JP2021088015A - Dressing method and dressing unit - Google Patents

Abstract

To make it possible to simultaneously perform a dressing process for two different kinds of blades.SOLUTION: A dress unit 70 is prepared such that to a surface of a tape 76 stuck to cover an opening of an annular frame 78, a first dress board 71 for dressing a first cutting blade is stuck and a second dress board 72 for dressing a second cutting blade is stuck adjacent to the first dress board 71. The dress unit 70 is held by a holding table 6 such that the first dress board 71 of the dress unit 70 corresponds to a first cutting unit and the second dress board 72 thereof corresponds to a second cutting unit. Thereafter, the first cutting blade and the second cutting blade are dressed by processing and feeding the holding table 6 while causing the first cutting blade and the second cutting blade to cut into the first dress board 71 and the second dress board 72, respectively.SELECTED DRAWING: Figure 4

Description

The present invention relates to a dressing method for dressing a first cutting blade and a second cutting blade in an opposed cutting apparatus, and a dressing unit.

Conventionally, as disclosed in, for example, Patent Document 1, there is known an opposed cutting device in which two cutting blades face each other on the same straight line.

In Patent Document 1, the first blade is a V-groove blade and the second blade is a cutting blade. First, the first blade is positioned on the street of the semiconductor wafer, and the holding table is moved in the X-axis direction to move the surface of the semiconductor wafer. A V-groove is formed in the X-axis direction of the above, and then the second blade is positioned at the position where the V-groove is formed, and the V-groove is cut to form a chip whose surface is chamfered in a tapered shape. Is disclosed.

Japanese Unexamined Patent Publication No. 2004-158822

Since each blade used for step cutting has a different type of grindstone and bond, when rounding or sharpening in the dressing process (dressing process), different dress boards corresponding to each blade are used. It was prepared and the dressing process was carried out sequentially for each blade.

However, when the dressing process is sequentially performed for each blade, it takes a long time to complete the dressing process, and the workability is poor, such as the need to sequentially arrange the dress boards, and improvement has been desired.

In view of the above problems, the present invention proposes a novel technique capable of simultaneously performing a dressing process on two different types of blades.

According to one aspect of the invention
A facing cutting mechanism having a first cutting unit having a first cutting blade and a second cutting unit having a second cutting blade facing the first cutting blade.
A holding table that holds the workpiece to be cut by the opposed cutting mechanism, and
A machining feed mechanism that feeds the holding table to the facing cutting mechanism, and a machining feed mechanism.
A dressing method for dressing the first cutting blade and the second cutting blade in a cutting device equipped with.
A first dress board for dressing the first cutting blade is attached on a tape attached so as to cover the opening of the annular frame, and a second dress board for dressing the second cutting blade is the first. A preparatory step to prepare the dress unit attached adjacent to the dress board,
A holding step of holding the dress unit on the holding table so that the first dress board of the dress unit corresponds to the first cutting unit and the second dress board corresponds to the second cutting unit.
After performing the holding step, the first cutting is performed by processing and feeding the holding table while cutting the first cutting blade and the second cutting blade into the first dress board and the second dress board, respectively. The dressing method includes a dressing step for dressing the blade and the second cutting blade, respectively.

Further, according to one aspect of the present invention.
A facing cutting mechanism having a first cutting unit having a first cutting blade and a second cutting unit having a second cutting blade facing the first cutting blade, and cutting with the facing cutting mechanism. Dress the first cutting blade and the second cutting blade in a cutting device provided with a holding table for holding the workpiece to be machined and a machining feed mechanism for machining and feed the holding table to the opposed cutting mechanism. It ’s a dress unit to do
With a ring frame
A tape attached so as to cover the opening of the annular frame and
A first dress board for dressing the first cutting blade attached on the tape,
A dress unit comprising a second dress board, which is attached on the tape adjacent to the first dress board and for dressing the second cutting blade.

Further, according to one aspect of the present invention.
The annular frame is provided with a reference for specifying the orientation of the annular frame.
The first dressboard is placed at the first relative position to the reference.
It is assumed that the second dressboard is placed at a second relative position to the reference.

Further, according to one aspect of the present invention.
The distance between the first cutting blade and the second cutting blade when the first cutting unit and the second cutting unit are closest to each other without contact with each other is defined as the minimum distance between the blades.
It is assumed that the first dress board and the second dress board are attached on the tape with a distance of at least a minimum distance between the blades.

According to the configuration of the present invention, it is possible to carry out the dressing process for two different types of blades at the same time, the time required for the dressing process can be shortened, the downtime of the cutting apparatus can be reduced, and each dressing board can be performed. Workability can be improved without the trouble of sequentially arranging.

It is an external perspective view of one side of the cutting apparatus which concerns on one Embodiment of this invention. It is external perspective view of the other side of the cutting apparatus which concerns on one Embodiment of this invention. It is a figure explaining the minimum distance between blades. (A) It is a figure explaining the structure of a dress unit and the like. (B) It is a figure explaining the structure of the dress unit of another embodiment. (A) is a figure explaining a dress step. (B) is a figure explaining how two dress boards are arranged with a minimum distance between blades.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 1 and 2 are external perspective views of the cutting device 2 according to the embodiment of the present invention.

As shown in FIGS. 1 and 2, the mechanical portion of the cutting device 2 is housed in an exterior cover 4 formed by combining a plurality of panels.

The cutting device 2 has a holding table 6 for holding a work piece. The holding table 6 is rotatably provided in the θ direction about the Z axis by a rotation drive mechanism (not shown) provided below the holding table 6. Further, the holding table 6 is configured to be movable in the X-axis direction, which is the machining feed direction, by a machining feed mechanism (not shown) provided below the holding table 6. A clamp mechanism 7 for sandwiching the annular frame 36 of the wafer unit 30 is provided around the holding table 6.

The cutting device 2 has a configuration in which the first cutting unit 10 and the second cutting unit 20 are arranged to face each other in the Y-axis direction to have a facing cutting mechanism. The cutting device 2 having such a facing cutting mechanism is also referred to as a dual dicer. The first cutting unit 10 and the second cutting unit 20 are provided so as to be movable in the Y-axis direction and also in the Z-axis direction.

The cutting device 2 has a cassette mounting table 56 on which a cassette 57 accommodating a plurality of wafers 32 is placed therein. The cassette mounting table 56 is configured to be movable in the vertical direction (Z-axis direction).

The cutting device 2 has a transfer device 42 for transporting the wafer unit 30 housed in the cassette 57 to the holding table 6.

The wafer unit 30 includes a wafer 32 which is a work piece, a tape 34 to which the wafer 32 is attached, and an annular frame 36 which is attached to the tape 34 so as to surround the wafer 32. ..

The cutting device 2 has a cleaning device 46 for cleaning the wafer 32 that has been cut.

The cutting device 2 has an indicator lamp 58 that displays the operating status of the cutting device 2. When the indicator lamp 58 and the cutting device 2 are operating normally, they are lit in green, for example, and when some kind of failure occurs, they are blinked in red.

The cutting device 2 has a touch panel type display monitor 60. The operator can input an operation command of the device through the display monitor 60, and the operating status of the device is displayed on the display monitor 60.

As shown in FIG. 3, the first cutting unit 10 and the second cutting unit 20 are arranged so as to face each other, and the wafer 32 is cut by the first cutting blade 12 and the second cutting blade 22 which are rotationally driven, respectively. ..

As shown in FIG. 3, in cutting, the first cutting blade 12 first forms a groove of a predetermined depth on the wafer 32, and then the second cutting blade 22 thinner than the first cutting blade creates a groove. Dicing (individualization) is performed by performing a full cut that penetrates the bottom.

Such cutting is called step processing, and as shown in FIG. 3, the first cutting unit 10 and the second cutting unit 20 are appropriately moved in the Y-axis direction, and the first cutting blade 12 and the first cutting blade 12 and the second cutting unit 20 are appropriately moved. (Ii) The cutting blade 22 is sequentially positioned at the scheduled division line.

FIG. 3 shows a state in which the first cutting blade 12 and the second cutting blade 22 are closest to each other. The first cutting blade 12 and the second cutting blade 22 are configured to be surrounded by the blade covers 11 and 21, respectively.

The blade covers 11 and 21 are configured so that a gap is secured between the blade covers 11 and 21 so that they do not come into contact with each other in the closest state by design. Further, in addition to this gap, by setting a margin allowance based on the positioning accuracy of the first cutting unit 10 and the second cutting unit 20 in the Y-axis direction, contact between the blade covers 11 and 21 is surely prevented. It is configured as follows.

Then, after securing such a gap and a margin, the distance between the first cutting blade 12 and the second cutting blade 22 when they are closest to each other is defined as the minimum distance W between the blades.

As shown in FIG. 3, the first cutting blade 12 and the second cutting blade 22 are configured to be surrounded by the blade covers 11 and 21, respectively. The blade covers 11 and 21 have a function of covering the upper portions of the first cutting blade 12 and the second cutting blade 22 and supplying cutting water for cooling.

Next, the contents related to the dressing for sharpening and rounding the cutting blade will be described. FIG. 4A is a diagram showing a dress unit 70 according to an embodiment of the present invention.

As shown in FIG. 4A, the dress unit 70 includes an annular frame 78, a tape 76 attached so as to cover the opening of the annular frame 78, and a first dress board 71 attached to the tape 76. It is composed of a second dress board 72 and the like.

Similar to the wafer unit 30 shown in FIGS. 1 and 2, the dress unit 70 shown in FIG. 4A can be automatically conveyed to the holding table 6 by being housed in the cassette 57. The annular frame 78 of the dress unit 70 can have the same configuration as the annular frame 36 of the wafer unit 30.

As shown in FIG. 4A, the first dress board 71 is made of a material suitable for dressing the first cutting blade 12, and has a plate shape manufactured so as to have an optimum hardness for the dress. It is a member of.

As shown in FIG. 4 (A), the second dress board 72 is made of a material suitable for dressing the second cutting blade 22, and has a plate shape manufactured so as to have an optimum hardness for the dress. It is a member of.

As shown in FIG. 4A, each of the dress boards 71 and 72 has a rectangular shape having a long side in the X-axis direction, which is the processing feed direction. In the configuration of FIG. 4A, the dressboards 71 and 72 are arranged with a minimum distance W between the blades as described in detail later, but the dress unit 70A of FIG. 4B is used. As shown, the dress boards 71 and 72 may be arranged without a gap.

Then, as shown in FIG. 5 (A), the cutting blades 12 and 22 are positioned at a height at which the dress boards 71 and 72 are cut, and the holding table 6 is positioned in the X-axis direction (FIG. 4 (A)). By moving, the dress is done.

Here, the depth of cut and the number of rotations of each of the cutting blades 12 and 22 can be set individually for each of the cutting blades 12 and 22, and while dressing the two cutting blades 12 and 22 at the same time, each cutting The dress can be dressed under the optimum conditions for the blades 12 and 22.

As shown in FIG. 5A, when the cutting at one position in the Y-axis direction is completed in the cutting blades 12 and 22, the cutting blades 12 and 22 are raised and used in the dress boards 71 and 72. By moving to a non-cutting area (an area not cut) and lowering the cutting blades 12 and 22 again, dressing using the unused area is performed. In this way, dressing can be performed a plurality of times for each of the cutting blades 12, 22.

As shown in FIG. 4A, each dressboard 71 with respect to the annular frame 78 in order to make the first dressboard 71 correspond to the first cutting blade 12 and the second dressboard 72 to correspond to the second cutting blade 22. , 72 relative positions are predetermined.

As shown in FIG. 4A, in the present embodiment, the notch 75 provided in the annular frame 78 is used so as to function as a reference 77 for specifying the orientation of the annular frame 78, and the reference is used. The first dressboard 71 is arranged at a first relative position with respect to 77, and the second dressboard 72 is arranged at a second relative position with respect to the reference 77.

As shown in FIG. 4A, the orientation of the dress unit 70 is specified with reference to the notch 75 provided in the annular frame 78, and the orientation of the notch 75 is aligned with the predetermined orientation of the cassette 57. By accommodating in (FIG. 1), the dress unit 70 is always held in a predetermined direction with respect to the holding table 6.

In addition, assuming that the relative positions of the dress boards 71 and 72 with respect to the reference 77 are erroneously arranged in the opposite direction, or the dress unit 70 is housed in the cassette 57 (FIG. 1) in the wrong direction, the dress is dressed. Before, it may be automatically confirmed that the arrangement of the dress boards 71 and 72 is correct. For example, each dressboard 71, 72 is given a coloring or mark that can be identification information, the identification information is recognized by the camera, and it is confirmed whether the arrangement of the dressboards 71, 72 is reversed. It is a thing.

With the above configuration, as shown in FIG. 4A, when the dress unit 70 is held on the holding table 6, the first dress board 71 is arranged at a position corresponding to the first cutting blade 12. , The second dress board 72 is arranged at a position corresponding to the second cutting blade 22.

In the configuration shown in FIG. 4A, the notch 75 provided in the annular frame 78 is used as a reference 77 for specifying the orientation of the annular frame 78, and a sticker attached to the annular frame 78, a marking, or the like is used. The reference may be configured on the annular frame 78.

As shown in FIG. 5 (A), when dressing, for example, the cutting blades 12 and 22 are moved in a direction of approaching from a distant position, and as shown in FIG. 5 (B), the first cutting blade is used. The minimum distance W between the blades, which is the smallest distance between the 12 and the second cutting blade 22, may be reached. On the contrary, the cutting blades 12 and 22 may be moved in a direction away from each other from the position of the minimum distance W between the blades.

In this case, with respect to the minimum distance W between the blades, it is not necessary to arrange the dressboards 71 and 72, and the volume of the dressboards 71 and 72 can be kept small, so that the cost can be reduced.

The present invention can be carried out as described above.
That is, as shown in FIGS. 1 to 5.
A facing cutting mechanism having a first cutting unit 10 having a first cutting blade 11 and a second cutting unit 20 having a second cutting blade 21 facing the first cutting blade 11.
A holding table 6 for holding the workpiece to be cut by the opposed cutting mechanism, and
A machining feed mechanism that feeds the holding table 6 to the facing cutting mechanism, and a machining feed mechanism.
This is a dressing method for dressing the first cutting blade 11 and the second cutting blade 21 in the cutting device 2 provided with the above.
A first dress board 71 for dressing the first cutting blade 11 is attached on the tape 76 attached so as to cover the opening of the annular frame 78, and a second dress board 72 for dressing the second cutting blade 21. To prepare the dress unit 70 attached adjacent to the first dress board 71, and
A holding step of holding the dress unit 70 on the holding table 6 so that the first dress board 71 of the dress unit 70 corresponds to the first cutting unit 10 and the second dress board 72 corresponds to the second cutting unit 20.
After performing the holding step, the first cutting blade 11 and the second cutting blade 21 are cut into the first dress board 71 and the second dress board 72, respectively, and the holding table 6 is machined and fed to feed the first cutting blade 11. The dressing method is provided with a dressing step for dressing the second cutting blade 21 and the second cutting blade 21, respectively.

This makes it possible to carry out the dressing process for two different types of blades at the same time, shorten the time required for the dressing process, reduce the downtime of the cutting device, and take the trouble of arranging each dress board in sequence. There is no problem, and workability is improved.

Further, as shown in FIGS. 1 to 5,
A facing cutting mechanism having a first cutting unit 10 having a first cutting blade 11 and a second cutting unit 20 having a second cutting blade 21 facing the first cutting blade 11, and facing cutting. The first cutting blade 11 and the second cutting in the cutting apparatus 2 provided with the holding table 6 for holding the workpiece to be cut by the mechanism and the machining feed mechanism for machining and feeding the holding table 6 to the opposed cutting mechanism. A dress unit 70 for dressing the blade 21.
Circular frame 78 and
Tape 76 attached so as to cover the opening of the annular frame 78,
A first dress board 71 for dressing the first cutting blade 11 attached on the tape 76, and
The dress unit 70 is attached to the tape 76 adjacent to the first dress board 71, and includes a second dress board 72 for dressing the second cutting blade 21.

By using the dress unit 70 configured in this way, it is possible to carry out the dressing process for two different types of blades at the same time, the time required for the dressing process can be shortened, and the downtime of the cutting apparatus can be reduced. In addition, there is no need to arrange each dress board in sequence, and workability can be improved.

Further, as shown in FIG. 4 (A),
The annular frame 78 is provided with a reference 77 for specifying the orientation of the annular frame 78.
The first dressboard 71 is placed in the first relative position with respect to the reference 77,
It is assumed that the second dressboard 72 is placed at the second relative position with respect to the reference 77.

As a result, the arrangement of the dress boards 71 and 72 is not reversed, the first dress board 71 is arranged at the position corresponding to the first cutting blade 12, and the second dress board 72 is arranged on the second cutting blade 22. It can be placed at the corresponding position.

Further, as shown in FIGS. 4 (A) and 5 (A) (B),
The distance between the first cutting blade 11 and the second cutting blade 21 when the first cutting unit 10 and the second cutting unit 20 are closest to each other without contact is defined as the minimum distance W between the blades.
It is assumed that the first dress board 71 and the second dress board 72 are attached to the tape 76 at a distance of a minimum distance W or more between the blades.

With respect to the minimum distance W between the blades, it is not necessary to arrange the dressboards 71 and 72, and the volume of the dressboards 71 and 72 can be kept small, so that the cost can be reduced.

2 Cutting device 6 Holding table 10 First cutting unit 11 Blade cover 12 First cutting blade 20 Second cutting unit 21 Blade cover 22 Second cutting blade 30 Wafer unit 32 Wafer 34 Tape 36 Circular frame 57 Cassette 70 Dress unit 71 First Dressboard 75 Notch 76 Tape 77 Reference 78 Circular frame W Minimum distance between blades

Claims (4)

A facing cutting mechanism having a first cutting unit having a first cutting blade and a second cutting unit having a second cutting blade facing the first cutting blade.
A holding table that holds the workpiece to be cut by the opposed cutting mechanism, and
A machining feed mechanism that feeds the holding table to the facing cutting mechanism, and a machining feed mechanism.
A dressing method for dressing the first cutting blade and the second cutting blade in a cutting device equipped with.
A first dress board for dressing the first cutting blade is attached on a tape attached so as to cover the opening of the annular frame, and a second dress board for dressing the second cutting blade is the first. A preparatory step to prepare the dress unit attached adjacent to the dress board,
A holding step of holding the dress unit on the holding table so that the first dress board of the dress unit corresponds to the first cutting unit and the second dress board corresponds to the second cutting unit.
After performing the holding step, the first cutting is performed by processing and feeding the holding table while cutting the first cutting blade and the second cutting blade into the first dress board and the second dress board, respectively. A dressing method comprising a dressing step for dressing the blade and the second cutting blade, respectively. A facing cutting mechanism having a first cutting unit having a first cutting blade and a second cutting unit having a second cutting blade facing the first cutting blade, and cutting with the facing cutting mechanism. Dress the first cutting blade and the second cutting blade in a cutting device provided with a holding table for holding the workpiece to be machined and a machining feed mechanism for machining and feed the holding table to the opposed cutting mechanism. It ’s a dress unit to do
With a ring frame
A tape attached so as to cover the opening of the annular frame and
A first dress board for dressing the first cutting blade attached on the tape,
A dress unit comprising a second dress board that is affixed onto the tape adjacent to the first dress board and for dressing the second cutting blade. The annular frame is provided with a reference for specifying the orientation of the annular frame.
The first dressboard is placed at the first relative position to the reference.
The second dressboard is placed at a second relative position to the reference.
The dress unit according to claim 2. The distance between the first cutting blade and the second cutting blade when the first cutting unit and the second cutting unit are closest to each other without contact with each other is defined as the minimum distance between the blades.
The first dress board and the second dress board are attached on the tape with a distance of at least a minimum distance between the blades.
The dress unit according to claim 3.

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