the stirring means 5 and the measurement sensor 6 may be held so as to be movable up and down. By holding the stirring means 5 and the measurement sensor 6 so as to be movable up and down, the stirring means 5 and the measurement sensor 6 can be raised to a position where they are not immersed in the measurement sample when supplying the measurement sample inside the container part 2, and the mass measurement of the measurement sample can be performed more accurately. When holding the stirring means 5 and the measurement sensor 6, the mechanism used to hold the drainage tube 3 so as to be movable up and down can be used without any particular restrictions. Specifically, for example, the stirring means 5 and the measurement sensor 6 may be held by a holding part that is arranged above the container part 2 and is movable up and down. The holding tool for the stirring means 5 and the measurement sensor 6 may be the same as the holding tool 4 for holding the drainage tube 3. Also, as shown in FIG. 6, the drainage tube 3, the stirring means 5, and the measurement sensor 6 may be held by the same holding tool 4.

6. Titration solution supply tube 7
The titration liquid supply tube 7 is a tube for supplying a titration liquid used when titrating a measurement sample. The titration liquid supply tube 7 may be arranged in the container part 2 at a position where the tip is not immersed in the measurement sample, and may be fixed to a wall or the like inside the housing of the titration device 1. The titration liquid supply tube 7 is connected to a pump or the like, and the titration liquid is supplied from a container such as a tank that stores the titration liquid to the inside of the container part 2 through the titration liquid supply tube 7 by driving the pump. As the titration liquid supply tube 7, a tube that has been conventionally used in a titration device, for example, a silicon tube, may be used without any particular limitation. A burette may be provided at the tip of the titration liquid supply tube 7.

It is more preferable to use a pump that can continuously supply a constant volume of titration liquid as the pump connected to the titration tube. By using such a pump, the titration liquid can be dripped continuously and with higher precision. A specific example of such a pump is a precision metering pump, specifically a micro-ceramic pump (e.g., Micro-ceramic Pump MSP series manufactured by Yamazen Corporation).

9. Sampling tube 8
The sampling tube 8 is a tube for supplying a sample to be measured, for example, a resist stripping solution, from a resist stripping solution tank of the resist stripping device into the container section 2. For example, the sampling tube 8 may be arranged in the container section 2 at a position where its tip is not immersed in the measurement sample, and may be fixed to a wall or the like inside the housing of the titration device 1. The sampling tube 8 is connected to a pump or the like, and the measurement sample is supplied from a container such as a tank to the inside of the container section 2 through the sampling tube 8 by driving the pump. As the sampling tube 8, a tube conventionally used in a titration device, for example, a silicon tube, or the like, may be used without any particular restrictions. A burette may be provided at the tip of the sampling tube 8.

10. Load cell unit 9
The load cell unit 9 is installed under the container part 2. The load cell unit 9 can measure the mass of the sample supplied into the container part 2 through the sampling tube 8. A specific example of such a load cell unit 9 is an electronic top-pan balance.

11. Concentration Control System The concentration control system of the present invention is a system including the titration device 1. FIG. 7 is an example of the concentration control system of the present invention, particularly a concentration control system for adjusting the concentration in a resist stripping device (hereinafter referred to as "concentration control system A"), and is a system configuration diagram including the titration device 1 of FIG. 1. The drainage tube 3 of the titration device 1 is connected to a drainage line for discharging the measured sample to the outside via a pump and an electromagnetic valve. The lower part of the glass container part 2 is provided with an inclination toward the center of the bottom, and a flat surface is provided where the apex formed by the intersection of the inclination is cut. The stirring means 5 and the measurement sensor 6 are fixed so that their tips are above the starting point of the inclination. A pH sensor is used as the measurement sensor 6, and the pH sensor is connected to a pH amplifier B for amplifying a signal from the pH sensor. The titration liquid supply tube 7 of the titration device 1 is connected to a tank C storing a titration liquid, for example, dilute hydrochloric acid, via a pump and an electromagnetic valve. Although only one titration liquid supply tube 7 and one titration liquid tank C are shown in FIG. 7, two or more of these may be provided as necessary. The sampling tube 8 is connected to a resist stripping liquid tank of a resist stripping device, which is an external device, via a pump and an electromagnetic valve. As the load cell unit 9, an electronic top-pan balance is used.

The titration device 1 is further provided with a diluent supply tube D for diluting the sample supplied from the sampling tube 8, and the diluent supply tube D is connected to a tank E in which a diluent, for example ethanol, is stored via a pump and an electromagnetic valve. Although only one diluent supply tube D and one diluent tank E are shown in FIG. 7, two or more of these may be provided as necessary. In addition, the titration device 1 is provided with a pure water supply tube F, and the pure water supply tube F is connected to a pure water line via a pump and an electromagnetic valve.

The pumps, solenoid valves, load cell unit 9, pH amplifier B, motors in the stirring means 5, and lifting device 41 of the holding unit 4 are connected to a programmable logic controller G (hereinafter simply referred to as PLC), and the input and output of data and the on/off of each device are controlled by the PLC. The PLC is equipped with a touch panel H that is used to operate the concentration management system A.

Figure 8 shows a concentration management flow using the concentration management system A shown in Figure 7. In the initial stage, the drainage tube 3 is held in an elevated position. First, step 1 is a sample injection step. In step 1, a pump and an electromagnetic valve connected to the sampling tube 8 are driven, and a certain amount of sample is supplied from the resist stripper tank, which is an external device, into the container section 2. The amount of sample supplied is an amount that does not immerse the stirring means 5, the measurement sensor 6, and the raised drainage tube 3 in the sample. Next, step 2 is a sample measurement step. In step 2, the mass of the sample supplied into the container section 2 is measured by the load cell unit 9. The measured mass data is recorded in the PLC. Next, step 3 is a diluent injection step. In step 3, a pump and an electromagnetic valve connected to the diluent supply tube D are driven, and a certain amount of diluent is supplied from the diluent tank E into the container section 2, and the stirring means 5 and the measurement sensor 6 are immersed in the diluted sample. Next, the motor of the stirring means 5 is driven and the diluted sample is stirred by the stirring means 5.

Next, step 4 is a titration step. In step 4, the pump and solenoid valve connected to the titration liquid supply tube 7 are driven to start titrating a predetermined amount of titration liquid from the titration liquid tank C. The titration step is continued until the measurement sample is neutralized. At the same time, the stirring means 5 is driven to stir the diluted sample while dripping the titration liquid. The amount of titration liquid used to neutralize the measurement sample is recorded in the PLC. Next, step 5 is a calculation step. In step 5, the amount of active ingredient to be supplied to the resist stripping liquid tank is calculated from the titration result. The calculation data is output from the PLC to the resist stripping device, which is an external device. The resist stripping device, which receives the calculation data, supplies a predetermined amount of active ingredient to the resist stripping liquid tank based on the calculation result.

Next, step 6 is a discharge tube lowering step. In step 6, the lifting device 41 is driven to lower the drainage tube 3 until it reaches the bottom of the container part 2, specifically, near the plane of the bottom. Next, step 7 is a measurement liquid discharge step. In step 7, the pump and solenoid valve connected to the drainage tube 3 are driven to aspirate the measured sample inside the container part 2 and discharge it to the outside. Next, step 8 is a discharge tube raising process. In step 8, the lifting device 41 is driven to raise the drainage tube 3 to a predetermined position. Next, step 9 is a cleaning step. In step 9, the pump and solenoid valve connected to the pure water supply tube F are driven to supply pure water to the inside of the container part 2 until the inside of the container part 2, the stirring means 5, and the measurement sensor 6 are immersed in the pure water, and the inside of the container part 2, the stirring means 5, and the measurement sensor 6 are washed. At this time, the stirring means 5 may be driven to stir the pure water as necessary. Next, step 10 is a discharge tube lowering step. In step 10, the lifting device 41 is driven to lower the drainage tube 3 until it reaches the bottom of the container 2, specifically near the plane of the bottom. Next, step 11 is a cleaning liquid discharge step. In step 11, the pump and solenoid valve connected to the drainage tube 3 are driven to suck up the post-cleaning liquid inside the container 2 and discharge it to the outside. Next, step 12 is a drainage tube lifting process. In step 12, the lifting device 41 is driven to raise the drainage tube 3 to a predetermined position.

By repeating steps 1 to 12 as described above, measurements can be performed continuously. Furthermore, when the measurement is to be ended, the concentration control system A can be stopped at the point where steps 11 or 12 have been performed. By using the concentration control system A as described above, more accurate concentration measurements can be performed continuously by the dropping device 1 of the present invention, and the concentration of the active ingredient in the stripping solution tank can be controlled continuously and more accurately.

The titration device of the present invention can be used in liquid concentration management systems used in, for example, resist stripping devices, etching devices, plating devices, etc. It is also possible to replace the titration device in an existing concentration management system with the titration device of the present invention.

Further aspects of the invention are described below.
[1] A container portion having an opening on an upper side,
a drainage tube disposed inside the container portion through an opening thereof, the drainage tube being held so as to be movable up and down;
[2] The titration device according to [1], wherein the drainage tube is held by a holding part that is arranged above the container part and can move up and down.
[3] The titration apparatus according to [1] or [2], wherein the bottom of the container portion has a slope.
[4] The titration apparatus according to [3], further comprising a stirring means and a measurement sensor, the tips of the stirring means and the measurement sensor being fixed at or above the starting point of the inclination of the bottom portion.
[5] The titration device according to any one of [1] to [3], further comprising a stirring means and a measurement sensor, the stirring means and the measurement sensor being held so as to be movable up and down.
[6] The titration device according to any one of [1] to [3], further comprising a stirring means and a measurement sensor, the stirring means and the measurement sensor being held by a vertically movable holding part disposed above the container part.
[7] A concentration management system including the titration device according to any one of [1] to [6], in which a titration solution is supplied from a titration solution supply tube by a pump, the pump being capable of continuously supplying a constant volume of titration solution, and the titration device according to any one of [8] to [1] to [7].

The titration device and concentration management system of the present invention allow for more accurate and continuous measurement of the concentration of active ingredients contained in a measurement sample, particularly a liquid sample, making it possible to perform processes such as resist stripping and etching more efficiently and continuously.

1: Titration device
2: Container part
3: Drainage tube
4: Holding part, 41: Lifting device, 42: Shaft, 43: Holding arm, 44: Hole, 5: Stirring means
6: Measurement sensor
7: Titration solution supply tube
8: Sampling tube
9: Load cell unit
A: Concentration control system, B: pH amplifier, C: Titration solution tank, D: Dilution solution supply tube, E: Dilution solution tank, F: Pure water supply tube, G: PLC, H: Touch panel

Claims (8)

A container portion having an opening on an upper side;
a drainage tube disposed inside the container portion through an opening thereof, the drainage tube being held so as to be movable up and down. The titration device according to claim 1, wherein the drainage tube is held by a holding part that is arranged above the container part and can move up and down. The titration device according to claim 1, wherein the bottom of the container portion has a slope. The titration device according to claim 3, further comprising a stirring means and a measurement sensor, the tips of the stirring means and the measurement sensor being fixed at or above the starting point of the inclination of the bottom. The titration device according to claim 1, further comprising a stirring means and a measurement sensor, the stirring means and the measurement sensor being held so as to be movable up and down. The titration device according to claim 1, further comprising a stirring means and a measurement sensor, the stirring means and the measurement sensor being held by a vertically movable holding part disposed above the container part. The titration device according to claim 1, wherein the titration solution is supplied from the titration solution supply tube by a pump, the pump being capable of continuously supplying a constant volume of titration solution. A concentration management system comprising the titration device according to any one of claims 1 to 7.

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