JP2024046406A - Temperature measurement device and temperature measurement method - Google Patents

Abstract

To provide a temperature measurement device capable of properly measuring the temperature of a target object in a vacuum container.SOLUTION: A temperature measurement device (100) is provided, comprising: a fiber scope (3) comprising an irradiation optical fiber (31) and detection optical fiber (32) that are bundled together and configured to be deformable to cause tip surfaces of the irradiation optical fiber and the detection optical fiber to face a target object (2); and a computation unit (62) configured to compute the temperature of the target object on the basis of scattered light detected by the detection optical fiber.SELECTED DRAWING: Figure 1

Description

The present invention relates to a temperature measurement device and a temperature measurement method.

Conventionally, there is known a method for measuring the temperature of an object placed in a vacuum vessel based on the scattered light from the object when the object is irradiated with light. For example, Patent Document 1 discloses a method for measuring the surface temperature of an object placed in a vacuum vessel through a transparent window using a radiation thermometer installed outside the vacuum vessel. Patent Document 2 discloses a method for measuring the temperature of a substrate to be processed by introducing light in and out of the processing chamber through an optical path.

Japanese Patent Application Laid-Open No. 4-127025 JP 2003-031634 A

However, in the method described in Patent Document 1, scattered light from the object is detected through a transparent window. Therefore, the intensity of the scattered light is attenuated when passing through the transparent window. In order to correct for such attenuation, it is necessary to separately calculate the attenuation rate of light through the transparent window using a reference heat source placed inside the vacuum vessel. In other words, in the method of measuring the surface temperature of an object through a transparent window, it is necessary to take into account the attenuation rate of light through the transparent window. In addition, it is difficult to measure the temperature of an object located in a blind spot from the transparent window.

Furthermore, in the method described in Patent Document 2, the optical path body is fixed to the processing chamber. Therefore, it is not possible to adjust the irradiation direction of the light introduced through the optical path body.

One aspect of the present invention has been made in view of the above problems, and an object thereof is to provide a temperature measuring device that can appropriately measure the temperature of an object within a vacuum container.

In order to solve the above problems, a temperature measuring device according to one aspect of the present invention is a temperature measuring device that is introduced into a vacuum container, and which emits a laser beam toward an object existing in the vacuum container. An irradiation optical fiber that irradiates the object and a detection optical fiber that detects the scattered light of the laser beam irradiated to the object are bundled together, and the tip surfaces of the irradiation optical fiber and the detection optical fiber face the object. The present invention includes a fiber scope that can be deformed to do so, and a calculation unit that calculates the temperature of the object based on the scattered light detected by the detection optical fiber.

In order to solve the above problems, a temperature measurement method according to one aspect of the present invention includes an introduction step of introducing a fiberscope in which an illumination optical fiber and a detection optical fiber are bundled into a vacuum vessel, a deformation step of deforming the fiberscope so that the tip faces of the illumination optical fiber and the detection optical fiber face an object, an irradiation step of irradiating a laser beam via the illumination optical fiber toward the object present in the vacuum vessel, a detection step of detecting scattered light of the laser beam irradiated to the object via the detection optical fiber, and a calculation step of calculating the temperature of the object based on the scattered light detected by the detection optical fiber.

According to one aspect of the present invention, the temperature of an object within a vacuum container can be appropriately measured.

1 is a block diagram showing a schematic configuration of a temperature measurement system according to an embodiment of the present invention. FIG. 2 shows a fiberscope that can be deformed depending on the position of an object in the temperature measurement system. 4 is a graph showing a spectrum of scattered light detected by a detector in the above temperature measurement system. FIG. 13 is a block diagram showing a schematic configuration of a temperature measurement system according to a modified example of the present invention.

[Embodiment 1]
FIG. 1 is a block diagram showing a schematic configuration of a temperature measurement system 1000 according to an embodiment of the present invention. As shown in FIG. 1, a temperature measurement system 1000 includes a vacuum container 1 and a temperature measurement device 100.

The vacuum vessel 1 is a vessel that has an object 2 therein as a measurement target of the temperature measuring device 100. The vacuum vessel 1 is, for example, a vacuum valve. In this case, the temperature measuring device 100 measures, for example, the surface temperature of a contact point in the vacuum valve.

A feedthrough 11, an observation window 12, and a vacuum port 13 are provided on the wall of the vacuum container 1. The feedthrough 11 is a through hole through which a fiber scope 3, which will be described later, is inserted. The user confirms the position of the object 2 inside the vacuum container 1 through the observation window 12. The interior of the vacuum container 1 is maintained at a predetermined degree of vacuum by a vacuum port 13.

The temperature measuring device 100 includes a fiber scope 3, a laser oscillator 4, a spectrometer 5, and a detector 6. Temperature measuring device 100 is partially introduced into vacuum container 1 and measures the temperature of object 2 provided within vacuum container 1 . Note that as the laser oscillator 4, the spectrometer 5, and the detector 6, known ones can be used, so the details thereof will be omitted.

The fiber scope 3 is an instrument in which an irradiation optical fiber 31 and a detection optical fiber 32 are bundled together. The irradiation optical fiber 31 and the detection optical fiber 32 extend linearly and are arranged in parallel. The fiberscope 3 is inserted into the vacuum container 1 via the feedthrough 11. Hereinafter, the end surface of the fiber scope 3 on the insertion direction side (inside the vacuum vessel 1) will be referred to as the tip surface.

The irradiation optical fiber 31 irradiates the laser light toward the object 2 present in the vacuum vessel 1. The base end of the irradiation optical fiber 31 is optically connected to the laser oscillator 4. The tip surface of the irradiation optical fiber 31 faces the object 2. As a result, the laser light generated in the laser oscillator 4 is irradiated to the object 2 in the vacuum vessel 1 via the irradiation optical fiber 31.

The detection optical fiber 32 transmits the scattered light of the laser light irradiated on the object 2 to the detector 6. The tip surface of the detection optical fiber 32 faces the object 2. The base end of the irradiation optical fiber 31 is optically connected to the detector 6 via the spectroscope 5. As a result, the scattered light from the object 2 is incident on the tip of the detection optical fiber 32 and is incident on the detector 6 via the detection optical fiber 32.

The fiberscope 3 can be deformed so that the tip surfaces of the irradiation optical fiber 31 and the detection optical fiber 32 face the object 2. In detail, the fiberscope 3 can be deformed so that the direction of the tip surfaces of the irradiation optical fiber 31 and the detection optical fiber 32 is tilted with respect to the direction in which the fiberscope 3 is inserted into the vacuum vessel 1 (insertion direction). That is, the fiberscope 3 can adjust the irradiation direction of the laser light irradiated from the irradiation optical fiber 31. For example, the fiberscope 3 has a bending portion that can be bent at a position about 20 mm from the tip surface of the fiberscope 3. By bending the bending portion, the direction of the tip surfaces of the irradiation optical fiber 31 and the detection optical fiber 32 can be tilted, for example, up to 90° with respect to the insertion direction. That is, the movable range of the tip of the fiberscope 3 can be set to 180°. As a result, the temperature measuring device 100 can measure the temperature of multiple objects 2 present at various positions in the vacuum vessel 1.

The fiberscope 3 may further include an operating section 33 at the base end. The operation unit 33 is a member that accepts a user's operation to transform the fiberscope 3. When the operation unit 33 receives the deformation operation, for example, the bending portion of the fiber scope 3 is bent in the direction corresponding to the deformation operation. The operation unit 33 is, for example, an operation button or an operation dial.

Laser oscillator 4 emits laser light of a predetermined wavelength. The laser light is transmitted to the object 2 in the vacuum container 1 via the irradiation optical fiber 31.

The spectrometer 5 separates (disperses) the light incident from the detection optical fiber 32 into components of different wavelengths. The spectrometer 5 emits the dispersed light to the detector 6.

The detector 6 includes an acquisition section 61 and a calculation section 62. The acquisition unit 61 receives the light separated by the spectrometer 5 and converts it into a voltage signal. The acquisition unit 61 outputs the voltage signal to the calculation unit 62 as spectral data. The calculation unit 62 calculates the temperature of the object 2 based on the scattered light detected by the detection optical fiber 32. Specifically, the calculation unit 62 calculates the temperature of the object 2 from the intensity ratio of Stokes scattered light and anti-Stokes scattered light in the scattered light detected by the detection optical fiber 32 (spectral data input from the acquisition unit 61). calculate. A specific method for calculating the temperature of the object 2 will be described later with reference to FIG.

Note that FIG. 1 shows a configuration in which the temperature measuring device 100 includes one fiberscope 3, and the one fiberscope 3 is provided in the vacuum vessel 1. However, the temperature measuring device 100 may include multiple fiberscopes 3, and the multiple fiberscopes 3 may be provided in the vacuum vessel 1.

FIG. 2 is a diagram showing a fiberscope 3 that can be deformed depending on the position of the object 2. As shown in FIG. In FIG. 2, as an example, an object 21 located above when viewed from the feedthrough 11, an object 22 located in front when viewed from the feedthrough 11, and an object 23 located below when viewed from the feedthrough 11. This shows the case where the two exist in the vacuum container 1. Note that in FIG. 2, members other than the object 2 and the fiber scope 3 are not shown.

Reference numeral 2A in FIG. 2 indicates a fiberscope 3 in a state in which the bending portion 34 is not bent. Reference numeral 2B in FIG. 2 indicates a fiberscope 3 in a state in which the bending portion 34 is bent upward.

As shown by reference symbol 2A in FIG. 2, when the bending portion 34 is not bent, the fiberscope 3 is in a straight state along the insertion direction. This allows the tip surface 31a of the illumination optical fiber 31 and the tip surface 32a of the detection optical fiber 32 (hereinafter simply referred to as tip surfaces 31a and 32a) to face the object 22.

Further, as shown by reference numeral 2B in FIG. 2, when the bending section 34 curves upward, the fiberscope 3 has its distal end section tilted upward at 90 degrees with respect to the insertion direction. Thereby, the tip surfaces 31a and 32a can also face the object 21.

Similarly, although not shown, when the bending portion 34 is bent downward, the tip of the fiberscope 3 is tilted downward by 90° relative to the insertion direction. This allows the tip surfaces 31a and 32a to face the object 23 as well.

As described above, the curved portion 34 curves in a direction according to the position of each object 2, so that the tip surfaces 31a, 32a can face the object 2. This allows the fiberscope 3 to irradiate laser light to each object 2 in the vacuum vessel 1 and detect scattered light from the object 2. Therefore, the temperature measuring device 100 can measure the temperature of multiple objects in the vacuum vessel.

Figure 3 is a graph showing the spectrum of scattered light detected by detector 6. As shown in Figure 3, the scattered light obtained when laser light having a wavelength λ0 is irradiated onto object 2 includes Rayleigh scattered light having the same wavelength λ0 as the laser light, as well as Raman scattered light having a different wavelength from the laser light. The Raman scattered light includes Stokes scattered light having a wavelength λs longer than the wavelength λ0 of the laser light, and anti-Stokes scattered light having a wavelength λαs shorter than the wavelength λ0 of the laser light.

Here, it is known that the intensity ratio between Stokes scattered light and anti-Stokes scattered light in the spectrum of scattered light detected by detector 6 depends only on the temperature of object 2, once the wavelength λ0 of the laser light and the composition of object 2 are determined. Therefore, temperature measuring device 100 can calculate the temperature of object 2 from the intensity ratio between Stokes scattered light and anti-Stokes scattered light in the spectrum of scattered light detected by detector 6.

(effect)
According to the above configuration, the temperature measuring device 100 detects scattered light from the object 2 via the fiber scope 3 introduced into the vacuum container 1 . Therefore, compared to detecting scattered light from an object through a transparent window installed in a vacuum container, there is no need to consider the attenuation rate of scattered light due to the transmittance of the transparent window, which improves the accuracy of temperature measurement. can be raised.

Furthermore, the fiberscope 3 can be deformed so that the tip surfaces of the irradiation optical fiber 31 and the detection optical fiber 32 face the object 2. Therefore, the temperature measuring device 100 can measure the temperature of multiple objects 2 located at various positions within the vacuum vessel 1. For example, when detecting scattered light from an object through a transparent window provided in the vacuum vessel 1, it is possible to measure the temperature of an object 2 located in a blind spot from the transparent window by deforming the fiberscope 3 according to the position of the object 2. Furthermore, even if the structure inside the vacuum vessel 1 is complex, it is possible to measure the temperature of the desired object by deforming the fiberscope to match the structure.

[Modifications]
Fig. 4 is a block diagram showing a schematic configuration of a temperature measurement system 1000A according to a modified example of the present invention. As shown in Fig. 4, the temperature measurement system 1000A includes a vacuum vessel 1 and a temperature measurement device 100A. The temperature measurement device 100A differs from the temperature measurement device 100 in that the temperature measurement device 100A includes a fiberscope 3A instead of the fiberscope 3. The temperature measurement device 100A further includes an imaging device 7.

The fiberscope 3A further includes an imaging optical fiber 35 in addition to the illumination optical fiber 31 and the detection optical fiber 32. The imaging optical fiber 35 transmits scattered light from the object to the imaging device 7. The tip surface of the imaging optical fiber 35 faces the object 2. The base end of the imaging optical fiber 35 is optically connected to the imaging device 7.

The imaging optical fiber 35 is, for example, a bundle fiber in which multiple optical fibers are bundled together. A lens may be provided on the tip surface of the imaging optical fiber 35. As a result, the scattered light from the object 2 is incident on the imaging device 7 via the multiple optical fibers.

The imaging device 7 is a device that receives scattered light from an object. The imaging device 7 generates imaging data of an image of the inside of the vacuum container 1 based on light incident from a plurality of optical fibers of the imaging optical fiber 35. Based on the imaging data, the user can also confirm the position of the object 2 located in the blind spot from the observation window 12. Note that as the imaging device 7, a known device can be used, so the details thereof will be omitted.

(Additional notes)
The temperature measuring devices 100 and 100A may be configured integrally with the vacuum container 1, or may be detachable from the vacuum container 1. For example, the temperature measuring devices 100, 100A may be configured integrally with the vacuum container 1 in the laboratory. Alternatively, the temperature measuring devices 100, 100A may be applied appropriately to a vacuum environment created on site.
(summary)
A temperature measuring device according to aspect 1 of the present invention is a temperature measuring device introduced into the inside of a vacuum container, and includes an irradiation optical fiber that irradiates a laser beam toward an object present in the vacuum container; a detection optical fiber for detecting scattered light of a laser beam irradiated onto a target object; and a fiberscope that is bundled together and is deformable so that the tip surfaces of the irradiation optical fiber and the detection optical fiber face the target object. and a calculation unit that calculates the temperature of the object based on the scattered light detected by the detection optical fiber.

The fiberscope according to aspect 2 of the present invention is the same as in aspect 1 above, but is deformable so that the tip faces of the illumination optical fiber and the detection optical fiber are tilted relative to the direction in which the fiberscope is inserted into the vacuum vessel.

The temperature measuring device according to aspect 3 of the present invention, in aspect 1 or 2 above, further includes an imaging device that receives scattered light from the object.

The calculation unit according to aspect 4 of the present invention calculates the temperature of the object from the intensity ratio of Stokes scattered light and anti-Stokes scattered light in the scattered light detected by the detection optical fiber in the above aspects 1 to 3.

A temperature measuring method according to aspect 5 of the present invention includes an introduction step of introducing a fiber scope in which an irradiation optical fiber and a detection optical fiber are bundled into a vacuum container, and a tip surface of the irradiation optical fiber and the detection optical fiber. a deformation step of deforming the fiberscope so that it faces the target object, an irradiation step of irradiating a laser beam toward the target object present in the vacuum container via the irradiation optical fiber, and the detection step. a detection step of detecting scattered light of a laser beam irradiated to the target object via a detection optical fiber; and a calculation step of calculating the temperature of the target object based on the scattered light detected by the detection optical fiber. include.

The present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. are also included within the technical scope of the present invention.

1 Vacuum container 2 Object 3 Fiberscope 6 Detector 7 Imaging device 31 Optical fiber for irradiation 32 Optical fiber for detection 61 Acquisition unit 62 Calculation unit 100 Temperature measurement device 1000 Temperature measurement system

Claims (5)

A temperature measuring device introduced into the inside of a vacuum container,
An irradiation optical fiber that irradiates a laser beam toward an object present in the vacuum container and a detection optical fiber that detects scattered light of the laser beam irradiated to the object are bundled together, and the irradiation optical fiber and a fiberscope, in which the distal end surface of the detection optical fiber is deformable so as to face the object;
A temperature measurement device, comprising: a calculation unit that calculates the temperature of the object based on the scattered light detected by the detection optical fiber. The fiberscope according to claim 1, wherein the fiberscope is deformable so that the directions of the distal end surfaces of the irradiation optical fiber and the detection optical fiber are inclined with respect to the direction in which the fiberscope is inserted into the vacuum container. Temperature measuring device. The temperature measuring device according to claim 1 or 2, further comprising an imaging device that receives scattered light from the object. The temperature measuring device according to claim 1 or 2, wherein the calculation unit calculates the temperature of the object from the intensity ratio of Stokes scattered light to anti-Stokes scattered light in the scattered light detected by the detection optical fiber. an introduction step of introducing a fiberscope having an irradiation optical fiber and a detection optical fiber bundled together into the vacuum vessel;
a deformation step of deforming the fiberscope so that tip surfaces of the illumination optical fiber and the detection optical fiber face an object;
an irradiation step of irradiating the object present in the vacuum chamber with a laser beam via the irradiation optical fiber;
a detection step of detecting scattered light of the laser light irradiated onto the object via the detection optical fiber;
and calculating a temperature of the object based on the scattered light detected by the detection optical fiber.

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