JP2019107794A - Substrate cutting device - Google Patents

Abstract

To maintain high parallelism of a break bar to a substrate in a substrate cutting device which changes the extending direction of the break bar by rotation in order to cut the substrate on which a plurality of scribe lines orthogonal to one another are formed.SOLUTION: A break bar 19 is a member capable of dividing a substrate by moving downward from a base 22 and includes a base member 21 removably supported by the base, and a bar member 23 connected to the base member for contacting the substrate. A second slide drive mechanism moves the base in a first horizontal direction. A first slide drive mechanism moves the base 22 in a second horizontal direction orthogonal to the first horizontal direction. A rotation mechanism rotates the break bar between a first posture extending in the first horizontal direction and a second posture extending in the second horizontal direction with respect to the base. An inclination adjustment mechanism 27 can adjust an inclination of the bar member by vertically moving at least one of both ends of the bar member with respect to the base member.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a substrate cutting apparatus, and more particularly, to a substrate cutting apparatus for cutting a substrate made of a brittle material such as glass, ceramic, or semiconductor wafer.

  Conventionally, scribe lines in the X direction and Y direction orthogonal to each other are formed on the surface of a brittle material substrate (hereinafter, simply referred to as "substrate") using a cutter wheel (also referred to as a scribing wheel) or a laser beam. There is known a method of dividing a substrate into unit substrates by applying an external force along the scribe line and breaking it (see, for example, Patent Document 1).

  Breaking apparatus A described in Patent Document 1 includes a horizontal table 1 on which a substrate W is placed. The table 1 can rotate in the horizontal plane and can move in the Y direction. A beam 23 extending horizontally in the X direction is provided above the table 1. The break bar 10 extending in the X direction is attached to the beam 23 and can be raised and lowered via a raising and lowering shaft driven by a cylinder.

  When breaking the substrate W, first, the substrate W is placed on the table 1 such that the scribe line S1 is parallel to the X direction. At this time, the scribe line S1 is disposed on the lower surface side. Next, the break bar 10 is lowered from above the substrate W toward the scribe line S1, to which a weight as an impact member is dropped to apply an impact. As a result, the cracks in the scribe line S1 extend to break the substrate. In addition, after completion of the break of all the scribe lines S1, the table is rotated by 90 degrees, and the scribe lines S2 are sequentially broken by the break bar as described above.

Unexamined-Japanese-Patent No. 2017-039271

In recent years, a substrate cutting apparatus has been developed in which the breaking mechanism is rotatable relative to the beam and is movable in the X direction. In this apparatus, when dividing the scribe line S2, the break bar is rotated so as to extend in the Y direction, and then the scribe line S2 is sequentially broken while moving the break bar in the X direction along the beam.
Generally, it is required that the front end ridge line of the pressing blade of the break bar faces the substrate in parallel and applies pressing force uniformly over the entire length of the scribing line. The reason is that if the parallelism is deviated, the pressing force can not be uniformly pressed over the entire length of the scribe line, and the accuracy of the break is reduced.
However, in the substrate cutting apparatus which rotates the break bar, the break bar rotates 90 degrees between the scribing line S1 division and the scribing line S2 division, so that the parallelism of the break bar to the substrate surface can be maintained. difficult. This is because the inclination of the substrate placed on the table is usually different between the X direction and the Y direction.

  An object of the present invention is to maintain high parallelism of a break bar with a substrate in a substrate cutting apparatus in which the extending direction is changed by rotating the break bar.

  Below, a plurality of modes are explained as a means to solve a subject. These aspects can be arbitrarily combined as needed.

The substrate cutting apparatus according to the first aspect of the present invention is an apparatus for cutting a substrate on which a plurality of first scribe lines and a plurality of second scribe lines orthogonal to each other are formed, and a base, a break bar, A first drive mechanism, a second drive mechanism, a rotation mechanism, and an inclination adjustment mechanism are provided.
The break bar is a member capable of dividing the substrate by moving downward from the base, and has a base member removably supported by the base and a bar member connected to the base member for contacting the substrate. .
The first drive mechanism moves the base in the first horizontal direction.
The second drive mechanism moves the base in a second horizontal direction orthogonal to the first horizontal direction.
The pivoting mechanism pivots the break bar between a first orientation extending in a first horizontal direction and a second orientation extending in a second horizontal direction with respect to the base.
The tilt adjusting mechanism can adjust the tilt of the bar member by vertically moving at least one of both ends of the bar member with respect to the base member.
In this apparatus, for example, the break bar divides the plurality of first scribe lines while moving in the second horizontal direction in the first posture, and then the break bar moves in the first horizontal direction in the second posture. While dividing the plurality of second scribe lines.
In this apparatus, the degree of parallelism between the break bar and the substrate can be increased by changing the inclination of the break bar between the division of the first scribe line and the division of the second scribe line by the inclination adjustment mechanism.

The tilt adjustment mechanism may have a motor fixed to the base member, and a power transmission mechanism that converts the rotational force of the motor in the vertical direction and transmits it to the bar member.
In this device, the bar member can be moved relative to the base member with a simple configuration.

The substrate cutting apparatus may further include a guide for vertically guiding the bar member relative to the base member.
In this device, the posture of the bar member with respect to the base member is stabilized.

The substrate cutting apparatus may further include a vertical drive mechanism that moves the break bar up and down with respect to the base.
In this device, the break bar can contact the substrate by lowering it relative to the base.

The substrate cutting apparatus may further include a weight which is attached to the base and which falls from the base and collides with the break bar from above to cut the substrate to the break bar.
In this apparatus, the substrate is divided by the weight colliding with the break bar while the bar member of the break bar is in contact with the substrate.

FIG. 1 is a perspective view of a substrate cutting device according to a first embodiment of the present invention. It is the elements on larger scale of FIG. 1, and is a perspective view of a break bar lifting device. The front view of a break bar lifting apparatus. Rear view of the break bar lifting device. Perspective view of the break bar. The elements on larger scale of FIG. The side view of a break bar lifting device. Sectional drawing of the front-end | tip part of a break bar. The perspective view of a break bar inclination adjustment mechanism. The front view of a break bar inclination adjustment mechanism. XI-XI sectional drawing of FIG. XII-XII sectional drawing of FIG. FIG. 2 is a block diagram showing a control configuration of the substrate cutting device. The schematic diagram which shows board | substrate cutting operation | movement. FIG. 7 is a plan view showing one state of the substrate cutting operation. FIG. 7 is a plan view showing one state of the substrate cutting operation. FIG. 7 is a plan view showing one state of the substrate cutting operation. FIG. 7 is a plan view showing one state of the substrate cutting operation. FIG. 7 is a plan view showing one state of the substrate cutting operation. FIG. 7 is a plan view showing one state of the substrate cutting operation.

1. First Embodiment (1) Substrate Cutting Device The substrate cutting device 1 according to the first embodiment will be described with reference to FIG. FIG. 1 is a perspective view of a substrate cutting apparatus according to a first embodiment of the present invention. In each of the drawings, the arrow X is in the first horizontal direction, and the arrow Y is in the second horizontal direction.
The substrate cutting apparatus 1 follows the scribe line by pressing the substrate 100A (FIG. 15) in which the scribe line (cut groove) is formed in the previous step from the surface opposite to the scribe line to bend the substrate. It is an apparatus for dividing the substrate. Specifically, on the substrate 100A, a plurality of first scribe lines S1 and a plurality of second scribe lines S2 orthogonal to each other are formed.

The substrate cutting device 1 has a belt conveyor device 3 having a mounting surface 3a for mounting the substrate 100A. The belt conveyor device 3 can transport the substrate 100A in the second horizontal direction.
The substrate cutting apparatus 1 has a beam (transverse beam) 9 extending in a first direction. The beam 9 is disposed at a position above the mounting surface 3 a of the belt conveyor device 3 and can be moved in the second horizontal direction along the rail 15 by a second slide drive mechanism 89 (an example of a second drive mechanism) is there.

(2) Break Bar Lifting Device The break bar lifting device 11 will be described with reference to FIGS. FIG. 2 is a partial enlarged view of FIG. 1 and a perspective view of the break bar lifting device. FIG. 3 is a front view of the break bar lifting device. FIG. 4 is a rear view of the break bar lifting device. FIG. 5 is a perspective view of a break bar. FIG. 6 is a partial enlarged view of FIG. FIG. 7 is a side view of the break bar lifting device. FIG. 8 is a cross-sectional view of the tip portion of the break bar.

The break bar lifting device 11 has a break bar 19. The break bar 19 is held by the beam 9 and extends, for example, along a first horizontal direction. The break bar 19 is stopped at a position in contact with the surface of the substrate 100A. In this state, a weight 29 as an impact member is dropped to the break bar 19 and the shock breaks the substrate 100A along the scribe line (described later) .
The break bar 19 is a member capable of dividing the substrate 100A by moving downward from the beam 9, and is connected to the support member 21 (an example of a base member) removably supported by the beam 9 and the support member 21. A bar member 23 (an example of a bar member) for contacting the substrate 100A and an inclination adjusting mechanism 27 (an example of an inclination adjusting mechanism) are provided.

The support member 21 is supported movably in the vertical direction with respect to the support portion 22 of the beam 9. The support member 21 can be lifted and lowered by a lifting and lowering device 81 (FIG. 13, an example of the vertical drive mechanism). The support portion 22 is supported by the beam 9 via a pivoting mechanism 83 (FIG. 13, an example of the pivoting mechanism). The pivoting mechanism 83 pivots the break bar between the beam 9 in a first horizontal direction (FIG. 15) extending in the first horizontal direction and a second horizontal direction (FIG. 19) in the second horizontal direction. The pivoting mechanism 83 is movable in the first horizontal direction along the beam 9 by a first slide drive mechanism 85 (FIG. 13, an example of the first drive mechanism).
The support member 21 has a plate-like member 21 a. The plate-like member 21a extends, for example, in a first horizontal direction, and the main surface is directed in a second horizontal direction.

The bar member 23 has a support plate 23a, a pressing plate 23b, and a plurality of connection plates 23c. The pressing plate 23 b is attached to the support plate 23 a so as to be adjustable in the vertical position through the plurality of connection plates 23 c. The pressing plate 23 b has, at its lower end, a pressing blade 23 d linearly extending along the first horizontal direction, for example.
The connection plate 23c is attached so as to be vertically movable along a vertically extending dovetail groove formed on the support plate 23a, and the vertical position can be adjusted by rotating the vertical adjustment bolt. .

The inclination adjustment mechanism 27 is a mechanism for adjusting the parallelism of the pressing blade 23 d of the bar member 23 to the substrate 100 A by adjusting the inclination of the bar member 23 with respect to the support member 21. The tilt adjustment mechanism 27 will be described later.
The weight 29 is a member that is attached to the support portion 22 and causes the bar member 23 to divide the substrate 100A by falling from the support portion 22 and colliding with the bar member 23 from above. The weight 29 is supported by the support 22 via the lock mechanism 87 (FIG. 13). When the lock mechanism 87 (FIG. 13) is unlocked, the weight 29 falls downward and collides with the bar member 23. When the break bar 19 moves upward, the weight 29 is also lifted by being lifted by the break bar 19 and locked by the lock mechanism 87 (FIG. 13).

(3) Inclination Adjustment Mechanism The inclination adjustment mechanism 27 will be described with reference to FIGS. 9 to 12. FIG. 9 is a perspective view of the break bar inclination adjusting mechanism. FIG. 10 is a front view of the break bar inclination adjusting mechanism. 11 is a cross-sectional view taken along line XI-XI of FIG. 12 is a cross-sectional view taken along line XII-XII of FIG.
The tilt adjustment mechanism 27 has a pair of mechanisms for adjusting the vertical position of the bar member 23 with respect to the support member 21 on both sides in the first horizontal direction. That is, the bar members 23 can move up and down relative to the support member 21 independently of each other in the longitudinal direction, thereby adjusting the inclination.

Hereinafter, one of the pair of mechanisms of the inclination adjustment mechanism 27 will be described.
The inclination adjustment mechanism 27 includes a motor 53, a reduction mechanism 55, a pinion 57, a rack gear 59, a plate 63, a block 65, a slide block 67, and a slider base plate 71.

The motor 53 has a rotating shaft extending in the first direction, and is fixed to the support member 21.
The speed reduction mechanism 55 is fixed to the support member 21, and the torque from the motor 53 is input.
The pinion 57 is connected to the output shaft of the reduction mechanism 55. The rack gear 59 extends in the vertical direction and engages with the pinion 57. The pinion 57 and the rack gear 59 constitute a power transmission mechanism that converts the rotational force of the motor 53 into a force in the vertical direction and transmits it to the bar member 23.

The plate 63 is movable in the vertical direction with respect to the support member 21 and is fixed to the rack gear 59.
Further, the plate 63 is guided to move in the vertical direction with respect to the support member 21 by the LM guide 64 (an example of a guide portion). Therefore, the posture of the plate 63 with respect to the support member 21 is stabilized.

The block 65 is arranged close to the plate 63.
Slide blocks 67 are fixed to the upper and lower ends of the block 65 and extend into the holes of the plate 63.

The slider base plate 71 is disposed close to the block 65. The bar member 23 is fixed to the slider base plate 71 by the fixing portion 75. As described above, the plate 63, the block 65, the slide block 67, the slider base plate 71, and the bar member 23 can move up and down relative to the support member 21 integrally.
However, the bar member 23 and the slider base plate 71 can be relatively vertically moved within a predetermined range, and an LM guide 70 is provided between them.
The shaft 73 is fixed to the slider base plate 71 and inserted into the hole of the block 65. As a result, the slider base plate 71 can be rotated relative to the block 65, for example, about a rotation axis extending in the first horizontal direction.

With the above configuration, when the motor 53 rotates, the pinion 57, the plate 63, the block 65, the slide block 67, and the slider base plate 71 move up and down, and along with that, one longitudinal end of the bar member 23 moves up and down.
As described above, both ends in the longitudinal direction of the bar member 23 are vertically movable by the pair of mechanisms of the inclination adjustment mechanism 27. In order to adjust the inclination of the bar member 23, both of the pair of mechanisms may be driven, or one may be fixed as the reference side and the other may be moved as the correction side. The latter method simplifies control of tilt adjustment.

(4) Control Configuration of Substrate Cutting Device The control configuration of the substrate cutting device 1 will be described with reference to FIG. FIG. 13 is a block diagram showing a control configuration of the substrate cutting apparatus.
The substrate cutting apparatus 1 has a controller 50. The controller 50 is a computer having a processor (for example, CPU), a storage device (for example, ROM, RAM, HDD, SSD, etc.), and various interfaces (for example, A / D converter, D / A converter, communication interface, etc.) It is a system. The controller 50 performs various control operations by executing the program stored in the storage unit (corresponding to a part or all of the storage area of the storage device).

The controller 50 may be configured by a single processor, but may be configured by a plurality of independent processors for each control.
Some or all of the functions of the components of the controller 50 may be implemented as a program that can be executed by a computer system that constitutes the controller 50. In addition, some of the functions of each element of the controller 50 may be configured by a custom IC.

The elevating device 81, the rotation mechanism 83, the first slide drive mechanism 85, the lock mechanism 87, and the second slide drive mechanism 89 are connected to the controller 50.
Although not shown, sensors for detecting the size, shape and position of the substrate, sensors and switches for detecting the state of each device, and an information input device are connected to the controller 50.

(5) Substrate Cutting Operation (5-1) Principle of Substrate Cutting The principle of substrate cutting will be described with reference to FIG. FIG. 14 is a schematic view showing the substrate cutting operation.
First, the break bar 19 is placed directly above the scribe line.
Next, the break bar 19 is lowered from the support 22 of the beam 9 by the lifting device 81, and the pressing blade 23d of the bar member 23 contacts the surface of the substrate.

Next, the support member 21 is moved downward by the lifting device 81 and is separated downward from the bar member 23.
Next, the weight 29 is lowered by the lock mechanism 87 to give an impact to the bar member 23. Thereby, the scribe line is divided.
Finally, the support member 21 is moved upward by the lifting device 81 and abuts on the bar member 23 from below. After this, the break bar 19 is raised.

(5-2) Operation of Substrate Cutting The substrate cutting operation will be described with reference to FIGS. 15 to 20 are plan views showing one state of the substrate cutting operation. The operation will be described below for each figure.
In the state shown in FIG. 15, the break bar 19 is in the state of the first posture extending in the first horizontal direction.
First, by changing the inclination of the break bar 19 by the inclination adjustment mechanism 27, the pressing blade 23d of the break bar 19 is made parallel to the surface of the substrate 100A.
As shown in FIG. 16, the beam 9 is moved in the second horizontal direction by the second slide drive mechanism 89, and the break bar 19 cuts the plurality of first scribe lines S1 in order with the break bar 19 in the first posture. Thereby, the strip-like substrate 111 is formed. As described above, since the parallelism between the pressing blade 23d of the break bar 19 and the surface of the substrate 100A is high, the first scribe line S1 is accurately separated.

As shown in FIG. 17, the beam 9 is moved in the second horizontal direction by the second slide drive mechanism 89 to position the break bar 19 in the second horizontal direction in the middle of the substrate 100A.
As shown in FIG. 18, the break bar 19 is rotated by 90 degrees by the turning mechanism 83, and takes a second posture extending in the second horizontal direction.
As shown in FIG. 19, the break bar 19 is moved to one side in the first horizontal direction by the first slide drive mechanism 85. Next, in this state, the inclination adjustment mechanism 27 changes the inclination of the break bar 19. Therefore, the parallelism between the break bar 19 and the plurality of strip substrates 111 can be increased.

As shown in FIG. 20, the break bar 19 is moved in the first horizontal direction by the first slide drive mechanism 85, and then the plurality of second scribe lines S2 are divided in order with the break bar 19 in the second posture. Do. Thus, the unit substrate 113 is formed. As described above, since the parallelism between the pressing blade 23d of the break bar 19 and the surface of the substrate 100A is high, the second scribe line S2 is accurately separated.
In this apparatus, the inclination adjustment mechanism 27 changes the inclination of the break bar 19 between the division of the first scribe line S1 and the division of the second scribe line S2 to set the parallelism between the break bar 19 and the substrate 100A. Can be raised. In the prior art, since the break bar rotates 90 degrees between the scribe line S1 division and the scribe line S2 division, it has been difficult to maintain the parallelism of the break bar with the substrate surface. This is because, usually, the inclination of the substrate placed on the placement unit is different between the X direction and the Y direction.

2. Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. In particular, the embodiments and modifications described herein may be arbitrarily combined as needed.

  The present invention can be widely applied to a substrate cutting apparatus for cutting a substrate made of a brittle material such as glass, ceramic, or semiconductor wafer.

1: Substrate cutting device 3: Belt conveyor device 9: Beam 11: Break bar lifting device 19: Break bar 21: Support member 21 a: Plate member 22: Support portion 23: Bar member 27: Inclination adjustment mechanism 29: Weight 50: Controller 100A: Substrate

Claims (5)

An apparatus for dividing a substrate on which a plurality of first scribe lines and a plurality of second scribe lines orthogonal to each other are formed,
Base and
It is a member which can divide a substrate by moving downward from the base, and has a base member removably supported by the base, and a bar member connected to the base member and in contact with the substrate. With the break bar
A first drive mechanism for moving the base in a first horizontal direction;
A second drive mechanism for moving the base in a second horizontal direction orthogonal to the first horizontal direction;
A pivoting mechanism configured to pivot the break bar between a first posture extending in a first horizontal direction and a second posture extending in a second horizontal direction with respect to the base;
An inclination adjusting mechanism capable of adjusting the inclination of the bar member by vertically moving at least one of both ends of the bar member with respect to the base member;
Substrate cutting device provided with   The substrate cutting apparatus according to claim 1, wherein the tilt adjustment mechanism includes a motor fixed to the base member, and a power transmission mechanism configured to convert the rotational force of the motor in the vertical direction and transmit it to the bar member. .   The substrate cutting device according to claim 1, further comprising a guide that guides the bar member in the vertical direction with respect to the base member.   The substrate cutting apparatus according to any one of claims 1 to 3, further comprising a vertical drive mechanism that moves the break bar up and down with respect to the base.   The substrate cutting apparatus according to claim 4, further comprising: a weight mounted on the base, falling from the base and colliding with the break bar from above, thereby causing the break bar to cut the substrate.

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