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JP2020090716A - Piping heating device and substrate processing device - Google Patents

Piping heating device and substrate processing device Download PDF

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Publication number
JP2020090716A
JP2020090716A JP2018229302A JP2018229302A JP2020090716A JP 2020090716 A JP2020090716 A JP 2020090716A JP 2018229302 A JP2018229302 A JP 2018229302A JP 2018229302 A JP2018229302 A JP 2018229302A JP 2020090716 A JP2020090716 A JP 2020090716A
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pipe
gas supply
raw material
gas
supply pipe
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JP7190888B2 (en
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大寿 木元
Hirohisa Kimoto
大寿 木元
栄一 小森
Eiichi Komori
栄一 小森
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to KR1020190156212A priority patent/KR102312158B1/en
Priority to US16/701,870 priority patent/US11506321B2/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/54—Heating elements having the shape of rods or tubes flexible
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F16L53/35—Ohmic-resistance heating
    • F16L53/38—Ohmic-resistance heating using elongate electric heating elements, e.g. wires or ribbons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/12—Means for adjustment of "on" or "off" operating temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G01K13/024—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow of moving gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/04—Bases; Housings; Mountings
    • H01H37/043—Mountings on controlled apparatus
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/022—Heaters specially adapted for heating gaseous material

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

To provide a technique that can improve heat uniformity of gas piping.SOLUTION: A piping heating device includes: a sensor installed in gas piping; heating means having a heat generating part arranged so as to cover the gas piping except for a region in the gas piping where the sensor is installed; and a heat-conductive member fitted between an outer peripheral surface of the gas piping and the sensor and formed of a material having a heat conductivity that is higher than the gas piping.SELECTED DRAWING: Figure 2

Description

本開示は、配管加熱装置及び基板処理装置に関する。 The present disclosure relates to a pipe heating device and a substrate processing device.

固体原料気化装置におけるガス供給系の配管の露出部にリボンヒータを取り付け、気化ガスの凝結を起こさない所定の温度に加熱する技術が知られている（例えば、特許文献１参照）。 A technique is known in which a ribbon heater is attached to an exposed portion of a pipe of a gas supply system in a solid material vaporizer to heat it to a predetermined temperature at which vaporized gas does not condense (see, for example, Patent Document 1).

特開２００２−３５９２３８号公報JP 2002-359238A

本開示は、ガス配管の均熱性を向上できる技術を提供する。 The present disclosure provides a technique capable of improving the soaking property of a gas pipe.

本開示の一態様による配管加熱装置は、ガス配管に設置されるセンサと、前記ガス配管における前記センサが設置される領域を除いて前記ガス配管を覆うように配置される発熱部を有する加熱手段と、前記ガス配管の外周面と前記センサとの間に取り付けられ、前記ガス配管よりも熱伝導率が高い材料により形成された熱伝導部材と、を有する。 A pipe heating device according to an aspect of the present disclosure includes a heating unit that includes a sensor installed in a gas pipe and a heat generating unit that is arranged to cover the gas pipe except a region in the gas pipe where the sensor is installed. And a heat conducting member which is attached between the outer peripheral surface of the gas pipe and the sensor and which is formed of a material having a higher thermal conductivity than the gas pipe.

本開示によれば、ガス配管の均熱性を向上できる。 According to the present disclosure, it is possible to improve the heat uniformity of the gas pipe.

一実施形態の基板処理装置の構成例を示す概略図Schematic diagram showing a configuration example of a substrate processing apparatus of one embodiment 一実施形態の配管加熱装置の一例の概略構成を示す側面図The side view which shows schematic structure of an example of the pipe heating apparatus of one embodiment. 図２の配管加熱装置の縦断面図FIG. 2 is a vertical sectional view of the pipe heating apparatus of FIG. 図２の配管加熱装置の横断面図Cross-sectional view of the pipe heating device of FIG. 一実施形態の配管加熱装置による効果の説明図Explanatory drawing of the effect by the pipe heating apparatus of one embodiment.

以下、添付の図面を参照しながら、本開示の限定的でない例示の実施形態について説明する。添付の全図面中、同一又は対応する部材又は部品については、同一又は対応する参照符号を付し、重複する説明を省略する。 Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding members or parts will be denoted by the same or corresponding reference numerals, and redundant description will be omitted.

〔基板処理装置〕
一実施形態の配管加熱装置を基板処理装置に適用した構成例について説明する。図１は、一実施形態の基板処理装置の構成例を示す概略図である。 [Substrate processing equipment]
A configuration example in which the pipe heating device of one embodiment is applied to a substrate processing apparatus will be described. FIG. 1 is a schematic diagram showing a configuration example of a substrate processing apparatus according to an embodiment.

図１に示されるように、基板処理装置は、原料ガス供給装置１０と、成膜処理部７０と、配管加熱装置１２０と、制御部１５０と、を備える。原料ガス供給装置１０は、成膜処理部７０に原料ガスを供給する。成膜処理部７０は、基板であるウエハＷに対して原子層堆積（ＡＬＤ：Atomic Layer Deposition）法、化学気相堆積（ＣＶＤ：Chemical Vapor Deposition）法等による成膜を行う。配管加熱装置１２０は、基板処理装置に設けられている種々のガス配管を加熱する。制御部１５０は、原料ガス供給装置１０、成膜処理部７０及び配管加熱装置１２０の各部の動作を制御する。なお、明細書中においては、キャリアガスと、キャリアガスと共に流れる（気化した）原料と、を併せたガスを原料ガスと称する。 As shown in FIG. 1, the substrate processing apparatus includes a raw material gas supply device 10, a film forming processing unit 70, a pipe heating device 120, and a control unit 150. The raw material gas supply device 10 supplies the raw material gas to the film formation processing unit 70. The film formation processing unit 70 forms a film on the wafer W, which is a substrate, by an atomic layer deposition (ALD: Atomic Layer Deposition) method, a chemical vapor deposition (CVD) method, or the like. The pipe heating device 120 heats various gas pipes provided in the substrate processing apparatus. The control unit 150 controls the operation of each part of the raw material gas supply device 10, the film formation processing unit 70, and the pipe heating device 120. In the specification, a gas obtained by combining a carrier gas and a raw material (vaporized) that flows together with the carrier gas is referred to as a raw material gas.

原料ガス供給装置１０は、常温で固体又は液体の原料を収容する原料容器１２を有する。原料容器１２の周囲には、ヒータ１４が設けられている。ヒータ１４は、原料容器１２内の固体又は液体の原料を適宜の温度に加熱して原料を気化させる。一実施形態では、原料は固体原料であり、六塩化タングステン（ＷＣｌ６）である。原料は、ＷＣｌ６に限定されず、低蒸気圧原料であってよく、例えば五塩化タングステン（ＷＣｌ５）、五塩化モリブデン（ＭｏＣｌ５）、四塩化ジルコニウム（ＺｒＣｌ４）、五塩化タンタル（ＴａＣｌ５）、ドデカカルボニル三ルテニウム（Ｒｕ３（ＣＯ）１２）であってもよい。 The raw material gas supply device 10 has a raw material container 12 that stores a solid or liquid raw material at room temperature. A heater 14 is provided around the raw material container 12. The heater 14 heats the solid or liquid raw material in the raw material container 12 to an appropriate temperature to vaporize the raw material. In one embodiment, the source is a solid source, tungsten hexachloride (WCl 6 ). The raw material is not limited to WCl 6, and may be a low vapor pressure raw material, such as tungsten pentachloride (WCl 5 ), molybdenum pentachloride (MoCl 5 ), zirconium tetrachloride (ZrCl 4 ), tantalum pentachloride (TaCl 5 ). ) And dodecacarbonyltriruthenium (Ru 3 (CO) 12 ).

原料容器１２内には、キャリアガス供給管２０の下流側の端部及び原料ガス供給管３０の上流側の端部が挿入されている。キャリアガス供給管２０の上流側の端部には、キャリアガスの供給源であるキャリアガス供給源２２が設けられている。キャリアガスは、例えば窒素（Ｎ２）ガス等の不活性ガスであってよい。キャリアガス供給管２０には、上流側からマスフローコントローラ（ＭＦＣ）２４、バルブＶ２１、バルブＶ２２がこの順序で設けられている。ＭＦＣ２４は、キャリアガス供給管２０を通流するキャリアガスの流量を制御する。 In the raw material container 12, the downstream end of the carrier gas supply pipe 20 and the upstream end of the raw gas supply pipe 30 are inserted. A carrier gas supply source 22, which is a supply source of the carrier gas, is provided at the upstream end of the carrier gas supply pipe 20. The carrier gas may be an inert gas such as nitrogen (N 2 ) gas. The carrier gas supply pipe 20 is provided with a mass flow controller (MFC) 24, a valve V21, and a valve V22 in this order from the upstream side. The MFC 24 controls the flow rate of the carrier gas flowing through the carrier gas supply pipe 20.

一方、原料ガス供給管３０には、上流側からバルブＶ３１、バルブＶ３２、マスフローメータ（ＭＦＭ）３２、貯留部３４、バルブＶ３３がこの順序で設けられている。ＭＦＭ３２は、原料ガス供給管３０を通流する原料ガスの流量を測定する。貯留部３４は、原料ガスを一時的に貯留し、短時間で必要な原料ガスを供給する。バルブＶ３３は、ＡＬＤの際にガスの供給及び停止を切り替えるためのバルブであり、例えば高速で開閉可能なＡＬＤバルブである。ＡＬＤバルブは、０．５秒以下の間隔で開閉可能であることが好ましく、０．０１秒以下の間隔で開閉可能であることがより好ましい。貯留部３４には、その内部のガスの圧力を測定する圧力計３６が設けられている。圧力計３６は、例えばキャパシタンスマノメータであってよい。なお、原料ガス供給管３０の下流側の端部付近は、後述の反応ガスやパージガスも流れることから、ガス供給流路７８として示している。 On the other hand, the raw material gas supply pipe 30 is provided with a valve V31, a valve V32, a mass flow meter (MFM) 32, a storage section 34, and a valve V33 in this order from the upstream side. The MFM 32 measures the flow rate of the raw material gas flowing through the raw material gas supply pipe 30. The storage unit 34 temporarily stores the raw material gas and supplies the necessary raw material gas in a short time. The valve V33 is a valve for switching supply and stop of gas during ALD, and is, for example, an ALD valve that can be opened and closed at high speed. The ALD valve is preferably openable and closable at intervals of 0.5 seconds or less, more preferably 0.01 seconds or less. The storage part 34 is provided with a pressure gauge 36 for measuring the pressure of the gas inside the storage part 34. The pressure gauge 36 may be, for example, a capacitance manometer. Note that the vicinity of the downstream end of the source gas supply pipe 30 is shown as a gas supply flow path 78 because reaction gas and purge gas described later also flow therethrough.

原料ガス供給管３０におけるバルブＶ３２とＭＦＭ３２との間の位置には、希釈ガスを供給する希釈ガス供給管４０の下流側の端部が合流している。希釈ガス供給管４０の上流側の端部には、希釈ガスの供給源である希釈ガス供給源４２が設けられている。希釈ガスは、例えばＮ２ガス等の不活性ガスであってよい。なお、希釈ガスはオフセットガスとも称される。希釈ガス供給管４０には、上流側からマスフローコントローラ（ＭＦＣ）４４、バルブＶ４１がこの順序で設けられている。 At the position between the valve V32 and the MFM 32 in the raw material gas supply pipe 30, the downstream end of the dilution gas supply pipe 40 that supplies the dilution gas joins. A diluent gas supply source 42, which is a diluent gas supply source, is provided at an upstream end of the diluent gas supply pipe 40. The diluent gas may be an inert gas such as N 2 gas. The dilution gas is also called an offset gas. The dilution gas supply pipe 40 is provided with a mass flow controller (MFC) 44 and a valve V41 in this order from the upstream side.

キャリアガス供給管２０におけるバルブＶ２１とバルブＶ２２との間の位置と、原料ガス供給管３０におけるバルブＶ３１とバルブＶ３２との間の位置とを接続するように、バイパス管６０が設けられている。バイパス管６０は、キャリアガス供給源２２からキャリアガス供給管２０に供給されるキャリアガスを、原料容器１２を経由することなく原料ガス供給管３０に供給する流路である。バイパス管６０には、バルブＶ６１が設けられている。バルブＶ２２，Ｖ３１を閉じてバルブＶ２１，Ｖ６１，Ｖ３２を開くことにより、キャリアガス供給源２２から供給されるキャリアガスがキャリアガス供給管２０及びバイパス管６０を経て、原料ガス供給管３０に供給される。これにより、原料ガス供給管３０をパージできる。また、ＭＦＣ２４との流量測定値のずれを最小限にするため、ＭＦＭ３２を校正できる。さらに原料容器１２を経由した場合と原料容器１２を経由しない場合との差分を測定することで、原料ガスの供給量を精度よく測定できる。 A bypass pipe 60 is provided so as to connect a position between the valve V21 and the valve V22 in the carrier gas supply pipe 20 and a position between the valve V31 and the valve V32 in the raw material gas supply pipe 30. The bypass pipe 60 is a flow path that supplies the carrier gas supplied from the carrier gas supply source 22 to the carrier gas supply pipe 20 to the raw material gas supply pipe 30 without passing through the raw material container 12. The bypass pipe 60 is provided with a valve V61. By closing the valves V22, V31 and opening the valves V21, V61, V32, the carrier gas supplied from the carrier gas supply source 22 is supplied to the source gas supply pipe 30 via the carrier gas supply pipe 20 and the bypass pipe 60. It Thereby, the source gas supply pipe 30 can be purged. Further, the MFM 32 can be calibrated in order to minimize the deviation of the flow rate measurement value from the MFC 24. Further, by measuring the difference between the case where the raw material container 12 is passed and the case where the raw material container 12 is not passed, the supply amount of the raw material gas can be accurately measured.

成膜処理部７０は、処理容器７２と、載置台７４と、ガス導入部７６と、を有する。処理容器７２は、その内部を減圧可能な真空容器である。載置台７４は、処理容器７２内に設けられており、ウエハＷを水平に保持する。載置台７４は、ヒータ７４ａを有する。ヒータ７４ａにより、ウエハＷが所定の温度に加熱される。ガス導入部７６は、原料ガス等を処理容器７２内に導入する。ガス導入部７６には、ガス供給流路７８が接続され、原料ガス供給装置１０から供給されるガスが、ガス導入部７６を介して、処理容器７２内に供給される。また、処理容器７２には、排気管８０を介して、排気機構８２が接続されている。排気管８０には、処理容器７２内の圧力を調整する圧力調整部８４が設けられている。圧力調整部８４は、例えば圧力調整バルブ８４ａと、バルブ８４ｂとを有する。 The film forming processing section 70 includes a processing container 72, a mounting table 74, and a gas introducing section 76. The processing container 72 is a vacuum container whose inside can be depressurized. The mounting table 74 is provided in the processing container 72 and holds the wafer W horizontally. The mounting table 74 has a heater 74a. The wafer W is heated to a predetermined temperature by the heater 74a. The gas introducing unit 76 introduces the raw material gas and the like into the processing container 72. A gas supply flow path 78 is connected to the gas introduction part 76, and the gas supplied from the source gas supply device 10 is supplied into the processing container 72 via the gas introduction part 76. An exhaust mechanism 82 is connected to the processing container 72 via an exhaust pipe 80. The exhaust pipe 80 is provided with a pressure adjusting unit 84 that adjusts the pressure inside the processing container 72. The pressure adjustment unit 84 has, for example, a pressure adjustment valve 84a and a valve 84b.

また、ガス供給流路７８には、還元ガス供給流路９０及びパージガス供給流路１００が合流している。 Further, the reducing gas supply passage 90 and the purge gas supply passage 100 join the gas supply passage 78.

還元ガス供給流路９０は、処理容器７２内に、原料ガスを還元する還元ガスを供給する。還元ガスは、例えば水素（Ｈ２）ガスであってよい。還元ガス供給流路９０の上流側の端部には、還元ガスの供給源である還元ガス供給源９２が設けられている。また、還元ガス供給流路９０には、不活性ガス供給流路９４が合流している。不活性ガス供給流路９４の上流側の端部には、不活性ガスを供給する供給源である不活性ガス供給源９６が設けられている。不活性ガスは、例えばＮ２ガスであってよい。還元ガス供給流路９０には、上流側からバルブＶ９１、バルブＶ９２がこの順序で設けられている。不活性ガス供給流路９４には、バルブＶ９４が設けられている。 The reducing gas supply flow path 90 supplies a reducing gas that reduces the raw material gas into the processing container 72. The reducing gas may be, for example, hydrogen (H 2 ) gas. A reducing gas supply source 92, which is a reducing gas supply source, is provided at an upstream end of the reducing gas supply passage 90. Further, an inert gas supply passage 94 is joined to the reducing gas supply passage 90. An inert gas supply source 96, which is a supply source for supplying the inert gas, is provided at the upstream end of the inert gas supply passage 94. The inert gas may be N 2 gas, for example. The reducing gas supply passage 90 is provided with a valve V91 and a valve V92 in this order from the upstream side. A valve V94 is provided in the inert gas supply passage 94.

パージガス供給流路１００は、パージガスを供給する。パージガスは、例えばＮ２ガス等の不活性ガスであってよい。パージガス供給流路１００の上流側の端部には、パージガスの供給源であるパージガス供給源１０２が設けられている。パージガス供給流路１００には、バルブＶ１００が設けられている。 The purge gas supply channel 100 supplies the purge gas. The purge gas may be an inert gas such as N 2 gas. A purge gas supply source 102, which is a supply source of purge gas, is provided at the upstream end of the purge gas supply passage 100. A valve V100 is provided in the purge gas supply passage 100.

また、原料ガス供給管３０における貯留部３４の下流側には、エバック配管１１０が接続されている。エバック配管１１０は、一端が原料ガス供給管３０に接続され、他端が排気管８０に接続された流路を形成する。言い換えると、エバック配管１１０は、原料ガス供給管３０と排気管８０とを処理容器７２を経由することなく接続する流路を形成する。エバック配管１１０には、バルブＶ１１１が設けられている。バルブＶ１１１を開き、バルブＶ３３を閉じることにより、原料ガス供給管３０を通流する原料ガスを、処理容器７２を経由することなく、エバック配管１１０を介して排気管８０に流れて排気機構８２により排気される。 An Evac pipe 110 is connected to the raw material gas supply pipe 30 on the downstream side of the storage unit 34. The EVAC pipe 110 forms a flow path whose one end is connected to the source gas supply pipe 30 and the other end is connected to the exhaust pipe 80. In other words, the Evac pipe 110 forms a flow path that connects the source gas supply pipe 30 and the exhaust pipe 80 without passing through the processing container 72. A valve V111 is provided in the Evac piping 110. By opening the valve V111 and closing the valve V33, the raw material gas flowing through the raw material gas supply pipe 30 flows to the exhaust pipe 80 through the evac pipe 110 without passing through the processing container 72, and the exhaust mechanism 82 is used. Exhausted.

配管加熱装置１２０は、基板処理装置に設けられている種々のガス配管を加熱する。ガス配管としては、例えばキャリアガス供給管２０におけるＭＦＣ２４の下流側、原料ガス供給管３０、希釈ガス供給管４０におけるバルブＶ４１の下流側、バイパス管６０、及びエバック配管１１０が挙げられる。 The pipe heating device 120 heats various gas pipes provided in the substrate processing apparatus. Examples of the gas pipe include the downstream side of the MFC 24 in the carrier gas supply pipe 20, the raw material gas supply pipe 30, the downstream side of the valve V41 in the dilution gas supply pipe 40, the bypass pipe 60, and the Evac pipe 110.

制御部１５０は、原料ガス供給装置１０の各部の動作、例えばバルブＶ２１、Ｖ２２、Ｖ３１、Ｖ３２、Ｖ３３、Ｖ４１、Ｖ６１、Ｖ１１１の開閉動作、ＭＦＣ２４及びＭＦＣ４４の動作を制御する。また、制御部１５０は、成膜処理部７０の各部の動作、例えば、バルブＶ９１、Ｖ９２、Ｖ９４、Ｖ１００の開閉動作、圧力調整部８４の動作を制御する。また、制御部１５０は、配管加熱装置１２０の各部の動作、例えば後述するヒータ電源１２２の動作を制御する。 The control unit 150 controls the operation of each unit of the raw material gas supply device 10, for example, the opening/closing operation of the valves V21, V22, V31, V32, V33, V41, V61, V111, and the operation of the MFC24 and MFC44. The control unit 150 also controls the operation of each unit of the film formation processing unit 70, for example, the opening/closing operation of the valves V91, V92, V94, and V100, and the operation of the pressure adjusting unit 84. The control unit 150 also controls the operation of each unit of the pipe heating device 120, for example, the operation of the heater power supply 122 described below.

制御部１５０は、例えばコンピュータであってよい。基板処理装置の各部の動作を行うコンピュータのプログラムは、記憶媒体に記憶されている。記憶媒体は、例えばフレキシブルディスク、コンパクトディスク、ハードディスク、フラッシュメモリ、ＤＶＤ等であってよい。 The control unit 150 may be, for example, a computer. A program of a computer that operates each unit of the substrate processing apparatus is stored in a storage medium. The storage medium may be, for example, a flexible disk, a compact disk, a hard disk, a flash memory, a DVD or the like.

〔配管加熱装置〕
次に、配管加熱装置１２０について、原料ガス供給管３０を加熱する部分を例に挙げて説明する。ただし、別のガス配管、例えばキャリアガス供給管２０、希釈ガス供給管４０、バイパス管６０、エバック配管１１０を加熱する部分についても、以下に説明する原料ガス供給管３０を加熱する部分と同様であってよい。 [Piping heating device]
Next, the pipe heating device 120 will be described by exemplifying a portion that heats the raw material gas supply pipe 30. However, other gas pipes such as the carrier gas supply pipe 20, the dilution gas supply pipe 40, the bypass pipe 60, and the evac pipe 110 are heated in the same manner as the portion that heats the raw material gas supply pipe 30 described below. You can

図２は、一実施形態の配管加熱装置１２０の一例の概略構成を示す側面図である。図３は、図２の配管加熱装置１２０の縦断面図であり、図２における一点鎖線III−IIIにおいて切断した断面を示す。図４は、図２の配管加熱装置１２０の横断面図であり、図２における一点鎖線IV−IVにおいて切断した断面を示す。 FIG. 2 is a side view showing a schematic configuration of an example of the pipe heating device 120 of the embodiment. FIG. 3 is a vertical cross-sectional view of the pipe heating device 120 of FIG. 2, and shows a cross section taken along one-dot chain line III-III in FIG. FIG. 4 is a transverse cross-sectional view of the pipe heating device 120 of FIG. 2, and shows a cross section taken along the chain line IV-IV in FIG.

配管加熱装置１２０は、リボンヒータ１２１と、ヒータ電源１２２と、熱伝導部材１２３と、サーマルスイッチ１２４と、を有する。 The pipe heating device 120 includes a ribbon heater 121, a heater power supply 122, a heat conduction member 123, and a thermal switch 124.

リボンヒータ１２１は、加熱手段の一例であり、発熱部１２１ａと、リード線１２１ｂと、を有する。発熱部１２１ａは、原料ガス供給管３０におけるサーマルスイッチ１２４を配置する領域を除いて、原料ガス供給管３０を覆うように螺旋状に巻き付けられている。発熱部１２１ａは、ヒータ電源１２２から電流が供給されることで発熱するニクロム線等の抵抗発熱体と、抵抗発熱体を被覆するガラスクロス等の被覆材と、を有する。リード線１２１ｂは、一端が発熱部１２１ａの抵抗発熱体と接続され、他端がヒータ電源１２２と接続されている。加熱手段としてリボンヒータ１２１を利用することで、低コストで原料ガス供給管３０を加熱できる。なお、リボンヒータ１２１は、テープヒータとも称される。 The ribbon heater 121 is an example of a heating unit, and includes a heat generating portion 121a and a lead wire 121b. The heat generating part 121 a is spirally wound so as to cover the raw material gas supply pipe 30 except for the region where the thermal switch 124 is arranged in the raw material gas supply pipe 30. The heat generating section 121a includes a resistance heating element such as a nichrome wire that generates heat when a current is supplied from the heater power source 122, and a covering material such as a glass cloth that covers the resistance heating element. The lead wire 121b has one end connected to the resistance heating element of the heat generating portion 121a and the other end connected to the heater power supply 122. By using the ribbon heater 121 as the heating means, the raw material gas supply pipe 30 can be heated at low cost. The ribbon heater 121 is also called a tape heater.

ヒータ電源１２２は、リード線１２１ｂを介して発熱部１２１ａの抵抗発熱体に電流を供給する。ヒータ電源１２２が供給する電流は、制御部１５０により制御される。 The heater power supply 122 supplies a current to the resistance heating element of the heating section 121a via the lead wire 121b. The current supplied by the heater power supply 122 is controlled by the controller 150.

熱伝導部材１２３は、原料ガス供給管３０の外周面とサーマルスイッチ１２４との間に取り付けられている。熱伝導部材１２３は、原料ガス供給管３０よりも熱伝導率が高い材料により形成されている。熱伝導部材１２３の材料としては、例えば原料ガス供給管３０の材料がステンレス（ＳＵＳ）である場合、アルミニウム（Ａｌ）、銅（Ｃｕ）等を利用できる。熱伝導部材１２３は、原料ガス供給管３０をクランプするクランプ部材であることが好ましい。これにより、工具を使用することなく、原料ガス供給管３０に熱伝導部材１２３を取り付けることができる。原料ガス供給管３０の軸方向における熱伝導部材１２３の長さＬ１は、図３に示されるように、隣接する発熱部１２１ａ間の距離Ｌ２よりも長いことが好ましい。これにより、隣接する発熱部１２１ａからの熱が熱伝導部材１２３を介して原料ガス供給管３０における発熱部１２１ａが巻き付けられていない領域に伝達するので、原料ガス供給管３０の均熱性が向上する。そのため、原料ガスが原料ガス供給管３０内を通流する際に再固化することを抑制できる。その結果、原料ガスの再固化に起因するパーティクルの発生を防止できる。 The heat conduction member 123 is attached between the outer peripheral surface of the raw material gas supply pipe 30 and the thermal switch 124. The heat conducting member 123 is made of a material having a higher heat conductivity than the raw material gas supply pipe 30. As the material of the heat conduction member 123, for example, when the material of the source gas supply pipe 30 is stainless steel (SUS), aluminum (Al), copper (Cu), or the like can be used. The heat conduction member 123 is preferably a clamp member that clamps the raw material gas supply pipe 30. Thereby, the heat conduction member 123 can be attached to the source gas supply pipe 30 without using a tool. The length L1 of the heat conducting member 123 in the axial direction of the raw material gas supply pipe 30 is preferably longer than the distance L2 between the adjacent heat generating portions 121a as shown in FIG. As a result, the heat from the adjacent heat generating portion 121a is transferred to the region of the raw material gas supply pipe 30 where the heat generating portion 121a is not wound, via the heat conducting member 123, so that the heat uniformity of the raw material gas supply pipe 30 is improved. .. Therefore, it is possible to suppress re-solidification of the raw material gas when flowing through the raw material gas supply pipe 30. As a result, it is possible to prevent the generation of particles due to the resolidification of the raw material gas.

サーマルスイッチ１２４は、原料ガス供給管３０の外周面における発熱部１２１ａが巻き付けられていない領域に、熱伝導部材１２３を介して設置されている。これにより、サーマルスイッチ１２４は、発熱部１２１ａの温度ではなく、原料ガス供給管３０の温度を感知できる。サーマルスイッチ１２４は、リボンヒータ１２１と直列接続されており、所定の温度以上になるとヒータ電源１２２からリボンヒータ１２１への電力の供給を遮断する。なお、サーマルスイッチ１２４は、センサの一例であり、サーマルスイッチ１２４の代わりに別のセンサ、例えば原料ガス供給管３０の温度を測定する温度センサが設置されていてもよい。 The thermal switch 124 is installed in a region of the outer peripheral surface of the raw material gas supply pipe 30 where the heat generating portion 121a is not wound, with the heat conducting member 123 interposed therebetween. Accordingly, the thermal switch 124 can detect the temperature of the raw material gas supply pipe 30 instead of the temperature of the heat generating part 121a. The thermal switch 124 is connected in series with the ribbon heater 121, and cuts off the supply of electric power from the heater power supply 122 to the ribbon heater 121 when the temperature exceeds a predetermined temperature. The thermal switch 124 is an example of a sensor, and instead of the thermal switch 124, another sensor, for example, a temperature sensor that measures the temperature of the raw material gas supply pipe 30 may be installed.

ところで、原料ガス供給管３０の均熱性を向上させるために、原料ガス供給管３０におけるサーマルスイッチ１２４が設置される領域を含む全ての領域にリボンヒータ１２１を配置することも考えられる。しかしながら、この場合、サーマルスイッチ１２４が原料ガス供給管３０の温度ではなくリボンヒータ１２１の発熱部１２１ａの温度を感知する。そのため、原料ガス供給管３０が所定の温度以上に到達していない場合であっても、発熱部１２１ａが所定の温度以上に到達している場合、サーマルスイッチ１２４がオフしてヒータ電源１２２からリボンヒータ１２１への電流の供給が遮断される誤検知が生じる。 By the way, in order to improve the thermal uniformity of the source gas supply pipe 30, it is possible to arrange the ribbon heater 121 in all regions of the source gas supply pipe 30, including the region where the thermal switch 124 is installed. However, in this case, the thermal switch 124 senses not the temperature of the raw material gas supply pipe 30 but the temperature of the heat generating portion 121a of the ribbon heater 121. Therefore, even if the source gas supply pipe 30 has not reached the predetermined temperature or higher, if the heat generating portion 121a has reached the predetermined temperature or higher, the thermal switch 124 is turned off and the heater power supply 122 supplies the ribbon. False detection occurs in which the supply of current to the heater 121 is cut off.

また、原料ガス供給管３０におけるサーマルスイッチ１２４が設置されていない領域にリボンヒータ１２１を配置しない場合には、上記の誤検知を防止できる。しかしながら、原料ガス供給管３０におけるサーマルスイッチ１２４が設置されていない領域にリボンヒータ１２１が配置されていないため、当該領域の温度が周囲の温度よりも低くなり、原料ガス供給管３０の均熱性が低下する。 Further, when the ribbon heater 121 is not arranged in the region of the source gas supply pipe 30 where the thermal switch 124 is not installed, the above-mentioned erroneous detection can be prevented. However, since the ribbon heater 121 is not arranged in the region of the source gas supply pipe 30 where the thermal switch 124 is not installed, the temperature of the region becomes lower than the ambient temperature, and the temperature uniformity of the source gas supply pipe 30 is reduced. descend.

これに対し、一実施形態の配管加熱装置１２０によれば、原料ガス供給管３０におけるサーマルスイッチ１２４が設置される領域を除いて原料ガス供給管３０を覆うようにリボンヒータ１２１の発熱部１２１ａが配置されている。また、原料ガス供給管３０の外周面とサーマルスイッチ１２４との間に、原料ガス供給管３０よりも熱伝導率が高い材料により形成された熱伝導部材１２３が取り付けられている。これにより、原料ガス供給管３０におけるサーマルスイッチ１２４が設置された領域に向かって、当該領域の周囲からの熱が熱伝導部材１２３を介して伝達するので、原料ガス供給管３０の均熱性が向上する。そのため、原料ガスが原料ガス供給管３０を通流する際に再固化することを抑制できる。その結果、原料ガスの再固化に起因するパーティクルの発生を防止できる。 On the other hand, according to the pipe heating device 120 of one embodiment, the heat generating part 121a of the ribbon heater 121 is provided so as to cover the raw material gas supply pipe 30 except for the region where the thermal switch 124 is installed in the raw material gas supply pipe 30. It is arranged. Further, between the outer peripheral surface of the raw material gas supply pipe 30 and the thermal switch 124, a heat conducting member 123 made of a material having a higher thermal conductivity than that of the raw material gas supply pipe 30 is attached. As a result, heat from the periphery of the source gas supply pipe 30 is transferred to the region where the thermal switch 124 is installed in the source gas supply pipe 30 via the heat conducting member 123, so that the temperature uniformity of the source gas supply pipe 30 is improved. To do. Therefore, it is possible to suppress re-solidification of the raw material gas when flowing through the raw material gas supply pipe 30. As a result, it is possible to prevent the generation of particles due to the resolidification of the raw material gas.

なお、上記の例では、原料ガス供給管３０におけるサーマルスイッチ１２４を設置する領域に熱伝導部材１２３を取り付ける場合を説明したが、熱伝導部材１２３は、例えば２つのリボンヒータ１２１の繋ぎ目やリボンヒータ１２１の端部等に取り付けてもよい。これにより、２つのリボンヒータ１２１の繋ぎ目やリボンヒータ１２１の端部等におけるガス配管の温度低下を抑制できるので、ガス配管の均熱性がより向上する。 In the above example, the case where the heat conduction member 123 is attached to the region where the thermal switch 124 is installed in the raw material gas supply pipe 30 has been described, but the heat conduction member 123 may be, for example, a joint between two ribbon heaters 121 or a ribbon. You may attach to the edge part etc. of the heater 121. As a result, the temperature drop of the gas pipe at the joint between the two ribbon heaters 121 and the end portion of the ribbon heater 121 can be suppressed, so that the thermal uniformity of the gas pipe is further improved.

〔評価結果〕
次に、一実施形態の配管加熱装置１２０の効果を確認するために実施した評価について説明する。 〔Evaluation results〕
Next, the evaluation performed to confirm the effect of the pipe heating device 120 according to the embodiment will be described.

まず、原料ガス供給管３０の外周面に、図２〜図４に示されるように、熱伝導部材１２３の一例であるアルミホイルを介してサーマルスイッチ１２４を配置し、サーマルスイッチ１２４を避けるようにリボンヒータ１２１を取り付けた。続いて、原料ガス供給管３０を１８０℃に加熱し、原料ガス供給管３０におけるサーマルスイッチ１２４を配置した領域Ｐ３とサーマルスイッチ１２４を配置していない領域Ｐ１〜Ｐ２，Ｐ４〜Ｐ１０とを含む１０箇所の温度を測定した。 First, as shown in FIGS. 2 to 4, the thermal switch 124 is arranged on the outer peripheral surface of the raw material gas supply pipe 30 via an aluminum foil, which is an example of the heat conducting member 123, so as to avoid the thermal switch 124. The ribbon heater 121 was attached. Subsequently, the source gas supply pipe 30 is heated to 180° C., and the region P3 in which the thermal switch 124 is arranged in the source gas supply pipe 30 and the regions P1 to P2 and P4 to P10 in which the thermal switch 124 is not arranged are included 10 The temperature of the spot was measured.

また、比較のために、原料ガス供給管３０の外周面に熱伝導部材１２３の一例であるアルミホイルを配置することなくサーマルスイッチ１２４を配置し、サーマルスイッチ１２４を避けるようにリボンヒータ１２１を取り付けた。続いて、原料ガス供給管３０を１８０℃に加熱し、原料ガス供給管３０におけるサーマルスイッチ１２４を配置した領域Ｐ３とサーマルスイッチ１２４を配置していない領域Ｐ１〜Ｐ２，Ｐ４〜Ｐ１０とを含む１０箇所の温度を測定した。 Further, for comparison, the thermal switch 124 is arranged on the outer peripheral surface of the raw material gas supply pipe 30 without disposing the aluminum foil which is an example of the heat conducting member 123, and the ribbon heater 121 is attached so as to avoid the thermal switch 124. It was Subsequently, the source gas supply pipe 30 is heated to 180° C., and the region P3 in which the thermal switch 124 is arranged in the source gas supply pipe 30 and the regions P1 to P2 and P4 to P10 in which the thermal switch 124 is not arranged are included 10 The temperature of the spot was measured.

図５は、一実施形態の配管加熱装置による効果の説明図であり、アルミホイルを設けた場合（図５において菱形印で示す。）と設けていない場合（図５において三角印で示す。）の領域Ｐ１〜Ｐ１０における温度［℃］を示す。 FIG. 5 is an explanatory diagram of the effect of the pipe heating device of one embodiment, and the case where aluminum foil is provided (indicated by a diamond mark in FIG. 5) and the case where aluminum foil is not provided (indicated by a triangle mark in FIG. 5). The temperature [° C.] in the regions P1 to P10 of FIG.

図５に示されるように、アルミホイルを配置した場合、サーマルスイッチ１２４を配置した領域Ｐ３における温度は１６８．１℃であり、サーマルスイッチ１２４を配置していない領域Ｐ１〜Ｐ２，Ｐ４〜Ｐ１０における温度は１７４．１〜１９１．８℃であった。これに対し、アルミホイルを配置していない場合、サーマルスイッチ１２４を配置した領域Ｐ３における温度は１５２．４℃であり、サーマルスイッチ１２４を配置していない領域Ｐ１〜Ｐ２，Ｐ４〜Ｐ１０における温度は１７４．０〜１９１．２℃であった。 As shown in FIG. 5, when the aluminum foil is arranged, the temperature in the region P3 where the thermal switch 124 is arranged is 168.1° C., and in the regions P1 to P2 and P4 to P10 where the thermal switch 124 is not arranged. The temperature was 174.1-191.8°C. On the other hand, when the aluminum foil is not arranged, the temperature in the region P3 where the thermal switch 124 is arranged is 152.4° C., and the temperature in the regions P1 to P2 and P4 to P10 where the thermal switch 124 is not arranged is It was 174.0 to 191.2°C.

これらの結果から、熱伝導部材１２３の一例であるアルミホイルを配置することにより、サーマルスイッチ１２４を配置した領域の温度が、サーマルスイッチ１２４を配置していない領域Ｐ１〜Ｐ２，Ｐ４〜Ｐ１０と略同等の温度となることが分かる。一方、熱伝導部材１２３の一例であるアルミホイルを配置していない場合、サーマルスイッチ１２４を配置した領域の温度が、サーマルスイッチ１２４を配置していない領域Ｐ１〜Ｐ２，Ｐ４〜Ｐ１０の温度と比較して大きく低下していることが分かる。すなわち、原料ガス供給管３０の外周面とサーマルスイッチ１２４との間に熱伝導部材１２３を配置することにより、原料ガス供給管３０にサーマルスイッチ１２４を配置した場合であっても、原料ガス供給管３０の均熱性を向上できると言える。 From these results, by disposing an aluminum foil, which is an example of the heat conducting member 123, the temperature of the area where the thermal switch 124 is arranged is substantially equal to the areas P1 to P2 and P4 to P10 where the thermal switch 124 is not arranged. It can be seen that the temperatures are equivalent. On the other hand, when the aluminum foil, which is an example of the heat conduction member 123, is not arranged, the temperature of the area where the thermal switch 124 is arranged is compared with the temperatures of the areas P1 to P2 and P4 to P10 where the thermal switch 124 is not arranged. And it turns out that it has dropped significantly. That is, by disposing the heat conducting member 123 between the outer peripheral surface of the raw material gas supply pipe 30 and the thermal switch 124, even if the thermal switch 124 is arranged in the raw material gas supply pipe 30, the raw material gas supply pipe It can be said that the soaking property of 30 can be improved.

なお、上記の実施形態において、原料ガス供給装置１０は原料ガス供給手段の一例であり、排気管８０、排気機構８２及び圧力調整部８４は排気手段の一例である。 In the above embodiment, the raw material gas supply device 10 is an example of the raw material gas supply means, and the exhaust pipe 80, the exhaust mechanism 82, and the pressure adjusting unit 84 are an example of the exhaust means.

今回開示された実施形態はすべての点で例示であって制限的なものではないと考えられるべきである。上記の実施形態は、添付の請求の範囲及びその趣旨を逸脱することなく、様々な形態で省略、置換、変更されてもよい。 The embodiments disclosed this time are to be considered as illustrative in all points and not restrictive. The above-described embodiments may be omitted, replaced, or modified in various forms without departing from the scope and spirit of the appended claims.

１０ 原料ガス供給装置
２０ キャリアガス供給管
３０ 原料ガス供給管
４０ 希釈ガス供給管
６０ バイパス管
７２ 処理容器
８０ 排気管
８２ 排気機構
１１０ エバック配管
１２０ 配管加熱装置
１２１ リボンヒータ
１２１ａ 発熱部
１２３ 熱伝導部材
１２４ サーマルスイッチ
１５０ 制御部 10 Raw Material Gas Supply Device 20 Carrier Gas Supply Pipe 30 Raw Material Gas Supply Pipe 40 Diluting Gas Supply Pipe 60 Bypass Pipe 72 Processing Container 80 Exhaust Pipe 82 Exhaust Mechanism 110 Evac Pipe 120 Pipe Heating Device 121 Ribbon Heater 121a Heat Generation Part 123 Heat Conducting Member 124 Thermal switch 150 Control unit

Claims (8)

ガス配管に設置されるセンサと、
前記ガス配管における前記センサが設置される領域を除いて前記ガス配管を覆うように配置される発熱部を有する加熱手段と、
前記ガス配管の外周面と前記センサとの間に取り付けられ、前記ガス配管よりも熱伝導率が高い材料により形成された熱伝導部材と、
を有する、
配管加熱装置。 A sensor installed in the gas pipe,
A heating means having a heat generating portion arranged so as to cover the gas pipe except for a region where the sensor is installed in the gas pipe;
A heat conducting member attached between the outer peripheral surface of the gas pipe and the sensor, and made of a material having a higher thermal conductivity than the gas pipe,
Has,
Pipe heating device. 前記熱伝導部材は、前記ガス配管をクランプするクランプ部材である、
請求項１に記載の配管加熱装置。 The heat conduction member is a clamp member that clamps the gas pipe,
The pipe heating device according to claim 1. 前記ガス配管は、その内部に固体又は液体の原料を気化させた原料ガスを通流させる配管である、
請求項１又は２に記載の配管加熱装置。 The gas pipe is a pipe through which a raw material gas obtained by vaporizing a solid or liquid raw material is passed.
The pipe heating device according to claim 1. 前記センサは、所定の温度以上になると前記発熱部への電力の供給を遮断するサーマルスイッチである、
請求項１乃至３のいずれか一項に記載の配管加熱装置。 The sensor is a thermal switch that shuts off the supply of electric power to the heat generating portion when the temperature exceeds a predetermined temperature.
The pipe heating device according to any one of claims 1 to 3. 前記加熱手段は、リボンヒータであり、
前記発熱部は、抵抗発熱体を含む、
請求項１乃至４のいずれか一項に記載の配管加熱装置。 The heating means is a ribbon heater,
The heating portion includes a resistance heating element,
The pipe heating device according to any one of claims 1 to 4. 前記ガス配管の材料はステンレスであり、前記熱伝導部材の材料はアルミニウムである、
請求項１乃至５のいずれか一項に記載の配管加熱装置。 The material of the gas pipe is stainless steel, the material of the heat conducting member is aluminum,
The pipe heating device according to any one of claims 1 to 5. 基板を処理する処理容器と、
前記処理容器内に原料ガスを供給する原料ガス供給管を有する原料ガス供給手段と、
前記原料ガス供給管を加熱する配管加熱装置と、
を備え、
前記配管加熱装置は、
前記原料ガス供給管に設置されるセンサと、
前記原料ガス供給管における前記センサが設置される領域を除いて前記原料ガス供給管を覆うように配置される発熱部を有する加熱手段と、
前記原料ガス供給管の外周面と前記センサとの間に取り付けられ、前記原料ガス供給管よりも熱伝導率が高い材料により形成された熱伝導部材と、
を有する、
基板処理装置。 A processing container for processing the substrate,
A raw material gas supply means having a raw material gas supply pipe for supplying a raw material gas into the processing container;
A pipe heating device for heating the raw material gas supply pipe,
Equipped with
The pipe heating device,
A sensor installed in the source gas supply pipe,
A heating means having a heat generating portion arranged so as to cover the raw material gas supply pipe except for a region where the sensor is installed in the raw material gas supply pipe;
A heat conduction member which is attached between the outer peripheral surface of the raw material gas supply pipe and the sensor, and which is made of a material having a higher thermal conductivity than the raw material gas supply pipe,
Has,
Substrate processing equipment. 基板を処理する処理容器と、
前記処理容器内に原料ガスを供給する原料ガス供給管を有する原料ガス供給手段と、
前記処理容器内を排気する排気管を有する排気手段と、
一端が前記原料ガス供給管に接続され、他端が排気管に接続されたエバック配管と、
前記原料ガス供給管及び前記エバック配管の少なくともいずれかのガス配管を加熱する配管加熱装置と、
を備え、
前記配管加熱装置は、
前記ガス配管に設置されるセンサと、
前記ガス配管における前記センサが設置される領域を除いて前記ガス配管を覆うように配置される発熱部を有する加熱手段と、
前記ガス配管の外周面と前記センサとの間に取り付けられ、前記ガス配管よりも熱伝導率が高い材料により形成された熱伝導部材と、
を有する、
基板処理装置。 A processing container for processing the substrate,
A raw material gas supply means having a raw material gas supply pipe for supplying a raw material gas into the processing container;
Exhaust means having an exhaust pipe for exhausting the inside of the processing container,
An Evac pipe, one end of which is connected to the source gas supply pipe and the other end of which is connected to an exhaust pipe,
A pipe heating device for heating at least one gas pipe of the source gas supply pipe and the evac pipe,
Equipped with
The pipe heating device,
A sensor installed in the gas pipe,
A heating means having a heat generating portion arranged so as to cover the gas pipe except for a region where the sensor is installed in the gas pipe;
A heat conducting member attached between the outer peripheral surface of the gas pipe and the sensor, and made of a material having a higher thermal conductivity than the gas pipe,
Has,
Substrate processing equipment.
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