JP2020038092A - Particle size distribution measuring device and particle size distribution measuring channel unit - Google Patents

Abstract

To provide a grain size distribution measurement device which does not use prior methods.SOLUTION: A grain size distribution measurement device comprises: a channel for circulating a fluid including a measured substance from an upstream side to a downstream side; a first gap arrangement structure on which open holes with a same shape and with a first aperture are periodically and two-dimensionally arranged on a metal thin film; a second gap arrangement structure on which, open holes with a same shape and with a second aperture smaller than the first aperture are periodically and two-dimensionally arranged on a metal thin film on a downstream side; a light source for radiating an electromagnetic wave penetrating the first and second gap arrangement structures; a detector for detecting the electromagnetic wave transmitting the first and second gap arrangement structure; and a capture amount calculation part for calculating a capture amount for the first gap arrangement structure on the basis of a first standard curve indicating a relationship between transmittance of the electromagnetic wave transmitting the first gap arrangement structure and the capture amount on the basis of the transmittance of the electromagnetic wave transmitting the first gap arrangement structure, and calculating a capture amount for the second gap arrangement structure on the basis of a second standard curve indicating a relationship between transmittance of the electromagnetic wave transmitting the second gap arrangement structure and the capture amount on the basis of the transmittance of the electromagnetic wave transmitting the second gap arrangement structure.SELECTED DRAWING: Figure 9

Description

  The present invention relates to an apparatus for measuring a particle size distribution of an object to be measured in a fluid (gas, liquid). In particular, the present invention relates to an apparatus for measuring a particle size distribution of an object to be measured having a size on the order of micrometers (μm) or more.

  As a method for measuring the particle size distribution of an object having a size on the order of micrometers or more, a “sieving weight method”, a “laser diffraction / scattering method”, and the like are known.

  The “sieving weight method” is a method of classifying an object to be measured with sieves having different openings and measuring the weight of the object to be measured separated into each sieve, and a test method is defined in JIS Z8815. I have.

  The "laser diffraction / scattering method" measures the complex diffraction / scattering pattern of an object to be measured (particle group) with a plurality of detectors having different angles, assumes that the particles are spherical, and uses the Mie scattering theory and the Fraunhofer diffraction theory. Is a method of finding the effective diameter (diffraction scattering diameter) by comparing the theoretical diffraction scattering pattern derived from the above with the actually measured diffraction scattering pattern, and as a volume-based particle size distribution, what size particles are included in what proportion Is measured.

JP 2009-19925 A

  In the "sieving weight method", a large amount of an object to be measured (for example, g order or more) is required in order to obtain sufficient accuracy because a weight is measured by a balance. There is a problem that an object to be measured cannot be measured.

  In addition, the minimum opening of the sieve specified by the JIS standard is 20 μm, and there is a problem that only a particle size distribution larger than that can be measured.

  The "laser diffraction / scattering method" measures the size of particles and the proportion of the particles as a volume-based particle size distribution. Mass)). For example, the PM2.5 measurement does not use the particle counter method (laser diffraction / scattering method) due to this problem.

  In addition, the analysis requires the refractive index of the object to be measured (particles) and the dispersion medium. If the input value of the refractive index is inappropriate, a problem such as generation of a ghost peak or the like occurs. Therefore, it is required to input an accurate value. However, in many cases, there is a problem that obtaining the refractive index of the object to be measured is very troublesome. For example, the refractive index of a typical solvent is generally clarified, but since the object to be measured is individual, the user needs to separately prepare the refractive index of the object to be measured.

  Also, in order to compare the theoretical diffraction scattering pattern with the actually measured diffraction scattering pattern, that is, to perform approximation, there is a large difference between manufacturers and models, calibration is not possible, and the influence of the shape of the measured object is large. There is a problem.

  Therefore, an object of the present invention is to provide a particle size distribution measuring device that does not use a conventional method.

The particle size distribution measuring device according to the present invention, a flow path for flowing the fluid containing the object to be measured from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A light source for irradiating an electromagnetic wave so as to penetrate the first gap arrangement structure and the second gap arrangement structure;
A detector for detecting an electromagnetic wave transmitted through the first gap arrangement structure and the second gap arrangement structure;
From the transmittance of the electromagnetic wave transmitted through the first void-arranged structure, the relationship between the transmittance of the electromagnetic wave transmitted through the first void-arranged structure and the amount of the substance captured by the first void-arranged structure is shown. Based on the first calibration curve, the amount of the substance trapped in the first gap arrangement structure is calculated, and the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure is calculated based on the second gap arrangement structure. The amount of the substance trapped in the second void-arranged structure based on the second calibration curve indicating the relationship between the transmittance of the electromagnetic wave transmitted through the body and the amount of the substance trapped in the second void-arranged structure Calculating a capture amount calculating section,
Is provided.

Further, the particle size distribution measuring device according to the present invention, a flow path for flowing the fluid containing the measured object from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A first light source that irradiates an electromagnetic wave so as to penetrate the first gap arrangement structure;
A first detector for detecting an electromagnetic wave transmitted through the first gap arrangement structure;
A second light source for irradiating an electromagnetic wave so as to penetrate the second gap arrangement structure;
A second detector for detecting an electromagnetic wave transmitted through the second gap arrangement structure;
From the transmittance of the electromagnetic wave transmitted through the first void-arranged structure, the relationship between the transmittance of the electromagnetic wave transmitted through the first void-arranged structure and the amount of the substance captured by the first void-arranged structure is shown. Based on the first calibration curve, the amount of the substance trapped in the first gap arrangement structure is calculated, and the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure is calculated based on the second gap arrangement structure. The amount of the substance trapped in the second void-arranged structure based on the second calibration curve indicating the relationship between the transmittance of the electromagnetic wave transmitted through the body and the amount of the substance trapped in the second void-arranged structure Calculating a capture amount calculating section,
Is provided.

Further, the channel unit for particle size distribution measurement according to the present invention, a channel for flowing the fluid containing the object to be measured from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
Is provided.

  ADVANTAGE OF THE INVENTION According to the particle size distribution measuring device which concerns on this invention, the particle size distribution measuring device of the to-be-measured object in a fluid can be provided. In particular, it is possible to perform a particle size distribution over a wide range of an object to be measured having a size on the order of μm or more.

FIG. 2 is a schematic diagram showing the principle of the particle size distribution measuring device according to the first embodiment. It is the top view (a) and the side view (b) of the through-hole regularly arrange | positioned in the space | gap arrangement structure. FIG. 3 is a diagram illustrating a relationship between a frequency and a transmittance of an electromagnetic wave transmitted through the gap arrangement structure in FIG. 2. FIG. 3 is a diagram illustrating a state in which the transmittance of electromagnetic waves is reduced according to the flow rate of a fluid that passes when an object to be measured in a fluid adheres to the void arrangement structure in FIG. 2. FIG. 5 is a diagram illustrating an example of a relationship between a decrease in the transmittance of the electromagnetic wave illustrated in FIG. 4 and the number and the mass of the particles as the object to be measured. FIG. 2 is a diagram illustrating a relationship between a frequency and a transmittance of an electromagnetic wave transmitted through three gap arrangement structures illustrated in FIG. 1. FIG. 7 is a graph showing a change in transmittance of electromagnetic waves for each of the three gap arrangement structures shown in FIG. 6. FIG. 8 is a diagram illustrating a relationship among a mass, a number, and a volume of particles corresponding to a change in transmittance of an electromagnetic wave for each of the three void arrangement structures in FIG. 7. 1 is a schematic diagram illustrating a configuration of a particle size distribution measuring device according to Embodiment 1. It is a schematic diagram showing an example of connection of a void arrangement structure and a syringe. 4 is a graph of a calibration curve showing the relationship between the mass of particles and the transmittance for each of the four void arrangement structures (No. 1 to No. 4). It is a graph of a calibration curve which shows the relationship between the number of particles and transmittance | permeability for every four space arrangement | positioning structures (No. 1-No. 4). FIG. 11 is a diagram illustrating a mass distribution for each particle size calculated based on the calibration curve of FIG. 10 in Example 1. FIG. 14 is a diagram illustrating an example of mass% for each particle size calculated based on the mass distribution for each particle size in FIG. 13. FIG. 13 is a diagram illustrating a particle number distribution for each particle size calculated based on the calibration curve of FIG. 12 in Example 1. FIG. 16 is a diagram illustrating an example of the particle number% for each particle size calculated based on the particle number distribution for each particle size in FIG. 15. FIG. 7 is a schematic diagram illustrating a configuration of a flow channel unit in a particle size distribution measurement device when a fluid is air in Embodiment 2. It is the schematic which shows the structure of the capture thing isolation | separation collection | recovery apparatus which collect | recovers the aerosol captured by each space | gap arrangement structure. It is a graph of the calibration curve which shows the relationship between the mass of the isolate | separated substance and the transmittance | permeability for every four space arrangement | positioning structures (No. 1-No. 4). FIG. 20 is a diagram showing a mass distribution for each particle size calculated based on the calibration curve of FIG. 19 in Example 2. FIG. 21 is a diagram illustrating an example of mass% for each particle size calculated based on the mass distribution for each particle size in FIG. 20. It is the top view (a) and side view (b) of the through-hole regularly arrange | positioned in the space | gap arrangement structure of a modification. FIG. 9 is a schematic diagram illustrating a configuration of a particle size distribution measuring device according to a second embodiment.

The particle size distribution measuring device according to the first aspect, a flow path that allows the fluid containing the measured object to flow from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A light source for irradiating an electromagnetic wave so as to penetrate the first gap arrangement structure and the second gap arrangement structure;
A detector for detecting an electromagnetic wave transmitted through the first gap arrangement structure and the second gap arrangement structure;
From the transmittance of the electromagnetic wave transmitted through the first void-arranged structure, the relationship between the transmittance of the electromagnetic wave transmitted through the first void-arranged structure and the amount of the substance captured by the first void-arranged structure is shown. Based on the first calibration curve, the amount of the substance trapped in the first gap arrangement structure is calculated, and the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure is calculated based on the second gap arrangement structure. The amount of the substance trapped in the second void-arranged structure based on the second calibration curve indicating the relationship between the transmittance of the electromagnetic wave transmitted through the body and the amount of the substance trapped in the second void-arranged structure Calculating a capture amount calculating section,
Is provided.

The particle size distribution measuring device according to the second aspect, a flow path that allows the fluid containing the measured object to flow from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A first light source that irradiates an electromagnetic wave so as to penetrate the first gap arrangement structure;
A first detector for detecting an electromagnetic wave transmitted through the first gap arrangement structure;
A second light source for irradiating an electromagnetic wave so as to penetrate the second gap arrangement structure;
A second detector for detecting an electromagnetic wave transmitted through the second gap arrangement structure;
From the transmittance of the electromagnetic wave transmitted through the first void-arranged structure, the relationship between the transmittance of the electromagnetic wave transmitted through the first void-arranged structure and the amount of the substance captured by the first void-arranged structure is shown. Based on the first calibration curve, the amount of the substance trapped in the first gap arrangement structure is calculated, and the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure is calculated based on the second gap arrangement structure. The amount of the substance trapped in the second void-arranged structure based on the second calibration curve indicating the relationship between the transmittance of the electromagnetic wave transmitted through the body and the amount of the substance trapped in the second void-arranged structure Calculating a capture amount calculating section,
, A particle size distribution measuring device.

In the particle size distribution measuring device according to a third aspect, in the second aspect, the flow path extends from the upstream side to the downstream side along the first direction,
The first light source and the second light source are a common light source, and the common light source irradiates an electromagnetic wave so as to penetrate the first gap arrangement structure and the second gap arrangement structure,
The first detector and the second detector are a common detector, and the common detector detects an electromagnetic wave transmitted through the first gap arrangement structure and the second gap arrangement structure. It may be detected.

  In the particle size distribution measuring device according to a fourth aspect, in the second or third aspect, the flow path includes at least two or more locations where the flow direction changes from upstream to downstream, and the first gap The arrangement structure and the second gap arrangement structure may be provided at a position in the flow path where the flow direction changes.

  The particle size distribution measuring apparatus according to a fifth aspect, in any one of the first to fourth aspects, further includes a storage unit that records the first calibration curve and the second calibration curve. You may.

  In the particle size distribution measuring apparatus according to a sixth aspect, in any one of the first to fifth aspects, the first calibration curve may include two adjacent peaks of the electromagnetic wave transmitted through the first void-arranged structure. Shows the relationship between the transmittance of the peak point on the lower frequency side than the dip point and the amount of the substance trapped in the first gap arrangement structure, and the second calibration curve is the second gap arrangement. 9 shows a relationship between the transmittance at the peak point on the lower frequency side than the dip point between two adjacent peaks of the electromagnetic wave transmitted through the structure and the amount of the substance trapped in the second void-arranged structure. You may.

  In the particle size distribution measuring apparatus according to a seventh aspect, in the first aspect, the light source may include the first gap arrangement structure and the second gap arrangement structure from an upstream side of the first gap arrangement structure. An electromagnetic wave may be irradiated so as to penetrate.

  In the particle size distribution measuring apparatus according to an eighth aspect, in the first aspect, the light source may include the second gap arrangement structure and the first gap arrangement structure from a downstream side of the second gap arrangement structure. An electromagnetic wave may be irradiated so as to penetrate.

The particle size distribution measurement flow channel unit according to the ninth aspect, a flow channel that allows the fluid containing the measured object to flow from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
Is provided.

  Hereinafter, a particle size distribution measuring apparatus according to an embodiment will be described with reference to the accompanying drawings. In the drawings, substantially the same members are denoted by the same reference numerals.

(Embodiment 1)
<About the principle of the particle size distribution measurement device>
FIG. 1 is a schematic diagram showing the principle of a particle size distribution measuring device 10 according to the first embodiment. FIG. 2 is a plan view (a) and a side view (b) of the through holes 5 regularly arranged in the gap arrangement structure 14. FIG. 3 is a diagram showing the relationship between the frequency of the electromagnetic wave transmitted through the gap arrangement structure 14 of FIG. 2 and the transmittance. FIG. 4 is a diagram showing a state in which the transmittance of electromagnetic waves is reduced according to the flow rate of the fluid passing when an object to be measured in the fluid adheres to the gap arrangement structure 14 of FIG. FIG. 5 is a diagram illustrating an example of a relationship between a decrease in the transmittance of the electromagnetic wave illustrated in FIG. 4 and the number of particles to be measured and the particle mass. FIG. 6 is a diagram showing a relationship between the frequency and the transmittance of the electromagnetic wave transmitted through the three gap arrangement structures 14a, 14b, and 14c in FIG. FIG. 7 is a graph showing a change in transmittance of electromagnetic waves for each of the three gap arrangement structures 14a, 14b, and 14c in FIG. FIG. 8 is a diagram showing the relationship between the mass, the number, and the volume of the particles corresponding to the change in the transmittance of the electromagnetic wave for each of the three void arrangement structures 14a, 14b, and 14c in FIG.

  FIG. 1 shows an outline of a particle size distribution measuring apparatus 10 according to the first embodiment. In this particle size distribution measuring device 10, as shown in FIG. 1, a plurality of types of void-arranged structures 14a, 14b, and 14c having different hole sizes D3, D2, and D1 of the through-holes 5 are used. Classification (separation) of the measurement objects 2a, 2b, and 2c is performed. The type (size of pore size) of the void-arranged structures 14a, 14b, 14c used for classification is determined by measuring the particle size distribution to be finally determined as shown in FIG. Select to match the boundary of the range (the boundary between bar graphs). Further, the direction in which the fluid 1 including the DUTs 2a, 2b, and 2c flows through the gap arrangement structures 14a, 14b, and 14c is referred to as a first direction 3 (z direction). The gap arrangement structures 14a, 14b, and 14c have a larger dimension along the first direction 3 from the gap arrangement structure 14a having the largest hole dimension D3 to the gap arrangement structure 14c having the smallest hole dimension D1. The fluids 1 are arranged so as to pass in this order. As a result, first, the large particles 2a are captured (separated) by the void-arranged structures 14a, and then, the particles 2b of an intermediate size are captured (separated) by the void-arranged structures 14b, and finally, the small particles 2c Is captured (separated) by the void arrangement structure 14c. Such an arrangement enables classification even when particles 2a, 2b, and 2c having different sizes are included.

  In each of the void arrangement structures 14, the through holes 5 shown in FIG. 2 are periodically and regularly two-dimensionally arranged. In FIG. 2, the through hole 5 is a square with one side D, and the pitch P of the through hole 5 and the thickness T are shown. This gap arrangement structure 14 has an electromagnetic wave transmission characteristic as shown in FIG. Specifically, it has a transmission region through which electromagnetic waves pass in the terahertz band, and the transmission region has two adjacent peaks and a dip point therebetween. Further, on the lower frequency side than the transmission region, there is a cut-off region that hardly transmits an electromagnetic wave, and on the higher frequency side than the transmission region, there is a diffraction region having zero-order diffraction points and first-order diffraction points. In the void arrangement structure 14, by changing the structure of the through hole 5 (pitch P and hole size D, see FIG. 2), the frequency range of the transmission region, the frequency of the dip point, the low frequency side of the dip point and the high frequency The frequency of the peak on the side changes.

  In addition, when an object to be measured is present near the space-arranged structure as shown in FIG. 1, the electromagnetic wave transmission characteristics are changed as shown in FIG. Specifically, when the object to be measured in the fluid adheres to the void-arranged structure, the transmittance of the electromagnetic wave to be transmitted decreases according to the flow rate of the passing fluid, that is, the amount of the measured object to be captured.

FIG. 5 shows an example of the calibration curve. In FIG. 5, an aqueous solution (micromod manufactured by Micromod) of spherical polystyrene particles having an average particle size of 2.0 [μm] having a concentration of 50 [mg / mL] is prepared and diluted to prepare a plurality of types of particle solutions having known concentrations. In addition, the graph shows the transmittance change before and after separation when they are separated by a gap arrangement structure having a pore size of 1.8 [μm]. Here, among the electromagnetic wave transmission characteristics of FIG. 3, the largest change in transmittance can be used by using the change in transmittance at the peak point on the lower frequency side than the dip point. The location where the transmittance change is measured is not limited to the peak point on the lower frequency side than the dip point. The location where the transmittance change is measured may be, for example, a peak point or a dip point on the higher or lower frequency side than the dip point. Furthermore, other points may be used.
By using the calibration curve of FIG. 5, the number of particles or the particle mass of the measured object can be obtained from the measured change in transmittance.

Next, an example of particle size distribution measurement by classification using the three void arrangement structures 14a, 14b, and 14c in FIG. 1 will be described.
First, the electromagnetic wave transmission characteristics of each of the gap-arranged structures 14a, 14b, and 14c after the classification are measured, and the electromagnetic wave transmission characteristics that are measured in advance for each of the gap-arranged structures 14a, 14b, and 14c before the classification are performed. Compare with.

  The three groups of graphs for each frequency shown in FIG. 6 correspond to the electromagnetic wave transmission characteristics of the three types of void-arranged structures 14a, 14b, and 14c shown in FIG. Also, the light-colored graphs in each group indicate the electromagnetic wave transmission characteristics before classification (characteristics of the void-arranged structure alone), and the darker colors indicate the electromagnetic wave transmission characteristics after classification (characteristics of the void-arranged structures including the separated material). The characteristics are shown. The change in the electromagnetic wave transmission characteristics before and after the classification is typically represented by a frequency change at a dip point (see FIG. 3 for definition) or a transmittance change at an arbitrary frequency in a pass band (see FIG. 6). And digitize it. The amount of change in the electromagnetic wave transmission characteristics before and after the classification is correlated with the amount of the measured object separated from the fluid by the classification and captured by the void-arranged structure. That is, by measuring the amount of change in the electromagnetic wave transmission characteristics of each of the gap-arranged structures 14a, 14b, and 14c before and after classification, it becomes possible to know the amount of the measured object captured by each gap-arranged structure.

  FIG. 7 is a graph summarizing the amount of change in the electromagnetic wave transmission characteristics (the amount of change in transmittance before and after classification) of each of the void-arranged structures obtained in FIG. The horizontal axis in FIG. 7 indicates the particle size range based on the pore sizes D1 to D3 of the void arrangement structure. The vertical axis in FIG. 7 indicates the transmittance change amount before and after classification, that is, the difference between “transmittance before classification” and “transmittance after classification”. From FIG. 7, the final particle size distribution can be obtained by converting the vertical axis into the mass, number, volume, and the like of the separated object using the calibration curve in FIG. 5.

The particle size distribution shown in FIG. 8 was obtained by transforming the vertical axis of the result of FIG. 7 using the calibration curve of FIG. 5 for the transmittance change amount before and after classification of each void arrangement structure of FIG. Things.
Note that an object to be measured smaller than the hole size D1 cannot be observed because it passes through the void arrangement structure 14c. In FIG. 8, all the objects to be measured having the hole size D3 or more are captured by the void arrangement structure 14a. That is, in order to obtain a detailed particle size distribution of the measured object having the pore size D3 or more, it is necessary to classify the object more finely. In this case, it is necessary to prepare a void arrangement structure having a corresponding hole size.

<Configuration of particle size distribution measurement device>
FIG. 9 is a schematic diagram showing a configuration of the particle size distribution measuring device 10 according to the first embodiment. In FIG. 9, for the sake of convenience, the direction in which the fluid 1 flows is shown as the z direction. In addition, the direction is the x direction from the near side of the sheet of FIG. 9 to the sheet of paper, and the y direction is from the bottom to the top of FIG.
The particle size distribution measuring device 10 includes a flow path 11 for flowing the fluid 1 containing the object to be measured from the upstream side to the downstream side, a first void arrangement structure 14a disposed on the upstream side of the flow path 11, and a downstream side. , The light source 16 for irradiating the electromagnetic wave 4, the detector 17 for detecting the electromagnetic wave 4, and the first and second gap arrangement structures 14b. A capture amount calculation unit 25a for calculating the amount of the substance. The first void-arranged structure 14a is provided so as to allow the fluid 1 to pass through the flow channel 11, and is formed of a metal thin film having a two-dimensionally periodically arranged through-hole having the first opening diameter in the metal thin film. Consists of a thin film. The second gap arrangement structure 14b is provided downstream of the first gap arrangement structure 14a in the flow path 11 so as to allow the fluid 1 to pass therethrough, and the second thin film made of metal has a second opening smaller than the first opening diameter. It is made of a metal thin film in which through holes of the same shape having the same diameter are periodically arranged two-dimensionally. The light source 16 emits the electromagnetic wave 4 so as to penetrate the first gap arrangement structure 14a and the second gap arrangement structure 14b. The detector 17 detects the electromagnetic wave 4 transmitted through the first gap arrangement structure 14a and the second gap arrangement structure 14b. The electromagnetic wave 4 is irradiated so as to intersect the z direction. The trapping amount calculation unit 25a calculates the amount of the substance trapped in the first gap arrangement structure from the transmittance of the electromagnetic wave transmitted through the first gap arrangement structure 14a based on the first calibration curve. Further, the trapping amount calculation unit 25a calculates the amount of the substance trapped in the second gap arrangement structure 14b based on the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure 14b based on the second calibration curve. . The first calibration curve 24a indicates the relationship between the transmittance of the electromagnetic wave transmitted through the first gap arrangement structure 14a and the amount of the substance captured by the first gap arrangement structure 14a. Further, the second calibration curve 24b shows the relationship between the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure 14b and the amount of the substance captured by the second gap arrangement structure 14b.

According to the particle size distribution measuring device 10, it is possible to solve the problems of the prior art and to provide a particle size distribution measuring device for an object to be measured in a fluid. In particular, it is possible to perform a particle size distribution over a wide range of an object to be measured having a size on the order of μm or more. In comparison with the conventional “sieving weight method”, a very small amount (ng to mg order) of an object to be measured can be measured, and an object to be measured having a nonstandard size of 20 μm or less can be measured. In addition, in comparison with the conventional “laser diffraction / scattering method”, it is possible to perform measurement based on the weight (mass) of an object to be measured, which is difficult by the method, and it is possible to provide direct measurement without approximation.
Further, according to the particle size distribution measuring device 10, the particle size distribution of the measured object can be measured in real time while the fluid containing the measured object is allowed to flow through the flow path.

The captured amount calculation unit 25a of the particle size distribution measurement device 10 is realized as a program executed in the computer device 20, and exists on the storage unit 22 of the computer device 20 in the block diagram of FIG. 9, for example. At the time of execution, it is read from the storage unit 22 and executed by the processing unit 21.
In addition, the first calibration curve 24a and the second calibration curve 24b exist in the storage unit 22 of the computer device 20, for example, in the block diagram of FIG.

  Hereinafter, components constituting the particle size distribution measuring device 10 will be described.

<Flow path>
The fluid 1 including the objects to be measured 2a, 2b, and 2c flows from the upstream side to the downstream side through the flow path 11. Therefore, the flow channel 11 may be any type as long as it can flow the fluid 1 such as a liquid or a gas. Further, when irradiating the electromagnetic wave from the outside of the flow path 11 to the inside, it is necessary that the irradiated electromagnetic wave is transparent. Note that “transparent” may be any material that transmits an electromagnetic wave by 50% or more, for example. Further, the flow channel 11 may be provided in a straight line as shown in FIG. 9, but is not limited to this. For example, as described in a second embodiment described later, the flow channel 11 may include two or more locations where the flow channel direction changes. That is, the flow path 11 may be provided in a zigzag manner as long as it is one and does not branch.

<First gap arrangement structure and second gap arrangement structure>
The first gap arrangement structure 14a and the second gap arrangement structure 14b allow the fluid 1 to pass through the flow path 11. The first void arrangement structure 14a is made of a metal thin film in which through holes 5a of the same shape having a first opening diameter D3 are periodically and two-dimensionally arranged in a metal thin film. The second void arrangement structure 14b is formed of a metal thin film in which through holes 5b of the same shape having a second opening diameter D2 smaller than the first opening diameter D3 are periodically and two-dimensionally arranged in the metal thin film. In FIGS. 1 and 2, the through holes 5, 5a, 5b, 5c are square, but are not limited thereto. The through-hole may be, for example, circular, elliptical, polygonal, or the like. In addition, a shape having a protrusion toward the inside of a square opening or a shape that is not isotropic in a plane such as a rectangle in FIG. 22 may be used. It is known that such a shape shows a dip point even when the light is perpendicularly incident on a surface.
Further, in the void-arranged structure, the through-holes having the same shape may be organically two-dimensionally arranged. Although the hole size of the through-hole is shown as one side of a square in FIGS. 1 and 2, it is not limited to this. For example, as the hole size of the through hole, for example, the length of the longest diagonal line in the square of the through hole may be used. In addition, as shown in Examples described later, it is desirable to use a corresponding hole size according to the shape of the measured object.

<Light source>
The electromagnetic wave 4 is irradiated by the light source 16 so as to penetrate the first gap arrangement structure 14a and the second gap arrangement structure 14b. Note that the number of light sources 16 is not limited to one as shown in FIG. For example, as shown in FIG. 23, a plurality of light sources such as a first light source 16a, a second light source 16b, and a third light source 16c may be included. In this case, each of the light sources 16a, 16b, and 16c corresponds to each of the gap arrangement structures 14a, 14b, and 14c. Further, in FIG. 9, the light source 16 irradiates the electromagnetic wave 4 to the gap arrangement structures 14 a, 14 b, 14 c, and 14 d in the flow channel 11 from outside the flow channel 11, but is not limited thereto. The light source may be arranged in the light source. Further, the light source 16 irradiates from the upstream side to the downstream side in FIG. 9, but is not limited to this. Conversely, irradiation may be performed from the downstream side to the upstream side.
In addition, the light source 16 may irradiate an electromagnetic wave in a frequency band corresponding to a transmission region of the gap arrangement structure to be used. For example, as shown in FIG. 2, FIG. 3, and FIG. 5, for example, an electromagnetic wave in a frequency band of 30 THz to 300 THz, preferably 60 THz to 120 THz may be irradiated. Specifically, as the light source 16, a far-infrared ray source to a near-infrared ray source can be used.

<Detector>
The detector 17 detects the electromagnetic wave transmitted through the first gap arrangement structure 14a and the second gap arrangement structure 14b. Note that the number of detectors 17 is not limited to one as shown in FIG. For example, as shown in FIG. 23, a plurality of detectors such as a first detector 17a, a second detector 17b, and a third detector 17c may be included. In this case, each of the detectors 17a, 17b, and 17c corresponds to each of the gap arrangement structures 14a, 14b, and 14c. Further, in FIG. 9, the detector 17 detects the electromagnetic waves 4 transmitted from the outside of the flow path 11 through the void-arranged structures 14a, 14b, 14c, and 14d in the flow path 11, but is not limited thereto. A detector may be arranged in the road 11.
In the case of FIG. 9, the electromagnetic wave transmission characteristics of each of the gap arrangement structures 14a, 14b, 14c, and 14d are separated from the transmitted light transmitted through the plurality of gap arrangement structures 14a, 14b, 14c, and 14d. I have.

<Computer device>
As the computer device 20, a general-purpose computer device can be used. For example, as shown in FIG. 9, the computer device 20 includes a processing unit 21, a storage unit 22, and a display unit 23. Note that the input device, the storage device, the interface, and the like may be further included.
<Processing unit>
The processing unit 21 may be, for example, a central processing operator (CPU), a microcomputer, or a processing device that can execute a computer-executable instruction.
<Storage unit>
The storage unit 22 may be, for example, at least one of a ROM, an EEPROM, a RAM, a flash SSD, a hard disk, a USB memory, a magnetic disk, an optical disk, a magneto-optical disk, and the like.
The storage unit 22 includes a calibration curve 24 and a program 25.
<Calibration curve>
The calibration curve 24 includes a first calibration curve 24a, a second calibration curve 24b, a third calibration curve 24c, and a fourth calibration curve 24d. Each of the calibration curves 24a to 24d corresponds to each of the gap arrangement structures 14a to 14d. Note that a calibration curve corresponding to each void arrangement structure to be used is stored in advance.
The calibration curve, for example, as shown in FIG. 5, shows the relationship between the difference between the transmittance of the electromagnetic wave transmitted through the void-arranged structure before and after classification and the amount of the substance trapped in the void-arranged structure, or the corresponding number of particles. Show. That is, the amount of trapped substances or the number of particles can be calculated from the transmittance difference of the electromagnetic waves transmitted through the void-arranged structure before and after classification. Note that the calibration curve can be represented by a linear function as shown in FIG.
<Program>
The program 25 only needs to include the capture amount calculation unit 25a. At the time of execution, the capture amount calculation unit 25a is read from the storage unit 22 and executed by the processing unit 21. Using the calibration curve 24, the trapping amount calculation unit 25a calculates the amount of trapped substances or the number of particles from the difference in the transmittance of electromagnetic waves transmitted through the void-arranged structure before and after classification.
Note that a calibration curve calculation unit 25b may be included as necessary. The calibration curve calculation unit 25b associates, as a calibration curve, the difference between the transmittance of the electromagnetic wave transmitted through the void-arranged structure before and after the classification and the amount of the substance trapped in the void-arranged structure, or the corresponding number of particles. At the time of execution, the calibration curve calculation unit 25b is also read from the storage unit 22 and executed by the processing unit 21.
<Display unit>
The display unit 23 only needs to be able to display the particle size distribution, for example. Further, a calibration curve may be displayed. Note that the color display is visually easy to understand, but is not limited thereto, and may be a monochrome display. Alternatively, it may be one that can only digitally display numbers.

(Example 1: Example of particle size distribution measurement of polystyrene spherical particles in pure water)
As the object to be measured, spherical polystyrene particle aqueous solutions (samples 1 to 4) of Micromod shown in Table 1 below were prepared. The average particle size and concentration [mg / mL] are reagent specifications. One particle volume was calculated from the average particle size. The mass of one particle was calculated from the density of polystyrene of 1.05 [g / cm ³ ] and the volume of one particle. The particle number concentration [particles / mL] was calculated from the concentration and the mass of one particle. An object to be measured was prepared by mixing these four types of solutions.

  Further, a standard solution for a calibration curve was prepared as follows. First, using pure water, sample 1 was diluted 1600 times, sample 2 was diluted 2400 times, sample 3 was diluted 3800 times, and sample 4 was diluted 9400 times. Further, using diluent, the dilutions were doubled (standard solution (1)), tripled (standard solution (2)), five-fold (standard solution (3)), and ten-fold (standard solution (4)). ) To obtain standard solutions (1) to (4). Table 2 shows the concentration of the standard solution and the particle number concentration of each sample. In addition, 1 [mL] of the standard solution (3) of each sample was collected, and the mixed solution was used as an object to be measured.

In the particle size distribution measurement of the object to be measured, measurement is performed in four particle size ranges (d1 to d4) of 1 μm <d4 ≦ 4 μm, 4 μm <d3 ≦ 7 μm, 7 μm <d2 ≦ 11 μm, and 11 μm <d1. Four types of void-arranged structures (No. 1 to No. 4) having holes of the same dimensions as those of Example 1 were prepared. Table 3 shows their structural design values.
The production of the void-arranged structure was performed as follows. First, after a Ni-made void arrangement structure is manufactured by an electroforming method, an Au surface layer having a thickness of about 30 nm is formed on the entire surface of the Ni-made void arrangement structure by electroless plating. I got a body. The outer dimensions of the space-arranged structure were 6 mmφ, and the fluid was allowed to pass through the entire surface.

First, a calibration curve was created in the following procedure.
Void arrangement structure No. 1 to No. The electromagnetic wave transmission characteristics before classification of No. 4 were measured by FT-IR. From the measurement results of the electromagnetic wave transmission characteristics of the gap-arranged structure before classification (before separation), the frequency band in which the passage region occurs is determined by the gap-arranged structure No. 1 to No. 4 at the frequency of the dip point (see FIG. 4), 1 is about 16 [THz], and the void arrangement structure No. 2 is about 26 [THz], and the void arrangement structure No. 3 is about 45 [THz], and the void arrangement structure No. 4 was about 180 [THz].

  Subsequently, the void arrangement structure No. 1, the standard solution (1) to (4) of sample 1 and the void arrangement structure No. 2, the standard solutions (1) to (4) of sample 2 and the void-arranged structure No. 3, the standard solutions (1) to (4) of sample 3 and the void arrangement structure No. Sample 4 was passed through standard solutions (1) to (4) of sample4. The liquid was passed through the syringe by dropping 1 [mL] of the standard solution, making up to 10 [mL] with pure water, and then using a syringe pump at a flow rate of 5 [mL / min]. After the passage of the standard solution, 20 [mL] of pure water was passed at the same flow rate to perform washing. The void-arranged structure after the washing was dried at about 37 ° C. for about 15 hours to obtain a sample for measuring the electromagnetic wave characteristics of the void-arranged structure after the particles were captured. The connection between the cavity arrangement structure and the syringe was performed using, for example, a flow path jig (T3Z513-1010 to -1012), a ring-shaped silicon rubber packing, and a package jig shown in FIG. In this case, the luer lock structure at the tip of the flow path jig T3Z513-1012 is connected to the syringe.

  Subsequently, the electromagnetic wave transmission characteristics of the void-arranged structure after particle capture (classification) (after drying) were measured by FT-IR. Further, as a change in the electromagnetic wave transmission characteristics of the gap-arranged structure before and after classification, a change in transmittance at a peak point of a pass band appearing on the low frequency side of the dip point was obtained as a representative value. Table 4 shows the void arrangement structure No. 1 to No. The measured values of the transmittance at the low frequency side peak point before the classification of No. 4 and after the classification of the standard solutions (1) to (4) are shown. In addition, FIGS. 11 and 12 show the results and the calibration curves prepared from the concentrations of the standard solutions (1) to (4) of Samples 1 to 4 in Table 2 and the particle number concentration.

  In this example, in order to obtain the calibration curve, the concentration of the standard solution and the particle number concentration in Table 2 are obtained from the concentration as the reagent standard in Table 1, but in order to improve the accuracy of the calibration curve, The concentration of the standard solution and the particle number concentration may be determined by actual measurement. In this case, for example, the concentration can be measured by QCM (quartz crystal microbalance method), and the particle number concentration can be measured by counting using a hemocytometer. The specific method is described in Example 2.

Next, the particle size distribution of the measured object (a solution obtained by collecting and mixing 1 mL of the standard solution (3) of each sample) was measured.
First, a device 10 for measuring a particle size distribution of an object to be measured shown in FIG. 9 was prepared. As shown in FIG. 10, the particle size distribution measuring device 10 includes a flow path jig 12, a silicone rubber packing 13, a package jig 15, and gap arrangement structures 14a, 14b, 14c, and 14d. In addition, the four types of gap arrangement structures 14a, 14b, 14c, and 14d indicate that the fluid 1 moves from the gap arrangement structure having the largest pore size (No. 1) to the smallest gap arrangement structure (No. 4). The holes are arranged so as to pass through in the order of the hole size.

Void arrangement structure No. 1 to No. The electromagnetic wave transmission characteristics before classification (before separation) of No. 4 were measured by FT-IR.
Subsequently, 4 [mL] of the object to be measured was dropped into the syringe, the volume was increased to 10 [mL] with pure water, and then the particle size distribution of FIG. 9 was measured using a syringe pump at a flow rate of 5 [mL / min]. The solution was passed through the measuring device.
After the passing, 20 [mL] of pure water was passed at the same flow rate to wash.
After the cleaning, the space arrangement structure No. 1 to No. 4 was taken out and dried at about 37 ° C. for about 15 hours. 1 to No. 4 was measured.

As a change in the electromagnetic wave transmission characteristics of the void-arranged structure before and after classification (before and after separation), a change in transmittance at a peak point of a passing region appearing on the low frequency side of the dip point was obtained as a representative value.
Table 5 shows the void arrangement structure No. 1 to No. 4 shows the measured values of the transmittance at the low frequency side peak point before and after classification (before and after separation) of the DUT.
FIGS. 13 to 16 show the results, the particle size distribution chart of the measured object based on the mass obtained by the calibration curves of FIGS. 11 and 12, and the particle size distribution chart based on the number of particles.
13 to 16 show the particle size distribution relating to mass and the number of particles, but it is also possible to obtain a particle size distribution relating to volume from Table 1.

(Example 2: Example of particle size distribution measurement of PM in the atmosphere)
In the particle size distribution measurement of aerosols such as PM2.5 and PM10 in the atmosphere, four particle size ranges (d1 to d4) of 1 μm <d4 ≦ 4 μm, 4 μm <d3 ≦ 7 μm, 7 μm <d2 ≦ 11 μm, and 11 μm <d1. It was decided to measure. Therefore, four types of void arrangement structures (No. 1 to No. 4) having holes having the same dimensions as the range boundary value were prepared. (See Table 3)
As shown in FIG. 17, a particle size distribution measuring channel composed of the channel jig 12, the silicone rubber packing 13, the package jig 15, and the void arrangement structures (No. 1 to No. 4) 14a, 14b, 14c, and 14d. Unit 28 was used. In the particle size distribution measurement channel unit 28, the atmosphere 1a is moved from the void arrangement structure (No. 1) having the largest pore size to the void arrangement structure (No. 4) having the smallest pore size. Atmospheric suction was performed by the suction pump 19 so as to pass through in the order of size.
In addition, three sets of devices having the same configuration as the particle size distribution measuring device were prepared and used for preparing a calibration curve.

  At the same time and at the same time, air suction was performed at the same place using the particle size distribution measurement device and three sets of calibration curve creation devices. Suction is performed at a flow rate of 10 [L / min], the suction time is changed to 60 [min] in the particle size distribution measuring device, and the suction time is changed in three sets in the calibration curve creating device to 30, 60, 90 [min]. ].

The calibration curve was prepared according to the following procedure.
The electromagnetic wave transmission characteristics of the void-arranged structure used in the calibration curve creating device before suction were measured by FT-IR.
The void-arranged structure was collected from the calibration curve creating device after suction, and the electromagnetic wave transmission characteristics after suction were measured by FT-IR.
FIG. 18 is a schematic diagram illustrating the configuration of the captured object recovery device 30. One set of the gap arrangement structure 14 and the package jig 15 for which the measurement of the electromagnetic wave transmission characteristics after the suction has been completed is configured as shown in FIG. 10 and connected to the syringe 31 containing the cleaning solvent 32. The captured matter recovery device 30 was configured. As shown in FIG. 18, the solvent 32 was separated from the surface on the suction pump side (the surface on the exhaust side) of the gap arrangement structure 14 at the time of atmospheric suction by flowing the solvent 32 with a syringe pump. The aerosol 33 was backwashed and collected. The solvent was ethanol, the amount of the solvent was 20 [mL], and the flow rate was 20 [mL / min]. The void-arranged structure 14 has a feature that, due to its structure, compared with a general membrane filter, the separated material can be substantially recovered by backwashing, and the recovery rate is approximately 95% or more.

Next, the aerosol recovery liquid obtained by backwashing is centrifuged, the aerosol is separated by sedimentation, and the supernatant is discarded to concentrate. Finally, the amount of the solution in which the recovered aerosol is dispersed is 100%. [μL] of the recovered liquid was obtained.
Using this collected liquid and the QCM sensor device, the aerosol in the collected liquid was quantified. The QCM sensor uses a 9 cm frequency (manufacturing range: 100 ng to 30 μg) QCM sensor chip manufactured by Tama Device Co., and drops 100 [μL] of the recovery solution onto a 5 mmφ QCM electrode, and after drying the solvent, The mass of the aerosol remaining on the top was measured.

According to the above-described procedure, the amount of change in the electromagnetic wave transmission characteristics (the transmittance at the peak point on the low frequency side as a representative value as in Example 1) of the gap-arranged structure due to the aerosol separation and separation on the gap-arranged structure were obtained. The correlation between the masses of the aerosols was determined and used as a calibration curve.
FIG. 19 shows the obtained calibration curve.

  In the present embodiment, the method using the QCM sensor has been described. However, the number of aerosols in the collected liquid may be similarly counted using a hemocytometer or image analysis using the collected liquid. Table 6 shows the results of counting the number of particles obtained by image analysis.

The particle size distribution of the aerosol was determined by the following procedure.
The void arrangement structure No. of the particle size distribution measuring device. 1 to No. The electromagnetic wave transmission characteristics of Sample No. 4 before separation were measured by FT-IR.
Subsequently, air suction was performed, the void-arranged structure was collected from the particle size distribution measurement device after suction, and the electromagnetic wave transmission characteristics after suction were measured by FT-IR.
Table 7 shows the measurement results. 20 and 21 show the results and the measurement results of the particle size distribution of the aerosol in the atmosphere obtained from the calibration curve in FIG.

(Modification)
In the embodiment, as the void arrangement structure, the void arrangement structure 14 in which the square through-holes 5 shown in FIG. 2 are two-dimensionally arranged in a square lattice is used, but the present invention is not limited to this structure. Any structure is possible as long as it is a structure capable of precise size exclusion separation, that is, a structure in which through holes of the same shape are arranged. For example, when the object to be measured is assumed to be spherical, a structure in which round holes are arranged in a square lattice or a triangular lattice is more desirable.
Further, by performing the particle size distribution measurement using a plurality of types of void arrangement structures having different hole shapes, information on the shape of the object to be measured (for example, whether the shape is highly symmetric such as a sphere or a square, an ellipse, It is also possible to obtain a low shape such as a rectangular parallelepiped).

  As a modified example, three types of void arrangement structures No. shown in FIG. 5-No. 7 was prepared. Void arrangement structure No. Reference numeral 5 denotes a structure of the through-hole 5, in which the pitch P2 in the y-direction is longer than the pitch P1 in the x-direction, and the through-hole 5 has a rectangular shape in which the length D2 in the y-direction is longer than the length D1 in the x-direction. Void arrangement structure No. Reference numeral 7 denotes a structure of the through hole 5, wherein the pitch P1 in the x direction is longer than the pitch P2 in the y direction, and the through hole 5 has a rectangular shape in which the length D1 in the x direction is longer than the length D2 in the y direction. In addition, the void arrangement structure No. 6 is a void arrangement structure No. in Table 3. 3, and the through-hole 5 has a square shape.

In addition, photosensitive resin particles having dimensions of L4.5 μm × W3.5 μm × T3.5 μm were prepared by a photolithography process, and the aqueous solution was used as a measurement object to perform separation under the same conditions, before and after classification (before and after separation). The changes in the electromagnetic wave transmission characteristics were compared.
Table 9 shows the results. This result indicates that the transmittance (separation rate) changes according to the direction of the rectangular parallelepiped particles, which are the objects to be measured, when passing through the through holes.

(Embodiment 2)
FIG. 23 is a schematic diagram showing a configuration of a particle size distribution measuring device 10a according to the second embodiment. As a particle size distribution measuring device, in FIGS. 9 and 17, a structure in which a plurality of void-arranged structures are arranged in series with the main surface perpendicular to the flow path direction is shown, but the arrangement of the void-arranged structures is not limited thereto. Not something. The arrangement of the void-arranged structures may be any structure as long as the fluid flows in the order from the void-arranged structure with the larger pore size to the void-arranged structure with the smaller pore size, relative to the void-arranged structure that defines the particle size measurement range. Such an arrangement is equivalent.

In the particle size distribution measuring device 10a according to the second embodiment, as shown in FIG. 23, three void arrangement structures 14a, 14b, and 14c are arranged in parallel at locations where the flow direction changes. In the particle size distribution measuring device 10a, real-time particle size distribution measurement is enabled by taking advantage of the parallel arrangement of the three void arrangement structures 14a, 14b, and 14c. Further, the electromagnetic wave transmission characteristics can be measured by separate optical systems having the light sources 16a, 16b, 16c and the detectors 17a, 17b, 17c for each of the three gap arrangement structures 14a, 14b, 14c. Therefore, the electromagnetic wave transmission characteristics of each of the gap-arranged structures can be obtained as compared with a case where the electromagnetic wave from one light source transmits through a plurality of gap-arranged structures.
In FIG. 23, a part of the flow path jig 12 is made of a window material 18 made of an electromagnetic wave transmitting material, so that the fluid 1 is caused to flow and classify while the electromagnetic wave transmitting structures 14a, 14b, and 14c transmit electromagnetic waves. Characteristics can be measured in real time.

According to the present disclosure, it is possible to perform a quantitative measurement of a small amount of an object to be measured based on a change in the electromagnetic wave transmission characteristics of the void-arranged structure before and after classification of the object to be measured. In particular, with the particle size distribution measuring apparatus using the void-arranged structure according to the present disclosure, it is difficult to realize the particle size distribution of a small amount (ng to mg order) of an object to be measured by the conventional “sieving weight method”. That is, it has become possible to measure the particle size distribution of an object to be measured having a size of 20 μm or less outside the conventional JIS standard.
Also, by utilizing the feature that the separated material can be easily collected by backwashing the void-arranged structure, even when a standard sample for preparing a calibration curve such as PM2.5 in the atmosphere cannot be prepared, a calibration curve is prepared from the separated material. be able to. In the prior art “laser diffraction / scattering method”, since the object to be measured is not classified and collected, it is difficult to create such a calibration curve.

  In addition, the particle size distribution measurement apparatus using the void arrangement structure according to the present disclosure, by the prior art "laser diffraction / scattering method" difficult to measure the mass, the number of particles, the particle size distribution by the theoretical value The measurement can be performed without the approximation of collating with.

Further, by performing the particle size distribution measurement while changing the structure of the void arrangement structure, information on the shape of the object to be measured, for example, the degree of deviation from a true sphere or the like can be obtained.
Further, by measuring the electromagnetic wave transmission characteristics while classifying, the particle size distribution can be measured in real time, which is an effect that cannot be obtained by the conventional technology.
Furthermore, the particle size distribution measuring device using the void-arranged structure according to the present disclosure can be used to measure, for example, expensive reagents and valuable specimens (applications where the amount of an object to be measured is small), ceramic raw materials, aerosols, and living organisms such as bacteria and cells. The particle size distribution can be measured based on the mass, the number of particles, the volume, and the like of related substances (applications in which the particle size is on the order of μm).

  Note that the present disclosure includes appropriately combining any embodiment and / or example among the various embodiments and / or examples described above, and includes each embodiment and / or example. The effects of the embodiment can be obtained.

  ADVANTAGE OF THE INVENTION According to the particle size distribution measuring device which concerns on this invention, the particle size distribution measuring device of the to-be-measured object in a fluid can be provided. In particular, it is possible to perform a particle size distribution over a wide range of an object to be measured having a size on the order of μm or more.

Reference Signs List 1 fluid 1a atmosphere 2a, 2b, 2c particle 3 first direction 4 electromagnetic wave 4a electromagnetic wave (incident wave)
4b Electromagnetic wave (transmitted wave)
5, 5a, 5b, 5c Through-hole 10, 10a Particle size distribution measuring device 11 Flow path 12 Flow path jig 13 Silicon rubber packing 14, 14a, 14b, 14c, 14d Air gap arrangement structure 15 Package jig 16, 16a, 16b , 16c Light source 17, 17a, 17b, 17c Detector 18 Window material 19 Suction pump 20 Computer device 21 Processing unit 22 Storage unit 23 Display unit 24 Calibration curve 24a First calibration curve 24b Second calibration curve 25 Program 25a Captured amount Calculator 25b Calibration curve calculator 28 Particle size distribution measurement flow channel unit 30 Captured matter recovery device 31 Syringe 32 Solvent 33 Aerosol

Claims (9)

A flow path for flowing the fluid containing the device under test from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A light source for irradiating an electromagnetic wave so as to penetrate the first gap arrangement structure and the second gap arrangement structure;
A detector for detecting an electromagnetic wave transmitted through the first gap arrangement structure and the second gap arrangement structure;
From the transmittance of the electromagnetic wave transmitted through the first void-arranged structure, the relationship between the transmittance of the electromagnetic wave transmitted through the first void-arranged structure and the amount of the substance captured by the first void-arranged structure is shown. Based on the first calibration curve, the amount of the substance trapped in the first gap arrangement structure is calculated, and the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure is calculated based on the second gap arrangement structure. The amount of the substance trapped in the second void-arranged structure based on the second calibration curve indicating the relationship between the transmittance of the electromagnetic wave transmitted through the body and the amount of the substance trapped in the second void-arranged structure Calculating a capture amount calculating section,
, A particle size distribution measuring device. A flow path for flowing the fluid containing the device under test from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A first light source that irradiates an electromagnetic wave so as to penetrate the first gap arrangement structure;
A first detector for detecting an electromagnetic wave transmitted through the first gap arrangement structure;
A second light source for irradiating an electromagnetic wave so as to penetrate the second gap arrangement structure;
A second detector for detecting an electromagnetic wave transmitted through the second gap arrangement structure;
From the transmittance of the electromagnetic wave transmitted through the first void-arranged structure, the relationship between the transmittance of the electromagnetic wave transmitted through the first void-arranged structure and the amount of the substance captured by the first void-arranged structure is shown. Based on the first calibration curve, the amount of the substance trapped in the first gap arrangement structure is calculated, and the transmittance of the electromagnetic wave transmitted through the second gap arrangement structure is calculated based on the second gap arrangement structure. The amount of the substance trapped in the second void-arranged structure based on the second calibration curve indicating the relationship between the transmittance of the electromagnetic wave transmitted through the body and the amount of the substance trapped in the second void-arranged structure Calculating a capture amount calculating section,
, A particle size distribution measuring device. The flow path extends from the upstream side to the downstream side along the first direction,
The first light source and the second light source are a common light source, and the common light source irradiates an electromagnetic wave so as to penetrate the first gap arrangement structure and the second gap arrangement structure,
The first detector and the second detector are a common detector, and the common detector detects an electromagnetic wave transmitted through the first gap arrangement structure and the second gap arrangement structure. The particle size distribution measuring device according to claim 2, which detects.   The flow path includes at least two or more locations where the flow direction changes from the upstream side to the downstream side, and the first gap arrangement structure and the second gap arrangement structure are arranged in the flow path direction in the flow path. The particle size distribution measuring device according to claim 2, wherein the particle size distribution measuring device is provided at a position where the particle size changes.   The particle size distribution measuring device according to any one of claims 1 to 4, further comprising a storage unit that records the first calibration curve and the second calibration curve.   The first calibration curve includes a transmittance at a peak point on a lower frequency side than a dip point between two adjacent peaks of an electromagnetic wave transmitted through the first gap arrangement structure and the first gap arrangement structure. And the second calibration curve is a peak point on a lower frequency side than a dip point between two adjacent peaks of the electromagnetic wave transmitted through the second gap arrangement structure. The particle size distribution measuring device according to any one of claims 1 to 5, wherein the particle size distribution measuring device shows a relationship between a transmittance and an amount of a substance trapped in the second void arrangement structure.   The particle size distribution measuring device according to claim 1, wherein the light source irradiates an electromagnetic wave from an upstream side of the first gap arrangement structure so as to penetrate the first gap arrangement structure and the second gap arrangement structure.   The particle size distribution measuring device according to claim 1, wherein the light source irradiates an electromagnetic wave from a downstream side of the second gap arrangement structure so as to penetrate the second gap arrangement structure and the first gap arrangement structure. A flow path for flowing the fluid containing the device under test from the upstream side to the downstream side,
A first gap arrangement structure formed of a metal thin film provided so as to allow the fluid to pass through the flow path and having a two-dimensionally arranged through hole of the same shape having a first opening diameter in the metal thin film; When,
A through hole of the same shape that is provided on the downstream side of the first gap arrangement structure of the flow path so as to allow the fluid to pass therethrough and has a second opening diameter smaller than the first opening diameter in the metal thin film. A second void-arranged structure made of a metal thin film having two-dimensionally periodically arranged,
A particle size distribution measurement channel unit comprising:

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