JP2023045006A - Tape sticking device - Google Patents

Abstract

A tape sticking device capable of preventing wrinkles from occurring in a tape even when a ring-shaped reinforcing portion is removed from a wafer stuck to the tape of a tape-attached frame.
A tape sticking device (2) includes a frame support table (4) for supporting a frame (F), lifting means (6) for lifting and lowering the frame support table (4), tape sticking means (8), and control means. The tape sticking means 8 moves the tape delivery portion 14, the tape take-up portion 16, and the delivered tape T from one end to the other end of the frame F supported by the frame support table 4 while pressing the tape T from one end to the other end. and a pressing roller 18 for sticking. The control means positions the pressing roller 18 at the pressing position, applies tension to the tape T, adheres the tape T to one end of the frame F, moves the pressing roller 18 toward the other end of the frame F, and moves the pressing roller 18 toward the other end of the frame F. The tension applied to the tape T is kept constant by raising the frame support table 4 in synchronism with the movement of the tape.
[Selection drawing] Fig. 3

Description

The present invention relates to a tape applying apparatus for applying a tape to a frame having an opening in the center for accommodating a wafer.

A wafer having a device region in which a plurality of devices such as ICs and LSIs are partitioned by dividing lines and a surplus peripheral region surrounding the device region is formed on the front surface, and the back surface is ground to a desired thickness. After that, it is divided into individual device chips by a dicing machine and a laser processing machine, and each divided device chip is used in electric equipment such as mobile phones and personal computers.

In order to facilitate transportation of the ground wafer, the present applicant left a ring-shaped reinforcing portion on the back surface corresponding to the outer peripheral surplus area and subjected to a predetermined processing, and then stuck a dicing tape on the back surface of the wafer. A technique has been proposed in which a wafer is attached, a frame supports the wafer, and a ring-shaped reinforcing portion is removed from the wafer (see Patent Document 1, for example).

However, in the technique disclosed in Patent Document 1, a dicing tape is attached to the back surface of a wafer having a ring-shaped reinforcing portion formed in a convex shape on the back surface corresponding to the outer peripheral surplus region and integrated with the frame. The work is difficult, and it is difficult to cut the ring-shaped reinforcing portion to remove it from the wafer, resulting in poor productivity.

Therefore, the present applicant developed a processing apparatus for removing the convex reinforcing portion from a wafer having a convex ring-shaped reinforcing portion formed on the back surface corresponding to the outer peripheral surplus region. A patent application has been filed (Japanese Patent Application No. 2020-123301).

This processing equipment
a wafer cassette table on which a wafer cassette containing a plurality of wafers is mounted;
wafer unloading means for unloading the wafer from the wafer cassette placed on the wafer cassette table;
a wafer table for supporting the surface side of the wafer unloaded by the wafer unloading means;
frame housing means for housing a plurality of ring-shaped frames having openings for housing wafers;
a frame unloading means for unloading the frame from the frame holding means;
a frame table for supporting the frame unloaded by the frame unloading means;
a tape applying means disposed above the frame table for applying the tape to the frame;
tape-attached frame conveying means for conveying the frame to which the tape is adhered to the wafer table, positioning the opening of the frame on the rear surface of the wafer supported by the wafer table, and placing the tape-attached frame on the wafer table;
tape pressing means for pressing the tape of the tape-attached frame to the back surface of the wafer;
frame unit unloading means for unloading from the wafer table the frame unit in which the tape of the tape-attached frame and the back surface of the wafer are crimped by the tape crimping means;
a reinforcing part removing means for cutting and removing a ring-shaped reinforcing part from the wafer of the frame unit carried out by the frame unit carrying out means;
a ring-less unit carrying-out means for carrying out the ring-less unit from which the ring-shaped reinforcing part has been removed from the reinforcing part-removing means;
a frame cassette table on which a frame cassette containing the ring-less unit carried out by the ring-less unit carrying-out means is placed.

JP 2010-62375 A

However, when the ring-shaped reinforcing portion is removed from the wafer adhered to the tape of the frame with tape, the tape adhered to the frame and the wafer wrinkles, and when dividing the wafer into individual device chips, the tape is wrinkled. There is a problem of getting in the way.

SUMMARY OF THE INVENTION An object of the present invention, which has been devised in view of the above facts, is to provide a tape attachment that can prevent the tape from being wrinkled even if the ring-shaped reinforcing portion is removed from the wafer attached to the tape of the tape attached frame. It is to provide a wearing device.

According to the present invention, the following tape sticking device for solving the above problems is provided. i.e.
"A tape applying device for applying a tape to a frame having an opening in the center for accommodating a wafer,
comprising at least a frame support table for supporting a frame, elevating means for elevating the frame support table, tape applying means disposed facing the frame support table, and control means,
The tape sticking means includes a tape feeding section for feeding the tape, a tape winding section for winding the used tape, and a tape disposed between the tape feeding section and the tape winding section to hold the fed tape. a pressing roller that moves while pressing from one end to the other end of the frame supported by the frame support table to attach the frame;
The control means positions the pressing roller at the pressing position, applies tension to the tape to adhere the tape to one end of the frame, moves the pressing roller toward the other end of the frame, and moves the pressing roller toward the other end of the frame. There is provided a "tape applying device" which synchronously raises the frame support table to keep the tension applied to the tape constant.

Preferably, when the pressing roller is positioned at the pressing position, the tape forms an elevation angle from the pressing roller toward the tape take-up portion, and is moved in synchronism with the movement of the pressing roller so that the elevation angle is constant. Raise the frame support table. Preferably, the tape applying means comprises a cutter that rotates in contact with the frame to cut the tape.

The tape applying device of the present invention is a tape applying device for applying a tape to a frame having an opening in the center for accommodating a wafer, and comprises a frame support table for supporting the frame and a frame support table which is lifted up and down. , a tape sticking means arranged opposite to the frame support table, and a control means, wherein the tape sticking means comprises a tape feeding section for feeding a tape, and a used tape. and a tape take-up portion that winds the tape, and the tape that is disposed between the tape delivery portion and the tape take-up portion and presses the delivered tape from one end to the other end of the frame supported by the frame support table. The control means positions the pressure roller at the pressing position and applies tension to the tape to apply the tape to one end of the frame, and moves the pressure roller to the frame. Since the tape is moved toward the other end and the frame support table is lifted in synchronism with the movement of the pressing roller to keep the tension applied to the tape constant, the wafer stuck to the tape of the tape-attached frame has a ring shape. Even if the reinforcing portion is removed, the tape can be prevented from wrinkling. Therefore, there is no problem when dividing the wafer into individual device chips.

1 is a perspective view of a tape applicator constructed in accordance with the present invention; FIG. FIG. 2 is a schematic diagram of the tape sticking device shown in FIG. 1; FIG. 4 is a schematic diagram showing a state in which the pressing roller is positioned at the pressing position and a tape is attached to one end of the frame. FIG. 4 is a schematic diagram showing a state in which a pressing roller is moved from the state shown in FIG. 3; FIG. 5 is a schematic diagram showing a state in which the pressure roller is further moved from the state shown in FIG. 4; (a) Perspective view of a wafer with reinforcement, (b) Perspective view of a wafer without reinforcement. (a) Perspective view showing a state in which the back surface of the wafer with reinforcement shown in FIG. The perspective view which shows the state stuck on the tape of the attached frame. (a) Perspective view showing a state in which the back surface of the wafer with reinforcement shown in FIG. The perspective view which shows the state stuck on the tape of the attached frame.

BEST MODE FOR CARRYING OUT THE INVENTION A preferred embodiment of a tape sticking device constructed according to the present invention will be described below with reference to the drawings.

(Tape sticking device 2)
Referring to FIG. 1, the tape applying apparatus, which is generally indicated by reference numeral 2, comprises a frame support table 4 for supporting a frame F, an elevating means 6 for elevating the frame support table 4, and a tape adhering apparatus facing the frame support table 4. At least a tape sticking means 8 and a control means 10 are provided.

(lifting means 6)
The elevating means 6 includes a guide member 12 that supports the frame support table 4 so that it can be raised and lowered, and an elevating mechanism (not shown) attached to the guide member 12 . The elevating mechanism may have, for example, a vertically extending ball screw connected to the frame support table 4 and a motor for rotating the ball screw. The lifting means 6 lifts and lowers the frame support table 4 along the guide member 12 by operating the lifting mechanism.

(Tape sticking means 8)
The tape sticking means 8 is disposed between a tape feeding section 14 for feeding the tape T, a tape winding section 16 for winding the used tape T, and between the tape feeding section 14 and the tape winding section 16, A pressure roller 18 is provided to move and adhere the fed tape T from one end to the other end of the frame F supported by the frame support table 4 while pressing the tape.

(Tape feeding section 14 of tape sticking means 8)
The tape delivery unit 14 includes a support roller 20 that supports the roll tape R on which the tape T before use is wound in a cylindrical shape, a delivery roller 22 that is arranged below the support roller 20, and a motor that rotates the delivery roller 22. (not shown), and a driven roller 24 that rotates as the feed roller 22 rotates.

The tape sending unit 14 sends out the tape T sandwiched between the sending roller 22 and the driven roller 24 from the roll tape R by rotating the sending roller 22 and the driven roller 24 with a motor. Further, the release paper P is peeled off from the tape T that has passed between the feed roller 22 and the driven roller 24, and the peeled release paper P is wound around the release paper roller 26 and collected.

(Tape Winding Unit 16 of Tape Applicator 8)
The tape take-up unit 16 includes a take-up roller 28 that takes up the used tape T, a motor (not shown) that rotates the take-up roller 28 , and between the feed roller 22 and the take-up roller 28 . and a pair of guide rollers 30 installed.

In the tape take-up unit 16, the used tape T having a circular opening T _O (see FIG. 1) corresponding to the portion attached to the frame F is formed by rotating the take-up roller 28 by a motor. While being guided by a pair of guide rollers 30, it is wound up by a winding roller 28. - 特許庁

(Press roller 18 of tape sticking means 8)
2 and 3, the pressure roller 18 is lifted and lowered by pressure roller positioning means (not shown), and has an upper waiting position shown in FIG. positioned in the lower pressing position. Further, the pressing roller 18 is moved in the Y-axis direction by pressing roller moving means (not shown) while positioned at the lower pressing position.

The Y-axis direction is the direction indicated by the arrow Y in FIG. The X-axis direction indicated by arrow X in FIG. 1 is a direction orthogonal to the Y-axis direction, and the Z-axis direction indicated by arrow Z in FIG. 1 is a vertical direction orthogonal to the X-axis direction and the Y-axis direction. An XY plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

(Cutting mechanism 32 of tape sticking means 8)
As shown in FIG. 1 , the tape applying means 8 of the illustrated embodiment further includes a cutting mechanism 32 including a cutter 44 that cuts the tape T by rotating in contact with the frame F. As shown in FIG. The cutting mechanism 32 includes a Z-axis guide member 34 extending in the Z-axis direction, a Z-axis movable member 36 movably supported by the Z-axis guide member 34 in the Z-axis direction, and a Z-axis movable member 36 in the Z-axis direction. and Z-axis feed means (not shown) for movement. The Z-axis feed means may have a ball screw that is connected to the Z-axis movable member 36 and extends in the Z-axis direction, and a motor that rotates the ball screw.

The cutting mechanism 32 also includes a motor 38 fixed to the bottom surface of the tip of the Z-axis movable member 36, and an arm piece 40 rotated by the motor 38 around an axis extending in the Z-axis direction. First and second hanging pieces 42a and 42b are attached to the lower surface of the arm piece 40 at intervals. A circular cutter 44 is rotatably supported on the first hanging piece 42a about an axis perpendicular to the Z-axis direction, and a circular cutter 44 is supported on the second hanging piece 42b to rotate about an axis perpendicular to the Z-axis direction. A pressing roller 46 is freely supported.

(Control means 10)
The control means 10 includes a central processing unit (CPU) that performs arithmetic processing according to a control program, a read-only memory (ROM) that stores control programs and the like, and a readable and writable random access memory (RAM) that stores arithmetic results and the like. It consists of a computer with The control means 10 controls the operation of the elevating means 6 and the tape sticking means 8 .

(Frame F)
The frame F to which the tape T is applied by the tape applying device 2 has an annular shape and has a circular opening Fa in the center for accommodating the wafer.

(Tape T)
The tape T may be an adhesive tape provided with an adhesive layer (glue layer) on one side, or may be a thermocompression sheet having no adhesive layer. A thermocompression sheet is a sheet of a thermoplastic synthetic resin (for example, a polyolefin resin), and is a sheet that softens or melts when heated to a temperature near its melting point to exhibit adhesive strength.

While a release paper P is attached to the adhesive surface of the adhesive tape, the release paper P may or may not be attached to the pressure bonding surface of the thermocompression sheet. When a thermocompression bonding sheet with no release paper P attached is used, the tape applying device 2 does not need to collect the release paper P, so the release paper roller 26 may not be provided.

When the tape T is a thermocompression sheet, at least one of the frame support table 4 and the pressure roller 18 has a built-in heater and a temperature sensor (both not shown), and the frame F is provided with a thermocompression sheet. At least one of the frame support table 4 and the pressing roller 18 is heated to a temperature near the melting point of the thermocompression bonding sheet.

Next, the operation of the tape sticking device 2 as described above will be described.

First, before the frame F is placed on the frame support table 4, the frame support table 4 is positioned at a position where the frame F can be received (for example, the position shown in FIGS. position. Also, the tape T is sent out from the roll tape R, and the tape T from which the release paper P is peeled off is positioned above the frame support table 4 in a stretched state without slackening. When the tape T is an adhesive tape, the adhesive surface of the tape T positioned above the frame support table 4 faces downward.

Next, when the frames F carried out by the frame carry-out means (not shown) are placed on the frame support table 4 from the frame accommodation means (not shown) that accommodates the plurality of frames F, the control means 10 operates the elevating means 6 and the pressing roller positioning means to position the frame support table 4 at the sticking start position and the pressing roller 18 at the lower pressing position as shown in FIG. A tape T is attached to one end of the frame F by applying tension to the frame F.

As described above, when the frame support table 4 is positioned at the sticking start position and the pressing roller 18 is positioned at the pressing position, as shown in FIG. form an elevation angle α toward the guide roller 30 on the lower side of the .

Next, while pressing the tape T against the frame F with the pressure roller 18, the pressure roller 18 is moved toward the other end of the frame F in the Y-axis direction. As a result, the tape T can be attached to the frame F while a uniform tension is applied to the tape T. As shown in FIG.

When the pressure roller 18 is moved, it is important to keep the tension applied to the tape T constant by raising the frame support table 4 in synchronization with the movement of the pressure roller 18 . Specifically, as shown in FIGS. 4 and 5, the control means 10 controls the frame support table 4 to gradually rise in synchronism with the movement of the pressure roller 18 so that the elevation angle α is constant.

When the tape T is a thermocompression sheet, the temperature of the upper surface of the frame support table 4 or the temperature of the outer peripheral surface of the pressure roller 18 is adjusted to a temperature at which the tape T softens or melts. The tape T can be thermocompression bonded to the frame F by rolling the pressure roller 18 in the Y-axis direction while applying a constant tension to the tape T by . Of course, when the tape T is thermocompressed, the frame support table 4 is gradually raised in synchronization with the movement of the pressing roller 18 so that the elevation angle α is kept constant.

After the tape T is attached to the frame F, the cutter 44 and the pressing roller 46 of the cutting mechanism 32 of the tape attaching means 8 are lowered to press the cutter 44 against the tape T on the frame F, and the pressing roller 46 presses the tape. Hold frame F from above T. Next, the arm piece 40 is rotated by the motor 38 to move the cutter 44 and the pressing roller 46 along the frame F so as to draw a circle. As a result, the tape T protruding from the outer circumference of the frame F can be cut along the frame F.

Further, since the pressing roller 46 presses the frame F from above the tape T, positional deviation of the frame F and the tape T is prevented when the tape T is being cut. The used tape T having the circular opening T 2 _O is wound up by the tape winding section 16 .

Then, after the frame support table 4 is lowered to a position where the tape-attached frame F to which the tape T is stuck to the frame F can be conveyed, the opening Fa of the tape-attached frame F is positioned on the wafer, and the tape-attached frame F is moved. The tape-attached frame F is conveyed by the tape-attached frame conveying means (not illustrated) to a device (not illustrated) that adheres the wafer to the tape T. Wafers to be attached to the tape T of the tape-attached frame F include, for example, the wafers 50 and 50' shown in FIG.

A surface 50a of a wafer 50 shown in FIG. 6A has a device region 56 in which a plurality of devices 52 such as ICs and LSIs are partitioned by grid-like dividing lines 54, and an outer peripheral surplus region 58 surrounding the device region 56. and are formed. In FIG. 6A, the boundary 60 between the device region 56 and the peripheral surplus region 58 is indicated by a chain double-dashed line for the sake of convenience, but the line indicating the boundary 60 does not actually exist.

A ring-shaped reinforcing portion 62 is formed in a convex shape in an outer peripheral surplus region 58 on the back surface 50 b side of the wafer 50 , and the thickness of the outer peripheral surplus region 58 is larger than the thickness of the device region 56 . Also, the wafer attached to the tape T of the tape-attached frame F may not have the ring-shaped reinforcing portion provided on the rear surface 50b' like the wafer 50' shown in FIG. 6(b). .

When attaching the wafer 50 to the tape T of the frame F with tape, the back surface 50b of the wafer 50 may be attached to the tape T as shown in FIG. The surface 50a of the wafer 50 may be adhered to the tape T as shown in FIG. Also, when attaching the wafer 50′ without the ring-shaped reinforcing portion to the tape T, the back surface 50b′ of the wafer 50′ may be attached to the tape T as shown in FIG. Alternatively, the surface 50a' of the wafer 50' may be adhered to the tape T as shown in FIG. 8(b).

In the illustrated embodiment, as described above, the tape T is attached to the frame F while a uniform tension is applied to the tape T, so that the wafer 50 (or 50') is attached to the tape T of the tape-attached frame F. Wrinkles do not occur in the tape T when affixing the .

Then, after attaching the wafer 50 having the ring-shaped reinforcing portion 62 to the tape T, ablation processing using a laser processing device or cutting processing using a dicing device is performed along the base of the ring-shaped reinforcing portion 62. Even if the ring-shaped reinforcing portion 62 is peeled off from the tape T after forming the annular groove, the tape T is not wrinkled. This is because, in the illustrated embodiment, the tape T is attached to the frame F with a uniform tension applied to the tape T, as described above.

That is, the tape sticking device 2 provides sufficient and uniform tension to the extent that wrinkles do not occur in the tape T even when the ring-shaped reinforcing portion 62 is removed from the wafer 50 stuck to the tape T of the tape-attached frame F. , can be applied to the frame F while the tape T is being applied.

As described above, in the tape sticking apparatus 2 of the illustrated embodiment, even if the ring-shaped reinforcing portion 62 is removed from the wafer 50 stuck to the tape T of the tape-attached frame F, the tape T is wrinkled. Since it is possible to prevent this from occurring, there is no problem when dividing the wafer 50 into individual device chips.

2: Tape Applicator 4: Frame Support Table 6: Elevator Means 8: Tape Applicator 10: Control Means 14: Tape Sending Unit 16: Tape Winding Unit 18: Pressure Roller 44: Cutter 50: Wafer F: Frame Fa : Frame opening T: Tape α: Elevation angle

Claims (3)

A tape applying device for applying a tape to a frame having an opening in the center for accommodating a wafer,
comprising at least a frame support table for supporting a frame, elevating means for elevating the frame support table, tape applying means disposed facing the frame support table, and control means,
The tape sticking means includes a tape feeding section for feeding the tape, a tape winding section for winding the used tape, and a tape disposed between the tape feeding section and the tape winding section to hold the fed tape. a pressing roller that moves while pressing from one end to the other end of the frame supported by the frame support table to attach the frame;
The control means positions the pressure roller at the pressure position, applies tension to the tape to adhere the tape to one end of the frame, moves the pressure roller toward the other end of the frame, and moves the pressure roller toward the other end of the frame. A tape sticking device that raises the frame support table synchronously to keep the tension applied to the tape constant. When the pressure roller is positioned at the pressure position, the tape forms an elevation angle from the pressure roller toward the tape take-up portion, and the frame is supported in synchronism with the movement of the pressure roller so that the elevation angle is constant. 2. The tape applying device according to claim 1, wherein the table is raised. 2. The tape applying device according to claim 1, wherein said tape applying means comprises a cutter that abuts on the frame and rotates to cut the tape.

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