JP2021040374A - Vibration type actuator, optical apparatus and electronic apparatus - Google Patents

Abstract

To provide a vibration type actuator which is improved in performance and structured to simply and stably hold a vibrator.SOLUTION: A vibration type actuator comprises: a vibrator including an elastic body and an electric/mechanical energy conversion element; a contact body in contact with the vibrator; a flexible printed circuit board which supplies power to the electric/mechanical energy conversion element and includes a recess on a surface at an opposite side from the electric/mechanical energy conversion element; and a hold member including a projection which is engaged with the recess.SELECTED DRAWING: Figure 9

Description

The present invention relates to vibrating actuators, optical instruments and electronic devices.

Various types of vibration type actuators using an electric-mechanical energy conversion element such as a piezoelectric element are known. For example, a vibrating body in which two protrusions are provided on the surface of a flat plate-shaped elastic body and a piezoelectric element is bonded to the back surface of the elastic body, a driven body (contact body) in contact with the vibrating body, and two protrusions. A vibrating actuator having a pressurizing means for pressurizing contact with a driven body is known. In this vibration type actuator, by applying a predetermined AC voltage to the electric-mechanical energy conversion element, an elliptical motion or a circle is formed at the tips of the two protrusions in a plane including the direction connecting the two protrusions and the protrusion direction of the protrusions. Cause exercise. As a result, the driven body receives the frictional driving force from the two protrusions, so that the vibrating body and the driven body can be relatively moved in the direction connecting the two protrusions.

Adopting a mechanism that stably holds the vibrating body so that the vibration amplitude excited by the vibrating body is not attenuated as much as possible is from the viewpoint of stabilizing the driving characteristics of the vibrating actuator and obtaining high performance. It becomes important from. Therefore, various proposals have been made regarding the holding member of the vibrating body.

Patent Document 1 describes a vibration wave driving device in which a hole is provided on the surface of the piezoelectric element, and a protrusion provided on the holding member is engaged with the hole. By urging the holding member with the pressure spring, a desired pressing force is applied between the driven body and the vibrating body, and the position shift between the holding member and the vibrating body due to play or the like is performed. Can be suppressed.

However, the technique disclosed in Patent Document 1 has a problem that mass productivity is lowered.

Generally, since the piezoelectric element is made of ceramics, it is harder and more brittle than metal, so it is difficult to process. Even if processing is possible, if a hole is provided in the piezoelectric element, the volume will be reduced by that amount, and the motor. Output is reduced. The inventor of the present application has confirmed that the maximum velocity is reduced even if a minute V-groove is provided on the surface of the pressure electron.

Japanese Unexamined Patent Publication No. 2010-158127

The present invention has been made in view of such a problem, and an object of the present invention is to provide a vibrating actuator having a structure for simply and stably holding a vibrating body without significantly impairing its performance.

The vibrating actuator that solves the above problems includes a vibrating body having an elastic body and an electric-mechanical energy conversion element, and a vibrating body.
The contact body in contact with the vibrating body and
A flexible printed circuit board that supplies power to the electric-mechanical energy conversion element and has a recess on the surface opposite to the surface that comes into contact with the electric-mechanical energy conversion element.
It is characterized by including a holding member provided with a protrusion that engages with the recess.

It is possible to provide a vibrating actuator having good performance and a structure for simply and stably holding the vibrating body.

It is an exploded perspective view of the vibration type actuator in Example 1 of this invention. It is an assembly perspective view of the vibration type actuator in Example 1 of this invention. It is a vibration mode diagram in Example 1 of this invention. It is an exploded perspective view of the vibrating body holding mechanism in Example 1 of this invention. It is an assembly perspective view of the vibrating body holding mechanism in Example 1 of this invention. It is a figure which shows the node position of the vibration type actuator in Example 1 of this invention. It is an exploded perspective view of the vibrating body in Example 1 of this invention. It is sectional drawing of the holding part in Example 1 of this invention. It is sectional drawing of the holding part in Example 2 of this invention. It is an exploded perspective view of the vibration type actuator in Example 3 of this invention. It is sectional drawing of the vibration type actuator in Example 3 of this invention. It is a perspective view of the vibrating body and the ring base in Example 3 of this invention. It is an exploded perspective view of the vibration type actuator in Example 4 of this invention. It is an assembly perspective view of the vibration type actuator in Example 4 of this invention. It is a top view and a block diagram which show the schematic structure of the image pickup apparatus using the vibration type actuator in Example 5 of this invention.

In this embodiment,
An elastic body and a vibrating body having an electric-mechanical energy conversion element,
The contact body in contact with the vibrating body and
A flexible printed circuit board that supplies power to the electric-mechanical energy conversion element and has a recess on the surface opposite to the electric-mechanical energy conversion element.
Provided is a vibrating actuator provided with a holding member provided with a protrusion that engages with the recess.

The details will be described below with reference to the drawings.

The "contact body" refers to a member that comes into contact with the vibrating body and moves relative to the vibrating body due to the vibration generated in the vibrating body. The contact between the contact body and the vibrating body is not limited to the direct contact in which no other member is interposed between the contact body and the vibrating body. The contact between the contact body and the vibrating body is an indirect contact in which another member intervenes between the contact body and the vibrating body if the contact body moves relative to the vibrating body due to the vibration generated in the vibrating body. May be good. The "other member" is not limited to a member independent of the contact body and the vibrating body (for example, a high friction material made of a sintered body). The "other member" may be a surface-treated portion formed on the contact body or the vibrating body by plating, nitriding treatment, or the like.

This embodiment is an example in which the present invention is applied to a linear vibration type actuator, and the details thereof will be described with reference to FIGS. 1 to 8. First, FIG. 1 is an exploded perspective view of the vibration type actuator 1 according to the first embodiment of the present invention, and FIG. 2 is an assembled perspective view. Here, the moving direction of the slider 9 which is a contact body is defined as X, the pressurizing direction is defined as Z, and the directions perpendicular to the X and Z directions are defined as Y.

A piezoelectric element 4 which is an electric-mechanical energy conversion element is fixed to the elastic body 3 with an adhesive or the like, and a flexible printed substrate 5 is fixed to the piezoelectric element 4 on the opposite surface to the elastic body 3, and the vibrating body 2 is formed by these. Consists of. The method of fixing the piezoelectric element 4 and the flexible printed circuit board 5 is performed with an anisotropic conductive paste or an anisotropic conductive film that enables energization only in the Z direction.

The elastic body 3 is preferably a material having a small vibration damping such as metal or ceramics. Regarding the production of the elastic body 3, the protrusion 31 may be integrally provided by press molding or cutting, or the protrusion 31 may be manufactured separately and fixed later by welding or adhesion. Further, a plurality of protrusions 31 may be provided as illustrated in FIG. 4 of this embodiment, or one protrusion 31 may be provided.

The piezoelectric element 4 uses lead zirconate titanate. Further, a material containing a lead-free piezoelectric material such as barium titanate or bismuth sodium titanate as a main component may be used. The lead-free piezoelectric material is a piezoelectric element provided with a piezoelectric material having a lead content of 1000 ppm or less.

An electrode pattern (not shown) is formed on both sides of the piezoelectric element 4, and power is supplied from the flexible printed circuit board 5.

A pressure member 6 for pressurizing and supporting the vibrating body 2 is provided below the vibrating body 2. A pressing force is applied to the pressurizing member in the Z direction by the pressurizing spring 7, and the reaction force is received by the base 8 which is the pressurizing receiving member. The pressure spring 7 employs a conical coil spring in order to reduce the size of the vibrating actuator 1 in the Z direction. The coil shape is shown in a simplified manner.

A slider 9 is provided above the vibrating body 2 and is in pressure contact with the protrusion 31 of the elastic body 3. The slider 9 is fixed to the slider holder 10 and is integrally driven in the X direction. A rubber for vibration damping may be provided between the slider 9 and the slider holder 10. The slider 9 is made of a metal, ceramic, resin, or a composite material thereof having high wear resistance. In particular, a stainless steel nitrided material such as SUS420J2 is preferable from the viewpoint of wear resistance and mass productivity.

By sandwiching the three balls 11 between the upper and lower three pairs of rails provided on the slider holder 10 and the ball rail 12 and fixing the ball rail 12 to the base 8, the slider 9 and the slider holder 10 can be attached to other parts. It is possible to move in the X direction. The output is transmitted to the outside by attaching an output transmission unit having a desired shape to the slider holder 10. In this embodiment, an example in which the vibrating body 2 is fixed and the slider 9 is moved is shown, but conversely, the slider 9 can be fixed and the vibrating body 2 can be moved.

Next, the vibration mode excited by the vibrating body 2 will be described with reference to FIG. In this embodiment, an AC voltage is applied to the piezoelectric element 3 through the flexible printed substrate 5 to excite two different out-of-plane bending vibrations to the vibrating body 2 to generate a vibration in which these vibrations are combined.

Mode A, which is the first vibration mode, is a primary out-of-plane bending vibration mode in which two nodes appear in parallel with the X direction, which is the longitudinal direction of the vibrating body 2. Due to the vibration of mode A, the two protrusions 31-1 and 31-2 are displaced in the Z direction, which is the pressurizing direction. The second vibration mode, mode B, is a secondary out-of-plane bending vibration mode in which three nodes substantially parallel to the Y direction, which is the lateral direction of the vibrating body 2, appear. Due to the vibration of mode B, the two protrusions 31-1 and 31-2 are displaced in the X direction.

By synthesizing the vibrations of these modes A and B, the two protrusions 31-1 and 31-2 perform elliptical motion or circular motion in the ZX plane. By bringing the slider 9 into pressure contact with the protrusions 31-1 and 31-2, a frictional force is generated in the X direction, and a driving force (thrust) that relatively moves the vibrating body 2 and the slider 9 is generated. To do. In this embodiment, since the vibrating body 2 is held by the method described later, the slider 9 which is a contact body moves in the X direction. It is also possible to fix the position of the contact body with a fixing member or the like so that the vibrating body 2 moves in the X direction.

In order to drive the vibrating actuator 1 efficiently, it is necessary to support the vibrating body 2 without hindering the vibration (displacement) of the two vibration modes that excite the vibrating body 2. It is desirable to support the vicinity of the nodes of the two vibration modes. For this reason, in order to pressurize and hold the common node of the two vibration modes excited by the vibrating body 2, the pressurizing member 6 has two convex portions 61-1 and 61 as shown in FIG. -2 is provided. FIG. 6 shows the contact position and the node position in each vibration mode. For the sake of simplicity, the flexible printed circuit board 5 is omitted.

In FIG. 6, the portion painted in black indicates the vicinity of the node. Specifically, the displacement of 35% or less of the maximum displacement of each vibration mode is displayed in black. Here, the location of the displacement of 35% or less of this maximum displacement is defined as the vicinity of the node. When modes A and B are overlapped, the black parts overlap, that is, six common node neighborhoods appear (4 circles and 2 stars). Of these, the two locations represented by the stars are preferable from the following two viewpoints that support the vibrating body 2 more efficiently.

First, the displacement is smaller than the other four locations, and then when viewed in the ZX cross section, the pressure is applied at one point in the X direction, so the Y-axis of the protrusions 31-1 and 31-2 and the slider 9 This is because it is possible to have an equalizing function around it and make the contact uniform. For this reason, the vibrating body 2 is pressurized more efficiently by bringing the convex portions 61-1 and 61-2 into contact with the star-marked portion of FIG.

In the asterisk part, the elastic body has a rectangular shape, and the primary out-of-plane bending vibration mode A in which two nodes appear along the longitudinal direction of the elastic body and three nodes along the lateral direction of the elastic body. Refers to two points on the middle node of the three nodes among the points where the secondary out-of-plane bending vibration mode B in which appears appears.

The configuration of the convex portion 61 and the pressurized contact portion of the vibrating body 2 will be described in detail with reference to FIGS. 7 and 8. FIG. 7 is an exploded perspective view of the vibrating body 2. Two holes 51 are formed in the flexible printed circuit board 5. The flexible printed circuit board 5 is bonded to the piezoelectric element 4, and the hole 51 is bonded so as to coincide with the position of a common node (marked with a star in FIG. 6) in the two vibration modes. Alternatively, the flexible printed circuit board 5 having no holes may be adhered to the piezoelectric element 4 and then the holes 51 may be formed by laser processing or the like. The process of punching the hole 51 at the same time as the outer shape by pressing does not increase the cost as compared with the conventional flexible printed circuit board, and the mass productivity is high.

FIG. 8 is a cross-sectional view of the vicinity of the contact portion between the vibrating body 2 and the pressurizing member, but the elastic body 3 is not shown. v has a three-layer structure of a base film 52 made of a resin film, a wiring pattern 53, and a cover film 54. The cover film 54 has a three-layer structure in the vicinity of the pressure contact portion in order to establish continuity with the piezoelectric element 4. Not placed. The vibrating body 2 and the pressurizing member 6 are engaged with each other by arranging the convex portion 61 so as to enter the hole portion 51 and applying pressure in the Z direction. As a result, when the slider 9 is driven, the vibrating body 2 does not move with respect to the pressurizing member 6 even when a reaction force is applied.

That is, the flexible printed circuit board is characterized in that it includes a wiring pattern 53 and a non-wiring portion in which a wiring pattern is not formed, and a recess is formed by wiring patterns provided on both sides of the non-wiring portion and the non-wiring portion. The recesses may be voids as in the holes 51 illustrated in FIGS. 7 and 8, and as will be described later, the resin film covers the non-wiring portions and the wiring patterns provided on both sides of the non-wiring portions. It may be a structure that does.

On the other hand, the pressurizing member 6 is provided with four loose fitting portions 62 (62-1, 62-2, 62-3, 62-4), and rattles the outer peripheral surface of the vibrating body 2. It is supported (floating) while being held. The loose fitting portion 62 functions as a positioning at the time of assembling the vibrating body 2.

That is, the elastic body has a rectangular shape, and a rectangular portion and at least two extending portions independent of each other are provided, and another protrusion provided on the support member is in contact with the rectangular portion and the extending portion. Construct a type actuator. Specifically, the four corners of the rectangular portion of the elastic body are loosely fitted and supported by the plurality of other protrusions.

As described above, in the present embodiment, the vibrating body 2 is held by engaging the convex portion 61 of the pressurizing member 6 with the hole portion 51 of the flexible printed circuit board 5. This makes it possible to provide a vibrating actuator that is highly mass-producible and does not impair performance, even though it is a simpler method of holding a vibrating body than before.

In the linear vibration type actuator of the present invention, the method of generating an elliptical motion or a circular motion on the contact surface is not limited to the above method. For example, vibrations in bending vibration modes different from the above may be combined, or vibrations in a vertical vibration mode for expanding and contracting an elastic body in the longitudinal direction and vibrations in a bending vibration mode may be combined.

By combining a vibration mode that displaces the contact surface in the moving direction of the driven body and a vibration mode that displaces the contact surface in the pressurizing direction, elliptical motion and circular motion are generated on the contact surface. Any drive system may be used as long as it has a common node for holding.

By having the above-described configuration, it is possible to provide a vibrating actuator configured so that the positions of the vibrating body and the holding member are substantially maintained when the vibrating actuator is driven.

FIG. 9A is a cross-sectional view of the vicinity of the contact portion between the vibrating body 2 and the pressurizing member in the second embodiment. The illustration of the elastic body 2 is omitted as in the first embodiment. FIG. 9B shows the flexible printed circuit board 5 in the second embodiment, and the cover film 54 is not shown for the sake of explanation. A space 55 covered with a wiring pattern 53 is formed near a position that coincides with a common node of two standing waves in the X direction. An anisotropic conductive film or an anisotropic conductive sheet is arranged on the surfaces of the base film 52 and the wiring pattern 53. In the manufacturing process of the vibrating body 2, when the piezoelectric element 4 is pressed and adhered while being heated, the U-shaped recess 56 is formed by being crushed and adhered to the space 55. The vibrating body 2 can be held by bringing the convex portion 61 of the holding member 6 into pressure contact with the concave portion 56.

Here, since the convex portion 61 does not hinder the vibration of the vibrating body 2, it is preferable that the contact area is as small as possible. However, when the recess is formed by the press working at the lowest cost in the first embodiment, the width of the recess is limited due to the limitation of the press mold. On the other hand, in this implementation, since the wiring pattern 53 is made by etching, a narrower groove width can be realized as compared with press working. Therefore, the contact area of the convex portion 61 can be reduced, and the vibrating body 2 can be held more efficiently.

This embodiment will be described with reference to FIGS. 10-12. The present embodiment relates to a vibrating actuator in which a plurality of the vibrating bodies are arranged with respect to the annular contact body.

First, FIG. 10 is an exploded perspective view of the vibration type actuator according to the second embodiment of the present invention, in which the radial direction is defined by X, the rotation direction by θ, and the pressurization direction by Z. Further, FIG. 11 is a ZX cross-sectional view of the vibration type actuator according to the second embodiment of the present invention.

The feature of this embodiment is that three vibrating bodies 202 (202-1, 202-2, 202-3) are held by the ring base 206. Since the configuration and driving principle of the vibrating body 202 are the same as those in the first embodiment, the description thereof will be omitted.

On the ring base 206, three sets of convex portions and loose fitting portions that perform the same functions as in the first embodiment are provided at intervals of 120 degrees, and the vibrating body 202 is held and loosely fitted, respectively. The flexible printed circuit board of the vibrating body 202 is connected by a connected flexible printed circuit board (not shown), and the same driving voltage is applied to the piezoelectric element.

The rotor 211, which is a driven body, is brought into contact with the protrusion of the vibrating body 202, and the rotor 211 is rotated by the driving force generated in the tangential direction. Anti-vibration rubber 212 is arranged on the upper part of the rotor 211, and each is held in a state in which it can rotate integrally with the output transmission member 216.

On the other hand, the ring base 206 is combined with the inner cylinder 217 at a portion (not shown) to regulate movement in the central axis direction and radial direction and rotation around the central axis.

A pressurizing auxiliary member 207 having a predetermined rigidity is provided in the lower portion of the ring base 206, and the pressurizing force by the wave washer 208, which is a pressurizing member, is made uniform. A pressure receiving member 209 is arranged below the wave washer 208.

The pressure receiving member 209 is engaged with the inner cylinder 217 by a screw or a bayonet structure on the inner diameter side thereof. In the vibration type actuator 201, the wave washer 208 is compressed by rotating the pressure receiving member 209 and moving it in the central axis direction. Further, the ring base 206 to the output transmission member 216 have a structure in which the outer cylinder 213 and the inner cylinder 217 and the pressure receiving member 209 press and hold the ring base 206 to the output transmission member 216. A ball 214 and a retainer 215 are provided between the outer cylinder 213 and the inner cylinder 217 and the output transmission member 216, and rotatably support the output transmission unit 216 while receiving pressure. The outer cylinder 213 and the inner cylinder 217 are connected by screwing the lid 210, respectively.

In this embodiment, the case where the number of vibrating bodies 202 is three has been described, but the present invention is not limited to this, and any number of vibrating bodies 202 may be used as long as they can be arranged on the ring base 6 and one or more.

In this embodiment, a case where the friction plate 303, which is the driven body, is sandwiched between the two vibrating bodies 302 will be described. The present embodiment relates to a vibrating actuator having a configuration in which the contact body is sandwiched between the pair of vibrating bodies.

The moving direction of the vibrating body 302 is defined as X, the pressurizing direction is defined as Z, and the directions perpendicular to the X and Z directions are defined as Y. Since the configuration and driving principle of the vibrating body 302 are the same as those in the first embodiment, the description thereof will be omitted. FIG. 13 is an exploded perspective view of the vibration type actuator according to the fourth embodiment, and FIG. 14 is an assembled perspective view.

The vibrating body 302-1 is pressurized downward on the paper surface by the upper pressurizing member 305, and the vibrating body 302-2 is pressurized downward on the paper surface by the lower pressurizing member 306. , 302-2 are in contact with the friction plate 303, respectively. The friction plate 303 is fixed to the friction plate holder 311 via the anti-vibration rubber 304. The upper pressurizing member 305 and the lower pressurizing member 306 are rotatably engaged with each other around the X axis, and a pressing force is applied by a tension spring 308 (308-1, 308-2). The upper pressurizing member 305 and the lower pressurizing member 306 receive each other's pressurizing reaction force, and also have a function of a pressurizing receiving member. The coil portion of the tension spring 308 is omitted for simplification of the drawing.

A guide bar 307 is engaged with the lower pressurizing member 306, and is slidably supported in the X direction while restricting movement in the Z and Y directions. The guide bar 307 is sandwiched and fixed between the friction plate holder 311 and the fixing member 310.

The flexible printed circuit boards of the vibrating bodies 302-1 and 302-2 are connected by a connected flexible printed circuit board (not shown), and the same drive voltage is input to the piezoelectric element. Thrust in the X direction is generated by the elliptical motion or circular motion generated in the protrusion of the vibrating body 302, and the vibrating body 302, the upper pressurizing member 305, the lower pressurizing member 306, and the tension spring 308 are integrated in the X direction. Move to.

The vibrating actuator can be used, for example, in a lens driving application of an imaging device (optical device). Therefore, as an example, an image pickup device using a vibration type actuator for driving the lens arranged in the lens barrel will be described.

That is, the present embodiment relates to an optical device including a lens, an image pickup device, and the above-mentioned vibration type actuator, and configured so that the relative position between the lens and the image pickup element is changed by driving the vibration type actuator. ..

FIG. 15A is a top view showing a schematic configuration of the image pickup apparatus 700. The image pickup device 700 includes a camera body 730 equipped with an image pickup element 710 and a power button 720. Further, the image pickup apparatus 700 includes a first lens group (not shown), a second lens group 320, a third lens group (not shown), a fourth lens group 340, and a lens barrel 740 having vibration type drive devices 620 and 640. To be equipped with. The lens barrel 740 can be replaced as an interchangeable lens, and a lens barrel 740 suitable for the subject to be photographed can be attached to the camera body 730. In the image pickup apparatus 700, the second lens group 320 and the fourth lens group 340 are driven by the two vibration type drive devices 620 and 640, respectively.

Although the detailed configuration of the vibration type drive device 620 is not shown, the vibration type drive device 620 includes a vibration type actuator and a drive circuit of the vibration type actuator. The rotor 211 is arranged in the lens barrel 740 so that the radial direction is substantially orthogonal to the optical axis. In the vibration type drive device 620, the rotor 211 is rotated around the optical axis, and the rotational output of the driven body is converted into a linear motion in the optical axis direction via a gear (not shown) or the like, so that the second lens group 320 Is moved in the direction of the optical axis. The vibration type drive device 640 has the same configuration as the vibration type drive device 620, so that the fourth lens group 340 is moved in the optical axis direction.

FIG. 15B is a block diagram showing a schematic configuration of the image pickup apparatus 700. The first lens group 310, the second lens group 320, the third lens group 330, the fourth lens group 340, and the light amount adjusting unit 350 are arranged at predetermined positions on the optical axis inside the lens barrel 740. The light that has passed through the first lens group 310 to the fourth lens group 340 and the light amount adjusting unit 350 is imaged on the image sensor 710. The image sensor 710 converts an optical image into an electric signal and outputs it, and the output is sent to the camera processing circuit 750.

The camera processing circuit 750 amplifies, gamma-corrects, and the like the output signal from the image sensor 710. The camera processing circuit 750 is connected to the CPU 790 via the AE gate 755, and is connected to the CPU 790 via the AF gate 760 and the AF signal processing circuit 765. The video signal subjected to the predetermined processing in the camera processing circuit 750 is sent to the CPU 790 through the AE gate 755, the AF gate 760, and the AF signal processing circuit 765. The AF signal processing circuit 765 extracts a high frequency component of the video signal, generates an evaluation value signal for autofocus (AF), and supplies the generated evaluation value to the CPU 790.

The CPU 790 is a control circuit that controls the overall operation of the image pickup apparatus 700, and generates a control signal for exposure determination and focusing from the acquired video signal. The CPU 790 controls the drive of the vibration type drive devices 620, 640 and the meter 630 so that the determined exposure and the appropriate focus state can be obtained, so that the second lens group 320, the fourth lens group 340, and the light amount adjusting unit can be obtained. Adjust the position of 350 in the optical axis direction. Under the control of the CPU 790, the vibration type drive device 620 moves the second lens group 320 in the optical axis direction, the vibration type drive device 640 moves the fourth lens group 340 in the optical axis direction, and the light amount adjusting unit 350 is a meter. It is driven and controlled by 630.

The position in the optical axis direction of the second lens group 320 driven by the vibration type drive device 620 is detected by the first linear encoder 770, and the detection result is notified to the CPU 790, so that the position is fed back to the drive of the vibration type drive device 620. To. Similarly, the position in the optical axis direction of the fourth lens group 340 driven by the vibration type drive device 640 is detected by the second linear encoder 775, and the detection result is notified to the CPU 790 to drive the vibration type drive device 640. Will be fed back to. The position of the light amount adjusting unit 350 in the optical axis direction is detected by the aperture encoder 780, and the detection result is notified to the CPU 790, so that the position is fed back to the drive of the meter 630.

In addition to the above configurations, the present invention is applicable to various electronic devices.

That is, it is possible to provide an electronic device provided with a member and the above-mentioned vibration type actuator that drives the position of the member.

The present invention is suitable for a drive actuator.

1 Vibrating actuator 2 Vibrating body 3 Elastic body 31 Protruding part 32 Extension part 4 Piezoelectric element 5 Flexible printed board 51 Hole part 52 Base film 53 Wiring pattern 54 Cover film 55 Space 56 Recessed part 6 Pressurizing member 61 Convex part 62 Free fitting Part 7 Pressurized spring 8 Base 9 Slider 10 Slider holder 11 Ball 12 Rail 206 Ring base 208 Wave washer 209 Pressurized receiving member 211 Rotor 212 Anti-vibration rubber 303 Friction plate 304 Anti-vibration rubber 305 Upper pressurizing member 306 Lower Pressure member 307 Guide bar

Claims (15)

An elastic body and a vibrating body having an electric-mechanical energy conversion element,
The contact body in contact with the vibrating body and
A flexible printed circuit board that supplies power to the electric-mechanical energy conversion element and has a recess on the surface opposite to the surface that comes into contact with the electric-mechanical energy conversion element.
A vibrating actuator including a holding member provided with a protrusion that engages with the recess. The vibrating actuator according to claim 1, wherein the recess is provided in the vicinity of a point where two different nodes of the vibrating wave generated in the vibrating body intersect. The flexible printed board includes a wiring pattern and a non-wiring portion in which the wiring pattern is not formed, and the recess is formed by the wiring pattern provided on both sides of the non-wiring portion and the non-wiring portion. Alternatively, the vibration type actuator according to 2. The vibrating actuator according to claim 3, wherein the flexible printed circuit board has a resin film covering the non-wiring portion and the wiring pattern provided on both sides of the non-wiring portion. The vibrating actuator according to any one of claims 1 to 4, wherein the positions of the vibrating body and the holding member are maintained when the vibrating actuator is driven. The elastic body has a rectangular shape and has a rectangular shape.
A primary out-of-plane bending vibration mode A in which two nodes appear along the longitudinal direction of the elastic body, and
Secondary out-of-plane bending vibration mode B in which three nodes appear along the lateral direction of the elastic body, and
The vibrating actuator according to claim 1 or 2, which is provided at two points on the middle node of the three node lines. The elastic body has a rectangular shape, is provided with a rectangular portion and at least two extending portions independent of each other, and another protrusion provided on the supporting member is in contact with the rectangular portion and the extending portion. The vibrating actuator according to any one of claims 1 to 6. The vibrating actuator according to claim 7, wherein the four corners of the rectangular portion of the elastic body are loosely fitted and supported by a plurality of the other protrusions. The vibrating actuator according to any one of claims 1 to 8, wherein the electric-mechanical energy conversion element is a piezoelectric element provided with a piezoelectric material having a lead content of 1000 ppm or less. The vibrating actuator according to any one of claims 1 to 9, wherein a plurality of the vibrating bodies are arranged with respect to the annular contact body. The vibrating actuator according to any one of claims 1 to 9, further comprising a configuration in which the contact body is sandwiched between the pair of vibrating bodies. With the lens
With the image sensor
The vibrating actuator according to any one of claims 1 to 11 is provided.
An optical device configured to change the relative position of the lens and the image sensor by driving the vibrating actuator. The optical device according to claim 12, wherein the position of the lens is changed by driving the vibrating actuator. The optical device according to claim 12, wherein the position of the image pickup element is changed by driving the vibration type actuator. Members and
The vibrating actuator according to any one of claims 1 to 11 that drives the position of the member.
Equipped with electronic equipment.

Images