JP2023146091A - Light source module, light irradiation device including the same, and method for cooling light source module - Google Patents

Abstract

To provide a light source module that can handle a wide workpiece and can minimize the possibility that a refrigerant adheres to the workpiece.SOLUTION: A light source module 10 includes a plurality of light sources 12, a substrate 14 on the surface of which the light sources 12 are arranged, and a heat sink 16 arranged on the back surface of the substrate 14. A refrigerant flow pipe fitting groove 20 is formed in the heat sink 16, into which a refrigerant flow pipe 50 through which a refrigerant L flows is fitted.SELECTED DRAWING: Figure 2

Description

The present invention relates to a light source module used for, for example, alignment film exposure of large liquid crystal panels, alignment film exposure of retardation films, or scan exposure of semiconductors, a light irradiation device equipped with the same, and a method for cooling the light source module. .

2. Description of the Related Art Light source modules using LEDs as light sources have been used for scanning exposure of semiconductors and the like (for example, Patent Document 1). A single light irradiation device is configured by arranging a plurality of light source modules side by side so that the width is longer than the width of the workpiece W.

A light source such as an LED generates heat when it emits light, and when the heat increases the temperature, the luminous efficiency decreases. Therefore, it is necessary to cool the light source module.

As a method for cooling a light source module, for example, a light source module M is placed in contact with a cooling unit 1 as shown in FIG. The cooling unit 1 includes a main body 2 , a refrigerant flow path 3 formed within the main body 2 , and a pair of joint connecting portions 4 arranged at both ends of the main body 2 .

The main body 2 is a substantially rectangular plate made of aluminum or the like, and a plurality of refrigerant channels 3 are drilled using a drill or the like so that one side of the main body 2 communicates with the other side. has been done.

The joint connecting portion 4 has an internal flow path 6 connected at one end to the refrigerant flow path 3 and at the other end connected to a joint 5 such as a flange. By arranging such joint connection parts 4 at both ends of the main body part 2, the refrigerant L (for example, cooling water) entering from the joint 5 arranged in one joint connection part 4 can flow through the internal flow path 6. It enters the refrigerant flow path 3 of the main body portion 2 via the refrigerant flow path, passes through the internal flow path 6 formed in the other joint connection portion 4, and exits from the other joint 5. Note that a packing (or O-ring) 9 is sandwiched between the joint surface of the main body portion 2 and the joint connection portion 4 to prevent leakage of the refrigerant L.

By arranging a plurality of light source modules M in contact with the main body 2, the heat generated in each light source module M is conducted to the main body 2 and is exhausted by the refrigerant L flowing through the refrigerant flow path 3 of the main body 2. This allows the light source of the light source module M to be prevented from becoming hot.

Regarding the structure of the main body part 2, as described above, the refrigerant flow path 3 may be drilled using a drill etc., but if the main body part 2 is made to be long, processing with a drill etc. becomes difficult. Therefore, as shown in FIG. 9, the main body portion 2 may be cut in half and recesses 8 that will become the coolant flow paths 3 may be formed on the surface of each part 7. In this case, a packing (or O-ring) 9 is sandwiched between both parts 7.

Japanese Patent Application Publication No. 2019-101361

However, the conventional cooling structure has a problem regarding leakage of the refrigerant L. That is, in the case of the cooling unit 1 as shown in FIG. 8, the main body 2 cannot be made long because machining with a drill or the like as described above becomes difficult. Therefore, when this cooling unit 1 is used for a wide workpiece W, when refrigerant L leaks between the main body 2 and the joint connection part 4 due to a malfunction in the packing 9, etc., the refrigerant L that has dripped, etc. There was a risk that it would adhere to the workpiece W.

Similarly, in the case of the cooling unit 1 as shown in FIG. There was a risk that the particles would adhere to the workpiece W.

The present invention has been made in view of the above-mentioned problems, and its purpose is to be able to cope with a wide workpiece W, and to minimize the possibility that the refrigerant L will adhere to the workpiece W. An object of the present invention is to provide a light source module, a light irradiation device including the light source module, and a method for cooling the light source module.

According to one aspect of the invention,
multiple light sources,
a substrate on which the light source is disposed;
and a heat sink disposed on the back surface of the board,
A light source module is provided in which the heat sink is formed with a refrigerant flow pipe fitting groove into which a refrigerant flow pipe through which a refrigerant flows is fitted.

Preferably,
A plurality of refrigerant flow pipe fitting grooves are formed in the heat sink in parallel with each other.

Preferably,
The refrigerant flow pipe fitting groove is formed on a surface of the heat sink opposite to the substrate,
The apparatus further includes a holder that holds the refrigerant flow pipe between the heat sink and the heat sink.

According to another aspect of the invention,
The light source module described above,
A light irradiation device is provided, including the refrigerant flow pipe.

Preferably,
comprising a plurality of the refrigerant flow pipes,
The heat sink of the light source module is formed with a plurality of refrigerant flow tube fitting grooves into which the respective refrigerant flow tubes are fitted in parallel to each other,
Further comprising a refrigerant flow pipe rotating means for adjusting the irradiation angle by the light source module by rotating the remaining refrigerant flow pipes about any one of the refrigerant flow pipes as a central axis. There is.

According to another aspect of the invention,
multiple light sources,
a substrate on which the light source is disposed;
A light source module comprising: a heat sink disposed on the back surface of the substrate and having a refrigerant flow pipe fitting groove into which a refrigerant flow pipe through which a refrigerant flows is fitted;
A method for cooling a light source module is provided, in which the light source module is cooled by passing the refrigerant through the inside of the refrigerant flow pipe.

According to the light source module according to the present invention, a refrigerant flow pipe fitting groove into which the refrigerant flow pipe is fitted is formed in the heat sink attached to the substrate on which the light source is disposed, and the refrigerant flow pipe is fitted with the refrigerant flow pipe fitting groove. By flowing the coolant, the heat generated in the light source can be recovered and the light source can be cooled. Even when a large number of light source modules are arranged in a line to accommodate a wide workpiece W, it is easy to prevent refrigerant from leaking from the refrigerant flow pipe, so there is a possibility that the refrigerant may adhere to the workpiece. You can minimize sex.

1 is a diagram showing a light irradiation device 100 according to an embodiment to which the present invention is applied. They are (a) a front view and (b) a right side view showing a light source module 10 according to an embodiment to which the present invention is applied. FIG. 3 is a front view (a) and a right side view (b) showing a light source module 10 according to modification example 1. FIG. FIG. 7 is a right side view showing a light source module 10 according to a second modification. It is (a) a front view and (b) a right view which show the light source module 10 and the refrigerant|coolant flow pipe rotation means 72 based on the modification 3. It is (a) a front view and (b) a right view which show the light source module 10 and the refrigerant|coolant flow pipe rotation means 72 based on the modification 3. 7 is a diagram showing a light source module 10 and others according to modification example 4. FIG. FIG. 2 is a diagram showing a light source module M and a cooling unit 1 according to the prior art. FIG. 2 is a diagram showing a light source module M and a cooling unit 1 according to the prior art.

(Configuration of light irradiation device 100)
A light source module 10 according to an embodiment to which the present invention is applied will be described below. As shown in FIG. 1, a light irradiation device 100 according to an example generally includes a plurality of light source modules 10, a coolant flow pipe 50, and a coolant flow device 60.

As shown in FIG. 2, the light source module 10 generally includes a light source 12, a substrate 14, a heat sink 16, and a holder 18.

The light source 12 emits light of a predetermined wavelength when supplied with electric power, and in this embodiment, an LED (light emitting diode) is used. Note that the type of light source 12 is not limited to an LED, and may be an LD (laser diode) such as a VCSEL element.

The substrate 14 is a substantially rectangular plate material on which a plurality of light sources 12 are arranged. In addition to the light source 12, a power supply terminal and a power supply circuit for supplying power to the light source 12 are also arranged on the surface of the substrate 14.

The heat sink 16 is a thick plate-shaped member made of a highly thermally conductive material such as copper, stainless steel, or aluminum. In the case of the heat sink 16 according to the present embodiment, the back surface of the substrate 14 is placed in contact with the front surface side, and two refrigerant passages are provided on the back surface side (the surface opposite to the surface on which the substrate 14 is placed). The flow tube fitting grooves 20 are formed to be parallel to each other.

These refrigerant flow pipe fitting grooves 20 are grooves into which the refrigerant flow pipes 50 are fitted. Note that, as shown in the figure, the refrigerant flow pipe 50 may be directly fitted into the refrigerant flow pipe fitting groove 20, or the surface of the refrigerant flow pipe fitting groove 20 and the surface of the refrigerant flow pipe 50 may be A highly thermally conductive grease, sheet, etc. may be sandwiched between them.

The holder 18 is a plate material that has the role of holding the refrigerant flow pipe 50 fitted in the refrigerant flow pipe fitting groove 20 between the heat sink 16 and the heat sink 16. 16.

Returning to FIG. 1, the refrigerant flow pipe 50 is a pipe material made of a highly thermally conductive material such as copper, stainless steel, or aluminum, and allows the refrigerant L to flow therethrough. In this embodiment, the two coolant flow tubes 50 are fitted into the coolant flow tube fitting grooves 20 of the heat sink 16 in each light source module 10 so as to be parallel to each other. The type of refrigerant L is not particularly limited, but may include tap water, purified water (distilled water, ion exchange water, pure water), ethanol, ethylene glycol, propylene glycol, or diluted water. Things can be considered.

The refrigerant flow device 60 is a device for flowing and circulating the refrigerant L with respect to each refrigerant flow pipe 50, and in this embodiment, generally includes a chiller 62, a refrigerant supply manifold 64, and a refrigerant recovery manifold. 66.

The chiller 62 is a device that collects heat from each light source module 10, receives the warmed refrigerant L, cools it, and supplies it to each light source module 10 again. Note that if the cooled refrigerant L can be used, such as factory circulating water, it is not necessary to provide the chiller 62.

The refrigerant supply manifold 64 is a member that has the role of supplying the refrigerant L supplied from the chiller 62 via the supply pipe 68 to each refrigerant flow pipe 50, and the supply pipe 68 and each refrigerant flow pipe 50 are connected. has been done.

In this embodiment, the plurality of light source modules 10 are divided into two groups, and in each group, five light source modules 10 are arranged side by side, for example. Since two refrigerant flow pipes 50 are arranged for each group, four refrigerant flow pipes 50 are connected to the refrigerant supply manifold 64. Moreover, in one group, the refrigerant L flows through each refrigerant flow pipe 50 so as to face each other.

The refrigerant recovery manifold 66 is a member that has the role of collecting the refrigerant L returned from each refrigerant flow pipe 50 and returning the refrigerant L to the chiller 62 via the recovery pipe 70. A pipe 50 is connected thereto.

As described above, in this embodiment, there are two groups each having five light source modules 10, and two refrigerant flow pipes 50 are arranged for each group, so there are four refrigerant flow pipes in the refrigerant recovery manifold 66. A refrigerant flow pipe 50 is connected thereto.

(Features of light irradiation device 100)
In the light source module 10 according to the present embodiment, a coolant flow pipe fitting groove 20 into which the coolant flow pipe 50 is fitted is formed in the heat sink 16 attached to the substrate 14 on which the light source 12 is disposed, and the chiller By flowing the coolant L cooled in step 62 through each coolant flow pipe 50, the heat generated in the light source 12 can be recovered and the light source 12 can be cooled. Even when a large number of light source modules 10 are arranged in a line to accommodate a wide workpiece W, it is easy to prevent the refrigerant from leaking from the refrigerant flow pipe 50, so that the refrigerant L adheres to the workpiece W. The possibility of this happening can be minimized.

(Modification 1)
In the light source module 10 according to the embodiment described above, the two refrigerant flow tube fitting grooves 20 are arranged in parallel to each other on the back side of the heat sink 16 (the surface opposite to the surface on which the substrate 14 is arranged). However, the number of refrigerant flow pipe fitting grooves 20 formed in one heat sink 16 may be one or three or more.

For example, when three refrigerant flow pipe fitting grooves 20 are formed in one heat sink 16, that is, when three refrigerant flow pipes 50 are attached to one group of light source modules 10, FIG. The mode will be as shown in . In this case, the flow direction of the refrigerant L flowing through each refrigerant flow pipe 50 is the same in two refrigerant flow pipes 50, and in the opposite direction in the remaining refrigerant flow pipe 50. It is preferable that Of course, the refrigerant L may be made to flow in the same direction in all three refrigerant flow pipes 50.

(Modification 2)
Furthermore, the light source module 10 according to the embodiment described above uses the holder 18 that has the role of holding the refrigerant flow pipe 50 fitted in the refrigerant flow pipe fitting groove 20 between the heat sink 16 and the heat sink 16 . However, as shown in FIG. 4, for example, when a refrigerant flow pipe insertion hole 22 is formed in the heat sink 16 through which a refrigerant flow pipe 50 is inserted, or a refrigerant flow pipe is formed between the heat sink 16 and the substrate 14. 50 (not shown), the holder 18 becomes unnecessary.

(Modification 3)
Furthermore, as shown in FIG. 5, by rotating the remaining refrigerant flow pipes 50 around any one of the refrigerant flow pipes 50 in the light irradiation device 100, the irradiation angle by the light source module 10 is adjusted. A refrigerant flow pipe rotating means 72 for adjusting the refrigerant flow pipe may be further provided. Note that FIG. 5 shows a case where two coolant flow pipes 50 are attached to one group of light source modules 10.

By rotating the refrigerant flow pipe 50 on the upper side in the drawing with the refrigerant flow pipe 50 on the lower side in the figure as a central axis using the refrigerant flow pipe rotating means 72, the irradiation angle by the light source module 10 is adjusted and changed. can do.

In addition, when three refrigerant flow pipes 50 are attached to one group of light source modules 10, it becomes as shown in FIG. The irradiation angle by the light source module 10 can be adjusted and changed by rotating the refrigerant flow pipes 50 in the middle stage and the uppermost stage in the figure by the same angle, respectively.

(Modification 4)
Furthermore, when the irradiation angle of the light source module 10 is adjustable as described in Modification 3, in addition to this, as shown in FIG. The positions of the plate B, the optical filter C, the cover glass D, etc. may be adjusted parallel to the plane on which the workpiece W is placed.

The embodiments disclosed this time should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is indicated by the claims rather than the above description, and it is intended that all changes within the meaning and range equivalent to the claims are included.

DESCRIPTION OF SYMBOLS 10... Light source module, 12... Light source, 14... Board, 16... Heat sink, 18... Holder, 19... Screw 20... Refrigerant flow pipe fitting groove, 22... Refrigerant flow pipe insertion hole 50... Refrigerant flow pipe 60 ... Refrigerant flow device, 62... Chiller, 64... Refrigerant supply manifold, 66... Refrigerant recovery manifold, 68... Supply piping, 70... Recovery piping, 72... Refrigerant flow pipe rotation means 100... Light irradiation device L... Refrigerant, W...Work, A...Polarizer, B...Transparent plate, C...Optical filter, D...Cover glass

Claims (6)

multiple light sources,
a substrate on which the light source is disposed;
and a heat sink disposed on the back surface of the board,
The heat sink has a refrigerant flow pipe fitting groove formed therein, into which a refrigerant flow pipe through which a refrigerant flows is fitted. The light source module according to claim 1, wherein the heat sink has a plurality of refrigerant flow tube fitting grooves formed in parallel to each other. The refrigerant flow pipe fitting groove is formed on a surface of the heat sink opposite to the substrate,
The light source module according to claim 1 or 2, further comprising a holder that holds the refrigerant flow pipe between the heat sink and the heat sink. The light source module according to any one of claims 1 to 3,
A light irradiation device comprising the refrigerant flow pipe. comprising a plurality of the refrigerant flow pipes,
The heat sink of the light source module is formed with a plurality of refrigerant flow tube fitting grooves into which the respective refrigerant flow tubes are fitted in parallel to each other,
Further comprising a refrigerant flow pipe rotating means for adjusting the irradiation angle by the light source module by rotating the remaining refrigerant flow pipes about any one of the refrigerant flow pipes as a central axis. The light irradiation device according to claim 4. multiple light sources,
a substrate on which the light source is disposed;
A light source module comprising: a heat sink disposed on the back surface of the substrate and having a refrigerant flow pipe fitting groove into which a refrigerant flow pipe through which a refrigerant flows is fitted;
A method for cooling a light source module, comprising cooling the light source module by passing the refrigerant through the inside of the refrigerant flow pipe.

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