JP2022018331A - Bolt holding member, bolt and assembly body of bolt and bolt holding member, and mounting method - Google Patents

Abstract

To provide a bolt holding member capable of being used under high temperature and holding a bolt to a member to be fastened, and an assembly body of a bolt and a bolt holding member.SOLUTION: A bolt holding member 10 is made of a thin metal plate, has a cylindrical shape, and holds a bolt 1 in an on-off valve 150A having a through hole 154. The bolt holding member 10 comprises a tapered part 12 having a slit 10a extending from one end to the other and tapered toward the end, and a straight part 11 capable of temporarily fixing the bolt holding member 10 to the on-off valve 150A by abutting on an inner surface defining the through hole 154 with elastic force. A tip part 12A of the tapered part 12 can abut on a shank 3 of the bolt 1 with the elastic force.SELECTED DRAWING: Figure 3

Description

The present disclosure relates to a bolt holding member, a combination of bolts and bolt holding members, and a mounting method.

A retaining ring has been proposed to prevent a bolt fastened to a member to be fastened from falling off (see, for example, Patent Document 1). The retaining ring of Patent Document 1 has a bolt engaging portion and has a substantially covered cylindrical shape, and is inserted into a mounting hole formed on the opposite side of the fastened member to the side where the bolt is inserted to form a bolt. By engaging the bolt engaging portion with the screw thread, the bolt is prevented from coming off.

Republished 2006-022103 Gazette

However, the retaining ring of Patent Document 1 is made of fluororubber or the like. In recent years, due to the high temperature of the fluid used in semiconductor manufacturing equipment, the retaining ring cannot be used when the equipment or the like is heated above the heat resistant temperature of fluororubber. Further, with the miniaturization of the semiconductor manufacturing apparatus, the bolt holes for fastening the devices are also reduced, and it is difficult to have a larger holding space than the holes for inserting the bolts.

Therefore, one of the purposes of the present disclosure is to provide a bolt holding member that can be used at a high temperature and can hold a bolt to a bolt to be fastened member, and a combination of a bolt and a bolt holding member.

In order to solve the above object, the bolt holding member according to one aspect of the present disclosure is a bolt holding member having a cylindrical shape made of a thin metal plate and holding a bolt to a member to be fastened having a through hole, and one end thereof. The bolt holding member is brought into contact with the tapered portion, which has a slit extending from the portion to the other end portion and is tapered toward the end portion, and the inner surface defining the through hole of the fastened member with elastic force. The fastening member is provided with a temporary fixing portion that can be temporarily fixed, and the tip portion of the tapered portion can be brought into contact with the shank of the bolt with elastic force.

It has a straight portion connected to the tapered portion and extends along the axial direction, and the portion of the straight portion on the tapered portion side may function as the temporary fixing portion.

The tapered portion may constitute the entire bolt holding member.

In a combination of a bolt and a bolt holding member according to one aspect of the present disclosure, the bolt comprises a shank and a bolt having a head provided at one end of the shank, and is cylindrical and made of a thin metal plate. The bolt holding member into which the shank is inserted and holds the bolt to the fastened member having a through hole has a slit extending from one end to the other end, and has a tapered portion that tapers toward the end. The bolt holding member is provided with a temporary fixing portion capable of temporarily fixing the bolt holding member to the fastened member by elastically contacting the inner surface defining the through hole of the fastened member, and the tip portion of the tapered portion is provided. The bolt is held by elastically contacting the shank of the bolt.

It has a straight portion that is located on the head side with respect to the tapered portion, is connected to the tapered portion, and extends along the axial direction, and the portion of the straight portion on the tapered portion side functions as the temporary fixing portion. You may.

The mounting method according to one aspect of the present disclosure is a mounting method in which a first fastened member having a through hole is connected to a second fastened member by a combination of a bolt and a bolt holding member, and the bolt is a shank. And a bolt having a head provided at one end of the shank, the cylindrical bolt holding member made of a thin metal plate has a slit extending from one end to the other end. It is provided with a tapered portion that tapers toward the portion and a temporary fixing portion. The mounting method is
The shank of the bolt is inserted into the bolt holding member, and the tip of the tapered portion is brought into contact with the shank of the bolt with elastic force.
The bolt and the bolt holding member are inserted into the through hole of the first to be fastened member, and the temporary fixing portion is elastically brought into contact with the inner surface defining the through hole to cause the bolt and the bolt holding member. Is temporarily fixed to the first member to be fastened.
The bolt and the first to be fastened member to which the bolt holding member is temporarily fastened are brought into contact with the second to be fastened member, and the bolt is rotated to be screwed into the screw hole of the second to be fastened member. Then, the first fastened member is attached to the second fastened member.

According to the present disclosure, it is possible to provide a bolt holding member that can be used at a high temperature and can hold a bolt to a fastened member, and a combination of a bolt and a bolt holding member.

It is a front view of the fluid control device. It is a side view of the partial assembly which constitutes the flow path of one system of a fluid control device. FIG. 2 is a cross-sectional view taken along the line IIB-IIB of FIG. 2A. It is a perspective view of the combination of a bolt and a bolt holding member. It is a perspective view of a bolt holding member. It is a front view of a bolt holding member. It is a front view of the combination of a bolt and a bolt holding member, and the bolt holding member shows a cross section. It is explanatory drawing of the method of attaching an on-off valve to a joint block by a combination body, and is the figure which shows the state which inserted the combination body into the through hole of the body of an on-off valve. It is explanatory drawing of the method of attaching an on-off valve to a joint block by a combination body, and is the figure which shows the state which the on-off valve is attached to the joint block by the combination body. It is a perspective view of the combination of a bolt and a bolt holding member which concerns on a modification. It is a perspective view of the bolt holding member which concerns on a modification. It is a front view of the combination of a bolt and a bolt holding member which concerns on a modification, and the bolt holding member shows a cross section. It is explanatory drawing of the method of connecting an on-off valve to a joint block by the combination which concerns on the modification, and is the figure which shows the state which inserted the combination into the through hole of the body of an on-off valve. It is explanatory drawing of the method of connecting an on-off valve to a joint block by the combination which concerns on the modification, and is the figure which shows the state which connected the on-off valve to a joint block by the combination.

A bolt holding member and a combination of bolts and bolt holding members according to an embodiment of the present disclosure will be described with reference to the drawings.

The bolt holding member 10 of the present embodiment and the combination 20 of the bolt 1 and the bolt holding member 10 are used, for example, in the fluid control device 100.

FIG. 1 is a front view of the fluid control device 100.
The fluid control device 100 has a metal base plate 110, and a plurality of rail portions 120 (only one is shown in FIG. 1) are provided on the base plate 110. A plurality of joint blocks 130, 140 and various fluid control devices 150A to 150E are installed in any one of the plurality of rail portions 120. The plurality of joint blocks 130 and 140 form a flow path through which the fluid flows from the upstream side to the downstream side, respectively.

Here, the "fluid control device" is a device used for a fluid control device that controls a fluid flow, and includes a body that defines a fluid flow path, and at least two flows that open at the bottom surface of the body. It is a device with a roadway. Specific examples include, but are not limited to, an on-off valve (two-way valve) 150A, a regulator 150B, a pressure gauge 150C, an on-off valve (three-way valve) 150D, and a mass flow controller 150E.

For example, a process gas such as ammonia gas is introduced into the flow path of each system of the fluid control device 100 through the introduction pipe 161. Each process gas is supplied to a processing chamber (not shown) through the supply pipe 160.

2A and 2B are partial assemblies 50 constituting a flow path of one system of the fluid control device 100, FIG. 2A is a side view, and FIG. 2B is a partial cross section taken along the line IIB-IIB of FIG. 2A. It is a figure.

As shown in FIGS. 2A and 2B, the assembly 50 is a fluid control device arranged on a rail member 120, joint blocks 140 and 140 arranged on the rail member 120, and joint blocks 140 and 140. It has an on-off valve 150A. Further, gaskets 170 and 170 as sealing members are provided between the body 153 of the on-off valve 150A and the joint blocks 140 and 140. Further, the assembly 50 has a combination 20 including a bolt 1 and a bolt holding member 10 for mounting the body 153 of the on-off valve 150A to the joint blocks 140 and 140.

The rail member 120 is, for example, a long member made of metal such as a stainless alloy, and has a rectangular cross section. A groove-shaped guide portion 121 is formed on the upper surface of the rail member 120 along the longitudinal direction.

Each joint block 140 is a metal member such as a stainless alloy and has a rectangular parallelepiped shape. A fitting portion 141 extending along the longitudinal direction is provided on the bottom surface of each joint block 140. Each fitting portion 141 has a shape that can be fitted to the guide portion 121. Each joint block 140 can be inserted from both ends of the rail member 120 in the longitudinal direction.

A substantially U-shaped fluid flow path 140a is formed in each joint block 140. Two flow path openings 140b and 140c of the fluid flow path 140a are opened on the upper surface 143 of each joint block 140. The horizontal portion of each fluid flow path 140a is open to the side surface of each joint block 140. A closing member 142 is provided in the opening to close each opening.

In the longitudinal direction, each joint block 140 is formed with two screw holes 144 and 145 that are opened at the upper surface 143 and extend toward the bottom surface side. The screw holes 144 and 145 are located between the two flow path openings 140b and 140c opened at the upper surface 143. The screw holes 144 and 145 have, for example, M5 having at least three threads and a depth of about 3 mm, but are not limited thereto. The dimensional specifications of the joint block 140 are, for example, about 10 mm in width, about 30 mm in length, about 2.6 mm in diameter of the fluid flow path 140a, and about 13 mm in height, but are not limited thereto. .. The widths of the joint block 140 and the rail member 120 are approximately 10 mm, which are substantially the same.

The on-off valve 150A has an actuator portion 151, a valve portion 152, and a body 153, and is supported by the rail member 120 via the joint block 140. The width of the body 153 is consistent with the width of the joint block 140, and is, for example, about 10 mm, but is not limited thereto.

The body 153 defines a fluid flow path (not shown) that communicates with the fluid flow path 140a of each joint block 140. Through holes 154 for inserting the combination 20 (bolts 1 and bolt holding member 10) are formed at both ends of the body 153 in the longitudinal direction. The diameter of the through hole 154 is about 5.5 mm, and the clearance when only the bolt 1 is inserted is about 0.5 mm.

Next, the bolt holding member 10 and the combination 20 of the bolt 1 and the bolt holding member 10 will be described with reference to the drawings.

FIG. 3 is a perspective view of the combination 20 of the bolt 1 and the bolt holding member 10.
The bolt 1 has a head 2 and a shank 3, and a screw portion 4 is formed on the outer peripheral portion of the shank 3. The bolt holding member 10 is mounted on the outer periphery of the shank 3 of the bolt 1.

4A to 4B are views showing the bolt holding member 10, FIG. 4A is a perspective view, and FIG. 4B is a front view.

The bolt holding member 10 is formed by rolling a single metal thin plate (for example, stainless spring steel) into a cylindrical shape, and the combination 20 is inserted through the through hole 154. Therefore, the bolt holding member 10 is a thin plate having a thickness of about 0.1 mm. However, it is not limited to this as long as it satisfies strength, springiness, and the like.

The bolt holding member 10 includes a straight portion 11 and a tapered portion 12. The bolt holding member 10 is not joined at both ends in the circumferential direction, and has a slit 10a extending from one end in the axial direction to the other end.

The straight portion 11 extends along the axial direction and is located closer to the head 2 of the bolt 1 than the tapered portion 12. The tapered portion 12 is connected to the lower end of the straight portion 11 and is configured to taper toward the tip portion 12A. The ratio of the lengths of the straight portion 11 and the tapered portion 12 in the axial direction is set to 1: 1 in the present embodiment, but is not limited to this, and can be appropriately set.

The inner diameter of the straight portion 11 is larger than the outer diameter (thread diameter) of the screw portion 4 of the bolt 1, and the outer diameter of the straight portion 11 is smaller than the inner diameter of the through hole 154. The inner diameter of the tip portion 12A of the tapered portion 12 is smaller than the outer diameter (thread diameter) of the threaded portion 4 of the bolt 1.

FIG. 5 is a front view of the combination 20 of the bolt 1 and the bolt holding member 10, and the bolt holding member 10 shows a cross section.

As shown in FIG. 5, in the combination body 20, the shank 3 of the bolt 1 is inserted into the bolt holding member 10. In this state, the tip portion 12A of the tapered portion 12 has an enlarged diameter and is in contact with the shank 3 of the bolt 1 with elastic force. As a result, the bolt 1 and the bolt holding member 10 are integrated.

Next, a method of mounting the on-off valve 150A to the joint blocks 140 and 140 by the combination body 20 will be described. The on-off valve 150A corresponds to the first member to be fastened, and the joint blocks 140 and 140 correspond to the second member to be fastened.

6A and 6B are explanatory views of how to attach the on-off valve 150A to the joint blocks 140 and 140 by the combination 20. FIG. 6A shows the combination 20 in the through hole 154 of the body 153 of the on-off valve 150A. It is a figure which shows the inserted state, and FIG. 6B is a figure which shows the state which the on-off valve 150A is attached to the joint blocks 140, 140 by the combination body 20.

As shown in FIG. 5 in advance, the shank 3 of the bolt 1 is inserted into the bolt holding member 10, and the tip portion 12A of the tapered portion 12 is brought into contact with the shank 3 of the bolt 1 with elastic force. As shown in FIG. 6A, the combination 20 is inserted into the through hole 154 of the body 153, and the portion of the straight portion 11 of the bolt holding member 10 on the tapered portion 12 side has an elastic force on the inner surface defining the through hole 154. The bolt holding member 10 is abutted and temporarily fixed to the body 153. The portion of the straight portion 11 on the tapered portion 12 side functions as a temporary fixing portion. In the bolt holding member 10, the tip portion 12A of the tapered portion 12 is expanded in diameter by the shank 3, and the straight portion 11 is reduced in diameter by the inner surface defining the through hole 154. Therefore, the portion of the slit 10a corresponding to the tip portion 12A of the tapered portion 12 is widened, and the portion of the slit 10a corresponding to the straight portion 11 is narrowed.

As shown in FIG. 6B, the body 153 of the on-off valve 150A to which the combination 20 is temporarily fixed is brought into contact with the joint blocks 140 and 140, each bolt 1 is rotated, and the threaded portion 4 of each bolt 1 is respectively. It is screwed into the screw hole 144. In this way, the on-off valve 150A is attached to the joint blocks 140 and 140 by the combination body 20.

As described above, the bolt holding member 10 of the present embodiment has a cylindrical shape made of a thin metal plate, and holds the bolt 1 in the on-off valve 150A having the through hole 154. The bolt holding member 10 has a slit 10a extending from one end to the other, and elastically abuts against the tapered portion 12 tapering toward the end and the inner surface defining the through hole 154 to bolt the bolt. A straight portion 11 capable of temporarily fixing the holding member 10 to the on-off valve 150A is provided, and the tip portion 12A of the tapered portion 12 can be brought into contact with the shank 3 of the bolt 1 with elastic force.

As a result, the bolt 1 can be temporarily fixed to the body 153 of the on-off valve 150A which is a member to be fastened, and the workability at the time of assembling the assembly 50 can be improved. Further, since the bolt holding member 10 is made of metal, it can be applied to a fluid control device used at a high temperature. Further, the bolt holding member 10 allows the bolt 1 to be held by the body 153 without requiring a large space for holding the bolt 1.

The bolt holding member 10 has a straight portion 11 connected to the tapered portion 12 and extends along the axial direction, and the portion of the straight portion 11 on the tapered portion 12 side functions as a temporary fixing portion. In this way, since the straight portion 11 functions as a temporary fixing portion, the bolt 1 and the bolt holding member 10 can be stably temporarily fixed to the body 153.

The present disclosure is not limited to the above-mentioned examples. A person skilled in the art can make various additions and changes within the scope of the present disclosure.

FIG. 7A is a perspective view of the combination 20A of the bolt 1 and the bolt holding member 10B according to the modified example.
FIG. 7B is a perspective view of the bolt holding member 10B according to the modified example.
FIG. 7C is a front view of the combination 20A of the bolt 1 and the bolt holding member 10B according to the modified example, and the bolt holding member 10 shows a cross section.

As shown in FIGS. 7A to 7C, in the bolt holding member 10B, the tapered portion 12 constitutes the entire bolt holding member 10B. That is, the entire area from one end of the bolt holding member 10B to the other end is composed of the tapered portion 12.

The inner diameter of the tip portion 12A of the tapered portion 12 is smaller than the outer diameter of the shank 3 of the bolt 1. The inner diameter of the base end portion 12B of the tapered portion 12 is larger than the outer diameter (thread diameter) of the threaded portion 4 of the bolt 1, and the outer diameter of the base end portion 12B of the tapered portion 12 is larger than the inner diameter of the through hole 154. It is configured small.

As shown in FIG. 7C, in the combination 20A, the shank 3 of the bolt 1 is inserted into the bolt holding member 10B. The tip portion 12A is located on the head 2 side of the bolt 1 with respect to the base end portion 12B. In this state, the tip portion 12A of the tapered portion 12 has an enlarged diameter and is in contact with the shank 3 of the bolt 1 with elastic force. As a result, the bolt 1 and the bolt holding member 10B are integrated.

Next, a method of mounting the on-off valve 150A to the joint blocks 140 and 140 by the combination body 20A will be described. The on-off valve 150A corresponds to the first member to be fastened, and the joint blocks 140 and 140 correspond to the second member to be fastened.

8A and 8B are explanatory views of how to attach the on-off valve 150A to the joint blocks 140 and 140 by the combination 20A, and FIG. 8A shows the combination 20A in the through hole 154 of the body 153 of the on-off valve 150A. It is a figure which shows the inserted state, and FIG. 8B is a figure which shows the state which the on-off valve 150A is attached to the joint blocks 140, 140 by the combination body 20A.

As shown in FIG. 7C in advance, the shank 3 of the bolt 1 is inserted into the bolt holding member 10B, and the tip portion 12A of the tapered portion 12 is brought into contact with the shank 3 of the bolt 1 with elastic force. As shown in FIG. 8A, the combination 20A is inserted into the through hole 154 of the body 153, and the base end portion 12B of the tapered portion 12 of the bolt holding member 10B is brought into contact with the inner surface defining the through hole 154 with elastic force. , The bolt holding member 10B is temporarily fixed to the body 153. The base end portion 12B of the tapered portion 12 functions as a temporary fixing portion. In the bolt holding member 10B, the tip portion 12A of the tapered portion 12 is expanded in diameter by the shank 3, and the base end portion 12B of the tapered portion 12 is reduced in diameter by the inner surface defining the through hole 154. Therefore, the portion of the slit 10a corresponding to the tip end portion 12A of the tapered portion 12 is widened, and the portion of the slit 10a corresponding to the base end portion 12B of the tapered portion 12 is narrowed.

As shown in FIG. 8B, the body 153 of the on-off valve 150A to which the combination 20A is temporarily fixed is brought into contact with the joint blocks 140 and 140, each bolt 1 is rotated, and the threaded portion 4 of each bolt 1 is respectively. It is screwed into the screw hole 144. In this way, the on-off valve 150A is attached to the joint blocks 140 and 140 by the combination body 20A.

The combination 20A including the bolt holding member 10B and the bolt 1 and the bolt holding member 10B according to the present modification also includes the bolt holding member 10 of the above embodiment and the bolt 1 and the bolt holding member 10. It can produce almost the same effect as.

In the above embodiment, the portion of the straight portion 11 of the bolt holding member 10 on the tapered portion 12 side is made to function as a temporary fixing portion, but the portion of the tapered portion 12 whose outer diameter is larger than the inner diameter of the through hole 154 is temporarily fixed. It may function as a part.

1: Bolt 2: Head 3: Shank 10, 10A: Bolt holding member 10a: Slit 11: Straight part 12: Tapered part 12A: Tip part 12B: Base end part 20, 20A: Combination 140: Joint block 144: Screw hole 150A: On-off valve 153: Body 154: Through hole

Claims (6)

A bolt holding member that has a cylindrical shape made of a thin metal plate and holds a bolt in a member to be fastened having a through hole.
It has a slit that extends from one end to the other,
A tapered part that tapers toward the end,
The bolt holding member is provided with a temporary fixing portion capable of temporarily fixing the bolt holding member to the fastened member by abutting with an elastic force on the inner surface defining the through hole of the fastened member.
The tip of the tapered portion is a bolt holding member that can be brought into contact with the shank of the bolt with elastic force. It has a straight portion that is connected to the tapered portion and extends along the axial direction.
Claim 1 that the portion of the straight portion on the tapered portion side functions as the temporary fixing portion.
The bolt holding member described in. The bolt holding member according to claim 1, wherein the tapered portion constitutes the entire bolt holding member. A combination of bolts and bolt holding members
The bolt is
A bolt having a shank and a head provided at one end of the shank.
The bolt holding member, which has a cylindrical shape made of a thin metal plate and into which the shank is inserted and holds the bolt in a member to be fastened having a through hole, is a bolt holding member.
It has a slit that extends from one end to the other,
A tapered part that tapers toward the end,
The bolt holding member is provided with a temporary fixing portion capable of temporarily fixing the bolt holding member to the fastened member by abutting with an elastic force on the inner surface defining the through hole of the fastened member.
The tip of the tapered portion is a combination of a bolt and a bolt holding member that abuts the shank of the bolt with elastic force to hold the bolt. It has a straight portion that is located on the head side with respect to the tapered portion, is connected to the tapered portion, and extends along the axial direction.
4. The portion of the straight portion on the tapered portion side functions as the temporary fixing portion.
A combination of bolts and bolt holding members according to. It is a mounting method in which a first fastened member having a through hole is connected to a second fastened member by a combination of a bolt and a bolt holding member.
The bolt is
A bolt having a shank and a head provided at one end of the shank.
The bolt holding member, which is a cylinder made of a thin metal plate, is
It has a slit that extends from one end to the other,
A tapered part that tapers toward the end,
With a temporary fixing part,
The mounting method is
The shank of the bolt is inserted into the bolt holding member, and the tip of the tapered portion is brought into contact with the shank of the bolt with elastic force.
The bolt and the bolt holding member are inserted into the through hole of the first to be fastened member, and the temporary fixing portion is elastically brought into contact with the inner surface defining the through hole to cause the bolt and the bolt holding member. Is temporarily fixed to the first member to be fastened.
The bolt and the first to be fastened member to which the bolt holding member is temporarily fastened are brought into contact with the second to be fastened member, and the bolt is rotated to be screwed into the screw hole of the second to be fastened member. A method of mounting the first fastened member to the second fastened member.

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