JP2021179379A - Shape measurement device and control method therefor - Google Patents

Abstract

To provide a shape measurement device capable of storing measurement environment information for discriminating the cause of an abnormality occurrence of shape measurement at low cost during measuring the shape of a measurement object, and its control method.SOLUTION: A shape measurement device 10 for performing shape measurement of a measurement object by using a contact piece 34 brought into contact with the measurement object W includes a measurement environment information acquisition part 38 for repeatedly performing the acquisition of measurement environment information showing a measurement environment of shape measurement and temporary storage of the measurement environment information in a primary storage part while the shape measurement is performed, an abnormality determination part for determining the existence/nonexistence of abnormality of the shape measurement while the shape measurement is performed, and a first storage control part for storing the measurement environment information stored in the primary storage part in a secondary storage part each time the abnormality determination part determines that there is abnormality.SELECTED DRAWING: Figure 1

Description

The present invention relates to a shape measuring machine that measures the shape of an object to be measured using a contactor and a control method thereof.

A surface shape measuring machine (shape measuring machine) for measuring a surface shape such as a contour shape and surface roughness of the surface of a work (object to be measured) is known. In such a surface shape measuring machine, the contact and the work are relatively moved in the horizontal direction while the contact is in contact with the surface of the work, and the contact is swung while tracing the surface of the work with the contact. Displacement is detected by a displacement detector, and the surface shape of the work surface is measured based on the displacement detection signal output from the displacement detector (see Patent Document 1).

JP-A-2017-161548

By the way, when the surface shape of a work is measured by using a surface shape measuring machine, an abnormal waveform may be generated in the waveform of the displacement detection signal output from the displacement detector. When such an abnormal waveform occurs, is this abnormal waveform caused by the actual shape of the work surface, or due to external environmental factors (dust, vibration, environmental temperature change, etc. attached to the work surface)? It is difficult to determine whether to do so.

Therefore, for example, sensors (cameras, vibration meters, thermometers, etc.) that measure the measurement environment for surface shape measurement are provided in the surface shape measuring machine, and the measurement environment is measured in parallel with the measurement of the work surface shape by the surface shape measuring machine. It is conceivable to continuously acquire the measurement environment information indicating. However, in this case, since the amount of data of the measurement environment information becomes enormous, it becomes necessary to prepare a large-capacity storage for storing the measurement environment information, which causes a problem that the cost increases. In particular, when the measurement environment information includes an image taken by a camera, it is not realistic to store (save) all the measurement environment information from the viewpoint of cost.

The present invention has been made in view of such circumstances, and is a shape measuring machine that can store measurement environment information for determining the cause of an abnormality in shape measurement at low cost when measuring the shape of an object to be measured. The purpose is to provide the control method.

The shape measuring machine for achieving the object of the present invention is a shape measuring machine that measures the shape of an object to be measured by using a contactor that comes into contact with the object to be measured. The measurement environment information acquisition unit that repeatedly acquires the measurement environment information indicating the measurement environment and temporarily stores the measurement environment information in the primary storage unit, and the shape measurement abnormality during the shape measurement. It includes an abnormality determination unit for determining the presence / absence, and a first storage control unit for storing measurement environment information stored in the primary storage unit in the secondary storage unit each time the abnormality determination unit determines that there is an abnormality.

According to this shape measuring machine, the measurement environment information can be stored in the secondary storage unit only when an abnormality occurs in the shape measurement, so it is necessary to store all the measurement environment information during the shape measurement. It disappears.

In the shape measuring machine according to another aspect of the present invention, the measurement environment information acquisition unit stores the measurement environment information in the primary storage unit in a ring buffer format. As a result, the latest measurement environment information for a certain period of time can be temporarily stored in the primary storage unit at the time of shape measurement.

In the shape measuring machine according to another aspect of the present invention, the measurement environment information acquisition unit has at least one of a photographed image of the contactor, an environmental temperature, and vibration information of the shape measuring machine as the measurement environment information. To get. This makes it possible to confirm the cause of the abnormality in the shape measurement.

In the shape measuring machine according to another aspect of the present invention, the displacement detector for detecting the displacement of the contact and the displacement detector are relatively moved with respect to the object to be measured so that the surface to be measured of the object to be measured is moved by the contact. The relative movement mechanism to be traced, the position detection sensor that detects the relative position of the displacement detector with respect to the object to be measured, and the detection result of the position detection sensor and the detection of the displacement detector while the relative movement is performed by the relative movement mechanism. Based on the result, a signal output unit that outputs a displacement detection signal indicating the displacement of the contactor for each relative position is provided, and the abnormality determination unit measures the shape based on the displacement detection signal output from the signal output unit. Determine if there is an abnormality. As a result, the measurement environment information can be stored in the secondary storage unit only when an abnormality occurs in the shape measurement.

The shape measuring machine according to another aspect of the present invention includes a low-pass filter that performs low-pass filter processing on the displacement detection signal output from the signal output unit, and the abnormality determination unit is not subjected to low-pass filter processing. Based on the detection signal, it is determined whether or not there is an abnormality in the shape measurement. As a result, the false shape caused by an external environmental factor can be excluded from the measurement result of the shape measurement with higher accuracy, so that the reliability and accuracy of the measurement result can be further improved.

In the shape measuring machine according to another aspect of the present invention, the relative position of the displacement detector corresponding to the abnormal waveform region determined by the abnormality determination unit in the signal waveform of the displacement detection signal by the first storage control unit. The detector position information indicating the above and the measurement environment information corresponding to the abnormal waveform region are associated and stored in the secondary storage unit. This makes it possible to easily confirm (search) the cause of the occurrence of the abnormal waveform region.

In the shape measuring machine according to another aspect of the present invention, the relative movement mechanism is driven based on the detector position information stored in the secondary storage unit to obtain the measurement area of the measured surface corresponding to the abnormal waveform area. It is provided with a remeasurement control unit that executes remeasurement traced by a contactor. By performing the remeasurement only in the measurement area, the additional time required for the remeasurement of the surface to be measured can be minimized.

In the shape measuring machine according to another aspect of the present invention, the remeasurement control unit operates the measurement environment information acquisition unit, the abnormality determination unit, and the first storage control unit during the remeasurement. As a result, if an abnormality occurs in the shape measurement even in the remeasurement of the measurement area, the cause of the abnormality can be identified by checking the measurement environment information.

In the shape measuring machine according to another aspect of the present invention, the displacement detection signal output from the signal output unit is acquired and stored in the secondary storage unit while the relative movement is performed by the relative movement mechanism in the initial shape measurement. It is equipped with a second storage control unit to be stored, and an abnormal waveform in the signal waveform of the displacement detection signal stored in the secondary storage unit based on the re-detection signal which is the displacement detection signal output from the signal output unit in the remeasurement. A replacement control unit that replaces the region with the waveform of the rediscovery signal is provided. As a result, more accurate surface shape measurement results can be obtained.

In the shape measuring machine according to another aspect of the present invention, the abnormality determination unit determines whether or not there is an abnormality in the shape measurement based on the measurement environment information repeatedly acquired by the measurement environment information acquisition unit. As a result, the measurement environment information can be stored in the secondary storage unit only when an abnormality occurs in the shape measurement.

In the shape measuring machine according to another aspect of the present invention, each time the abnormality determination unit determines that an abnormality exists, the first storage control unit stores it in the primary storage unit after a predetermined delay time elapses. The measured measurement environment information is output to the secondary storage unit. This makes it easy to determine the cause of the abnormality in the shape measurement.

The shape measuring machine according to another aspect of the present invention includes a notification unit that notifies measurement environment information or warning information stored in the primary storage unit when the abnormality determination unit determines that there is an abnormality. This makes it possible to notify the operator of the occurrence of an abnormality in shape measurement.

The control method of the shape measuring machine for achieving the object of the present invention is the control method of the shape measuring machine that measures the shape of the object to be measured by using a contactor that comes into contact with the object to be measured. During the measurement environment information acquisition step of repeatedly acquiring the measurement environment information indicating the measurement environment of the shape measurement and temporarily storing the measurement environment information in the primary storage unit, and while the shape measurement is being performed. , A storage that stores the measurement environment information stored in the primary storage unit in the secondary storage unit each time the abnormality determination step for determining the presence or absence of an abnormality in the shape measurement and the abnormality determination step for determining the presence or absence of an abnormality in the shape measurement. It has a control step and.

INDUSTRIAL APPLICABILITY The present invention can store measurement environment information for determining the cause of an abnormality in shape measurement at low cost when measuring the shape of an object to be measured.

It is a schematic diagram of the surface shape measuring machine of 1st Embodiment. It is a block diagram which showed the structure of the control device of 1st Embodiment. It is explanatory drawing for demonstrating 1st example of the determination method by an abnormality determination part. It is explanatory drawing for demonstrating the 2nd example of the determination method by an abnormality determination part. It is explanatory drawing for demonstrating the 3rd example of the determination method by an abnormality determination part. It is explanatory drawing of the ring buffer memory. Note It is a schematic diagram of the stored data stored in the data storage. It is a flowchart which shows the flow of the shape measurement process of the surface of a work by a surface shape measuring machine. It is a block diagram which showed the structure of the control device of the surface shape measuring machine of 2nd Embodiment. It is explanatory drawing for demonstrating the determination method of the abnormality determination part of 2nd Embodiment. It is a block diagram which showed the structure of the control device of 3rd Embodiment. It is explanatory drawing for demonstrating the function of a delay part. It is a schematic diagram of the surface shape measuring machine of 4th Embodiment. It is explanatory drawing for demonstrating an example of the display of the notification screen by a monitor. It is explanatory drawing for demonstrating an example of display of warning information by a monitor. It is a schematic diagram of the surface shape measuring machine of 5th Embodiment. It is explanatory drawing for demonstrating the remeasurement of the shape of the measurement area of a surface. It is a schematic diagram of the surface shape measuring machine of 6th Embodiment. It is explanatory drawing for demonstrating the determination method of the abnormality determination part of 6th Embodiment.

[First Embodiment]
FIG. 1 is a schematic view of the surface shape measuring machine 10 of the first embodiment corresponding to the shape measuring machine of the present invention. As shown in FIG. 1, the surface shape measuring machine 10 measures the shape of the surface Wa of the work W, specifically, the contour shape or the surface roughness. Here, the work W corresponds to the object to be measured of the present invention, and the surface Wa corresponds to the surface to be measured of the present invention. Further, the XYZ directions in the figure are orthogonal to each other, and in the present embodiment, the XY plane including the XY direction is a plane parallel to the horizontal direction, and the Z direction is a vertical direction perpendicular to the horizontal direction.

The surface shape measuring machine 10 includes a flat plate-shaped measuring table 12, a column 14, a detector moving mechanism 16, a position detection sensor 18, a displacement detector 20, a camera 22, a thermometer 24, and a vibration meter 26. And a control device 28.

The work W is set on the upper surface of the measuring table 12 parallel to the XY plane. Further, a column 14 extending in the Z direction is provided on the upper surface of the measuring table 12. A detector moving mechanism 16 is attached to the column 14 so as to be movable in the Z direction.

The detector moving mechanism 16 corresponds to the relative moving mechanism of the present invention, and is a known actuator that holds the holder 17 so as to be movable in the X direction. By driving the detector moving mechanism 16, the displacement detector 20 (contactor 34) can be relatively moved in the X direction with respect to the work W. Further, the detector moving mechanism 16 is provided with a position detection sensor 18.

The position detection sensor 18 has, for example, a linear scale 18a extending in the X direction (left-right direction) and a reading head 18b that reads the linear scale 18a by various methods such as optical or magnetic. The position detection sensor 18 detects the displacement (displacement direction and displacement amount) of the holder 17 moved in the X direction by the detector moving mechanism 16 in the X direction, thereby detecting the position of the displacement detector 20 in the X direction, which will be described later. That is, the relative position of the displacement detector 20 with respect to the work W in the X direction is detected. Then, the position detection result D1 of the displacement detector 20 by the position detection sensor 18 is output from the position detection sensor 18 to the control device 28. As the position detection sensor 18, a known detector other than the scale type detector may be used.

The holder 17 is provided with a displacement detector 20 and a camera 22. As a result, the displacement detector 20 is movably held in the X direction by the detector moving mechanism 16 via the holder 17. Further, the displacement detector 20 is held by the column 14 so as to be adjustable in position in the Z direction via the holder 17 and the detector moving mechanism 16.

The displacement detector 20 includes a swing fulcrum 30, an arm 32, a contactor 34, and a displacement detection sensor 36.

The swing fulcrum 30 swingably supports the arm 32 about a rotation shaft (swing shaft) parallel to the Y direction.

The arm 32 is swingably supported by the swing fulcrum 30, and extends in one direction side in the X direction (the side opposite to the column 14) and the arm tip portion 32a extending in the other direction side in the X direction. The arm base end portion 32b is provided.

A contactor 34 (also referred to as a stylus or a stylus) is provided on the tip end side of the arm tip portion 32a. The contactor 34 comes into contact with the surface Wa. The contactor 34 is displaced in the Z direction by the arm 32 swinging around the swing fulcrum 30. Further, the contactor 34 traces (scans) the surface Wa along the X direction by moving the displacement detector 20 in the X direction by the detector moving mechanism 16.

The arm base end portion 32b is urged upward in the Z direction by an urging member (not shown). As a result, the arm tip portion 32a and the contactor 34 are urged downward in the Z direction with the swing fulcrum 30 as the center. As a result, the state in which the contactor 34 is in contact with the surface Wa is maintained.

As the displacement detection sensor 36, for example, a linear variable differential transformer (LVDT) is used. In this case, although not shown, the displacement detection sensor 36 includes a core provided at the base end portion 32b of the arm and a coil into which the core is inserted. The displacement detection sensor 36 detects the displacement (displacement direction and displacement amount) in the Z direction due to the swing of the arm 32 and the contactor 34, and outputs the displacement detection result D2 to the control device 28. As the displacement detection sensor 36, a known sensor other than the LVDT (for example, a scale type sensor) may be used.

The camera 22, the thermometer 24, and the vibration meter 26 constitute a measurement environment information acquisition unit of the present invention together with each unit (image acquisition unit 48, temperature information acquisition unit 50, and vibration information acquisition unit 52) of the control device 28 described later. The measurement environment information 38 indicating the measurement environment when the surface shape measuring machine 10 measures the shape of the surface Wa is acquired.

The camera 22 is provided in the holder 17, continuously shoots the tip of the contact 34 (moving image shooting), and sequentially outputs the captured image 38A (image data) of the contact 34 as the measurement environment information 38 to the control device 28. do. Based on the captured image 38A, it is possible to confirm the presence or absence of foreign matter such as dust on the surface Wa and to confirm the actual shape of the surface Wa.

The thermometer 24 is installed, for example, on the upper surface of the measuring table 12, continuously measures the ambient temperature (ambient ambient temperature of the contact 34, etc.), and transfers the temperature information 38B of the ambient temperature to the control device 28 as the measurement environment information 38. Output sequentially. Based on the temperature information 38B, it is possible to confirm whether or not a sudden change has occurred in the environmental temperature. The position of the thermometer 24 is not limited to the upper surface of the measuring table 12, and may be provided on the displacement detector 20 or the like.

The vibration meter 26 is provided, for example, inside the measuring table 12, and continuously measures the vibration of the surface shape measuring machine 10 (specifically, the relative vibration of the contactor 34 with respect to the work W) to measure the measurement environment information. As 38, the vibration information 38C of the surface shape measuring machine 10 is sequentially output to the control device 28. Based on the vibration information 38C, it can be confirmed, for example, whether or not vibration is applied to the surface shape measuring machine 10 from the outside. The position of the vibration meter 26 is not limited to the inside of the measuring table 12, and may be provided on the upper surface of the measuring table 12 or the displacement detector 20 or the like.

The control device 28 includes an arithmetic circuit composed of various processors, memories, and the like. Various processors include CPU (Central Processing Unit), GPU (Graphics Processing Unit), ASIC (Application Specific Integrated Circuit), and programmable logic devices [for example, SPLD (Simple Programmable Logic Devices), CPLD (Complex Programmable Logic Device), And FPGA (Field Programmable Gate Arrays)] and the like. The various functions of the control device 28 may be realized by one processor, or may be realized by a plurality of processors of the same type or different types.

FIG. 2 is a block diagram showing the configuration of the control device 28 of the first embodiment. As shown in FIG. 2, the control device 28 includes the detector moving mechanism 16, the position detection sensor 18, the displacement detection sensor 36 of the displacement detector 20, the camera 22, the thermometer 24, the vibration meter 26, and the non-existence. The illustrated operation unit and the like are connected to control the operation of each unit of the surface shape measuring machine 10. Further, the control device 28 is obtained by tracing the surface Wa with the contactor 34 based on the position detection result D1 output from the position detection sensor 18 and the displacement detection result D2 output from the displacement detection sensor 36. The displacement detection signal D3 is stored in the data storage 58. Further, although the details will be described later, the control device 28 determines whether or not there is an abnormality in the shape measurement of the surface Wa, and stores the measurement environment information 38 in the data storage 58 when the abnormality occurs.

The control device 28 includes a drive control unit 40, a signal output unit 42, a low pass filter 44 (LPF), an abnormality determination unit 46, an image acquisition unit 48, a temperature information acquisition unit 50, a vibration information acquisition unit 52, and a ring. A buffer memory 54A, 54B, 54C, a storage control unit 56, and a data storage 58 are provided.

The drive control unit 40 controls the drive of the detector moving mechanism 16. The drive control unit 40 drives the detector moving mechanism 16 to move the displacement detector 20 and the like in the X direction in response to an input of a measurement start operation to an operation unit (not shown). As a result, the contactor 34 traces the surface Wa along the X direction, that is, the shape measurement of the surface Wa is executed.

The signal output unit 42 is used while the displacement detector 20 is being moved in the X direction by the detector moving mechanism 16, that is, while the surface shape measuring machine 10 is performing shape measurement of the surface Wa (hereinafter, simply). (Abbreviated as "during surface shape measurement"), the position detection result D1 output from the position detection sensor 18 and the displacement detection result D2 output from the displacement detection sensor 36 are continuously acquired. Then, the signal output unit 42 determines the displacement of the contactor 34 in the Z direction for each position of the displacement detector 20 (contactor 34) in the X direction based on the continuously acquired position detection result D1 and displacement detection result D2. That is, the displacement detection signal D3 indicating the surface shape of the surface Wa is continuously output to the low-pass filter 44.

The low-pass filter 44 performs low-pass filter processing on the displacement detection signal D3 output from the signal output unit 42 based on a preset cutoff value, and removes high-frequency noise from the displacement detection signal D3. The displacement detection signal D3 output from the low-pass filter 44 is input to the abnormality determination unit 46 and the storage control unit 56.

The abnormality determination unit 46 determines whether or not there is an abnormality in the shape measurement of the surface Wa based on the displacement detection signal D3 input from the signal output unit 42 via the low-pass filter 44 during the surface shape measurement.

FIG. 3 is an explanatory diagram for explaining a first example of the determination method by the abnormality determination unit 46. As shown in FIG. 3, in the abnormality determination unit 46, the displacement amount of the contactor 34 in the Z direction becomes larger than the predetermined abnormality determination threshold value ET or within the normal range NR (abnormality) based on the displacement detection signal D3. It is determined whether or not there is an abnormality in the shape measurement of the surface Wa based on whether or not it falls within the determination threshold ET). Then, the abnormality determination unit 46 outputs a storage trigger signal TS indicating the determination result to the storage control unit 56 when it is determined that there is an abnormality in the shape measurement.

FIG. 4 is an explanatory diagram for explaining a second example of the determination method by the abnormality determination unit 46. As shown in FIG. 4, the abnormality determination unit 46 has an abnormality in shape measurement when the displacement amount in the Z direction of the contactor 34 exceeds the abnormality determination threshold value ET continuously for a predetermined period or longer based on the displacement detection signal D3. It is determined to be present, and the storage trigger signal TS is output to the storage control unit 56. As a result, it is possible to prevent erroneous determination as having an abnormality due to the noise of the displacement detection signal D3.

FIG. 5 is an explanatory diagram for explaining a third example of the determination method by the abnormality determination unit 46. As shown in FIG. 5, the abnormality determination unit 46 calculates the moving average line MA of the displacement amount in the Z direction of the contactor 34 based on the displacement detection signal D3. Then, the abnormality determination unit 46 has an abnormality in the shape measurement when the deviation amount of the displacement from the moving average line MA returns from the state where the deviation exceeds the abnormality determination threshold value ET to the original state (the state within the abnormality determination threshold value ET). Is determined, and the storage trigger signal TS is output to the storage control unit 56. As a result, it is possible to distinguish between the drift of the displacement detection signal D3 and the change due to the abnormality in the shape measurement, and it is possible to improve the determination accuracy of the abnormality determination unit 46.

Returning to FIG. 2, the image acquisition unit 48 repeatedly acquires the captured image 38A from the camera 22 and temporarily stores the captured image 38A in the ring buffer memory 54A during the surface shape measurement.

The temperature information acquisition unit 50 repeatedly acquires the temperature information 38B from the thermometer 24 and temporarily stores the temperature information 38B in the ring buffer memory 54B during the surface shape measurement.

The vibration information acquisition unit 52 repeatedly acquires the vibration information 38C from the vibration meter 26 and temporarily stores the vibration information 38C in the ring buffer memory 54C during the surface shape measurement.

FIG. 6 is an explanatory diagram of the ring buffer memories 54A, 54B, 54C. As shown in FIG. 6 and FIG. 2 described above, the ring buffer memories 54A, 54B, 54C correspond to the primary storage unit of the present invention, and are storage media capable of storing data in a so-called ring buffer format (a storage medium capable of storing data in a so-called ring buffer format). Memory, storage, etc.).

The ring buffer memories 54A, 54B, 54C have, for example, eight (other than eight) storage areas 55 (ring buffer length). As shown by the numbers (1) to (8) in parentheses in the figure, the image acquisition unit 48 takes the newly acquired captured image 38A as the first image each time a new captured image 38A is acquired from the camera 22. The storage area 55 is stored in order from the storage area 55 to the eighth storage area 55. Then, the image acquisition unit 48 stores the captured image 38A in the eighth storage area 55, and then each time a new captured image 38A is acquired from the camera 22, the newly acquired captured image 38A is shown in the figure. As shown in the numbers (9) to (12) in parentheses, ..., Each storage area 55 is overwritten and stored in order. Hereinafter, each time the image acquisition unit 48 acquires a new captured image 38A from the camera 22, the new captured image 38A is sequentially and repeatedly overwritten and stored in each storage area 55.

Similarly, each time the temperature information acquisition unit 50 acquires new temperature information 38B from the thermometer 24, the temperature information acquisition unit 50 sequentially and repeatedly stores (overwrites) the new temperature information 38B in each storage area 55 of the ring buffer memory 54B. Let me. Further, each time the vibration information acquisition unit 52 acquires new vibration information 38C from the vibration meter 26, the vibration information acquisition unit 52 sequentially and repeatedly stores (overwrites) the new vibration information 38C in each storage area 55 of the ring buffer memory 54C.

By using the ring buffer memories 54A, 54B, 54C in this way, it is possible to always save the latest measurement environment information 38 (photographed image 38A, temperature information 38B, vibration information 38C) at the time of measuring the shape of the surface Wa. can.

FIG. 7 is a schematic diagram of the stored data 60 stored in the data storage 58 by the storage control unit 56. As shown in FIG. 7 and FIG. 2 described above, the data storage 58 corresponds to the secondary storage unit of the present invention, and is a storage medium (memory, storage, etc.) capable of permanently storing data. ..

The storage control unit 56 stores the stored data 60 in the data storage 58 during the surface shape measurement. The stored data 60 includes a displacement detection signal D3 input from the low-pass filter 44, measurement environment information 38 stored in the ring buffer memories 54A, 54B, 54C, and an abnormal waveform region tag list 62 described later. ..

Specifically, the storage control unit 56 continuously stores the displacement detection signal D3 continuously input from the low-pass filter 44 in the data storage 58 as a part of the stored data 60 during the surface shape measurement. In this case, the memory control unit 56 functions as the second memory control unit of the present invention.

Further, each time the storage trigger signal TS is input from the abnormality determination unit 46 (every time it is determined that there is an abnormality in the shape measurement of the surface Wa), the storage control unit 56 has an abnormality waveform corresponding to the detector position information of the present invention. Generate the area tag 62a.

Specifically, the memory control unit 56 determines the abnormality waveform region ER that the abnormality determination unit 46 has determined as having an abnormality in the signal waveform of the displacement detection signal D3 based on the storage trigger signal TS input from the abnormality determination unit 46. Determine. Next, the storage control unit 56 determines the position of the displacement detector 20 corresponding to the abnormal waveform area ER in the X direction (hereinafter, abbreviated as the detector position) based on the determination result of the abnormal waveform area ER. Further, the storage control unit 56 determines the abnormal content (waveform shape) of the abnormal waveform area ER based on the shape of the waveform of the abnormal waveform area ER. As a result, the storage control unit 56 generates the abnormal waveform area tag 62a including the “detector position” and the “abnormal content” for each abnormal waveform area ER. Then, each time the storage control unit 56 generates the abnormal waveform area tag 62a, the storage control unit 56 stores the abnormal waveform area tag 62a in the abnormal waveform area tag list 62 of the data storage 58 as a part of the stored data 60.

Further, the storage control unit 56 obtains measurement environment information 38 (photographed image 38A, temperature information 38B, vibration information 38C) from the ring buffer memories 54A, 54B, 54C each time the storage trigger signal TS is input from the abnormality determination unit 46. get. Then, the storage control unit 56 associates the measurement environment information 38 with the abnormal waveform region tag 62a as a part of the stored data 60 and stores it in the data storage 58. In this case, the memory control unit 56 functions as the first memory control unit of the present invention.

In the present embodiment, the "abnormal content" is registered in the abnormal waveform region tag 62a in addition to the "detector position", but the content is particularly limited as long as the "detector position" is registered at least. Will not be done. Further, the format of the stored data 60 is not limited to the format shown in FIG. 7 as long as the “detector position” and the “measurement environment information 38” are stored in association with each other in addition to the displacement detection signal D3.

[Action of the first embodiment]
FIG. 8 is a flowchart showing a flow of shape measurement processing of the surface Wa of the work W by the surface shape measuring machine 10 according to the control method of the shape measuring machine of the present invention. As shown in FIG. 8, after the work W is set on the measuring table 12 and the tip of the contactor 34 is brought into contact with the surface Wa, when the operator performs the measurement start operation, the drive control unit 40 moves the detector moving mechanism 16. To move the displacement detector 20 in the X direction (step S1). As a result, the contactor 34 traces the surface Wa along the X direction.

When the movement of the displacement detector 20 starts, the signal output unit 42 filters the displacement detection signal D3 based on the position detection result D1 acquired from the position detection sensor 18 and the displacement detection result D2 acquired from the displacement detection sensor 36. It is continuously output to 44 (step S2). As a result, the displacement detection signal D3 is input to the storage control unit 56 and the abnormality determination unit 46, respectively, via the low-pass filter 44. Then, the storage control unit 56 sequentially stores the displacement detection signal D3 input from the low-pass filter 44 as the storage data 60 in the data storage 58 (step S3).

Further, in accordance with the start of movement of the displacement detector 20, the image acquisition unit 48 repeatedly acquires the captured image 38A from the camera 22 and stores the captured image 38A in the ring buffer memory 54A (steps S4 and S5). Further, the temperature information acquisition unit 50 repeatedly acquires the temperature information 38B from the thermometer 24 and stores the temperature information 38B in the ring buffer memory 54B, and the vibration information acquisition unit 52 repeatedly acquires the vibration information 38C from the vibration meter 26. And the storage of the vibration information 38C in the ring buffer memory 54C are repeated (steps S4 and S5). As a result, as shown in FIG. 6 described above, the measurement environment information 38 is sequentially and repeatedly stored in each storage area 55 of each ring buffer memory 54A, 54B, 54C. In addition, steps S4 and S5 correspond to the measurement environment information acquisition step of this invention.

Furthermore, when the displacement detector 20 starts moving, the abnormality determination unit 46 has an abnormality in shape measurement as shown in FIGS. 3 to 5 based on the displacement detection signal D3 input from the low-pass filter 44. (Step S6, corresponding to the abnormality determination step of the present invention). When the abnormality determination unit 46 determines that there is no abnormality, the processes from step S2 to step S5 described above are repeatedly executed until the movement of the displacement detector 20 is stopped (in step S6). NO, NO in step S8). At this time, by storing the measurement environment information 38 in the ring buffer memories 54A, 54B, 54C, it is not necessary to prepare a large-capacity storage.

On the other hand, when the abnormality determination unit 46 determines that there is an abnormality, the abnormality determination unit 46 outputs a storage trigger signal TS to the storage control unit 56 (YES in step S6). The storage control unit 56 that has received this storage trigger signal TS generates the abnormal waveform region tag 62a as shown in FIG. 7, and also measures the measurement environment information 38 (photographed image) from the ring buffer memories 54A, 54B, 54C. 38A, temperature information 38B, vibration information 38C) are acquired. Then, the storage control unit 56 associates the measurement environment information 38 with the abnormal waveform region tag 62a and stores it in the stored data 60 of the data storage 58 (step S7, corresponding to the storage control step of the present invention). As a result, the measurement environment information 38 can be stored in the data storage 58 only when an abnormality occurs in the shape measurement.

Hereinafter, the above-mentioned processes from step S2 to step S8 are repeatedly executed until the movement of the displacement detector 20 is completed, that is, until the shape measurement of the surface Wa by the surface shape measuring machine 10 is completed (step S8).

[Effect of the first embodiment]
As described above, in the present embodiment, the measurement environment information 38 is temporarily stored in the ring buffer memories 54A, 54B, 54C, and only the measurement environment information 38 corresponding to the abnormal waveform area ER is stored in the data storage 58. Therefore, it is not necessary to store all the measurement environment information 38 during the surface shape measurement. As a result, it is not necessary to prepare a large-capacity storage, so that the measurement environment information 38 can be stored at low cost. In particular, when the captured image 38A is included in the measurement environment information 38 as in the present embodiment, the amount of the measurement environment information 38 stored in the data storage 58 can be reduced.

Further, in the present embodiment, by storing the measurement environment information 38 corresponding to the abnormal waveform region ER in the data storage 58, whether the abnormal waveform region ER is caused by the actual shape of the surface Wa or an external environmental factor (work surface). It can be easily determined whether it is caused by dust, vibration, environmental temperature change, etc. adhering to the surface. As a result, the false shape caused by an external environmental factor can be excluded from the measurement result (displacement detection signal D3) of the surface shape of the surface Wa, so that the reliability of the measurement result can be improved. Further, since the cause of the occurrence of the abnormal waveform region ER such as scratches made in the machining process of the work W can be confirmed, feedback to the machining process becomes possible.

Further, in the present embodiment, the cause of the abnormal waveform region ER is easily confirmed (searched) by storing the measurement environment information 38 in the data storage 58 (stored data 60) in a state of being associated with the abnormal waveform region tag 62a. be able to.

Furthermore, in the present embodiment, the amount of data of the measurement environment information 38 temporarily stored in the ring buffer memories 54A, 54B, 54C is the number of storage areas 55 (ring buffer length) of the ring buffer memories 54A, 54B, 54C. Since it is restricted, even if information leakage occurs, it is possible to minimize information leakage.

[Second Embodiment]
FIG. 9 is a block diagram showing the configuration of the control device 28 of the surface shape measuring machine 10 of the second embodiment. FIG. 10 is an explanatory diagram for explaining a determination method by the abnormality determination unit 46 of the second embodiment. The surface shape measuring machine 10 of the second embodiment has basically the same configuration as that of the first embodiment except that the determination method by the abnormality determination unit 46 is different. Those having the same configuration are designated by the same reference numerals and the description thereof will be omitted.

The abnormality determination unit 46 of the first embodiment determines whether or not there is an abnormality in the shape measurement based on the displacement detection signal D3 after the low-pass filter processing, but in this case, it is caused by dust or the like adhering to the surface Wa. It is difficult to identify the abnormal waveform region ER from the waveform of the displacement detection signal D3 (see FIG. 10).

Therefore, as shown in FIGS. 9 and 10, the abnormality determination unit 46 of the second embodiment determines whether or not there is an abnormality in the shape measurement based on the displacement detection signal D3 that has not been low-pass filtered.

As described above, in the second embodiment, by determining the presence or absence of an abnormality in the shape measurement based on the displacement detection signal D3 that has not been low-pass filtered, the displacement detection of the abnormal waveform region ER that is difficult to detect by the low-pass filter processing. It can be identified from the waveform of the signal D3. As a result, the false shape caused by an external environmental factor can be excluded from the measurement result of the surface shape of the surface Wa with higher accuracy, so that the reliability and accuracy of the measurement result can be further improved.

In the second embodiment, the abnormality determination unit 46 determines whether or not there is an abnormality in the shape measurement based on the displacement detection signal D3 that has not been low-pass filtered. For example, the cutoff frequency of the low-pass filter 44 is increased. (The cutoff length may be shortened), that is, the low-pass filter 44 may be weakened. In this case as well, the same effect as that of the second embodiment can be obtained.

[Third Embodiment]
FIG. 11 is a block diagram showing the configuration of the control device 28 of the third embodiment. In each of the above embodiments, when the abnormality determination unit 46 determines the presence or absence of an abnormality in the shape measurement of the surface Wa by the method of the first example shown in FIG. 3, the displacement amount of the contactor 34 in the Z direction is determined. When the abnormality determination threshold ET is exceeded, the abnormality determination unit 46 outputs the storage trigger signal TS and the storage control unit 56 stores the measurement environment information 38 in the data storage 58. On the other hand, in the third embodiment, a delay occurs between the time when the displacement amount of the contact 34 in the Z direction exceeds the abnormality determination threshold value ET and the time when the measurement environment information 38 is stored in the data storage 58. Let me.

As shown in FIG. 11, the surface shape measuring machine 10 of the third embodiment has basically the same configuration as each of the above embodiments except that the control device 28 is provided with the delay portion 70. Those having the same function or configuration as each embodiment are designated by the same reference numerals and the description thereof will be omitted.

The abnormality determination unit 46 of the third embodiment determines the presence or absence of an abnormality in the shape measurement by the method of the first example shown in FIG. 3 described above, and the displacement amount of the contactor 34 in the Z direction sets the abnormality determination threshold value ET. When it exceeds, the save trigger signal TS is output to the delay unit 70.

FIG. 12 is an explanatory diagram for explaining the function of the delay unit 70. As shown in FIG. 12, a known delay circuit is used for the delay unit 70, and a constant delay time ΔT is generated for the storage trigger signal TS output from the abnormality determination unit 46 before the storage control unit 56 is reached. Output. As a result, the storage control unit 56 stores the abnormal waveform region tag 62a and the measurement environment information 38 in the data storage 58 after the delay time ΔT has elapsed each time the storage trigger signal TS is output from the abnormality determination unit 46. Store in 60.

By delaying the storage trigger signal TS input from the abnormality determination unit 46 to the storage control unit 56 in this way, it is possible to store the measurement environment information 38 or the like corresponding to a wider range of abnormality waveform region ER in the data storage 58. can. As a result, it becomes easy to determine the cause of the occurrence of the abnormal waveform region ER.

In the above embodiment, the delay unit 70 is provided between the abnormality determination unit 46 and the memory control unit 56, but the delay unit 70 may be provided in the abnormality determination unit 46 or in the memory control unit 56. Further, the function of the delay unit 70 may be realized by software.

[Fourth Embodiment]
FIG. 13 is a schematic view of the surface shape measuring machine 10 of the fourth embodiment. As shown in FIG. 13, the surface shape measuring machine 10 of the fourth embodiment notifies the operator of the abnormality when the abnormality determining unit 46 determines that the shape measurement has an abnormality. The surface shape measuring machine 10 of the fourth embodiment measures the surface shape of each of the above-described embodiments, except that the control device 28 is provided with the notification control unit 72 and the monitor 74 is connected to the control device 28. It has basically the same configuration as the machine 10. Therefore, those having the same function or configuration as each of the above embodiments are designated by the same reference numerals and the description thereof will be omitted.

The notification control unit 72 constitutes the notification unit of the present invention together with the monitor 74. Each time the abnormality determination unit 46 determines that there is an abnormality in the shape measurement, the notification control unit 72 receives measurement environment information 38 (photographed image 38A, temperature information 38B) from the ring buffer memories 54A, 54B, 54C via the storage control unit 56. , Vibration information 38C) is acquired, and the abnormal waveform region tag 62a is acquired from the storage control unit 56. Then, the notification control unit 72 generates a notification screen 76 based on the measurement environment information 38 and the abnormal waveform region tag 62a, and outputs the notification screen 76 to the monitor 74.

FIG. 14 is an explanatory diagram for explaining an example of the display of the notification screen 76 by the monitor 74. As shown in FIG. 14, the monitor 74 displays the notification screen 76 input from the notification control unit 72. The notification screen 76 includes a detector position, an abnormality content, and measurement environment information 38. This makes it possible to notify the operator of the occurrence of an abnormality in shape measurement. As a result, the operator can recognize the occurrence of the abnormality in real time and promptly confirm the cause of the abnormality. In the measurement environment information 38, the temperature information 38B and the vibration information 38C may be output by voice from a speaker (corresponding to a notification unit) (not shown).

FIG. 15 is an explanatory diagram for explaining an example of displaying the warning information 77 by the monitor 74. As shown in FIG. 15, the notification control unit 72 may display the warning information 77 indicating the abnormality of the shape measurement on the monitor 74 every time the abnormality determination unit 46 determines that the shape measurement is abnormal. In this case as well, the same effect as displaying the notification screen 76 on the monitor 74 can be obtained. Further, the warning information 77 may be output as voice from the speaker.

[Fifth Embodiment]
FIG. 16 is a schematic view of the surface shape measuring machine 10 of the fifth embodiment. As shown in FIG. 16, the surface shape measuring machine 10 of the fifth embodiment remeasures the shape of the measurement region 80 (see FIG. 17) on the surface Wa corresponding to the abnormal waveform region ER of the displacement detection signal D3. .. The surface shape measuring machine 10 of the fifth embodiment has basically the same configuration as the surface shape measuring machine 10 of each of the above embodiments, except that the control device 28 is provided with the remeasurement control unit 78. be. Therefore, those having the same function or configuration as each of the above embodiments are designated by the same reference numerals and the description thereof will be omitted.

FIG. 17 is an explanatory diagram for explaining the remeasurement of the shape of the measurement region 80 of the surface Wa. As shown by reference numeral XVIIA in FIG. 17, the remeasurement control unit 78 detects the displacement by referring to the abnormal waveform region tag list 62 and the like of the data at rest 60 in the data storage 58 after the completion after the shape measurement of the surface Wa. It is confirmed whether or not the signal D3 includes the abnormal waveform region ER. Then, when the displacement detection signal D3 includes the abnormal waveform region ER, the remeasurement control unit 78 is based on the abnormal waveform region tag 62a corresponding to the abnormal waveform region ER, and the remeasurement control unit 78 corresponds to the abnormal waveform region ER. Determine the "position".

Next, as shown by reference numeral XVIIB in FIG. 17, the remeasurement control unit 78 drives the detector moving mechanism 16 via the drive control unit 40 based on the determined detector position to move the displacement detector 20 in the X direction. The shape of the measurement region 80 on the surface Wa corresponding to the abnormal waveform region ER is remeasured. As a result, the measurement region 80 corresponding to the abnormal waveform region ER is retraced by the contactor 34 for each abnormal waveform region ER. As a result, the displacement detection signal D3 (hereinafter referred to as the re-detection signal D3R) indicating the surface shape of each measurement area 80 is output from the signal output unit 42.

The rediscovery signal D3R is low-pass filtered by the low-pass filter 44, and then input to the abnormality determination unit 46 and the storage control unit 56, respectively. As a result, the determination by the abnormality determination unit 46 is executed as in each of the above embodiments.

The memory control unit 56 of the fifth embodiment functions as the replacement control unit of the present invention at the time of remeasurement. As shown by the reference numeral XVIIC in FIG. 17, the storage control unit 56 performs the first shape measurement before the remeasurement based on the rediscovery signal D3R for each measurement area 80 (abnormal waveform area ER) input from the low-pass filter 44. Substitution control is performed to replace the abnormal waveform region ER in the displacement detection signal D3 stored in the stored data 60 with the waveform of the rediscovery signal D3R. As a result, more accurate surface Wa shape measurement results can be obtained.

At the same time, during the remeasurement, the remeasurement control unit 78 has the image acquisition unit 48 (camera 22), the temperature information acquisition unit 50 (thermometer 24), and the vibration information acquisition unit 52 (vibration meter) as in each of the above embodiments. 26) and the memory control unit 56 are operated. This corresponds to the temporary storage of the measurement environment information 38 (photographed image 38A, temperature information 38B, vibration information 38C) by the ring buffer memories 54A, 54B, 54C and the abnormal waveform area ER as in each of the above embodiments. The storage of the measurement environment information 38 by the data storage 58 is executed. As a result, if an abnormality in the shape measurement occurs even in the remeasurement of the measurement area 80, the cause of the abnormality can be identified by checking the measurement environment information 38.

As described above, in the fifth embodiment, the additional time required for the remeasurement of the surface Wa can be minimized by performing the remeasurement only in the measurement area 80. Further, by performing the remeasurement, it is possible to more accurately determine whether the abnormal waveform region ER is caused by the actual shape of the surface Wa or due to an external environmental factor.

[Sixth Embodiment]
FIG. 18 is a schematic view of the surface shape measuring machine 10 of the sixth embodiment. The abnormality determination unit 46 of each of the above embodiments determines the presence or absence of an abnormality in the shape measurement based on the displacement detection signal D3, but as shown in FIG. 18, the abnormality determination unit 46 of the sixth embodiment has measurement environment information. Based on 38, it is determined whether or not there is an abnormality in the shape measurement. The surface shape measuring machine 10 of the sixth embodiment has basically the same configuration as the surface shape measuring machine 10 of each of the above embodiments except that the determination method of the abnormality determination unit 46 is different. Those having the same form and function or configuration are designated by the same reference numerals and the description thereof will be omitted.

FIG. 19 is an explanatory diagram for explaining a determination method of the abnormality determination unit 46 of the sixth embodiment. As shown in FIG. 19 and FIG. 18 described above, the abnormality determination unit 46 analyzes the captured image 38A and if foreign matter 82 is attached or scratched on the surface Wa, a storage trigger signal is obtained. The TS is output to the storage control unit 56. Further, the abnormality determination unit 46 stores the storage trigger signal TS when it is determined that there is an abnormality by using the same method as the determination method described with reference to FIGS. 3 to 5 based on the temperature information 38B and the vibration information 38C. Output to the control unit 56.

As described above, also in the sixth embodiment, only the measurement environment information 38 corresponding to the abnormal waveform region ER can be stored in the data storage 58 as in each of the above embodiments. As a result, the same effect as that of each of the above embodiments can be obtained.

[others]
In each of the above embodiments, the control device 28 has the ring buffer memories 54A, 54B, 54C and the data storage 58 built-in, but at least one of the two (particularly the data storage 58) is separate from the surface shape measuring machine 10. It may be provided in (for example, an external server or database).

In each of the above embodiments, the displacement detector 20 is moved in the X direction when the surface Wa shape is measured by the surface shape measuring machine 10, but the measuring table 12 and the work W may be moved in the X direction. That is, as long as the displacement detector 20 and the work W can be relatively moved in the X direction, the moving method is not particularly limited.

In each of the above embodiments, the XY plane is parallel to the horizontal plane, but it may be non-parallel to the horizontal plane.

In each of the above embodiments, the measurement environment information 38 is stored in the ring buffer memories 54A, 54B, 54C, but the type and storage format thereof are particularly limited as long as the latest measurement environment information 38 for a certain period of time can always be stored. However, various storage units may be used.

In each of the above embodiments, the captured image 38A, the temperature information 38B, and the vibration information 38C are acquired and stored as the measurement environment information 38, but at least one of these is acquired and stored. May be good.

In each of the above embodiments, the stationary surface shape measuring machine 10 has been described as an example, but the present invention can also be applied to the handy type surface shape measuring machine 10.

In each of the above embodiments, the surface shape measuring machine 10 has been described as an example, but the contactor of the detector with respect to the peripheral surface (measured surface) of the cylindrical or cylindrical workpiece placed on the rotary table. The present invention can also be applied to a roundness measuring machine (cylindrical shape measuring machine) that rotates the work and the detector relative to each other around the center of rotation in a state where the work and the detector are in contact with each other. That is, the present invention can be applied to various shape measuring machines that measure the shape of a work or its various surface to be measured by using a contactor that comes into contact with the work (measurement object).

10 Surface shape measuring machine 12 Measuring table 14 Column 16 Detector moving mechanism 17 Holder 18 Position detection sensor 18a Linear scale 18b Reading head 20 Displacement detector 22 Camera 24 Thermometer 26 Vibration meter 28 Control device 30 Swing fulcrum 32 Arm 32a Arm Tip 32b Arm base 34 Contact 36 Displacement detection sensor 38 Measurement environment information 38A Photographed image 38B Temperature information 38C Vibration information 40 Drive control unit 42 Signal output unit 44 Low pass filter 46 Abnormality determination unit 48 Image acquisition unit 50 Temperature information acquisition Unit 52 Vibration information acquisition unit 54A, 54B, 54C Ring buffer memory 55 Storage area 56 Storage control unit 58 Data storage 60 Storage data 62 Abnormal waveform area tag list 62a Abnormal waveform area tag 70 Delay unit 72 Notification control unit 74 Monitor 76 Notification screen 77 Warning information 78 Remeasurement control unit 80 Measurement area 82 Foreign matter D1 Position detection result D2 Displacement detection result D3 Displacement detection signal D3R Redetection signal ER Abnormal waveform area ET Abnormality judgment threshold MA Moving average line NR Normal range TS Save trigger signal W Work Wa surface ΔT delay time

Claims (13)

In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object to be measured.
While the shape measurement is being performed, the measurement environment information acquisition unit that repeatedly acquires measurement environment information indicating the measurement environment of the shape measurement and temporarily stores the measurement environment information in the primary storage unit. ,
While the shape measurement is being performed, an abnormality determination unit that determines the presence or absence of an abnormality in the shape measurement, and
Each time the abnormality determination unit determines that there is an abnormality, a first storage control unit that stores the measurement environment information stored in the primary storage unit in the secondary storage unit, and
A shape measuring machine equipped with. The shape measuring machine according to claim 1, wherein the measurement environment information acquisition unit stores the measurement environment information in the primary storage unit in a ring buffer format. The invention according to claim 1 or 2, wherein the measurement environment information acquisition unit acquires at least one of a photographed image of the contactor, an environmental temperature, and vibration information of a shape measuring machine as the measurement environment information. Shape measuring machine. A displacement detector that detects the displacement of the contact and
A relative movement mechanism that moves the displacement detector relative to the measurement object and traces the measured surface of the measurement object with the contactor.
A position detection sensor that detects the relative position of the displacement detector with respect to the measurement object, and
While the relative movement is performed by the relative movement mechanism, a displacement detection signal indicating the displacement of the contactor for each relative position is output based on the detection result of the position detection sensor and the detection result of the displacement detector. Signal output section and
Equipped with
The shape measuring machine according to any one of claims 1 to 3, wherein the abnormality determination unit determines the presence or absence of an abnormality in the shape measurement based on the displacement detection signal output from the signal output unit. A low-pass filter that performs low-pass filter processing on the displacement detection signal output from the signal output unit is provided.
The shape measuring machine according to claim 4, wherein the abnormality determining unit determines the presence or absence of an abnormality in the shape measurement based on the displacement detection signal to which the low-pass filter processing is not applied. The detector position information indicating the relative position of the displacement detector corresponding to the abnormal waveform region determined by the abnormality determination unit in the signal waveform of the displacement detection signal by the first storage control unit, and the above. The shape measuring machine according to claim 4 or 5, wherein the measurement environment information corresponding to the abnormal waveform region is associated with the measurement environment information and stored in the secondary storage unit. Based on the detector position information stored in the secondary storage unit, the relative movement mechanism is driven to remeasure the measurement area of the surface to be measured corresponding to the abnormal waveform area by the contactor. The shape measuring machine according to claim 6, further comprising a remeasurement control unit for executing the above. The shape measuring machine according to claim 7, wherein the remeasurement control unit operates the measurement environment information acquisition unit, the abnormality determination unit, and the first storage control unit during the remeasurement. A second storage control unit that acquires the displacement detection signal output from the signal output unit and stores it in the secondary storage unit while the relative movement is performed by the relative movement mechanism in the first shape measurement. Prepare,
Based on the re-detection signal which is the displacement detection signal output from the signal output unit in the re-measurement, the abnormal waveform region in the signal waveform of the displacement detection signal stored in the secondary storage unit can be obtained. A replacement control unit that replaces the waveform of the rediscovery signal,
The shape measuring machine according to claim 7 or 8. The shape measuring machine according to any one of claims 1 to 3, wherein the abnormality determination unit determines the presence or absence of an abnormality in the shape measurement based on the measurement environment information repeatedly acquired by the measurement environment information acquisition unit. .. Each time the first storage control unit determines that an abnormality is present by the abnormality determination unit, the measurement environment information stored in the primary storage unit is secondarily stored after a predetermined delay time has elapsed. The shape measuring machine according to any one of claims 1 to 10 to be output to a storage unit. The shape according to any one of claims 1 to 11, further comprising a notification unit for notifying the measurement environment information or warning information stored in the primary storage unit when the abnormality determination unit determines that there is an abnormality. Measuring machine. In the control method of a shape measuring machine that measures the shape of the object to be measured by using a contactor that comes into contact with the object to be measured.
While the shape measurement is being performed, the measurement environment information acquisition step of repeatedly acquiring the measurement environment information indicating the measurement environment of the shape measurement and temporarily storing the measurement environment information in the primary storage unit. ,
During the shape measurement, an abnormality determination step for determining the presence or absence of an abnormality in the shape measurement and an abnormality determination step
Each time the abnormality determination step determines that the shape measurement has an abnormality, a storage control step for storing the measurement environment information stored in the primary storage unit in the secondary storage unit, and a storage control step.
Control method of shape measuring machine having.

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