JP2023031667A - Coating liquid supply device - Google Patents

Abstract

An object of the present invention is to specify the type of coating liquid to be supplied to a workpiece.
A coating liquid supply apparatus (100) includes a supply section (110) for supplying a coating liquid to a workpiece, a supply path (120) for communicating the supply section (110) and a coating liquid supply source (160), a pump (130), and a supply path (120). and a control unit 150. The control unit 150 includes a pressure recording unit 151 that records the pressure of the pressure gauge 140 when the coating liquid is supplied to the supply unit 110 for each type of coating liquid, and the pressure gauge 140 when the coating liquid is supplied to the supply unit 110. and a collation unit 152 that collates the pressure recorded in the pressure recording unit 151 with the pressure recorded in the pressure recording unit 151 to identify the type of coating liquid being supplied.
[Selection drawing] Fig. 1

Description

TECHNICAL FIELD The present invention relates to a coating liquid supply device for supplying a coating liquid to a workpiece.

For example, Patent Document 1 discloses a laser processing apparatus that supplies a water-soluble liquid resin to the surface to be processed of a workpiece to form a protective film that protects the surface to be processed, and irradiates a laser beam from the side of the surface to be processed. It is

JP 2011-177758 A

Since the higher the viscosity of the coating solvent such as the protective film, the thicker the film thickness, the conventional processing equipment replaces coating liquids with different viscosities depending on the thickness of the coating layer desired to be formed on the workpiece. may be operated However, when the conventional processing equipment is operated by replacing the coating liquid, it is difficult to check which coating liquid is being used on the equipment, and if the wrong coating liquid is installed, There was a risk that I would not be able to notice it.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a coating liquid supply apparatus capable of specifying the type of coating liquid to be supplied to a workpiece.

In order to solve the above-described problems and achieve the object, the coating liquid supply apparatus of the present invention includes: a supply section that supplies coating liquid to a workpiece; and a supply passage that communicates the supply section and a coating liquid supply source. , a pump, a pressure gauge installed in the supply path, and a control unit, wherein the control unit measures the pressure of the pressure gauge when the coating liquid is supplied to the supply section for each type of coating liquid. The type of coating liquid being supplied is identified by collating the pressure recorded in the pressure recording unit recorded in the pressure gauge and the pressure recorded in the pressure recording unit when the coating liquid is supplied to the supply unit. and a collating unit for performing the matching.

In the coating liquid supply apparatus, the control unit further has a coating liquid registration section for registering the type of coating liquid to be used, and the type of coating liquid specified by the verification section and registered in the coating liquid registration section. If the type of the applied coating liquid is different, notification may be made.

In the coating liquid supply device, the control unit may determine that the state of the coating liquid being supplied is abnormal or unstable when the matching unit cannot identify the type of the coating liquid.

The coating liquid supply device of the present invention has the effect of being able to specify the type of coating liquid to be supplied to the workpiece.

FIG. 1 is a perspective view showing a configuration example of a coating liquid supply device according to an embodiment. FIG. 2 is a diagram showing a coating example of the coating liquid supply device shown in FIG. 3 is a diagram showing an example of pressure identification data referred to by the control unit shown in FIG. 1; FIG. FIG. 4 is a flow chart showing an example of a procedure for specifying the type of coating liquid executed by the coating liquid supply device. FIG. 5 is a diagram showing an example of a laser processing apparatus using the coating liquid supply device according to the embodiment.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

In the embodiments described below, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. One direction in the horizontal plane is the X-axis direction, the direction perpendicular to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction perpendicular to the X-axis direction and the Y-axis direction is the Z-axis direction. An XY plane containing the X and Y axes is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

[Embodiment]
A coating liquid supply device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a coating liquid supply device according to an embodiment. FIG. 2 is a diagram showing a coating example of the coating liquid supply device shown in FIG.

A coating liquid supply device 100 shown in FIG. 1 is a supply device that supplies a coating liquid to a workpiece. The coating liquid includes, for example, a water-soluble coating liquid that is coated before processing in order to prevent processing waste from adhering to the workpiece in a laser processing apparatus, a coating liquid that is coated to protect the pattern surface of the substrate, and a coating liquid that is coated to protect the pattern surface of the substrate. It includes a coating liquid that coats one side of an object.

In the example shown in FIG. 2 , the coating liquid supply device 100 applies a liquid coating liquid to the surface 210 of the workpiece 200 to form the protective film 230 on the surface 210 . The protective film 230 protects the circuit 220 and the surface 210 of the workpiece 200 on which the circuit 220 is formed. The workpiece 200 is, for example, a silicon wafer, a semiconductor wafer such as gallium arsenide, an adhesive member such as DAF (Die Attach Film) provided on the back surface of the wafer for chip mounting, a semiconductor product package, ceramics, glass, sapphire, etc. Examples include (Al ₂ O ₃ )-based inorganic material substrates, various electronic parts such as LCD drivers, and various processing materials that require micron-order processing position accuracy.

In the example shown in FIG. 1, the coating liquid supply device 100 includes a supply section 110, a supply path 120, a pump 130, a pressure gauge 140, a control unit 150, and a notification section 170. The control unit 150 is electrically connected to the pump 130, the pressure gauge 140, the notification section 170, and the like.

The supply unit 110 supplies the coating liquid to the workpiece 200 . Supply section 110 communicates with supply path 120 . The supply unit 110 has, for example, a nozzle that drops (supplies) the coating liquid supplied through the supply path 120 from above the workpiece 200 .

The supply channel 120 is a channel that connects the supply part 110 and the coating liquid supply source 160 and supplies the coating liquid to the supply part 110 . The coating liquid supply source 160 is, for example, a tank containing the coating liquid. A valve 121 is provided in the supply path 120 between the supply section 110 and the pump 130 . Valve 121 is electrically connected to control unit 150 . The supply channel 120 is configured such that the flow rate of the coating therethrough can be controlled by the control unit 150 . In this embodiment, the case where the supply path 120 has the valve 121 will be described, but the supply path 120 may be configured without the valve 121 .

The output side of the pump 130 is connected to the supply section 110 via the supply path 120 and has a function of sending the coating liquid stored in the coating liquid supply source 160 to the supply section 110 . For the pump 130, for example, a positive displacement (bellows) pump or the like can be used. The volume of the pump 130 can be varied by expanding and contracting the bellows. The feed amount and feed speed of the pump 130 can be controlled by a motor. The driving of the pump 130 is controlled by the control unit 150, and the coating liquid can be sucked and discharged.

The pressure gauge 140 is installed in the supply path 120 and measures the pressure inside the supply path 120 . Pressure gauge 140 has a pressure sensor. Pressure gauge 140 provides pressure information to control unit 150 indicating the measured pressure.

The control unit 150 is a control device that controls the operation of the coating liquid supply device 100 . The control unit 150 includes, for example, an arithmetic processing unit such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input/output interface device. The control unit 150 is a computer capable of executing a program or the like for controlling each component described above according to the process performed by the coating liquid supply apparatus 100 using such a device.

The control unit 150 opens the valve 121 and drives the pump 130 to feed the coating liquid from the coating liquid supply source 160 to the supply section 110 through the supply channel 120 . The control unit 150 controls notification of information regarding the supply of the coating liquid by controlling the notification section 170 .

The control unit 150 has a pressure recording section 151 , a matching section 152 and a registration section 153 . The control unit 150 implements a matching section 152, which is a functional section, by executing a program.

The pressure recording unit 151 records the pressure of the pressure gauge 140 when supplying the coating liquid to the supply unit 110 for each type of coating liquid. For example, the pressure recording unit 151 records pressure identification data 400 for each type of coating liquid. The pressure identification data 400 includes, for example, information indicating the relationship between the type of coating liquid and pressure.

The collation unit 152 collates the pressure of the pressure gauge 140 when the coating liquid is supplied to the supply unit 110 with the pressure recorded in the pressure recording unit 151, and identifies the type of coating liquid being supplied. For example, if the pressure of the pressure gauge 140 and the pressure recorded in the pressure recording unit 151 match or are similar, the collation unit 152 determines whether the coating liquid associated with the pressure recorded in the pressure recording unit 151 is detected. Type is specified as the type of coating liquid being supplied. The control unit 150 has a function of causing the notifying section 170 to notify the collation result of the collating section 152 .

The registration unit 153 registers the type of coating liquid used for the workpiece 200 . For example, when the operator inputs the type of coating liquid to be used for the workpiece 200, the registration unit 153 can register the input type. For example, the registration unit 153 can acquire the type of coating liquid used for the workpiece 200 from a schedule, a management database, or the like, and register the acquired type. The registration unit 153 according to this embodiment is an example of a coating liquid registration unit.

The control unit 150 notifies when the type of coating liquid specified by the collation section 152 and the type of coating liquid registered in the registration section 153 are different. The control unit 150 can notify that the type of coating liquid specified by the collating section 152 and the type of coating liquid registered in the registering section 153 are different.

The control unit 150 determines that the state of the coating liquid being supplied is abnormal or unstable when the matching unit 152 cannot identify the type of coating liquid. The control unit 150 can notify that the state of the supplied coating liquid is abnormal or unstable.

The notification unit 170 performs notification under the control of the control unit 150 . The notification unit 170 can use, for example, a display device, a speaker, an alarm, or the like. The notification unit 170 can notify, for example, that the coating liquid is different, that the state of the coating liquid is abnormal or unstable, and the like. The notification unit 170 can be realized by, for example, a processing device incorporating the coating liquid supply device 100, a device external to the coating liquid supply device 100, a mobile terminal possessed by an operator, or the like.

The configuration example of the coating liquid supply device 100 according to the present embodiment has been described above. Note that the above configuration described with reference to FIG. 1 is merely an example, and the configuration of the coating liquid supply device 100 according to this embodiment is not limited to the example. The functional configuration of the coating liquid supply device 100 according to this embodiment can be flexibly modified according to specifications and operations.

In this embodiment, the coating liquid supply apparatus 100 will be described with a configuration in which the pressure gauge 140 measures the pressure in the supply path 120 between the valve 121 and the pump 130, but the configuration is not limited to this. The coating liquid supply device 100 can have, for example, a configuration that measures the pressure in the supply path 120 between the supply section 110 and the valve 121, a configuration that measures the pressure at a plurality of points in the supply path 120, or the like.

(Example of pressure specific data)
FIG. 3 is a diagram showing an example of pressure identification data 400 referenced by control unit 150 shown in FIG. In the graph shown in FIG. 3, the vertical axis indicates pressure (kPa) and the horizontal axis indicates time (seconds). When the pump 130 is driven at a constant speed, the coating liquid supply apparatus 100 gradually increases the pressure due to the internal resistance of the supply path 120, and the rate of increase varies depending on the viscosity of the coating liquid (solution). The pressure identification data 400 of the pressure recording unit 151 described above is data that enables determination of the rate of increase in pressure and liquid feeding speed for each viscosity (type) of the coating liquid.

The graph shown in FIG. 3 shows changes in pressure from the start of liquid feeding when each of the coating liquid 301, the coating liquid 302, and the coating liquid 301 with different viscosities is fed at 5 ml/s in the coating liquid supply device 100. showing. The coating liquid 301 is a low viscosity solution. The coating liquid 302 is a medium-viscosity solution higher in viscosity than the coating liquid 301 . The coating liquid 303 is a highly viscous solution that is higher in viscosity than the coating liquid 302 . In this way, when multiple coating liquids with different viscosities are fed at the same speed (flow rate), the higher the viscosity, the longer it takes to reach a constant pressure. By doing so, the type can be specified. Hereinafter, the coating liquid 301, the coating liquid 302, and the coating liquid 301 are referred to as the "coating liquid 300" when the coating liquid 301, the coating liquid 302, and the coating liquid 301 are not distinguished.

As shown in FIG. 3, the pressure of the coating liquid 301 becomes constant around 30 kPa after about 0.6 seconds. The pressure of the coating liquid 302 becomes constant around 90 kPa after about 0.9 seconds. The pressure of the coating liquid 303 becomes constant around 180 kPa after about 1.2 seconds. The pressure identification data has data for determination based on the relationship between pressure and time shown in FIG. 3 for each type of coating liquid 300 .

The pressure identification data 400, as a judgment condition for the type of the coating liquid 301, is that the pressure falls within the range of 30 kPa±10 kPa and the time that the pressure becomes flat is within 0.5 seconds±0.5 seconds. have determinable data; The flattened state includes, for example, that the pressure values obtained continuously fall within a certain number or more, 5 kPa. The pressure identification data 400, as a judgment condition for the type of the coating liquid 302, is that the pressure falls within the range of 90 kPa±10 kPa and the time that the pressure becomes flat is within 0.9 seconds±0.5 seconds. have determinable data; In the pressure identification data 400, as a judgment condition for the type of the coating liquid 303, the pressure falls within the range of 180 kPa±10 kPa and the time when the pressure becomes flat is within 1.2 seconds±0.5 seconds. have determinable data;

(Example of control of coating liquid supply device)
FIG. 4 is a flow chart showing an example of a processing procedure for identifying the type of coating liquid 300 executed by the coating liquid supply device 100. As shown in FIG. The processing procedure shown in FIG. 4 is implemented by the control unit 150 of the coating liquid supply apparatus 100 executing a program. The processing procedure shown in FIG. 4 is repeatedly executed by the control unit 150 .

As shown in FIG. 4, the control unit 150 of the coating liquid supply device 100 starts supplying the coating liquid 300 (step 1101). For example, the control unit 150 starts supplying the coating liquid 300 to the supply unit 110 by driving the pump 130 at a predetermined constant speed. After completing the process of step 1101 , the control unit 150 advances the process to step 1102 .

Control unit 150 acquires pressure information from pressure gauge 140 (step 1102). For example, the control unit 150 acquires pressure information from the pressure gauge 140 and stores the acquired pressure information in chronological order. After completing the process of step 1102 , the control unit 150 advances the process to step 1103 .

The control unit 150 determines whether the pressure variation is flat (step 1103). The state in which the pressure fluctuation is flat includes a state in which the pressure fluctuation falls within a predetermined value and is stable after a predetermined period of time has elapsed. For example, the control unit 150 determines that the pressure fluctuation is in a flat state when the pressure stops increasing after the start of supplying the coating liquid and the pressure remains constant over the determination time. It should be noted that the control unit 150 does not necessarily need to acquire the pressure value after the pressure is in a stable flat state with little fluctuation. The combination pattern with the pressure value in the flat state may be acquired as the pressure data. Alternatively, the control unit 150 may use the degree of pressure increase or the like as pressure data. In this case, since the degree of increase in pressure is used as pressure data, it is sufficient to monitor the pressure value for a predetermined time after driving the pump 130, and the step of determining whether the pressure fluctuation has become flat. 1103 is unnecessary.

When the control unit 150 determines that the pressure fluctuation is not flat (No in step 1103), the process returns to the already described step 1102 to continue the process. If the control unit 150 determines that the pressure fluctuation is flat (Yes in step 1103), the process proceeds to step 1104. FIG.

The control unit 150 collates the acquired pressure information with the pressure identification data 400 to identify the type of the coating liquid 300 (step 1104). For example, the control unit 150 extracts a pressure close to the pressure indicated by the acquired pressure information from the pressure identification data 400 and identifies the type associated with the pressure as the type of the coating liquid 300 . For example, the control unit 150 identifies that the acquired pressure information is abnormal when there is no pressure in the pressure identification data 400 that is similar to the pressure indicated by the acquired pressure information. When the control unit 150 memorizes the type identification result in the process of step 1104 , the process proceeds to step 1105 .

The control unit 150 determines whether or not the type of the coating liquid 300 has been identified (step 1105). For example, the control unit 150 determines that the type has been identified when the identification result of step 1104 identifies the type of the coating liquid 300 . When the control unit 150 determines that the type of the coating liquid 300 has been identified (Yes in step 1105), the process proceeds to step 1106. FIG.

The control unit 150 determines whether the specified type is a registered type (step 1106). For example, when the type identified in step 1104 matches the registered type, the control unit 150 determines that the identified type is the registered type. The control unit 150 acquires information indicating the registered type from the operator or from an external device or the like.

If the control unit 150 determines that the identified type is the registered type (Yes in step 1106 ), the process proceeds to step 1107 . The control unit 150 executes notification processing of the specified type of coating liquid 300 (step 1107). For example, the control unit 150 executes notification processing for controlling the notification unit 170 to notify the specified type of the coating liquid 300 . For example, the control unit 150 executes notification processing of notifying other devices of the specified type or notifying an operator of the specified type via the communication device. After completing the process of step 1107, the control unit 150 terminates the procedure shown in FIG.

If the control unit 150 determines that the identified type is not the registered type (No in step 1106), the process proceeds to step 1108. FIG. The control unit 150 notifies that it is different from the registered coating liquid 300 type (step 1108). For example, the control unit 150 controls the notification section 170 to notify that the type of the coating liquid 300 is different from that registered. When the process of step 1108 ends, the control unit 150 ends the processing procedure shown in FIG.

If the control unit 150 determines that the type of the coating liquid 300 has not been specified (No in step 1105), the process proceeds to step 1109. FIG. The control unit 150 notifies that the state of the coating liquid 300 is abnormal or unstable (step 1109). For example, the control unit 150 controls the notification section 170 to notify that the state of the coating liquid 300 is abnormal or unstable. When the process of step 1109 ends, the control unit 150 ends the processing procedure shown in FIG.

As described above, in the coating liquid supply apparatus 100, the pressure inside the supply passage 120 when supplying the coating liquid 300 to the supply section 110 varies depending on the viscosity of the coating liquid. identify the type of Thereby, the coating liquid supply device 100 can contribute to prevention of wrong coating liquid 300 by specifying the type of coating liquid 300 to be supplied from the supply path 120 to the workpiece 200 .

The coating liquid supply apparatus 100 can notify the notifying section 170 when the specified type of the coating liquid 300 is different from the type of the coating liquid 300 registered in the registering section 153 . As a result, the coating liquid supply device 100 can prevent the wrong coating liquid 300 by notifying that the coating liquid 300 is of a different type.

If the type of the coating liquid 300 cannot be specified, the coating liquid supply apparatus 100 can determine that the state of the supplied coating liquid 300 is abnormal or unstable. For example, after replacing the coating liquid 300, the coating liquid supply apparatus 100 may mix the coating liquid 300 remaining inside the supply path 120 with the coating liquid 300 after replacement. There was no way to determine whether the inside of the supply channel 120 was completely replaced with the new coating liquid 300 . However, in the present invention, when the coating liquid 300 cannot be identified, the coating liquid supply apparatus 100 determines that the state of the coating liquid 300 is unstable or abnormal, and uses the coating liquid 300 in a mixed state. can be prevented.

In addition, the coating liquid supply device 100 drives the pump 130 to discharge the resin until the coating liquid 300 is specified, and after the coating liquid 300 in the supply path 120 is replaced without being mixed, the resin to be processed is replaced. Application of the coating liquid 300 to the article 200 can begin. Therefore, the coating liquid supply apparatus 100 can replace the resin in the supply path 120 after the replacement without excess or deficiency, and the resin is not wastefully discharged for replacement, which is economical and easy to replace. The quality of the coating can be improved because there is no fear of starting to feed the workpiece 200 before it is done.

Furthermore, even if the coating liquid 300 contains many bubbles, the coating liquid supply apparatus 100 cannot identify the type of the coating liquid 300 because the pressure changes. , can improve the quality of the coating.

(Usage example of coating liquid supply device)
The coating liquid supply device 100 according to the embodiment is used, for example, in the laser processing device 1 that coats one surface of the workpiece 200 with the coating liquid 300 to form the protective film 230 .

FIG. 5 is a diagram showing an example of a laser processing apparatus using the coating liquid supply device 100 according to the embodiment. A laser processing apparatus 1 shown in FIG. 5 is an apparatus for processing a workpiece by irradiating a laser beam from a laser irradiation mechanism 3 onto a workpiece 200 held on a holding table 2 . The holding table 2 is configured to be fed by the feeding mechanism 4 in the X-axis direction and the Y-axis direction which is horizontally orthogonal to the X-axis direction. The feed mechanism 4 is composed of an X-direction feed mechanism 5 and a Y-direction feed mechanism 6 .

The laser irradiation mechanism 3 is fixed to a wall portion 10 provided at the rear end portion of the apparatus, and includes an irradiation head 30 that irradiates a laser beam downward.

The X-direction feed mechanism 5 includes a ball screw 50 extending in the X-axis direction, a guide rail 51 arranged in parallel with the ball screw 50, a motor 52 connected to one end of the ball screw 50 for rotating the ball screw 50, and a guide at the bottom. A slide plate 53 which slides on the rail 51 and has a nut (not shown) screwed onto the ball screw 50 therein. The X-direction feed mechanism 5 is configured such that a slide plate 53 is guided by a guide rail 51 and moves in the X-axis direction as the ball screw 50 rotates. A rotary drive unit 54 having a pulse motor therein is fixed to the slide plate 53, and the rotary drive unit 54 can rotate the holding table 2 by a predetermined angle.

The Y-direction feed mechanism 6 includes a ball screw 60 extending in the Y-axis direction, a guide rail 61 arranged parallel to the ball screw 60, a motor 62 connected to one end of the ball screw 60 to rotate the ball screw 60, and a guide at the bottom. A slide plate 63 which slides on the rail 61 and has a nut (not shown) screwed onto the ball screw 60 therein. The Y-direction feed mechanism 6 is configured such that a slide plate 63 is guided by a guide rail 61 and moves in the X-axis direction as the ball screw 60 rotates. The slide plate 63 is provided with the X-direction feed mechanism 5, and as the slide plate 63 moves in the Y-axis direction, the X-direction feed mechanism 5 also moves in the same direction.

In front of the wall portion 10, the laser processing apparatus 1 has a protective film forming mechanism that supplies a water-soluble liquid resin to the processed surface of the workpiece 200 before processing to cover the processed surface with a protective film. 7. The protective film forming mechanism 7 includes a rotary table 70 that holds and rotates the workpiece 200 , a fixing portion 71 that fixes the workpiece 200 to the rotary table 70 , and a coating liquid 300 applied from above the workpiece 200 . and a supply unit 110 for dripping. The supply portion 110 is arranged at the tip of the arm portion 74 that can swing about the shaft portion 73 by a predetermined angle.

The laser processing apparatus 1 includes a transport mechanism 8 that transports a workpiece from the protective film forming mechanism 7 to the holding table 2 on the front surface of the wall portion 10 . The conveying mechanism 8 includes a ball screw 80 extending in the Y-axis direction, a guide rail 81 arranged parallel to the ball screw 80, a motor 82 connected to one end of the ball screw 80 for rotating the ball screw 80, and a guide rail on the side. A moving block 83 that is in sliding contact with the ball screw 81 and has a nut (not shown) that is screwed to the ball screw 80; Prepare. In the conveying mechanism 8, the moving block 83 is guided by the guide rail 81 to move in the Y-axis direction as the ball screw 80 rotates. A workpiece 200 is transported between the protective film forming mechanism 7 and the holding table 2 .

The laser processing apparatus 1 includes the above-described coating liquid supply device 100 inside the wall portion 10 . The coating liquid supply device 100 supplies the coating liquid 300 from the supply section 110 of the protective film forming mechanism 7 and drips the coating liquid 300 from the supply section 110 , thereby supplying the coating liquid 300 to the workpiece 200 . The coating liquid supply apparatus 100 can identify the type of coating liquid to be supplied and notify the result of the identification by the notification unit 170 .

Next, the operation of the laser processing apparatus 1 shown in FIG. 5 will be described when the protective film 230 is formed on the processed surface of the workpiece 200 and the laser beam is irradiated from the protective film 230 side.

First, in the laser processing apparatus 1 , the surface opposite to the surface to be processed of the workpiece 200 before processing is held on the rotary table 70 of the protective film forming mechanism 7 . Then, as the rotary table 70 is rotated, the water-soluble liquid resin is dripped onto the surface to be processed of the workpiece from the supply unit 110 while the arm unit 74 is rocked, and the coating liquid is applied to the surface 210 of the workpiece 200 by spin coating. A protective film 230 consisting of 300 is coated.

After forming the protective film 230 on the workpiece 200 , the laser processing apparatus 1 transports the workpiece 200 to the holding table 2 by the transport mechanism 8 and holds the back surface of the workpiece 200 on the holding table 2 . In the laser processing apparatus 1, while the X-direction feeding mechanism 5 and the Y-direction feeding mechanism 6 feed the holding table 2 in the X and Y directions, the irradiation head 30 moves toward the street from the surface 210 side of the workpiece 200. Irradiate with a laser beam. At this time, even if debris is generated by laser beam irradiation, the circuit 220 is protected because the surface 210 on which the circuit 220 is formed is protected by the protective film 230 .

In addition, the laser processing apparatus 1 allows the operator to confirm the type of the coating liquid 300 or notice a mistake in the coating liquid 300 by notifying the type of the coating liquid 300 by the coating liquid supply device 100. . Thereby, the laser processing apparatus 1 can prevent the wrong coating liquid 300 by using the coating liquid supply device 100 .

Although the coating liquid supply device 100 according to the embodiment has been described as being used in the laser processing device 1, it is not limited to this. The coating liquid supply device 100 can be used, for example, in processing devices that require the supply of a coating liquid, such as grinding devices and cutting devices.

REFERENCE SIGNS LIST 1 laser processing device 2 holding table 3 laser irradiation mechanism 4 feeding mechanism 5 X-direction feeding mechanism 6 Y-direction feeding mechanism 7 protective film forming mechanism 8 conveying mechanism 100 coating liquid supply device 110 supply unit 120 supply path 121 valve 130 pump 140 pressure gauge 150 control unit 151 pressure recording unit 152 verification unit 153 registration unit 160 coating liquid supply source 170 notification unit 200 workpiece 230 protective film 300 coating liquid 400 pressure identification data

Claims (3)

a supply unit that supplies the coating liquid to the workpiece;
a supply path that communicates between the supply unit and a coating liquid supply source;
a pump;
a pressure gauge installed in the supply channel;
a control unit;
The control unit is
a pressure recording unit that records the pressure of the pressure gauge when the coating liquid is supplied to the supply unit for each type of coating liquid;
a collation unit that collates the pressure of the pressure gauge when the coating liquid is supplied to the supply unit with the pressure recorded in the pressure recording unit, and specifies the type of coating liquid being supplied;
A coating liquid supply device comprising: The control unit is
further having a coating liquid registration unit for registering the type of coating liquid to be used,
2. The coating liquid supply device according to claim 1, wherein when the type of coating liquid specified by said collating section and the type of coating liquid registered in said coating liquid registering section are different, a notification is given. The control unit is
2. The coating liquid supply device according to claim 1, wherein when the matching unit cannot specify the type of the coating liquid, it determines that the state of the coating liquid being supplied is abnormal or unstable.

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